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04201152556


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: 01.04.07 -


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..

- 2010

1 -

1.1 -

1.2
- -

14

1.3 -

25

1.4

27

1.5 1

32

2 - -

33

2.1
- -

33

2.2

37

2.3

44

2.4

51

2.5
,

52

2.6 - -

54

2.7 2

59

3 -
- -

60

3.1
- -

60

3.2 -

64

3.3

69

3.4

72

3.5 3

75
2

4 -
-

76

4.1 CSGIO/Pt
60%

76

4.1.1

76

4.1.2 - -

80

4.2

83

4.3 CSG10/Pt
20%

87

4.3.1

87

4.3.2 - -

91

4.4 4

94

95

97

106

108


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17

1. . RU2-
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forces

[27,28].

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18

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[29,30]
F(2) = Uv-Vcf^l
2

(1.6)
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V - , Vc -
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6C(z)/dz. C(z)
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[31], (. [55-56]
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C(z) .

[29],
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19

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= 20 [gapex (z) + gcone (z) + gcant (z)]

gcan,XZ)

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i? 2 (l-sin#)
z(z + R(1- sin 0))

(1.9)

(
H

R(cos26lsme)
1
In
'In2 (tan 9/2) yz + R(l-sm0) -1 + ^
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(1.12)

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+ gconc(z) + gcanl(Z)\

[28,33].

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[36,39]. , [36-39]
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22

N = NC+NS,
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Nc Ns

Lt -

, -

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(1.15)

G,=\l\r-r\,

GP

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F(rt) = 4^flrlGC*.l) + 4^i;(2^ l )G(r Jk ,r l ,Z l )

(1.16)


Gir^L,)^

(1.17)

\G{rk,z)dz
z,-L,

GP ,
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,,,,1,. [36]
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,
X2 =tlnrk)-V0f

(1.18)

V0 - , a NT -
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( )
z ( c , z/',
z.
23

[36] qnlt
1 ) z ( c

ztL R

Nc = 3, Ns = 8.


[36]
1

G(p, z;z,) = G, (, z;z,) + jg(; z, )J0 (kp) cxp(-kz)dk

(1-19)

<\ 0

(^,,) = exp(-fay1-eXP(-2M-C'(1 +e ^ - 2
(1.20)
FV
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J
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z/R = {0.1-1}

L/R = {10-1000}.

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[36] Z, C H z,1
24

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ReJf=\AF/A(l/z)\/7re0V2

(1.21)
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( = .1 * 0.25 /),

F(z)

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Fmacro = const . [38]
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F%ar = l7tRu{z)

u{z)-

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u(z) [68]
00 =

!L.]iMzi.iMzl r f f l , = __A_
2 2

\6n z

Je,(iu)) + 1 s2(ito) + l
33

Ylnz

(2.3)
K

12(/)- (
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l + tg e
30,
z + -sinO)

^^*

R-z
z2.

(2:5):

; FYdiV=-dUvdw /dz.

F v ^(z)

(2.1 ); [22]
tg2e
:,
' R +
6 /; z + .K(l-sin0)

-sine)
z(z + (r-sin0)>

(2.6)

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(2.6) (2.11) 2 /5'->, (2.6)


:>

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vdW

AR2{\-sm9){Rsme-zsin9-R-z)
6z2

+-

Htg9(z smO+RsmG+Rcos29)
6cos0(z+i?(l-sin0))2

(2.7)

, z R (2.7) (2.6) (2.1).


(2.6) (2.7)
.
(2.5), () = -+/7,
(2.6),

() = -6/6.

.

,

, ns (. 2.1)

2.1.
, z - , -
, -
dp-
2nns dp _ 2nC6ns
2\3
(-+ )

,00 = - 6 J-

(2.8)

35

(2.8),
, 2,
ns.
ns -> n2dz' (z') z <> :
u2{z) = n2 Ji/,(z')fe' = : 62 = *
15
z"
z~

(2.9)

,
.
-
(. 2.2)

z' :

. 2.2.
. z'
( 2.10), dz'-
. R, , , z, z1? p){z')

36

U^{z) = C2n2)^^dz'
Z

(2.10)

C3n2 ]'^p-dz'

"

z, = z + i?(l-sin#), R- ,
-

(2.10) :

(. 2.2).
2

7rpsc (z')dz'

z' .
, ,
0 = c o s 0 + (z'- z, )tg9f.

