Deep-Submicron CMOS ICsDeep-Submicron CMOS ICs From Basies to ASICs Harry Veendrick a tenbidgenstam Deep Sabian CMOS Ce Ratan sci Prt hse rpm Pepa Pa Senses ogee, 186 Sond gn et 20 etree etree SSbecremneecamctaranon Se aoaiee omen =< ‘Re cu le a ime pati pay ea ‘Sui ope ed me sne,Foreword Dipl ail cn ol dig ‘rede compecy 00 «ag chip AL th me te ce and ‘Si perp wl afi he ern aly ade iy coop ties COS cna rece {iS emi am wok roting 2 he deeb ‘dng, tare caper cp ah, atte! propery ‘ory ut prs vagina, Thee some seta ‘Elettt CMOSmotans wgHetre cpr pombe pc “Thr om ton evi compe epee bt compete sim vo tal pce of MOS AST gh. Sang tba {EM08 ds and chs ete ad sym, kas he Si tern caf peti etn, ow tome sgl ney spf oe lings her “net pak tad re row a ath alesis, neha how {Sima ccklew protien a pap tone op, oti sed detuesing of Sepaanren cape Ply tin bor sar “Pl tek te St sone myn ak da coe sepa of ang el neti yen on dogo ao, ieitSrtetim i suhrsoeesarchn dona td a ‘foe pa oper racine ahing of CMOS eto Prov tot snd pongo obo aa Tony amend {rt oer ved nth da tet sn toe of SS syecoonnon a wll eageng etree hat ct winded tbat a cnr en on wen, Some 200) igo De Man, Pre KU. Lawes, Scie Rare Pi IMEC, Baan Preface to First and Second Edition An otogatd cei (10) pln of maemo nario whe ‘haber of exten eampoamt ar tered. The tao fect i! eomponeta ingles pce faton. The min. ‘ctr sine sly eon bat berate nce alm a eae oti inant moderate produ. The rt 1 a trot by ck Kilby In 190 Phot oth devin ad ef ‘entra shorn ae 3 Fig tate the atest pope EC compen. Th Sure sows the nr of xapenente a ‘roend Ce od he yar woh the Cs wnt pete. Tie "intupingn comply erry te jar ma pd by Ms ihe (INTE 19), ich ol ald igus 4107 itt ection fn 1 tly. Figured sows rte BOT tanto “The ditt Ser shows i are 3 ‘Server oth antes wee Dg Avi ren ing (DAB) ci cigar onan more ans allon airs Pre 7 tows ie milion asst Comper Programe age Device (PLD) gues thet in IC manufac tcp rn 1989 {oN About Sof aI ae tw tne in OS pee ‘Thse poco late the ston of weal tun 9 alin of ‘emponins ona chip wna Ty re rhe mastte ‘menor so eae VIST (Vey Large Sel nero) i. ge nie magne of thea sinterigus Growth th bar of ony p12 i iB gu 2 Tey rn 18 0 209 (aC) “This oak pov ing ntl apt acne with CMOS {ce The pies preted nce ran enasental pti slog, ig so implemetaton sees ae alo explain p- ‘rbd wl cuent and expand doves sho ree on trai tet. "Phe emt ofthis bok ae ted on the CMOS stn of a ‘adit couse eid “As inredctin fo 1C Continous rerio sd expan of the cote matarial nea ‘Si book hy eematt th TC Indy. ‘The lela he dar mins mk this book sieble iredaton rds te st, CAD serps, tt eng, ray einer era ‘Semel penal aod IC pans The txt abo mtb fr Sc grater and sderrsaaes yd ngeing cour ‘Gotidrbl efr Beon mc o ean th oho hia ook sed nl stl fee ae ince The Ire ur of ‘dam and pagan shold ee th explain. sgn ‘Sapam ral reat ig‘ rele the et tat toe tan 95% af al madara CMOS 1G are gta cee Howere, {he materi petted wil alo provide the angie dst with « ne undetding Up attr an pean of ‘bern CMOS cei, The caper are summa bse ‘Ghar sentsne deta ton of the bre ple and ‘uot py ofthe MOS transite. ‘The ermine ‘rng san fx MOS dl ant expintin of het Shara rte th reaontip betwen oes artes he cmmoar oon fase dimension edo nse ‘elton btwn the partamanes pdt by te sinple MOS tx ‘ls nd ein tasor behaviour The tof ampertre and {omy on ths beara re eapnined ncaper 2 Tn ion to fh indoor on teasir hd cre prin, tells cae ‘le vece dve iinet ready “The aio eco the mature f CMOS 14 ae sine in per 3 An explanation othe tpt cated oatgrapi a recente prove. Tl rec i> i fan vend depen teeny fr the mane Wt moden VS ent "To din of COS cet ted in caper «A nto. ‘on tthe peromance pects of eS eats prov an exten‘etl ceed fr ht xl of he CMOS dng "MOS chs and ni deri ae do ei te pe cll devin in haps 8. Cage vis (CCD od ‘Mos por tremors aang the spe vo Cag 8 “ite pret he amelie BLES ie cee eprom alent Dt af he IC sie ‘usable oto re Th mary of oe ‘aeunry perdi amined inher 6 The base ra {Soo ce he gating pp othe a pera pd Side gs es i apt pri ‘enous nC chy nw tanh itp of a pte pean, wih Sls er en fi fra ere rb 1 gn rien we ike enn sid CAB ev anil aos Sern thule ar wel ole «spurte cae of VLSE 1, STE ae spel hy apart the mana Ths Toten 16 AS1) ae enei th gr a w, Met eae i stn ho th cabo rae hy capac pags ba SER ach" a OS digas sth tn pom ‘SEba. Ghape'¢ poets oops eine rpor’ pias {Be CMO8 eng, mw a there vs ein a Tirvud VS dn comp, coined wt ihe fas ce create «Me weit peels Ths ects have ‘tte smote ign egy Spit {hIOS 1x Cater roo ects he ei oreo taunt mais bath ray signaling ara a ely oting. dbs td pacing impeach connote itso Ce pov oer ‘Tie natettinart tc hat spp tng, eka ihe am a nl ter Si omar aa porate ges aah tatu ed Be seat Gta elt o 1 potion at ab xa Ine galt and eat. ‘The connate of ratator dino amoclt with use proses goatin® the et oth fl ehaper hap {er} ‘Ths scl bs wr commen etn eho ‘Si 1 perfrmanee The ren rene pclae td he Atsohiedeflce on relay an sgl nary ae the ma ets eon. The xpried conan of ft natarton e ‘lee. This pois gto the alleges acing the IC ‘Not all ata i this ook icmpetely spat fom my id A ot of bk appease to ma te preted tral Hate ‘bear. Coeabe thse ade oma heres at empl and cnr | apolar pasion, Acknowledgements ht expr mya oll hee who ctu 0 the = ‘nti inch ia crn, leat ta manip Trl peril otha Dick Klason reviewing caper 2 sd Ant Mtr, Pave Wore, Ra Woe, ob Vera fr he eve af ly top, ad Cape aera fr te Heap {opie in per ako wiht sine ask Mich de Lae fo ‘Mob and rave af th acon on paging an Stead {evan Mererg rth ei othe VEST apt, Rage Capen [Kor ran der Sande ad Rol Sater rh reve Us ery ‘par Pau Smo the yl sen ed Eun Manes Wout othe tet pn. An Tt to thnk Ed ag fee of th nal hago wala amet Lt tat, {se eto thn Hara Ptr fo dein tn CMOS lots sa ‘ese Saber fe revising mi ith Denil, al colo ptor "an sey el to al tha wh tena the sue, Bene ‘he ea lato asec theron al ensue ‘cit coveted othe any ad empntee t bke Ts ato, want otha Pip eer fr the ception 1 wu fide, Hy Alles om Sle fr he crowing marl ‘st conta he alah tet rpc andthe Cen fo“Tangy Teining (CTT or opting hie wk Fil 1 wih ohh Dera don Elbow! fr he conaetoae citing td pesating wrk, Hielors oem high quay onl Teor sont hem a ton il wee hed with prt tothe previo Lat oad es ‘hci de od rota ha pels i te te Fg 3 Th dt fe in ek ‘en bdo wmindacr tcl an spe o as pt Te nares ania° ” (oles. PirOverview of symbols (Coe tae indepen teste eapcane & Dy" dct ety wy dts er (partie) D)resletage canal eg depen tarPOEpaerse seep ? apspesen, no SePppeerre cy ‘ct coma Sot ere aie perma re ie permet "ehtie pron f lion ‘hte sent ‘endo ad ery ee ‘nae ee ‘se ors ee ed strength “ale but nergy el ntl ect eld reg ‘alberta el ent ‘tal cei Bld rege Siete pot Fem patna ‘ut potential betwen uc and eae lok teen ‘aroma dock quency {eto whi xpress atop tone daca ‘it ag ae ‘berate ured ‘Stes! raion dnscarocnen ‘bie drains cae ‘independent cuest eon dest ‘ota rntnt ‘curettage ad held wage oe PETS BET PERO plication for ‘eet a te ‘ie rit case ath and adc ‘ete canoe! ong of eee ete {Pa woe porate ‘ttre cari aty (Sanwl hole may Sabatate doping contain ae pee ‘hg ety pm dnote “pmumie poe dipton ‘ae power dination totes sing cr oe ‘emeeary charg of eg doctroe ‘Epon ae charge ‘nur chuee {eal ie dng oth everson ee ble charge per ui ea ne case {ial rn the emis resance, Tied retinas nit rstenceo chan rsaace ok peo tine ‘oder teec te ‘ence vty ‘ese mtr way ose ka tage ‘nd ota ‘ote ae tag inne wns ‘ona arn Sc ence Err stage ones yolag of arden fatead ae a wont wes (piowone voy Ts amor tect age ph ng inp wage Jenn gs Non age ‘lo ph hough ge ‘stein (tn ba) wage Poca ge ‘Sitenre sage ial lta ‘tpl car el lags ‘shanocoet emir teak ea ‘Satu el ag 23108 waar rl ge {0S tse thal tgs Fe tensor eed tage ‘Sept stage sm a pon = Pocmeipedt hl tgs om Ya Ye Wer ip (Bp rodent aol wag ao dai Pree deer thet ogee dee tear ‘MOS trie haa wh eens cael with trnite pet aio HOS mir spect aio MOS traitor pec atoList of physical constantsContents Pretice st of phys constant 1 Base Princpes 12 Teepe pence 13) The ner ager MOS easier 151" The Met Osi Semen (MO) cpio 132. The mee ae MOS trenton 14 "Deseo sine MOS freoe 15 The tachi ob (bck gt Roy ot) 16 Fact hich race bbaicr ofthe HOS a 17 Die po 03 is 19 NOS uate nto 1g Capac in MOS rice 11 Conchlne 12 Retro 2 Phosleal and geometrical effects on the behasiour of MOS tranntor 22 Thera Bld tly gee 23, Cairo degation 25.1 Tompercne- depen cari mb rion 232 Vora nd atelier moby epedaton 24, Chana nth dation a BET “Chanel gh ofan 242 Suto dan cok 243. The Baty tage 125, Selbchaoe ete 252 Nanwwechaonel oct 2253. Motelig shana tics 26, Pencthoagh 222 The late Seid ia MOS wanes 223 Impect ntaton 224 twang 215 felocng the marine elcric ellin'» MOS 224, Waklanson bus ef the MOS 20 Conlon Manufacture of MOS deviess 312 Litbnrphy in MOS procs 3 cing 24. Thal ioe 35. Depeation 38 Difiin aati 34 Das MOS tina {SRL The bse lo-fi MOS pros S82 The bse Campemnary MOS (CMOS) proces 3K An toed daopstmscron CMOS proces EA Siena aninaer CMOS (SOLCMOS) proces 39, Contains see 1240 Raton 2 td 42 The be m0 eee 424 Ttrming loge fio ito a aS an 43 hcl dng of C08 cet 44 Digi CHS eee LE Tatodetn 122 staan dene {44 Dyaune CHOS ceute AA Gtr typ of CMOS ces S46 Choming » CMOS tnploneston LAT Choking state 45. GMOS opt nd ona 1/0) dai {1 GOS input arent 452 CMOS aatput bull (ies) 46 The bgt pre 463 Seok digas 464 Brample athe ijout jrocure 465 Gaiam be gost dees Special circuits, devices and technologies $21 “tno 522 Base CCD opeaton 16 1 a0 20 sa u 4.22 CMOS imag semene Powe MOSFET tuniore E21" Intoduction 532 Tonolgy an open 534 Appts BICMOS dig este S41 Inet S44 mCMOS seat permaane 45. Puta exectatns ant malt ted once Memories ‘eho i A 632 Sate RAN ND 533 Dyamie RANG (DRAD) C34 ighpertiemace DRAM: 28. Ene meaty 626 Redonda ome meme G41 toda 42 vot RAM (PRAM) 643 RantOnly Meares (ROM) G44 Progammable ew Only Snering 45. EEPROM and hak mer S46 Non-olate RAB (VVRAN G47 BRAM ftatery RAM) Gnesi of Cv mein ‘Cann at 26 an a SESSESR ER1 Very Lange Sele Integration (VEST) and ASIC: a a "icon Dial 232 Sym i 733, Puncoa ll TBA Ravi 138 Tams 231 Loa oe! 738. Condo Digi Vl dg 342 Thedeage os 748 Branple ce gts Bom VHDL dei tot 182. onde cn pines 783. Shales byt peomnton TSA. ROM, PAL ot Pod pet phonetics HAE. inci tema 7 Pranab ag Deve (PED) 368, Rove dig sppoed 169 Thee hyo implemen Cota Rebvenee Baar 1 Low power, «hot topic in IC design a 3 u Saas of CMOS poe: sotsangton ‘Techni oon ow power S81" Redon of Fa. ty telomeres {832 Relation of Fg by ecolgy wearer {824 Relate of Fg by end ge proces Dis opin x ow poe a2 a BE SEESESS S41 Raut of Ps yds moses os S42 Redoton/tininaton of Pay by deg masures MT S43 Merton of Fy by dei nen Mr 445, Compating power ea chip poe, a alg pesspesive 38 88 Gone a 87 Reece me 9 Creat reliahiity and signal iterity in deepaubmicron ‘ean ‘as 21 aodtion me 82, Depa eishtty i 925 Blcsostate debate (ESD) and ts protection 390 324 Ehrman Po 225 Racer dedi Ps 93, Digs sg itenty is St nrodutin a 932 Choi dbo and xe ning is © 38 933 Cink gations syteeostion i et (chet soon vip 0s 34 Phenomenal tog ere Butcians 2 S28 Thelnonot the trconaetin (tain tod deo) = vg 238, basen = 35 Reon = 36 Bane o 10 Teng sing il pacha “wo 102 Toe ie 403 Yau as eM iad s 142 Pada erie se 10.43 Dowty se ending tse ©2888 1084 Adm pudagg ool ry 105 Gani and eal pang ne *105: Quay 1082 Retabay 10. Poet ft sion pote 1.61 Prone wih ting 1062 Protens cased by rg o e-ospein- 1063 Prone cae! yma sign 17 Piseaicn dbo alr ene 1071 Tarrio 1023 Dingman Sho pte 10.74 Diagn i peprobing 1025 Ding with ues cig 1076 Diagn by photon eminem PERE) 1077 Dingos yea bese cigs 1078 Altre Ere alas techie 1029 Regne 107 10a i Pie Ati a Ds Dba 108 Consion 108 Ree 1 ict of seating 08 MOS 1C design and consequences 114 Soa ensnqne ool iC dn, ALA Sealing cesses el lip eae 12 Seating coeur fr overall ig rey 13 Sci comnqme ol gp ety 114 Potent laos he pcs of walng 18 Comtaene 117 Rebeecee, IndexChapter 1 Basic Principles 1.1 Introduction “The major feat VST Very Tate Santen) celts are ‘etl In CMOS tng Pa exnnpls we ser (Gt St, 256 Aft and 1 Chat), merprommor aed ign proc 1X god fendunental cata! of te MOS devi ther ‘ri fran tang of bdo and manatee of odors Est crete Ths cbpter dries the operation aed harcore GEM0S seve." matrlrepemnt fo toi aston re “The arava MOS repeat he Mtl, ride nd Sencar oer ud tol ery wens ofthe MOS trun Tbe Feat bat othe operation of MOS sss Bele Prine. ‘Thi elope te, with ated pubratons Et flab 1 Ll in Caan athe USA i 590 and on id ty Hl odpm of Cie in ng in 1085. AE eh te owe, inset bowed af atrial pope rsd {ei neh werent The ape develope face ‘alerpaty so indeed the deepen ofthe MOS tater Tagline rit eninge re 1.2. The field-effect principle ‘he eit yicpo ep with he ld of re 2. Thi Spur sb metngue oat, alle co, weith length L, wih Wand thie ane Th ston wa In the ail tre tn mabe rg cae." conn pe ad ste hone Bl of gate se hae re the Slaaroas to sogsie th aver ely ~ ya BT shen ‘mbt va npn Th dct oe bie pat din O° ho rong care ety te produ ote rege hr wlan he aie mg ety es a “2 = igre Ll The eset pene Ate etd itt sore the ena eprom itby an inltr of hicks fy A chang in the fate voltage V nn ‘he charg denity pn tbe hae The ate dy 3 Uneere ‘deere by Ve Example: Supp the nestor son dined (810) with a hho fm, (tq > 10"). The pte apactance wl hen be abot? a “Theol gate epatans O re exprentel lowe qa T 0 W-L A chang inte age 4, Weds tont ae‘Tha ap = AE Gt W038 maya ae 1.2 change i ate vliage to ane tend fee i cen ety, he ha fiowing a xamiontion oo mae eva the pets ofthis expresion “This hen 10 econ de fg 4A 10 ‘too (23 10%). This pone ovine tiv umber of eit rene eopper waa aal (Case b Theat miei fe epg sin. "This has n= 10 conn a hn 4 ‘he tranonnetance 9 of MOS trator the mato of change ‘chara een 10 Ue comeing chang Int oa: towne SE Theres gq = Gh SE In hice a trmerndctann of 10A/V ror caso ka lta = pin Made TC tehhgs lw ie els of rom the above emp, cha tht Set devi ca ty malted wth masofartor materiale Aware of th tiene ‘ed copper pide as eon 190. Carman ee Aevng te ea Aine at 1960, Howe, ase MOS teasers fin mas the ol nh iene ‘eathroagh fr the at Soop of MOB trae ne with ‘shan inp son techno aed the scomparying oar {othe pla pone nthe andlor ace “Geer ects neta i sen bern wid. scp itary scien an bs th th mater. ‘Thaw pect tine rege product to fection creel a «main operating Shum isonly 10°, whl a f oieon 50°C A comparison ow ‘er germanium (Ce) and ion (1 materia sta preted ba a aaa as ante =e cotirng aks Eccl a] antes [asses Sexes cg | 8) | ts 1.3. The inversion-layer MOS transistor A teenie ing of lero ayer sMOS taster, o spy “AMOS, she a gue 12, which wed to explain Hs tute ‘ours sd drain Th gate cetrode' tale above the zea be ‘on then. This ec ether wl ploy ese tolybenin ow dop and ths bate plete Seon ne. Normal the sore aed ra ras aly ped ‘mae sie ence, The inane ot 0 pa gadsre ck fo, whee Rs th sh rst fk ma {ela shat rstanos of the sure and dn sar tly rege from 310100 1/3," dope conser i the pepe sate yprosiaiely 10° ~ 10 ate per a wile the camel dope ‘ret! aisneet platen tc) i been 10 10% nome {era A pcan aso die sth above meant {hatin source and dan nan peste igure 12 Crome of a eee nMOS aniar (Character prnnten of MOS rtitoreotictire 2 ‘Those nade the with W aod length ofthe chara! ad he thik fh ating ae wih pre he ge a cha To ‘ora CMOS VLSI sity hom valor of Wanda {fom O12 03 na = Pun 10pm Conus deep tat wird the ol the ie The dep the soars a "Te egy tand shar ade applation tthe MOS tanstor se roy sai tl An winding of sary i ‘Sree ew ele camo he bhava othe MOS "Tetra ofa ie lion tm wn in figure 1. Thi atom conpriea tion, a inser all nd an eter el. ‘The mc {eo protons a 4 pens when hlconaa lero ‘Da ofthe ctr ae Hote aerate nthe er she." poe charge af the protons an agate care ft ‘Scan cmpenate cack eer fo poduce as som wih atta ‘arse Pe 1 Th wea i ta ‘The slronin ano ny pose tal ery ler. Tene Ieee gruel iio carey ban, which are parted ty eeey ‘Pe coy tase snp Stee sat are te salen ndction ta: Pgue shows eto ad he ‘reg ef pias materi. Th aos eectone Serine ‘he pl sd Ges proper of antral cen } | sine Figure 4: Sma pecan fe ty de 2 ‘yp so mt ‘alm ba ig 1 hows he Bond hatte lca wth eibourng stm oye sco ralOOD ® Figaro 16 Son cosa ‘he cross conductor aly oom the ace bat he Stor pty vein, ashore nr a. nan lator homer, fete ass deta ns oc the conden and. Fig 98 ‘Ses the etal gap onal asa Whar A feces bw sce ter crise an na, The ‘ny ante cf ara org oe he cocina od ad ‘heedrn hae an oa mbar of poy carge on oa, nthe mice band. ‘This rode antl coco mechan « » ° Semiconductor trae kate up V of th mem The Intodton of leet rom gop ot Vn zona tal fron apr "oor nom. Th weed doping ron dranatily cps the yal prope Te flowing ae ‘Shor the lato of wernt mea the pd rem of ‘een WV ey aba — Rises line, | Potion Sana) |S fine" alent fr burn eased gre tu Boon oe ecto sta sco and canto there prvi a heton ‘mei frabon with oe ot be mihboartng io ws, The ‘hc mon lteter, Tr he cn betel lav ‘ily wih testi cory farina 00356 awn the sory ban dng ge ‘Simeon apy when a rowp V tom, ch porpon, prin hot, Tn ntl Te ‘Se reglarbodig ttre o ale tn thre ey ‘mei done htm te ring mys etn. The fem ons into alone ate, which ete wo eno can “mpat toms "Th nr vl indict by Bn gr 17 el be Fe ee ‘As ceton with theory ua gil proto eto a he ‘ance dan the concn ban. Te probably emt 08, "Tha Fert elf ail monde ten sd a eit Er vel “The Fer Bh ps sro ‘cle ated arr he vlence tad, eee tthe ‘st tad nan np asin Th oe hyad diagrams wow be wal to xphin the bait af the MOS teams Thisexplaion i precedente sete ‘Se operon othe MOS capaci, 1.8.1. ‘The Metal-Ovide-Semiconductor (MOS) capacitor Figure Lf soe rm action of bate MOS capstone ree {are reais! to 8 MOS trate thatthe sore al ln ‘itis gos a oat } prssersdesrsser reer eaees 7 we o oo oe salen Mra ea] 1 Acsmuason (i) Deleon (© fade dg ce ge tom) $e posh ae) 2 Spee cr ee) Fgh 1 hn etn of M08 srt witht wae ad din ‘nTime cctane nen ue anda ‘The ptypemistae mae wth an clr dpe striae brs. ipod anda ara wage spl to the gt doe sown in gar 8c The aque Cg ot sin a ‘compete by anil bt pote care Ge site te Sect ty potiey cage hs wi cme a the Sibyl Th sre he my she carr inthe State. This rami’ posse comin th pov char {Ge sta renner nn ae coe ‘Toerhing neon cp be wed Hl pl tea tient tn pers wn th pet th gle aod lesion with rec 1 the a abt Ts anton isshown inthe seston fae Th pasve arg: wisren on the lini ue mnt be outer bond by 2 gai har a he 3-50; inert in th eistate Pew poste. cel ‘nin tepid way othe sate sare to oda wee ‘hare dep ner. This ele’ prc tap en the eae ‘rgot te deletion lero th pote sane on sh sami (quest. Chay, th with th depron le nth li ‘em suton& propos tthe te tlt Ie linger 6 ‘be pm a oy cong tc ‘hein er MOS tess. Togo ter wert ‘egy, Poon aw i pl to th ret regs ot {he OS capacitor. Thaw rps nde he luni t,he 0; ‘art the depltn layer in ic and the ype alin abt. oli arta to vette the shag dition QU, hs flee Bl (2) ath ete pent fe) i na rps a ‘tocton of the dns «ow th 40, et P40) “gel a shee 9) = deel potati t postin 1S ase fom the Si 510 teres 2 = sac cae: ‘Thestannn in wie 0 pace chargei pris comsdo et. Thi ‘alot tne nthe $0, flr a which ee p= nteeton of fea (1.2) onoe gin tesla Ea) = CC. =eteraton conta, Ingen formula (1.2) tr en tlt potential 50 = C.-24O “Th cell in the naar th coat and the ese po ena ear Sct of the deter» om the 50 ntertce ext ation In whic 8 comma pce cari poet ‘irl. "Ths ened ob ire the delat aera wth ‘nd 84 = the ttl amber fd ntgating omul (1.2} once ges he dete lt Be) Me, Intogting Srl (1.2) ew gs lat enti i the phe son ie Hott soee, ‘heer the ace ll in deplion ager with tnt pce ‘Bare © lina con of we te et pote gee Ssortion of = The sare carina dpi ae nly costa ‘thon he dpe of htt hasta aan al Gia = om the 84810, itr, practic, the spacer probe aed tothe dpe pre whe ext te mete ‘The aluminate nd orl en cae depletion layer re ued obec. Te slic pte | thw rego are thre conan sd th let le. "The abe olson aplaton of Pion nw to th 308 spctorteillstated gue 9, Dusit the agra ‘uc y dileracs betwen tenet oma of an non ‘ide. tre age, the slr lapse esr "be round satrate oie the depltion region. The obaevaton Ua the eet: potential sie atin ne peti er is parity importa.“2 2 3, iene he cece Figure 1 Tena oa MOS apa nd he mie age ‘tin Qe), ee Aas) adr posal) 41.3. The inverson-Iayer MOS transistor Fgire 110 shone a cranton of an MOS tania with OV 98 ‘Motes eran." ge a cnn he aol ney Dad Sing Mel One Smear pa eager {tthe alt engy had dagae au that th reno ote pt dosnt at he ditrbton ‘he a lettin the oot, WE one fhe elton res south 9 eam te tire patente ad {o'h homopenne an dei of aa seis a [F=0) Tae ‘chang othe gee aad ora ang inthe alm Goel,{on lon ona Oe Fetes ofthe fen maeia n Ue strate wl ie, Td work etn (tbe wor aed {rear sn Ske rom te Pe eet ri) ly i ‘When te wage betwee qe and suc e (Vge 0) and Ube tl gue Wt ol Yo te icone, ne il Sow fom he tal oth emo orn ra tl wags a tes tT lg a inte ata andthe emir seen Sg ‘Ther, re wl beh cna prea ees betwen ‘eat a abate ch cae they tao bd aon ato wate 0 faba he eta ‘Need oper tt bat cto ce ee es {wk foto fh al (sy) ad he ned () b Wp = das = f=. Sce eli hh te ev serine tal eae ‘rote cae anda athe endnote whe 4 sma pov vatag ape eae le the wc, de {tae awa OV, be a Se 11 Tho ge char ‘Sina ys tng pk ae he eon ere he ‘each apo ishack ein fr ee ‘iced, Le a dpion e. Te ick of this det r ‘ecb the portlet tho wre. Tht way Vp ow cof wo yt 1 The tage eo te aide Y— Ve 1, The tg cron the depeton ne “Th cpmitanse ete he gat date sw ii of the eo cnaneton of the ee xara Ca ad he dept ye “he tet Vin ue 1.11 rye the hres ete f te ‘emir The gue voltage a nl he banding the ‘Hoa aie encly 24 Fee the preset, Vp ane to be Pan ot rene 0S wa sn igus LI: Cnet of» MOS tame nih Oye a fa and te rmepandg eg nn aga te gt voltage fre incre (Vg > te he and ening ‘thle willbe bg an. Tuto tae Inu 112A compat af gue 1? and Ste 1e reve at ‘oem tad i he ellocn outs coreponts 6 an ype ooFg 112 Crowson f+ MOS tir with Yo 0) ov Ygci=0¥ and comopenig re a an Duo in tn sls, owe, sh coset tad enesponds wo 8p type semicnctrey row mie ge ha rere Ben ‘Spies stons sendy pr, he inert Stn whth at ar mbe mgat cng carers Ceaton i {hoo vrs er aly perl by he ton, we fee nay errs nthe pipe ntntete. The reson eet ‘sting coe ete fhe testers soar an de No ‘et vs inthis hana thew bn vag dilens btw {he ain and yours tral T= 08 1 Vx = OV. Tho me ‘fel ni cal ean ecole bythe teste wea Atcuming tht Vg > Vy fet of ines Vi ot OV ae a ‘ed at the ating res 1.02 Nin< YF "Thi le she hero rade ren ofthe MOS trae’ peting cae 2 ie pit amos aks pao ener fo te 20 atest rp 8 Ya Var “This ee soratonrgon ofthe MOS tasters opting ‘Tee tae eon ar dsc partly the owing pagsears retrain { KEEP ag eet ds at eae gi sae (eee oe cies io aot ou ae ee Sacto “eet at ase ts ‘yg ta cr Soca ee ce ee eee Sic So mime bibsiea gin te nat oon ior ftp gue 11% Conneaut cpmatigin te in de) >ve>0 Van Me An incre Vn ith Vp const doce the weg fren be ont gin an hada te dr: Tver Ege gps ike dn when he ele ieee betwen the gts ad case! ‘the theo voltage FT hae nd then glen wth {ho drainsaetateoetin. Tsseatin oars when Vr = VeVi, ‘tt akown in fgu Le havnt ain {Ye Figure 1.14 Standing cn fam eo tut fia tantg‘rue saturstion rion { Yo? ¥4>0 en {A “Th chal nd mo one cole with tho dln wie Vg se ban eV Te testo sown in ge 118 Fie 115: Sinton nh tron igi, Ya oH ‘Tee lage ea the cad pit ofthe inverse er oa Yin Vi ‘heey the vole items eto he ae aed cal 2 ton ha plac pn coro be th agin Sra the eat, the La dtr bythe vl Ve = Vp = fepon The lite stun crete desy proper wero eet rm the nose her to the delta the pel pt These wil stated a ala yh dain ea > Ye Fg 116 shows the y= f(g) character ar vane te settee I ag = OV, hot fg = OR. H Vg om ha VV, ‘hon the ean petri th de ronan the een a ‘pas sat iar lionlip with Vn Caveat tae to pmo ong came Inu in Ti The tation ete the ed aon im arc ae > ov Ww uv W a5 — igre 16 The =f) arcterte 1.4 Derivation of simple MOS formulae "Te neo age MOS rir saw a te 117 ha width W perpen othe plan of he gage nn oe opcance (Gq anit A comnoaly-wel tfe Ge/m,wieoe wren yall eae 1a it el ot pao z a Figare 17 Oe a MOS ensear ope ne ieee ‘Base on the smears te lowing oe st e+ a+ Qt Quo os ‘he cori i tin a gr wit id Qe = tet ge Cm QL primary asl cca which i pce las pear 1 be sea ne thi gta ie (ye (Qu = thie hong inthe eso ae (Ca (Qh = te Bead haga the deplete Cf ere tag ager than the inversion er shih depletion lager fom the gc The charge i the deplation Iyer can the be ‘cee ent Que ‘Th asl vag Vy ene o beconatat. The oti nth lain Bo) Windy Cae- hob 113) St (1) yd aa ry VV Ve ‘Th tal mobil charg Qn ston a thea with gt tito Qe = Qe Weds = -W Call Ve=VleIae (18) rn en wicatie-m-ve 8 ‘dc es tan he et an sr en in oat (8) a 1B as vncy wat nh the cag mie om the soe to ‘This he vlc ofthe setae in the enon Iran ed wey a an where ibe saci ld reg nd [i wpnevens toate uty he eon a. 1 poco, appears to be eal half the etn moity {nthe mete oe mete 23). Caining eget (18), (1.2) ad (1s) ye ect we— viel Mas) Sabteting y= HC el La de = fo W-lip Ve Vie) a¥ie) (0) Integrating th e-adse om 0 to and he ig odie fo Do Va si: tant an)Bustin (1.1) ha @ mu van whe Va fe the ate fe Wee Ve tai tad Mato? i) Vg = Ve thn fg =O Thiel res with he ae soap on st Ve pai fran erage AMOS traitor Te term) = ly to repro Thin ctor call the ‘Santor pinion ad dope n mary. The unt ren prance which depend on sh hing Uw oxi ts te be ‘The unit of masarenat fr ath 9a A/V. Howe, A/V? ‘ue mV are te st Somos lta. Fo an enna MOS, fetter 2c 12044) to 28 /V hr ee ne According fo eaten (C0), fy, woul ech 9 mason a ‘el thon dee fr rosin VT he dca earaig ‘es 118 and 116, howe its sated th ues ena ot su aires Vn oc Vn > p= Te asin i wo pralng repens wich ae chaciindlfycoepoding ee {Elgg The vos nel exe re tind a lls 1 Tif te i tc a) 2 The auton ein. Vn 2 Va — Vr toa 8-H as Accoting io epantion (1.10) independ of Vin the train sinh ot inet Shih shal hn be i ‘howover, MOS transistors show a fite output impedance which i de Teale Seid ce Fes ie eh the Hl (or) and the el camer tags src cs tinutr eho BS mA/V nal Tye OSV he ls = $V nm 8 re 118 on by the iat be ps where eatin 113) ye tion Uy equation (13) " 2, Rig fhe dtd eve: the stration pon, wich ie elo teat (19). 1.5 The back-bias effect (back-gate effect, body effect) "The snp MOS fone derive in meton Lappe to be emo ‘iy meutcaory in mt see The wry ipetat ac-i t Ie homeo, 10 Ince Inthe fame atu the mda af the reba wilt by the strat ened he ‘Sshegn fet othe dein cure uring normal operon (wes Vp at a>) depletion ier aformody thon fe ia 1. However, to hk ft 0 fran aMO$ eimsnwot wane ad Ve <6 ra MOS eaten taste + Dato ce normal ans Ceres ws toh depo este we ‘ean AMOS depletion rata ad Vy > ‘pin tor gue 1.21: Shtc mei fe iret pr of MOS ne 1.8 Parasitic MOS transistors MOS (VILS cute empese may chalga tans This1.9 MOS transistor symbols ees igre 122 ample pre MOS eae ‘ators Ty and Ty ae pra iy he fd aie, Prati MOS ‘Eamon ya itercoaetioa om he el cee a the ama rata) and Ty. Thi oe hk xan ‘rh te ate at, wich ee ht the thd hag Vie {Ty The Geld net atthe alin strc sn Tye here wet ‘han nT and Ty Testor Ty wl aver coma ie ate lege ‘wee bd Fn Miasy MOS pfsiution proms wt a ext dfn ote i anation to anenly cue the thrall tage Var pa ‘tc anon For th panned ore» Pp ager nat thes de roe a pepe bee Tie ‘ch more ie to creamy ner gre [Wu eters channel stopper pat and yur ing 0 ‘dt hve boron an phiapbores ipa Note: Puriie MOS tai appear i ipl ces, The ‘ht a pi ita a ir ge Paar IC elie ere aly dewopd op gr eo yp ae el ES EE « » « J 1 = do ad c 4 | — neptrepmvnnvence ita om ‘ae titi ae 1) at om nent thi chan ater dept deve. 6) Taeoutward poiating oe ade that the anita pean {lie bese Eten rt aden a a abn he line m+ dinate tht hi chet elation deve6) Thieme an can ened trailor tla fo Tis peta anton by dan not mesa emir 1) Thin gona embal prnts& MOS trator of ay te Adept of he above symbol ae a vd MOS symbol us. ‘deere be inerreted with can. iw lowing eae grey opt 1A tear opmbol wih a takes Hoe Beton oace and rin away an enact ort pe ‘Tae olin ee 1 el gon hak le mo le m0 sos dtr ine hs eal MO ater igre 124 ann yl we apo ek 1.10 Capacitances in MOS structures gue 125 irae te MOS exgrtance, whow vale depends oo ‘ch hog aed the Gequncy a with tro Seon 13 ‘deri the MOS capactanen and proses » quale dion ‘terete cages, bse and woes. igre 2 ows a pat of cin of the rtge direc aa oe Figur 126; Capstone arr af MOS acre“Th aio region af the CV caren ere 1:26 explanl se 1. ee Vp rs ptype hata > ean mip suber er the se etal Mel eg a aot a ‘inthe posers ora re ler fh Thi ‘camo ne hn in emparian with th en the Sent ae og sich mat Now, tion oes emt ite se the MOS eptacs oeal o She me eager Cy Deriins only appar at ry Meh freq (2 1G), where the dnt relaten tie oy ‘mgt Bo the hese, my 098 (=10-" 9) 2. Ye Vr thas 4 0.2. [AY oad Boones mre poste the scupalaton ee berms fr aptype sberlin layer raed eer {he gate wen 95 0. Avleage hang AV atthe pte cer 2 ‘Shange 0 ee cary th ge a te dpe ner. a {he tal cages ftw dee by te wri Snmeton ff the ate tascam an the ep ae apace The ‘space the dere 3. > Vera ppp atta VV ean mp sbetete 1, hi patie sa ives er ete. Th lier tin eon tothe ode mae” At hw equ. ‘(1H he egtan wil gun bolt the ne spsctane Co Hower the inverse ner pnp sb ‘Nate omit feos tht ae spp a bri by he ‘econbinhn of mint, be. the dtom With cotaat teapots, th el ofthe rato twcombiation pos ‘ed Ths soot or th ome capacitance showin ‘ee L26 higher een (> LB) At the Bip ga. ‘Sx thecapartancey wil bebo ial there comertion ‘be nega hd he dpi ler capac, a duced he MOS capcom Bester sex con cm ftw cpaiana he ee caprane Cabcenn te ge ‘She ton suc nd eps Gy ben th son ee entation bel "The mag can be expres allow: Ye = Vat dat 3) ‘The aw fr omarton of chane yet lowe equation: e+ Qn £Q4Qs = 0 (20) Va. = vlage ss the nde ten a io wns, act ptt eect a stent Ses ial te on warps oe (Qc on th ie, (Ge Sch in th Qe = hag evens ae (Gy Zhe in he apn le ‘Te owinenpron ra chage A, ngewe nb deed ftom equation (125) Vg = AV +84 (ge cnstat thas dng =0) (1.25) Subttuting Qt Qu Qe in oution (1:28 ye 8Q, = 004-00 (28 Qa consider costa, ten 80,=-A0. om aun (125) and (2.27) ye owing express Nh. BN, OA Bln BAe Bq." 8G, “80, ~ BG, 8G, 296 = 6 ~ th al camcae e MOS ect, $0 = 00n cepa, ~ 8 = 6, = cactus teen the os mice tl the siento interior (dept er capa)28) Cacti rapusle fr he dp ne C= V cave The cso C tere yh nts png cnt ma he Pct ites ote rp ae Ta i Cin Wiaeg.-V cave wabe daw by Ge Asma Gaon Tec cane wate a dag MOS manag to een penn of he leo Figwe Lat seers HOS cuca wih an anal a sina th napster ie STMOS emir ih on eur sort ce Bt dn ‘Soren Thess gray od» MOS tapas 6 iad" mrecir youn MOS cro pr, me sre % ag Figure 27 MOS pata wt se ano da ea Wale hers neson ee na MOS capac and be Taber ef the gue capacaneu untanged. Hever air, ler rated when p> Ve Tiler i meso er ae ‘sid y then aes oy theral geen obit rons of mists the iene Ta 9 an ca re td ab atone a ey high ence (> 1GHE). Three, wil mw ot Cu ie sl wrt eprating codons a ie Gacy =Cait tal) W "The depen the eapctance Cy onthe apo walege i it suman lowe ‘Whom Va Hy th wo nso ae Hee, the vale of ‘drt! y the cane! with W aed the gate weap ‘these a at i= A=W Ca “Wn i>, te in ein ae, Hee Cp determin by te Oana gh Cpe te Se} eae % [Note Thre no inesion ier when Ve Fite 1.28 shame Th th posure apace ten Benes Figure 29 shows he age mane of capstan nea MOS ee Stor Thow capac ic re epsom eae defi Con G+ deat aad our ube capacitance, ‘ich ar oriacasy dopa Vy Var repel ls Con ati nd pesouc cpa which {eltag inp. ois Gp. gated and guesoarce capacitances (ri the‘nvr ae) which esate dependent Yi, Co gitombt apactnce, which on aesay ‘ipendeaon Ve. Fe 1.2 Captain MOS ee row lo ted Ca deepen gare 1.20 re ow) a) meio voltage (08V to 0.8}; ‘aig tor 2 em 3m ela Seton for an sh jonton “Ter Cy An Co pre ate orig capacans that a iy the mst th tego 0 the ain ad Sours, ah tka fee eee Thee cpt ‘ela elas indepen. "The ptcsabrteeapcance Cy nly impor Yipee. ‘Now, Cy tn eps 0 Cy (120 02) “WLC The Invest le abt theatre fon the ples Cy whee ‘ "Terms Cy od Cyrepront gle dein nd ptoscursecapaiacn, expen which ae preat ‘nthe favre er [iar 8). The ‘alr of tan capaci dep rong on he ar ag on he ‘eemin of tn MOS tain The lw cae ae sng ‘This expo for Cy erie ow. cued Yps VrandO< Ve Vine I rca, na iteepltion betwen the alec Wade doa ees to th atl als, Wid ae shown igure 150.ele Fie 10: Cy ad endo Vn YP ‘The show exprion nce fr the stesore apace Cy of ‘atrtod OS ranaistr expla withthe lo ge 11 Tie pt show a rnc oft MOS ait la th raed ‘elon chanel dor notch th rin rt ba ape pik ‘ore thecal pte xc iV ign 1: Cri fasted MOS water. Cy =O Gab rc ‘Busan (1) lands othe owing exrson i the age AQ ina han wetin of gt de at ton 940 Walle Ve—Viali-de (10) ‘he flowing expression for dee id rm equation (1.9 A He a Wg Ve Vea] HED aay ee eae eas ee ferugies a: Ca? W2- Vp — Vr VC) 294 We ave) asm) Bua (L.4) ys the flowing expenion fr the nin eumet vata Pa cyy vt 188) Satin aston (1.8) nous (2) ye Ga W-b:2-Np= Ve VEAP ayy ag Waa a eqn equation (1.8 om the sour othe inagany dang VV GW 8: Wig Ve = Via oe [ar are eaWiia Siena C3 294 vere 90 = Ew tice-tta=¥) aay ‘The ptoscarce capa Ci cas be Sound by dieting Q ia oui (128) with pect = (1) “The Gy of start MOS teste ithe only te id of (he tl awe the gee dn ean or1 summary: Mat pcan in MOS triste not dependent the eral yp ma. Forchino 1. The ide capac Cy a8 Ge OW)»: whee 08..09V and 3c ct 2 Figure 1.28 hos the wags dependence pecan caper tates Cy ad i en he in and ore ae sat ceed, ‘Sie thete fa MOS apa Fre 130 thos he ‘Se tpentcr Cy nd Cip win te dn nec ‘Etc voltage Le daring nova amar operation 2. The patente capacitance Cy ie whe Vp> Vand Cqos02 Wid Ga Ve He 4 The oeap capes Cu Cpa oly apace ‘hid ae wot depend onthe exer appl Welage 111 Conclusions “The basco fhe operation ofthe MOS tami can Be ‘soe! in frre wap Th ty ng approark doped in i ‘Gaplr shoul! provides god finden woerandng of hs ‘cation. "Toe curetolage Cuca prs te devel By ‘an of ie ep tant xpemion fo MOS tener be tng tn base pin f MOS tranastor opera. They hae hectare bon gc oti chapter However, ee facts sl bets daeipon of OS treo and ae rie ‘rtrd ue by commonly creat naan prog1.12 References Genre pie RSC. cama, Tiwary ao appllons of Sl it ranator Wily NewYork Sat sm, ‘Phys of Seniendctr Devo Peedi, Wie 198. 