United States Patent 9) Vinogradov et al. (54) 751 (73) ba) 2 163] [st] [32] [58] (56) HIGH FREQUENCY PLASMA PROC! WHEREIN THE PLASMA IS EXECUTED BY AN INDUCTIVE STRUCTURE IN WHICH THE PHASE AND ANTI-PHASE PORTION OF THE CAPACITIVE CURRENTS BETWEEN THE INDUCTIVE STRUCTURE AND THE PLASMA ARE BALANCED Inventors: Georgy V Yoneyama doy; Shimao both of Yamanashi, Japan MC Electrons Co, Lid, Tokyo, Japan Assignee Appl. No.:08/739,037 Filed; Oct. 28, 1996 Related U.S. Application Data CConimtion of aplication No, 08/507, 224, Dos 4, 1995, Int us.cl Host 00 26/68; 156/345; 1187723 K 118723 IR: 315/111.21 Field of Search 156/345; 118/723 1, 118/725 IR 315/111 21; 216,68; 438/729 References Cited US, PATENT DOCUMENTS 419% Fama tl 498m seus 22 ‘USO0 ISOOS96S034A, ut) Patent Number: 5,965,034 [45] Date of Patent: Oct. 12, 1999 Siete 100 Being al Ts 3281 TA. Seen ts0388 x FOREIGN PATENT DOCUMENTS. O18 6832 101994 uropean Pat, Of. Japon OTHER PUBLICATIONS Sevick, J formers, 2nd Eéition, The American Radio Relay League, Connecticut, pp. 9-1 10 9-3 (1991) “Baluns” in: Transmission Line Trans Primary Examiner—Toi Dang, Auomney, Agent, or Firm ish & Richardson PC 57) ABSTRACT ‘A process for fabricating & product including the steps of subjecting a substrate to a competion of ens, atleast ‘one ofthe entities emanating from a species generated by & plasma excited by a high frequency field provided by an inductive coupling structure in which the phase and ant pis capacitive currents into the plasma are substantially balanced 20 Claims, 11 Drawing SheetsU.S. Patent Oct. 12, 1999 Sheet 1 of 11 5,965,034 22 FIG._2B FIG._2CU.S. Patent Oct. 12, 1999 Sheet 2 of 11 5,965,034 FIG._2A