BOC Edwards is a world leader in vacuum technology, coating systems, components and instrumentation - for applications in research and

development through to full scale production - particularly in the fields of compound semiconductor, LED, LC/MS, optical components and ophthalmics.
EUROPE / UNITED KINGDOM Manor Royal Crawley West Sussex RH10 9LW Tel: +44 (0)1293 528844 Sales: 08459 212223 Aftersales: 08453 024242 General Fax: +44 (0)1293 533453 Sales & Aftersales Fax: +44 (0)1293 534149 AMERICAS 301 Ballardvale Street Wilmington MA 01887 Tel: +1 978 658 5410 Fax: +1 978 658 7969 Toll Free (USA only) Tel: +1 800 848 9800 CANADA 5860 Chedworth Way Mississauga Ontario Canada L5R 0A2 Tel: +1 800 387 4076 Fax: +1 905 501 1225 BRAZIL Rua Bernardo Wrona 222 02710-060 Sao Paulo SP Brasil Tel: +55 11 3952 5000 Fax: +55 11 3965 2766 FRANCE 125 Avenue Louis Roche 92238 Gennevilliers Cedex Paris Tel: +33 1 47 98 24 01 Sales: +33 141 21 12 56 Aftersales: +33 141 21 12 45 General Fax: +33 1 47 98 44 54 Sales & Aftersales Fax: +33 141 21 12 38 BELGIUM Bergensesteenweg 709 B 1600 Sint-Pieters-Leeuw Tel: +32 2 3630030 Fax: +32 2 3630064 GERMANY Ammerthalstrae 36 85551 Kirchheim Munich Sales: 0 800 000 14 56 Services: 0 800 000 14 57 General Fax: +49 89 99 19 18 99 Sales & Aftersales Fax: +49 89 99 19 18 88 ITALY Via Carpaccio 35 20090 Trezzano sul Naviglio Milan Tel: +39 02 48 4471 Sales: +39 02 47 447242 Aftersales: +39 02 48 447217 Fax: +39 02 48 401638 INDIA 203 Surya Kiran Building 19 Kasturba Gandhi Marg New Delhi - 110 001 India Tel: +91 11 4151 0065 Fax: +91 11 4151 0245 ISRAEL 5 Habarzel Boulevard Gat 2000 Industrial Zone Qiryat Gat 82000 Tel: +972 8 681 0633 Fax: +972 8 681 0640 CHINA 23 Fu Te Road(N) Wai Gao Qiao Free Trade Zone Pudong, Shanghai 200131, China Tel: +86 21 5866 9618 Fax: +86 21 5866 9993 JAPAN 1078-1, Yoshihashi Yachiyo-shi, Chiba Japan, 276-8523 Tel: +81 47 458 8831 Fax: +81 47 458 8835 SINGAPORE 42 Loyang Drive Loyang Industrial Estate Singapore 508962 Tel: +65 6546 8408 Fax: +65 6546 8407 TAIWAN, R.O.C. No. 434 Chung-Hwa Road Toufen Town, Miaoli County 351 Taiwan Tel: +886 37 611422 Fax: +886 37 611401 KOREA 5th Floor Daewoo Engineering Building 9-3 Sunae-dong Bundang-gu, Sungnam City Kyungki-do, Korea Tel: +82 31 716 7070 Fax: +82 31 738 1001 AUSTRALIA 1688 Ipswich Road Rocklea Qld, 4106 Australia Tel: +61 7 3212 4308 Fax: +61 2 9886 9249

PLEASE CONTACT ANY OF THE ABOVE FOR DETAILS OF OTHER SALES AND SERVICE CENTERS IN YOUR AREA. BOC Edwards and the stripe symbol are trade marks of The BOC Group plc. BOC Limited 2006. All rights reserved. Publication No: C10006895

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Laboratory Equipment
vacuum products, measurement and accessories

Laboratory Equipment
vacuum products, measurement and accessories

Products you can rely on, from a company you can trust.
BOC Edwards is a world leader in the design, technology and manufacture of vacuum products for laboratory applications. From the smallest school laboratory, to international R&D projects, our products and services are facilitating education, development and scientific evolution across the globe.

Application Guide
All our products at a glance for common laboratory applications

Vacuum Products
Vacuum products and accessories designed for laboratory applications

Measurement
Pressure measurement and display options

Hardware
Vacuum components and accessories for configuring your vacuum system

Service and Support

Cost-effective support and service from the experts

Reference Guides
Quick reference guides to Common Conversion Factors, Outgassing Rates and more

Application Guide
Pump Type Application
General Laboratory
Gel dryers Rotary evaporation Centrifugal concentration Vacuum ovens Vacuum filtration Distillation/extraction apparatus Freeze dryers Ultra high-speed centrifuges Pumping oxygen/oxidants XDS XDS XDS XDS XDS D-LAB XDS XDS RV/EM RV/EM XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS XDS D-LAB RV RV RV D-LAB 20 / 16 20 20 / 12 20 / 12 20 / 12 16 20 / 16 20 12 / 8 12 / 8 20 / 12 / 8 20 / 12 / 8 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 / / / / / / / / / / / / / / / / 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 / / / / / / / / / / / / / / / / 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 Wet Dry

Page Number

RV/EM* RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM RV/EM

Leak Detection
Leak detection

Scientific Instruments
Electron microscopes Mass spectrometers Inlet systems (eg., electrospray) Molecular beam epitaxy Lasers Surface science electron spectrophotometers Sulphur chemiluminescence detectors Particle size analysers High-energy physics Load locks Coating technology Fume hoods and glove boxes Backing turbomolecular pumps Backing diffusion pumps Refrigeration and air conditioning Display technology

* PFPE pump option required.

Accessories
Optional: condenser and separator Optional: condenser and separator All supplied with the pump. RV - gas ballast oil return Optional: condenser and separator. RV - gas ballast oil return Optional: condenser and separator Optional: condenser and separator All supplied with the pump Recommended: mist filter and gas ballast oil return Recommended: mist filter and gas ballast oil return. Optional: FLK20K

Recommended: mist filter and FL20K. Gas ballast oil return. Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: Recommended: mist mist mist mist mist mist mist mist mist mist mist mist mist mist mist mist filter and FL20K. XDS - None required filter. Optional: FLK20K. XDS - None required filter. XDS - None required filter and FL20K. XDS - None required filter and FL20K. XDS - None required filter and FL20K. XDS - None required filter and FL20K. XDS - None required filter and FL20K. XDS - None required filter. Optional: FLK20K. XDS - None required filter. XDS - None required filter and FL20K. XDS - None required filter. XDS - None required filter and FL20K. XDS - None required filter. XDS - None required filter. Optional: FLK20K. XDS - None required filter. XDS - None required

Vacuum Products

BOC Edwards is a technology leader in the manufacture of vacuum pumps and systems, with products specifically designed to meet the evolving challenges of laboratory markets. With more than thirty years of experience in scientific applications, we have a deep understanding of the research process and the role that vacuum plays at every step. This experience, coupled with innovative technologies and collaborative engineering enables us to offer a broad range of pumping solutions that reduce cost while enhancing performance.

Small Rotary Pump Range

EM Range RV Range
BOC Edwards offers the RV and EM Series of small, rotary vane pumps. Available in a range of pumping speeds and offering ultralow noise levels, the RV and EM Series of pumps are ideal for a wide range of laboratory applications and environments. The RV Series are unique in their ability to deliver high or low throughputs with high ultimate vacuum. Through collaboration with the major analytical instrument manufacturers, we develop and support innovative vacuum products that underpin the customer's entire research process. This collaboration is what has made RV pumps, from BOC Edwards, the industry standard for scientific primary pumping applications for over ten years.

Turbomolecular Pump Range

EXT and pumping stations STP
BOC Edwards offers the EXT and STP Series of turbomolecular pumps. The EXT Series offers state-of-the-art technology to provide reliable, clean, high and ultra high vacuum. The EXT range are also components in our convenient, configurable EXPT cart systems that offer plug and play operation. STP turbo pumps offer optimal performance and reliability with over 400 cumulative man-years of technical and design experience and a worldwide install base of more than 70,000 pumps.

Vacuum Coating Systems

Auto 306 Auto 500 TF600 Scancoat Six
BOC Edwards offers a broad capability in coating technology from small, pre-production R&D systems to large, full-scale production systems as well as innovative control instrumentation. This enables us to provide you with proven solutions for the most demanding thin film applications. Our modular approach provides an easy upgrade route, allowing the researcher to keep pace with new process technologies and applications as they develop.

Dry Pump Range

XDS Range D-Lab
For the scientific and R&D applications that require clean vacuum environment, BOC Edwards offers a wide variety of general and application-specific, completely dry vacuum pumps for the emerging applications requiring dry pumping systems. The XDS Series of completely dry scroll pumps provide clean pumping with superior vacuum performance. The XDS also overcomes the challenges often associated with other scroll pumps such as cleanliness, high pumping at low pressures, ability to resist contamination by condensibles, servicing and vapor handling.

