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Article history:
Received 21 September 2007
Received in revised form 30 January 2008
Accepted 21 March 2008
Available online 29 March 2008
Keywords:
Flexure-based mechanism
Piezoelectric actuator
Micro/nano manipulation
Adaptive control
Non-linearities
Parametric uncertainties
a b s t r a c t
This paper establishes and investigates an enhanced adaptive motion tracking control methodology for
piezo-actuated exure-based four-bar micro/nano manipulation mechanisms. This control methodology
is proposed for tracking desired motion trajectories in the presence of unknown or uncertain system
parameters, non-linearities including the hysteresis effect, and external disturbances in the motion systems. In this paper, the equations for the modelling of a exure-hinged four-bar micro/nano mechanism
are established. These include the angular stiffness, static linear stiffness, equation of motion, and lowest
structural resonance of the mechanism. In addition, a lumped parameter dynamic model that combines
the piezoelectric actuator and the micro/nano mechanism is established for the formulation of the proposed control methodology. The stability of the control approach is analysed, and the convergence of
the position and velocity tracking errors to zero is proven theoretically. A precise tracking performance
in following a desired motion trajectory is also demonstrated in the experimental study. An important
advantage of this control methodology is that the approach requires only a knowledge of the estimated
lumped system parameters in the physical realisation. This proposed motion tracking control methodology is very attractive for the implementation of high performance exure-based micro/nano manipulation
control applications.
2008 Elsevier B.V. All rights reserved.
1. Introduction
Increasingly, micro/nano manipulation mechanisms and systems are utilised in many advanced areas. They are employed
for accomplishing high-precision motion tasks particularly in
the biomedical engineering and micro-surgery applications [14].
The vast majority of these micro/nano manipulation mechanisms are based on exure-based mechanisms and generally
driven by piezoelectric actuators [5]. The piezo-actuated exurebased mechanisms offer unlimited motion resolution. They also
possess several advantages over the conventional mechanical systems, which are generally based on sliding or revolute lower
pairs. These advantages include negligible friction, zero backlash, noiselessness, and easy maintenance. In recent years, there
have been progress in the development of exure-based mechanisms [68]. For optimal mechanical performance, related studies
of the micro/nano mechanisms have been conducted [912].
Furthermore, attention has also been focused on the advancement of piezoelectric actuators [5,13] to enhance their important
Corresponding author. Tel.: +61 3 9905 1008; fax: +61 3 9905 1825.
E-mail addresses: hwee-choo.liaw@eng.monash.edu.au (H.C. Liaw),
bijan.shirinzadeh@eng.monash.edu.au (B. Shirinzadeh).
0924-4247/$ see front matter 2008 Elsevier B.V. All rights reserved.
doi:10.1016/j.sna.2008.03.020
255
(1)
256
4kz z
wrm =
ma +
Ib + Ic
l32
x m +
4kz z
l32
xm = fm ,
(3)
wrm =
4kz z
.
fm
4kz z
=
.
xm
l32
1
(5)
l22 + l2 r + r 2 ,
(7)
xz
l1
= .
xm
l3
(8)
mlp =
blp
klp
Ib + Ic
mz lzm + ma +
Tem
l32
1
=
bz lzm ,
Tem
1
4kz z
=
kz lzm +
,
Tem
l2
(9)
,
(10)
where mlp , blp , klp are the lumped system parameters. It must be
noted that in addition to the hysteresis effect vh described by (9),
there are generally external disturbances in a practical dynamical
system. For this reason, the equation of motion given by (9) for the
micro/nano manipulation mechanism is rewritten as
mlp x m + blp x m + klp xm + vh + vdc + vdn = vin ,
(11)
where vdc and vdn are the constant time-invariant and nonlinear
time-varying external disturbances, respectively, encountered in
the motion system. It is understood that these terms vh , vdc , and vdn
are generally bounded, i.e. |vh | vh , |vdc | vdc , and |vdn | vdn ,
where vh , vdc , and vdn are positive constant numbers. With
the given model (11), an advanced control methodology can be
established to effectively control the piezo-actuated micro/nano
manipulation mechanism.