1 AS. Go, Pigs tt Teckel of Semicndactar Devi, ‘Wie Now York v2. Tai, “Option wed modeling ofthe MOS trast, Me Geo i 1987 (5 6K, “Iolo to Sal Sate Phys, Wily, 12, New York MOS eapceanes (6B Groom, ‘ho Ania Md the gt Cpa of Sash Gaoatey 08 {ERE Tamacsn on Baton Dv, (7 d.Paaa DLA, Antonin, nd YP Tit ‘Manet fain Capuctaes of MOS Tras ISSCC Dont of trea paprn, pp 23829, 1962 [8 DE. Wad and RW. Dat, “A Charge Ort! Model fr MOS TrsastrCapactancn’, IEEE Journal f Sette Cheats, pp TOIT, 178 1.13 Exercises Note: 24=088V throuphoet the ree 1. What haps tothe depletion ine in gue 12 when the sb Sra (0) contacted ame vllage (= -2V) kta of ‘mt ect oc this onthe held ge? 2 Cure fy in a rami (2) 2.5 when te ptosoree soliage eV. The cent eth wien V = BV 1) Which ear operating ego (mar o sturtnd) do Ae lero V craps 1) Cadets and Vp forthe gven tras “ 1) What ype the wansto hows? 1) Colney whe hs rir ha thse 9 a he te 2 Gio4 Gi: 1 Ly es a n4ype ebaneonent MOS ans athe caret ds > 0, exp the owing 4) This antral in sation rego, 1) Ths coanction fle called «NOS diode 5. artis xe, the treo vllage V8 OS. ‘heb ‘hernal eration flea pi 1) Te bom sete nsw be en a al a of {AMO wats exd. (ep hs retreat nl the pile depen ad ‘oie In fr the ilowing wale fs “1. 25¥, 1 waasy, 1) Aa arn raw ad to the rate nec Rapa nrc a fr Y= OV ad a Ve = 1 ©) The sae fatten ni 3 i conned ton ‘What happens othe depo nd ienon gee Ve = OV 4) A ot oa wd to th sect of exci So ih wig te % ¢ % pr sbrwe Repent exe Sai Y= OV ad Vy = 15. ©) lapiz, he ae thermal gmat eheton lp in {he en bert. The rang es etn the dep ton lige oi the opposite dito to the appli extern Drnw the dieton of movenent ofthe thermally gee dro aa Hl fr Ve 3V a he strate of ene Tis situation comics fr «lenge pind new ei6. The lowing vale apply @ Nign28¥, Bot ma/¥, 2) What ype the asso od why? 1) Cake and dre the ah Ves0,05, 1.15, and 28V. Rape) K=0sv"2 4) Aang K-03", cles te cnet imp fhe tosis fr Veni an be Va=1¥ {ate the dna romain ot 28). Vg) K=O at ‘The long vac ply fo the en shown sv, 1) Cane You fo Van 2¥, 1) Determine the tnondictans of oth MOS tants or ‘inane Whar vo de Vg ech when gn 25 V2 4) The aame low outpost be maintain when the ad ‘nosso rpc by a bance taltor wih ‘gale at Vg Dove thre deer rans with te ‘eyo ere Th pct aif thi trator Wier b4)028. Res of wean ‘on are onsen tlw Ta Ta 1) Deter VK and thi easter 1 Cates a am the graph =f) oa at fe Va site OVevceV) 9, Define an apron the tatarntactans with pect the ‘berate wolage Vg when the trnasedactaee with apa 0 {he nr gt tg do’ w=Chapter 2 Physical and geometrical effects on the behaviour of the MOS transistor 2. Introduction ‘Tesinpl forma eo nsec and 1 act rb et ‘ede let ih ann th har of KOS trata Ut {he mit seven fea (17) apart adopter ped nie eel pial an rome ffs which gies rae the von of MOS trast ‘The om ae thre ‘onmery tor pti than th stl perros ered ‘MOS crate, Te deviation boos ore sgt se MOS Wate "Ths hye sti» th cri fh mt para tn ‘eile degra he prince of MOS doe. Temperate cet “hse ar it ed The eingess e omne. 22. The zero field mobility ‘Ase in cape the MOS traitor cet by date ‘ied ty the gin tr 9th traitor oe ae nce an sehve Wan L eset th amir camel with and eth SrectilyCa sero th gate ave epactonce porate {repeats the acta malic of he carve in the ce ‘Te male can be gute dient rm the nr do ee ‘mol Tatoo, whieh pds tbe doping eosetaton i the joss tlle biti la 8 i i Figure 2 Cane mt and iii co tin of (ar cenonatn ae tamer Tra rttrte doping coocnration of 10 toma, he moby of ‘cons gabe eine a ae) ath ene ‘Sele Thini the major aa they fn OS re “arbi sont the tins high ae te ah aly MOS ‘east, Homo, sv et eal wore the maby2.8 Carrier mobility degradation ‘heat (bras nd eration whch aes the ‘iy oft ehang carr inthe han Moroer, wen the lp temperate sie tery an ne of he abet tenet tere oe by rows tation, hs wil ve «anti eB 02 the ‘coer moti and tha one ofeach toe 25. Temperature-dependent carsier mobility reduetion As nae nt peti tempat af MOS trast et i ‘nin we difeet ep 1 Temi ah malty cin ot a. M08 Sere ee cee ee ee ee tater son ~ascmn-( 28) es 2 Tete! ag Wf bh 8 nly wan eae eer aa oeeteceeeserara oe Sepa wiht ovrre ve one Aart oft ct oper Ins of °C ay ee a 30 decrease trsistor pin ed de of oa mV thea tetage In coats, a ec fn teers rela the erent ‘reg MOS aera ae oa duction nthe mains op ea sh 23.2 Vertical and lateral ld carrer mobility degrade: ton using sre operation, thefts moby of th ari the leer haa gad Wy mons fest a ure 22 ‘These cde the vera ete eld the boreal dee Bld ‘Brand theca ly When the wt ctr ld ght exis nan chan levee sgl aut Yo th alm rir win oe ‘Th rrling sur aterig” aed y the ed In fre 22 The came redut the ebnon e ed obiy af the ear 1 [i mame expr ear rst with rept 1 ‘weil Sid air maby Sagrado The etal ri ad do ‘andro h a wltags and on tear lage Th tnt ete thee vag ad tcl ea be peel Slows TASER sehr, open the else bit, rpm the Rem evel nthe tate and a ar comnts, ‘Th acral mobility i equ tthe mbarate moby when Fy = 0 ‘Sie enna hs iano the ace ad rin in he eaten eatering tr ses wien the hein cet ld Fy gh Thi Cat ‘Soe tial ld Bt carr yl ew ng sled o Bi ‘Sh ace ota ae. gon st-er aprxinatin fr ts ‘ely strat’ penne ie Be Ba, es) a8) oe whereat eo) cee “The am erst the chanel gt, Sutin ato (25) ‘to (26 in ognton (24 le o= othe en ati . es) TRS HN a RIT) AL ih gt vag, the vert ld alee (epsom by che otage terme onan Vip sod) may etc he rent fc Tesnstrs ria tose iy boot S09‘ rao one may be theta magpie Note a hs bral ed ‘Slo othe sen donate fh daisoure can. At lee ot Vim, this hota Slt ho rear te dzone {tbe chan of 08 trite by son 30%. Tha the ota ‘dpm tty ett aso om tr "hr of th ln sr an! length, tere he hanes man satraton vty ay Tl ss he Sanath andes nae on Ue caren wc a th be ‘proud a ee lation with Vg Ting = Sat Co WV Ve) es ra nomad with Wag 6 propatonal to (Vat ~ Vf "Three te mite drive Carne expe hy mele Ince oe ny echo eration cae (1 24 Channel length modulation and statie drain feedback ‘Te wichita gr Ld how ‘teeny the stun spon eae a even tla. T ‘omroon pee vin neem! devin aed Utes only thane! gh dain an sai daa fe 24.1 Channel length modulation ron raion Cis Van = Y= 4) rat ga 23. Tho pert ft bse MDS traitor his repon fs in ‘Son 13 Cleary the end of the eon ae (i alle! the ‘agin enn doo nt ach the cal dri To fete gt ste ous LA Fie 23: AMOS nari th stron ron > VY) ‘est ein tin (49 tein Smet Sesh a miele Spence i ery a a oa So 2 ata eee n= a? en ee hth oh dpi i oe lon eri Tacha inet pre le ‘Setchan Cogent pe mais Ok Beate estate Btn Hein) ean sehr so Ve re ott, ich my ay wt be ein ge“Th she dnc tt he nn ents oe dla (rect of OS trator operating inte stain gia I paolo Va Vane 242 Static drain feedback ‘The deation ra low the ace y the end pote ‘rach vse fr otc od tae fare 23.‘ de Petos cage thr aly teed VT epee ‘ral pita ein ety poprtona the in pote A ‘epee Sepeton rego tae or mii arr Teme ‘edo the bart tht gate feat ast Sout whe cating Snvnon ger A nce in ptetl there es ‘edocs of tn tol! tgs. Tie fllorng emp expres Inwbich A proper oY appar roby avr = aha! am) ‘The fro ye ontnt andere the elaohipbetwces ds: ‘ues voy and til tage variation. The fc of he aie ‘a nck conrablen shorhael airs ha peat ‘ln the thei tag ‘Chante nation nd tte rin back ae he dai cet to vary ih th rust onipatimpence Cone ‘mpl, «cre cmping two ental rari oprting the ‘stron vgn with eqn gue volts Dt ifn rain vag ‘Te raison wiht igh rain vag awe here ‘land a mueltrateldwlage, Consonant ‘ret wil be ihe, 243 The Early voltage Another mu of dibng the provi efits & 10 we the Basi foliage ‘Thi ote i commonly ipl tasitar ry ‘by ang he MOS Emly tage Ve), whch an be defied ea) sehr gu rps te etp ranscondctance ig 24 shows the et the ary voltage on the MOS erm tor cara, Figure 24 The Bry tag rt the MOS war dace igre 1.16 sags that tbe ouput ian of « MOS trae ‘gerningin he strain rein nie: Fig hmere reve {hatte ott raitance ia it ite ands ay deter by {he valor ofthe Eat waliag. piel the Ely wig has bee ‘lad to tthe ling oper Incomes with higher ata doping res, 1 deca with decrening chanel gt ‘aly ne betwen SV and 502.5 Small-channel effects ‘Te eit beavnur of a MOS rms primi deters tpi tor 9 it ceo ag Fy nd ibenly eK. Gen {yth alr hw artes apt depdet ot wth IW ao gL of srl of ae depen ‘which resco tow. are potraly significa submicron aed Unprutiicrae MOS prance 2.5. Shortchannel effect ‘pn sa ta th sr f ven athe absence ofa gt lag, the gas under the ge else {othe are and aa ae bret Spied of jerky ett In nd ltrs MOS an pOS transistors specie. tn 8 ‘orcas rater, dance ete tae Spon rene {esl Theat of compe dpm arc er the ge rece ‘eg i rd. Thi Spal two desisahl it wc {inte by snow suc a dn tine, Home, thee ‘Sh alr in gr al cas ih se a a the rain lg in th chan when > ¥a>¥e- Oe wy crea hie robin to ede the ply wala The at cao! eet ‘hemo woo a ert nti a nme ese ‘i lage rl sc Sgre 26 "The Re i how he i of he ‘AY; Inplaton, hich died a Po ‘aba wage oa Nar wae we ‘apna fh nor the ra thes of tli stro and ean faces (0 Felice the orca tet onthe hed wll) bk see {Se reset of ie ara Thi in Crna the ted oo ‘See oe matoa 72). ‘wer 2 AV impla to coca the dp inshore do ‘oe Te inate pti or rata witht salt a ‘tegen procs. Thee tases wil hve th oh ‘Sek gy iss the Se "hao eb tat depend on the chanel lngh herve shorn et Thi el, rong heh gn Vy We ‘heraing ate eng sete to ne var nedving inde ty Hay ean fin, Dating scene, ‘Sar ofaen neni ion tected nb wg ‘the placa ate gma set of patton and een ‘ee vo trtitn enanc ion ax rt egon wer he "The aera eet of he enced ifsion i sony info ty the Sibyl tnt fra eine sink Sr ner ‘Seon ge somntrtion rains The fr 9 tir ‘ean ence diftin of dapat tne nx an rn a he {aie eg tomar he etic "Te ett he bon {ens moet ofthc profi the afOS ders a ieee routs torr gegen te haa ele ‘aly die the algae At eon nor gts lng hm aloe chao eft tarts to dominate ad th trod wag ‘ells cero. ee Sgue 26. Thee ie more peabaed MOS dvs Hose the canal pan tn ed ere, ach ‘ne maple othe enbanend iio forts tan an wh ‘eed fr te pO canoe poe 25.2 Narrow-channel effect ‘A, the width of a ate devo nos the tld wt The epton eet uke th ge a the gate, whe he gate thetote ome te Slt ride, With LOCOS type ef el Soin, fe are 2, hes rial cae by the echt oth ‘Sac op dpa a ho gy fe Sid lon ge 2 Comin ol ir nin “The don deta rpon cage ha to be competed by an ‘Sig at Stu whofe Sv, eect of nn Top dope wept ponnel ru soeenoa fed oe {thon The del op Sgt ranted ie on Me ‘cnpertte LOCOS esaon an cas a ge Si Ve a ‘gre pane wel proce, the doa pera cro ‘SE et ipa a econo of dope se cat eet {ie te ge. Howe, th that vag ocr 2 ff the bas beak ad too sping the el ie ‘Setdge Pipe 28 sown euronews oe Sede fhe cnmcl th the tre ings Shalin ‘Feat bane (ate 38) scheme To sn fo he exe srw ee, th hl tage sift ad ee dh {ean ty mow cat wit of cand 02pm “Ts nee Nar Wih Ber (SWE) cred to a harp coro te topo he wcrc abn gg 8 ‘Sterner sean an noc cri ha trngth adeno ‘he lage, the gay OC eed ach Sota god's etal ni of he Sl ere ne ae ‘i hg ree ite ne a OS devi, conser {Ste decreed tage Tacuba othe ae ee Shag ee ere han te gig ogre lent an nthe depen nth we th techi) oe linn Acie we wih Figure 28 Su of roi wg OS devi econ of (Seca ith lent el fy ad el ti 25.3 Modelling small-channel eects “The revo section bw tht shart chanel exe endo tow the {Heel welage ie mew cna fet nce Three, "iar ect compote ac ter prt if ot cmt, an ‘tor witht beth et and snow chanel. Forndeing popoce, beth tea sinply be and The irae of trast ‘esis on bodys tor Kare madellnd nn tar marae. “+A sorter chanel ein» lower Vi» wer ad » ower “A mare aoa in Bigher wer ad ighar tear ‘The depen of raster Vr, example rte beh doee gto # Weave Da exe Dy at Dy epee short chal an the revere Shar Shanna! ot with Dy > Dan Dy © ‘Deepest hal wih pendence (nero wh fic), ith Dr>o. Wg ad ae wih td eng of the reece tanto respec ty. (ne, triton wth minim hase ath and wth cae the reece trata Cnmey, the enpaiin of « pcee ‘Sec can bert rll fn he pres fh ne 2.6 Punch-through ‘Taina ands ein MOS er eee ‘Mc net, Tits prenary Wily to oer In MOS tran ‘Sten wth she cane! hgh emg tre, ih hoe ‘lero in ie uc ofan cand device vere whe the ea {sed sourer depion pons wens. Conquest ay ets at {efor fom Be sur t the dia cen then he ge walage eb tow th the! a and the trator upped cond ‘Thiet own se punctrough Te diese wl Ver at ‘ie pnchrugh orarn apprinned o fls Vier gic Naot? a) veer sept the trate dope, retwota the re ane ath and {repre th charge of a electron ‘Tio poctrgh ct canbe wdc dering prong by nen Inge doping eed ofthe rete with» at pane vag (APE) inplnatns The amocned face nthe trl wage he ‘tame be empensta y roc hn oie no2.7 Hot-carrier effect 2.7.1 Introduction opt atin an bot irda errina MOS tami in seat nes ft mile ngs cn in thse Tre mitenty emg ‘This gps wo th alla {ee Bad athe asst Doo age than 2» 10° Vem. Impact. ‘arr dation causes a pernoet change a uss f= Src rte sme operating mage, the aon ects ae ‘ch or niga a chat raat han phe a "There, his ton intel to a imion of thaw ote chee tuners Hoc ence ae ey sg ced ‘Semin ue of te horn doce A i a MOS anasto ‘Todt thi et el aad pede on entra ‘neal pratense. Toe et pat aioe Fly comets we paella te sre Bed al 2.1.2. The electric eld in MOS transistors igre 29 shows pie xa of the potenti dott in an ‘ho wri rata ante igre 2 es he asta sr ei Bf” The bi of he lag rp ois int tor pinch rpon mer the dala wtb. TH cms theshary pei he hrm dete Bl. Twos ts in i a Em ih wag he "Th tal of Bg epods on wo rae paruetinThe Set ‘pop etait the ba volta othe tanto tral Here, {hepa jenn Vn Vale Eg i Bc el ro etal Vf ato Vpn pt cna Aa cee ip eamera meee dnb cf th ace ld ote gh ef ‘hi rumitor an By hese eres The pwd on hr i ‘ae vgs wry eal Ti dua vols oly deter ‘he manus ete lla the daimeatetrate ce Eaten lage duisbstrte vag ae brokdown ie thi ncn and aes naativeofrt ethe eperation af the tat tr . “te ni en ace cere ene Se a ee “ae woud pou of prt ht deni he a of By - tee pst rn fh Ey ea ‘htm gh den ta wea ns ee bc tm Tedoig tie nec hoe, ees ‘Re Sp ier dsm rnd ry he ew ren the etn ere hae a to ey ‘Shape Th dane ee dB hn ym Tal aot Bo gh Pe Bh ee 1 ee Bath er oh Te dno Sihatatop Tals ate cs ven opting ois ede ‘coms Sour mtn mel we set | the drain coocentration. MeMed ord Ege ae csi ction 275 2.7.3 Impact fonsation conduct cton my cade wth olin at af tn pnt ‘aa sMOS eatin channel fac colin volver higher ‘S'S at tos wt te dae sd ee it ‘Rien Tan ct ele pac niin Tle pe fo {nce in the asec ca a and ow aubre careat 1h Pie 210 shows te dependence of on he pte wage 1 fret sla fan hee picasa sinh ‘geen wich Imac aon cera mais oh ‘Seay properties henna Aron mB there ‘sie etn i wa ala tT oo 4 eo 1 os LS Sm gue 210; Sot caret ya fate ww ef 27d Hotearrier degradation Input oniatnn gone high-energy ets le, Tae ‘hoy can setter torr the 0, tres ta enter the Oy ey Se cen aes The rue! ener tt 3.20 fr lo ‘ton aod 386V fr The mbar fcr tat iy the endo very sal Th airs ay bo rapped the Sy, rng toe car. in thi crete {tice tats ab srr" gn and agate of the ring en ‘pce hg re dependent on aut of he ator The ‘gaat fata centage caters whch ex tp tis inject ft es fer nt Si eal arr ‘dradtnn. ‘Thin efit wn coment ello bot ceton eration {eet warrdta Wn infned by ee. 27.5 Reducing the maximum electric eld ina MOS tr stor ie in ad eyo di ris die he Tecate Sgr "The graded dra astra wey snp apt of the cee ‘Etande mock moe gran ty spy lating powporea nih 2 ‘eaily bw cmsetraton in he highly coma area The ‘hephioar bast unc hide dito atte the ai a {area rr ils ch farhrTho ee 8 dente ot with bw roan example stow nur 2.1. The [ned Sa nde the mann ieee hy abut 30%. Te tpi hae the operating wlan be cee! ty 30% fo ‘anor dines“The ly dpe dein (DD) mato ea wo il mea {Se felt chinal hms tn int cored ih he grade do ‘he ros LDP proms sap replated with he aid pre 2.12. ‘No.5jon nMOS neo wih pt aii of boat Fam (Bene hows are 21 "Normal procming, wick extensively dered in caper 3, 52 self erate th aie. Phosboront vith a cometation tha ‘i fm 0 to G1 atm per? mesic plated The lear of aboot O:%pan thse sows i Be 219 ‘hen gro. Th lowe by am ssp ch, ch has Che ‘ide spores thw on hot doo the pt in gue 2126 Aa ‘Sqeot gly emeunratd plantation sie ad «even {ison pod th rating Rand nara wn ure 228. ‘Te smi th trans inlet ld ton tbe ha enn sen gue 21 sans vale 505% of ht obtained in» compari atr t cnmesieal Sele Gunn wre aoa Two fost hi age ‘elton. The tte relay lng gon Wiha dar on Sentton Adept are wl oem toc wine in he we tha {nthe nara A urge proportion oth daar welt op = ene he ate andthe 5 drain ren. Th ab rcs the alone tse rr ts previa dite nth ap \com—} Phare 212 Proms ps the ct of EDD tr and ‘roi ed Ba sl ee "The LDD transite ito rate td ht he ded rage pose iced sero ras the vou a rin eae tbe a sou Cal opto, ween sss ‘th hg operate! welt that cam rr high caete LOD nla we ined in CMOS techn wn oon a Inet As rumen ton 274 the ee eee at eas teem the $5.Ssy nas bares at 3.380 br hee ad ‘3B6V fre. ‘At spp wl rede wth tho set new ron gratin, ae carte ary oe eth oper ‘hon the supply mage ie 2 ha Tn 036, CMOS proce,rth Va = 2.5V, the atom nergy can rach gv = 250, expt Tie tes caine tht sci Ince cere ugh oe re ‘soe, Howey the suber ac ghey ets apy ‘ern wih ruin tags blo 3V. Aus uae, LDD pate {emo longer oui nO. CMOS roses uel blow. The ‘Se thon rept ty wre highly doped exten, a ded 2.8 Weak-inversion behaviour of the MOS transistor ‘An mM08 tito operate ln te ‘saber ran en te {qitesouce las (Vy) I ust blow ball vgs (2), 0 Sure 213. wt a be wn) (win) yy Mase ont ws 008 spe sw by ave wt % Soeele Joon wy or os as os aa? = Gwe ota Pu 21% (9) Saber carat price ad () 08 led alow th trol wolage, the caren decrees exponentially. On ‘igen sea the sap ie ower propria fo the her ‘engy HT Sone ton tl hove bag tral omy to cae n tent ptetl barre 21) ad ae tthe dein (O3)7At (ey ow thet tings the eng shel ur "at may oe on encpiiy hih powereomentin, Thi ag ‘alone chip In tary nde oo cess ad tro {pte vag). Ths operating ein a eld the iso [for The normal hres tat pio th previo {ier der pring i do ny te we ‘Shae ans onsen dabrsurce sg operant wok Ft tag Meir ea) ‘The terme in equation (215) ae dfn fos 6 = walle ail (Cnt) Or = asin am eapetan tug = Sas a= 8, austin (218) spl whn Yt nome tn few Ur blow Yr ‘he sass trast carr Tay tt oo coal andy cet in ttn tata tppowly te ‘he tcrtedcrptnn ofthe Ysvoa a trast opeeting {he warn rego econo! in ora (1 an The Elongate bs sani Ch operating en 1. If low (06) thr begs sa esol caren who (6) Thr ew conser stay caret in (C)MOS VEST (0) The minim clock ogy of yan ia icincee ‘envoy cunts DRAM ar anon eaie ‘ic 2 Ino teanisor operation, cats ae brie ow othe ‘ato hh they te oe Fine 2.4 shows te enedin wag on the testi An ease af te rainscrce ge wl tore the taser Big This Dri Indeed Bier Lawes (DIL lent econ ‘he ead age Vy neh the males td tog nvr operation eons ft trai. igure 2.4: he ee vege ing te ar 1s 2018 CMOS procs na nero Vy fom O6V 0 18 ty wl in the ution fy of mor han 10D ‘The et manifte Wl mina lowe five nel ag {DIL}. Ke char tha tif ery nore a he eva ad the odeling a depute tata -Anwlogue cel wchqs ie wk eso bao i ow rent apenas. The pin of MOS temo open {he weak ton rg ai high and snp he 2.9 Conclusions ‘herman sie in chapter I provides odin int the fia ‘itl Bevo of OS dein Thne ermal wer ef rst ‘Soul bebvoar wh reuomabie eeuracy on th id ewe The contour deve fo higher cel densitle wth wal team, ‘cal ea, Te sa nein eo ea ser haur utd is captor in aio, th magia of hae levi nr esc mene ak. Tet oe tie o edhe easter cent by ota tor oa ie ‘hz! gt of 025 ad bl ‘Thee el its that pe ‘Shootly degrade the pease of « MOS traitor sed here ‘elicit ition. Raducng th noe of he csv oth ecole addon monn210 References (Gener sc iin 1H] RSC. coe, "Thay sol pistons ffl fet tans, {he Wily Som ne New York (8a Sn, ‘Moder Semicouetoe Deve Physi Jn Wig Son 1907 AS. Grom, Pigs tnt Tel of Semicndactar Dv, Jn Wey 8 Sos, ne. New York (6 xP Tit “Operation and modaing of the Mos trait Me Gram 1567 Mobility rdaeton of ease cares 15) SC.S0n, 5. Plame, Bec ity in eda oo aly TERE Transsctions on Bletron Devices, Vol 8, 1980, (6) Sot, Smet, caper 1 FF Ad. Waller and PH. Weer, ‘Kebilty modal fe MOSFET devin satin’ rade Pian, collun Cf, Vo $8, mbt Sept. 1988p Stores ict [8 Gna, “Aspe tmotel ofthe aol og fr shor and aro chanel ‘Soli State Bkctronice, Vol. 2, umber 12.8, 1980, Lat Dang, “A simpe caret moda fr hora IGFET ans apt TEBE Journal of So State Cireit, Val. SC-14, mumber 2, 1979 sei is 10) K. Che, .A Satie, 1A Gre IB Set, "nah eon on MOS trait de We Boi pe tt TEE Tanto oa Bheton Devi, Vo ED, mumbo 2885 (00), Lei aS. Kang, "Hot Caro Rely of MOS VEST cea, Woskinuniaa besos [i] UR. Tostman and S. Chatareae, IEEE rasta on Coat Thy vo CT-0 pp S465, Now 19 (0 Vion an J. Fatt, "ROS ami eral hea on weiner’ TEE Journal ofS State Creat Va. SC py 226281, (3) You Te, TE Spo I 0p 529 ‘Daan modetig [04 HC. de Graf FM Kaan, {Compartir oto tr cet dn” Seine Veg New Yor, 190 (15) A. ly ot "Derk Moding sin Dep Sain MOSFET, (08.6. Mant ad P. Ange "semiondntn Deve Moding with Spice, eGo iI 198821 Exercises 1. At 260 he mata fa BOS tami gin tae 8 it oy ad eth wea Fy AV. 's) Calne the gin when te eral peating a °C. 1) Cate thr! volage th pera ©) What woul be theese af thi ocd trl a gi the tnd by cat nae SAN, or inane? 2A rence tran with spect ai of = GRAB han in ge = AS Memon oo octet oon hal wha wh 10h igh (tune Dy = 0) 1) Coleus! wlage af ait With a ages ‘at of S22 Wht apn oe hl gs ee it Wa meric oO pf Dent? 5.) Wha the et on the gus Stor of amit with a wen te eb aly ened oye ‘atonal iy ary ns hb ete, Bemba?) 1) Calne the disoure wage which the leat rear (Sin moi cer OVChapter 3 Manufacture of MOS devices 3.1 Introduction [at the midigti, the ROS se gle proces wat the at Smolyan procs MOS LSI aed WLS! cacutaExanpa of ‘he coiled micoproomors, saa protean DRAM ‘ih strge apc of 10 Kt, 64 and 256K. Howe, early ‘Modern VES dest ae mi CMOS procemes. CMOS dest {reaps chpter the thay ed rth scare ‘Senn the ape “Morn sep ston CMOS procs, with haa gts be low 03pm, hve emerged om the mueros meeting process ich fave eos ce te item othe MO tear [ert rte Dalene heen the rns mee Chae oat Uy the lowing are The gp of oer Aerts inch type ad p- ‘Spe stn ef urate wth epi ler ad lating 1+ The cn of the gate mata ntl ee pe mater wae he alumi ingle int sroryin MOS (ea One Som dc) lyon has ben. Mors 10 peo ‘oe, homes, ay all we patie ilo (pion) ‘Sic ater One ft man enn thats ga fettate te eat flea sours da area ‘er en fr weg ply sn eri ht owe Ateneo te rato oe ae ie ‘id an Slow Tech lion (STI, so mtn 34 1 The yp of train ad: 05, pOS, cnhanoment mor pate Mode mantra ores cot of won tstogrshie, ‘ching eatin, date, inplatati,dfaion ad planation Sep Thee see ae ely read thoughout the pos and {Ropero teal ow han Thi chapter are with de ‘plone tp. Mot prose ne ast dae hie ‘attr nllr tthe dro advo bes, Mal fe COS mamuhtring paces ow btm 2 1 tas How fe the itl Shean o1C maar roca hi cpr ‘Seasons bs aMfOS procs with se ask Steal, base CMOS proces Sow ay examin. Pa dame dite btsen van EMOS geome the Hg Te Tanta mae epatmoon CMOS ro id Mg inthe tale CMOS pon ow Theol he mone dant evo fm the eoretosl sa ae epi The yaad ‘ably of pcan i are npr ae inthe IC marae Tadanty Anni to the eon et cnc te cater 8.2. Lithography in MOS processes “he integration af cei rue tannin oft mecieations o ‘derma th iagt eesary fo 1C want Usa, he Taye ae seen jak. The peeration uch oat(ip san faye npr ola dic SUR USETEEED ENSORON LN 217720/77207 q i ore eee Sater tre sim, se coreatly ros "2 ‘bmi (= 0 ymca! gt) procs ae clined yngge 8 Mae tomato pre: Ai Ci imitations of hse potion Mehography teas ay denn ty the wavlnth (3 of the apo ght sore and Ue Nema ‘Rartare (WAY ofthe ln ‘Th i tine of he ring Pjeton nite yeti nad abo depends he pet {es photrnis Deter ptr lioealmim ate ee 1 genaly d exrensin forthe minim far ie (ns ‘eaten fh ating potion nin tate ite = 8-2 ere comand y he agape oe “Typha wl rb te Decwn 0-4... The mune apertie ge rally rang om 0 to 01. Bar of thaw ala fr 4 hy, ‘ie minimum ta” ur se le plo the meee te eke "he ee ot commonly ht sues merry (He) Sap, whit ni ight at iro neg of te pet. Tie ‘selena 10mm the gn fm fr he bln, Sem {he Hine and 2S forthe Deep UV (DUV} bine Curent 035m tsar ns ae ey ped Hoe (8 4 steppe he he (035m tare rtd on Btn DUVsrpper:Fr ee iam tres ther rer (i) ght ue or akon Bare {ie ght source ca be ud. "The 20S DUY line wl flowed 1 he 18s DUV oe fen agen oie (AF) ad he 1ST ‘DOV fms Sie lar sare Th 0m se 2 ae pp ‘se expecte wo be ed opt th 013 od pal the 0.100 ‘Shimum feta sin Hover, be develope of 800m DUV bay to le fr heat aes ctndng Wo Sth ie, ‘might be pone owe igh VA, iam potion opal ithe hy opt Om ere se awe ered ith dd ‘nk choles (nudge hi a Opel Prin Coe {Soe (OPC) tgs) andrei cgi Ie expected th he {enol pti ithgrapty wil mo ong be ne st str wae ‘ete (2 0 pn), apa taupe mre ean ‘uk wl ome empty aren hw wueegth Are {veg tgs Wl bv to be ery aden Wl tatestie eter fet ough opal ths ith red Stu techn are ot bap et Thi ew the eon inary eng hat he pila ei Atstning Cat om ‘tography will ot be Itodacl ‘mage tte sks ina 07 eco the ty il hae tine cose the ho of the epee strate Nl projection ‘lor Beam therapy, 11 prosniy Xray itogrant, projection {on cgapy an al rete Fstree-DV (EUV) iogapie, B- fase the coe sat ca ge deta dco nf ef the ‘goed tse of hs bak gine oma weld mat woh th ar thts of mans Is ac too expen or sel IC-egn oes‘eyeily for poayping or edatonn purposes, Dine She Weng (DSW) cq ar sl. Sch cue se Bete bea (2 ‘mmc wr a rs io pe ‘eine eter than OT gy bu ta omer coi “Toummars the ule ofthe ne perl 3.1 preente ei eps nit tet ote te are ite) | 2 (ico Eid =~“ "ea alten aging “The potitograpb see ise in the attr of «mask pattern {stra eed ih tg Uy he op ‘Bande (S0,)byor oc the war Satpal tae (SN) ger leapt, Next tiled er scone With ptorse hyer ‘Them bod to sty exe Upto! ae ogi. The tore then deep, we doth reno of teen crf he photo pate. The oui patra he rn tu ata bar nthe abc nie eg we, in which the ‘rec ie rene Fal he rman est ed an imag of he mak ate remain hemi Hye. Tha ‘ede ates ate «bar fra atu proc ep Si or ee comet it tee =— ——— cometh tet ii Ld Pie 4 Pern ane ma ar Both pose ange rit east, ‘The direc in py ot i a ais at ts ang oe ee "Te combination of pattern tami ad prc we epee for allman rue to aati tho 16 type fs cd fo he potter rte may ier om he on eae a iosin te i E = cs os cay pan ig’ Th wea patie ed mpi a pte mag "The pimple, homee, remain the mine. ‘The pocaing sg that fallow ptr ar may mis etch ciation, plato ce ilo ao plating. Destin aah ington posing ‘ep. Thee ep ar decried a detain hello eto 3.3. Btching “The povided pbotlthgraphic ep rode «yt a {tide or alot tris ayer This pater ast pec {un ring dpe oi wderting get by ea ttching pros Ter seve ified etn. Wi ‘rt thing the war emer n'a mel etching Is. Dry (Song sto ay ona of teh psa nd cama pron (ten) eof ema! poco ony (top) The we ching Ithds efoto, te ecg te te amen al ecto ‘The cited "une pole steel ge 3.8) bse ‘eros when the mina newfie ced lager trod Pie Tel rt thing mane Drv-tching nth, which ue lama, alm sistent ching {the eching rose i ited oon ion bythe perpen tenor ef th on el tthe wer sre ‘The el shows in Spare L(y of te mane ptr on the nig ‘With plana thing og, te we ae nr na somtaling rine o ie hat che. Al ad iO, ape ‘Sey Input ching tec, the wer bored by ae ch wage (Se) Aaa oleh sane tthe wae are ‘ipsa dsp. nil; ombinson of pln spate ecg ania soln ci on Behing (RIE). Stator etching rosa ave Ss ot ia i ay Te rod moc emi, pracy and prose cml. So eirey can br inprve by the emp a he gun pa ty the ceton of ple a he wey ae "The ate ofa ‘ts aninozpie proper. Th we of th aaetanc cet 3h er ae to the wal of nar ao pi whith inp tsimaopy teething procs Aeon ange itt erbon ‘ects mi nye tal, comune oe cher acer ‘Be sat oth teing eo Beco, when aed the ching fanart toon, the mcs app itl nal at ‘esl sen, Cat dos mt reat ih li reentry sp, bt ow-peare tig tc gis sol High easy Pls (DP) vec re ad Tn DP, “oer couple into the plan cl tre te aero ‘terns MDP opera tlw (ese mt) Yost. Ths in En‘eruls n Mve plsa densty at 9 highe dae of natn, FHP eo pove harper, ment f eating techn rach se hep etching RIE May ros ep wo plan or ptr ng cee nick arged patch are colle o culing src ail (pe ‘om min) ‘Tew niger com ciel cea le e-store aga aston I Fata te aio astenan sen to pate ee ara Aly 34 ‘Thermal oxidation "The diet a nthe manfcr of dopsbieron CMOS ee et all eer ptt een + big rekon lege + rt son wo oer pons materials «lo df ety (00 able) + gy tobe tnd (One ft mei ha eaporatn mast oft operon ‘on die (80) 1, ab rately diferent pont them ie retin A thn ie an ‘tt beret thik oll lo apace vale sas (acs) ‘7c rom the ara The tke as cet by eng he ‘oso io slat ope ony oe ate vapor at & igh tamper of POO to HRT. Th ye nd wae pout cuca die chong he king io nde a hse {capentre, To flbwing repens cal echt er We Day exiting ii) + Os (aps) —+ 103 (od Wt endaon: Sel) +2140 (pour) + IDs) +2 "he LOCOS (Local Onan Sieve) prose a nition eh ‘he wich hs fd nies cepa In MOS pcs wih te ‘exis down t 05 ye, Sion osetia conan the el force during ie pov, ‘The lingo Se ler end ‘Sone 40 be the egal wae saree sad about 50 above ‘Beat prt aves ty etna of ‘Sout $-10atmeo! A dandaatagh of te LOCOS pros i ewe 3a) ® ‘The min ft bk cae ow gretsch ‘wombat ans Inte earch ore Slat t supra i ak emia be eed i nti jt 01-0 an re of Om. Sah sak {shown in ure 470). cs ih a rupees beak be we of LOCOS i nite to the inition of r.025 jon tare See and LOCOSpenal and nitatons fo fart se dg ube hala ‘One st ets to eapnate the LOCOS daring fran: ‘Pain Eneepuited LOCOS (PE-LOCOS). Another emp isthe {ecaly Saad LOCOS (1S-L0008) whch shows ele i bak onl alte Bel ce honing, by wg al ite ere ‘ling LOCOS volt equ aw chao 5 ‘A impel tes LOCOS eee eda 0.5} CMOS teh, the Shallow Tench ati (97. STL ‘oe dept cts tl en which are eed i he oe wae aie af The we af ST fr depen tangs iad ner thi chapter (toe 383). ‘Aether nortan appaton hema gon oie he ie ayer ete nto ge then: Th ‘at ie mt ‘of high qty and wy vl: Debt such x paola cle ‘ure vest ect on etl pera od rater likin, "The gate ode rege cotiaom sell tation ie "Th gat cde hh wal ering ale 32, whch ete he yar of vole si “Tbe 3.2: Gate nso sealing ome ea tl ur oe =e pean) ‘Te ef deci, gr below abut am thick cage ide dco tunneling aking in crete whch sty coed eed ‘{1Ajem" Atte thin gate, bron oan fr tn free pe i cts pemsartng in gate xe car hl to ‘Shtedoping fhe nae rs elf iin, Moron, tbe cond. ‘iano hinaer gate ce dread canal Soper an ene Jo ton fhe otto rg the ae tral Thi cai eae de lain. Av laf ls, Ut ere doable oe gate mater wil eel fae say epee fe MOS trnstas and doped gate fr OS tua) A i of ‘R&D rar are oie