Академический Документы
Профессиональный Документы
Культура Документы
, 2002 .
.. . 2002.
.. . 2002.
1.............................................................................................................5
1.
.....................................................................................................5
1.1. ..............................................................5
2...........................................................................................................10
1.2. .......................................................................................10
1.2.1. . :
.......................................................................................................................10
1.2.3. ,
"n" "p" ............................................................................23
3...........................................................................................................28
1.2.4. ...............................28
4...........................................................................................................40
1.2.5.
. ...........................................40
1.2.6.
.........................................................................................49
5...........................................................................................................55
1.2.7. .
.....................................................................................................55
.......................................................................59
1.2.8. ...........................................................................61
.. . 2002.
,
.
- .
"" -
,
,
,
.
,
.
,
,
.
,
, ,
.
.
.. . 2002.
1.
1.1.
,
.
> 106 -1-1, ,
.
,
, ,
< 10-10 -1-1.
(
)
( ).
,
.
.
.
, ,
.
(T ) = (T0)[1 (T T0)],
(1.1)
T T0 (T > T0),
.
.. . 2002.
, (
)
:
(T ) 0e
E
kT ,
(1.2)
0 (
), E
( ), k
(8.614210-5 .-1), T -
( ).
(1.2), :
ln[(T )] 0
E
E 1
= 0
,
kT
k T
(1.3)
10
10
10
10
10
-2
-6
-1 0
1 0 0 0 /T ,K
. 1.1.
(1.3) - 1/T,
E,
.. . 2002.
( 1000), . . 1.1.
,
.
10
10
10
10
10
-2
-6
-1 0
. 1.2.
: 1 ,
2 .
.
.
(
). . 1.3
, ,
= 1/ .
,
.. . 2002.
104 ( 10-4).
10
10
10
10
10
Si
T = 300K
3
2
1
0
1 0 -1
10
10
10
-2
-3
-4
10
12
1 013
15
1 0 1 4 1 0 1 01 6 1 0 1 7
1 0 1 8 1 0 1 9 1 0 2 0 1 0 2 1 -3
N ,
. 1.3.
( ).
,
9 ,
8 , ..
.
,
, ,
. 3.4.
, .
.. . 2002.
10
10
10
10
-2
-6
-1 0
1 0 0 0 /T ,K
. 1.4.
, -3
,
.
,
,
. :
;
;
..
.. . 2002.
.
, ..
.
,
.
.
1. ,
?
1.
, ?
2.
: ?
3.
( )?
4.
?
2
1.2.
1.2.1. . :
.
,
.
,
.
.. . 2002.
,
. ,
,
,
,
,
. ,
.
,
, .
.
,
, .
.
,
.
,
.
( ) ,
, ,
(. 1.5.)
.. . 2002.
. 1.5. ,
( ) .
(N).
N .
, N = 1, 2, 3, 4 ..,
: K, L, M, N, ..
,
,
. ()
( N) : s ( ), p, d, f
.. ( N),
,
. 1s, ..
.
.
: 2s
2p, .. .
.. . 2002.
: 3s,
3p, 3d, .. 18
.
,
:
;
( );
( ).
.. .
,
() ,
.
, ,
.
,
,
, ,
, .
. 1.6.
.
,
, .
1022 -3, .
,
.. . 2002.
, .
,
, ,
, , .. .
d
. 1.6. 1s 2s
,
, ,
,
, . 1.7.
.
,
.
.
F,
.
1/2.
.. . 2002.
Ec
F
F
Ec
E g> 5
Ev
Ev
. 1.7. ,
,
,
. Ev.
(
) , ,
.
.
,
,
.
Ec.
Eg,
(
).
:
Eg = Ec Ev
(1.4.)
.. . 2002.
,
,
.
( Ev = 1),
( E
= 0),
. ,
( )
. ,
.
. 1.7. .
, 4 .
S (1 ) p (3 ).
.. . 2002.
,
. 1.7.
s p , (N 2
6 Pb). sp3 )
s 3p ).
.
, ..
.
(
). sp3
. 1.8.
Si Ge ,
, sp3 .
. 1.8. sp3
( ).
