Вы находитесь на странице: 1из 28

(19)

RU

(11)

2 476 620

(13)

C1

(51)

C23C 14/38 (2006.01)


B82B 3/00 (2006.01)
H01F 1/01 (2006.01)

(12)

(21)(22) : 2011137468/02, 12.09.2011

(72) ():
(RU),
(RU)

(24) :
12.09.2011

(45) : 27.02.2013 . 6

2 4 7 6 6 2 0

(56) ,
: GB 1050855 , 15.06.1964. RU 2417831 1,
10.05.2011. RU 2412108 2, 20.02.2011. RU
2371379 1, 27.10.2009. RU 2380195 1,
27.01.2009. US 6989083 2, 24.01.2006.

2 4 7 6 6 2 0
R U

(54)
(57) :
,

,
,

.



, ,
,
.



,
,
, ,
,

,

,

.

.
,

,
. 2 . 9 .. -, 8 ., 1 .

.: 1

C 1

C 1

:
124460, , . , - 4806, 6,
"-
. .. "

ru

R U

(73) ():

"-
. ..
" (RU)

():
(22) : 12.09.2011

C 1

C 1

2 4 7 6 6 2 0

2 4 7 6 6 2 0

R U

R U

.: 2

RUSSIAN FEDERATION

(19)

RU

(11)

2 476 620

(13)

C1

(51) Int. Cl.

C23C 14/38 (2006.01)


B82B 3/00 (2006.01)
H01F 1/01 (2006.01)

FEDERAL SERVICE
FOR INTELLECTUAL PROPERTY

(12) ABSTRACT

OF INVENTION

(21)(22) Application: 2011137468/02, 12.09.2011

(72) Inventor(s):
Lapshin Rostislav Vladimirovich (RU),
Azanov Pavel Valer'evich (RU)

(24) Effective date for property rights:


12.09.2011

(45) Date of publication: 27.02.2013 Bull. 6

2 4 7 6 6 2 0
R U

the help of the permanent magnet or the electromagnet


and magnetisation of deposited nanoparticles in the
specified direction. The specified cycle is repeated
to produce the required average size of nanoparticles.
EFFECT: magnetic nanoparticles of specified size
are produced with specified density of scatteing on
substrate surface and with specified shape, and also
amorphous nanoparticles are produced.
11 cl, 8 dwg, 1 ex

(57) Abstract:
FIELD: nanotechnologies.
SUBSTANCE: device for production of magnetic
nanoparticles on a substrate comprises a vacuum
chamber with a cathode arranged on it with a target
and an anode, where the substrate is placed, a
pumping system, a vacuum metre and a system of
plasma-forming gas supply. The device also comprises
a manipulator for movement of the substrate with
deposited nanoparticles into a gap of a magnetic
conductor of a permanent magnet or an electromagnet
used to magnetise nanoparticles in the specified
direction after their deposition or after etching of
the substrate surface with deposited nanoparticles.
The method to produce magnetic nanoparticles on the
substrate includes placement of the initial substrate
inside the vacuum chamber, pumping of the vacuum
chamber, supply of the plasma-forming inert gas,
plasma ignition, target bombardment and performance
of a cycle including deposition of nanoparticles onto
the substrate surface, movement of the substrate by
means of the manipulator in the gap of the magnetic
conductor, where the magnetic field is created with

.: 3

en

C 1

C 1

(54) DEVICE AND METHOD TO PRODUCE NANOPARTICLES

2 4 7 6 6 2 0

Mail address:
124460, Moskva, g. Zelenograd, pr-d 4806, 6,
FGUP "Nauchno-issledovatel'skij institut
fizicheskikh problem im. F.V. Lukina"

R U

(73) Proprietor(s):
Federal'noe gosudarstvennoe unitarnoe predprijatie
"Nauchno-issledovatel'skij institut fizicheskikh
problem im. F.V. Lukina" (RU)

Priority:
(22) Date of filing: 12.09.2011

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
.
,
. , ,
,
[1, 2]. ,
,
[2, 3, 4,
5, 6, 7, 8, 9, 10]. ,

() [2, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14],
[2, 11, 12, 13, 15, 16, 17]. ,
()
[2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15].
[2, 3, 4, 7, 8, 9, 12, 18],
,
.
, ()

. .

.
,
, .


