Академический Документы
Профессиональный Документы
Культура Документы
Fabrication
Laser Induced Backside Wet Etching
Components
Materials
Controls
Features
Pros:
Varied aspect-ratios
Variable cross-section
Rapid prototyping
Crack/debris free
Cons:
Roughness
CNC instability
Example Device
Microreactor (A + B)
Microconcentrator (A + B + C)
Concentration mode (port E)
Extraction mode (port D)