coast th ‘ate ost pn ata al 3.5 Deposition The depo of thin eof dati mae, pbystco et ‘ital a important fe fC production. “The owt fn pita in lay) an example ote depoxion of ti (12. ler of sg cyt atria on tp fig {yt ata (rw). dpa gr he ate at the ster, alld bam pty a ep fr sor ‘nm sapien cate of hata whch te ad {ed snatrate materia ifr (0), pital deposton cated by 1 Chemua Vapoar Depaion (CVD) psn Thi rose da Ing wie vapour phe cats a report oad oc wt ae ‘strate aac they cetng ln a some yr peo Tie epost ron fn hse Novel he ated Sa ened bya CVD proc the oe fx aque of chee ‘eto Hoveey, diferent cel ection can grey be gen Sa of i lan sous The Kydes relotion ft tr ‘Serge SC), fr ply an be repeat me SiC, +28, st + 4m Sera partes deter the growth rate of a, neg he ‘ure otra an deta venereal, igh tmp (CoC) ae br the depts ec the owt rte ‘heme depeot a the operate od th shows Sew he ‘aeons The onal extn or the deptian of pans 3 opour) + 8 ot +2 Hy (ron) ‘This sen ean tbe pce at bower tenpertes, boca Sly de Sump ts Riper rate The cio fect ger daring TO ‘Sumer bso pera by soe fr af CVD prot. Th ot ‘monte dlc mtr ne so hee (803) and onside (S46). Ian Atosptars Promure CVD (APCYD) pics, {hese dept governs, Thi depen ger ‘yout orn por ey coverage sue). APCD ‘Stacy son to dept Boe Phone Cw (RPS) op fal esa fr the teh pti ae (PSG). BPSG lec wich dpe oe op 9 ppt (teen pon ‘St ft metal)” BPG cota boven pert fr 2 ter {in (cred) ofthe ieee ‘The plortar aba ae imprve S10 ad Say ropes LPCVD, SLOG). + 802+ te prouets PECVD: SKOCAML), +0 +80, + trgroducts Tey: asic + Wil > SQN + HCL + oi of VD hv en na ye asi ‘temperate btwn 0 ad TC. Ue econ, the ‘apourpin races re suppem,whle he decepontion ow Sern he ing ta ater op oa ee {elma oly by thal emg. PECVD ie a patra {CVD proce A plats deed be april tnd gu ih ‘cutie, hon none The pan gre yop Plrne te RP el topes, harey renting ee toe ‘rin the dacarge rego 1. The satrone gn not ery {th thy cle with gu nll, tery cing gga (lamas techs andy soto cory cone. an een ‘Ste haps depontn rae ha ater CVD pace Tes cpare the previo econ to dpatting SOs, we se eat ‘ae LPCVD wich oun a igh temperate throes ao Laat SOCatg),) at ow temperate A Sob Atmonherc (GYD (SACVD) prc ears tte sol 70 to IC. ‘Beene of te hgh pore (= 1/2 etna teed owt, the depo gud wl be hig, rutin ia ihe throughput. "Tha frm of CVD article nd oe BPS. eal inp ae depend by eth pal and chic tod, ‘The pha mace ar vapors nd spotting Inthe pattern ‘echt, als arget beh with ron etd ak ‘atin dow fom te tare othe wae rece CD tod (fr camp, yee long CVD recon “Th dice of epson mend iden ya ur of foe itech stp covery he ae iportat. Pig 3k shows 2 ‘rapid luni sep coverage ot cna. Such ep ‘Sree ca ately rent oan 1, ao cunt ‘Mowe, thle marowigecanace wittand igh caret de sto. Caveat demi of = 10° Ae? ar ot except in moder Isteted cet Excanve crest nis In tl hs ese ‘iain, ote a tn el ce {ope nad me clin ae 83.6 Diffusion and ion implantation, in nt apie en m-th ition Dilan eth roe by hich the impaioaze pel ea of ‘he oxi rif th concen he Gar. Dien hin tsp pres "The i sep cle predeptin ad comp the depo of shighenmeattoe oh equa pay Te puri pete ‘meena omer et the ule, grea mperataee Tue TD to 990°C: Astin at he mpi Nw ee de ‘nth the i egrened jan. Sle) te ee D epee hn lilo conn of hn imp in fen?) ol isthe inp cmeteaton ran. As the difioe stony depends on temperate, cach diet it ‘on prom ogi neal alton fr dient ponang n- ‘tions Duri the difision poco, liz slo Inthe te se ‘Sestetatel by pty atoms “The mond sep cll even ifaion, Thi igh tperatare ( ltio-0) sep erence te ares Ipity ronment, bre {he ips dpe no the wl, ets ete Homogueas dk {etn of Ue ius ed tts te dapat. As ra of he Sneed eran fanart pinged oping rl, ios iene a aon pb Ton Implantation Rta pla an So ple, nich camps 2 ream charber tien fom source ha an supply Hsp oboe a for aap. The sion was a pla in teva eh a {Sew rt aad othe ete de Ge nln of ec fan map el "The penton depth nthe ion Ses ‘hn energy The eerie yh med te age Gb on ant ae fh secbeing vogue e ‘esi wih nas patric ees Cat Sly os he areca ed ge an rach teen we Ton Implantation is hate by the allowing our parame: 1 The te oi. Gone thi pape, sere 0 er ‘The mor esol of the en ar mp + The sclrating okay (), whieh vr oa ts ound chien + The creat strength (wih ee eens Ad 1+ The inplsttion darn (0), ie i be oder of Yeas of ccs pr wafer. ‘The tal large Q = It Seemins C ‘ier of tht wl eer te co Typical dae ange from 010 samen? Vatbe V, and an be meted with wry high acura Tie ‘nso plato mich mr erode doping sco than fll fio edna Te win, Val [ean be vd a ‘Soctian oft pod Ire iyo pepo itr nt etek in Th mason pty ein aot Te on implaaton ecniar,homee, an tet slectly rata rr with pea bow te wal sti. Th ors of ‘pun dace ovr tne wae tac neato o> In ptr. Tn plastation cans rious damage (Sod) he {xt tie oft tat Tn on, ony to of te pas {ane opie! on som best. Th be pat doe 0h [te ter‘ rtd dope ata re eel iat a oot operate as dns o eps A sunita sp at tecupestnes baw 90 100PC: rod ern yt ae ‘se hi snming pr east ma ary Che dopo team het tie o he atic te. Tou implantation as exit od feeind poe ental to (OMOS imate. Ie i opera to chon depen togafo the conta of npr rang to 1010 10 atom. The arto npn som yan on oc od = Wan ‘lle and sn ft sure ale te saying mage ‘hiner oly themed lene och th ling peti, ge Sete, Fig 30 Base nt ap of oe pate See: 1) rape of th we oe mpanain ae + he lage tet trogen patina 1 hamelstopimpaation + soc in mation (015.04 tals) + houphp wrth in ifsbe proces we cpl paste, wich eis well rind operators iin cto gin: 40 6 "The we oon plato nh oat of ore aa repos be oes ines lagi ws the janine very shallow ‘el rocmsos The dope omentraton dom tac ich ng Only the esr ising implneaton mt ate ote he ‘tallw jneoms Sesion of suse a dans Dace oe ein hate can penstete trough th shallow jection The ‘ale juntion ting Unite eure ad Gin ae x ae 3.7 Planarisation ‘Thine ith ber roceming ip combi with cae ‘a tare son, ron nan tceaanly ewe urase Tee, ll ‘bales a derpnisos pon vera paaraion pe ‘Theses ate ara’ Un srs Dr the wat prosesng ‘ir Sra $00) emt, he arn wos wh Tei tom sete” Afr th th ews td Cpe), te our ow ue tonsa ed ae erase Sn owas crntng pupori ar hee peed inti, Thee ‘Sng dr ers pto etn att An nas 11506 tha ry al en ry ome, wh, ae ‘ties ea at ot ally, pre gre 0, On oly ‘Sogn (A the rem may pul A ag Sb at cae ta Fig S10: 506 pari ot (tp of al ses (8) ad open ran (C) thence hie ‘rl ean i he all open parts nrg ares (4), Inahing rb probe wh Dae OF Ras (DOF) he ‘gp, In mont von! tral of 025m sade, ey Pater ith ee Chil a “CE nth combi dain ad he imate os ha! ur) ad acto poles he Sco Be ‘Th ary contin posing prices (og leno li) anda stein stance (KOH ov NHGOH (onions) A paling ad (eter wth tn sary plane he war ste, Besos CHP i ‘ito fog rns, afr the stn nd oie ling tec {Gs meson 3.43) aad uring the malin avhand) past of mae tl poss gure 3.12 tows the ane of MP in combination wih STF frm tn igre 3:12 The eo CMP cin nh ST maton (a) ‘tengo te ents sre MUP) nr CHP ater CMD SERS dy rr ons ying "rg. sen ees te eer wii igh Dory Paso (DF) Th rome wo pte ‘hig saooaly wit on depen fei Th oa Sey snl atin he pied ta paar a at eer ste we ik Fe 3.11) shown th ttn Tower we lak a he tl mrs we sree th Aight fh re, cel ding ean Lar open tela ly ith Sey en Se in) An ce ACTIVE nk dw ge hd ate) soe net ay a,‘ Sis ih deny ttn (4) oth wy» bls ah ea CP ah tan ck pith in oon wih ST aA ro “CMP ech ar itt wt ropet oad pation AB Spent ue the pence gts CaaSPure 3:1 Aner CMP, ri! atl sap pd oe ple ‘ti ig yu lq 3.143) show he seation er ee dapoaton om op of 8 ‘eta al pater whieh ona nl bal re Ae hing he remington top ofthe etal gel {bike a he nonmetal aon cen fr set platen gh Te ave Ste 318), whe we ave mmoth py ‘rs! by th ping as at ho mechan pcre Ws cto fdece ts pranetor, wich ype measures 210 "ow coer the une mal patent ne 3.13, at with ‘worl ltd etal ac a more hn rng lf he plan Seton gt Ae cde dation, te eset ks Ke ge SSIs). CHP ne the hi cn Inge np ofthe ae eck ‘ysis. Ara realy ie somiing cide topo eae ‘ak mth ethan on the ange eal ee ue 14). Th ‘ic obln i albmetler tecoegas {red emhfrta ntopo dty d ea ates Rover of uch la rc ack in ve meta mas, {he lta pater wl be onto cee drag expr Figure 18 ‘othe Thirwilyrtalrybeapeciom a orp eters rocnues, ic play estan eo oe mala, oot igure 15: () Oe eption fee MEPALLpteig() Ae (sss GMP, VIA eh so la MEAL? patra lg uote pe eae ap ha So) When po See tare nen a (a) Tb cpt vr il lg elena free3.8 Basic MOS technologies ‘Seto 3.2037 tat MOS proc ily nt fecal Ti ston that are repent. Ta modern CMOS procaus, the tl ‘ber fons eee 1 eal de a ths stn «ti nO pcs With Js 8 mas i ‘ont. A gor underage scat 0S proce nals ‘enna of wae ew step, he C3OS proces ae ft 28 et So af the baie nMOS pros pres ate. A god ing nto both Vehouog pes a preequite wen capac te asag sod Tssatagn of 208 aod CMOS. Fiala mpc CMOS proce raat sod the ao an onda new spe ae ace." mtn oe ‘ia quate dhcunon he ot dominant CMOS eal 38.1 ‘The basi sitcom gate aMOS procese ‘Ax MOS proce whic 8 mee Sie maa xpi ith he Si epee 37 Fine, sv ord grows on the te sbon ar Nex he nian wae ated with ween SN) Inge tbe In ge 1). ‘Te fest mas ote ACTIVE mh whi wel Wo lice mide sa crspeng to abt repos whe tains sould be ‘rma After the aide cd, bon ir ipa tah he ‘eting hk spruce cana! oper, dice sn 14 ‘heated a gue 310), "The wre odie to pred {he LOCOS area in gure 317) The ein he ee ey ita ‘lan that wee not coved iy the wide The case! eoper 1 tae astomabalyproateryrre tenth the LOCOS ene ‘Tir a gene natn of thy LOCOS proce The rv he ‘ein tei rves Ut aes fn wih aso wl be at ‘on Geant se HE ip Thee spe oh “The toa of he ce vai ete 1 nd 2m a watt MOS res. The theeol lag stent nplastaton hich flows {hs toa dasngm te the exe The inplataton te Unreore hice throug thi serif ee ate Low-cogy pary som mach ‘Sf fe) andar oper (Ca) fom te on pater may be ght {and/or man hy the mesa ate oid dng he nplattion, “This etch gate oldest rool ad th ata ee Cadet rowan soe rect, weer, ae ped ‘Erogh the ate oni, eg aurag» tbl age (comet) Implat. ‘The poperi of MOS tranator ze lglyenminad tthe gate ce Gate onto thre oe of hw re ‘rotg wp isthe tee 9 and 1m fe ae 3.2) ‘Aer fh plano ler of that Oo Of coe i egosed. Arent opr dition nto dope the pote ic, filbwed by pholliingraphie and ech sm wich yield Dalal of the tae patra onthe wae Th POLY sa the sod mk sep in he procs an se odie in ptr i ton ey omens oe Se (thin cae ad ua trenmctios pr whet ben ko ie (LOCOS) "The she estane of pate intconoetos os Sewer 90a 38/:Plsizo an ere ly be el ery ‘ore aterm ie rary al). ‘Phorphrar (Po tse (A) ate aly wd to crete the orse sd rin sen Th strata hse on oat ee ‘Stato pollo. The lg ofthe ema are ted y he [ZOCOS an thn plato ate Source od drain nes ae th nt ‘Sued iy ama bt a aligning othe ato fi [ne The nrnp ofthe eo he nc sad dain ro there ‘Kern! Wythe Iara ifn of the soo ad dain ner fate Tin eat of he nr iis bout 00% of Ce ion ‘ep othe rain ad ore “Curent wer dope drainextemionsace ud wich show a erst Aisin of boas 40% of thei depth ee ao wston 283. Wiha “rin xr 0 pth al ifn ony abot 4 Io 1£0a:qen proe, T ele tutor hie hg i be ‘culo the pen wit mina two tbe ter se, "The wai then cnr wits rw eps pone yo {EPCVD step. The ruling SILOX ter inate a Soe 71) out Os Gap th The CONTACT mas the hd ma op inthe procs us to dae tt hf the SILOX ae, Sn Be S17) The ttl ne then dep hy ss of Tape prom, I td ode ibe pen in he suminun ‘oetangtn eeuly, th rong ow complet so Be 3171. Howe, ‘teal tp thc wa scone wi pase ps {eT oi prin a tty elt ‘on ofthe sath protection With al a tp, he each Develo tld ary inthe bonding pa ale abe wing ‘Scnston om the chp ote pre Tha ed Ue sna Poco cewek iin ewe MOS poe flow 1 ACTIVE denon of cv zoe 2 Pow Fron pate die 3 Contacr Seon of ccc ie bnvoen sluniniu at ‘Semerysaine stn pln A-METAL ——_Bteonmine patter detin i alam, ‘ivan Ir, to beable to cnn! Yondng pe ith pcge ae Note: The temperatures wed fr the suc ad dein dfn ‘Strain maton hrf pei an shia e po ‘ux Matdeoun gis hav ao ton sxprincta wth. Home, {hey hove beer ber dsl spl “The scam ate AMOS proc the lowing proper + Sal gcsoarn and ptedenin oelpcapctanes cam by nein planation 4 Thee ncconmction er niin pos al ‘lain Hower, nection of x and pbc nero ‘one ae oe pb rth rs fn ean of ‘Ghar promt hae sm oe rin i _ a es Figure 17: hho ae nMOS poe(Shmuel rote) S9, 0 So, Sean inn 08 an mies ve pars 8.82. The basie Complementary MOS (CMOS) process (CMOS cei and techn are mae comple tas thi MOS ‘nner nation, static CMOS cesta ore ai tee tha te nMOS eat wd cep agra he se ros snr Homer, CMOS cei inte power the ‘Cumplety& ned y toe 1W mao power can se Shh pti page In fat reco atin he ain ‘eso sing CMOS sed of MOS “Doth wgpe nd pipe rsa iterated a CMOS proce. gure. tater the oa sn CMOS pom with el rintuh inv pMOS trator ae hp. “Thi poe Sra cng fo th many sisting CMOS cao "The trie CMOS proc bg withthe an some is ‘Soa ide (SN) then Spt the wa Tha Swed tpn plore lyr. A sua murda rade per nthe Potosi oeonding tase are Ge omest llbe ‘Sete ads ae “Ph died pater eerie wich cm side reminding srauegen ching tcp. The ptr ten comply eon ‘shun i gure 3) LOCOS oe thn rome by xpig Ct ‘ler enna hgh pear Th one il ob gown (eth expe SiN arash LOCOS espa sete tes, Se ure In fra iinton of he rot Inara of LOCOS, ‘Stn wd i depton proces to arparte nti a on text saben). A tw phir ye chen pened ante ‘ope trast ks ar pt dry pte spe. The ‘e's pied tly porphin thes mow ‘ecSMe) isle implant os cle! ato uc bat {iy dic re dcpy daring sree lagh temperate np. A Inger lion the depen on the mar, wh ow conn ‘epee ars witha inl depth of 2pm a ype sobre ‘Peace doping ree eter wtyyeplpsiizen fo bth NOS nd pMOS tuner gino dub reed patie ype ad brie paso or OS aot pMOS tater ten, reper). "re ao statins rere to 3" /p" dal olin "A potltngrapiestp sme sate pleonpatera rece“Th ening platoon ed frst ntonnetonsad ota ‘Sere mask re li he elle sored pata. ‘ine the (0S an pMOS trannies the ate ad el, repetnay The ol sown ne 2.383). "Pat stp in tbecreaton intcnnectons tetee the diferent tears to depen 80, ne on the er Ctc ole ‘re etind a tha Ine oli connection tthe gat, dase ad ‘ours fhe attr Atl ayer endpoint al nrcnmet pattern cred Wy mana of posoltorepe td ching tg. Pigare 3186) sows th nl rel Madere CMOS prone ase 90 to 3) mass Bal, thse po: cone ae alleen ofthe simple CMOS procs drcibd tove ‘VEST ad amcneny pence note hao gt) gi of 013 to (05pm and ofr sera vel of palo adr metal These na Uh etercoatecton yer ltt higher cet dest. Te ee 888 An advanced deep-submicron CMOS process Figure 19: Aa and paren pce ‘Compare to he take CMOS peor acon Yerevan ‘Seaton CMOS poo, whch Ith D5 pan sa Actual, LOCOS i hick SO, that eemally roms betmen the (ei ara Ione, Sali Trench ton (S17) geen ‘sigan ome tps, peri ny arpge a res pestle sec wit a tgiricngratars ssp The ST proce ‘art ih a heal grown ole mi hk etowen ID 9 ‘am. This lle by ne LPCVD depot of L00ee to aid ans (ST as) nl shot tance blow ce Dota of ‘See iden. The iat there cts «eye nae spree dip, hich res In ned Isa dion Cone ‘ty the well ca be cartel ied ad Un separation fem Scars ie wea of hi own ep es, el ue Felons na pel op snc) ra ein) cn e ely nal ‘Thre the mon importa eo applying egal pon. ine "ach wl cn be opinion th ist paranace rboth typeof trainin ede insignia {in capactanes and oy to by nig tp toh (APT) plat Avr motgs bt rina he syns ‘elect th, In ado, th two wale Del ea tines compet ad can be med by ding only snl mk hating the teem Foal other ent santagy of viel {CMOS prc fl by hbase ela property, whch ‘tate the apd attr of dng en om procs geeration tote Sealing erty sete np ‘Optimising ini spel il Sigs degra an (ike Goel ro (ting the) ote ene ‘ned ange digit ev peor) The hour lc, deel in caper 2 only mit ta ve ars aoe mece Hine eurey tha about Sen 28 [owe ad fe the ries ee alone pose cy Shue d= 28cV lu a23V pcos). Cave cn oly nue rch ‘eres ater bt of alison the pic gin Ah ce ‘itis become wey nawow fo Geepmlcon teal, hs "Phe LOD (caper 2) paste a wed in prone of 035 and Inger hep by ne hope ose rn een. ‘Thisour an danoxttion pred nth san wy a th LD. oer th doe (= 8. 108fem')B aboat a eo en hgh than ‘ly oped. at EDD and els ier rete. Tie ‘ae Grnextenson pan ery has etal een inci, wih alley beter conrl thc aha ene {he siete ects Actual, sucha extension act a3 ad lnm In some ene a erator lyon implant ‘cate the dun” Thee the witost Sennen pat, a ele ‘gly Doped Drain (HDD). The pps blo with eee dope SG do i ye ae te Silcide, poles and slices Scab far bythe TS, WS, Cai other met ‘Sleds When, fo emp anim fins dened dey om 8 ‘en he, ee the dton fn ply a the maton {Sse erring sachet ting ste. Tar (sd me ‘erat vst with expend pan (ling in pleie at ‘Surc/aran regu to frm TS sei. A Teo as nie (Tax) ie bem smal om the som se This wil be elt ec a Sibyl ow ie cide op ayer in pation and wute/eanmgns to rtce RC dels by about 1 haere aad ipro ces perrmance Bsn thesia ‘ap sew eel slag! le or also. 21/01 fm ‘iain (1) nein the ota holo ew ids cele tne omtat with the ering ele A ante TN) flere otc, wlan the tap of he PETEOS, beste ‘ipod dice proper. Win the anes bing eed ay ih plan TN anh ay. TT a apne is tener of te snr png AnthRuflctve Coating (ARC) Inthe ra pastern sd coment th anrying metal ser ‘id bao be dao A anim side in oe dept np ‘the total aor dss ar an Anbetr Catng (ARC) To im» highly atvorbent nthe expense wavelength It art mst (78h) ofthe ration tht pena he rit. 1 ao appemee soerng on tpogragiel are.‘Comtact (ent a may procs, partly thn wich inde planation ep, ‘ie koe may vay giant Dep contact hole ih gh ‘pet ate ei spc tenia gana ig of eh ‘Toma nwt pny aed ge) nso caren rome tl paterning ney depntinga meta ier fiw ya dy ting ep etc th malay acorn ‘ak ptr nthe danse ro, pte ae erated Iyengar with et ‘el the pli the ol wating CMP al he poling pod ‘St on te dion Bue 328, =a Zz ie a Parentpaing ee ee a me TTN — Weckngton leech snl a asa Tie toe ‘mien CPt pation igre 3.25 Compu of nwt and dana tl ‘nine Curren amacee patening i ao we, pasty in 28 Slow, ofr tapes wie. In a a damn poco, ge (ead, pins) an wie sve dopo start Tae pret Teac tn dept ofthe pag and etching, Uy tding oning cst The dare Poms eat be wed to pater copper, nich carey canto be he ie ain nae x Seto The copper il et oo sy yoda ie emain o {a aocen with copper ean be pled with CMP wach hat copper ‘al eae the wt teats caer The we of pet {Seed of sani o iemincton a ao rdeton a he ‘Serconorcting inv ty 2500 tention wt the a lowe dtr, te set canbe dubled and the power ns be ed (Copper a an withand higher caren ene dd ato ‘lotro, seo seca 113). 84 Silicon-on insulator CMOS (SOI-CMOS) process Te peut CMOS pst atl ae sy Isat gare 328. The comple lato of (08 and pMOS tears cil with ths promt een te pty of ae Nar the 208 oo pMOS taste came ree om cmpen- ‘ating party dopo. Vry smal by ec sourced {ion the wand pilin pions dor have bottom junctions Comoe, the puruite cpus eich he tha he ‘ie previa CMOS proses Ths ke hv SOLCMOS foes partly stable fr highspeed andor bower cei tye, wre, coach Ge rl evra ata ‘othe with SOLCMOS pconae The alma abetted,fo exam, comps th protection of nt tte Anat {be SD pubs darn per 3 |LSeran Sct etn tea SOK CMOS ren SMOX (Strain y Thiplstation of OX) proce provid leap lteter te nn apy ce 30S-CMOS prow ‘Sheutaiod eyes yer beet te sce of wee wale ‘Th elingdaage te war cst arte cot a {Sremning sa, Te rel town in ge 327, gem 8 » » igre 37: (a) Courant of SIMON maa (SEM pet- (pub a tan ‘SIMOX was re eter wh 810 Ine ete 30a 0.2 ‘Thine dane to rela the conmnornar of mage he wafer mre Fly dit dea can br! by ring the ia othe top ine o0p, forexap,dring proce "sec downto INOX (or SOI) » tha het Inn ft ate chanel re inte rm the maa sy Th "otng byt which ny potas wih crwth by leach trator mat be snmt te th ste sete othe ee rnp rant Wo! ately incon fhe SOI pcs property otal, he Bing ody ec cae bere. Several SO devs have bees preted in tertere [19, Home, SOL chook i el ct ry tre Be ‘ane the yl on sin he ae ot an yy cer 3 Yo (Cif preload, SOL cn bec an lprtan eratine 1% hl alto echo The mondctr indy rca nw ‘groin ines SO [15 ns may be wags oer Duk {CHO Reranch tage CMOS (£1 stm iy eis ‘it digas and RE pats, SOL expected to ar beter ‘franc han bk CMOS techs 1415) SOL mt dvr ‘te sd tthe sane power onmmption, oo sete ae Power {ite te see, Prey 30 elisha ati es Agha, asl and RE prt onthe IC. The ete wil ore ‘ecb ae aly mate Aion a 0 ence ‘errant Rss am CMOS tacks the mate dong ‘emweatoal C308 wil bce to hgh SV ohn “Az exten f SO, Sion On Anything (SOA) echoalogi al ‘wing droped In this wy, "nwa CMOS" preg pe. ‘en on roa ak or epi) sos. Aer proc Being he ae i pide down tere ch gest {ie tt lp ga ler rem The somponet lo he a pide ‘kw clon gas uate Theta of SOA i as led ‘se on gar3.9 Conclusions “Thi chapter proms naay of dierent MOS proce nd thet oom sep The say sents ih a ae COS peo a ronal to smpherdepsumlen CMOS pres With ore than "Tee preening reqimes Sr dfent ype fcc can be (quite divese TAM fr crampl, ea tehology that aloes Sey igh dente: CMOS wai RAN thre ree ihe ‘ifn to -epacn, Thisean bah win oretoae-wl inplataton se Yo minis tr! wl is, te wh campos hen cea ca be integrate. A stated ther, doping) dre dad a ws Filly sal ede diced which fe ae holo requiem. Chapters 9 aod 11 es on hn pga ete {iten conan he otnapes sealing pons 8.10. References cst | tone Mineo actin’ Moun aise on wld sae devs wae V, Addon Wesley, 1s (2) IEEE Trane on cto Deine (3) IEEE Taneton on Seminar Manat Confrence: (4 eerie Elton Device Masing (FEDS) (5) Rarpean Sl tae Device Cf (ESSDERC) “enc and produto prose (6) sat se, eGo Hi, ew er, 1988 (2) 2 Prt, Twin Tub COS” A tology fr VISE cei "EEE IEDM Confrence, 78275, Wang, 980 (ra Sat Se, ‘Moen Semoulator Dove Ps Je Wiley en, 1007| [Po Jam Stats, Brace W. Sait "AICHOLITHOGRAPHY, Scene and Tekoaa ‘areca abe et{inden Maia, Micuentinng nd Moe sion Vl, Meret ‘SPIE Internat Soe oO Regering, 807 1) Digmatar Pramas, “Chalngs fr intra dct’, tare Fa tran 1997 (i). Wotfand aa, 'Slizon Pocenng othe VLSI Hn ‘ohne, Pros Tekanay, Late Prey, 1886 (0t] REM, Roos a, ‘mole of pocket opinion oa aalg perms in dep ‘seicon CMOS, ESSDERC, get of tcl papas, 100 9p 176178 (09 aa Hoa, ‘sats acd prope fr SOL materia, Fare Fab trata, 1987 (| JRE Inman So State Cet Conte 108, ie. Selo: S01 Micopios an Mena, BSC, Diet of Thal Paper, p60. 1 eth $0 rome wth x nen SCC, Diet of Teel ape ear 0 (8) 3 Pet, a, "SO Taeoligy Peirmanc and Moding, TSC, Dig of Tha Papers 198, pp 28-8 1 Dede, ea, "aa Ula on Powee RP Bylo Tico on Gh, IEDM, Dito etal Papers, 07, pp 921.25. 1M. Sterns, Phe Heer Lb Samay 2000 BALL Bxercises 1, Why the farmation of the ae ide a ery important ab a ene proce 2 iy epi th major dence ote the difiin proce td the bimpatation pros. What eth conending vantage nd deat? 2 Wa the pontoon lin ak with 9 ap cog 4, Desi he min diferent he frit f LOCOS sist 5, What the ma dat of aig ere el dein? 6 Why partion ices porta in mode ep eso tchologe 7 Assume thatthe sath metal er 9 025 pn CMOS proce iropdoel Ta whic Sigur would ou ue he wath metal and ‘2 What faethe fata] savantagt) a ng he ‘eth anal bee? 1 We wa copper not er In the snalintion pt of & (CMOS pss? Wat ae the devanage af psn ecg? 10, Wate emt nthe manta depen hip? Why ay ty bended nah ga 1. For which pe of ces wold SOI be partly bene terms of me od poeChapter 4 CMOS circuits 4.1 Introduction Aight exit in the sent tak ap ee midge bre (1108 bore the ading cho for VES cate. Peir th ti cly afew ects wer ded a CMOS. Thor dies ‘see nly ne to analogue ees nod gil aca at dni Jue le pre Example nce chief elon ies ae ‘ent oma CMOS fas th type and pope MOS tsar ‘This ands CMOS prota the most some fall MOS tan ‘only this ment tht CMOS Gets were ore cay than “Te jy crac in pMOS and nMOS traitor re ole and cto rape The moby of hl abut to tne me ‘kan enon moby. Tha males pMOS cele isa awe ta OS crete of eal eip ae The contin ie fr ‘redial cet performance hrf ol to the ly ia Frornge of OS toga The demand Sr hghr png de ‘Se ud pevermoce fd foto ics the comply of OS pric tbe qt fr «ws FD prada (poe delay po sein ee tty on ire natn hd "eco wohape (V0) and diet dept thol vogss (Wp 0) Bon ret og of 20 vols ba to be alae ‘The hel vlogs wee provided the cst nal as Se exten prceaing ep hc ply cated the comple ‘M05 proces aot te el of CMOS poses A a ‘Sem afte CAOS procera ‘oven muutcing prea male pombe to negate i rang comple ete a ven compte tenon ng i “oe reulng oe af amir pe ip fay ach tea fe Tom The sac poner dian can ly ceed tel ‘uth CMOS pres perl ne hl Soa uly + th ofthe poe Sipatl y an aN(O8 ca. eran, EMS chee be beter mise marin. Th vets ceo th eo MOS tr the tran of mon dere VEST Seite ‘Ths inde mario gl al pra mrp Senor, geo athe da teats Gp Sad some ‘Spas On Chi (600) “Th mah CMOS pois nd i haracteritc poet ae SNSITVBios cso eal to saad CMOS cat pe ‘See ore only Dae dagn pine and probleme sited th {S108 meno thin ptr Seer dire of bat ae Sd dnanie CMOS cee ards, Oo a int had ‘Sipe ented was CMOS eats be Screg” Problem. Te ‘bjt isla in dager, gether th dod ting agen Sd ear timing tos” The chapter sds with sctin n CMOS yon eng, A Lt ein tind i by a of a2 rly soul bent hat ny rampart on a lh ‘atom pine Tan ts proce tr sen ef op ity with te cmentona OS pros. adn, py oan {Ostia ae MO5-mot. Crey, mnt rorere we ‘ri CMOS pt, wich sod IOS vat ac be reid with pina petra 4.2 The basie nMOS inverter 42. Introduction Generals, the ce! propetin of a tate MOS cc te st Bly Sermined yi DC tohavoa and ats poe The‘lb expo! with the alo one fhe mn tary MOS ci {aa athe ince, aire showy seat o an inverter at ies yen of Pig 1 An inerrant oped st {tet typer of Ind ements ‘The deta re ban om Semi Se (17) whch ex the unt as trite lowe oer regen: fg = N= ~M Van Wa < VW) Saturation gas lg = IVa? a 2 Vp ¥4) Wher: Me = Vt Vt ‘Twn eterna important whan arming the dts of ‘tis MOS hg ae 1+ Tin locaton ofthe operating pit Tie ae the outa vl se Vand Vg which crept he ge aes Spent Ope rlge Te empl, mut be nae ‘erp’ hth he tl lage yt yp sso ‘en die att, lan arn testa bet Jie eae aap iene coet, Vy rab OS oe ‘ie magn af tout O25V i rally wed.‘ mpi tt HOS O25V in aMOS dea Sn + The teaser reponse. This ply vel othe sand ‘Soe soit wt ag ithe pa ge es In the net ction, che eters ae dase fo be ne pe of iene shows pa 422 The DC behaviour ‘The DC bebo oferta with dine ype fo anes ae ‘pla! spray non wih elo ge 42. This Ste sows Whe reer oir erate = fal gy tet {had ie oh len oa hee i 1. Tsao fe a iw re hectare ofthe ret a ht ‘eeonpu lage ofan ere ow (Vn Yi) ipa aap ‘hg p=) ad io ws The op wea lr open ng to the fren eons ae dtr y We erro of Inet by Vw Viet in Sue 2 The adel pontine we ‘owe br cl a are not piel fi tb aio ad ent. To ft of etn ten ed ln td the river Sharcerte in een by the dig Bue leet el se rroa anes thipt teri yt art aie’ A, which Spanuebwe Airing correct’ lel in wate MOS bg chay ssi 9 ‘inn a tment die an aed so ‘Ti pe kes ethereal ato! ne Saturated enhancement lod tramastor ‘he DC behaviour of a inverter with » matratadeabannmi ud ‘ear icapund wih te a a gre 3, which se chai ‘aga of he eter ‘The kd le aad order ara {eet vale fi li howe i” If — rt wed —L Vir Vin igre 43 Aner nth staat cane! ad rar ‘Te minimum drinsoace lag fhe a anata trl seta a Vay Vn» Vey aba pie Then, he Jind waning operates gn Th sppleaton tema (1.17) Hee te fwing erin Sr he cet the ta rn tv Vas? ‘The DC operation of a nvr wit «strated enhanc ad {eats eee a alle ie 1 Vg the Vo Vie The ev att fg al he toa attr ae F, wl nb teller = Kitaro tnt Ascuing Vi Va a /2€ ViVi se Vik = ME a= Fra? With Va Vi Vi, th nw he faoring erin fi espera Au hi eer: Be, wt ~ Ce « ‘The we ofa mteraad enkanomeat fn tenting ty the motte heal rik prodacr sgh lee, td this only Vy Uy tater than Hy. The comes aay oe Input tag pln on suseqen ge eet lower ‘The ww o's socal eehansonnt or dpm nd ramstae ere th bln ad potas sel 0 Va "The nomssturated enhancement lad transistor ‘ie ng 4we lL ge eri tit et a "Te ge oft kad taste conaced So a exten apy wage Vita of the apy voage Vg. The ext sappy wl age ‘shagh tocar the oe nee sen ser ih nw ‘strated eon, Vg> Var Py "The DC operation of Une aoe eter debe ae lim VR VS Vy fag= Oh ad VeVi Vo + Ve Tie > r= "Th ver wow operate a th rrp. The diver oa = into = i (atv m Aouning Vic Van YR € Ve Vig to Ven Ve Mi ile {he wing expen re ner et rt Up aH Yas Ti Fd te Soc Vie Vip Vn the pect to A expo fs ‘an (D2 y VV HE ry a ‘The we of wna earn an a le {he flowing adn 1M Vie (Va) arg si maa: Pat ie Th mosis ddantage eth eta spp ogee Win (ig 2 aa Vi), meh may mecoitate an eta pn on the ip ange AeratnVg ci be deol peered on the cip. ‘Tero totappel lee hows gue Figure The totaal nce ‘Toe DC operation ofthe botstapped ine expla we ows Wa = Vi the Y= Wa Vi ‘erp apace C thre chr. + Wa stb tonto Vis the Va ners by Aa, Sh imac y BU. "The mgt of A deer (rhe wlen of he Boca epatans Cand the pre ‘rans Cur sich at ary. Th MOS ‘bot oem OG‘This mmam tha metinely pases the Vu-Vy lea and teaser Ty, there ao ope eons The wolfe Vi ean {hen farther ince ta volage eater than Yq The ‘al fo detrd Wytecapcane te oe TGs ae so a price 2 HG at it Vachon > ty. BY, = a Y= Va ~ Vg + 0 Aa ‘Te ad rnin Tm oman thea peating rep. ‘The folowing equation rere apple Miva > tae Vag Vig Vi, 4: Bie > Va og > Ma roy en Yagi, ad the gate velge ote asitor {T,BVa)- y= Vag Loud amir, terete operat {athe stration region whe Vg The spect sal A of {he Boourapped vr thre aia ta gn apatite verter stad ean ad ‘The bonstrppd eet the fllwing ata 1. Thee ao thekld when the boos epee Cie conretly diese 2, There no xen supply wt ued ‘Tho depletion load transistor ‘The mance of dpetion trainee an extra mask (D1) {dada procinng ep Thre ar however, couirabenan- {age acl with th i of depletion asco aad hea ‘Twice the lio + The oupat high lon Vas eV + The bo exe ugly vlage reel, + Cheat compost inn and botstaplng unter 1 Nao my a ih Forth esos, mast nMOS res 8/0 tech ad an {ain bth easement od depos tir. Soe marae ‘ef depo ries thee CMOS ttl Figur 6 shows ae nvertor with depletion ad aie Ya ane Figure 8 An ner nh dpe dtr ‘The DC operation of the iverer with depletion nd anistare Ahern lows + Tie dpition lat tain ha 9 nei ttl vag + When i= Yr > Hy th Vi st pe OV) < Vawhl the der ano peat in thet xb Banting (heer inte ld we ent ay = tan = Cin: 80 (tatty!) toe Oa Bt 10 3h Vp — Vy he he npc atin Af he depen aad tise wean oe a (Pe, vat A hy, 2a Pd wo ESL cist may com of milo of gets which ay disse ose than Oto Tp enc A sup lag of 28 tee ‘egies a itv ad of eel MD per ge ate. Hoh an an Praca havea net reas of abot 20/0. Ration of = 5M wisn 0.25) wide pollo ta eee eqs ‘tenth of 25mm At the cot xa proms opel wee pr reicancs cn beefed on mal apart, eos ‘meas RANG), th dledrantage fee ronsing ae uid Uy vy rp poston quate (bin MDA i 105 ‘Th ation of» second olson Iyer with wey highest In {Eat ae comely mer than the ful OMOS cle, "The eof "iv a mete ane ay ie appeation a aie ‘Semor od sot noma coord in VISE csi Pigment ith aan ot od eon Figure AT An inert with it at ‘Te DC operation fh sone vet eid fs “Wt Vg = i tha Ha + Win ig = Vt > Hap hon Vani Th ie tao is ‘bem aprting in the a ei Eating the are the Ascusig Vo Va — Vi, ye the loin xpresion fe the pn ea A of tn dine tas As Werte a 423 The transient response ‘Teeonput fle uerndigta MOS cite re nde by tron: ‘cn wake an bythe ge ofthe MOS teamutre Te stat [is teve le pre ceca: ets bavi oO eit en hrf imply bo represen by the eng ie re oops, Se 0 ai ple deine ‘aoc pated tote ep tear fs lp gt nie the Joc eapactance of tren reese ore andor dan Dr funclons. These eases and gate eapacstancs af MOS ‘spacitanesaveaammed tobe coatant. Forme (117) ste tensed {2'dsiedieasning fre which spt ote ane epee 08 ine th ise tp loa The caring ae civ hd tog ach oft od lament gare ee Sie Sey te tring erste hah 9 iver nth ites perf ments concn tn‘Charging capncltance through saturated enhancement tran- Pure 8 teagan © which crea hvagh «strc ge c igre 8 Copa caring trough nase canst a ‘The volgen the charge capacitor nV and caret that carpe ‘he caper oa thn caer cre rom the slo ofthis deal quit, de lowing ca be de ‘ed Sr nth V = 06 Vay Ve = D1 Vy, Tq = OPV perracn = tuamewe ante us ‘This eto caalates the ogi hagas 4 capranee © Ina ime € 10 a wage bel oa to O8¥ ‘Charging a capuitanc through « nomsatrated enhancement Pig 4. show acapacanee Cha charg though mstiratd ‘basta! ante, x Vie ce Pure 19 Capactor rie toh 9 nana abort ‘ive ae Srey gating he cha even en ator og ate CME Wg Ve Van ‘A boundary conto of thi eet equation i V = Vt = 0. ‘Te slain yl the flowing expan fate an ator 0 ‘evetrsed esos trate sbi wil ear! apctatce (Cte Y= DIY tows V = 09 Yate #(VE 02 Y be A. fo Vg = 1A Va Charing a capuctance through depletion transitor Feeder gh tin-l ig 410 Cpr caring rg don ane + cane heh 9 dept oir ci mo Winey te Vor > te ‘wet yolog aro he capac ie oa sokage Ve VirVortlt (beet) 2 For volag aor Vi tbe epee C wil be fare chars "Wuhan itr a hse eo rego af pean wo ils eatin hae to be sed With Vom Ygg Fy = “DA Vg and = 08 iy the aces an tet Cs) Pipe 1 hows cpastanon C, which ease! hough rar fe ‘Asta the previo ey the charg cura nthe cret trough the sor ar equated lone wR, “hi eation at olin tie whan =O Wi ad ast att oy Discharging « capacitance ‘The dvr trams whith dchages he ence output Hod of fe sMOS leer alnas ofthe eabancomct ype Foramloe hat “bse thie diane he ded with hn fue 432 Th ‘ipl chaste shows hd capac C, whe died ‘Brough deer mato om wwtfio be Figure 1 Cyaan tng a nace rani 8 ie 0 ig ped te fe i Tere Roa naar ter phar eee ark Wnamewoamantusrn cay nents ‘in nr mat ap ea et iene tne Tee wo ks a‘Comparnon ofthe diferent types of nMOS inverters NMOS ives with difeent ad eet ce ow compared this ‘mpacr, the crn which ows nto lad lst t=O ‘i fo te iret ete pe 1 fod ee el Io= Bein — Vi Ve? 2: Nene nc an ane Yer Yarn, Be itv ae) 4 Depletion a alata: See 5, Banos die stor dca (eter when = 0) Vag? “The towing pie vs te wo poe quate compa lem ft aria yes of 208 eee Nge25¥, We02SV lye pA nad fom200,A/0% Ie transitor™YgeSBY, VrgmSU, Vrp=Q6V, ph y= BV ‘ee depion ad rast “Adolng pF ted capecianc,» cat amie ogame act alse the sharing sa Sharing career hat co ‘pond thse a abd debe nie, peti. The caring hare cid withthe al race a lo saad {The eae a shows in gare 3 vives} ay igure 12: Chagas of 0 nt nt igs 3 stows ta the vsti an the dept lad perm ‘afr eit aren, Ching ugh sted ‘theo nl rans Cary wry en ado, he a {So tcc wl tne hl rnd yl igh Sel T= Va. However, this pe fc wr thant ‘kp dic, a tinal iatage tod 8 fra up vlage go boosting. 