Ceramic Thick Films for MEMS and Microdevices
()
Currently unavailable
Currently unavailable
About this ebook
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications – forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc.
- Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups
- Written by a single author, this book provides a clear, coherently written guide to this important emerging technology
- Covers materials, fabrication and applications in one book
Robert A. Dorey
Dr. Robert Dorey is a Royal Academy of Engineering/EPSRC Research Fellow, Senior Lecturer in Micro a
Related to Ceramic Thick Films for MEMS and Microdevices
Titles in the series (97)
Graphene and Related Nanomaterials: Properties and Applications Rating: 5 out of 5 stars5/5Microfluidics: Modeling, Mechanics and Mathematics Rating: 0 out of 5 stars0 ratingsMicro-Drops and Digital Microfluidics Rating: 0 out of 5 stars0 ratingsNanoengineered Biomaterials for Regenerative Medicine Rating: 0 out of 5 stars0 ratingsApplications of Nanofluid for Heat Transfer Enhancement Rating: 0 out of 5 stars0 ratingsNanotechnology: An Introduction Rating: 5 out of 5 stars5/5Fabrication and Design of Resonant Microdevices Rating: 5 out of 5 stars5/5Emerging Nanotechnologies in Dentistry Rating: 0 out of 5 stars0 ratingsNanotechnology and Nanomaterials in the Treatment of Life-threatening Diseases Rating: 0 out of 5 stars0 ratingsPhysical Fundamentals of Nanomaterials Rating: 0 out of 5 stars0 ratingsNanobiomaterials in Clinical Dentistry Rating: 5 out of 5 stars5/5Thermoelectricity and Heat Transport in Graphene and Other 2D Nanomaterials Rating: 0 out of 5 stars0 ratingsNanomaterials and Devices Rating: 5 out of 5 stars5/5Emerging Nanotechnologies for Diagnostics, Drug Delivery and Medical Devices Rating: 0 out of 5 stars0 ratingsFundamental Principles of Engineering Nanometrology Rating: 0 out of 5 stars0 ratingsMicromixers: Fundamentals, Design and Fabrication Rating: 0 out of 5 stars0 ratingsNanotechnology Applications for Tissue Engineering Rating: 0 out of 5 stars0 ratingsThermohydrodynamic Programming and Constructal Design in Microsystems Rating: 0 out of 5 stars0 ratingsNanomaterials for Biosensors: Fundamentals and Applications Rating: 0 out of 5 stars0 ratingsLanthanide-Based Multifunctional Materials: From OLEDs to SIMs Rating: 0 out of 5 stars0 ratingsNano Optoelectronic Sensors and Devices: Nanophotonics from Design to Manufacturing Rating: 0 out of 5 stars0 ratingsMicro- and Nanoengineering of the Cell Surface Rating: 0 out of 5 stars0 ratingsBiomolecular Electronics: Bioelectronics and the Electrical Control of Biological Systems and Reactions Rating: 4 out of 5 stars4/5Nanotechnologies in Preventive and Regenerative Medicine: An Emerging Big Picture Rating: 0 out of 5 stars0 ratingsAdvanced Supramolecular Nanoarchitectonics Rating: 0 out of 5 stars0 ratingsPreparation, Characterization, Properties, and Application of Nanofluid Rating: 0 out of 5 stars0 ratingsNanotechnology in Water and Wastewater Treatment: Theory and Applications Rating: 5 out of 5 stars5/5Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology Rating: 4 out of 5 stars4/5Applied Nanotechnology: The Conversion of Research Results to Products Rating: 0 out of 5 stars0 ratingsElectrospinning: Nanofabrication and Applications Rating: 0 out of 5 stars0 ratings
Related ebooks
Nano-Glass Ceramics: Processing, Properties and Applications Rating: 0 out of 5 stars0 ratingsFriction and Wear of Polymer Composites Rating: 5 out of 5 stars5/5Nanomaterials-Based Charge Trapping Memory Devices Rating: 0 out of 5 stars0 ratingsIntroduction to Light Microscopy: Tips and Tricks for Beginners Rating: 0 out of 5 stars0 ratingsParticle Adhesion and Removal Rating: 0 out of 5 stars0 ratingsIntroduction to Adaptive Lenses Rating: 0 out of 5 stars0 ratingsPolymer Micro- and Nanografting Rating: 0 out of 5 stars0 ratings3D Bioprinting: Printing Parts for Bodies Rating: 4 out of 5 stars4/5Nano Optoelectronic Sensors and Devices: Nanophotonics from Design to Manufacturing Rating: 0 out of 5 stars0 ratingsVoids in Materials: From Unavoidable Defects to Designed Cellular Materials Rating: 0 out of 5 stars0 ratingsMicromixers: Fundamentals, Design and Fabrication Rating: 0 out of 5 stars0 ratingsExtreme Tissue Engineering: Concepts and Strategies for Tissue Fabrication Rating: 0 out of 5 stars0 ratingsHierarchical Materials Informatics: Novel Analytics for Materials Data Rating: 0 out of 5 stars0 ratingsTwo-Dimensional X-Ray Diffraction Rating: 0 out of 5 stars0 ratingsBroadband Circuits for Optical Fiber Communication Rating: 0 out of 5 stars0 ratingsDigital Video Quality: Vision Models and Metrics Rating: 0 out of 5 stars0 ratingsCut Protective Textiles Rating: 0 out of 5 stars0 ratingsFilmmaking for fieldwork: A practical handbook Rating: 1 out of 5 stars1/5Nanotechnology: An Introduction Rating: 5 out of 5 stars5/5Designing and Managing Complex Systems Rating: 0 out of 5 stars0 ratingsRoll-to-Roll Vacuum Deposition of Barrier Coatings Rating: 0 out of 5 stars0 ratingsForensic Biomechanics Rating: 0 out of 5 stars0 ratingsCarbon Nanotube Reinforced Composites: CNT Polymer Science and Technology Rating: 0 out of 5 stars0 ratingsParticle Technology and Engineering: An Engineer's Guide to Particles and Powders: Fundamentals and Computational Approaches Rating: 0 out of 5 stars0 ratingsGeneralized Continuum Mechanics and Engineering Applications Rating: 0 out of 5 stars0 ratingsCommunicating Pictures: A Course in Image and Video Coding Rating: 1 out of 5 stars1/5Fundamental Principles of Engineering Nanometrology Rating: 0 out of 5 stars0 ratingsAdvances in CMP Polishing Technologies Rating: 0 out of 5 stars0 ratings
Materials Science For You
The Art of Welding: Featuring Ryan Friedlinghaus of West Coast Customs Rating: 0 out of 5 stars0 ratingsWelding Metallurgy Rating: 0 out of 5 stars0 ratingsThe Rare Metals War: the dark side of clean energy and digital technologies Rating: 5 out of 5 stars5/5Demystifying Explosives: Concepts in High Energy Materials Rating: 0 out of 5 stars0 ratingsMetalworking: Tools, Materials, and Processes for the Handyman Rating: 5 out of 5 stars5/5Surface Preparation Techniques for Adhesive Bonding Rating: 0 out of 5 stars0 ratingsCrack Analysis in Structural Concrete: Theory and Applications Rating: 0 out of 5 stars0 ratingsSkilletheads: <b>A Guide to Collecting and Restoring Cast-Iron Cookware</b> Rating: 0 out of 5 stars0 ratingsThe Dynamics of Nazism: Leadership, Ideology, and the Holocaust Rating: 0 out of 5 stars0 ratingsApplications of Graphene and Graphene-Oxide based Nanomaterials Rating: 2 out of 5 stars2/5Applied Welding Engineering: Processes, Codes, and Standards Rating: 0 out of 5 stars0 ratingsElectric Vehicle Battery Systems Rating: 0 out of 5 stars0 ratingsPolymer Characterization: Laboratory Techniques and Analysis Rating: 0 out of 5 stars0 ratingsSteels: Metallurgy and Applications Rating: 5 out of 5 stars5/5Choosing & Using the Right Metal Shop Lathe Rating: 0 out of 5 stars0 ratingsMicro- and Nanoengineering of the Cell Surface Rating: 0 out of 5 stars0 ratingsHandmade: A Scientist’s Search for Meaning through Making Rating: 1 out of 5 stars1/5Handbook of Adhesion Rating: 0 out of 5 stars0 ratingsNon-Destructive Testing Rating: 4 out of 5 stars4/5Essential Rubber Formulary: Formulas for Practitioners Rating: 3 out of 5 stars3/5Bioimpedance and Bioelectricity Basics Rating: 5 out of 5 stars5/5Generalized Continuum Mechanics and Engineering Applications Rating: 0 out of 5 stars0 ratingsStrength of Materials: A Course for Students Rating: 5 out of 5 stars5/5Civil Engineering Materials: From Theory to Practice Rating: 0 out of 5 stars0 ratingsThe Acoustic Bubble Rating: 0 out of 5 stars0 ratingsThe Reinforced Plastics Handbook Rating: 0 out of 5 stars0 ratingsWelding of Metallic Materials: Methods, Metallurgy, and Performance Rating: 0 out of 5 stars0 ratings
Reviews for Ceramic Thick Films for MEMS and Microdevices
0 ratings0 reviews