(2.10):

FvdW(z) = -dUvdW Idz.

p (z') = R ~(R + z-z')

z
(2.10), -,

726

Fvdw(z) =

R ,
tg\9)
2
z
z + i?(l-sin^)

R(\-sxn6)
1
z(z +R(l-sin 0))\

'

)
}

(2.11) -+ , (2.6).
, (2.6), ,
. , (2.7)
(2.6)
.

2.2
,
() ,
V .
,
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2

(2.12)

/ = 2

37

(2.12)
(
z )
(2.13)

Fz= \27ra\n-ez)dS
s

, -
,

z.

ez-

() ,
,
()

= <. ,

E = -V^

{,,),
(2.14)

(,,) = 0
.

,
,
, d.

V ,
,
= V = 0. ,

Dn=sEn,

. s = 1 = .

, , (2.13),
-,
38

(2.15)

C(z) = -jcr(A)dS
" s

(2.15) Q(z)
z, .
(2.15), F,
F=L?V2

(2.16)

2 dz
, (2.16)
- W =

CV2


, ,

, F, =

.
dz

, , F,
,

V.

,
, F. [69].

(2.15), (2.16),

Q z.
. 2.3

Q(z)n

F,.
.2.3

zQ

, d.

[21]

-, (0,0,z0)
^

(2.17)

= -AnqS{x)d{y)S{z~zu)

39

- (2.17)
= (,),

(2.17)

-
(2 18)

"~ {z)=~qS{z ~Zo)

'

, [70]

.
(2.18).


'd'

.2
z

-', ;

(2.19)

G(z,z') = S(z-z')

(2.19), , [21]

G{z,z') = -^\QXVf^Z:/))dK
_

=-^-exp(-*|z-z'|)

(2.20)-

^ft

(2.18),

[86], [21]
+0

\G(z,z'i-47rqS(z'-z0)]dz'

= ^exp(-|z-z0|)

(2.21)

(2.17)
z>0, -d<z<0,z<-d.

,
( z = - ).
(
z = oo) (2.21).

. - ()
(z)

z=0

z = -d.

40

sf,

-ss.


, +

exp(-fc 0 ) = 2+

- +^-exp(-fc 0 ) = ksf(rC2 + 3)

(2.22)

2 () + 3 (-) = 4 (-)
kef (- 2 () + 3 (-)) = kss (-)4

,_4 z > 0 (,),

-d<z<0

( 2, 3) z < -d ( 4 ).
^-^-,)
:
^)=,-2(-2)
l-A]A2exp(-2M)

(2.23)

ss = ,
2 = -1 D{k)
^)=1+(-2)
1 + , (-2)
(2.23) (2.26) -
(2.17)

,
00 = ^ ( - % - z 0 |) - ^ D ( * ) e x p ( - * ( z + z 0 ))

(2.27)

(2.27)

. ,
(d = 0)
(d = ) (2.27)
[40]. -qD(k) (2.27)
-,
41

z < q, z = z0
(. (1.20)). ,
.

,
: 2 - ,
,Si02-Si,

Si-Si02.

Si02 - ,

Si - ,

H20-Si,

2 - Si02,

(2.27)

- ( ).
- ,

, ,
: = -2 qD{k) (-2& z)

(2.28)

, ,
2

F. = -^_ ^d2kD(k) (-2 z)

(2.29)

D(k)
D(k) = (, - 2 (-2))](-^)" (-2),

(2.30)

=0

( 2.30 ) ( 2.29 ),

F:=-t(-*A2y _{z ,+ dnf


^ =0

2
(z + d(n + l)f

(2.31)

]2 (2.25).

