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  • Tecnol Campanas de Vacio

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    Jhon Castro
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    Mechanical gauges - have liquid or solid diaphragms that change position under the force of all the gas molecules bouncing off them. These gauges are ineffective below 10-5 Torr. Ionization Gauges - the residual gas molecules are ionized by electrons and the resulting ion current measured.

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    Mechanical gauges - have liquid or solid diaphragms that change position under the force of all the gas molecules bouncing off them. These gauges are ineffective below 10-5 Torr. Ionization Gauges - the residual gas molecules are ionized by electrons and the resulting ion current measured.

    Авторское право:

    Attribution Non-Commercial (BY-NC)
    Скачайте в формате PDF, TXT или читайте онлайн в Scribd
    Отметить как неприемлемый контент
    7 просмотров6 страниц

    Tecnol Campanas de Vacio

    Загружено:

    Jhon Castro
    Mechanical gauges - have liquid or solid diaphragms that change position under the force of all the gas molecules bouncing off them. These gauges are ineffective below 10-5 Torr. Ionization Gauges - the residual gas molecules are ionized by electrons and the resulting ion current measured.

    Авторское право:

    Attribution Non-Commercial (BY-NC)
    Скачайте в формате PDF, TXT или читайте онлайн в Scribd
    Отметить как неприемлемый контент
    из 6

    Tecnologa para Campanas de Vaco

    QUIM 6216 Dra. J. Torres

    Partes de una campana de vaco y de un sistema de anlisis de superficies


    instrumento de medicin pistola de iones

    transferencia "gate" de muestra

    Conexiones Flanges

    Valves

    Conexiones y Sellados Flanges and Seals


    Elastomeric Gasket:
    Buna-N (nitrile rubber-NBR) Silicone, fluorocarbon (e.g. Viton-FKM)

    Conexiones y Sellados Flanges and Seals

    Creating Vacuum
    Compression and gas transfer pumps Entrapment or go getter pumps

    Rotor Vane (Mechanical Pump)

    Rotary Vane (Mechanical) Pump

    Turbomolecular Pump

    Diffusion Pump

    Sorption Pump

    Sublimation Pump

    TSP for Titanium Sublimation Pump

    Sputter Ion Pump

    Sputter Ion Pump

    Cryopump

    System Bakeout
    External bakeout Internal bakeout

    Measuring Pressure
    Mechanical Gauges
    have liquid or solid diaphragms that change position under the force of all the gas molecules bouncing off them. These gauges measure absolute pressures unaffected by gas/vapor properties. Unfortunately, this type of gauge is ineffective below 10-5 Torr.

    Gas Property Gauges


    measure a bulk property, such as thermal conductivity or viscosity. They are dependent on gas composition and are effective over limited pressure ranges below approximately 100 Torr and above 10-4 Torr.

    Ionization Gauges
    The residual gas molecules are ionized by electrons and the resulting ion current measured. Ionization gauges cover the pressure range from 10-4 Torr to 10-10 Torr.

    Diaphragm Gauge

    Bourdon Gauge

    Capacitance Manometer

    Thermocouple Gauge

    Pirani Gauge

    Bayard-Alpert Ion Gauge

    Cold Cathode Ion Gauge

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