Impedance Measurements

Using the HP 4291A and the

Cascade Microtech Prober

HP Product Note 4291A-3

HP 4291A RF Impedance/
Material Analyzer

Introduction
There is an increasing demand
and a need to make impedance
measurements using a prober.
One example would be making
impedance characteristic
evaluations of a narrow pitch
transmission line at high
frequency in order to evaluate the
design of RF circuits and IC
packages. Another example is
performing a precise capacitance
characterization of dielectric thin
film up to the GHz range. In this
product note, a new solution for
this type of measurement is
described in which the HP 4291A
RF impedance/material analyzer
and the Cascade Microtech prober
are used.
HP 4291A Capabilities
The HP 4291A 1MHz-1.8GHz RF
Impedance/Material Analyzer can
measure impedances covering a
wide frequency range with great
measurement accuracy by using
the newly developed RF-IV
method (basic measurement
accuracy: 0.8%). Impedances that
differ greatly from 50 ohms are
considered difficult to measure
using the reflection coefficient
method used in most Network
Analyzers. For example, inductors
in nH, capacitors around 1 pF,
etc., can be measured accurately
using the HP 4291A. Also,
regarding Q (quality factor),
Q=100 can be measured at 1GHz
with an accuracy of 15% (typical
value). In addition, a precise,
stable probe system can be easily
constructed using a standard
1.8 m connection cable as the test
station. This station can be
brought close to the probe without
affecting the measurement Table 1. Selection of Cascade Microtech Probe
accuracy. Moreover, because
parasitic elements like the
residual inductance of the probe
(which is considered to be one of
the major error factors), can be
removed by using the
compensation function. These
capabilities make it possible to
evaluate the electrical
characteristics of the DUT
correctly.
Electrode Distance
Main Features
Measurement
Stability
System Composition Cascade Microtech Products:
The HP 4291A can accurately Summit series 9000 probe station
measure the impedance of a (1 ea.)
narrow pitch transmission line
Positioner, microscope for probe
using a Cascade Microtech prober.
station (1 ea.)
This system contains the
following equipment: Adapter kit for installation of
HP 4291A test station
Hewlett-Packard Products:
(No. 106-768, 1 ea.)
HP 4291A RF Impedance/Material
Analyzer (1 ea.) Cable with SMA (M)-(F)
connector (No. HF-502-6, 6 inches
APC7-SMA Adapter long, 50 ohm, 1 ea.)
(HP P/N 1250-1746, 1 ea.)
Probe (1 ea.), see table 1.
Impedance standard substrate
(choose suitable one for probe,
1 ea.)
There are major 3 different types
of Cascade Microtech probe as
shown in table 1. The suitable
probe for the measurement should
be chosen from the table.
Fine-pitch
Compliance Probe Wafer Probe Microprobe
(EPC series) (ACP, WPH series) (FPM-1X)
Fixed, Fixed, Variable, 0-18 mm.
Selectable between Selectable between
150-1250 um. 150-250 um.
Suitable for a device Contacts with an Can change electrode
mounted on a PC 11-15° angle. Suitable distance. Possible to
board (or similar for on-wafer contact material which
mount) because it Measurement. Easy has up to several mm
contacts a device at a probing by spring-type difference in level.
45° angle. Can probe tip.
contact non-flat
material using a
spring-type probe tip.
Best Best Good
2
 System Selection and H H µH
µH
10
m 1m 100 10
Measurement Procedures 100K

Select the system and make the 1

µH
10K
10
measurement according to the fF

following procedures: 10
0n
H
1K
100
f F
1. Choosing the HP 4291A
test head |Z|,R,X
100
10n
H

[Ω] 1pF

Good impedance measurement 1nH

accuracy can be obtained by 10 10p High Z Test Head
F

choosing an appropriate test head

p H Low Z Test Head
for the HP 4291A from 2 types of 1 100
100
test heads depending on the pF