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EM Series Rotary Vane Pumps

Reliable operation Compact and quiet Easy to operate All pumps externally approved to EN61010 and UL61010 standards

Integral IEC 60320 connector Gas ballast valve for large water vapour handling capacity Full range of accessories available including
a great value Mist Filter option

Typical Applications
E2 M 28 E1 M 18

The EM range of oil-sealed rotary pumps renowned for their high ultimate volume, rapid pumping speed, quiet operation and ability to handle vapor - have become the industry standard for laboratory applications. All pumps in the EM range are independently approved to UL and CSA standards and backed by BOC Edwards worldwide service and support.

Instrumentation
Analytical instruments - GCMS Analytical instruments - LCMS Automotive Beam lines and high-energy physics Centrifuges, ultra high-speed Coating Cryogenics Degassing/curing - oil, epoxy resin Distillation/extraction/filtration Freeze drying Furnaces Gas bottle filling/emptying Glove boxes, ovens Laboratory bench top vacuum

E2 M 18

General
Lasers, gas recovery and recirculation Leak detectors, Helium Load locks and transfer chambers Refrigeration manufacture Research and development Rotary, centrifugal evaporators Scanning electron microscopes - SEM SEM/FIB (lon beam repair) Solvent recovery Surface science instruments Turbomolecular backing pumps TV manufacturing/light bulb manufacture

E2 M 1. 5/ E2 M 0. 7

Small Rotary Pumps

Ordering Details
Description
E2M0.7 E2M0.7 Pump 1ph, 200 to 230V 50/60Hz E2M0.7 Pump 1ph, 100/200V 50/60Hz E2M1.5 E2M1.5 Pump 1ph, 200 to 230V 50/60Hz E2M1.5 Pump 1ph, 100 to 115V 50/60Hz fitted with N.A. cable E1M18 E1M18 Pump 1ph, 115V, 200to 230V 50/60Hz E1M18 Pump 1ph, 100/200V 50/60Hz E1M18 Pump 3ph, 200-220/380-415V 50Hz 200-230/460V 60Hz E2M18 E2M18 Pump 1ph, 115V, 200 to 230V 50/60Hz E2M18 Pump 1ph, 100/200V 50/60Hz E2M18 3ph, 200-220/380-415V 50Hz 200-230/460V 60Hz E2M28 E2M28 Pump 1ph, 115V, 200 to 230V 50/60Hz E2M28 Pump 1ph, 100/200V 50/60Hz E2M28 3ph, 200-220/380-415V 50Hz 200-230/460V 60Hz A37310940 A36310940 A37317984 A37315904 A34310940 A36317984 A36315904

Order Number*
A37141919 A37141902 A37132919 A37132902 A37122902P A34317984 A34315094

*PFPE versions also available - contact us for more information.

This part number includes the line cord if ordered in the US.

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EM Series Rotary Vane Pumps

Specifications
Vacuum Data
Peak pumping speed
1

Hz
50 60

Units
m m3h-1/cfm
3

E2M0.7
0.75 / 0.4 0.95 / 0.5 3.0x10-3 2.3x10-3 2.0x10-1 1.5x10-1 15 11 8

E2M1.5
1.6 / 0.8 2.0 / 1.2 2.5x10-3 1.9x10-3 2.5x10-2 1.9x10-2 15 11 16

E1M18
17.0 / 10 20.4 /12 3.0x10-2 2.2x10-2 6.5x10-1 4.8x10-1 50 38 650

E2M18
17.0 / 10 20.4 / 12 1.0x10-3 7.5x10-4 1.5x10-2 1.1x10-2 20 15 300

E2M28
27.5 / 16.2 33.0 / 19.5 1.0x10-3 7.5x10-4 1.5x10-2 1.1x10-2 30 23 700

h-1/cfm

Ultimate vacuum (total pressure) without gas ballast with gas ballast Water vapor tolerance Maximum water vapor pumping rate

mbar Torr mbar Torr mbar Torr g h-1

Motor Data
Motor rating 1 phase (normal) Nominal rotation speed 60 50 60 50 W W rpm rpm 90 1800 1500 160 3600 3000 750 550 1800 1500 750 550 1800 1500 900 750 1800 1500

Physical Data
Weight Length Width Height
2

Oil capacity Oil type (Ultragrade) Inlet flange Exhaust flange Noise level Operating temperature range

lb kg inch mm inch mm inch mm liters

50

dBA C

22 10 12.6 320 4.9 124 7.4 189 0.28 15 NW10 see note 3 43 12 to 40

22 70 79 10 32 36 12.6 19.7 21.6 320 501 549 4.9 6.4 6.4 124 162 162 7.4 10.5 10.5 189 266 266 0.28 1.4 1.05 15 19 19 NW10 NW25 NW25 see note 3 see note 4 see note 4 54 57 57 12 to 40 12 to 40 12 to 40

88 40 22.9 582 7.1 180 10.9 276 1.5 19 NW25 see note 4 57 12 to 40

Notes: 1. Pumping speed measured to PNEUROP 6602. 2. Height varies with motor supply frequency. 60Hz shown, 50Hz is 29mm less.

3. Nozzle 11mm diameter, removable from 3/8 inch BSP tapped hole. 4. Nozzle 15mm diameter, removable from 3/4 inch BSP tapped hole

10

Small Rotary Pumps

Dimensions in mm
A
E2M0.7 A371 31 919 A371 31 902 E2M1.5 A371 22 919 A371 31 902 E1M18 A343 17 984 A343 15 904 A343 10 940 E2M18 A363 17 984 A363 15 904 A363 17 940 E2M28 A373 17 984 A373 15 904 A373 10 940 320 320 320 320 501 515 471 549 608 519 582 608 553

B
124 124 124 124 180 162 162 180 162 162 180 180 180

C
171 200 171 200 253 253 266 253 253 266 242 276 276

D
123 123 123 123 184 184 184 232 232 232 266 266 266

E
81 81 81 81 120 120 120 120 120 120 129 129 129

F
24 24 24 24 25 25 25 25 25 25 25 25 25

Mist filter Oil return Foreline trap

Accessories
Cables (Required) UK, three pin plug North European plug North American plug Suitable for 100/200V variants North American plug Oil Ultragrade 15, 1 liter bottle Ultragrade 19, 1 liter bottle Oil return Clean application (no gas ballast) FL20K - oil vapor (foreline) trap For E2M0.7/E2M1.5 use EMF3 mist filter U30003459 H11026015 H11025015 A50419000 A13305000 A46220000 A50505003 A50506003 A50507003

Cables

Inlet accessories Outlet mist filters

For E1M18/E2M18 use EMF20 mist filter A46229000 For E2M28 use MF30 mist filter Vibration isolator E2M0.7 and E2M1.5 E1M18 and E2M18 E2M28 A46233000 A24801407 A24801404 A24801412

Vibration isolator

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11

RV Series Rotary Vane Pumps

Unique throughput selector allows pump to be

optimised for high and low pressure applications

Hardened shaft sleeve for reliability & durability Gas Ballast - highest vapour pumping rate in class!
Use of Gas Ballast Oil Return strongly recommended

Gas Ballast Oil Return (GBOR)

- unique accessory allows: Return of oil and gas ballast simultaneously 3 different settings Easy addition to existing mist filters

RV

become the industry standard vacuum pump for laboratory and scientific instrument primary pumping applications. RV pumps are unique in their capability to deliver reliable pumping performance at high or low throughput with high ultimate vacuum. This combined with ultra-low noise levels, makes them ideal for a wide range of applications and environments. All pumps are approved to UL and CSA standards by an external test house. BOC Edwards has a global network, providing world-wide support for product applications and service.

Analytical instruments - GCMS Analytical instruments - LCMS Centrifuges, ultra-high speed Coating Degassing/curing - oil, epoxy resin Distillation/extraction/filtration Freeze drying Furnaces Gas bottle filling/emptying Glove boxes, ovens Laboratory bench top vacuum Leak detectors, Helium Load locks and transfer chambers Refrigeration manufacture Research and development Rotary, centrifugal evaporators Scanning electron microscopes - SEM SEM/FIB (lon beam repair) Solvent recovery Surface science instruments Turbomolecuar backing pumps

12

RV

For 10 years, BOC Edwards RV pumps have

8/ 12

Typical Applications
3/ 5

Small Rotary Pumps

Ordering Details
Description
RV3 115/230V, 50/60Hz set to 230V 100/200V, 50/60Hz 200-220V/380-415V, 50Hz 200-230/460V, 60Hz, 3 phase 115/230V, 50/60Hz set to 115V A65201905 A65201906

Order Number
Ultragrade Oil* A65201903 A65201904

RV5

115/230V, 50/60Hz set to 230V 100/200V, 50/60Hz 200-220V/380-415V, 50Hz 200-230/460V, 60Hz, 3 phase 115/230V 50/60Hz set to 115V

A65301903 A65301904

A65301905 A65301906

RV8

115/230V, 50/60Hz set to 230V 100/200V, 50/60Hz 200-220V/380-415V, 50Hz 200-230/460V, 60Hz, 3 phase 115/230V, 50/60Hz set to 115V

A65401903 A65401904

A65401905 A65401906

RV12

115/230V, 50/60Hz set to 230V 100/200V, 50/60Hz 200-220V/380-415V, 50Hz 200-230/460V, 60Hz, 3 phase 115/230V, 50/60Hz set to 115V

A65501903 A65501904

A65501905 A65501906
This part number includes the line cord if ordered in the US.

