Hydrogen effects on deep level defects in proton implanted Cu(In,Ga)Se2
based thin lms
Abstract Hydrogen effects on deep level defects and a defect generation in proton implanted Cu(In,Ga)Se2 (CIGS) based thin lms for solar cell were investigated. CIGS lms with a thickness of 3 m were grown on a soda-lime glass substrate by a coevaporation method, and then were implanted with protons. To study deep level defects in the proton implanted CIGS lms, deep level transient spectroscopy measurements on the CIGS-based solar cells were carried out, these measurements found 6 traps (including 3 hole traps and 3 electron traps). In the proton implanted CIGS lms, the deep level defects, which are attributed to the re- combination centers of the CIGS solar cell, were signicantly reduced in intensity, while a deep level defect was generated around 0.28 eV above the valence band maximum. Therefore, we suggest that most deep level defects in CIGS lms can be controlled by hydrogen effects. Conclusion We utilized DLTS measurement to investigate the hydrogen effect on deep level defects in hydrogenated CIGS thin lms, and identied deep level defects found in CIGS-based thin lm solar cells. It was found that the at-band voltage shifts in the C V hysteresis curves and the dark leakage current in IV curves are suppressed by hydro- gen effects. Also, we demonstrated that most deep level defects in the CIGS thin lms are controlled by this effect. However, a deep level defect with an activation energy of 0.28 eV above the valence band maximum is generated during the hydrogen treatment.