Energy table for EDS analysis

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Characteristic X-rays

Hydrogen

1.01
0.08

Continuum X-rays

Secondary Electron

Lithium

6.94
0.53

Li

Be

9.01
1.85

Nucleus

22.99
0.97

Na

1.041

39.10
0.87

3.312

Rubidium

37

85.47
1.53

Rb

Ca

40.08
1.55

K 3.690
Strontium

38

Sr

87.62
2.60

21

44.96
2.99

K
L

Sc

4.088
0.395

Yttrium

39

88.91
4.48

Titanium

22

Ti

47.90
4.5

4.508
0.452

K
L

Zirconium

40

Zr

91.22
6.44

Vanadium

23

50.94
5.87

4.949
0.511

K
L

Niobium

41

Nb

92.91
8.4

5.411
0.573

K
L

Molybdenum

42

95.94
9.01

Mo

Manganese

25

54.94
7.3

Mn

K 5.894
L 0.637
Technetium

43

Tc

( 97)

K 14.140
L 1.806

K 14.931
L 1.922

K 15.744
L 2.042

K 16.581
L 2.166

K 17.441
L 2.293

K 18.325
L 2.424

Cesium

Barium

Lanthanoid

Hafnium

Tantalum

Tungsten

Rhenium

55

Cs

4.286

Francium

87

(223)

Fr

L 12.029

56

Ba

137.34
3.5

57-71

L 4.465
M
0.972

Actinoid

Radium

88

Ra

226.03
5

L 12.340

89-103

72

Hf

178.49
13.3

7.898
1.644

L
M

Lanthanum

Number
Atomic mass
Density
(kg/m3)

Gold

79

196.97
18.88

L
M

Au

9.712
2.120

Name
Symbol
Characteristic
X-ray keV)

8.145
1.709

L
M

Cerium

58
58

Ce

4.650
0.833

L
M

4.839
0.883

Actinium

89

Ta

La

57

138.91
6.17

L
M

73

180.95
16.6

(227)
10.07

Ac

L 12.650

140.12
6.66

Thorium

90

232.04
11.00

Th

L 12.967
M
2.991

74

183.85
19.3

8.396
1.774

L
M

Praseodymium

59

140.91
6.77

Pr

L 5.033
M
0.929

Protactinium

91

231.04

Pa

L 13.288
M
3.077

75

Re

186.21
20.53

L 8.651
M
1.842
Neodymium

60

144.24
7.02

L
M

Nd

5.229
0.978

Uranium

92

238.03
18.7

L 13.612
M
3.164

Information from specimen

Note: Density
* C as (graphite), P as (white),
S as (alpha),
Sn as (white)

Iron

26

Fe

55.85
7.86

6.398
0.705

K
L

Ruthenium

44

Ru

101.07
12.1

K 19.233
L 2.558

Osmium

76

190.2
22.5

L
M

Os

8.910
1.914

Cobalt

27

61

Pm

5.432

Rhodium

45

93

Np

L 13.942
M
3.260

Rh

102.91
12.44

2.696

Iridium

77

Ir

192.22
22.42

L
M

9.174
1.977

Samarium

62

150.4
7.54

L
M

Neptunium

237.05

6.924
0.776

K
L

Prometium

(145)

Co

58.93
8.71

Sm

5.635
1.081

Plutonium

94

(244)

Pu

L 14.276
M
3.348

Nickel

28

58.70
8.8

Ni

K 7.471
L 0.851

Palladium

46

106.4
12.16

Pd

L 2.838

Platinum

78

195.09
21.37

Pt

L 9.441
M
2.048

Europium

63

151.96
5.25

Eu

L 5.845
M
1.131

Copper

29

Cu

63.55
8.93

8.040
0.930

K
L

Silver

47

Ag

107.87
10.49

2.984

Gold

79

Au

196.97
18.88

9.712
2.120

L
M

Gadolinium

64

Gd

157.25
7.90

L
M

Americium

6.056
1.185

Curium

95 Am 96

Cm

(243)

(247)

L 14.615
M
3.437

L 14.953
M
3.539

Generation depth and space resolution

X-rays

Secondary electrons
Backscattered electrons

Cathodoluminescence

Auger electrons
Backscattered electrons

5kV
5kV

Auger electrons

or
orhigher
higher

Continuum X-rays
Specimen

or
orhigher
higher

15kV
15kV

Electromotive force

Absorbed electrons

or
orhigher
higher

The colors mean to detect the characteristic

X-ray of the lowest energy for each element.

