Preparation of silicon nanostructures by electro

etching of single crystalline silicon wafers.

1. MATERIALS, EQUIPMENTS AND REAGENTS.

Single crystalline silicon wafer. (0.8-1.5 Ω/cm2, (111) oriented.)

48% aqueous Hydrofluoric acid.
95% Ethanol.
Nitrogen flow.
Sputtering unit
Electrochemical work station

2. PROCEDURE.

• Single crystalline silicon wafers were cut in to 1.25 cm2 square using a
sharp diamond cutter, and the unpolished side was coated with thin
aluminum layer to obtain an ohmic contact.

• The sample then kept on to custom made Teflon flaks in a way which
the aluminum layer is in contact with the electrode and the polished
side is open towards the electrolyte.
• 48% aqueous HF were prepared and mixed with ethanol in a ratio 1:3
(v/v) to prepare the electrolyte.

• 30 ml of the freshly prepared electrolyte then poured on the flask and

a flat platinum electrode dipped on to the fluid, keeping parallel to
sample.
• The silicon sample was then connected to a cathodic current of
100mA/cm2 and the platinum was kept as the counter electrode.

• Constant current was supplied for about 2 min and then terminated.
• Samples were taken out and washed with ethanol several times to
remove any traces of HF, and dried under nitrogen flow.

3. CHARACTERIZATION

SEM and AFM can be used to observe porous morphology of the etched
samples, since porous silicon have luminescent properties emission in blue or
green region also can be used for characterization. Current, etching time and
electrolyte concentration have to be fine tuned to get desired pore
morphologies.

4. REFERENCES.

1. Park.H.J,Bhatiya.N.S,Sailor.M.J, Biodegradable luminescent porous

silicon nanoparticles for in vivo applications, Nat.Nanotech 2;2009,
AOP
2. Parkhutik.V, Porous silicon-mechanisms of growth and applications.,
Solid-State Electronics 43 .1999:1121-1141