4244 Transforming @ loge funtion into an nMOS tran- An inverter i trai int eg ae by eli he ver a ‘Story scons of MOS tansstor, The combat ay am fic sr lor para mata ach rn ue contra [legen A complex bento an het eimpletad see ihn met dT 1. An AND fonction is eae by a erie conection otras. 2 Aw OM funtion eal bya ple omection af trainsec gi ae aan ato of the as rr, he opt aa ge the ae he futon tht ced ie th ‘et i eer tin npn wing i hme ORNOT fined Beample: A ll der deity the wing og Sanetne (ee abo meton 735: Grsnesetes Symbols: andy reset tw Be which mut be ad. Syme = ‘ots the uy worst he Many m= yaad ‘ile C epee the are ‘The ge ton Scan De wien (2499) +707 +52) "This action oenpond to the implementation in ge 14, wich ‘als th nese (8) ofthe sm fet, Yu Figure A: Ae impentin acin Figure 416 stows elton oft cry tn. ig 15: Impl ft al erie re fi ‘Ax MOS tates gin ctr 9 oa ff. The ln tie ‘nao aia cna in cn expe allo "Th daca tine commas seit wich he ratios he ity groportinal to Tact the ed ofa ge ate aly ‘hermit by the se of raises nt omc {he der ation I tha genralyeviabl tole ths mame to's minimum. Fgie 10 for xanpe tows 4 RAND ge with 2 ‘ier trary "The tie) rt of he re Senge to Dea! ‘he (aspect rai fhe drivetrain apne cab Cult ing the frase nets 422 we 423. Tors MAND ete ‘rh inputs th avert de esis (D) mtb ep =teamins ah hav a pct ai (9), ber Wy ands he ‘Phaeton nei ee tn eet form ack c ett CT. 1 igure 16: AND ue itn ut aha ri rs ‘The mb of pr ction in ope gt alo tea imple Sa etc eb pt pe ‘San. Tl cam an incre fn the i poeta dele "This con prot oer the lt! dng of 0S site te the eton of base aOS logon A mae aan {age of alOS igs the amocatad power cnn Each Inge [pest nl a outpaces DC per Thar eve ‘rea e MOS chip bs no ial sins te DDC power tomtom CMOS ect, ue mare ole ‘ecg than MOS cet ont conse DC omer who the oat. This mnt nortan omen rt domino of (CH0$ ca the tga eel mat 4.3 Electrical design of CMOS circuits 4. Introduction ‘The acon CMOS sams for Compenestary Metal ide Sesion Ato "Te wird "wompkenenary” cat Wt acts of ‘retype can be sated in CMOS proces, The es a ‘chan and p chao rn ap MOS” The nMOS tanstoe {ais operation Bae ten ete tated br. The pS re ‘Stor ha be iy setnna Were hear, sional eae ‘Sout eoperton ae pried io hiclapan” Ti oMOS ad pO {Ets an COS proses ae oth of the ean 7p Sreon 17 rere Oath hes welt af the nNOS nator {ere ponte what of te pMOS asia enti Tine shows a Ege “Te firmne ded in nton 15, hich der the bc ine ft tebe hel yng of MOS wd EOS amon aa lee Veet KaVTEFTR (eabacomeat type, >, Ke > 0) Vey =Mag RY FEATB ote pe, Hy <0) {8 CMOS proc tha cond ath etn, the pMOS tas ‘Stor iinterted a e etge Vn te sbve xpein Se Sera ag yo MOS tate pm age "The ahow exons and iar Haw thatthe option ofthe MOS tite he nat comple of wb wer op ‘ation The dicta! peti ofthe 0S aod pO tractor‘a be summarad w alon: the pMOS tant’ bbsvone with ‘ptt be spp age etl othe afOS tir be 432 The CMOS inverter ‘A tase CMOS tere omits af an MOS ttre 9 OS frame conned show inHg 18 The wel sre 8 8 ‘inte the pOS tenor, I frm byte iar on Iplasntontecniue Sucmoed in caper igi 18 Tamer nm # CMOS eee gure 10 shows he cat dara of « CMOS ise Pus 49% Chet digum f COS ine ‘he fae subtate oagn om the he wakagy of ate ‘tore tected ln scan Lo The ela Vck tee Propurtonal the eae rot of cha dpe othe aster sd ia see Ko, Tho Kft of he pMOS tran tee fn netrrade ein wll proce be lh se oe hs ‘The pertemanc th pMOS transistor ampere y the my ky whch pent woo fu saw he tity af dco ‘This has oe flowing vstonstip betes the i co ek 8 ei etn ed Bog 3 Pop Fore abi hell voltage val, the MOS tania the Ino fan ivrtr with apminoti bin nl haee be abont ime he ab tbe nMOS eri Ti sara expo (eat rat A the CMOS ete a ows (®), “ee an) rmany poco polio ara a the sures and dane of ‘lang thepHOS amass wep rere ald bela ft ewe 618 that and aes ay never be ict cometed nthe [ACTIVE ms, tick dng. Soh romeo Many CMOS groqmus crest Indie ook dnened palo {edtalop plano plc at fr tho OS trator ‘ap pba eth pOS trast “The electri babaviowr of 1 CMOS inverter th MOS an mi CMOS era ae athe ‘eter a Va) The pts af th pMOS (Ty) and M08 (Ty) vember hat yd 20 ‘The tamer arnt expla lowTai and T, ee eV, "The att rage Vo he in Va 1 ad Ty ofr Vaan, i both f the above stale sitnsion, one nse aba‘ and 1 DC een an Bw fon spy round: Th cur arnt. ic = 71a) gu 4b ote thi tT aaron of DE ‘evn ia be to eae station the nt ipa eae of {0S we erred OA re Soe sy ‘cation a : Vin VepWite ie. Vous Vn—Wra- Thi i the area abowe 4. 1 (he dt in Vag=Va- yi he tran character 5 t Ty Waly < Vor Vig, VoeVi Ve-Vor-Vi, Tht ar [te loth dtl ie Vag hn wr caret * Mw il Ye % avg Mala » Fy 4 Ti at 9) ade arti) Figure £20 sows tha the transite ia iver ae oth sn ‘nid ding tations betes pie ees. Trl br ontpt Impedance thn iit Appleton of Obs La roves an ieee th he eto infil re change athe ottola. Ia practic the ouput impedes we awa aie athe ‘uct lag cane Lite. oer, tent ratte (ine CMOS aver ol wry sp emus be not hat fia 20 eet ai of te tap oar that Vz==Va, atid Vg>V 405, The rede should ely (Sat etn chalcone Gass he Wiel Ya ‘The hargag and dcharsog behaviour of CMOS irre an ao Uedonrbe iy mona heat ers = Vg) wm in Spe 2. Ths characteris obtain pale Ugh te ‘al eno Oo appl a th vert Ip Capaans © ‘tte adcapacune pet te tanto utp Tee crea ‘Soh ths pOS a 28008 ae yy, eps + Vor gue 42; Sate CMOS cee “he cuvesin ee 42a enpli ilws Tajptry 1+ fy Hine 0 pa he Vi rom Va 0 Va ‘ejay It: C care to Vandy dace ‘rjestay IL: Ip ic oO Ta wan eine ro V9 retary IV: C dng wo Vy hd dae 10 In gure 42, au that the ade sf the 2X08 an MOS tants ae el The cect arco sr thee Samia with ptt Fn = Ha Designing « CMOS invertor ‘A trae CMOS ogi ate contains a pMOS transite fr evry AMOS {amino A pend alOS wenn, bower cr at ont pall { pMOS tape wth tate ected to grou Her. « DC ‘Sen ts om spp to rat hon th ott ow Th a entry brow fe rie trae CMOS cea enaree {heave of DO suet at bot lw ne lagh eae spertng fn Tin ype of CMOS hp here aia te lage Tiyan Yala with the repecve “gh a ow tpt bree ‘npn of th tai ins I fot Ty se te sepals ‘Siege Fy wie Vans OV. The dyn ingen i anaes tna ge 4s toe in gue 42, the dye cage carters aed ‘he the aut ep ag al es Yq to Vn Oo 1 ee © Me iu 42: Dicker apace og a OS a ‘Te compleentry hebvoarf the OS and aMOS site po- ‘hice dng nd dicing acters wh are isla the ‘rif OS neti 423. The ton al ct sh dee ‘om ae exon rt gle tar an OS rarer we Telage nitrate Vy appl oa pte t=. The ala ‘Spy repent ere can) ‘The rose dimension fhe MOS trator ae aby ae Ing th gl tor to fy A, whee Ap, Uo pect a of {he usr and ea (Wj Brena tcnorer e e ‘ied chapter? yd hoe Ay dace as coe caelgen he cn, th ela val of Wet bred a operon othe dea Eeampte Given: 0.5m CMOS procs with oy 20HA/V Probleme termi the tpt rao Ayo a aMOS trite Ty ‘hich il dcr nd eapecstance 100° fom Vg to 01 Vay J Inthe ella Vg ie api oi ate Sotatios Stauttng (1) yl 4m. gating to Boer, aod ting Ae pA ye Because of cnr eft (Spte 2), which are no ind in ‘hotplate, th att cyl of Wssre ns 025m CMOS proce uc by abot slo of 2 Tie seu a he ei (F) fr tbe abOS ete mat be ("8 Ya ta edn, moot < Tr, gue 2% chp a stn mg NOS tne The sag leptin nd OS er ‘Shr There rt paar 08 th ‘rare a cagnlane Crom OV owt V 09 Ya in oe sn gt og ll om Vg to OV in Oat here Sly eine by he ase tn (13, Problem: Determine the wpe rio yf pMOS train Ty ‘ich wil rg td capes C fom DV to 9 Vy in ‘Bien OV apd ote pte ‘Sotulon Th potion the compleent ofthe peo emp ‘ours thn allowing epreion spi (xe atin 41) ‘The ls al tf bu deus mst be oa, The ete ‘ot thie we the evicted ale abot 3 Sr the ‘pet rato A eproned in rma (C1). Tor CMOS lage, however, falar of 1 to 2 re carey a. Lager aes ape [MOS traits and a oe hb epee pred 0 vows age glen CMOS eee lle th ere, tre (jana (i fron (41) ae the ect asic ap to ‘le nmin he pata cone sept. Te iene ‘he tans se wd at a fr A opin Dissipation of « CMOS inverter using the st wo cd, CMOS ecology ha cme the mat Samia tchlgy for VISI ca The od impett an ‘Get row tate poner cnmumptoe. Ths i eine of the ate af DC caret ding prods ive no silanes 0c ate CMOS chek, Hover a shrtchent caret Bowe fo ‘only fo penad when a chge slog cepa woage ce ‘Be utp slag Vu to change, hi abr caret Ia fo we diate 12 "Te ome lpn tse CMOS iets explain with be sid of pun 424igre 426 Cet ugh a und rar Only te n\OS tnator codes when tb pit vag Va hit State CMOS ure high (Vg) Shay ony tb pOS tant xan inp ete Vi ow (i). There, haere ‘Scrooge power when he pt the of he bore sae ice Hower, dings onset te lap thee ia psd wen ath te Band OS traits omc A tcl crt ties ws Eun supply to ground whl he tpt wllage 3 bere Vis and Ye Vl Thin cet I sown gure 120 Tf ead ‘Maco, cheese’ hirer outset ian oa of eo mp 1, Dyaunie por dsipaton A vey fay 2, Shree ame dsipstion B= le V au athe abe oquatonsf (= 1/7) the fancy at whi ee wag Sharge Vous on CS he seagy ote cure ‘Gary; te dye soonest Penden of vast der ‘spun re gn i expend in inn 1 a ‘aun the ai ac 428 ene Figure 125: Capa aod crn cpctce Capacitance ing dca vin itor with aoe Mya ‘a eapectly. Desig casing, the pow data fn ie [tio rae winien =F Te in hit nates mohow hy i tendon of. Snr, the por dgation Pe, ‘ing charging ndepenot of the vl Oy abd sho oe evin “Tetot power Paupplind by thet scarce ving compete cargnge eee mth um of Phy and Fy ta nV Tae [Pop pet wean the tl pwr dapsone peowesy = sme ‘hic dyke pour dpaton appari al peso log ung tle MOS cet, bipolar eat, TTL ent, te Te sheet compet Fy however, proposal ran or des doen he in he nd eae. Ab ‘sprain on maa (114) deed on th eptin at ‘he rtrd apace es 1 Aongh a aye Inverter wt eda diet, te verte a seo Uwe Ts ee th fing quo ap =A =8 eed Va, = HH, =U Duving the pei tot In Aig £24, tbe short iene ere 7 ‘ates Olan Thought th pad the tp aleageVn mere hn rol tag Vy, le tha he net wag VE Tue aO$ trate tie ere ne appeation oe ‘ple MOS fre (13) yk abwing nen of ang ‘Siero of tine 1 Bove ti) 0S 1taw ‘Testy of theinwerter produc atime aloe Fw Yin tse Vn) in itn, the caret train rng the peed to {a rpmietial wih rept tthe nth tn re Fr, (he thei cre whic ows daa oe eye pnd T the ‘Spang cn ers be exec lon Af ma-$ f'foun-vorw aan ‘aetna sn nena (lost sada ina oa 07. "The ae Vy ton ‘ttn daring age hrf xp ew Sting te exresins fo Vital ty n equation (415) ate ae ‘ho slo ois oqatin te cs tas Stating thi exesin ft uae tfxa (1) ple th oh apt: ar 2¥09F eee uw Femala (416 cotta that h str diipaton po ‘ata tothe ene Sorte cly dn puter tht oft Pre San the ie ll {is (7) herp sgn Foran eter th capac Sen the traitor valentin by hed tp ‘id im Tn hee, the sort pation oly depends (the ept sga is l ines td pce. he 12 pasate ae eat ck ais ie age Brine Tn th chaptr on lope dg (chapter 8), the CMOS pone outils a dae! extent Howe, Un dig of ge ‘pe cet nce th oct oe CMOS ce dg MOS base design Large cpaitanca nmocinewith integrated iets hn ee satel ty bow nan fp’ creat hve cpatanss ma {en bedi a igh eee. The reel bul ving eee linge a ately le pt fhe al ower onset 9p. ‘psig thse brs tee rele ceri more ef han ‘happen ade fr CMOS lope: Fran (416) sows ta shor ‘len inpatient poprtinal to th ine dal ie (7) ‘fan apt ial Tho pu signin of ues wih debs ie co ‘ned toe ss ore b-atso hip tat hecre ve parcel srt and fal ie Supp the gal on bar ne with cpactane Cy, mas ie 3 signal a the outpt nae Ao lp ate which capable of hargiog ‘ed aitgingw aprtnca pin bs Aa ert cain ch ‘hat gue 46 can be ad bur cat ets de 1sA & . fous 5] Toes] ow soteral fr Gee chad Lites. om! tithe Gyn panic up decapcae Figue 426: A tar det amp einer cai ‘rom frm (18), clear ht the is an il tino ach ES teen rvs in erate tat init diipnton can be med ‘re the an fl ans cach a ths apt ae lo Fie el tin the front. The er chain at hee Seek nan i ioe th ‘opueton day tfc the blr and ene "aperng ‘itr beeees the of scceniv ees ith ase of eu pit Intro inp a stleo re, owe, hs wll lend to an option eng. Doig optintin fr mii Si ‘Shatin don aren requis eee speech 2 sla proce by ag ate and mt be bred 9 deve & Capacive lad C= pf The regu tc andl ie + at the er oat ta The chanel int both the pMOS ae the ‘MOS trate 0:25 jm. By = 2404/0 an p= BORAT "Teds poet i is: Dee ly of he at ier acting oe (2) Pou BRIEF = 810-8 ayv? $F f= Aya Bs 200A) ends () = 29 1 Te sede cs (ga 2) ist het {eho wai ct eagiA speesatinns (2) fn (Seta mich on i Char 2 ‘fet For = yan CMOS pay, hm son ct ‘yr he ort pbb nara hw ost rr te ried tnt wat toh 8 (Be = aude todo te + Demin ih aig tr the ni Fi tea) she re ieee ee i ela Penge nd wth te reed (2) yr Sein so upeing 28 L meet we Far 4% oo ie ih te in ct, i+ Tha perfomanos of hive in can egret be ‘aca omer dinpation.popaation dey, ina arent eee wre we (8) Ss he smite oo ‘eat apn et AlLapits ig come oa egal og gte with he ‘meet rai the it Sore feet and 2). ‘The diagram swe tepals) he supply eet Ung) td he outs Voy). Detail owe so hs ei ar gin aie "Te Al: Comparion ere hin fie ith ie taping acon Taping te Bash ‘umber of vere ella tot poe inte) ane | at | =e ts | in | 1 roa § (lave) wos | a (sce) ante | rer [aio | taf) epagaoe dey (tte) | 96 | “oat | aiait) | se | as | ae | jo ‘he tapering cto (ce to 25), whch eri a erate [it ace minum rgpsgnion daly re very bly with ‘spc tothe masinan fan fhe hea A he mah lea otf ea wry important Sue that dts oe ‘Sor 9s ea on tpl bt ito deter Jae the ean oom rm th tae we neon (hae deat wh tapring acter of ys opts ee permance Tn summary onal cet penance (pone, do Uy, ate, tae whan » CMOS bar opt fe Sanimam pore dxpaton rate Sh for ont preps ‘on dey Geely pnb taping actors etn 816 ‘Toe masini amp of mie geal that canbe miprinowd ‘nal nodes of sg verter chain without cong the tt ge a change eel mae marge 129 shows the amr "Te cn mpfr both igh an ow velar ery lage bra {he at retangult tape thw ane sarcaratic, Fo fhe ‘year et, with fom a=W th tl eye ‘seq eth hl OF era, mt wey eter pre. ter the diane oly gar righ sey iveroneal, he lowing oan aploe Noemi 2 042: Ya fan We Wan tar Ye Pg 429: CMOS in rif drt spc 44 Digital CMOS circuits Istroduction (CMS creat can be pleat i stato dye versons. The ‘Sots emily Steed bythe pe of eet at appt. ‘Tew import oes which ft he ear chip mena per dst ‘The difiescn betwen hae tne the ‘pmo implementation ar td a hse. 442 Static CMOS circuits loge faction in static CMOS stephen both 208 tel pO nmi Aa aMfOS eon ely tenet ISHS trust A single! ansehen dt cars the ‘hpat Tiel asi a oats nha he tp ow” A ‘Stren therefrom py tid a ens dition ‘ete ep aan af0S le gas ow Ina CMOS ge, ‘rent cy es betwen py a round duiagostpu tas ewe 430 sms se state CMOS imgleattns of ee st ‘ac-bieconoctin or both te MOS a th LOS reas ‘Sige Vand Vo eth OV. Te fcr tne we Ina sbom in fg 00), 43 al alleen Unhoe Cir ste, vlage re edt be Va oe "M08 tans ad Vay the 08 tastes 4300) ‘Cn oO a OS st esis Vor Vg. ‘Te bn ft bonnets on MOS ‘51 pMOB tains wb wr ot comme 6 sda ‘eet. Ths pricy toe wi he sore sed 4, 2, (9 TRVERT: 2d) NANDiew (@ NoRe-a5 igre 130% Bape oat CMOS lg ee a gonral secs cnmeton ftir in he M0 wction of (CMOS ai ae wil ree psa omni of reas theMOS wetion aad vie vek_‘Thi ae a fie 4, whi ‘howe at tramp of tase CMOS tepeoentatin of empn ae ‘sorbet seule ge te inga Figure 431; expe af mie compe sete CMOS ae te ‘The pero pMOS trast ie considerably poo tha th 1 CMOS logs ate sbi herr be mimi I th ser be Som very ig thon, ely a exept eassca pden OS Inet ewe igre 23 a eample of pndo-eMOS inplemetaton othe {0S quien gare 43. "The pect 08 meson ent toiten\OS consteprt asp hatte MOS lect pao tps MOS trator mith ues Va Bath MOS sn ‘etralO$ loge pues hve the aaage oh sew pe ‘Spuctann, Th output ie Geof penis lege pt temied y cly soe p.MOS taps a hol thre be sh. [dimcvtage osc agua the nate power dition ws the ‘utpat ilo The type of ge at ther bed psy. ‘The outpt bw lan marine ae daa by the ai of (he wit ofthe shMOS nad pBOS ter. Paco sMOS le {ieee alo a form of ito! lg, a dicted in con 2.2 igure 152 A pe a0 ete ‘The CMOS transmission gate (pase ramitor) Pure 433 stow anon ate comprising omplemtary pr ‘eamtos Ths ahora ompenent In bsk watt dy ‘ie eat I wd col traf hg ees Gn one deo anoser when i ota signa re acta. Ange nMOS (Rhnetoentnisr canto be wef pee! fen, (pee Soham mplonentain he none onl ipl bu Sad ‘ge! by thle The hel vols hn raiser ny Urry high esse ft boy ect te the ins sh Spat loveless tel volage bow he conte! wl Tee ‘Siemon, che CMOS implementation eco ge Te t Ts ou 28 Figure 3: CMOS ranma ue 1 the gir of the sMOS trans in the CMOS taminon pte ‘otal! ty a sgl the ate th pMOS trata tbe oe tela bythe empientay sal f. When te fp volag eV‘$e, th oat wil be dared 4 OV. The compe tay behaiour of Ue pBOS ter eae that Coup ele S825 when he put wt 25 amd 3 ow ‘tang and charge aractrtis of» CHOS tannin us Te MOS td EMS transis pewe heed har the utp ow Se hg lel, eect 5) |i alt Figure 4H CMOS vanities ‘citi of the hfs no gOS tems ote cg ad (sce eine Pastrana loge In tate OMOS celts amon ste we wed In ee ir {hppa ge xan of yi ge re ‘ctiate OR (EXOM) lp ates ad mule Pigeons tear le implementations ofan EXO gate" The OS {Exmmison pce phn n Sie 433) aang ph thre a rvlting ow ei. The componente Se mensions gre 4355) sssbrter ne deat Se xp [ae cip rn. We conan the spa of he ate th let (to cso p MOS hs), tate CMOS log fiy Ieee gue 8.19). The hell yas sone the SOS pa {ei competed bythe el string pay the ch amos ccMmos Tiabeab Figure £35: Parser ge inp of EXOR oe ‘ech (a5 ps eam) CMOS parame ue A eral daacag of pe emir lop arsed nfge 4.3 {Ts retane Breen he ip and @ andthe Opt ‘The charging oe dicharing of al he op though he pe {eas sune ion aly Ot tg ae he ed Sr complanesary contra ign The pote of pe rate Inge cheng the catia the dens Sev aerate ae ‘en ped, The re laced etal ith ome cager ‘ogni tract ad aang. lly ci noms anplmet with passa gi mat te simul to prevent erp perme dado et ‘remus eho cn by ofl ach an care sbi Goto {Gy Wit decsng vag in urn ad te pons te po furan strait en to do wth po tana Sle CMOS be ‘Thos, the pertaor neste 2 pa ‘etmtr lg expected to reas the aming yas. Th re CMOS le dred sae ab ted bot sryacon Chie ad gchar xs cle Te te peo ce tee tebe the nex sci44.1 Clocked static CMOS circuits Sal which ow tough dee pk in cmp gi iat i "pple hough te cel gral io ane at ‘tem impale to haw which sal an be epee ge node Containg edn Sw ide x cit ere ei ssh: sino af te sige Uy ths one by opting te een ath spat wih rm dey." hme Sey wer ‘se day th og dla ripe. Tn xara tte MOS, the ‘Sb ar spat by mea of tc ado pop whic SEMA ST ate Arnal dia So dune ‘ate may be sotralt ynhing fh coc ale In eery pe oe Stati aches and Sip-slope atch apd pope an enperry storage of zal Fig ‘Sion gate The tani uc oe band ie am egal Fa of th ty a pre vo cep ier Cpe ‘airy lp me canbe witon ao thc a he ron ft wh he cock sgl high, Le. when @ = 1 and § =O. Fol ‘ek ee th ovr tat the alma bed we = Oa B= L Tht pipe ed i eae ILCMOS may elit ip pg an CA C aos iar 436: CMOS eich Apso can temporary str a od contol yon a mae lok sats Te mucin do tegvney fa dd tate CMOS ‘hei eter yh wast case elapse wo pop. ‘Tiszh then poprain dey ns ro of cman age ats sero sgl raha with ge cpa Te the sv inpetati f ate CMOS Mage, The dcmone Ilona Heit olen fra of yp pope 1 Deg lipo ca be ity omit tn erin ston in ga, The ti thn camp ne 08 rie ‘Son ese he deck yp gilda te D inpattaced Iie theater lch he pop whl thea ith tne the revi inpat a Tn Dap no cangte sth hn ah Soc rr i he OS treason ste Te [0 pe aie ‘Graoldime of the MOS trem gate pron poe gh bea a he nut ofthe lag eter "The set io, exposed in ogi (4.11), de the ag laverter mute thar ott ow’ whe the por Bp ere [peat rapt‘ high eel he repeated by te al fink vert State dian three do eer a rc ‘thn pc at fh ag nr nut bo ger hs Te ese ht the neers viteig pt oe a Sp said ot oA oF gure 41) Daz ip wit 05 rani sed 6) fe Spta nmr ce anal|‘he lpop ner 437 can ao be implemen with rmpetay {ean gates nth a homee, the OS and pMOS tani {ein et tren gt recone @ a 8, epi ‘Toe OS and pS traitor inthe arsed tani at onl by 3 and ety ‘Abotainplmentatn of he D-ype pop sown nee 38, ‘The oa rnin uc ia the eck op fee th ‘re a hp wen i hg et na he chs Te ‘ich mae cert age the sae ofthe Ripa. £ £ of a & if T T a6 6 6 igre 438 Another pertain of Dip pp with am pay tome te ‘cea mt be rod a chip wt ip-ope which ou compe ‘try hd eh a sd gue 437 o and @ are 35. {ibe ating aro ciel snp ok lop mst be wed. Sh "Spd hs inner tray ona het SF. Tse whore shew com fp ops teen ft o satay coe oro sow pel ne. Thi ease {oe epsap to be bey rampant ed te eae’ ety eet (i ft to the outa. Tha et sccen when the Bip Sop com penenay lcs ave via dees aay pat 1th dak $y Ate 437, fr stay, gel yt thine pod 3 wih ‘eet to dock yt pop woul be iy tampa ‘Gorse js in Spur te uoorelpping t= oe! ‘sre php and we rm The eo sow oetapng Ie gd tenn of poring unpeeny in poe A dcuionof the anymore typ and variant of state ype ip {ogee bund the ope ofthis ak Hwee, the Die Bp Bop frome gare 419 particaley teeing Thi ip op Ft ‘aly pleted with RAND legato Tere aly sige ‘ok ana very rst Unetinatly oma of 18 N08 td 15 pMOS asst nd there egeconerbly oe chi re. than the easter ip op in gare 4S A hig ety te Input of the Bip op a Sue 4.39 shows in ze 12 toa yy [ yb Pig 439: ype op camping NAND Lge ate 444 Dynamle CMOS circuits ‘Thema admsnage cated with amie CMOS cca ithe all ‘hip ae hat thy requ. Te explant sin th ft ht ee {uncon ar ol ipl lo nMOS taste. Only ove pMOS {cuss sd pr lage gta Le caret opt node Dyeaie {CMOS ete re teie MOS mt ad ea ey ines ‘ew hip ra than hi nate CMOS quanta The pat! ‘Soe fr compos gat igure 40 ows «dye OOS inpheesation of «NOR sae A dynamic CMOS ante this tp ois fue eet ode rope pein. ey i a 3p so mt be gm. Sted a gat in which a ae interchange. The ute may ‘Sool sre a an iaput rag with ad letra "The operation of the NOR ae dsr allows 1 Node peg Vg wht lack ow” 1 Wen sme igh le cara fiero bi“+ Chk the own th rar at pes val 28 tothe pat of eater gee gu AA: A donnie CUOSinpltion of 2 = FFB ‘Thera wld sty af dyeumle CMOS loge nplnentson orm ‘Thee inca the race, pipeline CMOS loge fem te Cae aie of ve ad Bel Lt’ DOMINO. COS. I teat 10 "ae frm of dgramie CMOS shows In iu 4 lle ue 1 DOMINO-CMOS citar malaaoilyprdarpe dig ‘ep of the ck pr." gg eae the apt We the pene peo en epg with te mio pice, hom ‘serach ng ue ca oly sich te fer i cen ae ae ‘tiod. Pigue ( stwn an ample of = DOMINO-CMOS Sage {nT cpa ¥ ofthe dye pt peared wen he ct is Ye, ‘The out Zo hn state leer then ow Tet {he averter att avd of al gla ow ding recharge ‘Ths tpt cm hrf itr ay ow’ ic to gh we Surg Chay ach nod ean aly mabe oe tin ding that ‘mpl peti sade wage rw tate the nest poche Peco begin The at mat sbioly be ie evo tint to ple Tiegh he wort ce ey pt drag msm pede Sa Pe pera tere beh ner han the preg period An [EjtratGsnage of BOMINO-CMOS li tn apis a towrineting Cel adaptation re hrf ered 0 ple I ncn i ere ipso a EXOR gate Figure 4: Aa example os DOMINO.CMDS let Another sndvatage the od to ber ach ogi ate with a i ‘ester thi requser err cn are. Ta, DOMINO-CMOS ag ‘en wel in high prtnae pecs Pail hemos dle fe eis ie mips senders ae plement oe Sle of DOMINO-CMOS [i With expec lo powe pation be ‘ral rematch Dynamic CMOS latches, shift registers and Hip ope most of thea (ie ther statie CMOS counterpart) basically coast of Inverters an racer gts A shi mtr et rt one top Dynan yr fines and pope te ale Sat 8 Sr tip yr om di a pee ‘ge dlck eee ‘Aim cick query reget maintain information in clei tht ne dpm soap eens Thi min eae ‘Sly seve bane Hr nad tered yt ail Ing euros andthe lage carn ofthe emi iio tomuueprjnetions in bth MOS and MOS tants. Te te tuey dent ype of dye CMOS storage entBy dking th fk ees in ete 457, weet the die Die ipo shown in gure 112. Ofcoune, Ci pop eomprians fo eset fk eye stir, LA Fe 2: Byam pe pop wit marin ea 4 "The input dts D in he sow ipo is yaaa td on he {apt gets of he Sat nr en fy igh. Whe by ‘Sipe onpat va ohare oreo be apace of cod int The oroepping ck ae ded to yet tach bus besoing anor a was, ho ee though the cel daring cok rst it he St ip, ome is fp op wl bene apse the hck ‘Sew exit Aspartic he aspen ‘rae toe ere 43 pwns aot tp of drsamie CMOS sit eine ce ‘hn svat fis pene te ered et ihe acon olds beste su onc rod ton, ‘The rslting ak of transparent comteble attention Critical phenomenn in dynamic eects "Te operation of dic MOS cate om the parti apc ‘lott se the hp Evel, During» eran pind af the Sek ‘jn mr nodes na dy cet ome Hotng, wich aoe ‘hry seep okt ochre sharing a rsa + Charge shar ‘ype example of charg sharia shown in ure A ° a ee ep “ & Pique 44: A xsl cre string‘Thigh oe fh gy a et aun wo cas wo ts cl nein rato Ty sd Ts Whe gos gh Ca rg the ele Vg demain tee wes lim aan Dus the potd when fy hgh theca Ce ‘saael bce Cy al Cy. Te mags ods Ad Bae then dese hy o Yam ae a can) ‘As bags Op € Cy ten Va Ve. Hwee, fC tre {ray tegen hgh eel beige gwen ‘are shre btm Cy an Cy. Charan mst ‘err with ean a pb, sb be see ‘Crome Figur 1Sehowsa cheat ofasteton in which rset ec A capactance C exits noe Aan sige ek ‘reich rast When fy er om I 20, expats Cx ‘pps oct tempore trae th eg gal hat wa Ren yma Howe, noe A hey Mp pean ‘thee #60 anda tage ange yon the gal tack 8 ‘els ia th long atage cng tte A —_ er ‘The wae othe oe. capacans CI propo 1 the ‘roof the ea beter toe 8 aed eset Bagel fo {Cen ad to diturtnes of h g e a tade A The ae ch done nos a he ise aoa mt eee to ‘hee i ak co ene wi sera arin “The peopetio of dma MOS deat cane sim ~ ol Mo enya i pct a oe ~ phen sh as age sa and coset mabe the ‘heel ds and aoa of dpe nMOS ee Fal C05 (ati CMOS) ce are carey clay abe of ‘namie CMOS cout nthe VEST ae Sigal mabe ST CMOS TC, however, il we dynamic CMOS eae he Inpemaatin a pel fet, 44.5 Other types of CMOS circuit [pena of tga th ow poesia sce th sie phatase le sing dae aris ‘Toe niantags and ira trite with ipeentaon ‘a bem fr mpage ean headed when ow 2 eng ar ate Tn tn pat several tices hv appeared on pei fs of ‘MO, acting Cascade Voge Swing Logi (CSL) 6) A CVSL Io ate aan by replacing the pMOS turn xen ‘Sma mate CMOS lg cent by aNOS tant, which oe ‘re npt une Th etn In cip area he expe ped) [party xian comple loge ae a pene ia uettc oe dye CVSL. A modi ae of CVSL cael Diet Spt Lev! DSL) Lage wer ear ope ving ere pear ‘hon to tims ter bt dongs epomer tha CVSL ‘me vce hich ay simpy he ta sling Sh i a Inpentaio vn i the xt etn 4.4.6 Choosing 2 CMOS implementation ‘important deo tb tart ew CMOS dng it the ice ‘og inplowtatin, The dee ows odjoame orm ete ine by uber fay The wt domo are poe dation ‘he dip te a aime. Tae tr are eae below ‘a pei own ale CMOS cei donot mip per wn ‘he Cont alae. ane of te sural lag power ly dmiptdin ate tht chnge satel cna ee CMOS cl ‘Site mat pee dapsone rng imei ack ‘wantins In coed dypanle CMOS, tower, nh exe oat ecard ey bed re "Comer the ean inverter a tne 1 the int reine ‘high ding reson ck pros, then te oat sd bw one the ops i oad dig very clack ft, Thre ‘oted Sng Scaring oft apa kd igh owe c- ‘mpton state CMOS iver inthe sane station mld aot ‘Rig te und wold thee sone hop Coro owe rtttry-peated sppiaton and many mor cei se ‘Sends inplencated In sae CMOS. Chap § pres exten Aico on power Speed and aren Dyan CMOS ies ar eerie than tr ttc CMOS ‘onan The Oma tre of dye CMOS la ease {Ba IOS tao arg roered or pegs noe {seco whl fst ae oy tpimented in nMOS trl tor The inp eapatane af dance ae ere tomer {thn saint. Inet, empl age ste plement ‘ate CMOS may cotan any pMOS tosis nen te pall {SP pth: A dynamic CMOS implantation or nud nd td seer ae Bone we aly on OS teasr aes stv Noi ia tate CMOS lg su thea codon pth beeen ‘let's ont and ground a th ruply Thee, wo pe fate ouipt note ae Boating Noein ohage deity on "ee ee sutton yew Re ‘tre lee Dynan eet se tom cr shsng sa om lock foqueacy requir cause of the lenkage of charge from Boating ‘dm Atal tic ar mre obs For en a ‘bccn eign Stari rept in aie CMOS 44.7 Clocking strategies Aang and deta of seer implementing glass tum pn clocking trates ae be dsb i the reve ‘unin of tate ad dyn CMOS cst. Sng ee {Sa che tv ia neck DOMINO CMOS lg po the Inverter per fips sn pan i ely get. The ‘they tear ered oe @ NAND gate plementation of» Bip Sop staid abo te raed. Is aon, the ining bebo ‘Sng pn cicaitsetel t egin ay a ston to ‘ene ean fotnay fx Yat ned wert cw, b whe lie we sore and lng, seein 2a ects tht se ‘smomtapping cs nw etal neg bene (Ck sews ans pret nd rest, Cpe 9 der slong state altered ln eteasiely dans po. ‘ing pb ms! Se wh ini 4.5 CMOS input and output (1/0) cireuit ‘heerlen’ etme CMOS IC anit etre envi ‘be mt cour tnt dani ened cere Temesay berm expected to neuter. CMOS pet an att 45.1 CMOS input cireults [MOS 1x fe be wo commie wih eral ote tre fe, fag BCL and Trl, A'TTLempatble pat arm ere ‘Sapa ltge bl OV how” wie velar bone 2V mt be Inept at igh The evthng pit ofa TTL-napatile CMOS Inverter mn drs be abst 3. However, th withing pol of ‘metre CMOS ieee an ere wit oa rate Ste M05 en phMOS trast) is hl te ply vlogs The tes of amy onthe eich point ofan re ar shown {Se ane dante a Bgre 2 Thi are ly ees ‘Sats TTL compatible CMOS tetra be ayer. ‘igte 446 stws a PTL-CMOS apt ue with th coret teas {Ge'TTT ape oul oe CMOS lvl Aa ipa llr aly fe ‘sted ute dane fm the npn tat deve eed ‘oi thn Scoble nad apace. A loc ia a Dr bu een more bil Hod, Thos fhe a eapectase ‘Senin the roped ie ofthe M08 sed OS ais ‘heat ofthe wit at Be apracinaely a sbown ee i eee Le be 1, Figure 4 FA CMO8 pt tr ‘The wt and gt of mcd rani may ay inp ha oa coin vrs Ti tf ar aon ‘se parila een fr sale Anais, Minin we ‘ets sod erie tbe uel car he eid crc [he owiching pte faut Lhe he et imei i ge A, na CMOS peor, fr tmance with annum canal legth of (03m and mmo cha wih of 3p, h tlt cold ‘oe damaand a we Cc), Siem (7), -aem 45.2 CMOS output balers (drivers) ‘Thre re many dierent tpt buf igs Tey aly cotnin 2 (sper cai ef rer dial ination 32‘ ee {in he tpt ber re determine! by the pects oto Sind ad the ack nga Oot had explana rage ‘tom 20 SF, and Sct fags ary been 80 ae 500M ‘Sie bien arse whan say opts ic oan ‘hgh feguney. ‘hereunto tals ay ‘ed te aloed mason Fe cet lene le mage ‘rope acm th ntact in te tod wit betwen 2 {cage ad bond pois The socaton of peak caret in power ‘Segond ier co rete age ube ian th ip. Tase ‘ston (ch ae snc i cpr) mtb tc ina ‘Sut wh digaing outa bue. "Phe ry aan ar eed in ates wold et nace eg rir curet etn spp aa roma i {ecard sch snore we wed to roe lane ty igre LAT hon an ample fsa cet Ge oat ar ‘Thi inte bur ecu whan ep ip pan can ive {Usp id a NOMI Sgn, 2 an present hapa te {he dod andthe estate smo, respecte. hg eet I ‘ented the gs the 08 nd OS ost ier trae {ena repecneyTme reer ht the der teat ee ‘oc sanaFig A: Shor estate COS att ae 4.6 The layout process 40.1 Introdvetion nh eti, we preset spe st of base dani rl ors CMOS ‘room citalaiag sing tion anda ing tle The Inout dag rubs tet & 