3. Enhanced adaptive motion tracking control
methodology
(4)
lzm
and
z
2Ebt 2
,
1
z
9r 2
2
+ (mb + mc )l22 [(1/3) + (r/l2 ) + (r/l2 ) ]
kz z
ma l32
(6)
257
(12)
and
T
xm = [xm , x m , xm , 1] ,
(13)
T
[mlp , blp , klp , vdc ] ,
(14)
mlp
= mlp meq ,
(15)
vhd = vh + vdn ,
(16)
where xm is the vector of actual motion trajectory of the manipulator, is the vector of lumped system parameters, mlp is the
modied lumped mass, meq is the specied equivalent mass, and
vhd is the combined undesirable effects due to the time-varying
non-linearities and external disturbances. The equivalent mass meq
described by (15) is always chosen as a strictly positive scalar, i.e.
meq > 0.
An adaptive technique is proposed and established to overcome
the problem of unknown system parameters. In this approach, a set
of the lumped system parameters is dened as
of estimates
T
= [m
lp , b lp , k lp , v dc ] .
(17)
(t)
= (0)
xmd ()d,
(18)
(24)
ds(ep )
e p =
dep
where (0)
is the initial estimates of , K is a 4 4 constant positive denite diagonal matrix, xmd is the vector of desired motion
T
trajectory dened as xmd = [xmd , x md , xmd , 1] , and is the error
function described by
= e p + s(ep ),
(19)
2 + ep 2 ||,
(20)
d(ep )
=
dep
ep
2 + ep 2
(21)
v in = xTmd , .
(22)
2 e p
(2
+ ep
(25)
2 )3
For the piezo-actuated exure-based four-bar micro/nano manipulation mechanism described by (11), an enhanced adaptive motion
tracking control methodology is proposed based on the following
formulation:
vin = kp ep kv e p + v in + meq x eq ks d
,
(26)
||
and
p ),
x eq = x md s(e
(27)
d vhd + ,
(28)
+v = 0.
|| hd
(29)
A sliding control scheme is established to accommodate the timevarying non-linearities and external disturbances in the system. It
must be noted that the combined undesirable effects vhd given by
(16) are bounded and there exists an upper bound vhd such that
+ kp ep + kv e p + ks ).
y = (xTm xTmd
(23)
(30)
(31)
258
v = xTmd ,
u2 =
(32)
,
where is the vector of parameter errors dened as =
and are given by (17) and (13), respectively. The adaptive
and
error v described by (32) can be expressed as
= xTe v,
xTm xTmd
(33)
T
(34)
mlp e p e p
+ (blp + kv + ks )e p2
(35)
1 2
1
m e + (blp + kv + 2ks )(ep ) + (klp + kp )ep 2
2 lp p
2
+mlp s(ep )e p ,
(36)
(37)
(38)
The term s2 (ep ) in (38) can be replaced by using (21), and the function u1 described by (38) becomes
u1 =
1
1
2
m [e p + 2s(ep )] + mlp e p2 +
4 lp
4
klp + kp
2
2 mlp
2 + ep 2
ep 2
(39)
22 mlp
2
klp .
(40)
w =
(k + kp )
lp
2 + ep 2
ep 2 + blp + kv + ks
+ks 2 s2 (ep ).
mlp 2
(2
+ ep
2 )3
e p2
(41)
mlp
||
blp .
u 2 = T K .
(44)
Due to the fact that the lumped system parameters given by (14)
are time-invariant, i.e. = 0, the time derivative parameter errors
are expressed as
= ,
=
(45)
and
v = u 1 + w v,
u1 =
(43)
Using
which include only the time derivative of the estimates .
for (45), and applying the result to (44),
(18) to derive the term
yields
2 2
u1 =
1
T K .
2
(42)
(46)
1
meq 2 ,
2
(47)
(48)
The term in (48) can be derived from (24) and (27), and it is
expressed as
= x m x eq .
