Coherence Scanning Mircroscope

2/27/2013
1
Suresh K. Ramasamy PhD
March 2013
COHERENCESCANNING
INTERFEROMETRY
Part1.Basics,Calibration and
Adjustment
SKRCSI1ASMETUTORIALS2013
Noncontactareal surfacemeasurementsystems
Coherencescanni ngi nterferometer
Standards I SO, ASME
Part standards
Vi brati ontest
Cal i brati on, adj ustmentprocedures
Obj ecti vefocusopti mi zati on
Emai l i d: sureshramasamy@gmai l .com
OUTLINE
Sciencestartswheremeasurementstarts D.I.Mendeleev
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QUESTIONS?
Potential3DMeasurementInstruments
Contacting Stylus
Chromatic Length Aberration Confocal
Microscopy
SEM Stereoscopy
Scanning Tunneling Microscopy
Atomic Force Microscopy
Optical Difference Profiling
Angle Resolved SEM
Areal Topography
Senses Z(X,Y) or
Z(X) as a function of Y
Triangulation
FastMoirInterferometer
ConfocalMicroscope
PhaseShiftingInterferometer
VerticalScanning(WhiteLight)
Interferometer
Promise Speed & accuracy Laboratory
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Triangulation
1 . F a n g J u n g S h i o u, Mi n X i n L i u , De v e l o p me n t o f a no v e l s c a t t e r e d
t r i a n g u l a t i o n l a s e r pr o b e wi t h s i x l i n e a r c ha r g e c o u p l e d d e v i c e s ,
Op t i c s a n d L a s e r s i n E n g i n e e r i n g , 4 7 ( 2 0 0 9 ) 7 1 8
2 . S t a g e o n e : L i g h t R e f l e c t i o n Mo d e l s f r o m we b s i t e
h t t p: / / www. g r a p h i c s . c o r n e l l . e d u / r e s e a r c h/ g l o b i l l u m/ r e f l mo d e l . h t ml ,
a s o f 0 5 / 0 5 / 2 0 1 0
Working principle of a triangulation
probe based on Scheimpflugs principle
Bi-directional reflectance distribution model
MoirInterferometer
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ChromaticLengthAberration
Top
Bottom
ConfocalMicroscopy
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-20 -10 0 10 20
z axis (micrometers)
0.0
0.2
0.4
0.6
0.8
1.0
1.2
F
o
c
u
s

f
u
n
c
t
i
o
nIntensity
Fig 3b
20X
Gradient
LED Light source
480 nm
PBS
Microdisplay
CCD
Objective
ConfocalMicroscopy
Waves of Light
Wavelength
Li ght i s compri sedof
wavel engthsof energy
The l ength determi nesthe
col or of l i ght
Whi te l i ght(a combi nati onof
di fferentwavel engths)
provi desa l arger
measurementrange.
TheoryofLight
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Interference is the phenomenon caused by superposition of two
electromagnetic waves
When these two waves are in phase
then the result is a bright band and
if they are out of phase the result
would be a dark band
Mathematical Representation :
is the interference term.
(
2