F,, (2.31), ,
, F. =-q2 IAz2.
. 2.3 -2.5
. ,

'

.
42

Si02-Si,

30%

Az FJq <1 .
-j
<1

0.8

. -
z
Si -

/
/

U
I
0.6

Si 2 -

10

15

20

z/cl

.2.3. Fz
-q2/4z2 q
d
1.5

Si S i 0 2
SiO^ ~ Si
N

10

15

20

.2.4. F2
-q2IAz2 Si-Si02 Si02-Si
43

1
H

0 -

Si02

- Si

J
5

l
10

l
15

I
20

zJil
.2.5. F,
-q2/4z2 H20-Si02
H20-Si

2.3
, [33].
[71],

, ,

().
- ,

.
, ,
, [36]
. [33]
,

. ,


44

,
V .

2.6.

(. 2.6)


qm

rm = r(zm),

zm > .

(r,z)

()

z > , ,
2

V(z,zm,r,rm)

?
=

1
2\1/2

- {{z-zmy+(r + rmY)

,1/2

4
{z-Zm?+(r

+ rm)2j

{) - [72]

45

(2.32)

/2

dy

JTT(1-

(2.33)

sin y)

n (1-

K(x) [72]

KW^iarf-brflntj), ?j = l-x2

(2.34)

n=0

2,
2 -8 .

2.
(2.34)

1.38629436112

0.5

0.09666344259

0.12498593597

0.03590092383

0.06880248576

0.03742563713

0.03328355346

0.01451196212

0.00441787012

(2.27),
,

, (z0;0).

,
{qmn)c {zm;], .
- ,
qmn,
^ ( M ) = -^DieMJYjImn

( - Kz + z 0 ))exp(-/kr m n ),

(2.35)

.
(, z)

46

* . ~ W ) = -^gmnD(s,kd)

^ ( - k(z + zj)exp(/k(r - rmn))

(2.36)

, (2.35)
(.. ).
(2.35) qmn -> qn,zm -> zn,rmn -> r.

,
(2.36) ,
2-

YuQm()-> \dq>(...).
2
krffln =krm cos <.
(2.36) ,
d2k = kdkd(p', ('-. . ,
(J 0 (x)- )

2,

2,

Jrf^exp(-ikrm) = J0(krm), |^(/) = 2/0(-),


(2.37)

md

<fim (r,z) = -qm JdfcZ)(s,feOJ0(ArV0(Aril)exp(-*(z + ^ ) )

(2.38)

qm - . , (2.32) (2.36)

z = 0 z = -d,
(2.27) .

(2.38) [73]
2
1
fdkJ0 (he) J0 (ky) exp(-fe) = - j -^j 1 Axy
2
2
z +(x + yy

* [z +(x + y) \

(2.39)

(2.38) (2.39)
D(s,kd)
47

D(s, kd) = A + 6 X p ( 1M) = (A + (-2)1 - exp(-2M) + 2 (-4) +...) (2.40)


1 + (-2)
(2.40) (2.38)
(2.39), (2.38)

^ ( z , z m , r , r J = -(-A)*[A.F(z,-(zm + 2dk),r,rm)+V(z,-(<zm + 2dk + 2d),r,rm] (2.41)


V{z,zm,r,rm) (2.32).
d = 0, (2.40) ,
D(s,kd) = \. (2.38), (2.39),
, (2.32), -
- zm,
zm z = 0, .

(,)

(2.14)

-,

, (2.32), (2.41)
qm :
<f>{r,z) = Yy{z,zm,r,rm)

+ <l>l"d{z,zm,r,rm)\

(2.42)

qm
: (,)\<. -V.
(r(zn),zn)

(r,z) ,


(f(zm),zm).

(2.38)

MATHCAD-2000.

400 1000

HIR,

zm.
48


zm.
,
[36] , ,
, [36-39]

.
[36]. , (2.32)

). , . 1.2,
, [36]
, .
F(z)
dC/dz = 2F(z)/V2, HIR

s d).

[74]
F(z) =

2
2

^csch(na)(cotha ~~ ncoth(na)), cosha = 1 + z/R


n

=i

(2.43)

(2.43), -

(2.44)

C(z)IR = \- JY(x)dx
z/R

Y(x) = 2F(z)/V , x = z/R .

C(z)/R
(2.43) (2.44). 3

C(z)/R-\ , (2.43), (2.44).


