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Global Plasma Solutions

: , , , MEMS,

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Global Plasma Solutions

?


Global Plasma Solutions
, , , ..

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,
.
,
, , .

, .

, .

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 ?
Sourc e of
Ele c trons

EM Fie ld
photons h

a tomic
ioniza tion

e le c tronic
e xc ita tion

vibra tiona l
e xc ita tion

rota tiona l
e xc ita tion
Pla sma

Bounda ry
la ye r

Tre a te d
Surfa c e

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SBIT

high

medium

low

low

high

high

high

medium

high

low

medium

medium

medium

high

low

high

low

medium

high

low

high

high

low

very low

very high

()

low

good

low

good

good

large

medium

medium

large

small

limited

limited

good

good

good

low

good

good

good

no

yes

yes

no

no

yes

no

no

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Doping

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10

 Phinodal

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700
0,5 /
25 /

> 70

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11

1000
0,5 /
20 /

> 70

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12

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900
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20 /

60

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13

(C) 2005 All rights reserved

900
0,2 /
20 /

60

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14

1000
0,2 /
25 /

60

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15

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800
6 / + 0.1 /
20 /

72

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16

inox

quartz

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800 /

0,3 0,5
20 /

72 105

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 (PR)

PR

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800
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20 /
+

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18

 BGA

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800
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25 /

72

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Global Plasma Solutions

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Global Plasma Solutions
, , , ..

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20

(, , ,
, , .)

, ,
over-molding,

...

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21

800
0.2 /
20 /

72
2

1200 2500 (
)
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22

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23

(C) 2005 All rights reserved

120

0,3
10 /

60

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24

PTFE

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ceramic

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25

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26

(C) 2005 All rights reserved

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27

 ()

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28

(C) 2005 All rights reserved

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Global Plasma Solutions

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Global Plasma Solutions
, , , ..

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30

MonoJet: ( 30)
MonoJet-Light: ( 15 )
MultiJet-70: (~ 70 )
MultiJet-900: ( )
PlasmaChannel: ,
, ..

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31

MonoJet

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32

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33

(C) 2005 All rights reserved

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34

MonoJet-Light

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35

MultiJet

5
(100 - 1000
/)
~ 70 mm

: , N2, .
> 3 /

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36

(C) 2005 All rights reserved

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37

Global Plasma Solutions

?


Global Plasma Solutions
, , , ..

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38

(C) 2005 All rights reserved

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39

(C) 2005 All rights reserved

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40

(C) 2005 All rights reserved

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41

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42

(C) 2005 All rights reserved

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43

,

: 220-50

(, ,
)
( )
( <10 )
( 10 / )
(, ,
, )

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VOC

EMC

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44




.
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