*PFPE versions also available - contact us for more information.

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13

RV Series Rotary Vane Pumps

Specifications
Vacuum Data
Peak pumping speed Ultimate vacuum (total pressure) without gas ballast with gas ballast - low flow, I with gas ballast - high flow, II in high throughput mode Water vapor tolerance Maximum water vapor pumping rate Gas ballast - low flow, I Gas ballast - low flow, II

Hz
50 60

Units
m3/h-1/cfm m3/h-1/cfm mbar Torr mbar Torr mbar Torr mbar Torr g/h-1 g/h-1

RV 3
3.3 / 2.0 3.9 / 2.3 2.0 1.5 3.0 2.3 1.2 9.1 x 10-3 x 10-3 x 10-2 x 10-2 x 10-1 x 10-2 80 60

RV 5
5.1 / 3.0 6.2 / 3.6 2.0 1.5 3.0 2.3 1.0 9.1 x 10-3 x 10-3 x 10-2 x 10-2 x 10-1 x 10-2 50 38

RV 8
8.5 / 5.0 10.0 / 5.9 2.0 1.5 3.0 2.3 6.0 4.6 x 10-3 x 10-3 x 10-2 x 10-2 x 10-2 x 10-2 50 38

RV 12
12.0 / 7.1 14.2 / 8.4 2.0 1.5 3.0 2.3 6.0 4.6 x 10-3 x 10-3 x 10-2 x 10-2 x 10-2 x 10-2 32 24

60 220

60 220

60 220

60 290

Motor Data
Motor rating 1 phase (nominal) Nominal rotation speed 60 50 60 50 W W rpm rpm 300 250 1800 1500 300 250 1800 1500 550 450 1800 1500 550 450 1800 1500

Physical Data
Weight Length Width Height Oil capacity Oil type (Ultragrade) Inlet flange Exhaust flange Noise level Operating temperature range lb kg inch mm inch mm inch mm liters 47.5 21.5 16.9 430 6.2 158 8.9 225 0.7 19 NW25 NW25 48 12 to 40 47.5 21.5 16.9 430 6.2 158 8.9 225 0.7 19 NW25 NW25 48 12 to 40 57 26 18.5 470 6.2 158 8.9 225 0.75 19 NW25 NW25 48 12 to 40 58 26.3 19.3 490 6.2 158 8.9 225 1 19 NW25 NW25 48 12 to 40

50

dBA C

14

Small Rotary Pumps

Dimensions in mm
A
RV3 RV5 RV8 RV12 430 430 470 490

B
158 158 158 158

C
225 225 225 225

D
156 156 196 216

Mist filter Foreline trap Gas Ballast Oil Return

Accessories
Cables (Required) UK, three pin plug North European plug North American plug Oil Ultragrade 19, 1 liter bottle Fomblin YVAC 06/6 1kg (532ml) Oil Return Clean application (no gas ballast) Adjustable gas ballast Inlet accessories Foreline trap - FL20K For RV3, 5, 8 use EMF10 mist filter For RV12 use EMF20 mist filter Spare kits Clean and overhaul kit A50505000 A50506000 A50507000 H11025015 H11301019 A50420000 A50523000 A13305000 A46226000 A46229000 A65201131

Cables

Outlet mist filters

Note: All pumps supplied with initial charge of oil

Vibration isolator

Side view (pump inlet-flange omitted for clarity)

Gas Ballast Oil Return

When fitted the Gas Ballast Oil Return continuously returns oil trapped in the oil mist filter to the pump whilst maintaining gas ballast flow. 1 2 3 4 5 6 7 8 Oil mist filter Hose dip Flexible oil return tube Nozzle Oil return assembly RV pump Restrictor Drain adaptor

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15

D-LAB Diaphragm Pump

Teflon heads and diaphragms Compact, space-saving design Low noise Simple to use Low maintenance

Applications Gel dryers Vacuum filtration Distillation/extraction apparatus

D-LAB membrane pumps with their chemically resistant Teflon heads, diaphragms and Kalrez valves, offer the chemical or pharmaceutical laboratory user a wide range of choices, either used as stand-alone pumps or as part of a sophisticated system. The one head, 100 mbar / 75 Torr ultimate vacuum pumps are suitable for use with drying equipment or for replacing water-jet pumps. The two head, 8 mbar / 6 Torr ultimate vacuum pumps are suitable for rotary evaporation, gas transfer and a wide range of medium vacuum applications. System options The pumps are designed so they can be upgraded by adding a range of accessories. The accessories are supplied with all required connections; no special tools are needed to fit them. Baseplate Separator Condenser Baseplate The baseplate allows the pump and accessories to be mounted on to a common frame. Separator When used on the exhaust side, solvent droplets are separated from the process gas and collected. When used on the inlet side, the separator may be used to collect particles in the process gas, thus assisting pump reliability. Vacuum controller Gas-ballast control valve

Condenser The condenser separates and collects condensable materials from the exhaust side of the pump. These condensed materials are collected in an easily removed glass flask. Connections available to allow cooling fluid from a chiller or circulator (not supplied) can be used to control the condenser temperature. Vacuum controller The vacuum controller controls the system pressure and stops the pump when a pre-set pressure is reached. This saves power and extends the service life of the diaphragm. Typically, the controller is used on a system that incorporates the baseplate, condenser and separator. Gas-ballast control valve The use of gas-ballast helps prevent the condensation of vapors inside the pump. The valve control is on/off, at a fixed flowrate.

16

Dry Pumps

Ordering Details
Description
D-LAB 10-100 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz D-LAB 20-100 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz D-LAB 34-100 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz D-LAB 10-8 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz D-LAB 20-8 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz D-LAB 34-8 110 V 1-phase 60 Hz 220-240 V 1-phase 50 Hz Baseplate D-LAB 10-100, 20-100, 10-8 and 20-8 D-LAB 34-100 and 34-8 Separator* Condenser*

Order Number
A48015941 A48015960 A48017941 A48017960 A48021941 A48021960 A48016941 A48016960 A48018941 A48018960 A48022941 A48022960 A48015134 A48021134 A48015136 A48015137

Description
Gas-ballast control valve D-LAB 10-100, 10-8 D-LAB 20-100, 34-100, 20-8 and 34-8 Vacuum controller* 220-240V 50Hz 100-110V 50/60 Hz

Order Number
A48015135 A48017135

A48015138 A48015139

Service kit, one head pumps (1 diaphragm, 2 sealing rings, 2 valve plates) D-LAB 10-100 D-LAB 20-100 D-LAB 34-100 A48015815 A48017815 A48021815

Service kit, two head pumps (2 diaphragms, 4 sealing rings, 4 valve plates) D-LAB 10-8 D-LAB 20-8 D-LAB 34-8 Electrical supply cable, with IEC socket (order one of these cables for 220-240 V supply) UK three pin plug North European plug No plug A50505000 A50506000 A50508000 A48016815 A48018815 A48022815

* Supplied with fittings for attachment to the baseplate. 110 V pumps are supplied with USA plug; 220-240 V pumps are supplied with IEC plug. Other voltage pumps and controllers are available on request.

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17

D-LAB Diaphragm Pump

Technical Data
Pumping speed (air) 10-100, 10-8 20-100, 20-8 34-100, 34-8 Ultimate vacuum 10-100, 20-100, 34-100 50 Hz 10-100, 20-100, 34-100 60 Hz 10-8, 20-8, 34-8 50 Hz 10-8, 20-8, 34-8 60 Hz Inlet and outlet connection 100 mbar 75 mbar 8 mbar 6 mbar Riffled nozzle, suitable for 9 mm i.d. hose Maximum inlet pressure Motor power and current 10-100, 110 V 60 Hz 10-100, 220-240 V 50 Hz 20-100, 110 V 60 Hz 20-100, 220-240 V 50 Hz 34-100, 110 V 60 Hz 34-100, 220-240 V 50 Hz 10-8, 110 V 60 Hz 10-8, 220-240 V 50 Hz 20-8, 110 V 60 Hz 20-8, 220-240 V 50 Hz 34-8, 110 V 60 Hz 34-8, 220-240 V 50 Hz 110 W, 1.3 A 100 W, 0.6 A 145 W, 1.9 A 130 W, 0.9 A 220 W, 3.2 A 180 W, 1.4 A 110 W, 1.3 A 90 W, 0.6 A 130 W, 1.2 A 120 W, 0.9 A 250 W, 3.2 A 200 W, 1.5 A 1 bar 0.6 m3h-1, 10 l min-1 1.2 m3h-1, 20 l min-1 2 m3h-1, 34 l min-1 Enclosure rating Operating temperature Weight 10-100 20-100 34-100 10-8 20-8 34-8 5.8 kg / 12.8 lbs 7.1 kg / 15.6 lbs 10.3 kg / 22.7 lbs 6.9 kg / 15.2 lbs 9.3 kg / 20.5 lbs 12.6 kg / 27.7 lbs IP44 5 - 40 C

18

Dry Pumps

D-LAB Dimensions in mm
D-LAB 10-100 20-100 34-100 10-8 20-8 34-8 A 255 268 296 288 312 341 B 50 60 60 53 59 62 C 182 204 222 184 204 222 D 144 157 172 E 98 110 122 98 110 122 F 140 153 169

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19

XDS Dry Scroll Pumps

Totally dry Ultra low maintenance - Service the XDS

yourself in less than 10 minutes!

