IEEE Industry Applications Society

Annual Meeting
New Orleans, Louisiana, October 5-9, 1997
Constant Charge and Constant Potential Models
for Electrostatic Discharge (ESD) and the Human Body
William D. Greason
Department of Electrical & Computer Engineering
Faculty of Engineering Science
University of Western Ontario
London, Ontario, Canada
N6A 5B9
Phone: (519) 679-21 11 ext. 8334 Fax: (519) 661-3488
Abstract - Real electrostatic discharge (ESD) events
are charge driven phenomena. System capacitance
coefficients and bodypotentials change as a charged
body approaches another body; a discharge occurs
when the electric field between the bodies exceeds
the critical breakdown value. Test methods used to
simulate ESD are vortage driven; both air discharge
and direct current injection methods are specified in
terms of the potential applied to the probe of the
simulator. In this work, the results of an analysis of
constant charge and constant potential models for
ESD involving the human body and another body are
presented. The interpretation of the results provide a
better understanding of ESD test methods and their
use in the simulation of real ESD events.
1. INTRODUCTION
Electrostatic discharge (ESD) is a charge driven phe-
nomenon [l]; a summary of the research on the subject
in recent years has been documented [2]. The human
body is a prime cause for ESD; in the Human Body Model
(HBM), the human body, charged by triboelectrification,
causes a discharge during approach to a device or system
which may either be floating or grounded. It is charge on
the human body and the systems capacitance coeffi-
cients which determine body potentials (and the relative
probability of a discharge) and body energies (and the
relative severity of the discharge) [2].
A two sphere system is used to model the approach of
the human body (body 1) to a second body (body 2) which
is either floating or grounded; the radius of sphere 1 is
fixed; the radius of sphere 2 is a variable. The following
cases were analyzed: (a) body 1, with fixed charge,
approaches body 2 until a discharge occurs; (b) body 1,
with fixed potential, approaches body 2 until breakdown
results; (c) body 1 is established at a fixed potential and
is located (but insulated) from body 2 at a fixed distance;
a discharge is effected by the closing of a switch which
connects the two bodies.
1891
0-7803-4067-1 /97/$I O.00 0 1997 IEEE.
2. REVIEW OF STANDARDS
HBM test standards have gradually evolved and are
commonly used in the classification of semiconductor
devices and electronic systems for ESD sensitivity [3-81.
Acapacitor, typical value 100 pF, is charged to a specified
potential, and then discharged to the device under test
through a non-inductive resistor, typical value 1500!2. The
characteristics of the current waveform are fully specified
for a short circuit and 500R resistive load, along with the
waveform verification equipment. For the HBM, ESD
sensitive components are classified according to their
ESD withstand voltage; various classes are specified in
the range of 0 to 8 kV.
A variation of the HBM is the Machine Model (MM), which
simulates an ESD event occurring from a low resistance
source, such as a machine 91. The discharge network
zero ohms of series resistance and 0.75 FH of series
inductance. For the MM, components are classified
according to voltages in the range of 0 to 800V.
Two modes of o eration can be specified for tests
the second, direct current injection. In the air discharge
mode, a spark from the test finger of the ESD generator
is discharged into the air towards the device or equipment
under test (EUT). In the direct current injection mode, or
contact discharge mode, an impulse is released from the
ESD generator through a relay which is located in close
proximity to the tip of the generator. The tip is in actual
contact with the EUT where the discharge is actuated via
the relay. Most test methods prefer the use of contact
discharge where feasible; test results for this mode of
operation are more repeatable and reproducible com-
pared to the air discharge mode.
3. OBJECTIVES
It is of interest to examine HBM ESD in more detail. In
specific, electrostatic discharge parameters are analyzed
and compared for three modes of ESD involving the
human body; the three modes are defined as follows.
consists of a charged 200 p F capacitor and (nominally)
involving HBM ES E ; the first being an air discharge and
Mode I (constant charge): the human body with aconstant
charge approaches another body until adischarge occurs;
Mode II (constant potential): the human body with con-
stant potential approaches another body until a discharge
occurs; Mode I l l (contact mode): the human body is
established at a fixed potential and is located (but insu-
lated) from another body at a fixed distance; a discharge
is effected by the closing of a switch which connects the
two bodies.
