Making Sense!

Pressure Sensor
2009 Sensor Fundamentals #009

Outline
here are many types of pressure sensors to detect the pressure placed upon liquids and gasses. In this session the H1 type refrigerant pressure sensor will be used as an example to explain sensor construction, and detection principles.

Pressure Sensor Examples

Pressure Range 10 kPa Sensor Name/Type TAPS 100 kPa MAPS H1 5 MPa 20 MPa H1-20 H2 180 MPa

BAPS

H3

Engine Intake Application Fuel Tank Internal Pressure Manifold Pressure Example Atmospheric Pressure (EMS Use)

A/C Refrigerant Pressure Direct-Injection Rail Pressure Engine Oil Pressure Engine Fuel Pressure (Diesel Vehicles Use) Power Steering Oil Pressure Suspension Oil Continuously Variable Pressure Transmission (CVT) Oil Pressure Brake Oil Pressure Compressed Natural Gas (Master Cylinder, (CNG) Fuel Pressure Accumulator)

Construction
he H1 type pressure sensor is constructed primarily from a housing, O-ring, and sensor chip. The sensor chip measures 3 mm on each side, with a sensor element located in the center.

Sensor Construction
Connector Case 3 mm

In This Issue Outline Construction  Operation Next Issue Wheel Speed Sensor

O-Ring Sensor Chip Sensor Element

Encased Oil Housing Metal Diaphragm

Sensor Chip

 Sensor Element Construction

The sensor element is made from singlecrystal silicon with a thickness of 300 m, forming a diaphragm shape. In addition, a bridge circuit is created on the sensor element from four diffusion resistors.
Diaphragm

Pressure Diffusion Resistors (Bridge Circuit)

300 m Pedestal Vacuum Chamber

Operation
f pressure is applied to the inside of the sensor, a metal diaphragm depresses, transmitting the pressure through the enclosed oil to the sensor element on the chip. When the sensor element diaphragm changes shape due to the applied pressure, the value of the diffusion resistors forming the element also changes due to the Piezoelectric resistance effect*. As a result, the sensor outputs the pressure change as a change in voltage.
* The Piezoelectric resistance effect is a phenomenon under which electric resistance changes due to an applied stress.

Output

Sensor Chip

Encased Oil

Metal Diaphragm

Pressure

Pressure

Sensor Output Characteristics (Example: Refrigerant Pressure Sensor)

High

Voltage

Low Low High Refrigerant Pressure

 Pressure sensor usage example in a car A/C cycle

The pressure sensor used in car A/C cycles is known as a refrigerant pressure sensor, and is positioned in the piping between the condenser and the expansion valve. The refrigerant pressure sensor detects refrigerant pressure, and then outputs the value to the A/C ECU as a voltage change. The A/C ECU uses the pressure information to control items such as the discharge volume for variable capacity compressors, and electric fan rotational speed.

Evaporator Expansion Valve

Compressor

Refrigerant Pressure Sensor

Condenser

LA990009-2390
2009 DENSO Sales California, Inc. All rights reserved. This document may not be reproduced or copied, in whole or in part, without the written permission of the publisher. Denso Sales California, Inc. reserves the right to make changes without prior notice. 9/2009