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Crack-free direct-writing on glass

using a low-power UV laser in the


manufacture of a microfluidic chip
Andrew Pieterick
Paolo Ferrari

Fabrication
Laser Induced Backside Wet Etching
Components
Materials
Controls

Features
Pros:
Varied aspect-ratios
Variable cross-section
Rapid prototyping
Crack/debris free

Cons:
Roughness
CNC instability

Example Device
Microreactor (A + B)
Microconcentrator (A + B + C)
Concentration mode (port E)
Extraction mode (port D)

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