impedance values being 0.1

1nF
measured. For example, chose a 1M 10M 100M 1G

suitable test head (see Figure 1) to
achieve an accuracy of 10% at
different frequencies. See the
HP 4291A data sheet for more
details.
2. Installation of the
HP 4291A test station
Fix the adapter kit to the left side
of the probe station for the
HP 4291A's test station
installation. Then place the test
station vertically on the adapter
kit. At that time, place the test
head and DUT as close as
possible. Fix steadily to the test
station.
FREQ [Hz]
Figure 1. HP 4291A Accuracy (10%)
3. Setting Up the HP 4291A The NOP, which is the number of
points for one sweep, can be set
Set the following measurement to a maximum of 801. When data
conditions: of a higher density is desired (for
example, when evaluating the
Start/stop frequency (when using
steep frequency characteristic
frequency sweep)
precisely), set the number of
points higher. If a short
Test signal level
measurement time is desired,
Number of points (NOP) decrease the number of points.
Usually, it is set to more than 201.
Number of points averaging
Point averaging reduces the
Parameter for compensation kit random error of noise by
averaging the data mathematically
The test signal level is usually set when calibrating, performing
as large as possible. For example, compensation, and measuring,
use 1 Vrms (for a measurement according to the specified
under 1 GHz) or 0.5 Vrms (for a averaging time.
measurement over 1 GHz) so that
the measurement can be made More than 32 averaging is usually
under conditions where the recommended in order to remove
signal-to-noise ratio is the largest. as much noise as possible.

3
 Table 2. Compensation Kit Parameter
Value of Impedance
HP 4291A Compensation
Standard Substrate
(FPC, ACP, WRH)
OPEN : CONDUCT(G)
CAP.(C)
SHORT : TRESIST.(R)
INDUCT.(L)
LOAD : RESIST.(R)
INDUCT.(L)
The compensation kit parameter
is the actual impedance parameter
of the impedance standard
substrate for compensation. It's
set in the HP 4291A in order to
perform more accurate
compensation in step 6. Because
these parameters (Copen, Lshort,
and Lterm) are dependent on the
probe used and the distance
between the electrodes, they are
supplied together with the probe.
(However, as there are no
parameters supplied for the FPM
probe, the values under ideal
condition are substituted.) Set the
parameters according to table 2.
Once the input values are
registered as USER COMPEN KIT,
the appropriate data will be
chosen the next time.
4. Calibration of the HP 4291A
Input Value
Ideal Value
(FPM)
0 0
Copen 0 calibration is calculated at the
0 0
Lshort 0
50 50
Lterm 0 pitch transmission lines. (Notice
There are two different types of
calibration procedure called
"FIXED" calibration and "USER"
calibration. In "FIXED"
calibration, the measurement is
made at the specified frequency
points in the analyzer for the
calibration and the internal data is
calculated for the whole span
frequency. Points other than the
calibration measurement points
are calculated by interpolation.
The specification of the
measurement accuracy will be
satisfied even though the
measurement frequency or the
test signal level is changed.
+3$
However, an interpolation error
will occur. On the other hand, in
"USER" calibration, the
measurement can be done with
good accuracy and without any
interpolation error. This is true
because the internal data for
same points as the frequency
points. Perform the "USER"
calibration when accurately
measuring components or narrow
that it is necessary to perform
"USER" calibration each time the
frequency setting is changed.)
5. Connecting the HP 4291A and
the prober
See figure 2. Connect the
APC7-SMA adapter to the test
head. Then connect the cable
between the APC-SMA adapter
and the Cascade Microtech
prober.

The measurement accuracy of the

HP 4291A is applicable when
calibration is done on the APC-7 7HVW6WDWLRQ

terminal test head. Calibration

must be performed with the 7HVW+HDG

calibration kit (0 ohm, 0s, 50 ohms

and Low-loss Capacitor) attached 7HVW6WDWLRQ
 Ω 60$&DEOH
to the HP 4291A. 6WDQG

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Figure 2. Connection between the HP 4291A and the Cascade Microtech Probe

4
6. Open/Short/Load 7. Measurement of the DUT Summary
compensation
Place the DUT on the metallic Impedance measurements of
The residual impedance of the stage of the probe station. Move narrow pitch transmission lines
cable and probe from the end of the probe to the measurement and small capacitors on a wafer
the test head can be removed by position and make sure the probe can be performed up to 1.8 GHz
OPEN/SHORT/LOAD is brought into contact with the with a good accuracy by using a
compensation. Perform OPEN device. Choose the applicable combination of the HP 4291A
compensation when the probe is measurement parameter on the impedance/material analyzer and
not touching the DUT. Perform HP 4291A and make a the Cascade Microtech prober.
SHORT compensation by using measurement. One example of an
the short standard substrate Ls-Rs measurement of a
placed on the stage of the probe transmission line is shown in
station. Perform LOAD figure 3.
compensation in the same way by
using the 50 ohms on the standard
substrate. (Note: though there is a
function to set appropriate
electrical length for different
types of test fixtures in the
HP 4291A, it is not necessary to
set the electrical length as phase
shift is also compensated for after
load compensation. Set fixture to
[none] mode.)

Figure 3. Ls-Rs Measurement Example of Transmission Line

5
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Test and Measurement products,
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below and they will direct you to your
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Data subject to change

Copyright © 1996
Hewlett-Packard Company
Printed in U.S.A. 9/96
5965-5054E