[a1
4. DEFINITION AND ANALYSIS OF MODES
OF HBM ESD
In general, Maxwells equations apply for the two body
problem.
Qi = clivi + ci2V2 (1)
Q2 = c12Vi + cZzV2 (2)
In this analysis, a two sphere model will be used in which
the human body, body 1, is modelled as a sphere with
radius 0.5 m and the second body is another sphere, with
a radius 0.25m, 0.5m or 1 m. A sphere of radius 0.5m was
chosen to model the human body since it gives an
equivalent capacitance estimated to be within an error of
10% (10,111. For a given size of spheres and separation,
an analytical solution exists for the capacitance coeffi-
cients of the system [12]. For two spheres of radii r with
a potential difference V and separation d, the electric field
is approximately [ 131:
V r+d12
d r
E = 0.9- -
(3)
For a sphere of radius r and potential V located at a
distance d from a ground plane, the electric field is
approximately [13]:
V r + d
d r
E = 0.9- -
(4)
In this analysis, the radius of body 1 was fixed at 0.5m
while the values of 0.25m, 0.5m and 1 m were used for the
radii of body 2 to show the relative effect of differential
body size. Body separations in the range of 1 to 5 mm
were studied. For this range of parameters, the electric
field is approximately:
( 5)
V
E = 0.9 -
d
4.1. Mode I HBM ESD [Fixed Charge]
A floating source with fixed charge approaches another
conducting body until a discharge occurs; the second
body or sink can be either floating or grounded. This mode
best represents the real ESD event involving the human
body and another body.
4.1.1. Case 1: Floating Body 2 with Q2 =0.
The model is shown in Figure 1; Maxwells equations
become :
Qi = clivi + c12V2 (6)
0 = Cl2V1 + cnv2 (7)
Fig 1
[bl
Mode I HBM ESD: Body 1 with Fixed Charge and Floating
Body 2
[a] Approach [b] Discharge
Before the discharge:
Vi = Ql/[c11-c:2/cZI
The initial energy can be calculated:
1
2
Wi = - QIVl
The electric field is approximated as:
vi- v2
E = 0.9 -
d
The charge transferred between the source and the sink
during the discharge can be calculated:
Qi k12 +CZI
42 = C11+2c 12+C,
The final energy of the system is:
1
2
wf = - Q:/[cll +kl2+cZz1 (13)
The energy dissipated in the discharge is given by the
difference between Wi and W,:
4.1.2. Case 2: Grounded Body 2
The model is shown in Figure 2; Maxwells equations
become:
Qi = clivi (15)
Q2 = ci2Vi
Before the discharge:
1892
Qi
vi = -
c11
(19)
1
Wi = 2 Q:/c,,
After the discharge:
In the arc connecting body 1 to body 2, a charge Q, is
transferred; in the ground connection to body 2, a charge
I Q, I - I Qz I is transferred.
q1 =q2 =vi =v2 =0; w,= 0
Fig 2 ModelHBM ESD: Body1 withFixedChargeandGrounded
Body 2
[a] Approach [b] Discharge
4.2. Mode II HBM ESD [ Fixed Potential]
A floating source with fixed potential approaches another
conducting body until a discharge occurs; the second
body or sink can be either floating or grounded. This mode
represents the air discharge test method involving the
human body and another body.
4.2.1. Case 1 : Floating Body 2 with Q2 =0.
The model is shown in Figure 3. The large resistor R allows
charge to be supplied from the potential source V,; it is
also assumed that it effectively isolates the sphere from
the potential source at the moment of breakdown. Before
the discharge:
v2 = Vl ClJ C2.2 (20)
v,- v2 = v, [l +c,~c22] (21 1
121 = Vi [ ~ 1 1 - - ~ k . J (22)
(23)
During the discharge, the charge transferred in the dis-
charge from body 1 to body 2 is:
1
wi = 5 v, [c1,--c~2/c,1
[a1 Ibl
Fig 3 Model1 HBM ESD: Body 1 with Fixed Potential and Floating
[e] Approach [b] Discharge
Body 2
The final energy of the system is:
The energy dissipated in the discharge is given by W, -
4.2.2. Case 2: Grounded Body 2
The model is shown in Figure4. The large resistor R allows
charge to be supplied from the potential source V,; it is
also assumed that it effectively isolates the sphere from
the potential source at the moment of breakdown. the
initial energy of the system is:
Wi.