Variable gas-ballast feature Oxygen pumping compatible Hermetically sealed

The XDS range of pumps reflects a unique award winning dry pumping technology. It is designed to provide a robust and clean dry pumping solution for all applications. All pumps in the range are approved to UL and CSA standards and backed by BOC Edwards' worldwide service and support.

Instrumentation
Analytical instruments - GCMS Analytical instruments - LCMS Automotive Beam lines and high-energy physics Centrifuges, ultra-high speed Coating Cryogenics Degassing/curing - oil, epoxy resin Distillation/extraction/filtration Freeze drying Furnaces Gas bottle filling/emptying Gel drying Glove boxes, ovens Laboratory bench top vacuum

General
Lasers, gas recov and re-circulation Leak detectors, Helium Load locks and transfer chambers Pumping Oxygen/Oxidants Rare gas re-circulation

XDS pumps use an innovative patented bearing shield to isolate the vacuum environment from all forms of lubricant, not only making it totally dry but also hermetically sealed.

Rare gas recovery Refrigeration manufacture Research and development Rotary, centrifugal evaporators Scanning electron microscopes-SEM SEM/FIB (lon beam repair) Solvent recovery Surface science instruments Turbomolecuar backing pumps

20

X D S3 5i

Typical Applications
X D S1 0 X D S5

Dry Pumps

Dimensions in mm
A
XDS5 XDS10 427 427

Ordering Details
C
288 288

B
249 249

D
210 210

E
180 180

F
297 315 XDS5

Description
XDS5 1ph, 115V/230V 50/60Hz set to 230V XDS5 1ph, 100/200V set to 200V XDS5 3ph, 200-220/380-415V 50Hz 200-230/460V 60Hz XDS5 1ph, 115V/230V 50/60Hz set to 115V XDS10 XDS10 1ph, 115V/230V 50/60Hz set to 230V XDS10 1ph, 100/200V set to 200V XDS10 3ph, 200-220/380-415V 50Hz 200-230/460V 60Hz XDS10 1ph, 115V/230V 50/60Hz set to 115V XDS35i XDS35i 1ph, 100-120/200-230V 50/60Hz with IEC60320 connector fitted

Order Number
A72401903 A72401904

Contact BOC Edwards A72401906 A72601903 A72601904

Contact BOC Edwards A72601906 A73001983

XDS35i

476

290

397

212

195

353
This part number includes the line cord if ordered in the US.

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21

XDS Dry Scroll Pumps

Specifications
Vacuum Data
Peak pumping speed Ultimate vacuum (total pressure) Water vapor tolerance Maximum water vapor pumping rate Gas ballast - low flow, I Gas ballast - high flow, II

Hz
50 60

Units
m3h-1/cfm m3h-1/cfm mbar Torr mbar Torr g/h-1 g/h-1

XDS 5
4.8 / 2.8 6.0 / 3.5 6.0 x 10-2 4.5 x 10-3 50 38 70 >200

XDS 10 XDS 35i

9.3 / 5.5 11.1 / 6.5 6.0 x 10-2 4.5 x 10-3 35 23 70 >200 35 / 21 35 / 21 1.0 x 10-2 8.0 x 10-3 50 38 70 240

Motor Data
Motor rating 1 phase (nominal) Motor rating 3 phase Nominal rotation speed 60 50 60 50 W W W rpm rpm 300 300 Note 3 1800 1500 300 300 Note 3 1800 1500 520 520 1800 1800

22

Dry Pumps

Physical Data
Weight Length Width Height Inlet flange Exhaust flange Noise level Leak tightness Operating temperature range

Hz

Units
lb kg inch mm inch mm inch mm

XDS 5
51 23 16.8 427 9.8 249 11.3 288 NW25 NW25 55 <1x10-6 10 to 40

XDS 10
54 24.5 16.8 427 9.8 249 11.3 288 NW25 NW25 55 <1x10-6 10 to 40

XDS35i
106 48 18.7 476 13.1 333 15.6 396 NW40 NW25 57 <1x10-6 10 to 40

50

dBA mbar.l/s C

Accessories
Cables 5/10 (Required) UK, three pin plug North European plug North American plug Cables 35i (Required) UK, three pin plug North European plug North American plug Silencers Silencer for XDS5 and XDS10 Silencer for XDS35i A50505000 A50506000 A50507000 A50505003 A50506003 A50507003 A50597000 A50597001 A72601805 A73001801 C10516439 C10514395 C10514401 A50626801

Cables Silencer

Spare parts

Tip seal kit for XDS5 and XDS10 Tip seal kit for XDS35i Reducing piece NW40/25 Centering ring and Oring NW25 Clamp - NW25

Gas Ballast Adaptor

Kit for XDS5, XDS10, XDS35i

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23

EXT Turbomolecular Pumps

Available with TIC Turbo

and Instrument Controller

Available in carts with 2-stage rotary, XDS

or Diaphragm backing pumps

Brown out protection capable

with regenerative DC power technology

Permanent magnet upper and ceramic lower

bearing provides optimum cleanliness

DX technology - integrated onboard controller

EXT turbomolecular pumps use state-of-the-art technology to provide reliable, clean, high and ultra high vacuum. The EXT pumps also become components in our convenient EXPT pumping stations which allow you to configure the optimum system to meet your specific needs.

EXT75DX
Inlet Flange Pumping speed (l s-1) N2 He H2 Ultimate pressure (mbar) With rotary vane backing pump With diaphragm backing pump Weight (kg) <5 x 10-9 <5 x 10-8 3.0 <5 x 10-10 <5 x 10-9 4.9 <5 x 10-9 <5 x 10-8 2.9 <5 x 10-9 <5 x 10-8 3.1 61 57 53 61 57 53 42 49 48 66 59 54 ISO63 DN63CF DN40NW ISO100

EXT255DX
Inlet Flange Pumping speed (l s-1) N2 He H2 Ultimate pressure (mbar) With rotary vane backing pump With diaphragm backing pump Weight (kg) <5 x 10-9 <5 x 10-8 6.25 <5 x 10-10 <5 x 10-9 8.6 220 230 180 220 230 180 DN100ISO-K DN100CF

24

Turbomolecular Pumps Example EXT configuration

Key to example EXT configuration

A B C D F G H J TIC turbo & instrument controller 100 W RS232 2m UK Mains Cable TIC relay box - for small backing pump APGX-M Stainless Steel - NW25 flange WRG Stainless Steel - NW25 flange RV3 pump (1-phase) EXT75DX ISO63 flange BX70 heater band 240V 60W* D39721000 D40013025 D39711805 D02372000 D14701000 A65201903 B72241000 B58052060 *For use with water cooled pumps only K L M N P Q S TAV5 vent valve ACX75 air-cooler TIC logic interface cable 2m TIC mains cable IEC320 M/F 2m TIC logic interface cable 2m XDD/DX/EXDC extension cable 2m (optional) Active gauge cable 2m B58066010 B58053075 D39700833 D39700831 D39700833 D39700836 D40001020

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25

EXT Turbomolecular Pumps

Technical Data
Inlet Flange

Units

EXT75DX
DN63ISO-K DN63CF DN40NW >1 x 1011 1 x 106 5 x 104 DN16NW DN25NW E2M0.7 1/8 inch BSP 1/8 inch BSP

EXT255DX
DN100ISO-K DN100CF

Compression Ratio N2 He H2 Outlet Flange Interstage port (iDX versions) Recommended backing pump Vent port Purge port Maximum continuous inlet pressure (light gas pumping)*1 water cooling (water at 15oC ambient at 40C) forced air cooling, 35C ambient Notional rotational speed Standby rotational speed Start time 90% speed*2 Cooling method Ambient air temperature for forced air cooling Minimum cooling water flow rate (water 15 C) Water temperature range Maximum inlet flange temperature Operating attitude Noise level at 1 metre Maximum magnetic field Recommended controller Quiescent electrical power Interstage pumping speed (iDX versions)

>1 x 108 4 x 105 1.6 x 104 DN25NW DN25NW RV3 1/8 inch BSP 1/8 inch BSP

mbar mbar rpm rpm s C l h-1 C C dB(A) mT W Is-1

2 x 10-2 1 x 10-2 90000 49500 to 90000 (variable - 63000 as default) 110 Forced air / water 5-35 15 10-20 100 Vertical and upright, through to horizontal <50 5 TIC Turbo & Instrument Controller (see page XX) 10 10

5 x 10-3 5 x 10-3 60000 33000 to 60000 (variable - 42000 as default) 80 Forced air / water 5-35 15 10-20 100 Vertical and upright, through to horizontal <50 5 TIC Turbo & Instrument Controller (see page XX) 25 10

Notes: *1 A larger backing pump may be required for maximum throughput. A suitable diaphragm pump with ultimate <5mbar may also be used. *2 Above this inlet pressure, rotational speed drops to below nominal.