,
z/R<0.l
49

zlR> 10. z / i ? l , , C(z)IR


,
. ,
{R = 35 ),

(. . 3,4),

zIR = 0.05 z = 1.75 ,

(1-./)


( 10-30 ) .

3.
-
C(z)/R,
.
()/,. 2.36
zIR
C(z)/i?-l, %
.
0.05

2.4560

2.4675

-0.8

0.1

2.1488

2.1551

-0.5

0.2

1.8636

1.8652

-0.2

0.5

1.5354

1.5354

0.0

1.0

1.3414

1.3411

+0.1

2.0

1.2015

1.2012

+0.15

5.0

1.09129

1.09097

+0.4

10.0

1.04793

1.04762

+0.7

20.0

1.02469

1.02439

+1.2

50

2.4

,
[33].
4 dCldz
(1.12)

HIR

= 0

(9 = 0, 11, 22.

, <9 = 11 - -
[75]. , ,
4 ( . 2.7, 2.8) V2 /18,
V .
dCldz

zIR ,
- (1.12).

(1.12)

0.05<z/R<20
3% ( ).
zIR < 0.05 , 42% zIR = 0.01. z/R > 20
(. ).
(1.12) .

(1.12)

0 = 0.

= 1.

51

4. dCldz
.
z/R
0.01
0.02
0.05
0.1
0.2
0.5
1.0
2.0
5.0
10.0
20.0

H/R=200
0 =0
33.65
50.79
20.26
25.78
9.093
10.76
4.587
5.728
2.243
3.172
0.870
1.55
0.442
0.928
0.238
0.553
0.114
0.273
0.0662
0.157
0.0376
0.0869

#/=400
0 = 11
35.03
50.43
21.32
25.42
9.864
10.42
5.292
5.421
2.892
2.916
1.41
1.40
0.882
0.880
0.588
0.597
0.375
0.388
0.274
0.285
0.196
0.202

/ =200
0 = 11
35.03
50.36
21.31
25.36
9.847
10.36
5.269
5.358
2.860
2.853
1.362
1.338
0.822
0.817
0.524
0.534
0.311
0.325
0.213
0.221
0.140
0.138

H/R=100
0 = 11
34.98
50.30
21.27
25.30
9.80
10.30
5.218
5.295
2.805
2.79
1.30
1.275
0.758
0.753
0.459
0.471
0.249
0.262
0.156
0.158
0.0916
0.0751

H/R=50
0 = 11
34.93
50.24
21.21
25.24
9.74
10.23
5.16
5.23
2.74
2.73
1.23
1.21
0.691
0.690
0.394
0.408
0.191
0.198
0.106
0.095
0.0536
0.0119

tf/ff=200
0 = 22
36.62
50.77
22.31
25.77
10.49
10.77
5.85
5.76
3.40
3.25
1.83
1.71
1.23
1.17
0.865
0.843
0.568
0.566
0.409
0.404
0.279
0.259

H/R=100
9 = 22
36.56
50.64
22.25
25.64
10.42
10.64
5.76
5.63
3.30
3.12
1.72
1.59
1.10
1.04
0.738
0.714
0.446
0.437
0.296
0.275
0.181
0.129

2.5
,
. 2.7 dC/dz
(s = 81, . 2.7)
(- = 3.8, . 2.8) d [33].
(1.12),
.

52

8 = 8 1 , H 7 R = 2 0 0 , 0=11

50

rt=0.02R

3 40
w

30

++ (1=0.1R

20 -

^ \
4*SN

10

K|V

0
0.01

^S^'-'Tlr^

0.1

rn---

10

z/R

.2.7. dCldz
z/R

,
d.
- (1.12)

g=3.8,H/R=200 ; 0=11

50

ODD (1=0.05R

+++ cl=0.2R

^ 40 -\
U
> \

ooo e = oo

30

\
\

20
10

0.01

*^83

0.1

m-~

z/R

10

.2.8. To , .2.7
.
(1.12)
.

53

.2.7, 2.8 ,
z < d. z > d
,
.