(
, ) [4, 8, 9]. ,
,
( 750 )
[8, 9], .
[12],
, ,
.
,

[4, 7, 8, 9]. ,
(Me) (MeSi) [8, 19] /
(MeSiO3) [9]. ,
/ [4, 6, 8, 9].
, .

, [20],
,
[19] ,

[20].
.
.: 4

DE

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

, .
,
[2,
3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14]. , ,
() [2, 9, 11, 12, 18, 21, 22],
[2, 8], , [2], [2,
13] ., Fe, Ni, [2,
3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 18].
,
() [2, 4, 5, 6, 7, 8, 9, 10, 12, 13,
14, 15, 18, 22] , (150
750) [14]. ,
, -,
.
,
(
600-1200) [4, 6, 7, 15, 18, 23].
,
,
[19], .
,
, .. .
, (),
, "" (. )
. ,
,
,
/
[10].
.
"",
[10, 21],
,
.
[10],
"" ("")
(
).

.

, ,
(
), ,
.
,
- ,
[19]. ,
.: 5

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
, , ,
,
(, ).
,
, ()
() [2]
: , (),
() [5, 7, 8, 9, 19, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33].

() [2, 5, 19, 24, 28],
.
,

.

[24],
. ,
[19].
, .

. .
.
,
. ,
,
.
.
(Fe, Ni, , FeNi, Fe23).
,
, . ,
.
r +,
.
, ,
.
, , ,
. ,
,
.
.

, .
.
, .
, ,
. ,
,
.: 6

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

"" ( ,
) ,
.
, ,
, ..
,
,
,
. ,
,
,
, ,
, - [19].
,
, , ,
(
) , [4].
,
" ", , [1, 2,
12, 15].
, /
.
[24]
.

,
[19].
-
,
[19, 34].
, ,
.
, ,
, [28], ,
[19].

, -
.
,
(
) [9].
,
[1, 24, 35],
,
.

: Fe, Ni, [1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 34].
,
.: 7

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

, ,
:
FeNi, FeCo, FeMn, FePt, FeCr, FeTb, NiCr, CoNi, CoPt, CoPr, CoNiCr, CoCrPtTa, CoCrPtNb,
Fe2O3, Fe3O4, CoFe2O3, CrO2, CoFeB, NdFeB, CoSm, SmCo5, SmFeSiC, SmFeAlC, CoGd,
BaFe2O, CrBr, EuS, Eul2 . [1, 2, 19, 35],
. ,
, , ,
,
[36].

,
, .

,
,
, , ,

,


.
,
.
.
,

.
,


.

,
, ,
- ,
.


.

,
, ,
, , ,
,
,

,

.: 8

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
,

,
.
.
, ,
, / ,
, .

/ .
(. .1) 1,
2, 3, 4 5; 1215 16-19. ,
7 ( )
20.

. 3
1.4 ( 2 ).
. 3 5
, Fe, Mi .
99.99%.
2 22, 4.
22 4 5, ..

. 22 , .
-
,
.
2 ( ),
(. )
.
.
12,
13, 14 15.
16,
17 ( ), 18
19 ( ). 19
,
11.
: , , .
.
( 99.99%).
, .

,
.
,
.: 9

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

[24], .
5 4 , 4
20 7, ,
4, . 4
20 ,
5. ,
.
( , <1 ), -
. ,
, .
, (),
, [19, 24]
. 4 (. .2) , (
) , 23 [19].
,
1-2 [19].
[37],
() [19]. ,
( ),
"", 24,
.

.
.
( ),
()
.
( ),

(), , ..
, . ,
,
,
, . ,
.
,
[19, 34].
,
,

,
.
,
.
, ,
. , ,
.
.: 10

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
. ,
, [23, 37].
(770 , 358
, 1130 ), .
(.
) -
,
[20]. ,

, .. "", .

,
1-2 .

, ,
. ,
(,
, ).
, -,
( , ,
, , ,
..) .
, (
, , , ,
..)
( ),
,
.

[37], .
, ,
, ,
, ,
. , , ,
, (
),
,
.
:
- (. .26).
- "
" , "" [37, 38]
, ,
.
, .
, .
-
.: 11

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

[38].
, ,
(. .26). ,
- "" ,
,
. , , .
,
,
, . ,

, [37].
,
,

[19].

,
,
, ,
(),
().

( )
,
.
.

-.

-.
, -.
- ,
.
,
, [28, 34,
39]. , , [40].
,
.

. ,
() [28, 39]. ,
,
. , -
,
[37]. ,
(NiO) [9],
,
[9]. -
.: 12

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

/ , ,
, ,
(. .2).

