error - incorrect state that may lead to failure failure - deviation of the service from the correct service Fault : An incorrect step, process, or data definition in a computer program which causes the program to perform in an unintended or unanticipated manner. It is an inherent weakness of the design or implementation which might result in a failure. A fault might be present and latent in the systems like they were in Patriot Missile failure and Therac-25 accidents. These faults lead to a failure when the exact scenario is met. Fault avoidance using techniques and procedures which aim to avoid the introduction of faults during any phase of the safety lifecycle of the safety-related system Fault tolerance the ability of a functional unit to continue to perform a required function in the presence of faults or errors Error : A discrepancy between a computed, observed, or measured value or condition and the true, specified, or theoretically correct value or condition. Failure: The inability of a system or component to perform its required functions within specified performance requirements WIKI source Fault: A fault (which is usually referred to as a bug for historic reasons) is a defect in a system. The presence of a fault in a system may or may not lead to a failure. For instance, although a system may contain a fault, its input and state conditions may never cause this fault to be executed so that an error occurs; and thus that particular fault never exhibits as a failure. Error: An error is a discrepancy between the intended behaviour of a system and its actual behaviour inside the system boundary. Errors occur at runtime when some part of the system enters an unexpected state due to the activation of a fault. Since errors are generated from invalid states they are hard to observe without special mechanisms, such as debuggers or debug output to logs. Failure: A failure is an instance in time when a system displays behaviour that is contrary to its specification. An error may not necessarily cause a failure, for instance an exception may be thrown by a system but this may be caught and handled using fault tolerance techniques so the overall operation of the system will conform to the specification. FINLAND source Fault Fault is a defect within the system Examples: Software bug, Random hardware fault , Memory bit stuck, Omission or commission fault in data transfer , Etc. Error Error is a deviation from the required operation of system or subsystem A fault may lead to an error, i.e., error is a mechanism by which the fault becomes apparent Fault may stay dormant for a long time before it manifests itself as an error: Example: memory bit got stuck but CPU does not access this data, Software bug in a subroutine is not visible while the subroutine is not called Failure A system failure occurs when the system fails to perform its required function Presence of an error might cause a whole system to deviate from its required operation One of the goals of safety-critical systems is that error should not result in system failure