1
2
wi = - c,,v;
The charge transferred in the arc between body 1 and
body 2 is:
The charge transferred in the ground connection to body
2 is:
Qi = clivi (27)
I v, I rc11 - I c12 I1 (28)
4.3. Mode 111 HBM ESD [Fixed Potential and Separa-
A floating source with fixed potential is positioned at a
specified distance and insulated from another conducting
body ; the discharge is initiated by the closure of a switch
connecting the two bodies; the second body or sink can
be either floating or grounded. This mode represents the
current injection test method involving the human body
and another body.
4.3.1. Case 1 : Floating Body 2 with Q, =0.
The model is shown in Figure 5. It is assumed that the
insulator separating the two bodies has a dielectric con-
stant equal to one and has sufficient dielectric strength to
prevent a discharge from occurring between the two
bodies. The large resistor R allows charge to be supplied
from the potential source V,; it is also assumed that it
effectively isolates the sphere from the potential source
at the moment of breakdown. Before the discharge:
tion; Close Switch to Initiate Discharge]
1893
[a1 [bl
Fi g4 Mode I1 HBM ESD: Body 1 with Fixed Potential and
Grounded Body 2
[a] Approach [b] Discharge
r--F-vl / sw
14 [bl
Fi g5 Mode 111 HBM ESD: Body 1 with Fixed Potential and
Separtion from Floating Body 2; Close Switch to Initiate
Discharge
[a] Approach [b] Discharge
v2 = -V,C1JCZz (29)
V1-V2 = v, [l +C12/CU] (30)
(31)
1 1
= 5 QIVl = - V, [ c , , - c , J c ~]
2
Wi
The discharge is effected by closing the switch SW; the
charge transferred in the discharge between body 1 and
body 2 is:
The final energy of the system is:
(33)
1 1
Wr = - v, [Cl, - c122/c,12
2 c11+ 2 1 2 +CZ?
4.3.2. Case 2: Grounded Body 2
The model is shown in Figure 6; the initial energy of the
system is:
1
2
wi = - Cl1V, (34)
The discharge is effected by closing switch SW; the
charge transferred in the discharge between body 1 and
body 2 is:
[a1 [bl
Fi g6 Mode 111 HBM ESD: Bod 1 with Fixed Potential and
Separtlon from Grounded 8ody 2; Close Switch to Initiate
Discharge
[a] Approach [b] Discharge
The charge transferred in the ground connection to body
2 is:
I v, I k 1 1 - I c12 I1 (36)
5. RESULTS
HUMAN BODY WITH BODY 2 FLOATING
5.1. Mode I HBM ESD [Fixed Charge]
The body potential difference and separation at discharge
for the three test geometries are shown in Figure 7. A
charge of 1pC was assumed for body 1 based on typical
charge densities due to triboelectrification [14] and an
estimate of the surface areas involved in the charging of
the clothing and foot wear associated with the human body
[ 151. The energy dissipated and the charge transferred in
the discharge are plotted in Figure 8. A summary of the
ESD parameters at discharge forthe three test geometries
is provided in Table 1.
5.2. Mode I I HBM ESD [Fixed Potential]
The test voltage V, was allowed to vary over a range of
1 kV to 10 kV. The critical separation at discharge vs
test voltage for the three test geometries is shown in
Figure 9; the energy dissipated in the discharge vs test
volta e is plotted in Figure 10. The charge transferred
voltage is presented in Figure 11. A summary of the
ESD parameters at discharge for the three test geome-
tries is provided in Table 2.
5.3. Mode 111 HBM ESD [Fixed Potential and Separa-
The test voltage V, was allowed to vary over a range of 1
kV to 10 kV; the separation between body 1 and body 2,
d, varied from 1 to 5. The insulator placed between
the two bodies prevented the discharge from occurring
until initiated by the closure of the switch. Typical plots are
shown only for the case where the bodies have equal size
(r1=r2=0.5m); the results for the other test geometries are
summarized in Table 3.
from ?XI dy 1 to body 2 during the discharge vs test
tion; Close Switch to Initiate Discharge]
1894
e , I12
1 1
A B C
TEST GEOMETRY
Fig 7 Mo d e I HBM ESD: Body Potential Difference and Critical
Separation at Discharge vs Test Geometry for Body 1
Floating and Bod 2 Floating A:r,=l m, r1=0.5m; B:r,=O.Sm,
r,d.sm; C:rz=0.2L, rl=0.5mf. Ql= I+.