26

Turbomolecular Carts Dimensions

EXT75DX EXT255DX

Ordering Details EXT75DX

Pump
EXT75DX ISO63 EXT75DX CF63 EXT75DX NW40 EXT75DX ISO100 EXT75iDX (Interstage version) EXT75iDX ISO63 (Interstage version)

Ordering Details EXT255DX

Order Number
B72241000 B72242000 B72243000 B72245000 B72237000

Inlet Flange
DN63ISO DN63CF DN40NW DN100ISO ISO63 (main) DN16NW (interstage) DN63ISO (main) DN25NW (interstage)

Pump
EXT255DX ISO100 EXT255DX CF100 EXT255iDX ISO100 (Interstage version)

Inlet Flange
DN100ISO-K DN100CF DN100ISO-K (main) DN25NW (interstage)

Order Number
B75311000 B75312000 B75313000

Accessories
ACX250H WCX500 Air cooling accessory Water cooling accessory B58053160 B73600121

B72238000

Accessories
ACX75 WCX500 Air cooling accessory Water cooling accessory B58053075 B73600121

For a full list of extended accessories please contact your nearest BOC Edwards sales office or email: info@bocedwards.com

TIC Turbo and Instrument Controller Options

The TIC Turbo and Instrument Controller offers a large clear graphical display, intuitive user interface and serial communications providing full remote control and data logging functions via a new WindowsTM based PC program. The controller automatically recognizes and supports up to three gauges from the BOC Edwards range and one 24V turbomolecular pump from the EXT range. Controller
TIC 100W TIC 200W

Description

Order Number

TIC turbo and instrument controller 100W RS232 D39721000 TIC turbo and instrument controller 200W RS232 D39722000

For more information and advice on the optimum controller and configuration for your application please call your nearest BOC Edwards sales office or email: info@bocedwards.com

visit our website at www.bocedwards.com

27

Pumping Stations
1

Fully assembled and ready to use Systems start/stop from control panel Control of both the turbo pump and gauges
from the integrated TIC

Serial communication control available

with RS232 and RS485

Dry pumping options with XDDI, XDS5

and XDS10

EXPT 1 and 2 Pumping Stations

Our new range of EXPT pumping outfits brings added flexibility with our successful TIC Turbo and Instrument Controllers. A large selection of backing and turbo pumps is available in combination with TICs and accessories to suit a wide range of applications such as: UHV systems Beam lines Load locks Surface science High-energy physics

Ordering Details
The EXPT systems can be configured to meet your exact requirements with a choice of: Turbomolecular Pump
75DX 75DX 75DX 255DX 255DX NW40 ISO63 CF63 ISO100 CF100

Turbo Controller
100W Turbo control only (75DX)

100W Turbo & Instrument control (75DX)

200W Turbo control only (255DX)

200W Turbo & Instrument control (255DX

Accessories
Possible backing pump accessories include:

EMF Filter FL20K foreline trap Castors Silencer

Please contact us to discuss the optimum configuration for your application.

28

Turbomolecular Carts

2
1

Example of EXPT2 - Base plate with EXT255DX turbo pump + XDS10 scroll pump + Turbo & Instrument Controller.

Example of EXPT1 - Base plate with EXT75DX turbo pump + XDD1 scroll pump + Turbo & Instrument Controller.

Turbo Accessories
TAV5 Vent Value LCPVEK Backing Line Valve*1

Backing pump
E2M0.7 E2M1.5 EXPT1

Backing pump Accessories

EMF Filters*2 Foreline Trap*2 Castors*3 Silencer*4

Voltage
220-240 V 50/60 Hz (Europe) 110-120 V 50/60 Hz (USA)

XDD1 RV3 RV5 RV8 RV12 XDS5 XDS10 EXPT2

110 V 50/60 Hz (Japan) 220-240 V 50/60 Hz (UK)

X)

Notes *1 Mandatory when using XDS as backing pump *2 EM & RV pumps only *3 Mandatory on EXPT2 carts *4 XDS only

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29

STP MAGLEV Range

Full range of pumping speeds from 300 to 4500 l/s-1 Affordable Highly reliable Virtually maintenance free Completely dry Cost Effective Low vibration levels

Perfect for wide range of high vacuum applications and available in a range of pumping speeds from 300 to 3500 ls-1 the STP range of magnetically levitated (MAGLEV) turbomolecular pumps are the best in their class. Unlike conventional mechanical ceramic bearing turbo-pumps, the Maglev systems provide full 5 axis active magnetic levitation, 3 axis on 300ls-1 - 450ls-1, requiring no costly bearing re-lubrication or replacement. Regenerative technology eliminates the requirement for battery back up in the event of power failure. Maglev system products offer superior uptime and reduced cost of ownership in comparison with ceramic turbo pumps. This, combined with the cost reduction in active magnetic bearing control afforded through constant technical development, make Maglev system turbo pumps the ideal turbo-pump technology for all but the smallest pumping speed requirements. Maglev system turbo pumps combined with the XDS Scroll pumps, provide a world beating combination of product features for Clean, Dry pumping.

30

Turbomolecular Pumps

Ordering Details
Small Size Pumps STP301 STP301 ISO100 Kit* (100-120v) STP301 ISO100 Kit* (200-240v) STP301 CF100 Kit* (100-120v) STP301 CF100 Kit* (200-240v) STP451 STP451 ISO160 Kit* (100-120v) STP451 ISO160 Kit* (200-240v) STP451 CF160 Kit* (100-120v) STP451 CF160 Kit* (200-240v) *Kit includes controller, power cable and connection cable. PT2101950 PT2101171 PT2101360 PT2101161 PT2101091 PT2101131 PT2101141 PT2101151

Order Number

Medium Size Pumps STP603 ISO160F DN160CF STP1003 ISO200F DN200CF STP603C ISO160F DN160CF STP1003C ISO200F DN200CF STPA803C ISO160F DN160CF STPA1303C ISO200F DN200CF STPA1603C ISO200F DN200CF Required accessories for the Medium Size Pumps SCU750 Universal Controller - Medium Pumps 100-240v Connection cable 3m 5m 10m Power cable 5m 10m P056 P056 P046 P036 P036 P039 P039 P039 P039

Order Number
B72102010 PT390Z005 PT390Z001 B72101040 B72102060 PT39AZ002 B72101030 PT39AZ003 B71801000 B71805010 B71802020 B71803000 B75100040 B75100100

Large Size Pumps STPA2203C ISO250F DN250CF STPF2203C ISO250F DN250CF STPA2503C ISO250F DN250CF STP XA 2703C ISO250F DN250CF STPA3003C ISO320F DN320CF STP XA 3203C ISO320F DN320CF STPA3503C ISO320F DN320CF Required accessories for the Large Sized Pumps SCU 1500 Universal Controller - Large Pumps P048 P043 P043 P050 P041

Order Number
PT4V0Z002 PT4V0Z003 PT500Z000 CALL PT43GZ001 PT43GZ040 PO66 PT660Z000 PT6610010 B75201020 PT43GZ030 PO66 PT660Z050 CALL PT480Z003 PT480Z010

PT56Z0Z00 B75130050 B75130020 B75130060 PT46Y0A01 PT46Y0A10 Power cable Connection cable

200-240V 50/60 Hz RS232 3m 5m 10m 5m 10m

PO59 P035

PT59Z0Z00 B75030030 B75030010 B75030040

P035

B75030020 PT35Y0A00

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31

STP Featured Product

STP-iX455
Innovative Magnetic Bearing System
- Self-Sensing MB Technology - Digital 5 Axis Control

Compact Design
- Integrated Controller

Low Vibration
- ABS (Auto Balancing System) as Standard - AVR (Auto Vibration Reduction) as Standard

Conforms to International Safety Standards

The BOC Edwards STP-iX455 turbomolecular pump integrates the controller with the pump body and employs an innovative magnetic bearing system, all in a compact package featuring low vibration. The new magnetic bearing system reduces vibration by 50% compared to existing products. This pump is well suited for use with electron microscopes, metrology systems, and for lithography systems where low vibration is critical to the application. STP-iX455 operates on 48VDC, thus eliminating the need for a conventional rackmounted control unit and connection cable. With numerous optional accessories available, an optimum configuration can be found for each application.