(49)
(50)
(51)
Replacing the function y in (51) by using (35) and (46), and considering (23) and (28), yields
u 3 = u 1 w u 2 d|| vhd ,
u = w d|| vhd ,
w d|| + vhd ||,
w ||,
(52)
In the implementation of the control law (26), the discontinuous function (/||) will give rise to control chattering due to
imperfect switching in the computer control. This is undesirable, as
un-modelled high frequency dynamics might be excited. To eliminate this effect, the concept of boundary layer technique [48] is
applied to smooth the control signal. In a small neighbourhood of
the sliding surface ( = 0), the discontinuous function is replaced
by a saturation function, namely the boundary saturation function,
which is dened as
sat
1 : < ,
: ,
(53)
+1 : > ,
where is the boundary layer thickness, and the enhanced adaptive motion tracking control law (26) becomes
vin = kp ep kv e p + v in + meq x eq ks d sat
(54)
5. Experimental study
259
(55)
where the exure material used is the 7000 series Aluminum alloy
with E = 72.0 109 N/m2 . Furthermore, for the designed parameter of l3 = 50 mm, the static linear stiffness kfm xm given by (5) is
obtained as
kfm xm = 0.01 N/m.
(56)
(57)
260
(58)
An approach is therefore required to realise the control methodology for the exure-based manipulation mechanism with the low
stiffness and structural resonance given by (56) and (57), respectively. The purpose is to eliminate the possibility of exciting the
structural resonance of the exure-based mechanism. Under the
proposed control methodology, the closed-loop system is required
to follow a jerk-free desired motion trajectory, which is shown in
Fig. 7 for position, velocity, and acceleration. This desired motion
trajectory is formed by segments of higher-order polynomials with
zero acceleration at the beginning and the end. Furthermore, a lowpass lter is incorporated to smooth the control signal prior to
output as a commanding signal for the amplier module. In the
experiments, a second-order Butterworth lter is employed and
the cutoff frequency is set at the upper limit of the undamped
natural frequency, i.e. 25 (Hz), in order not to affect the control
performance.
In this experimental study, the experiments serve not only to
validate the theoretical formulation of the control methodology
but also to examine the effectiveness of the proposed approach
in a physical system. For the piezo-actuated exure-based fourbar micro/nano manipulation mechanism described by (11), the
enhanced adaptive motion tracking control law (54) is implemented in the control PC. Given the desired motion trajectory, as
shown in Fig. 7, the tracking ability of the control system can be
closely evaluated experimentally in the presence of unknown system parameters, non-linearities, and external disturbances.
In order to study the effect of the proposed control methodology,
an open-loop controller is established for comparison by omitting
the undesirable terms in the system (11). Assuming that the ideal
system is modelled as
lp x m + b lp x m + k lp xm = vin ,
m
(59)
(60)
where the units of K 1 are Vs4 /m3 , Vs2 /m3 , V/m3 , and V/m, respectively. The saturation error function s(ep ) in (19) is implemented as
given by (21). The positive scalar in (19) and the arbitrary constant
in (21) are selected as
= 10 mm/s
and
= 1 m.
(64)
The equivalent mass meq and the boundary layer thickness for
the control law (54) are chosen as
meq = 0.05 Vs2 /m
and
= 30 mm/s.
(65)
and
= 1 V.
(66)
lp ,
For the purpose of experiments, the estimated parameters m
b lp , and k lp given by (17) are determined in two ways. Firstly, an
open-loop test is conducted to identify the estimated stiffness
lp and b lp ,
k lp , and secondly, the estimated mass and damping, m
respectively, are adjusted during the closed-loop control. Due to
non-linearities and uncertainties in the system, these two latter
parameters are difcult to obtain during the off-line testing, and
they are treated as the tuning gains during the closed-loop imple
mentation. The initial estimates (0)
for (18) are therefore chosen
as
lp = 1, b lp = 1000,
m
k lp = 1.0 106 ,
and
v dc = 0,
(61)
kp = 5000 V/m,
kv = 200 Vs/m,
and ks = 50 Vs/m.