(.2.8)

. . 2.7
, dC/dz,
H/R = 200
z - z0 + r 2 I2R, z0 i? -
,
. ,

(1.12)

) .
,
z/R <0.03 z/R>0.03,
. ,

,
.

2.6 - -


1 . ,
(, ). - -

,

[45]

.2.2.

R
54

( ) [6]
'"

Oh

(- 2 z)jdco a(ia>)A(iu>)

F = -fekk*
71

(2.45)

sx(ico) + 2

2 47

(-) = ^

(- )

12(/<)- ( )

aid) -

(2.45)

()
R/z\,

z-

.
(2.45) [5]
F = ^- _ jdtoa(i )" )
4 z

(2.48)

z (2.48)
(1.5).
(2.48) (2.6), (2.1)
.

-,

(2.48)

dV,
(
). ,

R,

z (z
), (2.48)
3
3
i ,r - >
dV =2nR{z'-z)dz
47

An

(z,z + 2R). , R z, (2.48)


F =

_Jn* UM?lzliMzI
\6nz

(2.49)

(ico) + 2 2(ica) +1
55

(2.49) R
(1.12), ,
2 9 1 *i(")-l e2(ia))-\
, = - \^
1 2 6
8- J el(ico) + 2e2(ico) + l

(2.50)
v

d,
[82], (2.45)
(

) = ^ b ^
1 - , ()2 ()

(2.51)

,= !-, 2 = - , sl2=el2(co).

(2.51),

, (2.24) ,
(2.22) -> 0.
(2.51) (2.45), (2.30) ,

i? ->dV = 2nR{z' -z)dz


An
An
.
F

_Mf(_A_^
2

16 &{(z + dn)

Ah, =)da,\^A2'$^

4*

(z + d(n + \)) )

(2.53)
sx(ico) + 2

A2n = )dco A, {icoY A2 (far1 ^


0

(2.52)

(2.54)

S1(lCO) + 2

(2.49) (2.52)
d.

g

(uo) = l+

(2.55)

"S
+ 0/

- .

( ) = 1.37 * 1016 / = 1.88--14 .


15

[13] (0 =3.3-10 /)
56

s{ico) =

(2.56)

()

, ,
2.513

3.727
(2.57)
+e{ia>) = \ + 0.775 + { I + 0.522( / ) 5.845 + { I + 0.75 \{ I )

=8.5-1013 /. (2.56)

[87]

[88].
. 2.9, 2.10 ,
(2.51) (2.48)

z I d. ,
,
,
(. . 2.3 -2.5). ,
, ,
,
.

. 2.9.
,
. R{zl d) = 1
57

10
z/d

15

20

. 2.10. , .2.9

58

2.7 2

- - ,

-
.
, ,
, - 3-10 .
.


( ).

. ,

(1.8)-(1.11)

- 3%.
0.05<z/#<20,

42%.

,
.

59

3 ACM -

- -


3.1
,

(
), ,

[36-39,44,45].

() [91-95].

(, ..)

.

Solver Pro -, . (. 3.1).

3.1. Solver Pro 47. 1- , 2-


, 3- , 4-
5- -
60

,
.
1 * 2 ,
1000, ,
z 1 * 2 .
()

.
3-/ [44,45],
10^40/.
20^-23 55 -65%
20-22 , 20% .

.
.
. 3.2,
CSG10/Pt

R = 35 , = 10 - 20 , 0 1 ,

kc = 0.03 - 0.2 /*,

/0 =14-27 ,

L = 250 , w = 35 , t = 0.7-1..

[76],

(. . 3.2).

61

to

2,0

3,0

>

. 3.2,. () ()

62

.
, [44,45],
11- 5 11.

0,+ 3 5, 5 5,7 ,10


. ,

21,5

22,0

22,5

23,0

24,032 '
;
'24,0
24,5
25,0

23,5

25,5

26,0 ,

. 3.2. -
.
[76],
,

, , ,

,,

[45].

. [77,42

63

'

'

45], 25,
[34, 77-80] .
25-36 ,
3
4. 6.
.

, Set Point DFL
AZ [34].

7,

..

10,

, 3-4
.
: (., ,
[24]). - - AZ
0.78- .3 , -
1.3^2 .

