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y
.
forms nitrito type adsorbates ONO , and dissociates into
y q
. w x
nitrosyl type adsorbates NO , NO 14 . That is, the
abnormal response of sensor for NO above 2508C might
2
originate from the superior number of NO
q
adsorbates
y
w x
than NO adsorbates 15 .
Fig. 4 illustrates NO gas sensitivities of WO sensors
2 3
fired in the temperature range of 6008C8008C. The sensi-
tivity of the sensor fired at 6008C is similar to that at
7008C. But the sensitivity of the sensor fired at 8008C was
very low. That is caused by the reduction of effective
surface area of the sensor for NO gas detection with
2
higher firing temperature as mentioned in the results of
BET and SEM. The maximum sensitivity of the sensors
for NO gas is shown at the operation temperature of
2
1008C. The increase of sensitivity until 1008C may origi-
Table 2
Average crystallite sizes of WO powder and thick films fired at various
3
temperatures
Powder 6008C 7008C 8008C
. Avg. crystallite size A 562 592 596 595
( ) Y.-K. Chung et al.rSensors and Actuators B 60 1999 4956 52
Fig. 3. Dependence of resistance of WO thick films upon firing and operating temperatures for NO gas.
3 2
( ) Y.-K. Chung et al.rSensors and Actuators B 60 1999 4956 53
. Fig. 3 continued .
Fig. 4. Sensitivity of WO thick films with changing the firing and operating temperature.
3
( ) Y.-K. Chung et al.rSensors and Actuators B 60 1999 4956 54
Fig. 5. Gas response and recovery characteristics of the WO thick films with firing condition.
3
nate from the removal of H O adsorbed on the surface of
2
WO thick film which makes the adsorption site for NO
3 2
gas. The increasing number of NO
q
adsorbates than NO
y
causes the continuous reduction of sensitivity above 1008C.
When the operating temperature was kept over 2508C, the
sensors had no sensitivity to NO gas. The response and
2
recovery speed for NO gas with firing conditions was
2
shown in Fig. 5. The sensing layer fired at 7008C indicates
the excellent response and recovery characteristics and the
saturated stable sensitivity.
Fig. 6 shows sensing characteristics of WO sensors
3
having different degree of oxygen deficiency for NO gas,
2
which were heat-treated at 7008C in various argon and
.
oxygen ratio to control the oxygen deficiency x value of
.
WO . In Fig. 6 a , initial resistance of gas sensor in-
3yx
creased up to 50% oxygen portion but decreased above
..
that point. Gas sensitivity Fig. 6 b had the same ten-
dency as initial resistance. When the heat-treatment atmo-
sphere was near 40%50% of oxygen portion in ArO
2
flow, WO sensors having optimum oxygen deficiency
3
show the best sensitivity for NO gas. This result suggests
2
that the sensitivity of WO gas sensor is dependent on its
3
resistance and oxygen deficiency. Based on this result of
our study, the authors intend to develop future studies to
investigate electronic properties of WO gas sensor and
3
calculate its number of mobile electrons.
4. Conclusions
WO sensor for NO gas detection was fabricated by
3 2
screen printing method. The firing of WO thick film was
3
performed at various firing temperatures and WO sensor
3
were heat-treated in various atmosphere of ArO flow.
2
The WO thick film fired at 7008C and operated at 1008C
3
showed excellent properties, which were fast response
time, saturated stable sensitivity and rapid recovery charac-
teristics to NO gas in air. This is because the effective
2
adsorption site of WO thick films to adsorb NO gas
3 2
increased from a micro-structural point of view. The maxi-
mum sensitivity of sensors to NO gas was observed when
2
the heat-treatment atmosphere was near to 40%50% of
oxygen portion in ArO flow. The control of oxygen
2
content of WO sensor was also important to improve the
3
sensitivity similar to microstructure control.
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Yong-Keun Chung received his MS degree in 1999, and is currently PhD
student at Hanyang University and research fellow in Korea Testing
. Laboratory KTL . His research has been mainly in the fields of elec-
tronic ceramics, especially gas sensor technology.
Woo-Sik Um received his PhD degree from KAIST in 1992, and the
subject of his thesis was superconductors. He is presently a senior
researcher at the KTL. His current interests are mainly powder synthesis
technology and electronic ceramics such as sensors and piezoelectric
transformers.
Hee-Soo Lee received his PhD degree on the subject of PZT thin film
from Hanyang University in 1998. He is working as a senior research
fellow at the KTL. His research interests include environmental ceramics.
Mi-Hyang Kim received her MS degree from Pusan University in 1995,
and she is working as a researcher at the KTL. Her current interests are
powder synthesis and organic chemistry.
Jun-Kwang Song received his MS degree from Yonsei University in 1995
and he is currently completing a PhD thesis on the subject of piezoelec-
tric transformers. He also works at KTL.
Sung-Churl Choi received his PhD degree in structural composite ceram-
ics from Stuttgart University in 1987. He was a research fellow at
Max-Plank Institute, Germany, from 1984 to 1987. He has been a
professor at Hanyang University, Korea. His research interests are in the
areas of structural ceramics, ceramic processing, and advanced compos-
ites.
Myung-Jin Lee received his MS degree from Jungang University in 1991.
He is a senior research fellow at research and development laboratory,
Daejoo Fine Chemical, Korea. His research interest is in the field of
powder preparation.
Kang-Myung Yi received his MS degree from Korea University in 1991.
He is a senior research fellow at research and development laboratory,
Daejoo Fine Chemical, Korea. His research interest is in the field of thick
film technology.
Kyung-Won Chung received his MS degree from Yonsei University in
1991 and he is in the course of getting his PhD degree. He is chief of
research and development, Daejoo Fine Chemical, Korea. Research inter-
ests of his lab are in the field of powder preparation and thick film
technology.