EE4330 Integrated Circuit Technology Spring 2007, Walter Hu, UTD

THE UNIVERSITY OF TEXAS AT DALLAS

ERIK JONSSON SCHOOL OF ENGINEERING & COMPUTER SCIENCE

EE 4330: Integrated Circuit Technology (3 semester hours)

Class Info: TR 2:30PM-3:45PM, ECSN 2.110, call number: 10822, Spring 2007
Instructor: Professor Wenchuang (Walter) Hu
Telephone: (972) 883-6329
Email: walter.hu@utdallas.edu
Website: www.utdallas.edu/~walter.hu
Office Hours: Wednesdays 5 PM – 6 PM or by appointment in ECSN 2.226
Textbook: “Introduction to Microelectronic Fabrication”, Richard C. Jaeger, Prentice Hall, 2002.
ISBN: 0-201-44494-1
Additional references: “Fundamentals of Microfabrication”, Madou, M. CRC Press, 2002.
“Silicon VLSI Technology” Plummer, J., M. Deal, P. Griffin. Prentice Hall, 2000.

Course Outline:
This course will teach you about the fundamental science and technologies of integrated circuits (IC) fabrication, which include
MOS and bipolar technologies, photolithography, oxidation, diffusion, ion-implantation, epitaxial growth, thin and thick film
components, and design and layout of integrated devices. Students will also learn to use a software to simulate CMOS
fabrication process by the end of class. Extending of IC technologies in emerging nanotech frontiers will be introduced briefly,
which include nanoelectronics and information technology, molecular electronics, organic electronics, and bionanotechnology. In
addition, an on-site visit to Texas Instrument IC fabrication facility will be arranged. Prerequisites: EE 3310 or EE 3300.

Course grading:
15% Regularly Assigned Homework
10% Semester Project
20% Midterm Exam I
20% Midterm Exam II
35% Final Exam

Course rules and regulation:

1. No eating, drinking, or smoking in classroom. No laptop computer use in classroom.
2. Students who miss the Midterm Exams or Final Exam without a valid excuse will receive a score of zero. Students with a
valid excuse for missing the Test or Final Exam MUST make arrangements beforehand or receive a score of zero.

Homework: Homework and one project will be assigned on Monday or Wednesday after the class and is due in the week.
Each student must turn in individual work. All assigned work will be collected at the beginning of the class. Late homework
assignments will not be accepted, unless arrangements were made beforehand.
EE4330 Integrated Circuit Technology Spring 2007, Walter Hu, UTD

EE4330: Integrated Circuit Technology

Lecture Topic Reading Homework

1/9 Overview I §1.1-2
1/11 Overview II §1.3-5 hw1
1/16 Lithography §2.1
1/18 Etching; Microscopy §2.2-6 hw2
1/23 Oxidation I §3.1-5
1/25 Oxidation II §3.6-10 hw3
1/30 Diffusion I §4.1--4
2/1 Diffusion II §4.5-8 hw4
2/6 Diffusion III §4.9-11
2/8 Midterm Exam I 2:30 PM
2/13 Midterm exam solutions
2/15 Implantation I §5 hw5
2/20 Implantation II
2/22 Film Deposition I §6.1-2
2/27 Film Deposition II §6.3-4 hw6
3/1 Contacts, Interconnections, Packaging, Yield §7,8
3/13 Midterm Exam II 2:30 PM
3/15 Midterm exam solutions
3/20 MOS Process Integration I §9.1-2
3/22 MOS Process Integration II §9.34
3/27 MOS Process Integration III §9.4 hw7
3/29 Intellisuite software training Tutorial Project Kick-off
4/3 BJT Integration II
4/5 Visit Texas Instrument IC Facility
4/10 Nanoelectronics and Information Technology I Handouts
4/12 Organic and Molecular Electronics Handouts
4/18 Project presentation and summary Project Due
4/19 Class review and summary
TBD Final Exam