3.2 -

(. 3.3),
.

(. 3.4). ,
, ,
.

64

-0.6

-0.8-

I
120

-1

i
140

I
160

I
I
I
180
200
220
,

240

260

280

.
3.3.

-.

-0.4-

-0.5-

% -0.6

-0.7-

-0.8-

-0.9160

170

180

190
200
210
,

220

230

240

3.4. ,
. .
(
)
( )

65

-0.4-

-0.5-

^ -0.6-

-0.7

-0.8-

-0.9I

150

160

170

180
190 200
,

210

220

230

3.5. To .

"xls"

"dat",
Matlab Mathcad.
/,(Z,),
,

(N = 25 + 36).



,
(. 3.5).

/ min ,
10.

66

, ( 3.6.)-

(,

),

,
.

-0.2 -
<
I
I -0.4 \

6-

j-V
\

\
\

i
)

r0.8 t

140

160

j-

: !

;
' 1

i-

240

260

280

\-

-0.6 ;

rr\

'
;

180
200
220
,

. 3.6.


.
,
(. .3.1)
(. 3.7.).

.
,
-

.
67

150

-0.4-

-0.6

120

140

160

180
200
220
,

240

260

. 3.7. .
. 3.3

-,

, .
,
(1 ).
, .

[42-45],

[34]

.
Matlab Mathcad (.
1).

68

3.3
,
,
,
. ,
, V, .
,

I(Z),

, . 3.8. ,

5 ,

Vc.
Z

[9,32]
=Z, +I(Z,)fm + Z0

(3.1)

m = AI/AZ
, a Z0 - .

( . 3.8
, . 3.5, 3.6).

69

0.05

100

200

300

400

500

600

,
.3.8.
( )
,
.
,
, .

0.01117/

V^0

0.01076/

= 0.

0$/ 0.0136/;
,,

.

70

3.9 (V~VC)2
-, 105
.

-0.004

200

400

600

800

. 3.9.
(V-Vc)2
, .
- V = 102?, - V = -105

BF =/,
I(z,) BF.

heor

(1.12) F' (z)


exp

F (z) = BF-I(z)

(. . 4). [34]

[28], .

(1.11)
(1.12) :
2

(3.2)

Fc *-e0S(V/H) (l-2z/H)


( )
71

( ).
(3.2) 50-70

[34]. ,
, ,
,
. [28],
, , ,
. . 4

3.4
, ,
,
() - Vc,
. ,

,
. . . 3.8.

.
,
.
(), ,
( ),
.
.
Vc
, .
2

(V~VC)

72

, Vc:
/

z =Y =1

(3.3)

= min

(V + Vc)2

(V-Vcf

7+ / - ,

+V -V,

10 .
3.10, ,
0.11 0.14 , .
0.3

0.27
,

0.24

*-.

^ ^

0.21
0.18

0.15
0.07

0.09

0.11

0.13

0.15

0.17

Vc,B

.3.10.
(1) Vc
. - V = 10 , - V = -10

Vc

. 5 , ,
Vc 0.3 .


. (. 3.11)
CSG10/Pt .
73

Vc
(5.32 ) (5.1 ) [81]

. 3.11. CSG10/Pt
,
,

74

3.5 3
,
.

.
,
.

,

.

75

4
-
4.1 CSG10/Pt
4.1.1
,
, FVdw{z) Fe{z)

(4.1)

F(z) = Fe(z) + Fmv(z)


[45].
FVdW{z)
(2.1), .
C = AR/6
, V = (.
.4.1.2).

Fe(z)

(1.6) (1.8)-(1.10),

.
(1.11)
[34],
.
.4.2
(4.1)
. Z0

Z/

=Z,.+/(Z,)/m + Z0 ,

(4.2)
76

Z, z,

(/-

),

F exp (z) ,
z = 0.
Fexp(z) F,lu:or(z)
(z + z0), z0 -

dF'heor /dz>kc. , F"'cor(z0) Fexp(0)


dF'hcor /dz\:=:0 > .

( .3.8
) ,
,
.
,

. [34] z0

(
) AZ . ,

z 0 . ,
, , ,
, AZ.
, d = z0-AZ, d AZ .