(. .3).
7 4
. 7 ,
. ,
.
.
. ,
,
, ,
.

,
.
(. .1, 3),
8.

9 .
,
[11, 12, 13, 15, 16, 17]
,
,
.
,
, ,
, ,
. 20 (. .1)
, .
21.
4
20, 22
1 7.
4 20
22.

.
,
.
/
, /
,
.

,
[35, 41]. , ,
.: 13

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
. ,
.
, .
,
,
"" 25 (. .3). 3
- , (
, ,
, ,
..). ""
( ). ""

, .4.
7, 27,
,
28 29, 30
32, 33,
31 .
,
.

.
34 35. 34
27
9 ,
30
33 .
35
29 32
.

, ,
.


, .
,
.
,
,
.
,

.
,
. ,
,
.: 14

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

,
.
,

[24]:
1. ( ),
/
.
,
.
2. ,
.
,
.
3. .
, ,
.
4. ,
.

.
5. ,

.
.
6.
,
-
.
.
7. .
,
, ,
.
8. , ,
.

,

.
9. ,
( ).

( ,
) , , .
10. .

.
.: 15

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

( ) .
11. (
, , ).

.
12. /

.
,
.
.1 .
: 1 - , 2 - , 3 - , 4 - , 5 - , 6 , 7 - , 8 - , 9 -
, 10 - 1, 11 - , 12 - , 13 2, 14 - , 15 -
, 16 - (), 17 - , 18 2, 19 - , 20 - , 21 -
, 22 - .

20. .
.2 ()
-, () -. : 4 , 23 - , 24 - .
.3 ,
()
"".
( ). : 1 -
, 2 - , 3 -, 4 - , 5 - , 6 - , 7 , 8 - , 9 - , 10 -
1, 11- 1, 12 - , 13 - 2, 14 , 15 - , 16 -
(), 17 - , 18 - 2, 19 , 25 - "", 26 -
. - ,
.
.4 ,
,
.
. : 1 , 4 - , 7 - , 8 - , 9 , 25 - , 26 - , 27
- , 28 - , 29 - , 30 - , 31 , 32 - , 33 - , 34, 35 - , 36 , 37 - .
.5 ()
( ), () - (
).
() 22 , () 91 . () 1.5 , () 5.1 .
.: 16

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

Si(100).
- (, ).
.6 - ,
. , ,
- , .
848 , (
).
.7
, . . , , , . -
. .
.8 ,
"" -
. - 150.
() , () .
- (, ).
.
IB-3 (EIKO, ) [42],
. ..
[14]. IB-3
, .1.
.5 ,
[20].

Ni- ( 99.99%, -3, )
r + ( 99.993%, , ) .

CoSm-
0.36 .
[14, 20]. -.
Si(100).
:
0.35 , 4 , 1 ,
10 .
.5 ,
.
- 22 , - 1.5 . .5
,
-. - 91 , 5.1 . - ()
(-, ) .

12/ 255 (NSG10,
. . . , ).
,

,
.: 17

RU 2 476 620 C1

10

15

20

25

30

. ,
,
.
,
.
.56,
- (), ,
[20]. .6
-,
250 . .7 .
- PHI-660 (Perkin Elmer, )
0.5 5 .
- ,
, .5,
, .
, Si Si(O). ( ,
),
, , Si Si(O)
( 3 ) - - Si92 Si(O)-78 . - Si
, .

.

.
, ,
( 750 150) [14]. .8
- [14].

35

40

45

50

.: 18

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

.: 19

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

.: 20

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50

.: 21

RU 2 476 620 C1

10

15

20

25

30

35

40

45

50


1. ,
,
, ,
, ,

,

.
2. .1, ,
.
3. .1 2, ,
.
4. .1, ,
,

.
5. .1 4, ,
,

.
6. .4, ,

, ,
, - ,

.
7. .6, ,


.: 22

CL

RU 2 476 620 C1

10

15

20

.
8. ,
,
, , ,
,
,
,

,
,

,
,
.
9. .8,
.
10. .8, , ,
, /
, ,
.
11. .8,
/ .

25

30

35

40

45

50

.: 23

RU 2 476 620 C1

.: 24

DR

RU 2 476 620 C1

.: 25

RU 2 476 620 C1

.: 26

RU 2 476 620 C1

.: 27

RU 2 476 620 C1

.: 28