Advanced Semiconductor Devices Lecture 5

Lecture outline
Review Photodiode Pixel Structure MOS Transistor overview and fabrication Basic two-terminal MOS structure Regions of operation Solution for charges and potentials Approximations for regions of operation All figures based on Tsividis, McAndrew, Operation ans Modeling of the MOS Transistor Copyright Oxford University Press

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Photo-current generation
Practical pn-junction photodiode under reverse bias

hn

hn

n+

GL ( x )

p ; NA
x

xn

xp

xc

One-side junction

n+ = N D ? p = N A

xn 0, x p W
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Junction current
The total current is the sum of dark and photon generated currents

J = J PH

Dn 1 -a W + J 0 = qF0 1 e + qn p 0 Ln 1 + a Ln J

J0 J PH qF0

VA

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3T APS design

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MOS Transistor overview

Basic MOS Transistor structure

Lilienfield patent from 1930

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MOS Transistor fabrication techniques

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MOS Transistor Crossection

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MOS Transistor SEM imsage

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Basic semiconductor equations

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Contact potentials

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Basic two-terminal MOS structure - capacitor

Gate Insulator Semiconductor Body

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Interface charge
Parasistic interface charges Contact potential

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Flatband voltage
Assume Need to apply external voltage in order to straighten energy bands

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Voltage and charge balance

Total charge in semiconductor body

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Electron charge density

Surface electron charge density

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Charge inversion
Inversion charge basis of current transport

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Regions of operation
Flatband

Accumulation

Depletion and inversion

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Charge density and Poisson equation

Solution for semiconductor charge

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Charge density and Poisson equation

Charge density as a function of distance

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Solution of Poisson equation

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Solution of Poisson equation

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Solution for surface electric field

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Solution for semiconductor charge

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Charge and potential balance

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Semiconductor charges and potentials

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Solution for gate voltage

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Accumulation
Condition for charge accumulation

Approximate solution for charge accumulation

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Deep Depletion

Condition for depletion Approximation for gate voltage in depletion

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Inversion

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Gate voltage and surface potential in inversion

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Weak inversion

Since
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Approximation for inversion charge in strong inversion

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Strong inversion

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Moderate inversion

No simple solution for semiconductor charges and potentials in moderate inversion !!!

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