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Fabrication Techniques
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Terminology
Thin film, thick film
Bulk sample
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Terminology
Bulk sample
More than 100s m thick
Notice the cracks
Terminology
Thin film, thick film
Core typically 5m, cladding typically 15-20m thick
Silica-on-silicon
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Deposition techniques
Thermal Oxidation
Sol Gel
Plasma Enhanced Chemical Vapour Deposition
Flame Hydrolysis Deposition
The Process
Deposition
Obtain blank sample
Channel
Definition
Incorporate circuitries/
waveguides
Obtain devices
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Deposition techniques
Thermal Oxidation
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Thermal Oxidation
The oxidation process is achieved by placing silicon wafers into a high
temperature and high pressure oxygen or water vapour environment
Typical operating temperatures vary and are within the regions of 700 1000C
The deposition rate is a function of the substrate temperature, ambient
pressure and reagent flow rate
Thermal Oxidation
The oxidation furnace
Use of silicon wafer stacks
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Thermal Oxidation
The oxidation furnace
Use of silicon wafer stacks
Deposition techniques
Sol Gel
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Sol Gel
This technique is based on the synthesis of glass via solution chemistry
In this case glass is formed not directly at high temperatures from a melt, but
at low temperatures (< 1200C) from suitable compounds by chemical
polymerisation in a liquid phase
In this way a gel is first formed from which glass may be obtained both by
gradual removal of liquid and densification through thermal treatment
(annealing/sintering)
Sol Gel
Its like making a jelly (yummy)
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Sol Gel
Sol gel mixing
Doesnt look so yummy
Sol Gel
Sol gel processing
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Deposition techniques
Plasma Enhanced Chemical Vapour Deposition
PECVD
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PECVD
PECVD utilises energy provided by RF or microwaves to dissociate the
reactants, creating high energy plasma that would then facilitate thin film
deposition
The main advantage of this technique is that depositions can be carried out at
low temperatures due to the additional energy provided by the plasma
PECVD
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Deposition techniques
Flame Hydrolysis Deposition
FHD
In flame hydrolysis deposition (FHD), vapour precursors are introduced in a
flame where they undergo chemical reactions to form soot particles which
are then collected on a planar substrate to form a low density porous
layer
The vapour precursor in this case is silicon tetrachloride (SiCl4)
The porous layer is then consolidated to form a dense glassy layer
This is achieved by heating the samples at temperatures exceeding 1200C
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FHD
FHD
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FHD
The chemical reactions taking place during FHD are as follow
Flame temperature 1200C (direct oxidation): SiCl4 + O2 SiO2 + 2Cl2
Flame temperature < 1200C (hydrolysis): SiCl4 + 2H2O SiO2 + 4HCl
Deposition techniques
advantages
Thermal Oxidation
Sol Gel
Plasma Enhanced Chemical Vapour Deposition
Flame Hydrolysis Deposition
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Deposition techniques
disadvantages
Thermal Oxidation
Sol Gel
Plasma Enhanced Chemical Vapour Deposition
Flame Hydrolysis Deposition
Research
Solution doping
To incorporate gain medium into standard glass samples
Monolithic integration
Doping = incorporation
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Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
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Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
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Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
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Deposition
FHD
Semi-consolidate
Porous layer
Solution doping
Rare-earth/Bismuth
Fully consolidate
amplifier
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Additional findings
Ring effect
Graded index ring resonators
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Photolithography
Multi-step process
Photolithography
UV photomask
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Photolithography
UV mask aligner and contact lithography
Photolithography
Plasma etching of glass
Etching = removal
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Ion Exchange
The formation of a high refractive index region beneath a glass layer by
electrically induced migration of ions
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Ion Exchange
The formation of a high refractive index region beneath a glass layer by
electrically induced migration of ions
Ion Exchange
Actually a) is the waveguide and b) is waveguide with silver mirror
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Direct UV writing
Direct UV writing (DUW) is a technique to define wave guiding channels on
photosensitive materials
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Direct UV writing
An illustration of (a) direct UV writing set up; (b) direct grating writing set up; (c) interference
pattern generated by the crossed beam; (d) photo of direct grating writing. (AOM: acoustooptic modulator).
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