Crystal Growth Technology

Application Field Application Field Market Development Market Development

Towards Ubiquitous & Ambient Devices

market trend High-performance, Multi-function, Low-cost, Low-consumption
ENVIRONMENT toxic metals Pb free

ENERGY
solar cellThermoelectric conversion

RESOURCE
rare metalsIn,Pt free

MEDICAL
medicine diagnosis

SPACE
robust radiation-resistant

for electronicsSOISi-GeStrained Si
Basic Technology Elemental Technology Basic Technology Elemental Technology Material Technology Material Technology
Ultimate highly-integrated devices

Merge to Si
Si photonicsMRAM silicide GaNAlN ZnOdiamond

Enlarge
solar cell display

for photonics
From ultraviolet to tera-Hz

point-defect control frequency conversion hetero-epi

Down-scale
bionano

Flexible
wearable devices

for spintronics
High performance memories

Magnetic semiconductor, Halfmetal, Metal-insulator hybrid

soft crystals Organic crystals, Carbon nanomaterials, Nano particles

Potential of novel crystalline materials
self-assembly printable under an external field low-dimensional nano-structure

Growth Technology Growth Technology

advanced growth technology

Large diameter, nano-scaling, perfect crystaldefect-free, purehighly-integration control of valence electron, stoichiometry control

non-equilibrium materials

New material designsilicide, oxide, etc. Breakthrough of simulation and characterization technologies

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Crystal growthSubmap of III-V related Technologies

AlGaN-based BN-based AlN bulk growth, Highly quality epitaxy, p-type conductivity High power and RF devices Deep UV light sources (Optical memory, Sterilizing, Medical, Processing) LED for general illumination, Lightning design Semiconductor green laser diode Normally-off electron devices with high breakdown voltage Laser diode for telecom. Solar cell

Nitrides

InGaN-based GaN bulk growth, Nonpolar growth, Reduction of crystal defects InN-based

Heteroepitaxy, Reduction of crystal defects, p-type conductivity, Novel device structure

Diluted Nitrides (III-V-N) Diluted Magnetic Semicon.

GaInNAs-based High quality, Control of localized N, InGaNP-based Control of conductivity

Laser diode for telecom., Single photon source Highly efficient solar cell Opto-electronic integrated circuit (OEIC) Optical isolator Spintronics device

(Ga,Mn)As-based Ferromagnetism at RT Magnet-Optical-effect (Ga,Cr)N-based High quality, Novel growth technology Bulk substrate Large wafer size, Perfect crystal Mixed crystal substrate (AlGaN, InGaAs)

Highly quality substrate for III-V epitaxy Optical devices for telecom. Mid-IR/THz devices (Environmental measurement, Spectroscopy, Imaging) Highly performing nano devices (QD laser, LED, sensor) Si photonics, OEIC, Ultra high-speed III-V FET on Si

Base Technology Nanostructures (QD, nanowire, nanocolumn) Self-organization, Selective-area-growth In-situ controlled epitaxy, Atomic manipulation

Control of ISBT (GaN/AlN, (Al,Ga,In)(P,As,Sb)-based) Pioneering unexplored wavelength region Atomically controlled epitaxy, Control of heterointerface

Integration with Si and heterogeneous materials Heteroepitaxy (buffer layer technology, microchannel-epitaxy), Bonding, Control of crystalline structure, Low-temperature epitaxy

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Crystal GrowthSubmap of II-VI and multinary compounds

Chalcopyrites

CuInSe2

improvement of crystallinity, band gap control, low cost deposition process defect control

Solar Cells

CdTe

X-ray detectors magnetism, nano-structures Spintronics

large area ZnO-bulk

Merging with existing technologies (SAW, gas sensors, phosphors, etc.)

Transparent Conductive Oxides

Substrates for GaN impurity, conductivity, High efficiency UV Laser pn-junction, interface Low cost LED Transparent Merging with high conductivity, In-free transparent films, multi-functional System Si large area Flexible display on devices Transparent transistors, Chip nano-structures Bio-sensors Transparent magnets, ferromagnetism at RT Spintronics
non outgas, non charging-up, CathodoluminescenceFED,VFD), low voltage Electroluminescence

Phosphors

improvement of chromaticity, efficiency surface modification

Photoluminescence white-LED, PDP) Nanosizing phosphors

Ultra high resolution display, efficient lighting

trends of elemental technologies stoichiometry, defect control, perfect crystal, low temperature growth, hetero epitaxy

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Crystal Growth submap of group & organic crystals Development of

Down-sizingHighly-integrationLow-consumption substrates Large diameter, ControlReduceAssessment of impurities and defects Printable growth Nano-scaling, Surface modification Ball-Si, Rectangular growth single-, poly-, -crystals

Processing technology Integration issues

Beyond CMOS

Si
thin films particles

New functional devices

New conceptual ULSI

SOI, Si-Ge, Ge, Strained IV sub., Merge with III-V channel

Flexible substrate
Print electronics

Defect control, Impurity control Merge to Mass synthesis, Structure control

Solar cells with high efficiency

Battery

EnvironmentalEnergy

Carbon
(nano-materials)

Crystal growth and control of nanocarbon materials carbon nanotube, Fullerene etc.
Drug delivery Widegap semiconductors

NanoBio Display

Diamond

Large diameter, Defect control Organic crystals

Power devices Nano-photonics

Self-assembly of organic materials

Organic devices Flexible devices

Crystal growth control of protein and DNA

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Crystal growthOxides and related materials Conventional Fields