. 1.9 sp3
.. .
.. . 2002.
s p ,
( N).
2s 2p
2sp3
. Si 3s 3p
Si,
3sp3 , .
Ge 4s 4p , Sn 5s
5p .. sp3
, , ..
.
, N ,
,
, ..
, .
. 1.9.
.
.. . 2002.
, sp3
.
,
s p
8 (
).
, ,
, .. A1B7, A2B6 , A3B5.
,
,
.
. A3B5: GaAs: Eg = 1.43 ( =300),
3s24p1 (Ga), 4p3 (As); InSb:
Eg=0.18
( =300),
.. . 2002.
, .
( )
, .. .
, ,
,
. . 1.10.
1.10 ,
, h > Eg
( ), ..
.
.
,
.
.. ,
,
.
ni = pi, i
(intrinsic ).
:
np = ni2
(1.5)
,
,
,
.
.. . 2002.
. 1.10.
.
.
.
(
).
,
.
.. . 2002.
,
..
( )
,
. ,
,
, ,
(
)
(106 107 /c)
. 1.11. ,
.
- n, - p, - ip
in . :
N = n + p + in + ip,
(1.6)
.. . 2002.
,
.
().
IV
, Si, V ()
(n - ), III
(p-).
. 1.12.
Si V
. 1.12 Si, (V
). V () 5 ,
Si,
,
,
, .
.. . 2002.
(1.7)
N d + E d N d+ + e,
Ed - () .
, (0.005 - 0.01 )
.
,
n>>ni,
(n-).
,
, , .
(
) ,
:
n ~ Nd+ ~ Nd
(1.8)
. n .
nn,
pn.
(1.5) (1.7) :
ni2
nn Nd, pn
,
Nd
(1.7)
(1.7) ,
.. . 2002.
, Si III
, B.
III 3 ,
Si,
, B
, . . 10. ,
()
.
,
,
.
N a + ev + E a N a + p,
ev - , Ea -
.
. 1.13.
Si III
, ,
,
,
(p ).
.. . 2002.
(
, ).
(18) . (17) (20)
:
ni2
pp Na, np
,
Na
(1.9)
(1.90 Na,
.
.
1.
?
2.
( )
()?
3. ,
,
?
4. ,
?
5. , ,
?
6. (
.. )
?
7. () ,
?
8.
() ,
?
.. . 2002.
9. ?
.. . 2002.
1.2.4. .
.
(
) ,
,
.
,
:
,
, ..
(
),
(1022 -1-3)
10-22 );
, ..
;
- :
.. . 2002.
f (E, T ) =
1
E F
+1
e kT
(1.10)
f(E,T) E, T
( ), k , F
(
T = 0K );
N(E).
. 1.13 -
.
f
1
0 ,5
0
. 1.13.
(1.10) . 1.13
F .
. , E - F > kT,
-
( . 1.13).
:
.. . 2002.
E F
kT
(1.11)
f (E, T ) =e
E = E2 -E1:
E2
n = g(E)f (E)dE,
(1.12)
E1
N(E) ,
f(E) E.
. 1.12
f(E) (N(E)~E1/2)
.
. 1.12.
( ) N(E),
f(E)? n(E)=N(E)f(E)
. 1.12 (
.. . 2002.
,
. . 1.12
,
, (
).
,
, ,
( ),
.
( 0,5),
( 0,5),
0,5 ( )
, ..
.
.
:
Ec
Ec
N(E)e
E F
kT dE = N
E F
c
kT ,
ce
(1.13)
Nc ,
- (p) ().
*
2m*nkT 3/ 2
19 mn 3/ 2 T 3/ 2
N = 2(
) = 2,510 (
) (
)
m
300
h2
(1.14)
.. . 2002.
mn* - , m
, k- , h- [1].
, ,
:
E F
kT
F E
kT
(1.14)
=e
:
p=
Ev
Ec
F E
kT dE = N
ve
F E v
kT
(1.15)
Nv .
N v = 2(
2m*pkT
2
3/ 2
19
= 2,510 (
m*p
m
)3/ 2(
T 3/ 2
)
300
(1.16)
.
.
