EE143 F2010 Lecture 1

EE143 Teaching Staff

Instructor : Prof. Nathan Cheung ,cheung@eecs.berkeley.edu

Cory 513, 642-1615
Lecture Hours and Place: Tu &Th, 2:10-3:30pm, Cory 277
Office Hours: Tu 1pm-2pm, Th 12-1pm, and by appointment

GSIs
Byron Ho (Head-TA), bho@eecs.berkeley.edu,
Office Hours : Friday 12-1pm CORY 381

Chenlu Hou, clhou@berkeley.edu,

Office Hours:Monday 1:30-2:30 pm, CORY 381

Wookhyun Kwon, whkwon10@eecs.berkeley.edu,

Office Hours: Wed 12-1pm, CORY 381

Professor N Cheung, U.C. Berkeley

EE143 F2010 Lecture 1

EE143 Fall 2010 Weekly Schedule

Monday Tuesday Wednesday Thursday Friday
9:00 LAB 1 LAB 2 LAB 4 LAB 5

9:30 Byron Ho Wookhyun Kwon Chenlu Hou Chenlu Hou

10:00
10:30
11:00
11:30
Cheung
12:00 Office Hour Byron Ho
Office Hr
12:30 CORY 513 CORY 381
Cheung
13:00 Office Hour Wookhyun Kwon
Office Hr
13:30Chenlu Hou CORY 513 CORY 381
Office Hr
14:00 CORY 381 LECTURE LAB 3 LECTURE

14:30 Cory 277 Wookhyun Kwon Cory 277

15:00 Cheung Cheung
15:30
16:00
16:30

Professor N Cheung, U.C. Berkeley 2

EE143 F2010 Lecture 1

EE143 Lab Sign-up

5 Lab Sections : Tu 2-5pm, W 9-12am, W 2-5pm,

Th 2-5pm, Fri 9-12am

• Fill in Doodle poll http://www.doodle.com/rtpbrmm7bzfm3b45

before 8/28 (Friday) 5pm.

• Your assigned lab section will be posted online before

8/30. Lab attendance is mandatory for Week of 8/30

• You will have lab orientation and have to pass a safety

quiz before you are officially enrolled in this course.

Professor N Cheung, U.C. Berkeley

EE143 F2010 Lecture 1

Course Website
http://www-inst.eecs.berkeley.edu/~ee143/

Required Text
• R.C. Jaeger
"Introduction To Microelectronics Fabrication “, 2nd Edition
• Reprints and Lecture Notes

Homework
•Posted every Tue online ; due following Friday at 9am
•Your best ten efforts will be counted towards your
course grade

Grading
•Midterm1 15%,Midterm2 15%, Final 30% ,Homework 10%, Lab 30%
•Undergrads and Grads will be graded as two separate groups

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EE143 F2010 Lecture 1

Other Websites of EE143 Interest

Device Physics/ Process Visualization – Highly recommended

http://jas.eng.buffalo.edu/

MEMS operation (Good collection of photos and movies)

http://mems.sandia.gov/scripts/index.asp

Trend and Roadmap

http://public.itrs.net/

Forecast
http://www.icknowledge.com/

Professor N Cheung, U.C. Berkeley

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EE143 F2010 Lecture 1

What is EE143 all about?

• Microfabrication Principles
for IC and MEMS
• Hands-on Fabrication and
Testing of IC and MEMS
Devices

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EE143 F2010 Lecture 1

EE143
Chip
Fabrication

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Photograph of EE143 Wafer

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EE143 Lab Processing Equipment

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EE143 Chip Characterization

17-stage Ring Oscillator

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After resist patterning on nitride/pad oxide

Process Simulation of
Topography and Device
Structure

After Local Oxidation After Poly-Si Gate Patterning

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EE143 F2010 Lecture 1

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EE143 F2010 Lecture 1

A benchmark of Top-down Approach

5nm-Gate Nanowire FinFET

2004 Symposium on VLSI Technology, p.196

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EE143 F2010 Lecture 1

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EE143 F2010 Lecture 1

Another Perspective on Moore’s Law

… we are already producing

1018 transistors per year.
Enough to supply every ant
on the planet with ten
transistors.

•Transistor cost < cost of

one letter in NY Times
(P. Silverman, 2005)

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EE143 F2010 Lecture 1

Chip Power consumption is a big concern !!!!

Source: Intel Developer Forum 2002

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EE143 F2010 Lecture 1

Commercial MEMS Products

• Optomechanical •Acceleratometer
Displays (TI, 1996) ( Analog Devices)

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MEMS: Pressure Transducer

Bulk
Si
Micromachining
Pyrex Glass

Si wafer

Surface
Micromachining

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MEMS Actuators

Gear Speed Reduction Unit Movable Mirror

Responsive Drug Delivery Valve Turbine engine

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MEMS-IC Integration
(Sandia National Lab)
• MEMS fabricated in 12 m-deep trench
– Filled with SiO2 and planarized using CMP

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 Linking Si Technology with Biology
EE143 F2010 Lecture 1

‘Snail' neuron grown atop an Infineon Technologies CMOS device

that measures the neuron's electrical activity, linking chips and living cells.

Source: Max Planck Institute

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EE143 F2010 Lecture 1

Responsive Drug Delivery Systtem

Professor N Cheung, U.C. Berkeley Source, Madou , Lab Chip, 3, 26-28N (2003) 24
EE143 F2010 Lecture 1

Heterogeneous Integration of Microsystems

Professor Nathan Cheung, EECS
BioMEMS Emitters /Filter/Detectors
GeOI
Green LED
-
Low Voltage
Blue LED
High mobility 5mm
semiconductor 200 m

CPU MOS IC
Micro Photonics on Si
pump LED display
Laser Array
III-V
Encapsulated battery Laser
with switch/LED Photo
Emitter
Emitter
Arrays Optical
Micro
Modulator
mirrors
Micro-fluidic channels

Encapsulated
Power source
1 m

Si microfluidic UltraBright
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Large Area Processing

(Flat Panel Displays)

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Large Area Processing

(Photovoltiacs)

The Grid Parity Challenge

(< US$1 /Watt )
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EE143 F2010 Lecture 1

Environmental Impact of the

Semiconductor Industry
Impact per square inch of Si integrated circuit

Output from the Fab Input to the Fab

Liquid Waste 75 Gal/in^2 Water 30 gal/in^2
Hazardous Waste 0.1 Kg/in^2 Electricity 10 KWhr/in^2
Toxic Releases 0.01 Kg/in^2 Chemicals 0.2 kg/in^2

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