MEMS1082/ME2082

Mechatronics
Chapter 9 Resistive Sensors 9-3

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Background Theory

For Metal Strain Gauge: Resistance R (Ohm, ) and resistivity (m) L

R=

For Semiconductors: The piezoresistive effect describes the changing resistivity of a semiconductor due to applied mechanical stress/strain. Gauge factor G of a piezoresistive device

G=

R R

axial

Axial strain Stress

axial

L = L

axial

Force = A

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Metal foil strain gauge

,

Strain gauge structure

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Strain gauge configurations

,

Various Strain Gauge Configurations

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Gauge Factor
,

Gauge factor of metal foil strain gauge

ln R = ln + ln L ln A dR d dL dA = + R L A
dh dw dL = = h w L
dR d = + axial + 2 axial R dR R = (1 + 2 ) axial + d

A = wh dA dh dw = + A h w

L R= A

dA dL = 2 A L

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Gauge Factor
,

Gauge factor of metal foil strain gauge

dR R = (1 + 2 ) axial + d

dR R

axial

= (1 + 2 ) +

axial
Piezoresistive effect for semiconductors

F: Gauge factor

F=

dR R

axial
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Strain Gauge Bridge

,

Static bridge circuit for strain gauge In the balance state

High impedance VM

The unknown resistor R1:

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Strain gauge bridge circuit

,

Dynamic unbalanced bridge circuit

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Leadwire effect in bridge circuit

,

If strain gauge located far from the bridge circuit

Lead wire resistance R can be effect by temperature

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Temperature compensation
,

Temperature change can cause significant change in resistance Using a dummy gauge

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Stress measurement with strain gauge

Uniaxial stress

x = E x
P x = A
P = AE x
Precision Strain Gages 1-Axis General Purpose

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Review: Stress-strain

Hooks Law..

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Review: Planar stress

Principal stresses

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Review: Planar stress

Principal stresses

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Stress measurement with strain gauge

Biaxial stress

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Stress measurement with strain gauge

,

Biaxial stress

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Stress measurement with strain gauge

,

Biaxial strain gauges for measuring axial strain 0/90 gauge pattern

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Stress measurement with strain gauge

,

General state of planar stress on the surface of a component

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Stress measurement with strain gauge

,

Common rosette configurations

For rectangular rosette configuration

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Stress measurement with strain gauge

,

Three -Element Strain Gage Rosettes, Pre-Wired

Rectangular strain gage rosette

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Stress measurement with strain gauge

,

For equiangular rosette configuration

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Stress measurement with strain gauge

,

For T rosette configuration

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Piezoresistive strain sensors

,

dR R

axial

= (1 + 2 ) +

axial

The change in resistivity may be related as follows

where i and j take values from 1 to 6, denoting the parameters in the corresponding strain direction and is the piezoresistive coefficient. Material such as single crystal silicon has a cubic crystal structure, of which can be described using three constants 11, 12, and 44.
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Piezoresistive strain sensors

,

dR R

axial

= (1 + 2 ) +

axial

The change in resistivity may be related as follows

where i and j take values from 1 to 6, denoting the parameters in the corresponding strain direction and is the piezoresistive coefficient. Material such as single crystal silicon has a cubic crystal structure, of which can be described using three constants 11, 12, and 44.
Department of Mechanical Engineering