,
F"'cor(z)H Fexp(z) .
77

F0i
F",cor(z) .

Z2=t(F"'Cr(zo+zn)-Fexp(z)-Fo)2

(43)

.
H,R,0,BF F 0 .

MathCad. %2
5.
,

.
AZ = 1.283 105.
=/

),

( -

(4.3)
.

5,
[75] -0.25/.


CSGIO/Pt, (4.3) BF FQ.
,
6. . 4.1

, 5.
5 6 ,

78

.
[34]
. .3.8 5 ,

, (4.1)
R, .
,
( )
(4.3) R.
, .3.8,
,
, .
5. ,
CSG10/Pt -
Voltage,

FQ,HH

ZQ,

10

0.0109

16.78

10

0.0090

0.0103

, 1

R,

21.9

0.253

18.9

11120

0.190

1.2-10"5

17.67

21.82

0.252

19.7

10980

0.190

2.5-10-5

8.54

25.07

0.289

16.8

10980

0.199

3--4

BF,HHIHA

9,

6.

, 1

30.99

0.358

2.2-10-4

1.6836

29.08

0.336

2--4

1.2983

33.93

0.392

8.5--4

Voltage,

AZ,HM,

BF,HHIHA

10

1.2983

10

79

200
400
z,

600

. 4.1. (V-Vc)2
() ( )
CSG10/Pt
(V = 10B).
. 1

4.1.2 --

V
(. z0 5 1,2 3),

, - - ( = 0), ,


.
, ,
.

(2.1) (2.6),

.

.
80

I(z) ,
(2.1) F,ulK(z) = -C7(z + z 0 ) 2 ,
I(z) ,
2 = 0.

Fmv(0) = -Clz2

BF -I(0) = -C/z02.

z0

. ,

2> , BF
. m = AI/AZ ,

BF-kclm,

.
.
2C7(zc + z 0 ) 3 = (

zc.

I(zc) = -Mckc2/4f3

(4.4)

=-{1

BF


/,(z()

I{zc)

zc

zc. , ,
, .
1

1.55-

1.895-2 .

zc .

(2.6)

BF

81

. / , ,
2 5 ( 18.9 ),

= 6.00~19

.4.2. ,
(. ),
144 (4 36
).
, [44]
= 3.2 -1049 1,

-1.

C = A-R/6,
, [44]

: = 2.0 2 = 1.9 w# 2, .

" j&&(
*sr 0<

&*$

11111

-0.1

."

-1.1471
-0.8822
-1.2983
- 0.7782

-0.2

40
80
z,

'

120

. 4.2. () (
) -- CSG10/Pt
.
. 1, = 6 10~19 .
,

82

4.2
,

(. 1.5).


. , [78].
,
-
C(z) = s-^~,

(4.5)
v

(H + z)

, ,
=

1*.- SV\
2 dz
2( + zf

(4.6)

V ,

,
, (
), F
1/2. zH

(4.6)

s0SV2

s0SV2

r = _ _ i ^ _ 2. _ ^ _
4(H + z) ~

( 21

AH

2z,

_fi

( 4

H'

F ( )

.7)

z = zmax, zmax

. ,
,
, Az,
83

AZ(B (4.2)) .
(4.7),
( Vc)
s S(V-Vc)2
23

AF= 0

'

, ,
AF = kcAz ,

(4.9)


I(z) ,
(4.10)

AI = a(V-VcfAz


.
m = Al/Az,
, (4.8)-(4.10)
s

(4.11)

={sC\.L


, .
,

CSGIO/Pt- .

, 22

20%.

3, 5, 7, 10 .
.4.3 4.4 ,
,
(
.3.2) -5

(.4.3) +5 (.4.4).

84

,
, 3-"5 / 2.5$-10~5 /.

% -0.002

-0.004 -

-0.006
600

650
700
750
800
zp,

850

. 4.3.
CSGW/Pt-
-5 .

<
as

-0.01
500

550 600 650 700 750 800 850


zy1

. 4.4. , . 4.3 +5


, .
3.4, 0.3 5 . (4.10)
85

5.32 = 28.09

4.72 = 22.09.