(62)
(63)
Fig. 9. Actual position and estimated velocity compared to their desired values.
261
in a range of 30 m with a maximum velocity and an acceleration reaching 0.13 mm/s and 0.90 mm/s2 , respectively. The
control input vin and switching function are shown in
Fig. 8. The switching function indicates that its values are well
within the boundary layer thickness specied in (65). This
implies that the closed-loop system tracked the desired motion
trajectory closely with the switching function kept to a minimum.
The resulting position and estimated velocity of the manipulator are shown in Fig. 9, and the corresponding tracking errors are
shown in Fig. 10. Despite unknown system parameters, nonlinear
effects, and external disturbances in the motion system, the proposed control methodology (54) showed a precise tracking ability.
The resulting tracking errors indicate that the enhanced adaptive
motion tracking control law had successfully accommodated the
aforementioned conditions in the closed-loop system. The experimental results, as presented in Fig. 10, show that the position
and velocity tracking errors were conned within 0.11 m and
0.01 mm/s, respectively, during dynamic motion. Furthermore, the
position tracking errors were less than 0.009 m at the steadystate.
For comparison, the experimental results of the open-loop controller (60) are shown in Fig. 11. The open-loop control investigation
shows relatively large positioning errors of about 5.0 m). To
demonstrate the effectiveness of the proposed control methodology, the results of the actual against desired positions for both
approaches are shown in Fig. 12.
The proposed control methodology is shown to be stable,
repeatable, and capable of tracking the desired motion trajectory
under unknown or uncertain system parameters, non-linearities,
and external disturbances. One of the most important advantages
of the proposed control methodology is that only the estimated
values of the system lumped parameters are required in the implementation.
7. Conclusions and future work
An enhanced adaptive motion tracking control methodology has been proposed and investigated for the tracking
of desired motion trajectories in the piezo-actuated exurebased micro/nano manipulation mechanisms. This proposed
control methodology is formulated to accommodate unknown
or uncertain system parameters, non-linearities including the
hysteresis effect, and external disturbances in the motion systems.
The stability of the closed-loop system has been analysed, and
the convergence of the position and velocity tracking errors to zero
is guaranteed by the proposed control methodology. Furthermore,
a high-precision tracking performance has been demonstrated in
the experimental study.
Future work will include the establishment of a multiaxis mechanism capable of carrying a retroreector/mirror.
With such an arrangement, an advanced laser interferometrybased measurement will be utilised to establish the enhanced
stiffness modelling [52] for an accurate closed-loop position and velocity tracking control. Furthermore, the optimum
dynamic balancing [53] of the mechanism will also be investigated.
Acknowledgments
262
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Biographies
Hwee Choo Liaw received BEng degree (First Class Honours) in Electrical Engineering and MEng degree from Nanyang Technological University (NTU), Singapore, in
1992 and 1997, respectively. From 1992 to 1998, he worked as a video product engineer, teaching assistant in NTU, and R&D engineer in DSO National Laboratories,
Singapore. From 1998 to 2005, he was employed by Singapore Institute of Manufacturing Technology. He worked as a senior research engineer performing research and
development in the areas of high-precision linear motion control, robotic applications, and industrial automation. At the beginning of 2005, he was awarded Monash
Graduate Scholarship and Monash International Postgraduate Research Scholarship
for pursuing a PhD degree in the eld of micro/nano manipulation.
Bijan Shirinzadeh received engineering qualications: BE (mechanical), BE
(aerospace), MSE (Mechanical), and MSE (aerospace) from the University of Michigan, and PhD in mechanical engineering from University of Western Australia (UWA).
He has held various positions in academia and industry. Dr Bijan Shirinzadeh is currently an associate professor, and the director of Robotics & Mechatronics Research
Laboratory (RMRL) which he established in 1994, in the Department of Mechanical
Engineering at Monash University, Australia. His current research interests include
haptics, medical robotics, laser-based measurements and sensory-based control,
micro/nano manipulation systems, systems kinematics and dynamics, and automated manufacturing.