.
n = p,
E F
c
Nce kT
= N ve
FE v
kT
(1.17)
:
F=
E c + E v kT N v
+
ln( )
2
2
Nc
(1.18)
(Ec+Ev)/2 >>(kT/2)ln(Nv/Nc), ,
.
ni2
, ni2:
np= ni2
= Nce
ni = NcN v
Ec F
kT N
Eg
2
e kT
ve
FE v
kT
E E v
c
N cN ve kT
= NcN ve
Eg
kT
(1.19)
.. . 2002.
..
.
, 1/T (
1000/T).
(1.17) :
ln(ni ) = ln( N cN v )
Eg
2kT
(1.20)
. 1.14.
.. . 2002.
ni
np = ni2 ,
.
.
. (1.13) (1.15) ,
:
n = N ce
EcF
kT ,
p= N ve
F Ev
kT
( 1.15 1.16 ):
N
N
E c F = kT ln( c ) F E v = kT ln( v )
n
p
(1.21)
(n - ),
, c Ed.
. 1.15
(
).
0
(f = 1),
(f = 0), (f = 1/2)
( - ), .. .
.. . 2002.
1 .
Ec-Ed,
Ed,
(1.13),
:
n = N ce
E c F`
kT ,
F=
E c + E d kT Nc
ln
2
2
Nd
(1.22)
(1.22) , 0K
E Ed
( 1 . 1.15) Ed.
Ts Ed
Nd/2 (f=1/2).
,
(2 . 1.15) . 2
(
):
n (T) = Nd + ni(T)
(1.23)
.
(1.21):
N + ni (T )
F = E c + kT ln( d
)
Nc
(1.24)
Ti ni>Nd,
.
.. . 2002.
ni>>Nd ( 3) Nd (1.24)
. (1.24) :
N N e
n (T )
F = E c + kT ln( i
) = Ec + kT ln( c v
Nc
Nc
Eg
2KT
E c + E v kT N v
+
ln( )
2
2
Nc
.
(1.18).
, ..
,
,
(
).
F
E
. 1.15. ,
,
.
.. . 2002.
. 1.15
:
(1), (2)
.
n,
10
10
18
Si
17
10
10
-3
16
15
14
10
13
ni
10
12
16
20
-1
1 0 0 0 /T ,K
. 1.16.
.
-3 .
.
(1.13) (1.15)
. . 1.16
(
).
,
, Ts
Ti. ,
,
Ts < T < Ti ,
.. . 2002.
(
).
n,
10
10
-3
20
S i (T = 3 0 0 K )
N v
N c
18
10
N d
16
14
10
12
10
n
10
10
F Ed
Ev
0
0 .2
0 .4
0 .6
0 .8
Ec
1 .0
1 .2
F,
. 1.17. ,
.
.
1.
-
(),
?
2.
(
, )?
.. . 2002.
3.
(
)?
4. ?
5.
( )?
6.
.
7.
?
8. ,
?
9. ,
?
10.
,
( P) 1015 -3.
11.
,
( In) 1015 -3.
.. . 2002.
1.2.5.
.
.
.
( )
E,
t=0.
F,
.
F = qE, v = at =
F
qE
t=
t,
m
m
(1.25)
q, m , v a .
.
k (p= k, = h/(2),
).
=
mv2 p2 2k2
=
=
2
2m 2m
(1.26)
(1.5)
.. . 2002.
(
).
(
) (1.5) .
(1.5) .
2
1 2
2
=
= 2
m p2
k
(1.27)
, F*
.
(1.4)
F = qE, v = at =
F F* qE
t= t
m m*
(1.28)
, (
)
(1.6),
,
.
2 2 22
m* v p k 1 2
= = = , = 2 = 2
2 2m* 2m* m* p k
(1.29)
( )
,
.
.. . 2002.
. 1.18. ,
(1)
.
. 1.5
, (1.4) (1.7 ).
,
.
.
(, ).
. 1.6.
().
>
p (k )
. 1.19.
().
.. . 2002.
. 1.18. . 1.19
( ) .
, ,
, . (1.27) (1.29).
()
,
,
. . 1.20
() .
