Gas discharge plasma and their applications

MYEONG YEOL CHOI (Sam Choi) Electrical Engineering Ph.D. student

Advisor: Dr. George J. Collins, Supervisor: Dr. Il Gyo Koo

11/29/2010

Introduction to Sam
Born in South Korea in 1981 Bachelors degree(2007):
Electrical Engineering at Ajou University in South Korea

Republic Of Korea Marine Corps (2001-2003) Masters degree(2009):

Chemistry at Ajou University in South Korea

Ph.D. student(2009-present):
Electrical Engineering at Colorado State University

Contents
1. 2. 3. 4. 5. 6. 7. 8. 9. 10. Plasma definition Introduction to variety of plasma applications Why variety? How to generate plasma? What kind of parameters do we have? How to control the parameters to optimize plasmas? Conventional plasma applications Emerging field - Plasma health care Sams preliminary work conclusion

Plasma the 4th state of matter

http://www.nasa.gov/mission_pages/themis/auroras/sun_earth_connect.html

Variety of plasma applications

http://tv-plasma-reviews.blogspot.com/2009_02_01_archive.html

Ozone generator

Laser

http://compucentro.info/blog /tmp/ozone-generator.html

http://medgadget.com/archives/2009/12/frikkin_lasers.html

Plasma display panel

Plasma arc welding

http://www.flickr.com/photos/rmstringer/2911413043/sizes/l/in/photostream/

Fluorescent light

http://www.walyou.c om/blog/2009/08/25/ plasma-lamp-design/

Microelectronics
http://www3.ntu.edu.sg/mae/research/programmes/th infilms/tfresearch.asp

Wide Range of Temperature

Thermal-equilibrium Te=Tg
<Arc welding>

Non-thermal equilibrium Te>>Tg

<Skin sterilization>

http://www.svarka-rezka.com.ua/eng/documents/about.html

Blood Coagulation and Living Tissue Sterilization by Floating-Electrode Dielectric Barrier Discharge in Air

10,000oC-100,000oC

Tg 25-1000oC Te 10,000-100,000oC

Complexity of plasma reaction

Baldur Eliasson, Senior Member, IEEE, and Ulrich Kogelschatz, IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 19, NO. 6, DECEMBER 1991

Electrical generation of plasmas

<Deposition of SiH4 on solar cell, flat panel, or micro electronics>
<Conditions> 1. Capacitively coupled plasma

10-3m < d < 10m

2. RF voltage source
3. SiH4 + H2 gas 4. Total gas flow rate: 50sccm 5. 0.5torr pressure
J. Jolly and J.-P. Booth, J. Appl. Phys. 97, 103305 (2005)

H atom density vs. voltage, frequency, and pressure

J. Jolly and J.-P. Booth, J. Appl. Phys. 97, 103305 (2005)

Electrical voltage, frequency and chamber pressure are important to plasma characteristic.

Chemicals
<Deposition of SiH4 on silicon substrate>

Adding chemicals can improve desired chemical reactions.

A. Hammad, E. Amanatides, D. Mataras*, D. Rapakoulias, Thin Solid Films 451 452 (2004) 255258

How to design plasma?

Plasma electrode type
Capacitively coupled plasma: voltage source Inductively coupled plasma: current source

Frequency: DC to microwave(GHz) Working gas and pressure: paschen curve

Plasma types
C
Capacitively Coupled Plasma

L
Inductively Coupled Plasma

(/) =

(/) =

Claire Tendero a,*, Christelle Tixier a, Pascal Tristant a, Jean Desmaison a, Philippe Leprince b, Spectrochimica Acta Part B 61 (2006) 2 30

Frequency

Claire Tendero a,*, Christelle Tixier a, Pascal Tristant a, Jean Desmaison a, Philippe Leprince b, Spectrochimica Acta Part B 61 (2006) 2 30

Operating gas and its pressure

< Paschen curve >

The amplitude of breakdown voltage depends on operating gas and its pressure. = F ,

http://en.wikipedia.org/wiki/Paschen_curve

Control of discharge parameters to optimize plasmas

Voltage & current
Impedance matching

Addition of chemicals Operating gas and pressure

vacuum plasma system for low pressure plasma

Control of voltage & current

<Example of RF capacitively coupled plasma system>

50 or 75 Industry standard Impedance matching for maximum power delivery = +

Addition of Chemicals
Gas inlet Target electrode Substrate <Diamond Like Carbon deposition> 1. Gas phase precursor organic gas : CH4, C5H12, C3H6O H2, Ar 2. Liquid phase precursor gas and vapor mixture: CH3OH, C2H5OH, CH3COOCH3, etc 3. Solid phase precursor Target material: graphite Target electrodes works as a carbon source for diamond like carbon deposition.

V. L. Bukhovets and I. G. Varshavskaya, Protection of Metals and Physical Chemistry of Surfaces, 2009, Vol. 45, No. 6, pp. 645651.