Innovative Magnetic Bearing System

The patented self-sensing magnetic system and optimised motor drive system suppress noise across the frequency spectrum and achieve a reduction in vibration of 50% from current products. Complete digital 5-axis magnetic bearing control provides stability in case of external vibration or impact. ABS (Automatic Balancing System) jand AVR (Automatic Vibration Reduction) together intelligently and automatically compensate for rotor imbalance to provide low vibration during both acceleration and operation at high speed.

Technical Data
Pumping speed, N2 / H2 Compression ratio, N2 / H2 Ultimate pressure Maximum allowable backing pressure Rated speed Starting time / Stop time Mounting position Input voltage Vibration Noise Communication interface Maximum input power Environment temperature during operation Weight

Units
Litres/Second Pa Pa rpm minutes DCV dB(A) W C Kg

ISO100K
300/300 >108 / 1x104 10-8 order 67 55000 6/8 Any orientation 48 <0.01(55000rpm) <50(55000rpm) I/O Remote, RS232/485 240 0-40 15

ISO160K
450/460 >108 / 1x104 10-8 order 67 55000 6/8 Any orientation 48 <0.01(55000rpm) <50(55000rpm) I/O Remote, RS232/485 240 0-40 16

32

Turbomolecular Pumps

Dimensions in mm
Inlet Flange
ISO100 DN100CF ISO160 DN160CF

A
130 152 180 203

B
12 21 12 22

Ordering Details
Description
STP-iX455 Pump

Inlet Flange
ISO100K ISO160K VG100 VG150 DN100CF DN160CF

Order Number
PT640Z010 PT640Z020 PT640Z030 PT640Z040 PT640Z050 PT640Z060 PT64W0Z00

Pump
Power cable

Length (metres)
3M 5M 10M 15M

Order Number
PT64Y0A10 PT64Y0A20 PT64Y0A30 PT64Y0A40 PT64Y0B20 PT64Y0B30 PT64Y0B40 PT64Y0B50 PT64W1Z00

iPS-240 Connection Cable

5M 10M 15M 20M

iPS-240 Power supply

iDT-001 Display Terminal kit

w/communication cable 3M

Accessories
Several accessories are available to meet optimum configuration in each application.

Power Supply Unit iPS-240

Operation from 100-200 VAC power source STP-link communication port on front panel Dock with the iDT-001 display unit to become an integrated power supply with an LCD display

Display/Control Unit iDT-001

Provides visual feedback of performance and direct control of the pump Plug-and-play unit connecting with the STP-iX455 or iPS-240 Docking connection available with the iPS-240 Displays operational status on the LCD panel

Software Control STP-Link

Displays status of the operational STP-iX455 pump including: Rotational speed Motor status Temperature Rotor balance status Magnet bearing current

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33

Vacuum Coating Systems

SOLUTIONS EXPERTISE Imaginative applications for thin film deposition are only limited by your equipments process capability. BOC Edwards provides the knowledge and expertise to create custom made equipment with the flexibility to help you realise the full potential of vacuum coating. By supplying complete solutions from advice on design, to manufacture and global support, BOC Edwards meets all the performance criteria you expect of a world leader in the supply of vacuum coating technology.

Optimum performance As a pioneer in cutting-edge science and technology, BOC Edwards delivers improved capability and increased productivity in standard and custom made systems. Our vacuum coating solutions are proven to meet all the requirements across the widest spectrum of processes and applications: High vacuum - fast pumpdown Repeatable predictable performance Clean vacuum Reliability and maximum process uptime Low maintenance and operating costs Safe and simple operation

34

visit our website at www.bocedwards.com

35

Vacuum Coating Systems

COATING SYSTEMS TO SUIT ALL APPLICATIONS AND BUDGETS

Research and Development The Auto 360 is designed to offer high-performance coating for Research and Development applications.

AUTO306

Compact Unit Easy-to-use touch screen operation Choice of deposition options for resistance evaporation No compressed air requirements on installation Fully interlocked for operator safety

The Auto 500 offers greater flexibility and higher throughput for pre-production or more demanding research and development environments. Pre-Production

AUTO500

Large box chamber Front loading for easy access Automatic PLC operated vacuum control system with touch screen display Full range of accessories for thermal resistance, electron beam and RF/DC sputtering High-temperature substrate heating options

The TF600 is a fully flexible high throughput coater designed for demanding production environments. Fully configurable design to match your requirements exactly Full Production Rapid pump down to maximise throughput Automatic PLC touch screen operated vacuum control system with full recipe & diagnostic control Resistance and electron beam evaporation Upward and downward sputtering Ion beam processing

TF600

For more detailed technical information on any of these coating products please request a datasheet by calling your nearest BOC Edwards sales office.

36

TARGET APPLICATIONS
Entry Level Research & Development Low throughput TEM/SEM sample preparation

Pre-production environments Anti-reflective coatings Semiconductors Mirrors Organics, polymers and OLEDs Photonics research Solar Cells Nanotechnology

High throughput production environments Semiconductors Mirrors Organics, polymers and OLEDs

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37

Scancoat Six Bench-top Sputter Coater

The Scancoat Six is a compact and inexpensive bench-top sputter designed to prepare specimens for conventional scanning electron microscopy (SEM). The ready-to-use system will sputter coat a wide variety of specimens with a high-quality, conductive metal film. The films are deposited uniformly, even over reentrant surfaces. An optional carbon fibre accessory allows specimens to be carbon coated before X-ray microanalysis.

FEATURES Automatic sputtering with digital process timer for easy and repeatable operation Cool sputtering prevents heat damage of delicate specimens Water-cooled specimen table Wide range of easily interchangeable targets Target to worktable separation easily adjusted from outside the chamber Built-in sputter etch/cleaning facility Universal specimen holder accommodates specimen stubs from most EM manufacturers Supplied with rotary pump, 0. I mm thick gold target and built-in feedthrough for film thickness monitor COOL SPUTTER COATING The Scancoat Six is designed to prevent overheating of delicate specimens during sputter deposition. The unique sputtering electrode design incorporates an electron deflection system that reduces specimen bombardment by secondary electrons, minimising specimen heating. The water-cooled copper specimen table acts as an effective heat sink and provides an extra level of protection against specimen heating. REMOVABLE SPECIMEN HOLDER Specimens can be conveniently loaded onto the specimen holder away from the vacuum chamber. Once loaded onto the workholder, specimens can be safely transported to the Scancoat Six. The workholder is pre-drilled to accept up to six of the standard SEM stub types used by most SEM manufacturers.

Technical Data
Work Chamber Worktable Removable workholder Borosilicate glass, I50 mm 0 x I I5 mm high. Clear acrylic implosion guard, as standard 100 mm 0 water-cooled copper worktable 100 mm 0 water-cooled copper worktable holes and six IS mm 0 holes for standard SEM stubs Edwards RV3 (direct drive rotary pump) with Pirani gauge Normally argon. Push-fit connectors provided for 6 mm od tubing for connection to gas cylinder fitted with pressure regulator. Multi-turn needle valve incorporated to provide fine control of process gas Cycle time Work chamber evacuated to operating pressure within one minute. Sputtering rates of up to 60 min l5OOV dc at 50 mA 0 - IO0 mA with overload protection 0 - 2.5 kV Programmable 0 seconds to 999 seconds with automatic reset 470 W x 390 D x 445 H 22kg

Vacuum system Process gas

High tension supply HT meters Digital timer Dimensions mm Weight

38

SPECIMEN HOLDER SEM COMPATIBILITY

workholder capacity 6 x 3.2 mm diameter pin type stubs 6 x 10 mm diameter cylindrical stubs 6 x 15 mm diameter cylindrical stubs SEM suitability Amray, Gresham Camscan, LEO, Philips JEOL Hitachi, Topcon

Ordering Details
Description Order Number
Scancoat Six SEM Sputter Coater. complete with RV3 rotary vacuum pump, 0. I mm gold target, specimen stub holder, pump oil and instruction manual 23OV, l-phase, 50 Hz I I5 V, I -phase, 60 Hz The Scancoat Six can be supplied without rotary pump on request. Accessories Carbon Fibre Evaporation Accessory complete with 3 m carbon string 23OV, l-phase, 50 Hz I I5 V, I -phase, 60 Hz Quartz crystal sensor head (for use with 086-64-000 FTM6 film thickness monitor and E086-66-000 oscillator) Gold target (0. I mm thick) Platinum target Gold/palladium target Copper target FLZOK Foreline trap for RV3 pump EMF oil mist filter for RV3 pump Carbon fibre, 3 m length Accessories for metallurgical optical interference microscopy Iron target Shutter Metallurgical sample holder Request publication P 700-20-7 IO for details about this technique. E087-34-000 E087-4 I-000 E087-42-000 E096-0 I-400 E096-0 I-042 E087-32-000 E087-33-000 E087- 12-072 A 133-05-000 A462-26-000 E096-0 I-250 E096-0 I-200 E096-02-200 E096-0 I-000 E096-02-000

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39

Vacuum Measurement
Choosing the right vacuum gauge

Step

Determine the range of pressures.