Eg
h /2 a
h /2 a
k (p )
. 1.20. ()
(a )
,
(
). ,
( ):
.. . 2002.
E = Ec +
p2
2k2
=
E
+
c
2m*e
2m*e
(1.31)
Ec = 0,
( )
. (1.26).
,
(
),
, ,
,
).
.
, ..
, ,
,
.
:
E = Ec +
2 2
p2
k
= Ec +
*
2me
2m*p
(1.32)
,
.
,
.
.
, . 1.21
,
.. . 2002.
.
,
. ,
.
. 1. 21. ,
, ,
, v
.
v =
q
E
m*
(1.36)
.. . 2002.
= q/m*
(1.37)
(1.36) (1.37)
2
/() ,
2
/().
,
-3
n v .
,
:
I=Sqnv =SqnE
(1.38)
(1.35)
:
J = qnE
(1.39)
:
J = E,
(1.40)
(. . )
(1.39) (1.40) :
= qn
(1.41)
( N )
ni , :
.. . 2002.
N
=qi ni
(1.42)
i =1
.
,
. ,
, .. ,
.
.
( )
. , ,
:
.
:
r = r0T-3/2,
..
(1.43)
T-3/2
.
, l ~ 1/T ,
(1.44)
, ,
.
.. . 2002.
r0 i0
, ,
(
).
,
, . ,
(,
- ):
1
1
1
=
+ ,
r
i
ef
1
1
1
=
+
,
r
i
ef
r i
=
ef +
r
i
. 1.21
(1.45)
(1.43) (1.45). 1
. 2, 3, 4
( ).
r : r2 , r3, r4.
, ,
. 2 (
).
.. . 2002.
. 1.21. ,
ef, r
iK.
1.2.6.
.
, , (1.42)
:
= n+p = qnn + qpp = q(nn + pp)
(1.46)
(1.46)
,
.
.
n = p = ni . (1.19),
:
.. . 2002.
i (T ) =q[n (T ) + p(T )] Nc (T )N v (T )e
Eg
2kT
= 0(T )e
Eg
2kT
0e
Eg
2kT
(1.50)
0(T)
T.
(1.50)
(. . 1.1. )
(1.50)
Eg 0.
.
(. .. 1.2.4 .
1.16 ),
( .. 1.2.5 . 1.21). ,
ni(T)<<Nd
ni(T) <<Na
. (1.48).
,
nnNd ppNa,
ni<<Nd, ni<<Na ni(T)
).
.. . 2002.
,
.
,
,
,
.
:
(T ) = n (T ) +p(T ),
n >> p, n >> p
Ec F (T )
kT
,
p >> n, p >> n
F (T ) Ev
kT
(1.51)
(1.50) ,
.
, .
n, p .
. 11
(), (),
() ().
, ,
ni>>n
( I).
( III),
.. . 2002.
(
1/2). ,
( II). II
, ,
,
.
II
, ( )
,
(
)
.
,
.
,
: , ,
.
. 1.1
.
,
(
)
)
.. . 2002.
. 1.1.
, ,
, Eg, T = 0K
, Eg, T = 300K
= dE/dT*104,
, , , T=300
, , , T=300
n, 2/(), T=300
P, 2/(), T=300
ni, -3
T=300
, , T=300
10-6 , -1
/( ), T = 300
/()
, /3
Si
1,17
1,11
-2.8
4,8
4,05
1350
480
1,61010
Ge
0,74
0,66
-3,7
4,4
4,0
3800
1820
2,51013
GaAs
1,52
1,43
-5,0
4,7
4,07
8600
400
1,1017
11,7
1420
2,54
406
150
2,33
16,3
937
5,82
310
60
5,32
12
1238
5,82
58
5,4
. 1.2
,
.
Si
Ge
B
E,
0,045
A
0,011
A
GaAs
Se
E,
0,058
In
E,
0,155
0,120
A
A
Pb
E,
0,058
*
Al
E,
0,068
A
0,011
A
*
Mg
E,
0,029
A
Sb
E,
0,043
0,010
Zn
E,
0,031
A
Mn
E,
0,113
A
E,
0,045
0,013
Si Ge ,
..
: ,
.
1.2
.
