schematic

76-10752-00

RF Generator PCB Interface (Rev. C, Sheet 1 of 3)

73a

76-123072-00 SEQUEL Express PCB Interlock (Rev. A, Sheet 1 of 7)

97a

76-132986-00 RF Switch PCB Interface (Rev. A, Sheet 1 of 2)

104a

76-132989-00 RF Switch Detector PCB Interface (Rev. A, Sheet 1 of 3)

105a

76-135342-00 RF Current Sensor PCB (Rev. A)

108

76-139292-00 RF Switch Detector PCB to Diagnostics (Rev. A)

117

76-139505-00 Pressure/Vac/N2/Foreline to Interlock PCB Cable (Rev. B)

119

IPG
03-123072-00 PCB Interlock Assy, SEQUEL-X

31-033223-00 PC Board, Pneumatic

31-033223-00 PC Board, Pneumatic

31-033223-00 PC Board, Pneumatic

27-118913-00 PCB, ARCnet LAN, Ver. 3260-0210

module cont

27-10027-00

module cont

27-028036-00 PCB, VGA ISA w/512 k

module cont

02-135342-00 PCB Assy, RF Current Sensor

rf sh board

17-135297-00 Strap, RF Switch, PCB Connect

rf sh board

02-132986-00 PCB Assy, RF Switch Interface

dlm rf box chm

02-132989-00 PCB Assy, RF Switch Detector

dlm rf box chm

03-139292-00 Cable, RF Switch, Detector PCB/Diagnostics

02-00216-00

inside TC temp assy

02-058452-00 PCB Assy, DC Pwr Dist, Internal LPB

local power box

02-10606-00

PCB Assy, Heater Monitor

local power box

17-118946-00 Bracket, Mount, PCB, Side

gas box

17-118931-00 Bracket, Mount, PCB

gas box

PCB, 8 Chanel RS485 Serial Interface

PCB Assy, TC Filter

03-118125-00 PCB, Gasbox MFC Break-Out Board .125

mfc break out cable

38-135444-00 Cable, He/VAC Switch to Interlock PCB

teos box

38-135447-00 Cable, 24 VDC Dist to Interlock PCB

teos box

38-135450-00 Cable, SSR to ILDS Interlock PCB

teos box

module cont
module cont
module cont

dlm rf box chm

dlm rf box chm

inside TC temp assy

local power box
local power box

mfc break out cable

03-123072-00 PCB Interlock Assy, SEQUEL-X

31-033223-00 |PC Board, Pneumatic
31-033223-00 |PC Board, Pneumatic
31-033223-00 |PC Board, Pneumatic
27-118913-00 |PCB, ARCnet LAN, Ver. 3260-0210
27-10027-00

|PCB, 8 Chanel RS485 Serial Interface

27-028036-00 |PCB, VGA ISA w/512 k

02-135342-00 |PCB Assy, RF Current Sensor
17-135297-00 |Strap, RF Switch, PCB Connect
02-132986-00 |PCB Assy, RF Switch Interface
02-132989-00 |PCB Assy, RF Switch Detector
03-139292-00 |Cable, RF Switch, Detector PCB/Diagnostics
02-00216-00

|PCB Assy, TC Filter

02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB

02-10606-00

|PCB Assy, Heater Monitor

02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB

02-10606-00

|PCB Assy, Heater Monitor

02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB

02-10606-00

|PCB Assy, Heater Monitor

02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB

02-10606-00

|PCB Assy, Heater Monitor

17-118946-00 |Bracket, Mount, PCB, Side

17-118931-00 |Bracket, Mount, PCB
03-118125-00 |PCB, Gasbox MFC Break-Out Board .125

03-118125-00 |PCB, Gasbox MFC Break-Out Board .125 |

38-135444-00 |Cable, He/VAC Switch to Interlock PCB
38-135447-00 |Cable, 24 VDC Dist to Interlock PCB
38-135450-00 |Cable, SSR to ILDS Interlock PCB

 38-135779-01 |Cable Ribbon, 40P, PLC to PCB, X64CN1 |Porter |38-135779-01 |

19 38-135779-02 |Cable Ribbon, 40P, PLC to PCB, X64CN2 |Porter |38-135779-02 |
20 38-135779-03 |Cable Ribbon, 40P, PLC to PCB, Y64CN1 |Porter |38-135779-03 |
21 38-135779-04 |Cable Ribbon, 40P, PLC to PCB, Y64CN2

03-123072-00 |PCB Interlock Assy, SEQUEL-X

31-033223-00 |PC Board, Pneumatic
31-033223-00 |PC Board, Pneumatic
31-033223-00 |PC Board, Pneumatic
27-118913-00 |PCB, ARCnet LAN, Ver. 3260-0210
27-10027-00 |PCB, 8 Chanel RS485 Serial Interface
27-028036-00 |PCB, VGA ISA w/512 k
02-135342-00 |PCB Assy, RF Current Sensor
17-135297-00 |Strap, RF Switch, PCB Connect
02-132986-00 |PCB Assy, RF Switch Interface
02-132989-00 |PCB Assy, RF Switch Detector
03-139292-00 |Cable, RF Switch, Detector PCB/Diagnostics
02-00216-00 |PCB Assy, TC Filter

02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB

02-10606-00 |PCB Assy, Heater Monitor
02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB
02-10606-00 |PCB Assy, Heater Monitor
02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB
02-10606-00 |PCB Assy, Heater Monitor
02-058452-00 |PCB Assy, DC Pwr Dist, Internal LPB
02-10606-00 |PCB Assy, Heater Monitor
17-118946-00 |Bracket, Mount, PCB, Side
17-118931-00 |Bracket, Mount, PCB
03-118125-00 |PCB, Gasbox MFC Break-Out Board .125
03-118125-00 |PCB, Gasbox MFC Break-Out Board .125 |
38-135444-00 |Cable, He/VAC Switch to Interlock PCB
38-135447-00 |Cable, 24 VDC Dist to Interlock PCB
38-135450-00 |Cable, SSR to ILDS Interlock PCB
38-135779-01 |Cable Ribbon, 40P, PLC to PCB, X64CN1 |Porter |38-135779-01 |
19 38-135779-02 |Cable Ribbon, 40P, PLC to PCB, X64CN2 |Porter |38-135779-02 |
20 38-135779-03 |Cable Ribbon, 40P, PLC to PCB, Y64CN1 |Porter |38-135779-03 |
21 38-135779-04 |Cable Ribbon, 40P, PLC to PCB, Y64CN2

CN1 |Porter |38-135779-01 |

4CN2 |Porter |38-135779-02 |
4CN1 |Porter |38-135779-03 |

CN1 |Porter |38-135779-01 |

4CN2 |Porter |38-135779-02 |
4CN1 |Porter |38-135779-03 |