0.277

Silicon

14

Si

28.09
2.42

1.739

Oxygen

14.01
1.14

0.392

Phosphorus

15

30.97
1.83 *

2.013

Transmitted electrons

16.00
1.57

K 0.525
Sulphur

16

32.06
2.07 *

K 2.307

Zinc

30

Zn

65.38
6.92

8.630
1.012

K
L

Cadmium

48

Cd

112.40
8.65

3.133

Mercury

80

Hg

200.59
14.19

9.987
2.195

L
M

Terbium

65

158.93
8.25

L
M

Tb

6.272
1.240

Berkelium

97

(247)

Bk

L 15.304
M
3.634

Gallium

31

Ga

69.72
5.93

9.241
1.098

K
L

Indium

49

In

114.82
7.28

L
M

3.286
0.368

Thallium

81

Tl

204.37
11.86

L 10.267
M
2.267
Dysprosium

66

162.50
8.56

Dy

6.494
1.293

L
M

Californium

98

(251)

Cf

Germanium

32

Ge

72.59
5.46

9.874
1.188

K
L

50

Tin

Sn

Arsenic

33

Fluorine

Neon

10

19.00
1.5

Argon

18

Cl

35.45
2.2

Ar

39.95
1.65

2.621

0.848

Chlorine

17

Ne

20.18
1.20

0.677

He

4.00
0.19

2.957

Pb

L 10.550
M
2.342

Holmium

67

164.93
8.80

L
M

Ho

6.719
1.347

Einsteinium

99

(254)

Es

Characteristic X-rays

36

Br

79.90
4.2

Kr

83.80
3.4

K 12.631
L 1.586

Antimony

Tellurium

Iodine

Xenon

51

L
M

82

35

K 11.907
L 1.480

L
M

207.2
11.34

Se

78.96
4.82

Krypton

K 11.207
L 1.379

121.75
6.62

Lead

34

Bromine

K 10.530
L 1.282

118.69
7.30 *

3.443
0.691

As

74.92
5.73

Selenium

Sb

3.604
0.733

Bismuth

83

Bi

208.98
9.78

L 10.837
M
2.419
Erbium

68

167.26
9.06

L
M

Er

6.947
1.405

Fermium

52

Te

127.60
6.25

L 3.769
M
0.778

Polonium

84

Po

(209)

L 11.129

Thulium

69

168.93
9.32

Tm

7.179
1.462

L
M

53

54

126.90
4.94

85

Radon

86

At

L 11.725

Ytterbium

70

Lutetium

71

Yb

174.97
9.84

7.414
1.521

L
M

Rn

(222)

L 11.425

173.04
6.96

4.109

Astatine

(210)

Xe

131.30

3.937

Mendelevium

(257)

(258)

Lu

L 7.654
M
1.581
Lawrencium

Nobelium

100 Fm 101 Md 102 No 103

(255)

(262)

Lr

L 15.652
M
3.731

Analytical area
0.5

A
zm = 0.033 (E01.7 - EC1.7)
Z

WOOD

Secondary electrons

Minimum accelerating voltage

10kV
10kV

12.01
2.25 *

Nitrogen

Castaings formula

Electron probe
Incident electrons

Unable
Unable
to
to
detect
detect

1.486

Carbon

Helium

The continuum X-rays are emitted

when the primary electrons are
decelerated by the strong electric field
existing close to atomic nucleus. The
continuum X-rays have the energy of
the kinetic energy lost during the
deceleration. It will be observed as
EDS spectrum background.

If the incident electrons have sufficient acceleration

and then have enough energy to strike an electron
from the inner shell of the atom, it'll make an
electron hole. An electron from the outer shell will
fill up the hole and then, some characteristic X-rays
will be emitted. The characteristic X-rays have
different energy for each element, and the intensity
will be proportional to the element concentration.

E0 - E1

K 13.373
L 1.694

132.91
1.87

Al

26.98
2.70

E0 - E2

Cr

52.00
7.14

13

Chromium

24

Aluminium

E0 - E3

0.183

E0 - E4

1 2 1

Electron

K 1.253

20

1 2 1 2 1 3

O shell

Scandium

10.81
2.54

hv = E1

Nucleus

L
L
L

N shell

Mg

24.31
1.74

Calcium

Potassium

19

12

Boron

M shell

Magnesium

hv = E4
hv = E3
hv = E2

E0

M
M
M

K shell
L shell

11

Continuum X-rays

E0
1

K 0.110

Sodium

E0

Characteristic
X-rays

Beryllium

E0

Electron transmissions of major lines

Incident Electron

The electrons generated by the electron gun

are accelerated and irradiate the sample. The
electron has a kinetic energy proportional to
the accelerating voltage. The kinetic energy
dissipated within the sample generates
characteristic signals from the specimen. The
characteristic X-rays are the information
used for EDS analysis.

E0 :
EC :
A :
:
Z :

Accelerating voltage (kV)

Minimum emission voltage (keV)
Atomic mass
Density (kg/m3)
Atomic number

E0

5
EC

0.05 0.1

0.5

20 (kg/m3)

10

Ti Ge Fe Ag
PLASTICS
Si Al
Cu Pb
RUBBER CERAMICS
GLASS
ROCK

Fluorescent X-rays

zm (m) 0.01

10 20

50

Au

(kV)

E0

10

50 100 (m)

Analytical area of iron in 20kV 1.5 0.2 = 1.3 (m)

JEC6101C602A Printed in Japan, Ks