1
) is the phase difference between two waves.
Constructive Interference
Destructive Interference
TheoryofInterference
TheoryofInterference
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SampleSurfacesandtheirpatterns
WLI.Underthehood
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Differentwaystofindthepeak
Interference
Fringes
Fromfringesto3Dsurfacemap
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CoherenceScanningInterferometer
a
b
d
e
f
g h
i
j
l
n
m
r
q
k
a Light source (halogen / LED)
b Dichoric mirror
c Laser source (optional)
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
i Interferometric objective
j Reference mirror
k Measured surface
l Scanner (PZT / Stepper motor)
m Zoom / magnification tube setup
n Beam splitter
o Polarizer (Optional)
p Detector 2 (Optional)
q Polarizer
r Detector 1 (CCD / CMOS)
a
b
d
e
f
g h
i
j
l
n
m
r
q
k
b Dichoric mirror
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
j Reference mirror
k Measured surface
n Beam splitter
q Polarizer
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a
b
d
e
f
g h
i
j
l
n
m
r
q
k
b Dichoric mirror
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
j Reference mirror
k Measured surface
n Beam splitter
q Polarizer
a
b
d
e
f
g h
i
j
l
n
m
r
q
k
b Dichoric mirror
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
j Reference mirror
k Measured surface
n Beam splitter
q Polarizer
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a
b
d
e
f
g h
i
j
l
n
m
r
q
k
b Dichoric mirror
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
j Reference mirror
k Measured surface
n Beam splitter
q Polarizer
a
b
d
e
f
g h
i
j
l
n
m
r
q
k
b Dichoric mirror
d Optics
e Aperture stop
f Field stop
g 45 Mirror
h Beam splitter
j Reference mirror
k Measured surface
n Beam splitter
q Polarizer
c
p o
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NT8000 (Veeco) CCI (Taylor Hobson) NV6300 (Zygo)
ExamplesofCSIsystems
Configurations
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ISOStandards
I SO/TC213/WG1625178
Nominal Characteristics
602 Confocal chromatic probe
603 Phaseshifting interferometric microscopy
604 Coherence scanning interferometric microscopy
605 Point autofocus probe
606 Focusvariation
607 Imagingconfocal microscopy
Calibration
702 Confocal chromatic probe
703 Interferometric microscopy
NPLGPGs
GoodPracti ceGui deNo. 108:Gui detotheMeasurementof
SmoothSurfaceTopographyusi ngCoherenceScanni ng
I nterferometry
GoodPracti ceGui deNo. 116:Gui detotheMeasurementof
RoughSurfaceTopographyusi ngCoherenceScanni ng
I nterferometry
Gi uscaCL, LeachRK, Cal i brati onofthemetrol ogi cal
characteri sti csofareal surfacetopographymeasuri ng
i nstruments, Proceedi ngsofthe2ndI nternati onal Conference
onSurfaceMetrol ogy2010, WPI ,USApp. 145153.
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ReferenceFlatStandard
Si l i conCarbi deSurface
SubAngstroml evel fl atness
Usedtoestabl i sh bestcasemeasurementcapabi l i ty
StepHeightStandard
Chromi umcoatedonetchedQuartzsurface
NI STTraceabl e
Cal i brati onandadj ustmentofZ axi smeasurements
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LateralCalibrationStandard
Pl ati numcoati ngonetchedSi l i condi oxi desurface
NI STTraceabl e
Setti ngmagni fi cati onandTRC
OpticalDimensionalStandard
Chromeongl assphotomask
NPLTraceabl e
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SurfaceRoughnessSpecimens
I SO5436 1:2000
TypeC(Spacing measurement standards)
TypeD(Roughness measurement standards)
NI STTraceabl e
I TFandAl gori thmdepenedenci es
a
b
c
Cross sectional profiles of (a) random surface (b) sinusoidal
surface and (c) square wave surface.
Siemens Star
Weckenmannetal,Practiceorientedevaluationoflateralresolutionformicro andnanometermeasurement
techniques,MeasurementScienceandTechnology,20(2009)065103(8pp)
I TFandAl gori thm
dependenci es
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Vibrations
(a) Measurements taken under ideal environment (b) under high vibration levels, seen as ripples of missing data.
a b
Vibrations
y = 0.6255x + 2.3434
R
2
= 0.9951
0
50
100
150
200
250
300
0 100 200 300 400 500
Peak to peak noi se l evel (nm)
M
e
a
s
u
r
e
m
e
n
t

e
r
r
o
r

(
1

S
i
g
m
a

i
n

n
m
)

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Calibration
Z axi s
Systemswith reference signal
Systemswithout reference signal
Step heightartifact based user calibration
XYaxi s
Presetmagnification
Usertunable magnification
Lateral calibration standard based user calibration
Specificforeachobjectiveandzoomtubesetting
Linear doesntincludewarpingerrors
ZaxisCalibration
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LateralCalibration
LateralCalibration steps
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TRCSetup
Image of one corner of Lateral calibration standard used for finding offset between different magnifications
ReferenceMirrorFlatnessError
Reference mirror surface error map for a chosen magnification (objective and zoom tube combination)
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ObjectiveFocusOptimization
Effect of focus on roughness for selected samples with varying roughness values
0
20
40
60
80
100
120
140
Part 1 Part 2 Part 3 Part 4 Part 5 Part 6
Low (< 40 nm) Medium (41 - 80 nm) High (81 - 120 nm)
P
a

(
n
m
)
After 50x Focus Pa (nm) After Defocus Pa (nm) After Refocus Pa (nm)

Coherence Scanning Mircroscope

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