0.25pm CNS poses Aug sch ‘pron arly ineports about i tal pr, oly en tl Ine ile wed in hiro dsgn pocem Thins bce may af 1H bear cn ue he emt grr he al nero Iie ch ay ek Afer dcipoe of ac nda mak, the rational dag ad th pot yes ae domo ‘vik an exile. Fly,» poses cect sw the lion ‘plone 46.2 Layout design rates ema maf he rag ie kn a ‘on 38, ACTIVE (hayost elr:sen) "Th cin de he ne tt de which traitors il ‘ere Oxide eat aan thik oe wil be red sin LOGO he ihn ACTIVE pen rn [WELL (out cobar: ys) "Ths maat dts th areas wre the MOS tractors wl esa nel stl sven ate forth IOS trata. A the CMOS proce ees complementary tami ter, the cen fa ype start pro fr 0 ri teria veured. Ths urallyastomatel gute es the NWELL mm pel willbe cto seyret m0 ‘el pate dein POLY (out clu) "This mk iste pio pattem, A transis ana is {iemod mare POLY somes an ACTIVE rpm On op hn {sod platoon rea 2 MOS tener ete Ove ha ‘Ee aru pape nd nl iarnection oly on ‘lds iid the rary tle. The minum ih oe poli des the sir ede [NPLUS (aout nu: rss) . Daring the implasain eS (ik ade sg) te the palo gate act arise. gt Saige ‘ego ona die) eee ii ACTIVE wc ie ‘ot cred iy POLY aod sro by NPLUS- PLUS (Igo clor purple) “Angas he NPLUS mak sore nd ria the MOS ‘tis we ype doped by meme of ho PLUS ahCONTACT (gout clour bk) "Ph a tos coe oe inte dice hge ao he {st tal ner (METAL). Though than ont ole, the tal igre mart pepo (POLY) and sree rain eons {ACTIVE}, Some woos oe engi that lowe diet eo {tet tom pllicn toe suc o rin en. Sech 9 cae [METAL (gout colour be) "Thin des the pattern nthe Sat metal Iyer, hic cn Be hina, tigen cope Curren, tanga fen sed 12 the fr lel seal "A ak ith lg ean e tad for ‘at sot wed ng nerontetos be bet tee ‘remy lw Preston shoul tl be tates with the ne tent, bxae te bt estate shot ve in hgh ‘han ht a eommon- ied alain copper lay, ‘ho flowing st fds ahs wil be wd se eal of got ‘oi inser een a hen of tis caper. Figure Set of doign rules Exton ACTIVE oe POLY (rc dn we) active ee a wlth ce ak wth 4 Tk pct ya wie Dk pci EBitmton POLY nt ACTIVE (ee ees) a neh Lo Raaing m_Exlta NPLUS over ACTIVE (ACTIVE) Spacing betes 2° ACTIVE and NWELL brows ok ne Somnactnin FPLLS we ACTIVE * ACTIVE imam 08 msm den Spacing bce cota { BXimie ACHE owe CONTACT S)Exenioa METAL over CONTACT % Spice CONTACT nt POLY eat S_ CONTACT on gate repo nt owed 2 Spacing etnen ear 03 08 a as as a anos a a asFigure 4 iat the pole othe geet he tie da ‘Pum the BRNO iste Mmm crv Mm rou a ‘Thecention fh topo vow dial tre ps repr seed ty (a) (@) and (ein the Bre Ths pes ae epi (9) Two toatl paral hin ode (ACTIVE sgn ae dae. The Timer ACTIVE ion aly oredr afOS tras Bie ‘he upp ron fr the p08 teers: Te evingead CMOS {itn of th oer SOS nd OS ‘Sound the ver ACTIVE rg ath ik dara eth pet ‘goa ured by 4 PPLUS boundary. ‘Titel net Sie SL no wh oye ACTIVE nly ‘tea besos PWELL. Pueall polsion (POLY) gto a denen Seely ac bth ACTIVE reins Metal (METAL upp aed () Abt METAL POLY te tri nin, ‘Sinan feigning tor se gel oe a ses ‘epreetconlach ‘Ph rar conection oe peed Intec ih Te inh ho th ik NNAND fae on te KA of the eat gam in gre The Ata of wo p08 trast and one nMOS trator {ictal wth METAL wo frm th NAND gate otpat Ti ann on cet ya metal rennet of nd lio ‘arn hens ona vin mt The NAND gt oat ected oe ate in mast rit nMOS and p MOS enor (6) The hed 2408 ocean a fom the in ee 4200, i comin sad to antabermoThe ery a ‘herein op no separate ifn a in gure 0). No bak Wa wag wd the een rose pe mba there comet to grout ad the mel etal he ‘gu of orate NPLUS and PPLUS ara, ropes of the FEXNOW al ss cage shows gue 40) “i hen gh oat WEL odsc in ston 92.2) Tes conta eee to af i and Ry, opty urs 81 and 2A mere, ba ec, farce plas atl tat aja every soppy ota ‘du sabre contac ma very ground cota One oat ‘omitted in seains whee oo el or oo eta contac we every dt This sje fre adel te oat dean 4.644 Example of the layout procedure ‘flowing example sh th compte bot procs rom tal Boda fatto, throug Booka opinion, et dg sad 2 ign ony Conse telowing Bac eet Badbi VEO Ged abe ‘Tooplnise hi fgeton fr inpnetton in CMOS ners Bose ‘yeni the Smut Z = f mats be oun, bese ery ‘Sige CMOS lage pte mpat an mrad eprnoes 2 = abe s cds acd sabea (be 42d Hod + bed) = lie t(er e+ be)d) = Gera) = Wierd - eed - oT ‘hers, opti ation fr implementation a sige CMOS espe 2a yo Thc neu nop 2a Figure At: Che ag oping 2 = THEFT ‘The copondiag CMOS sick diagram aoa ean be fund in Ae 4320) and Sie 432) ret. ge 452() shows & ‘ttt ugh tbe ie DD he aot.aaqpe Fg Sh ga an) rat fe (GWELL) ant WELL costact hols (CONTACT adn. bene ‘bent anro egme a PELL rot re cones ough Sek op hae “in ett hoo» ale CMOS ae a me ya secon oft ap dis arm ‘MOS tantra agra at OS tram eh ‘Ava rol feed fon rons th roe tan of sour anne re lw sot ee lat let pe {G08 fechas with seed sure and Uni eos Mle "Th proce crsnton in gue 626) ede ang the ie DD! lpn gs (emt) nd eo wren tl pers (VES). Te ‘Be power property teh “The ft nee gly redo emery nots In lg ip, the ten rts tuned ie ef eaing ‘atc ohn oe i earl more han 8. Te dosttet conpenat fr te ples physical problems (hgh cet le Is the crm) or Sr th pms ht satin ne nie fr CAD tool Tir ater xt of problem sre ply when owing ‘eaalng operons it epee by re 48.5. Guidelines for layout design Desig coret Iya aver mor tha ut 2 tration af the ‘Sent gran tos nou ha mets the se deg A temon nt be ps to seer iy to 2 ania gat are wl epi een th cml eon ne wi the devon oft new Hay ha be aed Sorte Sig af mam ipso whe TCs bee salle, they saerally show a hgh perfor, conse ower a ar cheaper Baad, wheter ery lo age lg bok, mst be ‘imi it repo ps pcan our an ala {tio metal trp) adrian al ng ‘Seemcin) The benay owe bP its ca coal erg sharing ad voltage drop actos suppl i patel realy ri te perrant be wl ‘hn sgl net. Sach cs ae exes dae a Sapte “ale 2 shoe some ypc val ofthe capac ian of ‘iret componente elon 28 po CMOS techy ‘ih steht = 504 (on) (= a) ‘ios apse Teta Tar — [pan Ta way aot ony [Seve at ye Feo 870 SSeS ata [Risin Tek (OMETAL) | Seep seem wo=nj0 rapt) |e pe 01a? (ETAL) | Seep costfem soma Compe (0s) | snc ap 8 ua? 00 (0% (SETAE | Spec asso Se te a a a Sawamy Iolite | ak onde ae cp 0080 um | > = Se 00/0 (Sethe, | Spee ig 0 ym | Sings tonyo esl tat pysieon aod n/p unto a only be wed fe ‘pst roan le eperaly dip tbr CMOS procome inde fe to seven ee total ay cat, the oper stale as peat (Wren lrg imma tre od lange uci, clos {is opp level wast be ued auc pope reall Cay ower uly tk “The abo dcuins on CMOS out inplemetation concede is hapten Mor lfrmaton on the dh of CMOS celts ad Ite ‘a be odin fh ene i.4.7 Conclusions ‘Sted now suse 0% fh tl ot. To ‘in vege CMOS kw poe dita, This an Porat reac ince VLSI cel ich ctl io ‘Site MOS crests areca by ih ipo ad pare copstanon an ur oe entre Those corp tp a mate CMOS bg ot aoa win oa of a OS coe ‘ya Dyune COS crouse MOS my aod ae theere parison thr EMO compre Tae os a ‘ir shar ayaa toponeaton mt three ocd by = afte rdicton i poor dipatn. Geral, ate CMOS Hes {eines 7D proc sd ath he tt power fet Ilene ‘Sim br VLSE Nore, abn ey inp Cre {tepunv nica Grete tow incsiag note yeaa ‘xT con wag rope Low-power boc sad Daaaog aa {etsy th de he mace of par a 9 oe Seco rh mitre of MOS devi epi ‘a caper 3 Varo aS cet pacipe oad, Tae ‘Sap cepa he mot importa coer betwen CMOS an ‘0s rent Tne iran seve nth sas wc, ‘etal eign al aout en. A cred COS hut dh Sri spread chapter ile wing ted ot fre. ‘i cg ate The statin he CMOS and nMOS ce {Eas and yn pcp dtl nha cg sell edt ‘ode fie gh ito be pan fie CMOS ch 4.8 References (CMOS ply and ea (ee a hater 3) [i Reed Cee, Isaaditon to Micolactroni aeeaton’ Module Seon Sa State Devi ole 5,188 [a ¥ Sa ta, Adranend Erno Device Tetley’ TERE IEDM, pp. 0437, Washington DC, 196 pi sms LSI Teco’ Mera Hi, ow Ye, 188 Ba. Woifand RN. Taber, "Sco psig the VS a ‘Volume Prose Tel, Ltn Pres, 1986 [8 Se, "Mn omiondacor Deis Pics, Joa Wey Sone 1907 (CMOS design pencils genera) IH ©. Man, L Comey, “Todo o VL Sytem’, ‘dice, 180 DLN, Wee, K, Earghio, ‘Peis of CMOS VES! Desig, «Sytem Perspective, ‘dion Wen, 18 (6 L.A. Glue, D.. Dobberpal Th Design and Ansa VSI et! Addo Wey, 185 (mM Ansara, Dipl CMOS crest Deg, ‘veer Acie Pars 86 (8) 6. Hae a ‘Gato Vag Switch Lage’ IEEE Digest of tal pper of he ISSCC, 1986(0 Sn Rata, ‘ii ing Cin: A De Feet (0) Kory Berm. "HIGH SPEED CMOS DESIGN STYLES, Kine Actes Py, 190 (0 Inert Sl State Cres Contes ig of Teal papers, Fees 200, Dp M1, pp TET pp. AAT, pp. za ame dition in CMOS [2] 1398, Yond, "shar Cut Dapationof tate CMOS Circe ad te Impct 1) Clete he with Wy of tantra tha ¥ © = syteeeys 8 = Cetytslteve (6) Geeration of Sand with exe OR ates (EXOR "Tha eof ter on of tigen depo what eure Inte af ed, ae sd pe Tp (wll enti eer tar to a), btw be we erate he ry ‘on in) et ab nother arto. Supp ha rn he ‘at dnt cero, th, ath Bc lve ne ‘metton (0) to ali ut fl sie Toga plementation ‘hora Epi 7.0.Figure 70% Bac agente mpm lr 7.86 Translator level, At thle le, the eh al ader mast be mappel ato « water ‘tiramators In some dig roel the legate el ent ‘Slcy pret an the higher lol code dtp sated sd Sepp ao ana of wane” Tho ae dace in ein 7 ‘The anatoreve decptin doen onthe cen techy (pO In, nMOS, BICMOS, CMOS, ec) and the dase hg sh sch sai or tale CMOS, ar ih sao afoul de, we ase aie CMOS tpemetatin a shows gue 71 Figure Tl: State CMOS fhe cn fi ae al ‘Ao th ful ar nas oat ow uber of ais (80), ‘Ris else, both a terms of te od omer nisin, compare 0 the oe lon! with AND, OM and INET ge oe fue #10, "Tia the anasto el iplonennin of th agi ate Ste. mney ahr spor, ae power Srna, ely ey 1G ‘pion 77 Layout level “The eon tranistr impementation mat be tale t = yout Jer Scriptom atthe ome aban Ie of dag Ma of {he tne thse spout ae nde by specaat who dey cmplete [Bary of fre olen cain taco owe, pele ‘qrenaton ghseed ow poor may ets hese ats (Tn to opine (tf the ip rt rumen I chagtr {he got pre eps in dtl 73.8 Conclusions Jn he edo ne pth itn hr mie ‘Suse Figure 12 shown xumple of dco re fr gdigre 712 Dc efor a campespten p ‘Te deiton e tars te highest I these lee, Hoe te, the doin t sath leven be nol epee he po. ‘Shs at swe athe wnt Hw! Sten ee ‘io wish wo eee ent ara inplattios Ure roe & eth ing 1 tnt, rit ne [ntact asl ba spleen, hel or I lip met! ers re abl th chlo. acon tensa station lee tse ede the compe Sy of dig tn 1 seca les Howee the traction eee ‘Sv sn stompanid Wy retonpobiona, Moe lean ly ‘Rese vison dan. Request ats otal lof ab ‘tuto Spd on etn at oe vel Detach propa ‘hg, for eam ea ie ghee nig beau a example he Sal aout implemen of fl arly Ace Hs eect bebo Delay tne ae abo deter by ‘sco ah parte wring caper “Te tat applet ond erica proce en the toot re Clete ne ame fo fom meld ee ae ‘orbit form the arg wet a tet at fora ‘th IC. The Sor pan produto the lopdoen ed etomap ‘design proc and sa acre nga wich sho the lai ie ‘Sd patos of the evnged 1 compet Mada tat eee ‘Md erica uring the design yh ve sully pleated ‘The a mols which wept to rset robles fo power Aigo rae open ogo Veaton of hl ote vous whether ty are nqute or winter lative mt be ‘Suit. This may have freeones rte che wc ‘he Iner-ependnce of iu abtcton eae at plese tation cary preter oon dng Blimey ply ‘tomy inpatient, In pri, oe ei ee acl ot af iain beeen po ne beep pat ‘Abstraction lee dito sbich contin efct nrmatin oat ome lps cas nt the ed Sr eration he lin pth and yews wat deg eff. The masa opening tron, fr exampls ofa odle educa hy the pth wth {he Some dey eran vo of Kt cok aces. This worse {ia pt can be eterno fom stab asta el econ ed opi deerme ware fain hs ap {Sesleri the previo spel pcr eed fo Comal he wore dy pk “The dain fle col aout rr, fo eampl, col be ‘sotto ert har pln infrstion sh se neon eg ‘eve nt, combine nt pce daly othe ary ale {Simi sc con ms, ‘Toe worsen dela path can eventual be ected nthe Sl ui aou uted over hat pean fecentons “The im of moder IC caine omit a ‘er of erations reed inthe dag, pment a eration pith. Th shader the flr inteation oreo ioTA Digital VEST design TAA Introduction “The ac fo CAD tc in he sig al verison pas sows with Isang chip empl The dren sbatation Sara etic peim bactroban the ei cely at ach el 12 The dosign flow firs pour ltepatin of yas and seem lee dog ‘The ‘Seung comply ofthe pte lel baka, combined than Ieeaing domi of pall f th neonate, (Seta em» de fra ater iran of ayes aed ‘al dg, "ig sows etoroeous yt na chip (SOC). Ft, the ‘atic dn stb debt in complet pct. Fo vee ‘citing IC, vac pests connie of several hed fete ‘pom Tho din speseton mt be rami ot heel ‘SStiural dein wih ns be rete ado eta Tsay ome twain lo slow an narat oo ety yen comple 1G Aly, ha trina tem compost not mold. Lagi lt wy 1 ta Sto Be ty ap. min alos the con rae ‘Bie to map eign om seroma, an wich mien the Fanta bebo th chip. Esaltion ial doe - aty ‘tag th dein proc tallow mot itive har sle ‘ordria.Onc th ig eel ebsvbaraldsrption verb by a ‘Shon cumin eer of dna decition at be ‘eid aint this tp oe dcp. Fgue 7.3 sre a peel penton of den fo: § ? () | A # ! Ay atm | Cen Heck om Figure 7.3: Genera recent eg ow Synths tas satay rant a crt tw igh irae hy level ts owe leel oT ole ase tar ‘fusca. High eats rors bao dsriton {oa suse of psi prall pation which tb pred ‘nan [CSch bebo deepen fenton ‘a higsea compete prraning gang ck se Pa or ‘Te draie of ering operation tine call acelin "The alain fr mapping proces mits the eur Steph conpovets Tes hihi eonponts alae complete sia re es an rope wll rosary ALL, RANG Sa 1/0 Boca, ee owe, Hie spats a ater elti inte RED pase ad ts we I strat see ppaton fe uc the dog fig sgl procem 1s orto casi procure, har re ook ic re fren fm ose {het arcratel and an rhe delat fo gal rom Sich ols aimatialy gars Ince depos (i VHDL Vero fom the pte pct ‘Curent ud tre pte oon (Sure 74) ae ad wil gan hy ing wie vary of pede bling oe. Tha ‘Sete rome res tht th nla Property 2) yas ‘mrotrln and microrocecr canbe ely portal am ne ‘Sip dng oti Sch ese mtb soporte by toa Desi ‘eon wile fan by the shri fer song snes In ey ‘Gam 2 Raced Instruct Set Computer (MSC) micoproconer coe {ARO Ms, Sard) rue I's nce te plato ins -ai ROM or ether type a nor, his ald elie iar ‘Spats als ms pny ey sin eating ch pedis eli ads wih ail ee i is‘ ‘hed ole. Each sytem ona cip canbe cmv to ont of may totes which te Dior dat Data ott oo et tae ‘ester, The operation ant ded na Rayer Trt Lan [gage (TL). Bere the VHDL ce atid thi ee, he ‘ide mut be werd by sialon ‘At higher sto ele faze (VHDL) salts ae fon suteely fs Hoveve, i ary oa RTL ee nla 8 ‘trond inthe dag wade nae in he compe {1G one fas n(n MPEG vs at DA) st be ‘nl Soh simsltne may’ ran era dap, esaing in 00 tang tration tows ad wig ely ito fetal vation of snktr dma ‘A harware alan wth scampering eft, « VHDL simul stm in wich he hardreset Inge mutipoor sytem, wich ona 10 the ate O 8 Natsu Gate vl dcp a wll me mey mod cat tented into hardware seat Howe, mt sonate oa prt (ETL nd ee re het in sft. The coset ‘Se ein ora ps inteyetod part of the siuator and wes the sae type of interface, ener, the rw prone os hardware th "Whe the dcripton smal and promn tobe core, EL. ‘yet to ant these tly VHDL. Wer) ‘Sopemiod nate. Aetaly, the dested eon o open at TEDL eel a mopped oto rary ota) el Spats tie Seve se tre hn Moe sein a wel CAD {uk are awe the san te TC deigy vert path ‘Tie weieaton my nla the compar of Jig Serio {ole of utrnon: Solin th mat small ds wikatin wee ‘rh ees of wep cae oer ems he ae ip ‘leona ales are acing mae Denn in evi ‘enol crated ie elv weBeaton eed ‘ee nee dg no, hare tog ed ‘None 20 to $0 pret of he otal ei Se, With feeng Sock ‘er a peroronoes,pcaging can be ing at nth eral se prance of cipro oa ied {ech tin expel to sept sites pres mgm (Se mt ln ncue te tal noone! pt been Sipe 743 Example of synthesis from VHDL description to layout ‘Tie pargrph deus the dsgn steps ofthe digital potzsiometer (ice mca 7.8} sting th despa lev (UD) and eding n'a tude enya. Fg 7. sows the RTL-VEDL ‘hin of hi peerSA a a oe Pig. RIVAL erin of poate gue 7. shows nigh abc ve ett ie potentions- ter le a bebo eel epeetaton shown gure 750). Asn mat Pee f “Ep o Fg 5) At ltd) br Alor juts, witout const on pletion lnk sows ‘tear 18 nares + poxise. konehhy i Fue 7.16: Petr sti er ti wth so omPlt 7.17 hows he mater aod ser setae views afer sete “ Po tase joo FSi, igre 717 Matpr ad ade sya os igure 718 show the chert hear, afer apts wth mo Figure 718 Ae hema ar yt ih Figure 719 show the shematr of hear, afr yaa ith ‘ing sonar fT th wera dl ph Figure 79; Ade echt ig usta the ‘he itn ana in Se 7.10 compar to ta of Ege 7.18 itd 6 spend up the cary Hp by me of ary ala gue Fig sbws th elton betwen th ny ad he ‘Th gro shows neon Sly y sing onstrated sate can be sed with relate me aon! aes (cra eae a aie Te Figure. 20; Ratna mi ey el he st bed eapuethnetr fc bern sapped. The egte hows te ier goenaehs Fie 73h Pete i tr awh ane Aer the ww of ple ad svt ta, standard cl dng ofthe Rhee Aug the sya pocs a ol whi atonal eevee atin dri, oon neh dn. S10 en 7.6 The use of ASICs he roth athe ASIC basins pinay the rt of he fceng ‘234 oten pie te oyster aed fo send ‘ifort atria fr the te of ASICS {he degre ef conaainaat which ty afd” Te const oe ‘te diel to cmpettrs eel ign dupa,ASICS ma resonable oad ew fein 2 an exiting ‘te thot a exe ten rls Ln tnt aes [Bt eftam prs cited th Ue eof ASIC Bo the Sowing ndanagee 4 Radar pals of the tem, «+ Rado samating ote began pte rlaley + ucroaed yem fetonaly + Radar power oop ‘The adntge adel ASICS ca ave 3 pte nrc the ‘Socom prorat of prods had hare nd otha repre ‘anard 1G sy apn sas, Howe, he ae ao Sad ‘Ruta ced i thw of ATCA Tw in the lowing + Th costs of welsing an ASIC ar quit stata at es pe ‘cae han the sania ith standard 1 + Ualie seandard produc, ASIC ro edly ste om ive ber of pe Incense ein or ee {te dr ros may nse dl ASIC trae in ‘ult twos! mn ecuring ngnwig (SRE) cos Theme ‘Scouse poe to odin. Tyra NRE cn inde the nt = Taig ad wef dng citi ~ Suppor dre sma Plirettdoting tl ~ Mosk manataaring (whe pia) a = The tv of amps Fanner stud pode are aay wl charter ret arsed quality ls. Morwvr, sal iit to & ‘atoning te pods ca be ete iy Sela “Th sata nist lat with th of ASIC d= Pad the sppaton ae non the oud ASIC pe ed eas "so. impr den mth ed proarton tenia ie ‘ih tur wipe ten ASIC cntmee ad manatee {itv ome ison enon fon thn fa ‘Ee product to ASIC, 7.6 Silicon realisation of VLSI and ASICs 184. Introduction nitinol semper progeny od we lato ef enmper 10m CAD tos se ote iso ‘etnvaonatic pean of laa. The dig of INTEL Fee ‘ha micropro fo exp tak srl had of man ye ‘Te sab fr th BMC PowerPC. Figure 720 shoe photograph iin procome tect, the rte of CAD tain ren oars bs very fen mer ita the een of fceoly owplr mts iho cotriating om igual maar oe ‘ion in dg tin, Tl station wely septal vy sme ‘php 1Cr ou ar regen of mropoosore. Le comple 1s sch ASICS, rege td efi dig at gout ‘elt oce Torben to. The inca are geavaton (1G bcm de payer fr tan abst oe oto are. ‘his ms Ut the dng poe ay Uo ol cups of ont. ach ajout den mute posed by + Uru owe pes ty. ‘Thirst oneal the envange ot will a poe too age 2 ‘ig chi pnt he nl ein pe Aor pan cy an a comets an ely lone elt Hor plas er ‘2 ieativ eitanteror procs. Lagos of tome pa of he chip ‘Sey tered ding the Nowe pe stay Abo ne tings eee the fen ASIC catgut feta IC esto IC the PL eth bon, teres re ply ing a ‘aka te pac at which improve nT coh ae weal PLDs are moring towards gate ara ate sts ae ring Towel alte dg andl ed dng nye serge saree eh ati pet gg Seats‘hecho nlamntat by th ee dpe The iat Iaynt implementation fame are come apaaey in 1.6.2 Handerafted layout implementation A Dunder lo a rst! by nl iin fhe lg at witag, Ti dation ta coc fal ean et eg ‘lr the eevingedtecagy tio th tn of rating hail hoa nls etre cmp graphic eto (ce plea pase) compas ud ds ‘alocheck (DRC) programe ‘Aeexample fs bantnid bout ited ia gue 24 Such ‘a tleenatin yl conaee ea optimisations. Hower the ‘eed ines dig fore only ti MT chet se ed pt of VISE cet The eof kandi oat gemeraly ‘ote othe eg ele "Thee yeep ed ‘andar ara, odle oer and ee gat se Pigare 125: The IM power PC scr (Pht: BM)7.63 Bit-alice layout implementation ‘A bieatoe ijt ian sembly of par sgh dt pth, The inglemtation of iete Inout of» sig presser, exangle, ‘equi the dng of cet hao or jst et Tis i tet per im rd eet gh iano ce Tonto iw slnran ee os ‘hotel ie perpen dati May aaile CAD tae Fite the een sey tele sete. The ‘ce dan ye character yan are rare wich ils ‘ip potoea nie 748 OboOo00 oO O tenes oO o Ete 0} 0000) fw gue 725: Make Mean oat 14644 ROM, PAL and PLA layout implementations 1a addition to evga 4 maior, & ROM ca ob igh tat ge fants An example 9 sows ae 7:28, ° Ya A LOR ’ Pe 7.28: Lag eons ei th ROME‘Only one verte! linen he ROM wil igh ach ombinton fro tpt sy This wet ine dee he gts of m= Trantor inthe OF mate, Outputs, which ae comet othe ‘ral of te traitor wile om exarpethenee Doar gon ty ser =01 chin and elma lb Mg A "on wilthe beprenat ov utpateF abd Fy. Th ematoe stored fs the ROM in gure 1.28 determined bythe pence aba of ‘icin ewes MOS taut rail eo ie hi ‘othe roar of ROMean ay bud to ela ag ncn. ‘Bis ehows spa rth ai which ol be peed with (be ROMs Be 728 ‘eT: Beam 6 ath tte Sphmetl ith e ROM Som w o Geary tat fetish cn be cei HOM ie mrty Titel the mer of oat aad ae at The ele ae ‘evar «ROD heads to lrge ani deny per wit ip ‘ren tha or random loge A lage me oe fos el, wee, que an excel ge HOM wile the we of HOM, (all roe fics fr mal me pe etn, four ‘TROM mplonetton nal oly caper than anon ge wn Tange ve ae le ‘Untreated prensa the ‘plementation of ope aetna HOM. Otte dandanaps ee 2 Lome operating ene fr to cet "The information is a ROM cn ony be ord ring ating = nein te tr eps ayo che the he ‘hgh tant desty os vot mcs ply a et we tbe tn, 1 lt e726 hath wt cle nt ROM. sepra the pt ferme omy the ade pt The roc tere compre al of he ge AND contin ofthe ‘rom inp andar lees. Only th OR mati cs ROM canbe ‘wow Fite 7.27 teats the tale ecto «prarommae oe rr (PLA). srt set that of ROM acon of SAND autrix a OR mate Ins PLA, howe bth aoe ‘tbe programed sd oly the ie paar tr nthe ge ‘ction ae iphoto. Tf thre or eit tres of ‘en thant ROM, Ave genoa nly rtrd by Inyout pater AND onPLA can be wl to flea ny combiner opie ing AND pu and OW tI uh campy fs PLA ‘Scat (AC) Bs wre hth of ptt ‘oa maber of oat tne tbe me pte each OR is gC emer a he me oa “Sra twort con alo be ipsa with PLAS. Thi, coum, te en of tenory ena A PLA cae 8 ‘ator dip ora ital prt of ster psa 9 ce i oe ode mien tract fae eh ‘sen, ak gen a AL Sora wat CAD tol ‘habla psn of lo fans oo PLAK. A roo te orem i etre og ROM PLA epmesatne fe brning ows ar poplar LS doa Anat ration rm the Programme Aap Eagi (PAL ttc ol he {AND plan programmable hn OR pla a0 “De 74 umaarb the propa plane (AND, OR) in Seles carea eh cnet anes man ‘conto deg; the programing is dowe by ® mask. These are then Sad ac porate ROME (PLAN) ‘Bl 74 Popa o AND sd OR pe ROM, PAL se Des xb OL Powe ne 76.5 Cell-based layout implementation Fgue 7.28 showy se aout gram chp with standard cashed an RTL ein i eat tod Sema ne sof an leche ae a Standard ol ay ral ots of ie fire pe of Seg tes leh a al a gual gh 0000 0 Qo are Oo oO - Figure 12% ae wand lao ‘The saodar-cell lyout method is suport by mature CAD took for placement sd routing ting i ewe a ed gd arm he lope gte ‘The ply and etn the ck wing ae ape ‘ny rcv ome he esate ad ar sal negpa ofthe standard all sign apo Moder taeda dag Stray. Toe locks macro or cr mayne mr, HAN onl prom coe, mip cn Duriag te ne ght eta attenton was palo hanced eit et met Thae ine Boundary Sean tnt ds eke ‘coin 102 The ay Su i ‘man IC or ns prod eu boar The sla tig rier {ho adion deed ioe oan exiting igh. This erates ‘in sinatra 1G wich rectly cape of eing le "The revue closed dag tony ince saad atacand memory Hock ad IP ste. Arahat ‘ew devon e-beam ‘Rosin mst led digs tat feud ae eee se ll ‘ita te canis ei he coed eg End aps ‘oman «yt r-less age ol ach at acoprce for coe so and 1/0 futon. Cre can tae e mapped Set tweets ray (est ust) orb ele ‘espa ke Figue 29 hon be tector of ede igre 129: Arcectrfanembodio aay ASI (Smee: ICE) Crete crs ad othr in tbe embod ay sre 2 {ts tiara fine of an eabederay ASIC td th ately ‘exp pent of sing mile cnimeetariain ofthe se ase dng ar aston te major aaa uit eas inte Sg pra ams Baw sch mena, sent co) wt ober gn eal an whi JO eed to “ls the ASIC" Alina = dons et compltely kd, he {hm per (op the treme: ne) fan ale be posed a all with he compton ofthe Sig. Thare, he weld ota aay coin oe ui than tex te Sis te tot ip, acing te in lope Even mal tmnt ‘ign changes ace allowed at lng a they ot he reaing s ‘gue el When the Sag a! ito compte ha Sal Inseronet mice ae geet aa prose. Tha comparl to « “ovweton ec van fhe ue den, te tne ma Jee Hvmlsnd Afer he compat fhe St smn several alee an roman unaabed topper ft renga for Sach 8 ‘eden allows compat eye oe seal ae a Ore ‘seen sotto os lie Eben ry Gh Sim sap apn rato. eed arp re ging poplar ‘Pb doign a well Anant PLD oe ety al coed ‘srs to rve Met and ed ef decd pare of he ds (eye). 1.6.6 Gate array layout implementation uments! pte aay contained thon of age ate oe at {aed patent oo eample tan 10,0 apt [NAND tex The inlet of deed unin on ge ray Scala comin eanpser the teremanon ofthe ge {m. Thcincennete wor end in eat ting nay ‘Sich were tant etm to loge pts Tn the covet “hanno ate ae, he og wae fc pent I ny tal ees “This typeof eae depicted in gue 7m, Th nea col ating he ie pine pas thnoosoog oo0a gooo OoogooG i doogooo igre TAD Pee iar a) mona (2) aa arte Ins comentons! gle arth ati betwen the ele al nd {olng chante sar var Hands Obra te ac ee beeen {he ara dwar dependent on he ope of cae In rie, the ‘sale ara rly optimally sae.“ fate i peal owt Igor ents Fatma, ape ects rue ore ‘Canlaon and Ut ene the oy ning cat ie neon ue rear ui aan Digests (HDOA), aa gue any, seg, stetranaltr ad te fet "igre 7 sows the or pss ira chan gate ary ‘Gly mand owing chance Modern HDA comin a ay of ‘mur ai ich coat of berm fat a te rire: In oe ‘Som, thn mtr el ae dng scommodate opin imple ‘Senin of tte RAMS ROMe or ster spl eee Age memory oe fnton impending ata cnt ‘Sinan HDCA ean besarte by Side ation, which xe ‘Sod ty ing th LOCOS or ST ehlgs Serbo i ager 3 A ‘rampleoeih sn HDGA nate rctare shown inte 73, ‘ical show i ample a an HDGA ter pl JOE IL Figure 13: An came fan HDGA masta rae and Boor ne Fue 7.2 shoe action of acm, wich compris ‘tow OS und aMOS actor Th compte ry ented by ‘epving th son sera ines nh herald wert etn ‘Tove HDGA we sfc contiaoe ways or uncom fers The no re tt separatd by ting eee and Ue one pha trie then ar own gure 73, The HDA srk {Etue fncaethe npn fre VLSI estan «ge fate ray wun the o ore tal lana Te lop ad ‘ary fron re aga iplcet by apg nerenetion Seoac he pater "Thevarousngi gates and memory elk ina weno reistrs NDGA sue part by ing the tol techni taeda "Th aot i the Bre i Dp pop Yas o te age i guns "The uention tec er OS aed OS al ‘Son ars, car perma wit fy comecting hem| fits nai | pete | CTT TTTAs al othe eosin dev he incl esity and peo ‘Sten, snp PLD re tng tht are sre our of the igh ‘ton Beil PLD sreture nth way, PLD ae ing het Sl caer toward nate aay eld dng and te bering ‘eal option ripening mystems an slo Abotber fee ‘ce fe hie the et hat eel ery re feng baie Soto I de lowing eral weltoar ep how ‘he tad in PLD Feld Programmable Gate Arrays (FPGAs) PGA mbit ital PLD arta with he iy of I= ‘ystan Proganmatity (SP) ate. Many vende exe oe ‘ery hens FP retarted a ‘in (S). Curent FPGA ae ntl SHAM ave nd cine em ‘hy and Lon Up Tle (LUT) to phen the lage leks Ven ‘lig T-Pain as (ACO NCSD and Vier fa), Let Technolog (ORCA Tas) and ALTERA (FLEX ‘). : Tiny FPGAs wee wot to agate the hn lope pte, ogee, the rapid cee in thar cmpery nd Heley ne ‘hen pote ats notion of eran, ih ‘ety beens, revs ipl In ate vgs 4, The Sine Vitor Seo ar ed na trample of re tate-tboaet FPGA ‘echoing Using » 250m, Evener mtal CMOS proces tect frso ilion pte eves abd adem the energag ‘ecommesiaen, seerking nad ouput ae spe, Pt {or of tis FPGA fy eee) + His sty; 0.00 gate (1808) + High pearance > 00H + ASIC dein (om pcs to HDL iain) + Systm fete eh el sow of RAM aod PLLe + Soper fr intelectual propria (cr) 1 Soper fr Sere standards (GT, LNTTL, SSTL, 1VC- Mos) gue 7.8 showsfntionl ook gram the Vitex fay ri tecture Te ep fm dient coir sacar ope, 1/0 ‘aroaing te) igure TB dig of he Vito aly acetate ete: xt “The Sera tract of thn FPGA fy const of a ay of ‘Vamllndn, En athe os stain Congursble Lge Blost (CUB) nm a georal rooting ste [16 Figure 734 shows sacha Neosch CLE cuts two logs. As shown ince 735, edge “See ett Fa LT sen & ce Gir ctitapate Gy Seay, od elegs igre TAS. Bk dram ef ogo CL uc: EDN, Kevaa ier [ALOT can gee any fet of a pata, Fe example, ean imran timp EXOR (Fe) x, wing be biel ay ae STEbi fade (8) "Te reper inte CLB cso or oteand bth Spgs a sage CL ny lt oe {0 8 gua of gi. Bch etary and tp actions ean be eld ‘8 SBE FPGA fie The been thinly Spy ate Gis ragewith» taton of aout 18 sv per CLD. high ‘nd ots ly sone ha een 20 0 3 of he CBs ae ‘Seta may, wl he enn Cie ae ede, with 18 pet CLB fe memory fants an 2 gts per CLB fee So Teg dng ofthe Vitex aly are suport sites, whi ‘ecadn compe mppor for Sexes aco pnement sad ong ‘The wo of Boundary Sean lows nyse eg of se FP AS (Complex Programmable Logie Devices (CPLD:) “The strctar of CPLD tn led rm thal PAL™ devine ens ring CPLD gla ALTER (MAXOOOD fay), Xie (RPL sod Cone ein), AMD (Mo 4) Late (SPUSL ra. Asan ofthe ge deat td igh sp, CPLD abe ‘Sof may spate, om iglating ga lage to ping (tear “The thf the CPLD mah ive th coven poe ea, up nth miei PLDs (SPDs atm mar Sumber of CPLDs [Aran engl of the carat Maoh {CPLD comply, te Xl ColRannor™ PZ3H60C/N CPLD idx ela sme deta, The weiter ofthis Colunae™ fy [ted on eXtended Programme Lage Array [XPLA), we Ste bl) we combine PAL and PLA srr le igh ety ‘high proms) "Tbe XPLA cin of “Pat Mods” hat ar eran by & ‘tobe! Zr porer Intron Arey (GZIA) which lcm ‘pincer Each Fat Moda cere fr Lge Boda ef rs felch which ar once topes Uy the Leal IA (221A), oe ‘are 3). Each ope lock dein with 36 np the Zk ‘i 39 ec Te al prove 38 ZA fc pth Bo he ‘ahr cals i 1/0 pin"Th arte of he Loe Bh show in eee 38 L Ty | Figure TS: The Loge lk recta ur: PHILIPS) ac gle lok conan ght conta tar, PAL ay PLA at ‘20 macro ca ‘The gh contol tro ach ged 3 SUM or PRODUCT ter so re wed fo contol prt et sed eta eae igual fe 30 tn lip Bop, Each mre ol Sar ur dota pout toms om the PAL ea The PLA ar ont of produc arm whch ae ll alae ora yeah {he 20 maco eile: Figure 78 show the mao col aie, Figure 7.3% adc actu: PHILIPS) "Te macro cl coms of » lp-op hat as be couture «Doe ‘Ty fewest aches dala Dull or iploneting tere the ann felon, ran an tpt emabing anton A ‘ae dein out th operon 0 thi eigen tod ie ‘ope of hiebook, Some othe ater he eve fete: ‘Low pera igh od sav 18 45> 1m0 erase pogam ere + 054m ERCMOS proce + opin BGA paca. igre. shea potgraphf tn Colas ™QH0 CPLD The pr- ‘oor enmpisofEPGR and PLD area dact dtl th 0 nly meat to eth reader atthe ava af he pa a deepen (ewe devo dt te hte ee Programmubilty of FPGAS and CPLDS in hohe we SRAM Dt iP 4 sos elo ‘th SRAM ole pa aa to eget tig oa ‘rough aaa newcomer ptr. SRAM cl re a ed Yo‘oat nto Tn the ec she 0 «aliphne {Secon by SRAM cl 7) giv As tt RAM perma a FPGAS ace BEE Digna of Canpt Ss nthe majority of uta cometh CPLDS he cee toe ingen oni te devi ie hee (EEPROM a {nt techn [7 Hower, CPL with SRAM porammabiy ‘oct statng o appar oe tn mnie” Her the site a ad {© progam PAL and/or PLA ats fg 7 In 90% of the (CPD, the cna ae mde tough ogame ieee «fll comp sich, an input ot ds prod erm (itera) in an AND pls ona CPLD, the crrapanding EPROM fue trate pgm to ba th ote, Sir tet ca built with EEPROM trast Because SPLDs (rte aly pore ty loin oss) ae qk ering th mask sar, hw prograsinng echo rt ‘aad ae Large comply PLD, bse nt rogram Uys ar alo not deed hr a expe tht the ey ‘nl prone PLDe/PPCAe wil Sina the PLD a. 768 Hierarchical design approach ‘The rachel yout dg stl cnt by a moda see tur, so fw T42wenpe, Thodieet mode rete ting the dtign pth, With cople yen om hip ir erp, {he ion fetional me eel erg othe pesto ‘Tee modal may facade iropronam cr, OME, RAD and slg ' topiar dig satagy gral had to a sisctry igh- sustain of ral noo. The herbal bs lies ae {ur digo to smatatnly produce gots of he ete a ‘keene peo Bit dene econ with x eenale ‘enk Te rdl pefarmanc enn the hares Sng le ute fr mast VEST and ASIC dng The da tne fe ‘rca outs can be deta sede wih ood CAD toc ‘vuln iaa ey eale parmtrind module eerste. A, ‘ene (och a vate fun ret weds) ee “gpd lars ton 72 (alten 1) a wrt 72Oo Oo 0 OO00 Figure 72: Base hei tf ip “The (ety ar epi ch wa ae pt rae ue acy tng a nt pl ISN demon sfscttee cp ete Den eed cecal el ae ee hope Serko oa fee a wk sect Wrage ty Sein pnt maton odttie deat bya tual wis dst ‘ethnic etne mest oa ey ena SS iSeoe Say Witmer mul es tec Gh adiecartmid ene Sige ia anes ‘risen mt estos Sarat Misael eee ae ose’ te metodo ea cst ph tied pe psd ‘Srna the impact a le Siteopt Tet peter SEWUTRSSS Palin oy ieee wn Cohen Sachets fe Secs seins ieee ete saisarepoanatie ce aide can se taser enc bs SUS cesacrand ete, Ct Sheth esky apes guise neste ose bi Figure 74 Mt the satey 16.8 The choice of layout implementation form ‘Te nian character fn fr of pot plement ‘oe appleby. Teen of mpmentato ri etn 1 chip pertrane esronet,atl aign ent oe vlan ‘ad timetowate equate Figure Tt ows sot compan Of te dec fro Inout inpleettion etic —— ee hohe = Fig TA: Got cmp ere inionAxe hp a tia it nnn em: Pn ah shh hnrerane, eas td siya ed. le nie a septs by ‘eet lot ahaa = leet tec alow short design ie a ees wt bea got ral Partisenore, th att natu of 2 inoue andy sect teckel pects They Ea ia oy rc 1+ 1 tts the carta of impart goat dsrton po Figure 147.7 Conclusions ‘intertidal a rai a hi tectom-o inphanentaron nd vein tragic age fle appears table mt VLST cet Tn ety the dig “The we af estat are valle fe diferet ws oliog. ‘he of exiting cn, ick he mirc and sgl Precosing core aa menor, eTs reuse sees te bene (Gspler 9 dca the problems dal "Ago IC dsgn at be scampi by yd tt sry. ‘atabity ie dc! nme 102 a eis Gomera ten ‘Gon rng the din pase Te os an exe 0% pst 10 ‘part tettty might, fr nance, nl to SO eon tt 7.8 References nerd Ui C.aed, b Coony, Taina o St Speen! ‘dion Wey, 180 LN Went, tein, Ciu0s Vist Deng Seteme Pept’ Adley, 188 | {8 LA. Glas, DW. Debepah, “The Dein and Anal a VST Sei’, ‘Adio Wes, 185 2a ae ddies Wea, 180 Log yt - (5| RK. Bryon, R.Canpoane, G. Dell, LALLA Oxen and Jv Bion, "he Yekown Silom Compile slic Compton (6 DD. Gap air), 6, Deb, A. Sangin Vital, 7. Anopat “ig Stn ir VIS Cs: La Stine Se > ‘Martins Nib, Dordt, the Netherlands, 1987 auton Jes (8) $6. si, ‘Aviat Hare Spt’ Procelngs ofthe TERE, Vl T, No, 081985, pp 1687 (9) BA, Water, DE. Tomas, “A adel of Deg Rpestation wo Sati Prong ofthe od Deng Autti Cnfrcan, Lan Ver, oes pp ae we[oD Gai Kade, "dat Er Inkedato: New VLSI Toh’ TEKE Compt; Vo 16, No. 12, Decmber 1983, pp 11-14 te eaye (a) Tha ay "A 240 Tamintor CMOS Ary with ele Allon of Memory TERE Journal of SaStte Cait SC20, No.6, Otoer 188 (9 1 Obdar, by "A ave tse al configuration or CMOS steary {AGC 188, pp a0, May 82 (8) Hm Veen "Aa een nd exible Acie fr High Dsty Gate Aras, ISSCC 10, Dig of Teal Paper San France Pu (04 Xt, "he ftre of FPGA, 105 Xia, "ae Vex Sim of FGA, 116 Dave Bay, "Hi-Deway FPGA Fay dies Magne capac, letra Dia, 20 Noverber 1007 [im .Browa, J. Ras, "PGA ani CPLD Rrkitruee: A wai TERE Desa of Compt Sumer 196 [| Pip Seicndactar, "Dota of PZB, ay 198, ua poets “ASIC atk 190 a's 190, A report Cady’, Taga Cue engersng (VK. Mais, "pit Sil Pron, An rt Rap Pott ad sgn Butea, 185 (at an 6 nate, ‘Dial Intend Coie: A Dain Pct’, Prete Hal 906 (2) Kee Bernt a "HIGH SPEED CMOS DESIGN STYLES,79 Exercises 1. Why are lnc eee fo cmp 1 dg 2. Wit meaty Hor plain? 