1 9
2 -
9
- OB
0 6
-
0 1 I o
A B C
TEST GEOMETRY
Fig 8 Mode I HBM ESD: Energy Dissipated and Charge Trans-
ferred durin Discharge vs Test Geometry for Bod 1
Floating andtod 2 Floating A:r,=lm, r,=O.Sm; B:r,=O.&n,
rl=0.5m; C:r,=O.An, r,=O.smf. Ql= 1pc.
A
0
0 2 4 6 8 10 12
TEST VOLTAGE, kV
Fig 9 Mode I 1HBM ESD: Critical Separation at Dischar e vs Test
Voltage for Bod 1 Floating and Bod 2 Floatin fA:r,=lm,
r,=O.Sm; B:r2=O&n, r,=O.Sm; C:r,&m, r,=O.fm].
0 2 4 S 8 10 12
TEST VOLTAGE, kV
Fig 10 Mode I 1HBM ESD: Ener y Dissipated in Dischar evs Test
Voltage for Body 1 Fleeing and Body 2 Floaling~A:r,=l m,
r,=O.Sm; B:r,=O.Sm, r1=O5m; C:r2=0.25m, r,=O.Sm].
03
I
0
::i 0
0 2 1 6 8 10 12
TEST VOLTAGE, kV
Fig 11 Model1 HBM ESD:ChargeTransferredin Dischar evsTest
Voltage for Body 1 Floating and Bod 2 Floatin fA:r,=l m,
rl=0.5m; B:r2=0.5m, rl=0.5m; C:r,=O.ISm, r, =O. ! ! m] .
Table 1
Comparison of Parameters for Mode I HBM ESD
[Body 2 Floating]
System AV.kV d,mm A W , d Q . ~ C
A 5.03 1.50 1.95 0.78
B 4.26 1.27 1.06 0.5
C 2.97 0.89 0.33 0.23
[r*=11
[r2=0.5]
[r2=0.25]
1895
Table 2
Comparlron of Parametcm for Mode I1HBM ESD
[Body 2 Floating]
0.6
os
0 0.4
3
6 0 3 -
0.2
0. l
A B C
[r2=1] [r2=0.5] [r2=0.25]
d,mm
---
Vl=l kV 0.113 0.074 0.045
V1=lOkV 1.23 0.81 0.49
AW, PJ
---
Vl=l kV 12.57 4.135 0.98
Vl=lOkV 1.32mJ 451 108
9 2 0 PC
-
-
-
-
-
t
Vl=l kV 0.066 0.034 0.013
Vl=lOkV 0.65 0.33 0.132
Table 3
Comparison of Parameters for Mode i l l HBM ESD
[Body 2 Floating]
A [r,=lm] B [r2=0.5m] C [r2=0.25m]
d d d d d d
[Imm] [5mm] [lmm] [5mm] [lmm] [5mm]
AV. kV
Vl=l kV 0.402 0.458 0.274 0.325 0.176 0.217
Vl=10 kV 4.02 4.58 2.74 3.25 1.76 2.17
AW, PJ
Vl=l kV 13.1 14 4.56 5.25 1.16 1.42
Vl=lOkV 1310 1399 456 525 116 142.4
Ql, PC
Vl=l kV 0.084 0.079 0.0665 0.0646 0.0587 0.0582
Vl=lOkV 0.84 0.79 0.665 0.646 0.587 0.582
9 2 9 PC
Vl=l kV 0.065 0.061 0.033 0.032 0.013 0.0131
Vl=10 kV 0.65 0.61 0.33 0.323 0.132 0.131
The potential difference vs test voltage for the five body
separations is shown in Figure 12; the energy dissipated
in the discharge vs test voltage is presented in Figure 13.
The charge on body 1, Q,, vs test voltage for the various
body separations is shown in Figure 14; the charge
transferred between body 1 and body 2 during the
discharge vs test voltage IS presented in Figure 15. The
electric field between the two bodies before initiation of
the dischar e normalized to a value of 30 kV/cm, vs test
voltage is s k wn in Figure 16.
