SEMATECH 157nm Technical Data Review, 11 December 2001, Orlando, Florida

Stress-Optical Coefficients of
157 nm Materials
John H. Burnett
National Institute of Standards and Technology
Gaithersburg, Maryland

Support from SEMATECH

Stress-Optical Coefficients at 157 nm

Need to determine effect of grown-in stress on optical properties
Need to calculate the effect of external stress
Unknown for CaF2, BaF2, and any other material in the VUV
Effect of stress ij on optical properties given by:
( K 1 )ij = qijkl kl ( ( K 1 )i = qij j abbreviated notation)

qijkl piezo-optic tenser (4th rank)

For cubic crystals with fluorite structure Fm3m (classes 43m,432,m3m)
Crystal symmetry 36 components 3 independent components: q11 , q12 , q44

q11
q
12
q12
qij =
0
0

q12
q11

q12
q12

0
0

0
0

q12
0

q11
0

0
q44

0
0

q44

0
0
0

0
0

q44

For uniaxial stress in direction n$ = x"1 sin cos + x"2 sin sin + x"3 cos
( K 1 )1
q11 sin 2 cos 2 + q12 (sin 2 sin 2 + cos 2 )

1
2
2
2
2
2
K
(
)

q
q
sin

sin

(sin

cos

cos

)
+
+
2
12

11

1
2
2
( K )3

q11 cos + q12 sin

1
K
q
(
)
sin

cos

sin

4
44

1
( K )5

q44 sin cos cos

2
1
q44 sin sin cos

( K )6

[001]

[010]

[100]

But for stress along cube axes and cube diagonals, index uncouples coefficients:
P

q11

100

n|| = (n3 /2) q11 P [100]

q12

q44

100

n _| = (n 3/2) q12 P [100]

E
k

111

n|| n _| = (n 3/2) q44 P [111]

Uniaxial Stress Apparatus

Stress-Induced Birefringence
motor

aperture filter
paralobic
mirror

Rochon
linear
polarizer

aperture

aperture

sample

shutter

chopper

Rochon
linear
polarizer
crossed
polarized

beam
splitter

paralobic
mirror

ground glass
diffuser plate

stress
apparatus
electrodeless
dischage lamp
(Hg and Xe)

detector

aperture
camera
lens

lock-in amplifier
spherical
collection
mirror

(q11

- q12) = (N/P)2/tn
3

q44 = (N/P)2/tn

[111]

[100]

CCD camera

video

to chopper

Stress Birefringence Constant q11-q12

-1

Stress-Optical Coefficient ( q11-q12) (Pa )

-5.00E-012

-4.00E-012

BaF 2
-3.00E-012

MFS
-2.00E-012

CaF 2
-1.00E-012

0.00 E+ 000
60 0

5 00

400

300

Wavelength (nm)

200

100

Absolute Stress-Optical Coefficient q44

1.40E-012

-1

Stress-Optica l Coefficient q44 ( Pa )

1.60E-012

1.20E-012

B aF2

1.00E-012

CaF2

8.00E-013
6.00E-013
4.00E-013
2.00E-013
0.00E+000
600

500

400

300

Waveleng th (nm)

200

100

Absolute Stress-Optical Coefficients

Twyman-Green Interferometer
interferometer
flat mirror
spherical
focusing
mirror

sample
compensator
beam splitter
compensator

electrodeless
dischage lamp Rochon
(Hg and Xe) polarizer shutter filter

stress
apparatus
aperture

interferometer
flat mirror

beam
splitter

flat mirror/
reflection
filter
sample

flat mirror
motor
beam splitter
spherical
columnating
mirror

fringe shift per unit stress change

3

(N/P) = (2t/) [(n /2) q11{q12} - (n-1)s12]

spherical
focusing
mirror

phospher plate
shutter
or ground glass
diffuser
camera
lens

detector

CCD camera
video

Absolute Stress-Optical Coefficient q12

3.00E-012

-1

Stress-Optical Coefficient q12 ( Pa )

2.80E-012

MFS

2.60E-012
2.40E-012

BaF 2

2.20E-012
2.00E-012
1.80E-012
1.60E-012
1.40E-012

CaF 2

1.20E-012
1.00E-012
600

500

40 0

300

Wavel ength (nm)

200

100

Absolute Stress-Optical Coefficient q11

6 .00E-013

-1

Stress-Optica l Coefficient q12 ( Pa )

4 .00E-013

MFS

2 .00E-013
0.00E+000
-2 .00E-013

Ca F2

-4 .00E-013
-6 .00E-013
-8 .00E-013

Ba F2

-1 .00E-012
-1 .20E-012
-1 .40E-012
-1 .60E-012
600

500

400

300

Wavelength (nm)

200

100

Stress-Birefringence Results

Coefficients
(10-12 Pa-1)
CaF2
q11-q12
q11
q12
q44
BaF2
q11-q12
q11
q12
q44
mSiO2
q11-q12
q11
q12

546.38 nm

435.96 nm

365.12 nm

253.73 nm

193.09 nm

156.10 nm

157.63 nm
(linear int.)

1.530.02
0.380.06
1.150.06
0.750.010

1.550.02
0.400.06
1.150.06
0.740.01

1.570.02
0.350.05
1.220.09
0.740.01

1.660.02
0.320.05
1.340.13
0.730.01

1.770.02
extrap. 0.3
extrap. 1.5
0.660.01

1.910.05
extrap. 0.3
extrap. 1.6
0.450.01

1.90
extrap. 0.3
extrap. 1.6
0.46

3.100.03
0.930.10
2.170.10
0.990.02

3.150.03
0.970.10
2.180.10
1.010.02

3.210.03
1.080.15
2.130.15
1.010.02

3.440.03
1.410.20
2.030.20
1.040.02

3.710.04
extrap. 1.7
extrap. 2.0
1.080.02

4.420.04
extrap. 2.4
extrap. 2.0
1.310.02

4.39
extrap. 2.4
extrap. 2.0
1.30

2.340.022
0.330.10
2.670.1.0

2.370.02
0.220.10
2.590.10

2.410.02
0.110.15
2.520.15

2.550.02
0.200.15
2.350.20

2.760.03
extrap. 0.4
extrap. 2.3

3.040.03
extrap. 0.8
extrap. 2.2

3.03
extrap. 0.8
extrap. 2.2

Summary
We have determined the complete set of stress-optical coefficients needed to
determine the effect of stress on the index of CaF2, BaF2, and a form of VUV
fused silica:
(q11-q12) and q44 from the visible through 156 nm
q11 and q12 from the visible through 254 nm
To obtain these we built a Twyman-Green interferometer that operates on
atomic spectral lines from the visible through the fused silica beam splitter
cutoff near 200 nm.
Using our new CaF2 beam splitter will allow measurements down to below
157 nm ( by Jan. 2002.)
To Do:
Measure the absolute coefficients q11 and q12 for CaF2, BaF2, and fused silica
at 157 nm (Jan. 2002)
Measure the stress-optical coefficients for other important VUV materials,
including SrF2, LiF, and possibly mixed crystals