Step

Use the chart below to guide you to pressure range.

10-11

10-10

10-9

10-8

10-7

10-6

10-5

10-4

10-3

10-2

10-1

10 Low Vacuum

102

103 mbar

Ultra High Vacuum

High Vacuum

Medium Vacuum APGX L - Active Pirani Gauge

APGX M - Active Pirani Gauge APGX H - Active Pirani Gauge Wide Range Gauge

The dark blue lines indicate the primary accuracy range for the specified gauge. The light blue 'operating range' indicates the pressure range where the gauge can be used but will not provide accurate readings.

Operating Range

Step

Check the product summary.

Step

Choose the cable length required (page 43).

Step

Choose display option (page 43).

Unsure or need help? Call your nearest BOC Edwards sales office or email: info@bocedwards.com with your question and we will discuss your application in more detail with you.

40

Step

Check the product summary

APGX L - Active Pirani Gauge

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 Ultra High Vacuum High Vacuum Medium Vacuum

Operating Range
10 Low Vacuum 102 103 mbar

Low pressure gauge offering simple push button operation, robust design and two set-points.

Technical Data
Pressure Range Accuracy Max Overpressure Temperature Range Operating Storage +5 to +55C -30 to +70C 10 to 10-4 mbar/Torr Typically +/-15% at <10mbar 10 bar absolute (145psi)

APGX L
Flange NW16 NW16 NW25 15mm O.D. Construction Aluminium Stainless Steel Stainless Steel Stainless Steel Part Number D02373000 D02377000 D02374000 D02378000

APGX M - Active Pirani Gauge

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 Ultra High Vacuum High Vacuum Medium Vacuum

Operating Range
10 Low Vacuum 102 103 mbar

Medium pressure gauge offering simple push button operation, robust design and two set-points.

Technical Data
Pressure Range Accuracy Max Overpressure Temperature Range Operating Storage +5 to +55C -30 to +70C 100 to 10-3 mbar/Torr Typically +/-15% at <100mbar 10 bar absolute (145psi)

APGX M
Flange NW16 NW16 NW25 15mm O.D. Construction Aluminium Stainless Steel Stainless Steel Stainless Steel Part Number D02371000 D02375000 D02372000 D02376000

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41

Vacuum Measurement
Step

Check the product summary in the application

APGX H - Active Pirani Gauge

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 Low Vacuum 102 103 mbar Ultra High Vacuum High Vacuum Medium Vacuum

Low pressure gauge with convection technology offering improved sensitivity for accurate pressure measurement up to atmospheric pressure.

Technical Data
Pressure Range Accuracy Max Overpressure Temperature Range Operating Storage +5 to +55C -30 to +70C 1333 to 3x10-4 mbar/Torr Typically +/-15% 10 bar absolute (145psi)

APGX H
Flange NW16 NW16 NW25 1/8 NPT Construction Aluminium Stainless Steel Stainless Steel Stainless Steel Part Number D02391000 D02395000 D02392000 D02396000

Wide Range Gauge

10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 Ultra High Vacuum High Vacuum Medium Vacuum

Operating Range
10 Low Vacuum 102 103 mbar

A single gauge covering the range from atmosphere to Ultra-high vacuum.

Technical Data
Pressure Range Accuracy 100 to 10-9 mbar/Torr Typically +/-15% at <100 mbar, +/-30% at <10-3 mbar Max Overpressure Temperature Range Operating Storage +5 to +55C -30 to +70C 10 bar absolute (145psi)

Wide Range Gauge

Flange NW25 DN40CF Construction stainless steel stainless steel Part Number D14701000 D14703000

42

Step

Choose the cable length required

Cables include FCC68/RJ45 compatible connections at both ends.

Connection Cable Options

0.5 m 1m 3m 5m 10 m D40001005 D40001010 D40001030 D40001050 D40001100

Step

Choose display option

TIC Controller
The TIC instrument controller offers comprehensive control and display of up to 6 compatible BOC Edwards gauges. Intuitive user interface, 6 set points and full Windows Software for control and data logging functionality. Features and Benefits Universal controller for up to 6 active gauges Compact design Clear, easy-to-use graphical user interface Serial communication Windows PC program
TM

Active Digital Controller

The Active Digital Controller (ADC) is a compact single gauge controller and display. It features a bright LED display and simple push button controls. The ADC automatically recognises compatible BOC Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. Features and Benefits Plug and measure operation Bright LED display for clear visibility Choice of display units - mbar, Torr, Pascal

Enhanced Active Digital Controller

The Enhanced Active Digital Controller (ADC) is a compact dual gauge controller and display. It features a bright LED display and simple push button controls for two compatible BOC Edwards gauges. The Enhanced ADC automatically loads the appropriate look-up table and displays the pressure in commonly used vacuum units. Features and Benefits Controls two active gauges of the same type 2 set-point relays Simple push button control RS232 interface and analog output

including data logger, plus analogue outputs RS232 interface and analog output

Controller
TIC Controller Active Digital Controller (ADC) Enhanced Digital Controller (eADC)

Part Number
D39701000 D39590000 D39591000

Max no. of gauges

6 1 2

No. of set points

6 0 2

Windows software?
Yes No No

Data Logging?
Yes No No

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43

Hardware

The BOC Edwards range of flange components conform to British and International standards. We supply a full range of NW (ISO-KF), ISO (ISO-K and ISO-F), CF fittings and valves. This brochure details our most popular flange components and valves. Please refer to our full Product Catalog for a complete list if there are any components that you require that are not listed here.

Chemical resistance This information is provided as a general guide only. Further guidance should be sought with respect to specific chemicals and their applications

Background Information
GENERALLY RESISTANT TO NITRILE Butadiene Acrylonitrile copolymer NEOPRENE Chloroprene polymer Many hydrocarbons, fats, oils greases, hydraulic fluids GENERALLY ATTACKED BY Ozone, ketones, esters, aldehydes, chlorinated and nitro hydrocarbons

Moderate chemicals and acids, ozone, oily fats, greases, many oils and solvents

Strong oxidizing acids and esters, ketones, chlorinated aromatic and nitro hydrocarbons

FLUOROELASTOMER Fluorocarbon polymer

Ketones, low molecular weight esters and nitro containing compounds

ALUMINUM Organic acids, fatty acids, freons, nitric acid STAINLESS STEEL Organic acids, alkalis, nitric acid. Sulphuric acid (10%) POLYMER Liquid crystal polymer Oxidizing chlorines, some organic acids, hydrochloric acid, hydrofluoric acid Strong acids, alkalis, chlorinated solvents, mercury

Organic acids, glycols, chlorinated solvents, ketones, mineral and oxidising acids, caustic solutions, freons

Sodium hydroxide, sulphuric acid (70%)

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Dimensions
Flange size
NW10 NW16 NW20 NW25

A
30 30 40 40

B
12.2 17.2 22.2 26.2

C
2 2 2 2

D
14 20 25 28

Physical data Operating pressure range (absolute) Stainless steel clamping ring and Co-Seal 10-7 mbar - 10 bar / 247 psi Stainless steel clamp and Co-Seal (all sizes) 10-7 mbar - 10 bar / 247 psi Polymer and aluminum clamps and Co-Seal NW10 to NW25 10-7 mbar - 10 bar / 145 psi NW trapped O ring Bellows 10-7 10-7 mbar - 10 bar / 145 psi O ring and centering ring (vacuum use only) 10-7 mbar - 1 bar / 14.5 psi mbar - 1 bar / 14.5 psi Flexible pipelines 10-7 mbar - 1.5 bar / 21 psi

Operating temperature The maximum temperature for continuous operation with fluoroelastomer is 150 C. It may be intermittently baked to 200 C. Polymer Co-Seal -10 to 80 C Aluminum Co-Seal and nitrile seal -10 to 100 C Aluminum Co-Seal and fluoroelastomer seal -10 to 200 C Polymer centering ring and nitrile O ring -10 to 100 C Polymer centering ring and fluoroelastomer seal -10 to 125 C Nitrile O ring -10 to 100 C Fluoroelastomer O ring -10 to 200 C Polymer clamp Constant vacuum use -10 to 100 C Intermittent vacuum use -10 to 125 C Stainless steel clamping ring -10 to 125 C Aluminum clamping ring -10 to 200 C Stainless steel clamp -10 to 200 C Standards compliance NW and ISO fittings Pneurop 6606 (1981), ISO1609 (1986), DIN28403, DIN28404

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Common Lab Components

Clamps, Tubes, Valves and Hose Adaptors
Clamps shown include our standard stainless steel clamping ring and our premium products - swing clamps and hinge clamps - both of which are available in polymer and aluminium and are easier to use than the clamping ring. The speedivalve is our best-selling manually operated valve and is simple to use. It incorporates indication of status and is available with either nitrile or fluoroelastomer diaphragm.
PVC Hose Clamp
Tube to fit NW10/16 NW20/25 Clip ID 25mm 36mm Order Number C10512408 C10514408

