DEVELOPMENT AND CONTROL OF XY STAGE WITH A HYBRID BOLT

CLAMPED LANGEVIN TYPE ULTRASONIC MOTOR

Dong Jin Lee
1
, Sun Kyu Lee
1

1
School of Mechatronics
Gwangju Institute of Science and Technology
Gwangju, Republic of Korea


ABSTRACT
The development and control of XY stage
driven by ultrasonic linear motor is presented. In
this paper, the stage is driven by the hybrid-bolt
clamped Langevin-type (Hybrid BLT) ultrasonic
motor which consists of a longitudinal and a
lateral PZT. The hybrid BLT is excited by its
matched natural frequency without a
discordance between natural frequency of a 3rd
longitudinal mode and a 6th lateral mode. For
fine and stable control performance, Nominal
characteristics trajectory following (NCTF)
control method is adopted. The NCTF control
method does not require an exact mathematical
model of the Hybrid BLT and is determined with
open loop response based on simple experiment.
Consequently, the experimental result shows
that the BLT system achieved nanometric
accuracy.

INTRODUCTION
The ultrasonic linear motor have many
advantages compared to conventional
electromagnetic motors, such as high power,
nanometric accuracy in the long stroke, simple
mechanism. [1].
This paper presents development and control of
XY stage with Hybrid BLT ultrasonic motor to
achieve stable, high power, long stroke and
nanometer accuracy [2].

SYSTEM CONFIGURATION
The configuration of Hybrid BLT system is
expressed as figure. The Hybrid BLT is 20mm in
diameter and 247mm in length in shape of long
bar. It has two types of PZT elements to excite
two modes (longitudinal and lateral mode). The
Alumina was used to provide the driving force,
attached to a maximum vibration point on the
BLT. Moreover, contacting surface is also made
of alumina and it is attached to the slider. The
support was placed at the node point, composed
of disk spring and bolt. The disk spring was
thrust into actuator and preload was applied by a
spring.


FIGURE 1. Schematics of the XY Stages

TABLE 1. Specifications of the XY Stages

Y-Axis X-Axis
Slider 3kg 6kg
Stroke 40mm 100mm

OPERATING PRINCIPLE
The principle of Hybrid BLT is expressed as
figure (1). The driving force is generated by
friction force between driven rail at slider and
driving tip at Hybrid BLT. Specially, the Hybrid
BLT uses a one frequency to excite 3
rd

Longitudinal mode and 6
th
Lateral mode(figure
1).The motion of driving tip is equal to elliptical
motion when phase difference of vibration
modes was 90 degree.

CONTROLLER DESIGN
So far, many types of controller have been
proposed for precision control. Most of them
require the exact model and parameter.
However, it is difficult to model Hybrid BLT
system exactly, due to nonlinear properties,
such as friction and dead zone. Therefore, a
Nominal characteristic trajectory following
(NCTF) controllers was adopted in this paper.
The NCTF controller was deigned based on
open loop response and does not need an exact
model[2].


FIGURE 2. Principle of Ultrasonic linear motor

EXPERIMENTAL PERFORMANCE
In this section, The step positioning and
continuous motion(circle motion) was evaluated
using NCTF controller.
S
K
P
K
I
S
Ultrasonic motor
System
x
r
+
-
+
+


Figure 3. Block diagram of Ultrasonic motor
System(NCTF Controller)

The results of 5nm step positioning and 500um
stroke continuous motion control are shown in
figure.

CONCLUSION
In this paper, the XY stage with ultrasonic linear
motor was designed and developed. In addition,
a ultrasonic linear motor which uses 3
rd

longitudinal mode and 6
th
lateral mode was
proposed To achieve precise step positioning
and continuous motion of stage, a nominal
characteristics trajectory following (NCTF)
controller was adopted. Finally, the performance


FIGURE 4. The results of step positioning and
continuous control

of stage, fast response and nanometric accuracy
was successively demonstrated.

ACKNOWLEDGEMNTS
This work was supported by NRL Program
(no.20120006271) and Basic Science Research
Program (no.2012044089) through the National
Research Foundation of Korea (NRF) funded by
the Ministry of Education, Science and
Technology and Development of Platform
Technology for Machine Accuracy Simulation
from the Ministry of Knowledge Economy (MKE)
of the Korean Government.

REFERENCES
[1] S. Ueha, Y. Tomikawa. Ultrasonic Motors
Theory and Application. Oxford Science
Publications. New York: 1993.
[2] W. S. Kim, C. H. Yun, and S. K. Lee. Nano
Positioning of a High Power Ultrasonic
Linear Motor. J apanese J ournal of Applied
Physics. 2008; 47: 5678-5692
[3] Sato K, Nakamoto K, Shimokohbe A.
Practical control of precision positioning
mechanism with friction. Precision
engineering. 2004; 28: 426-34.