Technological Interaction
Nature friendly

Quartz, LN, LT oscillator, filter, SAW, optical device, pyroelectric sensor PyroFree LT/LN downsized,low-cost,higher-frequency SAW Towards Lead-Free

Piezoelectric device Wavelength conversion/ Laser/ UV-VUV Substrate

Pb-based relaxor (single- and poly-crystal) Large el.-mech. coupling coef. ultrasonograph

Tech. Fusion with MEMS

Non-linear Optics (NLO)/domain-controlled QPM laser TV/ communication, sensing and medical application NLO/QPM UV-VUV alternative of excimer laser Eyesafe laser environmental, medical, and aircraft instruments Liquid immersion litho., UV lens Al2O3 (LED/LD) Transparent conductive substrates

Resource saving
with higherpower and performance

LSO, LYSOhalogen compd.new material system faster,brighter, denser Gamma-ray detection; medical(PET), oil exploration, cosmophysics

Towards a ubiquitous society Towards a secure and safe society

Tech. Fusion of magnetism electricity and optics in nano/meso-scale

Scintillator

Single crystals / transparent ceramics X-ray detection; medical(CT/ Mammography), security (nondestructive detection) Higher luminescence Neutron detection; medical and security applications

Multi-ferroic materials

coupling between magnetism and dielectric properties

New materials and applications

transparent ceramics, superconductor, boron-, carbon-, halogen- compounds

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Crystal GrowthSemiconducting Silicides and Related Materials

Device Applications Stand-alone Devices Application to Energy Devices Thermoelectric Devices Mg2Si1-xGex MnSi1.7, Fe1-xMnxSi 2 High-efficiency Thin-film Solar Cells Photonic Crystals

Ba1-xSrxSi2 /Si -FeSi2 ErSi2, TaSi2

Application to Photonic Devices

Application to Nano-electronics On-silicon Devices Application to Light Emitters Application to Spintronics Materials Science CVT & Solution Growth of FeSi2 Bulk Fundamental Studies on Silicides -FeSi2/ Insulator Ca2Si, Sr2Si, SrSi2, BaSi2

Nano-Silicides, Nano-wires Silicide Nano-devices Using MEMS & Fine Processing -FeSi2/Si LSI Optical Interconnect Spin-Transistors & Memories

Fe3Si, Fe2CoSi/SiGe, CaF2

Large-Size Single-Crystalline Silicide Bulk Band-gap Engineering Physical Properties of Silicide Functional Heterointerface Conductivity Control -FeSi2/Si High- Luminescence

Amorphous FeSi2 & nc-FeSi2 Fe(SiGe)2 Systematic Study of Silicides New Silicides and New functions

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Crystal GrowthSubmap of growth technologies

trend trend of of growthtechnology technology growth
enlarge large area & high uniformity
large crystal boules & wafers

low cost

massproductioncarboneous materials

nano nano-sizenano-crystal, self-organizationorganic crystals, protein

artificial superlattice3D periodic structure, low-dimensional nanostructurenanotube, surface modification,

multi-components, nonequilibrium, low-&room-temperature growth, flexible materialssoft crystal

high performance new features

fusion printing, nanoimprint, MEMS, organic chemistry, polymeric chemistry eco energy savingCO2 reduction, growth without toxic substances & scarce resources
stoichiometry, impurity & dopant concentration

environmental harmony

growthtechnology technology growth specificto to specific individualcrystals crystals individual

defect control control, crystal defect

perfect crystal

strong electromagnetic fieldalignment films on metal, giant protein, photo-excitation, applying ultra-high pressuresupercriticalplasma, micro gravitysolid solution, alloy crystal external field multi-component oxide, semiconductor, strong gravity

interface & grain heteroepitaxy, dissimilar material bonding, grain boundary transparent formation control conductive ceramics, orientationorientational polycrystal, spin coherency
analysis of growth process, lattice/band structures, novel evaluation technique material design technology using simulation, system designed for growth under extreme condition

simulation simulation and and growthsystem system growth

proposal of new materials with novel properties and features

purification of raw materials & furnace components, new environmentally(heat, corrosive)-resistant componentscrucible, database on material properties efficient use of scarce resources recycle, reuse

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Contribution into Environment and Energy of Crystal Growth Technology

IV Single-crystal/Poly-Si, Thin-film Si Large area, Control of impurity, Reduction of crystal defects InN-based III-V Reduction of crystal defects, Heteroepitaxy Compound semiconductor solar cell Next Genera tion Energy Si solar cell

GaInNAs-based, InGaNP-based High quality, Control of localized N CuInSe2 , CdTe Improvement of crystallinity, Control of bandgap Application to energy devices

II-VI

Silici de

Ba1-xSrxSi2 /Si

Low-cost, high-efficiency solar cell Thermoelectric device In-free transparent conductive film Battery application
(Fuel cell, Li-ion battery)

Mg2SiGe, MnSi1.7, Fe1-xMnxSi 2 Control of bandgap ZnObased Conductivity, Largescale uniform

II-VI IV

Nanocarbon, Superparticle

Mass synthesis, Control of structure Nano-scaling, Surface modification

InGaN-based, AlGaN-based III-V

Reduction of crystal defects, Nonpolar growth, p-type conductivity

Full-color lighting, General lighting, Deep-UV light source Spectroscopy, Imaging (Mid-IR/THz devices) Pb-free piezoelectric element

Resour cecesaving / EnergyEnergySaving Environ mental Measur ement / Control

(Al,Ga,In)(P,As,Sb)-based SLS Atomically controlled epitaxy, Control of heterointerface

Oxid e

Pb-based piezoelectric Piezo Development of Pb-free electrics materials with high electromechanical coupling factor

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