PVC Hose Adaptor

Flange Size NW10 NW16 NW16 NW25 Hose ID in (mm) 1/2 in (12.7) 1/2 in (12.7) 3/4 in (19.1) 1 in (25.4) Order Number C10504081 C10504104 C10504105 C10504225

Hinged Clamp
Flange Size NW10/16 NW20/25 Order Number Aluminium Polymer C10512402 C10514402 C10512303 C10514303

Stainless Steel Clamping Ring

Flange Size NW10/16 NW20/25 Order Number C10512401 C10514401

Swing Clamp
Flange Size NW10/16 NW20/25 Order Number Aluminium Polymer C10512403 C10514403 C10512304 C10514304

continued overleaf

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Reinforced PVC tube 1m lengths

D 1/2 in 3/4 in 1 in Order Number Rest of world N.A H02100016 H02100017 N. America A63012220 U3002173 A63012343

Reinforced PVC tube with NW flanges and hose clamps

Flange NW16 NW25 NW40 Order Number 500mm C10512055 C10514055 C10516055 1000mm C10512155 C10514155 C10516155

SP Speedivalve diaphragm isolation valve

Flange Size NW10 NW16 NW25 Order Number Nitrile Diaphragm C33105000 C33205000 C33305000 Fluoroelastomer Diaphragm C33155000 C33255000 C33355000

Flexible Pipelines
Flange Size NW10 NW16 NW25 Order Number 250mm long C10511285 C10512285 C10514285 500mm long C10511286 C10512286 C10514286

Blanking Flange
Flange Size NW10 NW16 NW25 Order Number Aluminium C10511368 C10512368 C10514368 Stainless Steel C10511366 C10512366 C10514366

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Common Lab Components

O-rings, Elbows, Cross pieces, T-pieces & Reducers
This page shows some of our other common hardware components and, in particular, our range of NW o-ring based seals. These include our standard o-ring with centering ring available in either nitrile or viton and with polymer, aluminium and stainless steel carriers. Material selection depends on application and outgassing, operating temperature and leak tightness requirements. Co-Seals keep the carrier out of the vacuum and thus have the added benefit of eliminating crevices and trapped volumes that can lead to instability and gas bursts. The centering rings are only designed for vacuum applications. Where some positive pressure may be seen (such as exhaust lines), Co-Seals and trapped o-rings should be used. They have carriers which support the o-ring on both sides, making them ideal for both vacuum and positive pressure use.

Centering Ring (Nitrile O-ring)

Flange Size NW10 NW16 NW25 Order Number Polymer carrier Aluminium carrier C10511393 C10512393 C10514393 C10511398 C10512398 C10514398 Stainless Steel carrier C10511396 C10512396 C10514396

Centering Ring (Fluoroelastomer O-ring)

Flange Size NW10 NW16 NW25 Order Number Polymer carrier Aluminium carrier C10511394 C10512394 C10514394 C10511397 C10512397 C10514397 Stainless Steel carrier C10511395 C10512395 C10514395

Trapped O-ring (Fluoroelastomer)

Flange Size NW10/16 NW20/25 Order Number C10512490 C10514490

Co-Seal (Nitrile O-ring)

Flange Size NW10/16 NW20/25 Order Number Polymer carrier Aluminium carrier B27158426 B27158447 B27158480 B27158490

Co-Seal (Fluoroelastomer O-ring)

Flange Size NW10/16 NW20/25 Order Number Polymer carrier Aluminium carrier B27158427 B27158448 B27158481 B27858491

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90 Elbow
Flange Size NW10 NW16 NW25 Order Number Aluminium Stainless Steel C10511410 C10512410 C10514410 C10511420 C10512420 C10514420

Cross Piece
Flange Size NW10 NW16 NW25 Length 60 mm 80 mm 100 mm Order Number Aluminium C10511412 C10512412 C10514412 Stainless Steel C10511422 C10512422 C10514422

T-Piece
Flange Size NW10 NW16 NW25 Length 60 mm 80 mm 100 mm Order Number Aluminium C10511412 C10512412 C10514412 Stainless Steel C10511421 C10512421 C10514421

Reducing Piece
Flange Size NW25/10 NW25/16 NW40/16 NW40/25 Order Number Aluminium Stainless Steel C10514436 C10514437 C10516438 C10516439 C10514446 C10514447 C10516448 C10516449

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Service and Support

LOCAL SUPPORT FROM A GLOBAL COMPANY You can expect that BOC Edwards will provide a local, rapid response and great value service, delivered by experts. With more than 70 service facilities worldwide, a team of over 1000 service engineers and technicians, and a growing network of service agents, we are never far away.

SAVE MONEY ON YOUR NEXT PURCHASE Refurbished Products Genuine BOC Edwards refurbished products provide a cost-effective route to expand, upgrade or replace your installations without sacrificing quality, reliability or performance. Like our Service Exchange product, refurbished products are tested as new and are supported by a 12-month warranty. RAPID AND CONVENIENT Product Repair, Overhaul and Exchange When products require more than just routine maintenance and you need the confidence afforded by an OEM guarantee, then choose from our range of product repair and overhaul services. BOC Edwards offers fixed price servicing for swift response and simple budgeting, or a flexible pricing structure for maximum cost control. If uptime is critical choose a Service Exchange product dispatched to you from local stock within hours.

WELL-MAINTAINED PRODUCTS RUN LONGER Service Spares, Kits, Tooling and Training Maximise the lifetime of your product by servicing your products regularly using original parts and tooling. Combine BOC Edwards spare parts and service tooling with our technician training courses to deliver years of trouble-free operation. FLEXIBLE SERVICE PACKAGES Onsite Support, Service Contracts and Agreements With any of our tailored contracts, you can combine any of our services into one package, whether for one off plant relocations or longer term equipment maintenance and management. For smaller installations, BOC Edwards provides standard fixed price contracts for simple budgeting and cost management.

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GLOBAL EXPERTISE
We develop or manufacture the training, processes, tooling and parts used throughout our expanding service network at the factories where we develop and manufacture our products. As you would expect from a responsible, global company, we operate under ISO9001 and ISO14001 accreditation.

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Reference Guides
The following information is intended to be used as a reference source only. If you need detailed advice on any aspects of vacuum technology, feel free to email us at info@bocedwards.com. Contents: Unit Conversion Tables Pressure Conversion Table, Leak Rate Conversion Table, Pumping Speed Units Common Vacuum Formulas Conductance, Gas Load, Pumping Speed

Unit Conversion Tables

Pressure Conversion Table
mbar
1 mbar 1 bar 1 torr 1 Pa 1 atm 1 in Hg 1mm Hg 1 in H20 1 mm H20 = = = = = = = = = 1 1x103 1.33 0.01 1.01 x103 33.86 1.33 2.49 9.81 x10-2

bar
1x10-3 1 1.33x103 1 x10-5 1.013 3.39 x10-2 1.33 x10-3 2.49 x10-3 9.81 x10-5

torr
0.75 7.5x102 1 7.5 x10-3 7.6 x102 25.4 1 1.868 7.35 x10-2

Pa
1x102 1x103 1.33 x102 1.01 x105 1.013 x105 3.39 x103 1.33 x103 2.49 x102 9.81

atm
9.87x10-4 0.987 1.32x10-3 1 1 3.34 x10-2 1.32 x10-3 2.46 x10-3 9.68 x10-5

in Hg
2.95x10-2 29.53 1.36x10-2 2.95 x10-4 29.92 1 3.94 x10-2 7.36 x10-2 2.90 x10-3

mm Hg
0.75 7.5x102 1 7.6 x10-3 7.6 x102 25.4 1 1.87 7.35x10-2

in H20
0.40 4.02x102 0.54 4.02 x10-3 4.07 x102 13.6 0.535 1 3.39x10-2

mm H20
10.20 1.02x104 13.59 0.102 1.03 x104 3.45 x102 13.59 25.4 1

Leak Rate Conversion Table

mbar l/s-1
1 mbar l/s-1 1 torr l/s-1 1 atm cm3 s-1 1 atm ft3 min-1 1 kg/h air (20 C) = = = = = 1 1.333 1.013 4.78 x102 230

torr l/s-1
0.75 1 0.76 3.58 x102 175

atm cm3 s-1

0.987 1.316 1 4.72 x102 230

atm ft3 min-1

2.097 x10-3 2.795 x10-3 2.12 x10-3 1 -

kg/h air (20C)

4.3 x10-3 5.7 x10-3 4.3 x10-3 1

Pumping Speed Units

l/s-1
1 l/s-1 1 l/min-1 1 ft3 min-1 1 m3/h-1 = = = = 1 0.0167 0.472 0.278

l/min-1
60 1 28.32 16.67

ft3 min-1
2.12 0.0353 1 0.5890

1m3/h-1
3.60 0.06 1.70 1

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Common Vacuum Formulas

Conductance

Conductance - Series

Conductance- Parallel

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53

Reference Guides

Common Vacuum Formulas

Gas Load

54

Pumping Speed

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55

Reference Guides

56

Periodic Table

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57

Notes

58

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