-- I
0 2 4 6 0 10 12
V1. kV
Fig 12 Mode 111 HEM ESD: Potential Difference (Vl-VJ vs Test
Voltage for Body 1 Floating and Bod 2 Fioatin for Body
Separation from 1 to 5". Test Eeometry \:r2=0.5m,
r1=0.5m
0 4 6 8 10 12
Vi , kV
Fig 13 Mode 111 HBM ESD: Energy Dissipated in Dischargevs Test
Voltage for Body 1 Floating and Bod 2 Floatin for Body
Separation from 1 to 5". Test geometry \:r2=0.5m,
r1=0.5m
I d=l
0.7 ,
0 2 4 6 8 10 12
V1. kV
Fig 14 Mode 111 HBM ESD: Charge on Bod 1 ((2,) vs Test Voltage
for Body 1 Floating and Body 2 FLatrng for Body Sepa-
ration from l to 5". Test Geometry B:r,=O.Bm, r1=0.5m
1896
d-1
-
.
-
-
d-2
d-3
1
on
0.6
0.4
0.2
1 2 , 11.2 V l
1
~
d-4
_ _
d-5
d-1
-
6-2
4-3
- - - - - - -
a=a
_ _
d S
2 1 ___________________L- - - -------
t
c-
I
L 0 C
TEST GEOMETRY
Fig 17 Mode I HBM ESD:Body Potential Difference and Critical
Separation at Discharge vs Test Geometry for Body 1
Floatin and Body 2 Grounded [ A:r =lm, r,=0.5m;
B:r2=0.!m, r1=0.5m; C:r2=0.25m, rl=0.5m]. d1= 1pC.
~ ~~
0 2 4 6 a 10 12
V1, kV
Fig 16 Mode 111HBM ESD: Normallzed Electric Field at Discharge
vs Test Voltage for Body 1 Floating and Body 2 Floating
for Body Separation from 1 to 5mm. Test Geometry
B:r,=OSm, r1=0.5m
6. RESULTS
HUMAN BODY WITH BODY 2 GROUNDED
6.1. Mode I HBM ESD [Fixed Charge]
The body potential difference and separation at discharge
for the three test geometries are shown in Figure 17;
again, a charge of 1pC was assumed for body 1. The
energy dissipated and the charge transferred in the
discharge are plotted in Figure 18. A summary of the ESD
parameters at discharge for the three test geometries is
presented in Table 4.
6.2. Mode I I HBM ESD [Fixed Potential]
The test voltage V, was allowed to vary over a range of
1 kV to 10 kV. The critical separation at discharge vs
test voltage for the three test geometries is shown in
Fi ure 19; the energ dissipated in the discharge vs test
to ground during the discharge vs test voltage is pres-
ented in Figure 21. A summary of the ESD parameters
at discharge for the three test geometries is presented
in Table 5.
vo 9 tage is plotted in F igure 20. The charge transferred
____________------------
o s 0
A B C
TEST GEOMETRY
Fig 18 Mode I HBM ESD:Energy Dissipated and Charge Trans-
ferred to Ground during Discharge vs Test Geometry for
Body 1 Floating and Body 2 Grounded [ A:r2=lm, r1=0.5m;
B:r,=O.Sm, r1=0.5m; C:rZ=0.25m, rl=0.5m]. Ql= 1pC.
3 -
25
-
E 2 -
E .
U- 1s -
1 -
05 -
0 1
0 2 4 6 a 10 12
TEST VOLTAGE, kV
Fig 19 Mode II HBM ESD:Critical Separation at Discharge vs Test
Voltage for Body 1 Floatin and Body 2 Grounded [
A:r =1 m r1=0.5m; B: r, =O. ! m, r1=0.5m; C:r2=0.25m,
r,=d.smj.