1.2 ,
=300,
.. . 2002.
,
.
. 1.22
(), (), (),
()
. 1.22
,
: () ,
(), () ()
.
.
.. . 2002.
1.
: Ge, Si, GaAs?
2.
Ge, Si, GaAs?
3. ,
?
4. Si
Al,
?
5.
,
?
6.
,
?
7.
?
8.
Si,
?
9.
Si,
5
1.2.7. .
.
.. . 2002.
,
.
.
, .
.
,
,
,
.
:
n n0
dn
dn
n
= G n U n =
,
=
dt
n
dt
n
(1.52)
G U -
(
), n -
, n0 - , G , n - , n .
:
n =Ae
t
n
(1.53)
.. . 2002.
A - .
:
dp
p
=G p U p =
,
dt
p
t
p
p =Be
(1.54)
(22, 23) n p
() e
,
.
.
,
. ,
,
:
1
1
= ,
ef
i i
ef - ( ),
, i- . (22),
(1.55)
i
,
.
. 1.23 .
,
,
. ,
,
.. . 2002.
()
()
. 1.23. : ()
().
,
I-
, II -
(. )
13
: (1)
(2), (3)
(4), (5),
(6).
.. . 2002.
. 1.24.
.
:
, ,
.
, .
.
.
.
( . diffusio - , , )
( ).
,
.
, ,
,
.
.. . 2002.
. 1.25. ,
.
. 1.25
. ,
.
, ,
.
( )
, :
J = J n + J p = qDnn qDpp,
Dn
(1.61)
Dp
:
Dn =
kT
n ,
q
Dp =
kT
p
q
(1.62)
,
.
, ,
() ,
.. . 2002.
( ), (1.56)
:
J = E = (n +p )E =q(nn +pp)E
( 1.57)
:
,
,
, .
(4),
.
1.2.8. .
,
, (4) :
= G U divJ,
t
(1.58)
G U
. (21) (24)
:
( p n)
n p 1
=
+
divJ
t
n p q
(1.59)
,
, , :
J = q ppE + qn nE qD p
2p
x2
+ qDn
2n
x2
(1.60)
:
p
p
2p
E
p
=
+D p
p p
pE
,
2
t
p
x
x
x
n
n
2n
E
n
=
+D n
n n
nE
2
t
n
x
x
x
(1.61)
.. . 2002.
:
E
=
x
0
(1.63)
, :
E
p n
=q
x
0
(1.64)
E/x (31) :
p
p
2p p
p
=
+D p
+
(n p) pE
,
2
t
p
x
x
0
n
n
2n n
n
=
+D n
(n p) nE
2
t
n
0
x
x
(1.65)
, :
pn p n. :
p
p
2p
p
=
+D
E
,
2
t
p
x
x
(1.66)
D ,
,
:
=
np
,
n
p
+
p n
D=
n+p
n
p
+
Dp Dn
(1.67)
(1.67)
.
: -,
.
,
,
.
.
.. . 2002.
,
(n p) ,
.
,
(. 1.26),
.
(1.66), (1.67)
(36).
,
-
, - .
, n , n>>p
(1.67) , p.
v= pE.
, p , p>> n
(1.67) , n.
v= - nE.
(n = p = ni) = 0
v= E.
.
1.26.
.. . 2002.
. 1.26. -
.
.
(35)
.
(, ,
) p n .
.
p p>>n
.
.. . 2002.
n
n
2n
n
=
+D n
nE
.
2
t
n
x
x
E 0 :
n
n
2n
=
+D n
.
t
n
x2
2n
0:
x2
n
n
n
=
nE
.
t
n
x
(1.68)
n
0:
x
n
n
=
:
t
n
(t) n (t) = 0e
t
n
+ n0
(1.66)
,
.
(1.66) ,
,
.
n n>>p p
:
p
p
2p
p
=
+D p
pE
.
2
t
p
x
x
E 0 :
p
p
2p
=
+D p
.
t
p
x2
2p
0:
x2
p
p
p
=
nE
.
t
p
x
(1.69)
p
0:
x
p
p
=
:
t
n
(t) p (t) = 0e
+ p0
.. . 2002.