Control of gas & pressure

Low pressure plasma 1. Vacuum chamber 2. Vacuum pump 3. High quality sealing

http://www.azom.com/details.asp?ArticleID=912

<Typical vacuum plasma system>

Atmospheric pressure plasma 1. No need to use expensive vacuum equipment 1. Reduce cost 2. more samples available (ex. biological samples) 2. Easy to build

Application of plasma
1. Light source
Fluorescent light, plasma display panel Thin film processing: etching, sputtering Generation of radicals: ozone water purification in Europe Bloodless surgery: tissue cutting, coagulation Sterilization on surgical tools and hands Tissue texturing: joint

2. Surface modification 3. Chemical reaction 4. Plasma health care emerging field

Light
<Fluorescent Light> <Plasma Display Panel>

Annemie Bogaertsa,*, Erik Neytsa, Renaat Gijbelsa, Joost van der Mullenb, Spectrochimica Acta Part B 57 (2002) 609658

http://escience.anu.edu.au/lecture/cg/Display/printCG.en.html

Molecular excitation in the plasma -> UV emission -> absorption in phosphor -> emission of visible light

Surface modification
<Nafion surface treatment in cc rf discharge>
(b) (a)
(b) AFM images of the surface of the Nafion membrane: Plasma treated a) For 0 min, b) For 1 min, c) For 3 min, d) For 5 min, with a 400W rf powered He/H2 plasma.

(a) Schematics of the experimental setup and the electrodes configuration

Chemical bond energy (eV)

6 4 2 0 C-F C-C S-O C-O C-S

Jong Hoon Kim, Juhee Sohn, Jin Hoon Cho, Myeong Yeol Choi, Il Gyo Koo, Woong Moo Lee*, Plasma Process. Polym. 2008, 5, 377385

Chemical reactions
Ozone water purification in Europe

in

out

M. Kogoma, S. Okazaki, Raising of ozone formation efficiency in a homogeneous glow discharge plasma at atmospheric pressure, J. Phys. D: Appl. Phys. 27 (1994) 19851987.

U. Kogelschatz, B. Eliasson, W. Egli, From ozone generators to flat television screens: history and future potential of dielectric-barrier discharges, Pure Appl. Chem. 71 (1999) 18191828

(a) Ozonizer electrode

(b) Large ozone generator producing 60 kg ozone/h (by courtesy of Ozonia Ltd).

Emerging application of plasma - Plasma Health Care

Plasma application to biomedical
1. Spatially selective: thermal spread control of electrosurgery 2. Low temperature: sterilization at low temperature 3. Reactive species: chemical coagulation for bloodless surgery

Spatially selective plasma

<Valleylab Electro-surgical system>

Vs. 10-6m2 entry area 0.5m2 exit area

http://www.valleylab.com/education/poes/index.html

Low temperature plasma

Inactivation of Bacillus subtilis Spores Using Cold Atmospheric Plasmas

Fig. 1. SEM images of the Bacillus subtilis spores (a) before plasma treatment and (b) after plasma treatment for 5 min with a ruptured spore pointed.

Fig. 2. Fluorescence images of the propidium iodide stained Bacillus subtilis spores (a) before plasma treatment and (b) after plasma treatment for 5 min. (Color version available online at http://ieeexplore.ieee.org.)
Xutao Deng, Jianjun Shi, and Michael G. Kong, IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 34, NO. 4, AUGUST 2006

Reactive species plasma

<Chemical coagulation for bloodless surgery>

- Temperature of the cut remains at room temperature. - Wound remains wet.

Gregory Fridman, Marie Peddinghaus, HalimAyan, Plasma Chem Plasma Process (2006) 26:425442

Equipment and analytical tools for Sams plasma research

Plasma generation Electrical
Signal generator Amplifier

Measurement Electrical
Z-scan Oscilloscope

Gas
Mass flow meters: gas flow rate

Optical
Spectrometer ICCD camera

Sample
High speed camera FT-IR Microscope

Sams preliminary work

Plasma for tissue cutting
Contact vs. non-contact mode plasma Plasma type: atmospheric pressure plasma jet Frequency: 13.56MHz Sample: chicken breast (muscle)

Experimental Setup
He
or

MFC

Function Generator

Ar Matching Box Plasma device

Sample BNC Connector

Amplifier

Motion Controller

Motorized stage

Contact vs. non-contact Plasma for tissue cutting

Contact mode plasma Non-contact mode plasma

Result
Contact mode cut Non-contact mode cut

13.56MHz, 50W, He 1000sccm

13.56MHz, 50W, Ar 500sccm

Conclusion
Conventional plasma application Light Surface modification Chemical reaction Emerging plasma application Bloodless plasma surgery Sterilization Coagulation Sams future work Plasma application to tissue cutting Electrical and Chemical effect on tissue samples Plasma selectivity on different tissue

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