CU HOI N TAP MN KY THUAT VI DIJN TU

Giang vin: ThS V Chin Thng.

B mn: Din tu Vin thng.
Chuong 1: Co so Vt l (2d)
Cu 1: Trnh by cc dang cu trc tinh th
Cu 2: Trnh by cu trc vng nng luong cua cht bn dn.
Cu 3: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn tinh khit. Nhn xt.
Cu 4: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn loai P. Nhn xt.
Cu 5: Trnh by nng d hat dn v muc nng luong Fermi trong bn dn loai N. Nhn xt.
Cu 6: Trnh by d dn din cua cht bn dn.
Chuong 2: Cu trc mch Vi din tu (2d)
Cu 7: Trnh by v th tip xc trong chuyn tip PN
Cu 8: Trnh by cc cch cu hnh Diode trong vi mach tch hop.
Cu 9: Trnh by so d cu trc mt ct Transistor NPN trong vi mach tch hop.
Cu 10: Trnh by so d cu trc mt ct Transistor PNP trong vi mach tch hop.
Cu 11: Trnh by cng thuc xc dinh din dung cua mt chuyn tip mt pha P
+
N hoc PN
+
.
Cu 12: Trnh by din tro Bazo trong cu trc mt ct Transistor NPN.
Cu 13: Trnh by din tro Collector trong cu trc mt ct Transistor NPN.
Cu 14: Trnh by cch cu hnh tu C trong cu trc mach vi din tu.
Cu 15: Trnh by cu trc mt ct din tro trong vi mach tch hop.
Cu 16: Trnh by cu trc mt ct tu MOS trong vi mach tch hop.
Cu 17: Trnh by cu tao v ung dung Diode Schottkey trong vi mach tch hop.
Cu 18: Trnh by k thut cch din bng oxide trong vi mach tch hop. Ly v du minh hoa.
Cu 19: Trnh by cu trc mt ct MOSFET knh N chua c sn. Giai thch nguyn l hnh
thnh knh dn.
Cu 20: Trnh by cu trc mt ct MOSFET knh P chua c sn. Giai thch nguyn l hnh
thnh knh dn.
Chuong 3: Cng ngh ch to mch Vi din tu (3d)
Cu 21: Trnh by k thut ch tao Silic da tinh th tu vt liu ban du l ct.
Cu 22: Trnh by k thut ch tao Silic don tinh th tu Silic da tinh th bng phuong php Cz
v Fz.
Cu 23: Trnh by k thut ch tao phin bn dn tu thoi Si don tinh th v lm sach b mt
phin bn dn.
Cu 24: Trnh by v chun phng sach v nguyn tc b tr cc thit bi trong phng sach.
Cu 25: Trnh by muc dch v cch ch tao lop SiO
2
trong cu trc mach vi din tu bng k
thut Oxy ha nhit.
Cu 26: Trnh by cc buoc co ban trong k thut quang khc. Ly v du minh hoa.
Cu 27: Trnh by muc dch cua k thut quang khc v cc cht cam quang su dung trong k
thut quang khc.
Cu 28: Trnh by k thut phn xa v ung dung cua k thut ny trong cng ngh ch tao vi
mach tch hop.
Cu 29: Trnh by k thut bc bay trong chn khng v ung dung cua k thut ny trong cng
ngh ch tao vi mach tch hop.
Cu 30: Trnh by k thut kt tua ha hoc pha hoi (CVD) v ung dung cua k thut ny trong
cng ngh ch tao vi mach tch hop.
Cu 31: Trnh by cc co ch khuch tn trong tinh th bn dn..
Cu 32: Trnh by cc yu cu cua mt h khuch tn v so d h khuch tn tu ngun rn. Giai
thch so d d.
Cu 33: Trnh by cc yu cu cua mt h khuch tn v so d h khuch tn tu ngun long.
Giai thch so d d.
Cu 34: So snh hai k thut cy ion v khuch tn.
Cu 35: Pha tap bng cy ion l g? Trnh by so d h cy ion v giai thch.
Cu 36: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha kh.
Cu 37: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha rn.
Cu 38: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy tu pha long.
Cu 39: K thut Epitaxy nhm muc dch g? Trnh by k thut Epitaxy chum phn tu.
Cu 40: Trnh by quy trnh ch tao phin bn dn. Vt liu chu yu d ch tao linh kin vi din
tu l g v tai sao.
Phn bi tp: (3d)