5 Baplnn wi ment y ogi ati VISE ict? 5 Amami standard el and pate ray rary ae dscns in’ twomeal per CMOS tah. The Maree one Tage with dete anions. esrb the msi a (coe tren th wo Ebates sence 6 Profarton sw and at 1) Apple 6 Ramioa gifts ea, insane, be pment ing 8 ROM ors andar rlsiten Expl whee sch of he 1 Dea a cherie of PLA which pment the lle Ing fei: Rote 1. Bxpaln wa ty oa ee silat 0. Explain gor own words wht at by TP. What case texte How can ale eign iency bad wt ae 10, pin he dacs betwen FPGA and a CPLD.Chapter 8 Low power, a hot topic in IC design 8.1 Introduction Although alody win dhe set tk wl the mideiie tlre CMOS Decne the ang st Unig Sr VEST cee Prot hat tin a few desig were pened im CMOS. A {Batti aly tow api ha aly teque the lowe fates f CMOS wer ig! a Mant exp hey wee bt tery suppl spies, such we wetter per rept tone a i iwi "Thc tight nto ton, bowee, the bf ta sities prep nr rom banded hound il, le ‘hip toque ined um eer leper to hadron egy ete (lpi DEC; Pee na)The per cnmumption of ay Swed power common fs cap pati ag Th nf {hein diving res few pee CMOS I was he ween or ‘viking om nMOS to CMOS tong in te sty ‘Caen the reguement 1 a he aco to power aap tan tay oem anther ding rt ee CMOS power scgtion he Ing munber of prtaheappatos i «thi ding force bepner CMOS, the ener mark, we ca Bd ‘Spire wos, vlna cameny CD pen sad Va: Te ie PC nan ning peas of comptes wl te ‘i or app computes Digi ar epee, wih 2 pl ech Same ten, 3 poe COS aly te soured mre wl lst ny se seo nthe ate. Ath in gt poe rail eto sonar longer pci Te Fem digi aminant (PDA) wet svat te cose. "Bd opr sa devs cel Sot vey ny en so fog {yt ati ergy cin, whe cr wih SHESESS' cy woe tan tu nt ee A Sia try etch bg al alag sd heey enc STs Nel ator hv dtal he ay ‘as, oy se eal vohage ad wey ny {Gao er te Now nn et Ee gem ‘re elie, bc hy reel wag od ihe ‘ery dau (ep tos00Wh pa). hate eld mee mor Ain the dean tr tty ely wooing ore ‘Mae nematic tery tc ca be id i ‘ch ry ‘hay caging ea (hip wna MC). ‘Cress pos beat seeps he ase, I ge rl ow ome sna a sper poner ssn, ap oe [Bound branes tala eatin of clarromigation anf ccromgde etn vl Alv-powr diy atte old tee be oom ‘toa ia eer IC dig jc, ben t's ene for power omunptian rato od rely of caret abd fate 1 fem 8.2 Sources of CMOS power consumption using the operain of CMOS csi, hr a Aiea soto {hat cnt ote ttl poe somunptn Prat = Po + Pe +B + Pawer Pp pros te sige dispaton "This Ws poner dst eh rol of charging end dcr ing (ichigo tency and canbe tpt Uy te fling spam Pon =O-VE0f here Che ta capectane, Fisch equency and 2M Sain bee "The sett epee the erage etn of es ht et riage lok pro Thi ber ens be iw 0 ow ati, fer example but ean abo beat igh a (ey hgh civ) bea ‘ears ne pungaph 3 Fey renee ate dan, This 'Stheproerdeipted aca rasa (temporary ccotiznos DC) flere wet 84 the base cass of the feet entation "Pe earths dinipton i prea by Pa The he power ated i gg ae 2 rk shot ‘el cumats betwen ply ad pou ring rate mally the lat sna to he cal owe patio race by ithe dain Tn he oe ida ok Ghign ea aerate poe paso contre ae e ‘Cantrbator | Teeinloay | Desa dependent | dependent Poon x fo 2 “he alloing ston dca the ecco ae sgn meee {iat an bear oda te ict pone ops, 83 ‘Technology options for low power ‘Arcas bese fom is ale elo cn act oth the ae {the lage pow dipaton 83.1 Reduction of Fas by technological mensures ‘As ort of seing the chanel weg oe geet of ctl {Gn we hve ave tm pot (ih chan! tof 35pm ad Si), wre ne ao hare trae the apy lage on the ‘ei fs MOS tater, gtr 2 Rafi th apy ‘eltagy meant he ens Dcnne tly owe, re, he {al wage aha to be ec "Thine ht commen rhe igs cet ot wl ef ise marin within ig ete. erie oh a rol (wea [tree carmen, ar ded in chaper 2. wel ave 8 nage ‘rest erough an MOS traniator whee gate wags tat ‘el The hig the hres vole h ba ag cent wl ow Ee or dee the abt Hope Say, 1 be the ange thet wags, ening tad ier fhe shal a eat a Vp = OV Incureat tecnologia Sra, betwen So cae) < Se < OM ec) ‘Since fate cet 0p = OV) on fcr bere Oto ‘Weta bce Ca fr pos sl spe eon pti no ‘wend fr the tho ag of eh MfOS aod OS ass ample ‘Asam fee tar with an ape ilo of W/L = 10/028 17S AEN hm ting cae ght be DEA. Supon he Grol wokage shit to 03. 0 che cent cee by 8 {pe ao ein ne of olen apne Tit cring car engi rl vgs crs ‘ret of al ne fit ral wage alfa tec) Commaueny, he Cr wt en be at wa 03 fe tym ENDS pln el owe pinay, e {eral ages be hw eros Haneythew hn tag th ei sf fo ately age "The ese sino spin, Onn terry the rh od witage by oplyng «twas dering Randy mode). Depending om in Kfar Inch eto or th the wage {conta 1:10), that tage a be acre yee ba ‘tas lay oping x ates (lk a) olay of are {ule Tee dina wltge (bch nMOS and pOS ted Theis in he say mo) ean ea be sap y aional ‘ply put, prt th hip The back ie wolage en be Souda the compte chip col os cor nd sero, ateng {he 0 era eet 1/0 ae t be etd ently og ie ‘otrton ree), tipo wel ockalogy og 2 Page Ai tows cower fp dove ch logy laste td wl ra i th cre ar comet to parte hive The mMOS taminor re iat Eom te ab ‘ae ata, the 0 sie an ly ai he ae cel Fig 1: Grecian of ol dene A seond pps orc samy (ag) ern owe ma Up tia J. Now, the power mpl oth oe (thw Vi io) Band ys ry re rm With gh Ye Be "The wh of thi rate ech ha hr ulm oltge rp rns Howe, all storage lls ad marie mst be co ee oh pete peer pt nk b= igh eer [ough kw ltagesanlog ea show only magia ern. ‘mats, they can il aloe ih digas on wae a opal bow tage 1. ‘ually, tbe sng ply vlan cron by ag sp (DCDC) exert il om-miage ca, the aang cate ‘at be pat within wl (peel ecco) Wark ta 9. ‘ll gal te aSC08 tenor in the sale pat md sow ‘ae dilewstpatrmance. Tho analog ents wold no bag Sperate propery Thee, the angie BOS tars et io ‘elite fom the cpa part is bck ed to power ow ‘he dig pata andy de "Trofeo suse eres, rotation must bo oe om Bt et sir cs hl es tat LDD tocsie re ded rm 8 {pt 25pm CMOS proceso ede the pea der ld heetc gnc othe dei, mtn 2 Abo ini dope Sr suc dein owe pats mst be cow Yo ine eon tein et 83.2 Reduction of Pgs by technology measures the fowing frm fr he dyna dpa, bh apne (Can voltage ae partly detraied ty te echo: Pg OV af coca te oa (pace) pe ae amd by he to. ‘onto capitan the gin eaptanes (ano th comrted tag) and he partie jnton capac in the ge ate it ‘Aros be aecapatans ne che gl cn, ich lo aft the and tha the opto OS tant drama ‘Tove nm alratve. The redeto of h nronnct pate Aegendn on the ks and ction fh ee ad on (aeteak it ogee 83. ‘a. Zim. — Pigue 82 Crows fund metal ho pactnce Ana raul of etn snd lecteomiation fects te tick of the ‘tl aes analy be eared oer mals ar wel rating. ‘Sirepme copper fond to bea god cane, alwing 2 09%, ‘edition of thr meta hanes ode oe ta epacance ‘relation of pone inptn al era (Sapte 9 ith a "Ther oie rege rested plot sep. Ti pace the lip rn wilco wl ha yet the power. spate ‘One way 10 dete the dct capac eo Sind tine witha were, The eof 0, vind eros 1A tra {wo nt esc the ar tie. “mton capaci ae fel By te epitinn rgiesof tbe ose aed rain uo of ah nMOS ne MOS tors The {Bikes ft depo repo and, thn, bee thee tapactan re determin the dope ft at prone, A ‘eduction ofthe uation capac can th eh yeti thine of and pins An wernt tothe a seen {8108 proses fr low pone ig be Soo Ilan CMOS sad ‘SIMON. Ths echelon ar tad in ru 38, {53.3 Reduction of Poe by sedeed-voltage processes ‘The cee of he ham th ber gomation of ahs it Saeed the po ofthe etal eld inthe pce en neat {he dein atu vale sO on tela, LBD ses {us ction 27) rghit atin fh ste el. ove, on tow 8p toh sd eyed, we LBD sre taro ao nog cath nly opto nace the eal es ea isto mer the supply voltae se Boue te ee edie igre 8. Mtn of pty tage a in fhe chad Est tage1 ft, sborter Anal gts wil ee leet Vas wl ‘Re pecramnce fearon the Goh gh al abo ber ‘ical. Homer are an ice of te en thral egy) ‘Sern ce mron 83 1A ery mp arc tt eat the [rman of «chao Ie the pow prot (DM frst tls prot tens tht the eat wry ice ih pent fe pone cnt powe(D) = CV af Q-t = ov 20.v. . dine) = gto 1 = veal = HE ‘Torefacebith the power ad the elegans C mate acd ra the prove twa equity ther D produ wl be al pee ellen wi eit $= 0, whe re Y= 3 ‘Tasers eed bets pag a DE ts dearer oak ik med no etre oes esl Sue! ‘ef as so hr em roar et 8.4 Design options for low power [Ac shown in table, we can reduc the dye the ati andthe ‘Seren dpa by ing marr th eign Bea the ‘ease the ter wo ate ar and spt, we stat wih the 8.4.1 Reduction of Piny by design measures sing an np ration at CMOS log, here nye pry aes pth em up to oan, The eating ret ae pation ca bral ih i 0 ateation Mn bn pa to {85s Conte th ramp Bee 85, Cor Vig My syst fae Ba Sasa Figure 85: let espleto lt te sa poner ‘cpm Win ths mbes, he dynam pee ispasion bom Pag = CVE 0: f= 5p the short-time iat bets aint ons Cnc: sce 7 and on the ipa re mich 10 ge othe ‘ofthe pAMOS nad nMOS trainee bree For CMOS ‘eves oak al otpt de) tare power ean (Spain othe reso nnn de, ee Bg 8 by fe BR 7 Plt rer in ith pring tr oupsing fcr A taping teen 1 16 (etn 432) wil aly ea is ‘inka srt ce ington, wh wil em be eh 2% of ‘he ttl niin (108 fn meet cs)‘An importa ob made hah OS ant wMOS {Geenor can ave cole satay dung 6 tase when 1 Ve enc a bree in 84.2 Reduction/elimination of Pax by design measures 1a camper ogi gates which ree may 7MOS tar insert (Gow ot more npat NOR gato, ire doer mei, ude nMOS slate re mtn pple are 8.1. When ‘Yt ona Cae Figure 8: pt pnaO5 OM gute Fer lor power splits this tan fics wy of sponte ‘Sonn thle the poe ea be a by oping he rod MOS by a loko pMOSt This ay on tome by» tor a othe ok ty ple: p dept, hee ‘pod wt, been pnd OS feet on boat 1 {ote tha of» fall CMOS rion They, to linia Sate power consumption, no pdo-sOS old be ye tal Reduction of Py by design measures ‘The dy isipton wa expr Pop OV af By mms of dann ecnigs, we be onic al pare ‘hi exresin We il terre pr weer alezaie esr French pum one cetiaton ethe ome oan, Powersupply (V) redvetion A lower tgs goer meas low performance an bt cae fo incre. Lat saan we hav he lowing ie on ip, we ite Pe qe : Pane 4 A bas dt sh ‘The tal propo dy tng the ge ea the ss the propa delay ft lie a emt." iar edith de par the ruption dy endo ‘oti that of the ria ea To cw he dbl, me may ‘uc the apy veltag on 28 to 14, pl Hovee, {tbe agpet st be eae, tof he ets a be cma {nat and the np and ons mnpee jrat)o af ‘nal cc er lon in betes the lope cn ott ‘eaten deta Bete eo lsh (ea A) Partin Figure bw «pr mpemenatin of the cet. As rere fdeulsing and aipesng the signa the sae prorance fan be vd ein the ial elo gue 88, whieh ane ‘othe do eggir A Pall impeenaton When we inde mips ad addon wing, hi pa (Scutches at in an even of eft eapetanc fo be itd yal of boat 235 The owe disposi free eit of gare a ha par impennaion i ge 19 hen pe lint) = O-V Polen th) = (280)-24V 0 f 2 088-P “Tha, the paral ipetatoe ofthe data pth rn power reduc afar abt howe a thet fan toad ‘tmore han fet often Tas sometime aioe eel Inthe ena high alu TV (and PC) rks Antero 10 ‘inten perormaoce st edie powepiy atage pips 3) Ping Inge 8, ee ct pth ea tox Tag Toy Ta Ione 1 be propagation dl ofthe mui an the scum are sem he ea at pe re 10 sae Non the ei pth y= gg Tae)“ So > Fee Way Tae > fe 2 fe ‘The abo ppt ws fgaency which een a gh ‘here the wosag ay ede fo abou L8V to maa he ‘ain quency wit, "Ar «rl of tains pipe st lips, te are incense il be aboxt 20% Cnmparing is nl hte wi he gale kf he wing Pest pu) = O.Ye fat Pelt pa) = (30) (P08 “hal ar py 2% ett pe ie et Fin heme tet pre©) Combaniono pun a pptining 1 sng both pret opting ecg, the cepa SS ror hy a ctor of fost Tht abo route feds of fhe oqenmt oa spend bya toro To achieve thi pd ‘eure, the vg ate ec only 7, Comping {0 eciqae ithoral cow or Paglia path) = O-VP-a fa bpd) = 028126. 058-¥P oe 20g ‘ty whiten ngs wc ‘Spent ela pte tra os nancy sae The Scotty aap nw eae ‘SoD anise sy te a SSCLITNAGIS as ues te ae re {sien ios presen ap way 38, SSR nowy ci tag D) al ta een [oti ey Pagi25V) = C-625-0-f Pol¥) = Cole f ‘hier in ingen of than fc 6, Homers, ia Vas ‘his oe i stan the inverter characteristic of CMOS Inverter eS oras 05m Figure 1: CMOS ner + carting htt Vs < etn In thie xample, the wing var ad Wer OnV ant Vi, = -06¥, ‘The pein th eter lows, wining Vm, + Wes ig = OY, the pMOS transac on and te MOS ‘tari of te otpu atthe gh ee (03). + Wes = I, < 05V, both the pMOS td 20S tan torre 3 the outputs (ata) the Bg ee 4A. VenOSV, the nMOS tutor swt ond the ete Yn iy 0 bce OS ao + Wen 0.5¥< Vi < 09 he aMOS traitor emia ad {ho ontput rains a OV. "When seh a 1 agin, when 08 Vg <8V, ot the pOS an he nMOS tantra of Thi me tt om 8 i se “When esr lV the pMOS tao ich aan the otpat wee oO. 1 Pinay when OV ig <0, the pMOS transistor remain aan the output emai a 0.Although Use had of cits (Vat < Wr + My) ae eaiely (Rileg mur Ont alata of archon ent ert ‘eu vent can never fom bea oo aor aap uth {AT etre the abe oe swim ‘Ther the eno sa ‘Stet dnaon at al, Not eve ir aed og ‘pentin. Tae n tht now beta rary mt eee plan haart eling RAM, «ROM ad other pn ttn, Morse, era fh kw age opty, the tl ‘(mt be oto very erly (| =O -D6V with Vea 10 The opti Va then et Fu = 18 1) Yotage metry Generals scotia ioe pearance par whic old at Aly rn ates ppl altags ‘ie cn be plo enteral, reer ont chip a vege sar ge a BI eae = ta SPenseE« Ta Figur 12 Fanpop rept pice dev tag re el tei si seg ea {owt rei volgen perform» valagep caer ol ot the igh perlrate cet pts. Suh wlageap car re el ge cll Hearing for eae One ea se DC- DDC einer Her tothe ower ney es pant ete fm the wa sich et AE the ome th Bley soy pron re ) Redo wa evi {Cnr te wlth, oth o hip anf ip, ace eng 0 (pom to 32,6 sud cent 128 Wt Thema that the saber of ‘Susana aching sealer outa nse nr ‘rama ad hn umber wl tin ore he poe ‘pation econ ih ith eet tote prt he ye ‘loming ofthe tage ang o hse bas or xp) ha Be Conde. Ata ani, ae ssw sal rome, Wi tae 7 opts ded with 30pP ody and wc rane a lc ftoocy a 4 To otal son Saipan at Vag 28 ‘tho ths utp wit slant ia Vice fer a0 0a5-2 stout 06 1 we oul loner the output eving to 1¥, thi power dsptinn sould ede to TimW, Radel lage sing ea re ‘ly ed torte the powe dining or U8) Capacitance reduction "The total apt tobe rth on a 1 an Be eo id ‘too ee atte la chip ve Th dn ae at ‘i bam lt re Alii 5 1) Sta Stppne we have to perfor the along lit: rio)= 5 som) aA posible are pletion shows gue 815, io) pe et) Figure 1: Dig ein aig am ihn ‘When mage, many adn hae to be prima Her he riware conf il cotinine (ess an ery fans The data so ipl ah ae er il de, aay ng peng tine a dla ern. Ahigh peter tpleneston wollen ‘eae teal pipelines andor earl aead oi Inpro sp With qa othe power snmp, sip aon we ican Fg 14s he we) =n 1) +20) 210-8) Anhoueh sons of to adds, ech er De Ds oly 90 Input etch as cher are eed Faure 21: Reem ration fe ming em ate, rm this example, we can cone thatthe cit te 3B) Chip ew [At dip el, thre ae macy open oe lowering the power om: iteptin ty Capstone een, Ts ng fon Be, {oat and deat edna to yt inplemestation. + Opti teas Ins can, low power tens tht ow ge mst be Spl Ths requis Hey el nth aw ste compen Sy (warn hee apt), "Theve cll lr a boy oct and stow terrane thew igi com ‘en. Mot iar fo died fr hgh peroatce. They ‘atl lively nett whch ome pom ee {Sep Ug te Kai sow power deg ta et {et power ant ar I. al ow pe ery he ae Aran el er mre nt, ah ht be he pri ttn apts of sure ad dn xs the tl Intromit nth sr routing wll be rede. Se hd in repo ane een Uy adapting = ery Fp Tout ie lip-fopeae pobbly dhe mat tegen yd elo 9 ‘ary i anaes, te to ty pre te total sou en fen orp Wy ipsope Tey thee ‘aya dominate the proano,the ae he rat Inst ad the power oman of ip Te car that Ch {ope sol be died for lw pe, a oly oe eae {steal owe osu be bo ft ck eer poner tr cack dew taaace (more otpat Ss) lbw sale ‘lok die cet, Srey song both power comune ‘deren pes + Patani lp (sant usp pasion ate) "Treg adie! the afOS er ‘The mt it tele to be inpmentl In paseteanair lg ce mu ees hl aera fll lr als The bse dren [toe hep a omental ate CMOS gi tha utr ge gut as pron urea {eamisor lg th Uhl ete ow Vo = Van ~V) bight Seat When ck igs nip ow CMOS Sininge crs Hon in tice hen Vs, ©0S pastel wl ds not i a erste fr Iowpower dg For iret eo ually at a Ufo otra be ths voage (Le Vy > Vy) a he ‘ecg lel. Tosmpenae rth tld ety et to eee danas of MOS praise {ltr It a ee roe: Th et Complementary Pan restr Lai (CP) 1 CR a 5) alin fr 80S ‘no ivr fo generating compensa opts, Witt {he erneouplol pOS pal tanto, CPL woul ao team Figure 5: 2p maine i CPL Bec of the ompetntay lp ety, te fina he ‘empl of CPL gate apres that of comeational {CMOS pate oa te sity ad eso he ‘amply sil ich wore ring on eld. Meer stp lg far ee a cate gh tr Doable Pase-Tansisor Le (DPL) ‘APL lg ate we bth OS ate MOS lope ea in Pall proving al wing tt ope gure 816 “6 Plat 16: 2 mip ie DPE Bocas of the axeiy of coplanar sg this aie flea ten retin compli as CPL Alinghi a ‘ving eae eect ore tar, pars sy mpl yt, ad ihe hn CPL Ta ‘aly egies re oitng power es lore a at ‘Sat than ster pou-tramstor loge td ward CMOS ese tere of passat ie ‘Thee ar eer sof ura lage. One, the Swing Retr Pane Trt oe (SPL: 6) Seed {fom CPL. Hr, the outpatient cron (Compare gure 818) and must be erwin by the pw ‘ctntsen ton Piel tha ge rbua fx go tral imphenatin In Lean Intron mh Pa Toto (EAP, soso pa rancor ge ste. Th bss ‘ily cota a 0S te enor sada etore cet, ‘Shsiing of on nessa ak MOS pully ri terse aler tan CPL Arup wag of Yar <2 ‘Sip rite ep pia beca On aPally, sew ty of pstmt ge ae being inetd ccatisuonly(DPTEI, EEPLA PPL). Hower, many ‘Sere fm provi with aly ian changs Ws ‘ory of utr gw be veto yo thy ll SM bv the same dung thy il ete ule fom ‘Heald velage lw aol a el Felts ce Uh ‘il ed he double al sppach(cmpletary pt a supa). ncn Ahh ies prank oi repre in ‘erate, sowing ater Perma tome ome Se cs ttn COS nr re In, pw rari lage owed eal fant with Siw rate cus Hwee ath eed tgs cpl 1h and lwp ivsage in bee ee the nme of ltrs sear ea al pe teat. Best fr hal wd ll der fein, cme tian CMOS este per bre ney peter ‘lof rang prom traon and xteningaptation ‘vena the obs wil lay an epi omit {ol inthe delet of dapsone) cl I Syuaite gefnetons nto Ig ‘ly finn ae mpd Si Thi fulbadee function might serve an good example, wha 4 is the Sr faction seeps th cat fa ote ate te oo ebtecsie Ina std cl ary witoot fulader ton woul eq nt nut AND fino and on inst ‘OR Wik eden! fle Bey clare ll be ght ated Gory ell cmp, capabl of pti Ing cme function ceating a eter, wold bo good wo fo optimising oth ts a sp Horr od rae ‘eto ol mu the sh be sabe opment acre 1 Use pind yt tol ‘God tol ae aque for an option mapping of cele lege ints ot the ary all Those al ut aloe somal scare ting ode Usa the hw ear + Ge pid pla ote ole ‘Many euret CAD tar plc ont ae ars oe peor nate dives Pe) tha esc hav dire wei SENG poten Thos ey ne pe Syfeapucanee) pee vote too oe regan, Png ‘nium wie keg Use oto dan ey ‘React ofthe ntercometon Int can be acice by et ayat ye. Expl el sbutsatmay t0o> ‘Sie dat a ht enous ae map, te Co ‘dint ny be spt isc be ‘cove, Pratl speaking. nly le high vole ‘hip fr chi with vay igh poe specieions, whi ‘tc be ciel with ie Sige ole Alu this sounds very commonplace, ot love During or pte, te ews sha bon wating he ‘Seon mtg bund ter pl introns, + Open the ttl cock ate (Ghat sgn rn ily cer the cpa sly itch a {he highae eqn (heh Gey fe data Gequney © 1/2 ‘A laced the be of pte ad the properties ae ‘dso rn th tal ck eek. Tepe tad ‘hat mall ok dies ad be. Seton 9.1 psn ‘burt io, ls le ey well wpe itune wae amber ch tt gl ok elas re obi ‘sehen the chip Tiers th ck sew, mich allows + Dynamic yea aie CMOS. (Chapt pens penton tatc and dyn CMOS Toes With exper to xpctann udm CMOS gue fener fri capctance, Thi bea the fe ‘Som tly only ele! ina MOS network whe he BOS oly at» (eit od Berane eye lok, gt vay rg ek ns Mare, a ato ‘he pcnng mechan serge sty i sya fat big than estate coupe Are deal ok {tothe atvity of ai nd die CMOS lg preted 4 Menor sen ‘Ty veer th otal capacitance to be ec in mess, {hem cat vl lot sa (ek let) sich hat hey ea be sly acted peg ps ad wee) ‘agen wor owen, Wier nde (0 tated 2 ‘ie rodent arog and aston cca rbd pet te ‘The phar operation can be pinion by wet pea Ings etn ol howe o Be ed or wie) Inna of all sitet, ‘Reduction of witching activity Mat fetching city of ce eer at acto fal end rgher rant ol (FTL). At Uh eip eel thr ae ne ‘cet ar imi oe map sig wg "hi pages poets era of hn aur, ag at he 1) Arcot et ‘hon sda the ache an RIL ll wy foe {be perfomance, the ana the poet cooumtin of «eet "Thssaheton wari the Oa thn hie eon Ch + Optima tary word eth ‘The word gt sat be ot ely pti nea apc ‘umber ofits is se that really oid perform certain fc 1 Bisel ers it pl gure S17 ges tw strate implementations fr #16 by it aerate pied a 97 ea Pig 7: Bi ai ra ad ay iar ‘The ary lip only cows oo hae rue Ser foctton nthe it ser apostle ree lege mpeaton mee bu io the ee rn ‘Sona cota nl vogaten. fo fr omparbom, compet ‘liplaon mate talon Fo he pall aliphi,e Se owes! (ped oth it alos ae powers (peso). From th xa we map const it pare ‘pcan ea neh halo+ Optinis stam power instal eip pe oly mpc ks ich DP, 8/0 D/A a ee th (Sse eed gh tne ene) of ga bee "bee tbls, eta ower woul be wat he /0 eet iach oe waea separate chip. fen fet hod {heapsom per A comeenion of igh pene sen parts and oe prance atom prego diet aro ‘ue chip alter poe a wl. "The ow prance st cul he una mer fon, ose po 4 Naber pertain. "he cae of he ame epson ca ab hve a et «och power osu, alo ie B18. Wigln tat igo coie onl furl pve ma ‘ers The st igen it Ue bo we eee {Gani} atthe ennation fom Ty -b- The inga ‘how two dct fr the sg-magnd otto ‘he teamton fom -> ~D od abe at the train om Boog Wn thcre mer ia when wed smn ‘Wie snl vals ar opel yy its, the mst i ‘let iso's complemat tation wp the ale {hig ie Fei oe ey wl cs eh {fom prt to sane rae and io ram Tate ‘orphans totam to gn ew ely hie {nthe sgnmagstde tation oy og it wl ge ‘linge poe conmigo expe ‘Se the t's planet etaton nd he meee ‘ain in nr and mall oped Beample hie nderibracoe. The erento ie town in ge Figur 1: Repro fan aber 1a dh en complonet staan, tenon abercin op tain dos a a ay be: Hemet iro ‘van ool comparator at be wel oa aetin tle 3 m= AB Inplenesttion with yates a standard cl plas ous {aero fren ao rufa co oft In isoar ofthe e's complet ttnExample: ‘Tr omplemet mite: ‘he rl of ming X and Yi deat rr EE td BE rye Bim “The anton in an array mip eae the a tm pod ‘et terms tobe pp Alara he Beth tite In which hal Che uber al mes ae eld by ‘thnks ad wher he wo pro erin ora ‘aly pp ep Ln xn oe eet y= te Sy oT a his matin, sg tof he prod at EXOM ofthe insult sw the magne at {he prod of ony pv es Conclusions on number representtion Akiough the sigs mage oan ie cnmin reah ‘Ser inplenatton, th ost leith ay slip noe pot Sh apr wees ley its ae {rr i a uted fe ie pom ingen ‘De sigymagtede maton econ oer pin pptcation with peak detection, but even hee it nail wed ‘re fr mater epetaton tha exeaton oly Ine esa nse he signage nos {G10} ae oly epeeto by oo The wo compe ‘on chigus sums rlune the pone snsumpton Optima code Ben the code in whieh a operation exes cane (he power omeutpn. Anan 8 sia ale 82 ‘Dt 62 Compan of cig ay» BCD mast ear a opeae HSER —‘he 82 shows hain nity of to 3: counters: 8 [BCD contr and Gray cate cuter Tho tbl ao nee tbat he BCD counter aie a erage wie the weg ety fe Gray cde cone. ‘urna plementation wth mip ad adr Bess the pein diced cpions (i ial ess bit pl snd ner epost), re re a ter tee Alera fr maprinplenneton lds Booth malig ay mule nd Wace te mal, “te Atri eh ton rcs ar ey sles ppl cary sea enya so cig Wah rept te per comumption general ro hab i "ey Pleat that space sp a achat proc wil ae Sado! powee”” "The co of an aii inphanetar ton depend on the pon apt with eect fo Mcopocr at icocooer wc ary pratt wih ow mer pis mre ‘erat pte looms mal Set ae {gate Malling or inpevng th performance wile ‘cag he power comampenn cinta loge Che ‘ee of re puetsin th ee Goel nt tin RISC areictre mals moan ce he ‘ter 1ba0 ele, Homer, complex algae mapped on RISC arin geal us ie ntact than » CISC ‘chine The CISC artectre may he oa a eda ‘ony spl lgritime, which nde to» Hind of or Tn iter cars CISC pee ean ny be more Foe ear, appears ha ach ciate hate RISC ot {CISC en na opti! orl power No al wie rameter 1 be jst opi ow poe + Limite 1/0 commana. T'mary apples, may 1/0 pos wo wa fr communi tn ete rosary and/or A/D ot DA cow eres Tore activo sae ob iterated (hon ge din Ths may ier the chip pom, Bt it ‘Grany rede he pte pone Syreronos vrs anes yronour cet he dls tease to, on ad or he is ay cy «Gal skal. Homes leyshrnon cst po! at town mend Hee, the ‘Supt of co cet i ndtly tam an apt tothe et The ely lage frente ny pts gd ‘Rodan opis tnd Por nsec gn si ad et ‘ong Aeteal thee to i of nacre ee ‘trnmbonou sbfinetn() of yates sd prey ‘seyoehonows desis ined cre) + Asjuteonoue abn ( yeoons ei). {Xyachoon chip nthing more thas liton of ay ‘drome citi ae sorted by Ap ope (ter). ‘han, ayn lok re bel ete vga ‘tote may mere ne Fie 20 shorn an ryecrosus implementation ad tw ym ‘droons aleatvs of ths outer. Inte ween ee Sinn, ech tops ke! atthe Lighee Gene, ich ‘eum of poe, Thesradao cuter ih ne {Sa eberiple cry contr In he myhome oat wa ‘So, al the st iB (88) rs tn het en, tren hota act a ney een (ee byt) ‘This eros here rues mach owe (bo 1) hnFigure 20: Diet wena i oe with fee gram soon pr ‘ce cnt pec ‘Sree ta mig dap + Pare acres design (iin cei). ‘tn te nosy equ (GO) an dowlaige (DONE) ‘ou, Page 21 shown» fldde cl inplemet ‘Syosaon ge Go Figure 2: Ste pelt In his tla an euro ae neta it sen 0 {plete ste the sina pe ht amocied with ‘Goh rut nd caw inl. Thera at at 2 tr ter An nvetag that on char cam rue meat section B). Ansber my of implanting ines iGo gemraethe requ sd wld il ts hgh Tee a eu eng Hee 822 Fp teacove Figure 2: Stina ay ng aa dey that ‘Mi cnalntaal lep Ta thew hgh component licencia cies A maar lstne tht th day ay te mtb die {emul hme tha the owet pth trea he ‘ht lee.‘ cnntoial ope ala show gen a ‘ono logs et section "The ey to ths of sled gi be ity to med “Alina syaconone ea ve only atv wh ry ‘th operate a ede poer, the msl an be he a Syucroou le, time re por, cach & yon eth apes at of wychrnoe ces. Up to mow meer, eyo ge ha ni ben opti Sr Bh ‘onl (nd so cae reall ae, otic apastas ated aya inlacetatin. Home, fetta ret the power ery the cna eal ‘ta inlet cai na be tr than th ata ‘pia by ring no cc Caran, seel mizopeoesor di anes re qty 6 git tal pring of i ens th a ‘ing jitnlte Me TISC proc Tie ‘opener pcably the wave othe fre yan ‘Suis eigen mew [15 Optimise meme deg "Te sy dat compari Be de -secine tockniqos ate wed to genera tof diferent ks ‘Rte Toe aleraie to pring ne sng sperton Ai cimie earned teens) ane ‘ek etd tnt that tof chick pease teed fe “ny ame rnd oe we persion. ‘This ou be st ecm Incl power onrmpti ° 2B) imple ee 1 Radar gtehing Satie CMOS cei an exhibits (bo called ami oneal an or span nto) aaa of fet peptone oe bg te toto wet, Ca Soy» cn bv ips une trations Stage lack eee fre trac Sal tt ig 823 fue ano gue 828: tec en sip ae et Suppo the (9) apts ofan EXOR ate we om (0.0 0 {On bth stot, ttf he EXOR shou ean Sim (0). Hime, ben rest iy athe wag fe nt apa the ate igre che 0 np mit ‘tg th flowing eer (09)-0.)