1897
Table 4
Comparison of Parameten for Mode I HBM ESD
[Body 2 Grounded]
System AV, W d,mm A W , d qpd.pC
A 6.39 1.90 3.19 0.18
Ir2=11
OS
0.4
B 7.74 2.30 3.87 0.30
[r2=0.5]
A
,a'
-
/** B
- -*
C
- - - - - - -
,,,=- /--'
,- . /'
C 9.80 2.94 4.90 0.46
[rz=0.25]
Table 5
Comparison of Parameters for Mode ii HBM ESD
[Body 2 Grounded]
d,mm
Vl=l kV 0.3 0.3 0.3
V,=lOkV 3.0 3.0 3.0
Awn pJ
Vl=l kV 91.4 76.5 60.6
Vl=lOkV 7.5mJ 6.3mJ 5.lmJ
%9 PC
Vl=l kV 0.027 0.038 0.047
V,=lOkV 0.275 0.386 0.474
8.wm ,
1 "
0 2 4 6 8 10 12
TEST VOLTAGE, kV
Fig 20 Mode II HBM ESD:Energy Dissipated in Discharge vs Test
Voltage for Body 1 Floatin and Body 2 Grounded [
A-r -1 m, rl=0.5m; B:r,.O.kn, r,=0.5m; C:r2=0.25m,
r1&m].
6.3. Mode 111 HBM ESD [Fixed Potential and Separa-
The test volta e VI was allowed to vary over a range of 1
d, varied from 1 to 5". The insulator placed between
the two bodies prevented the discharge from occurring
until initiated by the closure of the switch. Typical plots are
tion; Close Switch to Initiate Discharge]
kV to 10 kV; t a e separation between body 1 and body 2,
Table 6
Comparison of Parameters for Mode 111 HBM ESD
[Body 2 Grounded]
A [r,=lm] B [rz=0.5m] C [r2=0.25m]
d d d d d d
[lmm] [5mm] [lmm] [5mm] [lmm] [5mm]
Vl=l kV 83.97 69.9 70.2 59.4 55.9 48.6
Vl=10 kV 8.4mJ 7.0mJ 7.0mJ 6.6mJ 5.6mJ 4.9mJ
a,, PC
Vl=l kV 0.168 0.14 0.14 0.12 0.112 0.097
Vl=10 kV 1.68 1.4 1.4 1.19 1.12 0.972
a. uc
Vl=l kV 0.0275 0.0275 0.0386 0.0386 0.047 0.047
Vl=10 kV 0.275 0.275 0.386 0.386 0.47 0.47
The energy dissipated in the discharge vs test voltage
for the five body separations is shown in Figure 22; the
charge on body 1, Q,, vs test voltage is presented in
Figure 23. The charge transferred in the ground con-
nection during the discharge vs test voltage is pres-
ented in Fi gur e 24. Th e el ect ri c f i el d between the two
bodies before initiation of the discharge, normalized to a
value of 30 kV/cm, vs test voltage is shown in Figure
25.
7. DISCUSSION
For Mode I HBM ESD, the potential difference between
the two bodies and the charge transferred in the discharge
are proportional to the charge on the human body Q, and
are a function of the capacitance coefficients associated
with the test geometry at the critical separation of the
1898
bodies. The energy dissipated in the discharge depends
on Q: and is also a function of the capacitance coefficients
for the system.
For Mode II and Mode Ill HBM ESD, the potential
difference between the two bodies and the charge
transferred during the discharge are proportional to the
potential of the human body V, and are a function of the
system capacitance coefficients associated with the test
geometry at either the critical or specified separation. The
energy dissipated in the discharge depends on V:and the
capacitance coefficients.
~
36
3 -
2 5 -
0 2 4 6 8 10 12
V1, kV
Fig 22 Mode 111HEM ESD: Ener y Dlssl ated in Dlschar evs Test
Voltage for Body 1 Floatkg and i ody 2 GroundA for Body
Separation from 1 to 5mm. Test Geometry B:r,=O.Sm,
r1=0.5m
d - l mm
-
d - 2
d - 3
d- Unm
- - - - - - -
--
d - 5
.- I
d - l mm
0 2 4 6 8 10 12
V1. kV
Fig 23 Mode 111HBM ESD: Charge on Bod 1 (0,) vs Test Volta e
for Body 1 Floating and Body Grounded for Bo! ,
Separation from 1 to 5mm. Test Geometry B:r,=O.Sm,
r,=O.Sm
For Mode I and Mode II HBM ESD, a critical separation
exists at which a discharge occurs for an assumed electric
field strength of 30 kV/cm. For Mode Ill HBM ESD, the
insulator positioned between the two bodies is assumed
to have sufficient dielectric strength to prevent a discharge
from occurri until the switch is closed. Table 7 rovides
of 30 kV/cm for the different test geometries and test
conditions. For a test voltage of 10 kV applied to body 1
with body 2 grounded, and with an insulator thickness of
l mm, the calculated field strength is of the order of 90
kVIcm.