= \.070~ /-2 = 1.17-W'6 /-2. ,

[76] = 0.167 /,

= 0.0134 /.

),

(Z = 250 ) (w = 25 ),
(4.11) = 12.75 = 12.37,
10.

= 12.53 .
, ,
(4.7)

(4.1), ,

.4.3.1,


.' ,
(. . 4.3 4.4)
, ,
. 1.5,
,
, (4.7). ,
(4.7)
Solver
Pro,
.

86

4.3 CSG10/Pt
4.3.1
,
( 20%),
.

.4.1.1 ,

z0, F0 .
,

. %2

zo,kc,R,H,0.

1-4 2
(4.3), ,
7 - ,,,9,

1-4 2, 5,7,10,
2 <~*. 7

,

Pt - An.

3 5 , 1-4
2, >
, . 4.1.1:
,
X2, R.
7,
R
- 0 . (0.325)

87


0.2.

2

' >

, .

7.

,1

R,HM

VC,B

0.11

11.09

0.155

0.32

0.167

35

10

0.189

0.23

-34

+6.7

+10.8

-18

+39

8 3
10 .
, , .
, , 2-4 ,
067/.
,

5
()

.

, (4.7)
.
, . 4.5(,), ,
(4.3) = 0 = 0
. % = 4.6-10"5, 1.75--3.

88

^^^^"

54
;
<

-0.02 -

+++

-0.04

<

-0.06

>

100

;
s

OS
(
X
X

300
400
500
z,

600

+++

-0.02 -

Q-

700

i^^^^yi-^

54

-0.01

'

200

.
.

-0.03
+
+
-0.04 F
1

100

200

300
400
500
z,

600

700

.
4.5,.

()

()
, (V-Vc)2

CSG10 IPt- %2. -
, -
/7 = 0.1

89

8.
2

,1
R,HM
V,B
Z ,HM
,
,

%
0

+ 10

0.119

24.36

35.01

10.4

0.15

1.17

-10

0.116

26.04

34.12

11.0

0.15

3.76

+ 10

(0.167)

20.0

46.44

10.0

0.23

12.2

-10

(0.167)

20.0

42.69

10.0

0.212

73.5

+ 10

(0.167)

21.0

(35)

10.0

0.17

119.4

-10

(0.167)

18

(35)

10.0

0.25

58.07

+ 10

(0.167)

19.24

49.03

(10.0)

(0.189)

49.4

-10

(0.167)

22.0

40.54

(10.0)

(0.189)

205.4

+ 10

0.132

19.92

(35)

(10.0)

(0.189)

5.04

-10

0.140

18.97

(35)

(10.0)

(0.189)

23

2 ,

( 1 8)
+105 5, kc, a H,R,6
.

=0.167I

, ,
, .

( ,
), ,
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105

1
Matlab

, ,
.

, ARR .
.
operating ( 2
26-31). VdW_elastic ( 18
32-34)
(1920).

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.

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3 while ARR(k,1,m)>=0
4
k=k+1;
5 end
6
ind_delta(1,m)=k-1
7 k=1
8 [min_force,ind_min_force]=min(ARR(:,1,m))
9
mf(1,m)=ind_min_force
10 m=m+1
11 end;
12 [rm'm'm_z,ind_minim_z]=min(mf)
13 m=m+1
14p=1;
106

15VdW=0;

16 elastic=0;
17 while p<=s_pag
18
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19

elastic=elastic+e;

20 VdW=VdW+V;
21 p=p+1
22 end;
23 clear p;
24 elastic=elastic./s_pag;
25VdW=VdW./s_pag
26 function [res,mid]=operating(A1)
27 num_cur_line=size(A1 (70:1000,1));
28cur_mid=sum(A1(70:1000,2))/num_cur_line(1,1)
29 mid=cur_mid;
30 A1 (:,2)=A1 (:,2)+cur_mid;
31 res=A1;
32 function [elast,VdWf]=VdW_elastic(A11 ,index,min_ind,symbol)
33 elast=A11 (index-min_ind:index,2);
34 VdWf=A11 (index_curmin:index_curmin-400,2);

107

2
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