-)- Ted he {G0} pats oa vey sot etd fin eating ‘empary T t cnet Thins popgso tag Shee AND eat Sch verry rns diate etn ome, The sng ‘ali. Ara ret ofcourse of ci, 8 pe ‘Sey nde wih rund pet pastas omnes stow 3% tore owe Fran Saray my, thir ee Tio aes 16°16 sry aie 0% ad andar Cal mpknenindoe os propa an coment ‘Sewn VK! There, ge power ing woul beached ‘sch clei al dy pth wre band. eon tomar "A oie tt Wales tp nly 10% ten, compara to the shore 38 bo 8 1°16 tiara wap The Walac ve ui a a me oy, anther myo cing be br of lcs owe ‘ing ptnng olan he Sy pa Opti ak acti. ‘Tear rooney ingorianw ‘ere o por diptn, Th het that cok niga un ‘or he ipo maa the nape data ow oh hip ‘sini Tis eam tat ek cpio ced fy bok ery lng tac and ge ue of Sp op can say rg Te compin VLSI cp the cc ad an be 1 hip ar SOF. Te end rao a he ck a sh dt acy (Ue asin vith ey hia na ny tal tec egrny). Te il poe Sand bythe antwerpen niyo the be ‘comet ip dos and acs ge 2 shows te elie clock power oma m2 fuaog of the arerageatiy ons chip Thi pred cto he ttl pnw onanptnte ftp ere Fe 12 ie dk pr pin fn eon he clack dinpton can bea igh 200% of the tea ip dpi sty soul be or Thi can be dose brute cde transite er aration. The ‘Sr seul mgs to ede cot sty cing te of ‘tae igre i oe ip pc geo th dow of thn clock pals ted fon sly ane gy ‘on be pos oe slock a al ony fr ae ‘st ate they roduc the pve dipton othe oa 2 pop that ats at oth so the dock ple eae 1 dsshedge teggerel (DET) tpt, wit the commen ‘ast a negative tre pops blog tthe eat {ony af Sing ae Teg (SET) tip ope, Hower, the Ecce DET tlpfop hasten Unite pt so by the hgh ‘stad in cmp tt Ciera Bath the [SET snl DET fips hae to bce, Baal ne DET pop oe gare 25) he two nce esas paral, le SET Ap top sw Sige B25) hy a cl ‘ly [DET aod SET tip-top sw comgraemasin Antal, bower, DET pp ities ei adel “map or hy are me Bat ine ih pect nig soe 1820) 2 fee Figure 25: Scent dag shin SET a DET a Sine he dc nts ton ip poe oar thm dept on the at ety, pom mi ef 1 to erst pn te et of el pop en {G0 wo 0), when ine DET to 1 come wycnous die, ce coopkds wen hod at thigh fear, when me pans of {he chi cll operat co cnr infec i ae fa ok st wed to sate toe bw ae (Er vm stopover pot of ve, oe told at fon ‘poate dec ‘Ti rane tat we sp fh hip wi he low reed {femurs gr ih cos tals ode burly PLL scat t,t bay lout ck wh an att in sock eras Sd he hrc onc wl nib vc wher they ‘Shc wad rane acto eg ‘hota os he tal hp ety to ih {he elck ff tenor eral finn Bch eet {Sie opin tp ding mens hat ml oprsns ‘eee, I th pect diet mae a ed ee sk pt ‘A eprantatve example 8 conicot ROM, whee yo Continent nny eon ne ROM‘x fee wn on tan 1% af te tne Fea ie lok {0th pomerdn ode atc, yong of Rok ee OO fal ome pio Wea sal roomor eerste power-on mode, lta ‘owe mode ermine. Dyeing th sate of ne on ttolrgir) extra devi cn cas waa oth DS, 1S perigee yrange eck The ‘rag or nerd rine ten snes. ‘Acbsivntgef ted cls lay mod, te) a ae lige operation tn ob permed cn he lc sia. This (Susanna nr the eral gud Cok, ek ‘ay rt In tnlngprblne Ging dasa rr ba ‘ek trate ain cok a hve tha et 9 ed (dekh crapeneted dee ret be tnd in Gone ‘that do tae sted od Generally gtd dc her he dag raat vith rpc fo ee yownic ven tate COS “Taco np een dani or atc CMOS lige oe only pends on omer comratnas Amps of ‘erly rales of ngs and dng tbat are ‘lk ry important here Inthe compar damit ‘tse CMOS rains, sw ioc shop th Speco omer As ecard samp pro dpe ‘Slocar Alny sme oso otis (as) Indu the ato dpm MOS. Howe, poh ‘ch aoe evry sok le ds oan nce of act EXAMPLE (mune al opt cmt re amy ir feted) coud tae 63 ‘De 83: Reon tte Dip NOR anda BXOR ate aby sable bo [ooo or} efor rrf-o—hr}o} ‘Bocas each aut dynamic CMOS chip hgh ding ‘ear he oupitwil be charge in TN ofthe ape ‘Stine Pinpat NOR = ait for OS Rte EXON cli aor 05. Ia state COS, poe ly sit whe he opt goo high NOR: Fu =PI0)-Ptn)=3/e-1/4= 3/16 EXOR: Pea = PO)-PUl) = 72-1728 ‘eal he ge cone dye CMOS i eld wt MOS pallor sme, les pHOS trate od rears Thre to sal np cpa, ic mak Simi loge uate fr hghspectappleains. Bde {he highest fcr, the eal a ade oct {he rece atts abo dso mcs ihe aon {Theo goat ma sngherd ad cma ‘state ge In te of dg rebut andes fd ‘em le CMOS ir orain sally, when poe ‘ection te (uc pedo mode In whih Ce lok stepped) teeing ingen, dai CMOS ao ‘pple eam of harp nage Geeraly it an be ‘ied tn aac age nt a lcd pone ‘owes roulsatn-+ Commo hatin inpatient oe » a 1 1 = oe Sanna = Woo ox —- mn = mn oe anaanay: el Figure 28: Rad of lai by dering ae igh Figur 826 abu tht conan sls wih igh activity hat to the opt of the propagation chan wll ice the total poser compton of tt ain. Bap the hess of ry le eres, who Ure respawn igh sctiy,inbe ‘ou thle wil ce les pve pation whe hy are “mete te lmapacance pte fag ee ie oF awe an ge Nee E TE scape sa 6 sannanne TED reece aoe Pique S27 Retin of ome dition by matching esti san wt gnc {esd he por ings fa itt ems an aly be eel by dade twat pop, wi per sme taste on egal ty ne aloe 8.5 Computing power versus chip power, a sea- ling perspective ‘The sealing gros ad i pct om the pean, eit ad ‘ial ney of OS 1m neniely deel cape IL How ‘er, the wang proces wth apc othe sem perfomance fi ‘algal poor (SPs) que difeet append, ‘An ipo parece rein his ste pera Ce conputing power fs DSP. Gol, this comping power () ves where epee the mer of tains of the gue ‘Te power dition of he DSP eal Pon powrom th wo equtons it cn be die ha the eomptig ower er Wat dpm el w= ope 1 hn fowing eon on eligi es and wo satura ton are epee the sealing factor ben to see proce eration» (aly #07) the Ue er of anos wll meant he farce howled Wher p eqns the vag: wang ahr (Y= pV), 8 thi factor Gane Contining the peo squats rel in the llowng exons ‘nating comping power chip jee npc oe computing ome ss wr Bane harley ‘the poe dition per ait nw ane Gl are ‘Ther the cmpting power er Watt ar sealing nro giv = ww emai mig ge npc oh cpt oe rm the 3m CMOS psa eeration ard it he dep biton procs, th ltage ale trp about elt Ue oc eal fact. This ss thay tng the soon Sete the computing power er Wot fr atari of DSPs wil our = $v ‘der stave a ore neve inp on i rane porrance {Sits onthe DSP eer. However, ee oer such relucton ‘licen ipeemen, lof new DSPn ae sll epee to eer he mai wih cme pom ery8.6 Conclusions With spec to comet CMOS precisa dg i, rial bec te yw ii nd ome tigre be nce! hy red th spe age at tly, 35 COS cag nant he epson recom soply ogy lg tm Ts tcaaag deepest, er merc be a to relase owen te eng cet an ii th parca Ta tbe dig, howe, thr ae min tins rd the wt espana civic. Home, cpt Sat gar amet be en, erie he eo ty tee opine ‘pend on the sppation Tha chaptr motto prea met ‘hes opine od to poe the nner wih w-pomer ate. Fil ahah Svea! alent low power CMOS en ses wet peta ot nf atid magus daring th eae si MOS hope al our may wap. ey eat wah Fest transi sling and py vlage ran. ess hi ‘Sgn nog tong ay hei depron VLSI gn, ‘al ms tas (compe) CMOS th bt ene fe 8.7 References (0) Kouta, Share, Prd, "Vampoee CMOS VLSI Ce De? ‘ee Wy Som INC, 20 [t) K Seta a, 55% Actin Por sng without ped degradation nin stay power reduction (SPH) Cra THEE Dig of Tcl papers pp 318319, Ps. 186 (2) Kuroda SK on vf M10, A, 20 Die Cie ai SE Joao bd Sante Capp 0H, New 188 (3) A tata ot ‘4.6 yan CMOS CV, 10), DSP Ca’ TEBE Jour of Sl State Cs p62, m7 [M] HAM. Vieni, ‘Shree Dipation of Sake CMOS Ce sity an pact onthe Dig of Baer Cente’ No Aug 196, p73 (5) You Kael ot 2 age Radon Tech fr Hater. Oper System’ IEEE JSS ol 25, Oc 19 pp {1961150 (6, Yoo ot ns °A fea CMOS 16160 multe wag comp Few Eva aed to, yp 388203 (7M Surat ‘A Lhe tb CMOS ALU in dob pater Digat ISSCC, Pb 15, pp a) (9) A. Pannen ot a, ‘svi rete jatar hg sel mally ad secu Ine eet matin epieatin EEE JSS, ol I, de 106, pp s1680 1X Jao sapien nti i1) 1H, Pasternak nd Sana, “Diet pase rasta de’ TERE cet e Doi July 1988 pp 2328 [nf a Song , "Dose tnd fx high ped low per ial ata rh energy coon pr asso pe (EPL Pro. 2ond ESSCIRE Dig, 198 p 012) 1 Pa ot Pespl pa ator lg fmf ogy a bw poe’, roe Za BSSCTRC Dig, 1086, yp 116119, (8) Zimmerman od We, 1 180, 2a, ose ng Dobie gy Tiggee Flip op, Val Noo ne 198 Tt om to sync ha the anion "EDN, Dobe 7.1985 pp 15F113, 1). Bara, "ahintenance Foe Eatery A handbook of tary nhl [in 4. Baer ad A By, "tom Power Digs VES Design Cc nd Stam’, lower aden Plas, 1958 [i A Chanralasan ea ‘Tom-pwer gal COS desig’ TERE Jornal So State Gui, Ap 102, yp A348 [dere Yang ‘New Shs Clo CMOS Lacs an pps wt npeoved Speed [a AGA Stat "Low power done lgo-sigtd flp-op wing oe lt’, heen Lats, VoL 35 4 Fae 188, 9p 187-88 8.8 Exercises 1. Watery designe lea he wpm aia 2 Which on dfrent pow combating eh? {How coll th b-thacadehage power sian ec? 4 Inoptniing complet iary frie peri erry ‘alt wea ou ews st of your aint Wa is the pein vantage of crt eling with ‘poet to pone dition” 6 Wat wold be the difirnce n ativiy for betwen tae ‘ed dgmumie CMOS relent et Hoes neti roe 1 Repeat ence fo = FFEChapter 9 Circuit reliability and signal integrity in deep-submicron designs 9.1 Introdue With svnkng etre nen incre chip say, the age delay ‘fv lg gate I ow down y Hie nteeomaton (etal we) ‘ater tha bythe tanto Mt ofthe petal ected Prot scoala ting atte Boe a dock eet al ions a) ‘Crvnty hi-pertomaes compl VLSI cp may cvaln mail nf esr tht rain camp bes ono age die Frthedogn teat fife tc rte ne caper ‘he nr in whch thn tol a ed, Som te sper racy Iie down ote ayont el cll the “igs ow ‘At the mnt IC design fam have ten oad 90 ch that ten the rg slo” cieed earl” Hower, Ming ta oer lhe as the i iw (2 high ve doer {En aguas the yt ole nd the eto ae ose 8 fee) mee couple stein he esis Tee en ‘Seige ar amar pgs ape of empl Cm the por ten eb poe do tpt the tenn th hey el Patina i dep atiro ehlai Ps lon opel of hh pean 108 het show ist Hawes Eetilty Daten at lone oe ihe app ete jor at toe forces tan regu Acnaly te wee die ‘gers iing aya the pen transl nt abt Weteiecely lof don, exactly the ope won red to ot cea an fate VEST chips puting teal cre Minty 1s ae errs no ge ere by ein” ot ae Sage tyeometon” ‘Thre thie caper fru on uc laity ape atch p, ‘vest age (ESD) and trian. Hot cre ec ‘teh alo important wih pect to eal, ae ate a ha (ert Bones tat Gc om ly iting al tary oss agent teen oe et oe “his cpr steed opr th ls of he deel one ‘quench sain pecs no Use dept er. Kaley ‘how toe comet aig ah re rg te de ip pote 9.2 Design for reliability 921 Introduction ‘Th diy of page tg dn eel dl wih thie Jong erm eka ty tots ote pa, mechan and steelers st all rai eating of tT ey to ‘Shape Th ober for fats aya othe ay the sgn Se thre oery igure eng realy 9.22 Lateh-up in CMOS circuits "The prs of 20S and pMOS trance a CMOS prom ade {6 pre tyr, sown fg Thaw hrs ei a tn slice poste ge pwn the stent (oe ‘rhea wl tat suey naive with espe! Vg eat [the wl (Some node ice wil ten sume fe geoo, This undelete Ite an hd oie Pa a igure: Parti het i COS Latch doce not oar in CMOS proce of the Sron On faaater (Sono SION iy, a dred in caper 2 Forth mening {CMOS proves the roblem fsa he ane. Th eee enone il be xpd with edo tae nest {snl CMOS cnkgrain ten a Sure 81. The parte pad pn ranisorsthat compre te rir ae satel ces i hegre stor ent he re stant {he pr matte botwon she sab cnmeton C ad 8 tao Ioan Ain tho strat, Restor Ry pet the rete ete el cntecton Dt the Vg apd Fado natin ‘gure Pigto 92 Bint esr ft CMOS part iar Shue 8 of the MOS teasor of Gar 9.2 ie ed 1 be c- cd 10 Vand mores Sy of the pMOS traci ated to be St Yay. Sem res high Ky ad cee P> ein the flat he pp aston cows, Consent, he pola at pint Ari fart I hn meting enc in (petra he ther bebe apd sna este ‘Te cents at then Aw though ae uate cay td by ‘henry and fy Tage caret coatings to ow ‘mith ply tag Yay emmy, hs rp fet ae Ante emer at peration sl st be se [etcrap an be wok in CMOS cous by spying the ong ‘ecg ated ren {ie Ry vopecitely To pote ah an wl die ele fom node and D, repel, wheats rots a of ‘snl aon‘ par hytr he ally aro isistancw and fy an be ela mid yng Nght and wl dpe This por ston ene ‘aot in the pte ctan? lon The bck tet, fr Hetero cen eter eee Ito ap Oe owing rl ring he deg pee 1. Un exten tat tats ot an aden tw enacts 4 Vat rela Re (a hat te vey Be Taste) Geeta ory ae cure rch at bars and 10 ‘Sto te) repr Tl ene ne-yo ‘inane tern he MOS nd pHOS taster nee cite should be retiely fe pole the MOS "rant sald Benya gn ing ht con ‘etl to Ui he the pMOS teat shou ech tyrant connected 0 Va 1 Appty cin to the tat ‘Wiehe pst ge connate to agave attg (e4 20V) ited fo Va tn bas volage Vs. of the ape {Een il be wer. "Therle ths nn tran cannot Use p> pts ne om p subtest in re ‘This lyr ely ite deport the swell ea lr ‘rs td uate he an of lati igh dope the pt Satstrte A Tage pat the pp calor cet wil teere ‘thro thn uta a nly «sal pct wil How no (20 tothe ape rina ‘The ap nite the ely ‘ded Gm the atch celal ance be raed x ely igure 93 wm OOS wth ny pi age p* tee +s Stan: On nmr (908) SIMOX procs. ‘toy 18, Test Corporatio ne Slee Om SapizeSOL “The appeation fone or oe ofthe shoe rei ane ates tp immanty to «very hgh ir. In are taal the chp ‘honereoon aly wo dipper ide earnest ae py ‘eltage il be reduc ery prt, ss lo cnt I. Homer, TEN Soy he utero ap roe me "Testing lateh-p immunity an future trend "Te hig ehnce of occrene of icp is ring ting. Siam ha ting reuoentaele miy to ID mA nepal IC {ds mA bn Aomogmoor wafer TC. Th mans hat, ich pee ‘ner. 1008 canbe ppl o the ont ofa eat baer ‘en thoagh anon tremor wccaag Ti 100A nor Bows iy tural the tyre om mr Ege in pt, tae ‘hoe wth TPO GA at a maa et teaprataeo 5° 9.2.8 loctrostaie discharge (ESD) and its protection Intgst celts ae expel oman pole snes of dang, bath dara ed pet the apleatin Ts pipe cue of damage ‘Scrotati hrge (ESD). The arto of ESD i ery sera ‘ly tinge th 100m, bat ny rn ry ge omer ‘ole. ig natn of MOS pt csi pat ‘Sey vale fo pe! daagn when hey te expe 4 he ‘pike. "Tis my esl om operons sch at hading epee ine and bonding, dsing IC prods Te may nour ‘rag tating apltin or matenaee ‘The dana atid ty ESD is wove. The buna Dye oe ofthe man sues spore for ESD. A pera walling om 8 ape ‘Seino and wring tos with ih ttn le an ball op ‘lage ee of 107 Th lng cane ca be mare [NUESD to cctone sete, Te ery torent a praia {Set to prevent ESD datas during IC prourtion. ty don, rotetie newers ent be ecu a8 1 dio ete tat ‘can wit spay large FSD pun On-ip MOS pee tn vate ae ued ieene he iat ft 1 to BSD pes ‘Tse cat ne dg fo prove pat tn otpat crest wie Simimpedane an pa, which poe the cca of excae setae o the ip.fietiscn the Sororebtame etbotIn wid 9 cpa th ‘ollag of 90 icone del oan IC in witht sere ‘enor Tetsu ae metre. The arty mth ‘Ter the popped ihn changed ge rine The [Reed ron ict of tube he Earp a he ESD tien taken pace though an ete eA low lage fe nae ole th ge sansa he distance btwn the (en tobe wy anal ber ichgs eos Ary He ope a When he Sag voltage wry high howe, a wl rat 1 bg dana ww eae tes ge ad the io. The mas bays ea populate to the above ESD sta tly et “anny deo in ere tet with DUE (oie unre) Tn model pec athe ‘nteratinalysceptnd MILSTD. SSC standard igure 4 Ae EBD tt hd ee a by “The ns ely doe oan SD ter. Tic aman Yoyo Ys ot ange shor he eet Pine Aan the DUT te eons 1 the ponte ad tive teil, rape {he an body mode "Tha pa ay be patent, sound ee ‘opi pin. All ofthe eter DUT piu te wacom Capcar © ‘edad hn the etc ela the a pan When he oie Places eri pion, C aegis tr Fe Uhh se ‘Rod B. Genel we pie an pte pbs ze app {inet hone an cumple oa obi ESD ot mene on pat in anon in and th spl (Va) and enn (a) i "Tithe 9: Dit ES mt tien ‘Sate [— DUT Ba [pa 8 | twom | Ve 4] Ma | sso 5 ope 1 | xe | ae 8 | Ta | ouput 1 cares | ‘oat (Of amr, emp suter cade al itso the DUT. fs hi lL ee cate mete apt ‘ring tn pit omen tothe wot ‘Sse ps re tet afr pation of th ESD pe ser. 1 are dnerol forages thro ll pi, then the ESD telag oe! einen’ Wy IV ad he gure eps. Tae [osu coterie ie eras he eed alge ‘2900 or mae be Smet, even tals of S00 to 4000V re regia or tala ppc "The ESD tt i comple wits are i lerved ee ss DUT hee md ei. Gy ‘hero Rae “A change of mare tan 5% in be forward tgs op ad ok Shown ag fhe ode asctar “A incre af oe ta 10 i the, nage ced + Toceret fetal pean ot tin of devin species"The MOS input protection eet MOS gp protection cist aly compe wetage pie tered lode cane: A pia inpenestaton shorn Ree 3S igre 95 Tpke MOS pat pein el ‘he tv apcince a ode 2 camprins parse rack and pe [poco apace The pacar andthe raion frm 3 Leeper, hich pote the neal cel fom pron the Input sig. "The MOS oe TL pete to intra cele om Input vag fee aegaie sted, ‘The ipl ode DS Seward noe! wi the np lage xed ey Ts lage Sade the capo Sant Vay 10. Th intarealelgy ‘lapel to Ya ~ re pt wes bl Y= Vi miter ko wes sce nr vai depends 0 he type afin wich the protein drat teed” For sn ‘Simla ibe een 10 ed TK. int wee, en ive to de age capactanten a igh sien Hee tbe me ‘ust be btoen 0 aod 00 to wae hate RC diy ot ‘xseive Diodes DI and D2 seve a wis! plein a any (hella anode 2a Yq 07 ad Vay + 07V pects “The beac of» MOS inet protection cit pend ey sich nse an injont a on vow prc arcs Tere he ‘ign omc ate pl be donna eoapraon with pei in {hei a prtetion dels. Only oe prtctin devine ncary ‘The MOS output protection creat igh cuenta poe the we of x retire ro reine in [MOS output protect cite: Neral, she opel amis i forprae ug dion nad pa ha hed Seria protection Am erp sch « CMOS capt die Sorin ee 3.8 a oa Figure 96 Typ CMOS oi eae ith retin cit ‘Thepiypessintatenn then drain ar ofthe bine sbOS rite Sets de junction nich cap sept alge spe to bot Va 07\ Analogs ths the p= daa of he phOS and th el ‘oetr fm eonto, which clamp puke voltage miso ‘ot V+ OY. We the pMOS tate sd the CMOS ‘Te aso porn ach a he ipl tod, te MOS dade ‘doth rat ve 0 poet guy ofthe ost potatos sree sch manufictring proce ae ite pci dani le fr ESD protenton sf CMOS spat bale ‘Thoe ra sb he cml rete dag fan aut bat wate. ‘Thea a oe ‘ev re gee design ie hic get ees he kof age {0 an ong by at ESD pair re aw dein’ Bek oa ouput bir CMOS proc wit slo ale, eure Sod dein sen onpt trator wi eso Uae ale Sowa gue 07Figure 7 Tp not cand a np tar Se eel ds ae ‘+ The cn! lag fe tpt tears shoul be minim, ‘2 reat ofthe Bet steton rel the pe sir + Many large prelate we to ace god eaent mogenaty The with W of tw nos mat ane Thee ae ection onthe br opto of otc kee requed ane output cuenta. | The out af the tp may aot camps «mat, The ce to out rater soa be pal + BSD prorat I res My ingle i the ative sre fa tpt mir Sli mabe erent rong Tae alain of the output woe sou ot cs he gts of {he tpt tnmaror, Thi prevent apace oping, ih ‘ool dag ter prs of he neal cee ‘Gael te above ign rle oll outpat bles that met ‘tengo of tr Mle We ol fr ESD tng How ‘cern tap rotation cei the ein ftp peeton ‘Seuss dane co-peraion with epee Standard pt ‘sd onpat esta Ind tbe omy potion devo tener howe rots ad TC deeper ar aly olgl 924 Blectromigration "Th roe nce deny lt with seing ay oly Inve ® decineoal pct a dat prac, a peu ie ‘Set abo hI ell Th fw fn ring gh ‘Serena ith tit my cage cron may che cal St be ‘wamporta tngh te Inrseaectn layers Bec the at ‘aly mover atrl fm cain lata to another Iaton, ‘locks where mate de. Tis “leromigration fc” damages ‘Pig show tnrapof th dco ec ona teak Th the phtgrph we ae dng art to ‘ge er rn amare ‘eo sxoanive A spl uo thumb ster ha th an ‘rest nny pero nan euniie rck roghty Ih SC125°C Three depen oth hh of ec ent ‘Eas cet eed he iret ea te, An ee ane the enor of thee metal Iyer in 05pm CMOS ‘oc he metal: Gi, eal to mt 7Omum and tal roman "The bow simu caret ar average DC crn, AC crests sae peak covets are ach lye cremation eck, Hower ‘he ed pak te carpi "Asn cure thrgh cotton va are ied to wed (035m prow re about +O od Yale the ‘sae he about USmA/eotact st 125°C. The pea eet ft ‘outa ra ind tine he caepending marian cae ‘Corer dag ol bry inc th eromiaton reeset rte orc it Ti chara as the degen ty tcc the wits epecialyof sup ona dlc es 96to urate bus nc nly wit eect a sete pca: ign 98, Pha he i of aie eto 9.2.5 Hotcarrier degradation Std 346 seperti Th nein can eae gration of a ‘itr caret wallace, Theale bore deg 8.8 Design for signal integrity 9.3.1 Introduction ‘tegration milion fant on ne sgl Se: Thr ar eid Incomplete systems an a chip (SOC). Nor only the fntonay of ‘oar, bt ae prblene concaring lc sen, expo eect ‘itp dco ner aod EC wil inept on (Sip we Te ined naan of eee on hp Shag yo phe la we ‘room tain of nom, which ste domioting {eel penance ol sgl ep The eon Unto ae ‘hee patna and lly tenes oma gel inte a 2 sot hgh ie ‘lui syacrenss tg wiht nt a rm onthe ip isemtad by mena foe or ie ok tale.‘ clack ‘ef w mth ip op od gitar, wich norris dala ‘hm of te aces ud the ol wie ag the ek sg ‘may ered wera tr chee high sytem peromans th flock eqn len maxi. ‘Thi cobain (ge ce Dod and slaty gh lock oueny) te nef ny om Chip ining grolon. Thre re many fern ching strat ‘echo eg"The flowing sen dis yet nig poet most which ‘Seed the ck ga Single-phase clocking igre 28 Sop peck tana lg aga rom fue 99, wo nn cv that tba pele i by art nage ttt Tae o {rhe ip delay fom cock text ie te propaga the gad ‘nth stp ti fh taf Bp op ‘ie the acim rane of tht cock of pp 2 con ‘arth bat of ipo spacings sich dominant 9.1, mt beet ‘uted to Be ue that te rue rey (doc perio) wl be = many dogs, the (pipe ie andar ma) regis pl sara by wing vin cnet of fipfope apelin he ean ‘de drag ating cape 10), ipo re ety connecte 0 er pops. tn gare 10, ipo tg lek ten be ety nerd aa Ripa fai ac 2 ‘ty amo a rl = " Bock 3 [ ~ Pig 9:10 Bap sa ga VES ot {pecan very store Aa the cok ote hago ‘tonal tne of elt test pep age ck 2 eat ‘tic an ai crear in twp ced gto Terre ach (Gan) rgtr shuld be exefaly ce with rept fo the above ‘te ining station ery, aoa en by ig td ‘avers ol be nce th ea gts in the a an The ‘ore am cepa act btw ipo Geataiy thre ba varity fs pane ced pope ina Morr. A ary af he fips wet eo cock pes on o oth ‘re veto ide i fio by ss of ree” ge ‘loqean amples race wie angele Cocke pp.e igre 9.1: ample ingore iis, ANSough he ip op st dock hae tray ae oe ‘lok rst that pop Wh th ck outed robot {help ek, tga shape nay ihe sine we ate ha @ arg emp, the mater dk dg ih pet {2th oe dc. Large i nd lof the loc eee {he dy uc ht the B clock may say om teehee 6 ae ‘ited high ee TE he dy Ire han that o vee 1, rns Bop cms repent ate dt can ip tog a tk ge (ee. Ths Kd of ipo shold et be ad es proper dg ent (ted) cc ga wl alt ala ok me ae ‘rv Gata eae igual Amore ob wero hi psf wold Tenet wih bier lt el ger nteraly Lyman wo inverters ois way, eth eral oe sia would ave a are shape Dire vers of fp op wil be alae May ech with sown rts ner fe, power and ig. ene, the one nth Ce east amie ftasrs ha he Hho sl ‘egy Wh re he vie hte ip Pig 9.12 Bsa ip “hii op which die evo om [I] can lob ed a2 te uape pa ks tae lately lc ba Hao, ‘he clot may be grated Incl th th by a an ere “Tworpiae cocking ne way to din pnenonas site with pote lee Timing se te pase oe ip Bs Te nels pope ibe ccs prevent anparary ither within ip been {indo The norrngping tine tetwren the cds ie 913 ‘Abs lage clot sr howe a th cot of prtomance St igre 1 Tops dak em‘The momavelpping aw must ad tthe cpt nd hae fered the arc. Bec oc gant outed ‘trash te ehip. th ong rn te ehip wl eer ‘eps tale peeking gue 19 awn xaos twopave cock sen. Wh lebih th mer iening nd thle aig When ih, ‘ok eas (ck shew arg tha he yr. at era ‘i ig tig at Far a “Ao! margin an bv rately feces he no-eeolg tine In poe cel ste, the ck sig areal ne ‘Noy otek peraor sa Pigue 81 showe a sgl (a wpe dot gear cea ees {OD Tree eH 4 4, [\ a igure: (a) Trae ck pester) Clack nee Patil the ng of lovers 456 and 7 ed din (or ‘Songs the n-ne tine bees ah Canes of clock haw ramutally rac he cry of operation of VSI cen Thre tie two sits of ek sew dn length ack pat anor ‘Sten th sk ts ier gt fn cock pt ase dfn ta tance acd capuann of the ck teks Thiele dieet BC i fr he cle sgl Athoagh hse care oto in mrtal they ‘nl show tal hc eof nds of pec 10 we ‘err manson very bly ota od ptm, Cae mast be {aie bene st ip-top na ary sow cock shew senate ‘nly eer buted of poe to Ls. Con of otng ‘atmo tense here at to grate popes epeation of ‘concur VLSI digas Diet ln of the oc pave dees {other pte coum fo sw Fg 1 shows Sra lok ing tach ‘Alou sig fs od dy soul be uly my sb sexe ieee been iret lade" cn beet by = ‘et samt of Ins ad pope that ty het veo by 1 ier expe a of eh take Stppneepactanc Cy (eich represents ll eh at ip Bop connected to $y er an Wea Ql othe np of Fa, i might manny ple hough hip op a len ‘ns df) i dele to eran extent th pt toy Sach ‘Somaou cet bball th waltage arn We which be ‘ei sould worm pete ie fe © » ge 15: Due ck ving nc (pinch) Fa nl gps nthe dick tw aps i eto nortan hat te do ances te equal ote (bal vk re). Tie mst be er Sel tal partially in igh peormanc complex cats, Cart‘oa wae he ew ys, wheats the ga Syot cock timing Anpath hoe te ppencc {Sensation of the diet nal ck Aves oe he ae Nec ‘The tof diated ck deers abo pts the dock ers {hoe hr hy are sd Died elk dir ep th caret Joop thr heya do mt wh nanny bt debt ice eh ne nai ti Te ‘opieound boa VLSt digas ‘ny dag, clock tank approsch (ge 9.188) et ‘eet, with ony ne tl oc fe say aya digas the (Sal nian of the ck ented ciety ayn eve SO ofthe ta C dips tw lvina thom tha te clk yah ‘ila geste a lag par of the ttl py tons On the eat Th clock sw ow nly er te diy cre Ye ok sree However, dog nett lac tee ace Epes ig ry ds (cha mie ad mops ‘or ay nce ar cw hak ives dr ring thi the se, commana the rato the eip em pene very eal sed th hwoaghly vee sed sind. ‘rene Ge bls fave ler nord cack dla these Sys ‘tbe cmpenated fr Inte ck acta. The ean ihe tote ty wing compenating dl (hich ma be seated per lige estoy blo) basing» PLL pr leo memany Wo, hae ayecrcitoe and cc srw of hove binds cd etn 833 Partly in iw pore OMOS celts, ome lng bck (sme tines ve the camp hp ay fen acter cern pede tod of operation (aie or stan soto bya atl ok {mazy ome then, the a ck ede nett ole 1s perm eg cine te ok seal ged rd), Fire [shor aa xa De By © me * jan ar i Z tala nef igre 9.16 (Heap of elle a) he ‘traning ning ara Wee dy ten the lock ad od eg ta te da Akay bron the catgut oon pop aad the ep Dy of he test pop chi “ne” daa sae wl be ck iat thi fip-p 1 the ol lk ad cel cee Suc lock embed signs ae ab ifn sin the sign of emg Ply ming rbot co ocr when the data ay (cad ‘the ae and nteconecton dl) beter 0 sce aces (pope brn ua oo ge ta one lock er. ge 17 dwar! Whe the tal pepe tine th he Sop rm Gyo Dy exe the cack per he dat ty san ie ‘hor he ape pro ipo 2 habs erste 1 wl ee be Stipe the nat ok ped reting mn npeoper pont, ‘Ding stn to Eade ely Hh 9 a (CMOS VES dna par af th deg oway ° te oe oy 9 SBA a ea @. Frei | dyn Pel pip ema igre 17: a) ramp wich hed ie cack ped no) lr carapenig nig gre Slack borrowing and ime seating Wien datapath et ore han fil okey single ok ‘stm orien ala sok ey nao pe ck pn, ‘rete ow yl sting "Bac tering ee the ae wre ope peti ies ine ener ck tine) by he pois prin Import ete ca be wan withot te jurtment of cacy aot ‘ek ari tines. ‘Thi rth we of deste rary {aon lage me pos) Tn ting esto the ce nce 8 Ia partion als prone an tel the et pri, ‘Them nly be obi! ty ning te cc srl ne) Uso oe of thaw concept se ting pobien (la) higher ‘dn fre the degra natch tends ra earemat A ‘ll doco st of ch deg aca be ou 10, saynehronows ning (clack forwarding) Ina wurcrayncrnon inka, data lock gpl propagation ‘cpcn namie snd gece wee. Tie Wea ‘neds high pertnanee sioprosmer and SDRAM mtn (0122, bt ia «pein candidat for omc ip tie ihe conpenatie 93.3 Clock generation and syachronisation in diferent (clock) domains on a chip ‘Wi compan xing tn of milo of traitor the tt ‘or roses troupe nach omplax VLSI dia mene The ‘mas the we (1) of eri ge hes (res) and ati {Curette ste chip a yore ay ‘lock damn tes eb fom crs at re deg Tv lente ew fom he ened pat teria f the {asst aay fip-op th ck pas ofeach cores wo be eh ‘ed we aie de This utenti th gain ‘eae ad te yc oh tn at (On-chip multiple clock generation ‘rchip mip of he ck can be gener by phe loge (PLLs) igre 9.18 shows» tn pbc op coe =) fade igre 8 ae ort rape dd ep “The Vagrant Oilaor (CO) crenata enone (€00e) are an ee baly nelar whe eqaney dtr ‘me ty seater apn! alge Thi inay a lpeat fe pt The pase dete eve to dren in phase th pat td VCO sigs Anal it ne enc ft Dt gm ang the cr! vetge the VCO, wc te ote {he VEO fry bk to thn va a tht oe inp sg ‘hus the VCO rales co tn np, Basel ot ping PLLecan be lo generat atop eqn wii mal ‘heap erry, The apt equery mae times he apt tne Arce complex Tce eure may dif de mann, ‘Sie guns mat be urate np. Pigue 19 sow ‘eample c's mal meio bed va PLL aK = gu 919: Mahi vet, a on PLL tiara (many ile ec be pia, The ty mire sooty wae a sah (Cecirphane eyuhsonintion in mtpl core environment Bec of dfn th hack rile athe fips fd feet oe, ths del mist be cmp fo, tow proper ‘cummin endif orc Tee ae ere tre of Syachrnsing the cc ps he aca Sip ope ah ae "The nt tod lap shew control nth appa he dock seca uh cone omnis} exes atch sow ens sre tem mace tl othe wor en Sk shew ig ‘hin of invert" eg hs mere a be ple "here anal delay nthe spec coe lc pth “Th wood mtb wes tbe PLL cnc The PLL propery of COPEL cata te ep fn eile ‘oro ne we 3. “fa ped ga 0, Ck shes anni met it Node A sepsis the clk serial of he ae and nde repent ‘he db ail ofthe atl op in that er. The cock pase ‘tt fiop wil hon tl be np tron sg, wh ‘Sully he ps ai doh Ts thi wg, the ack teed be ‘igh edferent nalete) cas been rnp Mee. ‘the the tury cena gre 9.0 are ade programa {hesame PL-ean be ted a alle, ve wn tyr tet een ‘Stetina coe ly ie with i tances nd nly in COSI ayot decrpsn) Brat In thes, the ck {Geet be Gough lated wi dey Shai, wich ie ‘Sr tral ck dea pt elas the dock ie beaten oe ‘sed B fe 220) i he fink path ‘The PLL stb pod ‘nade he oe, svt wth be we of PLL ae + Baa a high neal pac PLL cn os alates ph pone | PL ae ical to at ae to. 1 Eipocly he trp tan etl og tine+ Magick compl atthe we of PLL fr lock get SEs Pets mt bem ie aide mee te ‘roca an be ae uy, systole the clok phat upon te den ‘ek thes In dfs cos, Dey Laced Lampe (DL) ea alo be tout se are 92. mt {rows =] fa} “The dy of he dy ca be card the tpt weg of {he tgatr tats cocpt the op signal ange oer on ‘mpl clock prod wipe to te pat I the delay a {ithe phe tr rode sgl whch into hdl "ea a thn inert. ‘The tpt al inchs DL has "Besa Genny athe np a hi concep Ue DLL ent be ‘elt mally the oy "cts he VCO or CCO ea PLL pean equ at depend ‘th pl vagy, ck Mer ea ocr when thr anoy me ‘Aso, th dy DLL ie suelo upon. Cente fhe (he jer thot ooe of met inpertan conte he ‘dnga ofa PLL and DLL fo the acronstion of the doc pases ‘aller neopterin PLL (OL). 9.3.4 Phenomena related to large current fluctuations Dilrnes between ICs an th padagig ae miishng with che ‘Mwat of hihperrmance VLSI pe Coupes (be ty Teri, ‘Sosckie or inkecie) gow with dttsng te ted cring "The rue in ues desce and ving capabilities fi sud edip divers (ogc and otpat ball) ean ve dara ‘cio the cip boa.‘ ncroaed are val cue ag ‘elage dap slog ete in tl a to ply a road oun ‘rng the tare ching of lp far ere Ai a Inductance of the npg ad round i hips ti Dxding The owing ness dace Ue aoe elas in mere deta ‘Sopply and ground bounce (upply ois) ‘we seers of 1, kt, the suber of tpt and {Ro cnt In os ba eed deal er cep ee [roceor bur wlth ve cre rm rt eh bt be ae watt tor ert 124 the pr tine. Coe th Toa erin tat ha be sans ange ocr Ine nr propertly Asa el of he ier atc of he wer np eta ar cipal ode sis) and the esd ‘rest new et (dt), te pacman ge bc ‘kay ropa bythe pou mtr, coat swing rg mags Towa 0 te sop om "The soe ete dopa because the oe ritance and sheet of he ag he beg ae ‘Cre wie mali are ied ope die ction ‘oa TC: Wien th doe propery the lates rosie sola eon he hi are | sagt araay'= wna eange nthe magus i (id 8 tt cron hag) cass an opposite sind dete kre (onfh This om] de ont 2)‘The sind Lo est dnd commen erseting he elton tee he al get es ee cue “ow te of here fie wo: On the ip pe ‘8 ag dpe sup od vn ith on sae 4g pat “Teestndctae my te id i a casa “Tirvlro taper pn it bien gfe (owt i s/en) snd wth he itt ing rat. Ad Seether ad nut (0 eas ene ofa pwd le aly) ender sng tags TAD {Sige hate ting aly preter 10 ect 5 pemnor of pont poe hrc ed ie Pedal sri aa ith poe sad goth tum, som PGke (aed Ar) bre aa dance ‘ao hpi, a BGA (Bal. Ara) Cpe pe ‘ey mal ier bl wh are ey nao ‘Std tment cing TA er p.chiptcginne let caging (btn cag no i) ine el tng wey or nde wl stn np, ip tdolog, ii epic stacey alr a Sct hove idan as (0.8 aly "Trica naa ip cpa, cond wi tte age sd ving cates ey hf a Cae ‘ret ups os dred lamps pe shod ane po sunset at mo cplinn Ha l/r lma/ar se jpn ne tonaing ions inca ono Singtel 9 I ay = 10-10, Ww ‘his ete whe dp i deer by the ur aden sth smitaeoiy 1 temporarily ee te ete sp Yl ge ecu inten sain dl wich ea wt ‘i epson When the ampli ofthis poy aoe grou nei ego (> 1), can tnt Hl Crogh hhe the Sint osha pm ‘une to dient pi dena ay ral ate, auc 2 hows an example Zeon oa mc NNT mage SULT cetnue, STS Ee igre 3.2: feof bmn an Ch in se ‘utd spt rand ae ‘A mrply ce growed bounce ako sit lf ine sgnl of he ered eee If the spade of chs gc gh enna SE may bse a hgh er by he rcving ip op enced to toh opty ral" with ow Boe a, in spel a a The iganl ground bounce pe perce mth tthe rvag {pty fap eels ofan Care ao very sual gon Bone fa ‘many appaton tae ape ae speed TT pt ick eae {hate volta tlow 08 Vs Fg "ed lage (2 so hier most be vg moe A'FTL igh el 2V a theiapet ony abs 15 bone the esto lage When ‘pound mano of 5 eco daring sping thal pt geIs nly1V soe the hea wag This a esi atonal ‘peatin af the isp seo nerd a ie, Which mo ‘Wap athe pret "The sore dictions tow the rama fet tat apply anor ‘zoned boa can eon the operation of italia: Howe {be tict o ambinel soled decals eee were a ‘ators afr pnw od oe (PL). many of te de ‘he te haeey eermiaer co a vig contd ee tee (VCO) The inns hing sr VCO depend ‘won esp alte, Whee prod elo spp se (ro, tn willbe tet sn age te apy age dy ‘Ps cange nt es. Tn ido aye or example, sch Italo eqns appt at lok ter el eprnsaton problems ont soe To ec he leaf ply ad ona aoe dil dai chip dong ‘curtance mut ad.