a summary Y o the electric fields, normalized to t c: e value
A global comparison of the worst case ESD parameters
forthe three different modes with thecondition of afloating
body 2 is presented in Table 8. Both the charge transferred
and the energy dissipated in the discharge increase as
the size of body 2 increases relative to body 1. There is
a general agreement in the values of AW and q, for the
three different modes; as the size of body 2 decreases
relative to body 1, results for Mode II and Ill HBM ESD
decrease relative to the Mode I results.
os, I A
d d d d d d
[lmm] [5mm]. [lmm] [5mm] [lmm] Ismm1
Body 2 Floating
V1=l kV 0.12 0.0275 0.0823 0.0195 0.0527 0.0130
Vl=10 kV 1.21 0.275 0.823 0.195 0.527 0.130
Body 2 Grounded
Vl=l kV 0. 3 0.06 0.3 0.06 0.3 0.06
Vl=10 kV 3.0 0.6 3.0 0.6 3.0 0.6
1899
A comparison of the ESD parameters for the three
different modes with body 2 grounded is presented in
Table 9. For Mode I HBM ESD, the energy dissipated in
the discharge increases as the size of body 2 decreases
relative to body 1. For Modes II and Il l HBM ESD, the
energy dissipated decreases as the size of body 2 is
decreased relative to body 1. There is general agreement
in the values of Q, (charge transferred in the discharge),
AW (energy dissipated in the discharge), and q d (charge
transferred in the ground connection) for thethree dif-
ferent modes. The differences between the Mode I1 and
Ill results compared to the Mode I results decreases as
the size of body 2 decreases relative to body 1. In general,
the amount of charge transferred and the energy dissi-
pated in the discharge are higher for the cases where body
2 is in a grounded state compared to floating state.
Table 8
Comparison of Parameters for Three Mo d e l s [Body Two Floating]
%
Mode d VI AV Q, AW
mm kV kV pC mJ p
r,= l m
I
II
111
r, =0.5m
I
II
111
r, =0.25m
I
II
111
1.5 12.1 5.03 1 1.95 0.78
1.23 10 4.10 0.832 1.32 0.65
1 10 4.02 0.84 1.31 0.65
5 10 4.58 0.79 1.40 0.61
1.27 15.1 4.26 1 1.06 0.5
0.81 10 2.71 0.665 0.451 0.33
1 10 2.74 0.665 0.456 0.33
5 10 3.25 0.646 0.525 0.323
0.89 17.1 2.97 1 0.33 0.23
0.49 10 1.63 0.588 0.108 0.132
1 10 1.76 0.587 0.116 0.132
5 10 2.17 0.582 0.143 0.131
Table 9
Comparison of Parameters for Three Models
[Body Two Grounded]
r e = l m
I 1.9 6.39 1.0 3.19
I I 3.0 10 1.49 7.5
111 1 10 1.68 8.4
5 10 1.4 7.0
r2 =0.5m
I 2.3 7.74 1.0 3.87
II 3.0 10 1.26 6.3
111 1 10 1.4 7.02
5 10 1.19 5.94
0.175
0.275
0.275
0.275
0.298
0.386
0.386
0.386
r, =0.25m
0.464
0.474
0.47
0.47
8. SUMMARY
Three modes of HBM ESD have been analyzed which
model the actual event which is a charge driven phe-
nomenon, and the air discharge and current injection test
methods, which are voltage dependent events. An
analysis is provided in which the system equations for the
various ESD parameters are develped in terms of char e
and potential and capacitance coefficients for Modes I !
and Il l HBM ESD. A comparison of the results for a range
of test geometries shows the effect of the relative size of
the two bodies and the electrical state of body 2 (floating
or grounded).
ACKNOWLEDGEMENTS
The author acknowledges with thanks, the financial
support of the Natural Sciences and Engineering
Research Council of Canada.
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