Mems Based Energy Harvesting

Guided by Dr. M.R. Baiju Professor Dept. of ECE CET Presented by VISAKH.V M4 AEI, ROLL NO:12

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Overview

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Characteristics of Various Vibration Sources

According to the study only the rst 500 Hz of the spectra is important. First, there is a sharp peak in magnitude at a fairly low frequency with a few higher frequency harmonics. Another observation is that the fundamental vibration frequency for almost all sources is between 70 and 125 Hz.

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Vibration to Electricity Conversion Model

Figure: Generic vibration converter

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Vibrations to Electricity Conversion Methods

There are mainly three main methods for converting the energy from vibrations to electrical energy. They are Electromagnetic Power Conversion Elecrostatic Power Conversion Piezoelectric Power Conversion

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Piezoelectric Power Conversion

Piezoelectric Power Conversion

The constitutive equations for a piezoelectric material are given in equations ?? and ?? . = + dE (1) Y D = E + d where: is mechanical strain is mechanical stress Y is the modulus of elasticity (Youngs Modulus) d is the piezoelectric strain coefcient E is the electric eld D is the electrical displacement (charge density) is the dielectric constant of the piezoelectric material (2)

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WORK DONE AND RESULT

The work done for the thesis includes the following. Familiarized Coventorware(Design and Analysis Software) Design and Analysis of Cantilever Beam in Coventorware Design an Analysis of Piezoresistor in Coventorware Familiarized Mems+ Interfaced Mems+ with Matlab Designed Mems Switch in Mems+ Analysed Mems Switch in Matlab Designed Energy Harvester Structure in Mems+

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Design and Analysis of Cantilever Beam

Design and Analysis of Cantilever Beam

Figure: Solid Model of Cantilever Beam

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Design and Analysis of Cantilever Beam

Modes of Vibration

Mode 1

Mode 2

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Design and Analysis of Cantilever Beam

Mode 3

Mode 4

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Design and Analysis of Cantilever Beam

Mode 5

Mode 6

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Design and Analysis of Cantilever Beam

Pull in with Cosolve

Figure: Pull in Analysis Plot

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Design and Analysis of Cantilever Beam

Liftoff with Cosolve

Figure: Lift off Analysis Plot

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Design and Analysis of Piezoresistor

Solid Model of Diaphragm

Figure: Solid Model of Diaphragm

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Design and Analysis of Piezoresistor

A new MemPZR analysis is set up using the above model. And with a voltage difference of 1V applied to the electrodes and a 0.2N of force appied , the resulting currents at the electrodes is obtained. Patch voltage Patch Current % change in current in1 1 1.462025E08 4.430218 in2 1 1.332666E08 -4.809469 out1 0 -1.462025E08 4.430218 out2 0 -1.332666E08 -4.809469

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Mems Switch

Mems Switch Model in Mems+

Figure: Mems Switch Model in Mems+

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Mems Switch

Simulink Model

Figure: Simulink Model

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Mems Switch

Pullin Voltage

Figure: Simulink Model

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Energy Harvestor Circuit in Mems+

Materials Used

The piezoelectric energy harvesting structure process ow is designed in MEMS+. The materials used for the process are Silicon (Proof Mass) SiO2 AlN(Piezoelectric Material) Al(Electrical Contact)

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Energy Harvestor Circuit in Mems+

Process Flow

Silicon material is deposited over a substrate to dene the proof mass layer and also the anchor part.This layer has a height of 400 um. The next step is the deposition of oxide layer over this layer. The oxide layer has a thickness of about 0.5 um . Then another layer of silicon is deposited over this layer with a thickness 5 um. Then the piezoelectric material AlN is deposited over this layer with a thickness of 1 um. After etching , Aluminium is deposited to dene the electrode contacts.

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Energy Harvestor Circuit in Mems+

Mask Layouts

Figure: Mask for the rst Silicon layer

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Energy Harvestor Circuit in Mems+

Figure: Mask for the rst SiO2 layer

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Energy Harvestor Circuit in Mems+

Figure: Mask for the Si layer

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Energy Harvestor Circuit in Mems+

Figure: Mask for the AlN layer

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Work to be Done

System level Analysis of Energy Harvester Circuit Using Matlab and Mems+ FEM Analysis of the EH circuit using Coventorware Multiphysics Analysis of the circuit using Comsol

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