‘ cme tr th cn One ‘Sen tomate pwr va mal ad bed pc inh my the slice a py oe ed here i the sur of onl pa pe ply aun J moder ASICS with upto 350 mee oe py, em of pi are ‘Sel ply ad road ono ‘sg mwars en al be appl to peat dv oatpat baie ‘rom iting imal. Ths en achieved Uy owing ot Pts mui at ey shor tae eras seal pment), nahi with 4 opts witha cnt of S09F ec) he pia “xan tio the it ste 6th op pl ny be no dr ‘C0 Tal Ue outpt ee th apt sg om at "ese atin he ei ans a te et ile ae te propagate though a sb ntronmneton to the Es utp pa ‘het (4h nm however, aso popu trou a ters thn wie of abot imma diene popatn day betwoc, ‘he ra andthe let il ih out 2 4 035 COS ‘sc igre 2 shows he sinalation le ou aoe deri Pig 2 alo ales the cate fs siamhancn vrei Sveductin in i/o o's ctor of 5, noon fhe are eee ‘itdban atu I this rap the deer then Sen wed Inti ICy angio. Howe, ean ao be tel hon ge Inver sed to eden a ih pd ‘Aoterdg oltio tpat rn which he te ix Ine (lags sw rte conta pat te) Ane ouput stage of re, hows in Figure, bw etna W/L ae foe tie pnd type MOS tas.aa rae oo © igre 2: a opt ea ont) vera) tt ‘lag sd (ups sre Assume a ip (lows ott (Ye) high el. When tbe apt. ‘etc the ghee the cent inthe MOS sitar aero Teele ed ad he gor U/l be That, the rt Alpe ft ern dtr by he pie iy Scie’ ‘pony Arson thre cre the nd capac (C) ‘art dag When thin eapcance ery igh the tat wil dts ao Aare the erent il ard ly to to (eal “Alo hie al ln capacitance wl ase «high A / Bec sigan cot pet the iferest ds pe meet in iftct ppt (he nly meio the maxi I) be ba toni te anion fa for Ue rene, the ioe aon se yollage sew ae contol output diver in leh the utp ie (EL ness cote vn an Sten elk py me he combed analogue/dtal VLSI det, the major prt ofthe ‘he son of gal sare and oly fiction et: Thee sage eaten rot thee to A/D and D/A convert fr cck sean lak necro cle noe a Pia) and gop refeese and menor (ic pert algae ‘Sei, Heine of hr talgae maar eine ery epuble o nole,wie te digital cut gest mst ot (ply ‘Std setatit) mae Ie steele to alate Ue algae ‘Seite tpl and ental om the itl oe Miaed VLSI pe may conan dig ease nell a meecon sad atague cout In my shemoi onyaewcee ae cie ‘he ame tne, Sch mma Ye care age chp do ‘eupliag capacitances. Tey tn enti to eng apy bones {tbr spp teckel 1 alow 2 rae ‘eampo a the ecwping emt he eatin that soe he ‘Sarge Thre, prea opis auch a meray ce 1a ‘get pant rt the analogue death te mot, ‘he ot corr of a1, ‘When ther mein ao som oh pasted asalog supply end oun rin the sabate bocce (gael ty the di {alee} ao Tol raed In halos wt hse Te sur, bast mix agua sgn cee when csi ya) een t= pa ‘Spal lat bic hs moro, fret ty nh “gta eats, The salou supply mst be donc em oth {he gtd (Vg) andthe tpt sept (Vay) Hover he ‘late cent te sme gon a ie pa Va) bt ‘pal drown fon the snput god (Vg) Fire 25 sesso gram wi conde! py an ‘pom pining Nor, tbe numberof ply nod ound pa SIC wil besa Whee the pags ne mea ioe! ‘ahi, they Molde ed as ground pay ores the peace {ihe goal with pet to ta te apy. Tha wl ace ie ‘Mtn nba CeFeu 2 Rnd spl nd rnd ining i mda fea 10 ‘Whatere IC to be dg the above fects har to be aie lectromagnetic compatibity (EMC) ‘The pobie of supply and wound bounce cased by large eueat hinge monly rte to ep et igh crest poke ‘Se tiem etn ic ‘rans (22). Decne bon ps pastage an Dar wring at aw tenn thy carer” cae a og pe (EP), id an deat fet pouring setae eet an pe Wem "We lng letra compatible (EMC) cai and ay tema, the poten ounce of EMP mathe reve Th ae ‘oly om of «fo pin fr tuply si pound compen high Pefrmance Cs oe sare of EMC poanm Ene he atin Spon yap hrm th otal ao le ‘sls in an eetrmagnetie nls pr that i wis a lane 8 whe "hep pi ae aly dda ne Un pags ‘The bat slit eo tbe th pera rund pms ell ‘Siew tan eet ae medi cele” Arey ewe, ‘etter voly large drives with ih caret capa ‘Nal ach output reine» lowladuanee cue rn ph onan the bs ct far ch one eg eon ot Peo Va Vy pe Thi oats i he mat sectemageie ‘Brcrances at PD eel and pte the spy ie at ship vl However hse ot very sien may des reo ‘epic btm oe couple o sup yeh Katona hie ber igen poy (inl!) ‘esd thi eur at rela ply al ground Boner aes ‘improve th slacromagntie Compa oth ip ad lh ‘se abt od eta operation Sm tnt oh in i) ly fat ‘Stemi uply an ground pn) have ay bon cal nh ‘revi ono ror th nutans oth ening wi [Ciao iapctan tht ae spy od rom pa re pied the mide cip wus At the pation, oth he ang fhe cag ed oto the nding wie afm "The we bard dacuplingeaacrs tat re pl ye ‘he chip rece yom bel fennel of bard a. ‘lane tbr wining. Sach neuing apr ae aged ering at st ug rn Rn ty ener ‘yt selindoezanc ofthe bonding wis paged wl ony ply ne aot be ed by pting seeping cpa ex 0 {OTC pectage, Bene TGs hee ote ang tee compen ‘gowns yd pd ‘nee aration Cyt be ith ber of oat ad the do oa teats fee! mately For example roc erie nee fr gh tt he ae retro Gt nd on 128 ae adn. Commquty the ll apa ‘Se ht het creo dha salon be icedopty. A lf the ihe sane of the power py 1 (rp hips ad the ceed arent iw te (a) olger poe he pat crete aly maple ye Pome ‘ipl ins without Sowing Ig wage bouton Ke. Da ing sch ern pats, tn esmary care cet Telly, when ‘anes we tak comple io sgl poomor, Aste that {hs promor bar 64 ott Each ont abo deve Sp at 2500 ol in, Figure 92 town the cei, Por 82%, Bal fp doing sth om 1 a sane a mar volge po to (Gouin Ce else Gata are Te 5m. va nthe xampl, te a that no cet sped the bod ‘pl Tn eliy, he ura emery spp by both the board ‘opt alte -ehip decoupling capac Toe neque denapng pes nem the ce A oman pated 20. a the aap Gh 29 sod the Coe m0 ‘Wiha te capactane of sont an? (i ck: Sasi oun capac res an oa tn com en “Sue fhe mee rd ton she tanned sans maxima capac alu of aoa 40 61] tbe ‘rocked (br te ipeatio of hi rcoplingcpainc, et {So} emptng pce feats hea coup ‘So of abet a Ta ec get he il lp Siete than 0m? Howe, empl (Grsih a yx tn (6 a tbe prvi xa) hv ip son of 1 a 8 nae isis ow fs pn ren the ig ye pe kc bmg ht cn tcnpting apse mat be ded oH te pa ‘Titty pets nt Kn of finn Sn pe or alan eeommnkato Cs th aii actor eto fea ee age So that ith the ae Cc prs) ce terwen 5 7K. Bowe, ie 1th pero grand tn soins be igh or AR. Bgl Ko Sag bk (wh an ty her forth rod 20%) req ‘dial Seouping coat oi he irl py tour {oie 10 ef the up tag Ths ition Som, ‘Spehane a be dita oe te ag Wien tin stn er. the pv fh lage io so ht ely ll with nary rs tht 0, ‘eet aa a Ye lace 2 coping Brae dane ‘Spas we ete sm, cet api esa tobe frst ony. ora fetal dig tye set ely {capara fi he tng a tei Ho oe adh thy do timer he bok se Adil es ely rq a ame Eien el more wept tana beeed 1 ling the epee The place of tae lc be deb (Ge pas an otto instar ga Sow ‘Nott el cat ay nord wim oouping The ace Ine poe een Ng tha hat of ase age pte (NAN NOR ez) bcs thy neato! ack str Age ot ‘iy sorties es atl ngs ter of ip dope tier ipo oz WT a taal ge ck ava nach ae ee ‘hry ny oe WC at tw doug enaance. Soar‘rc hrf eto verso of ip Bp cl ee whan ‘leoupling capac nse and on it arte elation fhe desopling el te are aeratins ‘athe ue cade eth let hk ty ie ad 8 [MOS pos, it's cvios tht the gate egtane ba the ight ‘apace vale Honea, BSD sed chlgy veo, at Spe ee ne ccir a Daw ar) ‘vay ood trative the clin gure 8274): » Fg 9) Te Sl i wd a dphg ol ed) In sect, timer to comme day ina op eo ‘er clef. dammy cle in memes) to soos whic me Vy fd groand ivy; ruch a eli cal «tical. Whom the power ‘Sip ot yt evict al ode ea gra ek” Whe {he power ply sitcom th move ap ow at el rnc rapactanen, they itching the OS tito The de then be hag to Yay, xing the nS to bench aswell Ts a(S ers lo he Ve at ond. Bae ‘tte pose eb the ring we sabia bth Tranter re on hate caps are cared na ena be od fr deci. Hover. the dei of his cl fo we a» dcop ‘crepe te spelen othe dpe lg 8270) ows "he equine ce. The ae epaitar Cy of te MOS tate arg ong te chanel ioe Rf the pMOS tani, wie (Gp ircanged though 1 ery importa Yo ep the RC tine of ti cl ow Whe her 2 pome upiy iy te nye (wich soe enh gle nck) mat teppei oly wry al ein of he per ‘ip dean Th mame tat bots RC pout (yaad Ra) ‘aut ber thas 20 ‘The el mat be Senge ty speciosa ‘neta inthe Wray. When plenty ela i ‘dng orc ha cl ean neagctoce woe a sont ej n Om CMOS urls ‘hn igi hu hc athe (ace) pe eae om the chip cam dramatiealy pease eee oat whe ge eaprtance ‘alucsar requ fo dosupting Tipster te ary ih trance > BOMB andj P> 0) or mie loge ital ic ‘As the ete xi this i ry sl in» MOS tain (or sey 21 Ton tee ia ssong eee on he ely of he ‘side Seni saponin rth rater petrman 9 and Vs) an rt velit (ae inperdetons, pinto, ew no hapte3A substan een 0 the at nee to plot Sercip decoupling eapactagos i geealy nol states ter ‘Snot of ial anh decopingepeitace i ed o what ‘realy eid.‘ ntl the epty areas lb si (hi not requ or galery ol ve econ, though erip eon apr coe el sey ng in eta hey ee st hp ping the ge ‘Thea any sample o€10rentating chip dep Tae ALPHA poco hp of DEC ental en stip ceoopling ‘socagerund 9.3.5 The influence of the interconnection (metalation find dielectrics) Ang dan ake sik wth och ne pratienof elo, ‘hn combed ith he ine ure ety (a ome) may eal ome perme, ety a ml inet deraction "Pe allovng utes decom the emai fet of wage op, cova and Hoe ay yagi ering he dg pase. 1 restance (and seated voltage drop) using it wdc, fit tg hk a rod nto race, ihn now recht lr of het TO, igre 929 Stage dp spy a om an dg up‘Seppo 10m deere 10m ra te mrt ond pe Iw allow sun vltage topo ony 2001 ag the eppiy no, tenth wit (F) of te spy ie can be need em av _ oa 10-10. roajo R= Spoor 7 aon rom thie cramp tan be conch tht loge wags dope acon {te saply ew ofan (Cam coma set the sp ofthe ‘Set canes ba to eons pera. Bee generating the Ino, the eral i apy ooo a be ge opel ateton ‘male size that bth average and pea tvs wil we nd oer ertbemae afr wl poesia Une etc wl be ‘rome tytn rat tne insromeco Tate rp ‘oper can Gem raitace sleton of thot to ADK. Copper ‘rpc to be ol in pcan ith tare sane eal oa bed cre Line capacitance (and related signal interference; ermal) Coma an elt whey oe sgl propagator thaigh Itoi ty mane a apace soup Ochi nin eee {sheer te peru dan, a tl be neg.‘ a ‘Bring prt the nck pro. Poe Sting hp pac) nose ‘opal este to aro (col) fm goat ‘Seal ess, Coal dpi ite os aye ese iSchool Teepe cme anger ad iin ate le ik with ‘ech ne pore gation te wets th gawl eh he ‘cre of gate the nestor gal ie The phneena sch ean rarer pean bce Inca porte (9. Beene hie te he rt ll JC, we wl tet ot ‘ete one (era generat yt ep coping bet {Respnltne Tcomn ec ager hp aes a ern let coe than eee of cent deter and fhe gh fina wis. This reve trannies Ho be {ag vaed with hemo rt a minimum tare ech cee (poerton The sd wal epee (nd hs the euping wee ‘ro slit isin Spring) incense aly eth roms (goentlons Morte nee of te mr of teouneton Ses mae the wns pele ch te cp Iijer CMOS poco Tha gue cary Jno the pce ing ‘be lteter within ne ra of kha 10 9er re ome een Pane 9.0: () Cpt ia sgl el metal pm CMOS wo ‘ated ) str maa 13pm CMOS po nye ae era igre 9313) onan very spl, bet repre md, "ace Cy roreat fh tial eapctance Decne hwo Ua see apace Cynara Uh tal ep of ae ME {Siroued The estos nthe lt upper pst the iar exprener igure 9.1() soe he nod ta cpanel dee school grain, car tat dery-vbvndsen wile tees roma probate preeton et pr a wcgy even, di syst owaf [Hil | Gail Te do fa «0.253 CMOS pros) of 25 + 16 (eta) = 41. [thawing cme ns cane osname, carat ‘cn wil na cage ofthe eb wegen radon fant relay Figure 2.2 shows an exe posta 9023 3 772 * asi i epee 25 aos oF sgn ae i) @ » Figure 9: a Simple gatas mol fn mel wi i he ae td ea a) eps te or 2d tal ‘Set ectctge ‘Thefatloringexanpleshows the aren of he coat praemena {ha 025 pon prone: Repreesatie valu ne capac ee gt te Cp UF sed Coat = ATF ak M2 itt hn a ng fo ck wn en ie a= a With omial supply age of 25 and © minut ogy oiag Sr RSV en a ep She Sin ow ‘hoarse aie vel won aint Bem gh 2. ecu hs umacpinbl,wnn coed that state bus ‘n(n roe pert Hae mer) a tconnly meyer ak. Ateton sold be ps to “stag ne prog rand ertte ane ey aol ith pec 0 ‘har ig wtih wil be cert by the igh he oneal) tn ao wth ep ola Tf stan, nt ie (age high sad, afer oe ns, es aightour a ce igh then the et he aya lage — igre 92: Dyan eu with amore Sting iat iaput «= lw Ty wil be land wliag of 4 may ex fr & ‘her tine sro Stel of snr Gringo up meee {= beh. Ts vgs wb eed api yep MOS tans ety the pe ora tl jin of the pS trator in may ome, al ine wl bel ting. Al, In thee cues wight erent geal ewe long tck ee tate a o Ree Figure 9.3: Mol fr ral main et pr iPig 08 shows mde the lato of te eo Hees fe 20mm lang econ ntl wi simaepaing 8 025 9 {GMOS pocan Tho ieee modell hy 20 stger schon {ro ros on caging capac Cand eo tack apc Cy. ‘The route of eat saan af he above oda whieh Ts ‘re Stone preset by one eteeapactor stag, shows Fg 834M cr rrr mg i is ‘The fresh com all sie ps with spade wie ade of ‘Sout ngs to O85. Tw alin any exam he tel lage Fels ad the ie ca nga Ce fet wis everyting ee ‘moc manent inh aa sgl ie lengths VES chips 0 10th aw xeon, erally ae dee ton te prope ea of he coche ang sg nce have alot in teat es at wee ends and tiv there very rset to cowl Lag do ‘tas daopsabmiron ole hrf et tol fo mage {ero patie Some ol a eal te hey ed ‘arses ty pot Thilo them to dette ie Hege ckaat bowt mach cro al Another ae hod 5 tat can root the elo, tr by ping he techs Sethe apr, by pacing the in erent ae, ordre he mae ‘al apace Bey! 0.25 are in, etal ee ‘Dike ad dete caste vexed t eae sending 0 ‘he STA remap see 9.2. "Tbe 92: SUA iene tna pcan ing shoo dewpmeat ep pace with thie onda, th cro tae ‘ila zn ostan, shown gue 935. The gt shows {here at rewire inte. Te Ippaatrof eor example eee oi to Tt Fs a te Tale A iine dey (HC dey) res In ths poms teeing of data Hows abd ok a ‘en implemented inh poles eget a rete Tie 00/0" Wiewver the tne ere gy hrc lead to rue ge dae (om sneesnd) aod drama etn ‘the pone the alntoning he hp ‘Carat pooner seve etal ee (AL, Ga wich be sstases of 3010 70n/, depending on he ae hho thee rove the FIC dey i ot a protien fr mw of te smal, be ‘hie ty ae rst one aragy tance a ergy ad (Gini of nga to which hy we oomectad).Howowe, Cae ar ‘Seal ln ch clo i, san cote ed data ues which ‘Berle the ip to poe ll contl or cman [Ahead ch ws gt ay exces oe ay of lie ‘en nin ome of deck Sea Paco dh cas fe sia Bi ae completely embed ent wo he ft that tr boas rs ith ah te, iting to coal m diced i the peur subtotals Sesh sl rai iy, ge a) os tnodeln 013m tconogy with sinc ie wie sina ‘poring betes the vin ies te grr pee Sow J | . o eg 936 (etd el ti ne) nt case 1 tin vic en 6 igh wil pre {he mig tu mc Fe 98 by epntaCy et ‘opstiiy The rend cin sgl oped cnet Fi 30, aoe eck vic ow igh wie en nih om Nov the Titi how bot te mine ‘ 2k th ttn nyc tottus ‘ort thao ering beech goal ns, he ata feiss usec pr han ints pcs Cant igs Soe pense igo ast a {he popes Sy camped foe eis pce ce en wt igh Saanich tn ane on, ten en a cuter botany hl propa ‘5 Lota ea in ania eer with rope oe previns Te ns a snl ropa bern tmnt compote sling anton cs (ne hing) bof Sag, ‘Soden na digs Mees a sre {iing oben an tthe igs reponaiy ode crate ‘ro tensa popu th nel sign ron and Teutalie pia Poor natn far al popanon ‘Sina pened gtr ‘With we fer ee inert cpr) tn suc of ke soy tog cathe pe ‘nrommnce Ry expect to rove nsdn ote TRE ‘cin stwn ge nu abt eal BEveiRE ema oie ing lal analy Sica the cl the dng ele The deer te ble 0 Sik wie te correqnting RE Sn ‘Dost is incogineconec pope ety, devg syn tape tbe aged duel ieFigure 957: RC dey alg of ntecsoice lane acordig t2 ‘BETTRS dna ‘Transistor matching inuence on digital rete 4 au fa Fig 9:38 Spe ei tae de rant mt os, oth ny, ee aed nou opel tow gual eve aa ‘lem, ch aed Parts i aalogurree ( eory e ‘Se an analog cei) where tare re meq obey igh eet of mat th sre In do doping sai {Se chal fhe MOS rato wan inmocurse ens tou eat bebo Fr sasnnan tenor sie (es), ti er Iaeress erry new IC poss get, sch that ath the salleg tthe ppl ad the pein alge af aaoge CMOS ‘tego rt ements thin! he igial CMOS ce Ala ‘ee dig age) CMOS cay mang ef triers beeing ‘ipa ring in ies propagation dela of ea Sige et igre 9.38 shows tw Seta! eer hs (og Ins lok rss deo pe ny they so int er ier ‘the signa tS stp node Te esa. ecagy ‘hse dicate ede even uly, Seng {he doth he fg an Pacey fr ighapot cal ‘ich ining ete Bo, rari tig we Hs dein ‘este inportans fo mune degy sobs oa ey phew 93.6 Design organisation A very inportast efor nrg he aay of he dts or lt chang (be inthe a din tag oe ang rel) {Se Shige epunitnn Thee we tee suena a the dae ih rect dag ange ~ ontingemehing ‘Ths rene een ol fr en changes foo ane yeas Gamat VSchip ohn eae bode wtp ‘sh miroprom oe. ‘Thi requested ad wll doe “esto thy pect of et eines tine et ata rest of lacomplte docuctation af te eign, Wat rely lend + Goo an comple speciation + Compe te) sat etre “+ Min signal 1 the tt gine mu derstand he compte re.eo, the rt ston fo tbe set-up «Racin ap rows which oo a ‘ Dincoryhircy = design Hcy (sy t a your way ‘heh + Good veioa mangement: what object (ni nd ot.) Ieried fo which see (VHDI.dsrgtion), ahd ich on Ue ne of ke BI is pet, te a oa ‘od dlabave manages yan cas note eet, wih particle bl fr eum digo (ate (fei th eof gece not artes sa (05 nord ae) tomate dng ore oe + Modan const perfor ty cg nyo cr mire ‘rear ewe i). + Do not me opy/otfe to cet a new cic (0 ha it ‘hot these th ol ose em ha heigl ‘Sud toy thm dvd ey ogee hn) + Ue fo coniton as posi, Kop than simple: (ab) oe (> wad a and (nt (8) Hed do et he to dr hn) a) Wie) as Complex conto nk he ode rd edna ad th it to modify without todscing wb cts. of on ‘empl cndtns to daeribe ineplr ros oe ow al Inhih the vas (nner) we hay deb i hich ar re rela "srt nd adalat rans the cance free ss Geta 9.4 Conclusions Daring the tt eens, the eed of the poducin proce (he {tteromectin aed drier) ha bec ena ft a {ho pean esbity and Ingty of CMOS TCs Tasca ter Goon see tht nat be hem ding the sgn op ‘hee prt at wala el Tel) eee, a [rca inthe SIA voniep old abo atrbute to meri he ‘mines of he nteeanetoes Chap 11 fms slg trend ad in oat aad ea ity pc, 'Srbus igh oot eal ois the pty teeta a pigs operon ofthe chi abo Sate ep of wey ll (apne datate‘Thi allows co cor and pl dg ‘tons when ecg dire vr th eh ae te 9.5 References (Barton a, [ESSCIRC power workshop 197, Soutamtoe atc in CMOS [2 DB. Bae, RW. Dain, "Media Lat ig CMOS 1G and Syste’ Procenigs ofthe I Don Astomaton Coney, Sve spp 34-354 Esp (3 WD. Gran, ‘letra char arto, Jon Wy Sou 198, EMC (Sper Goaitons. ‘etree Compas’, (5). Bada, Cie nterconnestons, and Paging x VLST, ‘Adduce Wey, 1980[6 PA Cameron ad M.A, Houde, “BG Boat Ty ed Pada Di Desoling FF 9. Bei, “Ao Mls i Qua ieue CMOS RISC Mrproemer ‘igen Soi State Cee Coen, 105, p82. [SCH With ot “A 0 at 8/390 Miopeocser, Dips neat Sot Stat Cet Contre, 105, 108 ‘come Fey eee eer Goring a Tag [Ker Bens l"HighSpeod CMOS Desi Sih’ [Stef ar, "Giese Cle for IntepatelSpt ‘Wort an teal Sten, ropes Sb Site Cet freer, Spt, 1502 (9 A. Cot and REL Ni, “DDR-SDRAM highepeod, nee syshooms eras’, EDN, Septmber 1090 “mr Match 1) Maaco Vere Embed Andy Techn TEDM sor course on "Stor Omar Chip Tele, December 5, 9.6 Exercises ‘Eplin why the iter chip nicup seit wil decree ‘uy are pos een. Wat ae the maces of spy aie ine VLSI chip? Esplin wy the power opp oe 1 hg deer cut ‘lok iter or ouput de) shoal Be wir an he out lea tk ‘Wy would sigh pase ck stedbton tec be peered ‘Shor pase cei sete Wit i geal the at ple wo poo the ck dr ad vt phn i he hen of nig pe Mention srr reson er nensig ‘What the impact fan inane ton inal nes hin yh od aan mag tnChapter 10 Testing, debugging, yield and packaging 10.1 Introduction Ahough hi alos the al chapter inh aki doo ts {Bat the top dno br ae pert ha hee the pr ou chap "Toting, dugg, yl and paging hw a suai infec cathe whitest fa chip. Raley sor sens of se Aopen thi cape he aged ceils al vin nage asia che soins. tb sed probleme etc at he st teeing pose Howe soe cal show up dig the aa oto en mr ty ot be etl bbe Up ede on "hori of advan Sr ane to peated Shin ptr mwa al a aly flare dren ed at etc. ‘Son of he faire mechani ding relco Sagi 9 pera “The esiring and eaton of rt on ao consider to be scor s hppen to bes angh ob. Programme porn, fer eam, muy be ed nated amber of iene ‘epee ft lat ingosblet gure on “icine ht sgh tke a omer ine belie te case of fae ced ad ven, Thi eect complex 10 tn w ose iin of {Esa aod op foveal nies of 0p, he ty ‘Soper el an era fe nae mer fea ‘is (70) Nomen, cae ft cee! mo of err fom (eta lyr pial probing gs mst bce ‘elm dura te egoetng poe ef con Finally this hp cndel ypetn of re anal sods tit spt he dt fran he ga, 10.2 Testing “Teng ae to ig he gp eee coe een and {he yo he Sie in xcbieaon wi he mancarng po ‘oe Ting th np a eee the guy oan 1. Th i ‘deco! ty tattle be anced hy th comply of he {et Homer pe ot ay aw lb ea ho ‘more cntn rer (rp) The sl ag and ome Ce “Uni, post, ohn a er (cyst, ae per rly ont wa, we he lon ae pra ht progr {dx Tew bon abt of ely inten th pret ade ad ‘tc te ey rting the topo hep Pre tt ‘hms photograph ofan TC ue sein pola on ora ‘Sedu an their. A probe tak eng ee eal recent ort I and ears eal oper pao ‘Eps rponme, The sil annie at rg fren of ‘oetbleas wl wut depen This poeta ebedt ‘rage with pc toe spl ak ol ae abe ‘Son sca ha 00 “he a sora weer, aways rid to the fk moda ‘wel area, bing cop, ito ony oes), ey 5 pth diy), Radusdory eas eater om ec at ‘Sines ancl ak tee eer herng at sil to)ty dileetprocen-ct mci, a ely De dst by ‘Serering re tent eel dere gute ight ‘han the nage cr ie exp, common gale ede defor may sonal caent ‘al inte oda ream wo sever ilesner de Ping he sino the dat 0 ha oh raise ESA ido gg et aly nd ising the meaturemnt of Ui state caret th chips {obepatn the stay.stte ode Te aty CMOS IC thie fa be acid by jn oviting of eck. we the ip ‘lon a oe pt ins mec I tnt ede ee eng ‘tebe dk. i them eta a detected by the el fhe ‘opty cet rng teeny sate Thi allo fn to Ing fag tt pltre grain I onl dol ope hel Grint par ofthe chip ta mode (cnet). ‘ocr anal not beeper, oi the et mee ‘ro iT cuts, Bc he arent nt to te ang {he meme, Za ting Fle hw pros ‘spill n sic tht enn nati CMOS ei ch ‘S'Puis A[b, B/A snd cer nage cet, nt nce ia. tstae bes dynamic and frndsMOS creased ‘inal tein ding tbe eight a he tal ci ay ACh Jy lel the hip shold be oered et depend ‘ch many thing. The wnt of als soo pera pare, ‘hie th let oc tnd vag he nMOS nd pMOS leans sn demain eter the ite a eel ‘eect wal the hsb lag rea ey roe frortn to matin ace he peal ea ow ener {on o 10 As shown i he pei dap tbe acho rot ns ator cess by abut to eo ate ‘eek! tage retton of 1. the are, ag testaity wil eset only be pole the kag treat ‘mats retin wor ifthechipean te putin alow nag ode hing ls toting Cog, dono th thr ag by ‘Slog «bse ogy dri Ta et) Te cali st ‘rae ea i deme dt Mee + Save he pnt sparsely tab fete! Bos Te a el a ten ti a ee ‘SM sob SEN, DRAM, Say ROM snd nr ol ira ad separate ess “+ Add let let salable pars of et ‘The soften wl dramatic Inne a rsa he Ince in the pel af the eats the retin fete (tmaler sie arg) aed the nae inthe ue of Bond Puc Thom of se il res a ono 1 aioe USF in bow tan dade Bun Sa Tet (HST) voce ‘cecum ol srl embed nen. ye [sth ong of al and ale 1+ improve tay by peat atin thar ney tang the ra cometon fal te rege “tn sing fig nea loge een Though ach ‘ashi te at snd in seal to ch af pat Uitoteac ge lock. Tha, tht lagi nek eas be pa st he to the out pope einen Nes, he chip ein Dut lth can sind a th orcs by edo tog the ser sam chain sw a pte © Oval ace ‘ora boinc ipo f ats ge Bock fc Avanes in 1 and pling compe Tendo mich deel Integiod moder tne eral mae asomeity i aed ‘Al tn el fr fe on oman ee exit ne at ‘pres tay Tn 00, beaoagh nea et ets Ter mde with he tana ot seat Bday Sean “Tt (UST IEE 1081, JTAG) rth. BST rcs the real {et ote an api ard and sym vl og Alou BST trea hip acl board ats (ail rd ita to degen coats) th coe Oe eatage mention in thi ection BST ls supports tee Prunny an ied servsnbtyWite BST. ser. ‘eso ale dariag te sly 1s al abet IC‘boards a the open cei, ot ts an ct fl, ca be dace Inthe BST aproeh = boundary cl, ‘cote spp, pnitne etme every in ce ‘Somecin Each el i cnc to i to goa oe ge 102 Inn BST et mths als rm en este, ‘re ble to ws ent ean ou st a Indgeentyo thcones sha w hin can dve and mon (eet pin conection fea hip pen A at lok td [DST roppr thetic ote: ntecnnetion te eee BST ‘hip 1 oe tte ed ction ening sing aos Get pe ‘Deca fhe BST standard Ce Go disentveadon supp: ‘ng BST can be phan! ou the ane Board ins ye 1 lie ‘orl tn teal, BST vps the conventional ‘be of ‘ie tottenham peel, all ‘pnts ona board ae sapped with BST. Howe ve if ‘se cmponets dot ve HST, tare re i tana be ‘te TERE Ti manne fw ruts to upper level eercnteton ting. bat open fe pate strc ary compan ake ums a ch priate sections oor IC production tenting, bom debug elton td eppbo tho buen Matter tated inrovenet ae mato compatrtting of 1G rere loo en ‘Bewiriment a svi en ining err i magi bee ter wont nose sspecte "Those msec al ste neta cng of lie TC ps an leben of Mechs! probig, na ting and ecropticmampling a sonmen toca St cp wand morons. "Then ok ‘Shs dct in cin 0 10.3 Yield ‘Tecan dante of wale in dea 1 puto mot 8 (2 dint. Thon of 4 1 dtr the umber of pr mar Mat 1 no eage betes 25s od 20) an thr mer er nar thee rang om Sow hi oa ew ows. The ‘Som pc of an TC determined by tu ber of Pel {Go Dis pr War (COW). ‘Thi ert nl dependent 0 ‘Ge mabe af de pos yale but loon yd le proce ed. (Quits fds cnn ae do at tc th speci epee ‘rng toring. Annona mumbo oe dring Pag The i olceved daring afr pobing pens on the ayo he ‘St The peoduction of emir Cs pla ry high dead nthe try balling, he poduton erent ted he Cm Disurtnrs nthe prodton saint mayb tbat he ‘owe paraitrs = Temperatare Ptatons in pears my one the poe {to geo th uk on the mle to end he oie ak + Mi High tity ren nape bond ewe the poe tern ne ad nar Tem et deci rng {herbs ong se lain). + Mirae Vienna ocr daring potlthgraphi tp san a nara pater nag oho aad et pn est cet.+ Light The pottihophie pros esse 0 OV lig [pit Ser ar threo poet nate ring pot sepbcsiom The paige nme en aed ‘Ena potaltiogobic iy. Thc eal ad open a Po 10 pre ak hl othe det A ‘the plano ing a SMP (Standard Mane unin. When the SMP evi egrated {he fc ican bae caw BOL. he hough of ears ih ip hn ih on SNF at, a tices Very high cinge nection ny cam x we mit rics ‘am, SU pode lying theca of aes The sone pret cmpey fb paca ah Meebo (00) met th rot inl Dy the eet Sent a ia sage Pca (AUF), fatty be and cstering tes, Te ‘ions reper wale Ist defition, tpper agent mare ae rr (fae) sg snd poco wine Deg foe ranfctrabiy wil bane pw ‘ie iar othe i. Eocene wary pla te deve!hts re bert of str fechas, which ny be sed ler by pial proce ecto by ta nsec pce nt so ily ce det gt fo ita? xing wee, Party Up tht vas whey eae Deon ome be potently ea. Thse mss ae ‘Std jt ee pan es “The actor, whith are independent, ds ot pede the ws sie war arco th war eg. we ad (re 14) nde! ty te ttl asso by cole my wt te coco os clr egy ae (ih wih of Sea itr) ‘Sea btn a se Crt ars (° anand rg) get Sonain's tal, Bt only eh." tal sberlin ‘nba ald Foetal Good Di er Wr (PCW, ono igi 104: ni ear ae PD ‘The diet deny Dein eatin (10:1) eset the dey of fet etning lly date lan Then ar overland ‘aedamiy desta oe the wee. Exper nde ds patie ‘ia may fit ach roe ep ‘The muna of Funcom Good Dis pet Whe (FCDW) ix rapw = Papw-y (003) Patel in th aly pa of procs deo, Mw rae nly ow ey wil be ety hgh Figure 105 shoe a expe ‘they arr oon (101 a unto the i ae ‘Asoc 2.2501 MOS poco Ca | hows hr atin ‘erngan ey deepen sng ar proc, wien = and ‘y= tectsen?) "Can 2 nytt the ition afer yea (01 = 085 ad Dy = 05 dest) er mee sare pono, (ppv fr Y= 7 and Dy = 028d (ae) gue 105: Val urea int tg of proce ly othe pape of lcm, Pron Cnt Moda (PCM) ae {tela on war. Unt, nar onan aot a PCM ron ‘iy aad oe aay sea A PCM oe ota tess eon sin (WL) the dota raterstion of parte ‘dks Sand . PCMe so unalone nly ee trocar {at alte the mare of pole shrt cot eam tween tm lagers Often ore Shan handed parte ea be ‘aro 4 PCR, Dari te intoaton os ew proce the PCM wafer ae‘se racdomly en wes in bate 25 50 fre mare ‘Tenacity dk 0 cote the "ily when the oct i at aag he Gal se dns, wi te feo suture ela ets a ek the nner pcg ni The Sol tat embintion ‘rhe pete (wer et) i it the arate tae 104 Packaging 104.1 Introduction ‘Theda cach wafer atest on best, wha nape stat i pula to ae tha a janet waliage (= 8) above the fo, auch 2 tester might ith ne ko seton 92 Hecate ofthe pave tick tn cha teat Ieper ach dh een ayes oral als This fet led cep aad cu nly be inate wen Xi power sup isi ow state dae allow the thse to eich on cheer somal the ciel mre reps phe ping lv a ‘Sete a wl dtr the tad altagy ft MOS p08 matin pet ae ol ath ke Se ‘ie co sr ret, 10.6 Problems caused by marginal design Cezeny,veieaton software lated ius sea to ma tare od tt re pr ery Si ow, Espa Ue wrieatin (Reger Tar Le! (TL) aa ee gt eel fe he tunedin psn which age re acc Tee Tinea toremse tht verythig on te sip comer co rely acording fo Un Spccaton. It thle portato tery the spect, ete by tui ry uation Se ‘Gey ea tpn the ip dow ao per the feeb ma tie onset nny ese ner appeed a the spect netic ei ‘A hardvafue nvr pe (orate) chips ca ome time oly be etc daring ery dened splice tst. The Ser ef ditent appt (nd hor prograsp Se nite and extremly bard to inane wha sacle ‘Caz mast ASIC redesign in wate procs vis a mature ign ow ora at etic rc. Fi eight ASICs ‘Schreiner rater inner: Howe, der ‘wc (035gen CMOS and ie) oer mal tare Sie ad ‘Sethe aie to net alle fram on on ge chip ‘Thi, coed withthe endo nen paren halen the igner ith any potential het poems that ete or ‘apron dene wy the es Chaps 9 ero he nding ‘al flectandon te mrs hts exec de oriass {ST elabiy u gal intgty inty igh 10.7 First-siicon debug and failure analysis. 10.7. Introduction ‘Curzat VLSI hip may conti iin of nse but al See ‘mde 70 piu Thin th ale lgelck e iet ‘eed "Witt let acs oth opt pis, Ue oer ok mst be cited though ean nin and etl a ch ey ca, hse ‘Saree on a tome pnd Ths might ad Go ple fa so ‘ply wit esse wed nh sl apa cae le ‘Shea thes rnning fl pe eal igs ror ar ey 10 oat, bath ea ato {ut etna Yt, However, ning eos eeu moe peo Sea ‘Wc flues sow up dig he ealaing pase of an 1, i ‘x mporaat to know ther wr: beter ea shore ce, Ine tee gq ting oso quay dtc ge rents otng ned te ‘anlar tacasqer can be appl to nae he al: plore, liu erst ig waka a eeton beam (Ena. Te ee (goa ep oly fw apn 10.72 Lyy testing Wien ayteronos chip as eon completly dso nate CMOS, Sly any cet shoal ow mi the ck wh of. Tels ‘vn tht fo tsb rls ter sl sings cent However, we cu, oa higher amps crete cn fom The ‘hn of ab caret ict in srt 102 "With Tn esting ll caret tt ech wai el a bo cai sae qui detected figq urement are doe afr the hip at {ee bowl to een sate Walco oy et vos (ny be Siem“ AMSAL= tot wet) can gv 2 gud oweal emerge A overage f 99% with nl ton at tre ca eine be srw Bocuse ci spot tg a squat tl yetode leroy, re caret pak nec with gion teter cent ter, Un pol lage mann ae to be dee ‘pd od pt on thea bed espa pe ag cet tng "a tg thre on ma of ating era dees 0 ‘Slt with ca man cen dg ae 10.78 Diagaosis vie Shmoo plots Men opi ety ted sd seen et ae ‘Sh pl ac pring eat ee heer, ‘Tate peste Win Sacto seu tena rep tease tbe choke ire ee "fie 138 shows «Sho pl of Vy ve ge aia 11000 +2000 hoe ut spec filed Pie 102%: Bea Vays ny Sh plat ‘A Stoo pot, whidh shows the operating sen of hip i eh,» gay te os wt te ip ri hep grey tain ge 102 aan a wich the hip operon ocr It wry per thatthe hip dene nt ft at Ue inn of he pl at ok «eo "When the evr ha pwn 40 be the, wih all opting nes ft ehip eal iret Sho te mt ‘ered to fd dependences nappy wags, gene, ‘le nperatare nd 0 fle ely pat tote ioe ae 0 ong eqn vest sappy wltag Shino Pot lower femaey fete pean and gee vas ae eta Conca te eters wea ply wage Shoo plat at ‘Stn vlage em teperature Soa plot: higher altge freee an gr topes > ower ate Concusie sn suglyvlage wear peratreSeso pat t aed eq «tna of og snot a ad i) the se spy dependent atten made stale be ila Wy other toch (euch ping), Ths soa by te lloreg eamEXAMPLE: ‘Rectal gl procemr cosine to paid Ys supply oma ‘Wg, Pig 10.1 sows oe Shoo plot te operating cof ho mary on ha hip t spect wlll Yay Plt 10.2: Rope ory rie Sh io Although thse ppl, Va, Vy shoul be extemal connote top, the operating marin oly ery inde hs sll ‘ng the prom, the tip would o> eng fton. A et, the input ogists of he camry wre rapes, Bec ibe @ ned ‘ks re grove byw do bl wich apo y Vag, and Inte ne 1025) te lepton sopled y Viy thae Ieee coud beth ci of he poi no 8 [abe + ot L L 2 2, | ae oe 3 ’ e105: Ca i il cn he pion ih i Ivete 1and ws vithing pit ea boat Va, brane {he pOS trator with hein the BOS wih (0 =). (Coke ¢ an § are mpnd via power pny’ Vag” When 8 gh ‘Was Sewage onto Awl ot be bigs ts: Van = Ve ‘ecu tbe brk asl, Fr, wile ltl high Thee, Fa Va te in iia ach eT Te Ma 35 t 30 25 2» Eee TERT tie 2025. ~—~«30 8S + minimum dock lage Vi) 4S igure 1026 Cet inn fhe aperig a fhe ch of e028 ‘Bw the slid ie th cet pate cnc: above the i, nest we cmp this with tbe Sho pa gue 10.2, wee Say ttm te tox wae i he Bp op one, ne Sangh op diet omg fh Bp aps me poe to eek the nga "Ths pope bapened “hire ced th lowing saben om loon. 10:74 Diagnosis via pleoprobing Pcopebing tbl that los uo probe ay node that ai {Sioa the ope metal ta ells pain lee (ech‘Ths poting het the xe cat ofthe are a abo way {Give the poem. 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