Shop Floor Control

The Road to Integrated Manufacturing

Marcel Caeyers
IT Solution Team Manager - Manufacturing
September 2013 / SAP Manufacturing Days / Den Bosch

Public
Slide 2
April 2013

Agenda

Introducing ASML
A cornerstone of the chip industry

Impact on Operations
A lean program to streamline production processes

Program: Shop Floor Control

The IT enabler for achieving business value

Questions

Introducing ASML
A cornerstone of the chip industry

ASML - A cornerstone of the chip industry

Public
Slide 4
April 2013

ASML:
Worlds largest semiconductor equipment vendor

27%
sales
to US

Sales
4%
to Europe
69%
sales
to ASIA

ASML employees
in US:1,617

ASML employees
in Europe: 5,068

ASML employees
in Asia: 1,812

Over 55 sales and service offices located worldwide

Source: VLSI Research/ASML Q4 2012

Public
Slide 5
April 2013

Moores Law holds steady for more than 40 years

Public
Slide 6
April 2013

1010

Double the
computing
power per chip

Memory

109

Microprocessor

Transistors per Die

108

At equivalent
power
consumption

107
106

For half the

price

105
104

Every 1.5 to
2 years

103
102

This graphic of Moores law

shows how his prediction of
transistor shrink has been
realized over 40 years.

101
100
1970

1975

1980

1985

1990

1995

2000

2005

2010

Source: Intel

The technical challenges

Public
Slide 7
April 2013

Stacking layers: what does that mean

Overlay down to
2 nanometers
1 nm = 4 silicon atoms

The technical challenges

Public
Slide 8
April 2013

Acceleration: a comparison...
A stone drops at 9.8 m/sec2
A dragster accelerates at 33 m/sec2
A jet fighter in a catapult at 44 m/sec2
An attack missile at 50 to 120 m/sec2
A TWINSCAN NXT reticle stage at 150 m/sec2

10

20

30

40

50

60

70

80

m/sec2

90

100

110

120

130

140

150

resulting in the systems that conquered the market

Public
Slide 9
April 2013

In 30 years: From 1,200 nm to less than 20 nm resolution

From <0.5M per system to >60M

1984:
PAS 2000
Resolution:
>1m
Overlay: 250 nm

1989:
PAS 5000
Resolution:
<500 nm
overlay: 100 nm

1990s:
PAS 5500
steppers/
scanners
Resolution:
400 to 90 nm
overlay: 100 to 12 nm

2000s:
Twinscan
Resolution:
100 to 38 nm
overlay: 20 to 4 nm

2010s:
NXE EUV
systems
Resolution:
32 to <20 nm
overlay: 2 nm

Impact on Operations
A lean program to streamline
production processes

Does
factory
like the
this?best factory?
Or
do your
you want
to look
become

Public
Slide 11
April 2013

What makes the difference?

ASML Manufacturing process

Public
Slide 12
April 2013

Suppliers

Build Operations

Delivery Operations

WH

Build Operations
Suppliers
Delivery
Operations
7x24
2000
60 Partners
Test
Buy Area
in (80%)
Items /system
6-12
+/- 350
months
Suppliers
9 Modules
Training /system
/ Engineer

3-8
+/- 300
10.000
Systems
goods
People
/ week
receipts /day
2Added
shifts Value
per
18000
day
>90%
/wk,
m2 1 shift per day /weekend

ASML Manufacturing process

Public
Slide 13
April 2013

Suppliers

Build Operations

Delivery Operations

WH

What makes manufacturing @ ASML special?

Dynamic Master Data - high number of Engineering Changes (100 p/wk)

Rework, Recovery, Repair - continuously due to searching the limits of technology

Master Production Sequences - contain all possible technical dependencies
Operators - highly educated

Flow: 8 key changes

Public
Slide 14
April 2013

FLOW - High level impact

Improved
Transparency
Public
Slide 15
April 2013

Takted way of
working is
introduced

After approval:
the changes are
implemented
Kits are adjusted on
basis of the Takts

Support and
issue resolution
are improved
Takts
Regular rebalanced to improve
cycletime and delivery
The "blueprint" is introduced
Slide 15 |

Program: Shop Floor Control

The IT enabler for achieving business value

Shop Floor Control program @ASML

Public
Slide 17
April 2013

Work Instructions
Dynamic customized per machine configuration

Introducing SAP ME
- Fair work packages per operator per shift
- Blueprinting & Sequencing tooling
- Real-time monitoring / progress tracking

Production Orders
- Customized per customers order

Detailed integral planning

Increased delivery &

planning reliability
Reduced customer reaction time
Reduced stock & obsolescence

of materials, skills, people, cabins, etc.

Alert Management
Real-time logging & progress tracking
of disturbances in production

Management Reporting
Based on a single source of truth

MES Machine Interfacing

Fully automated system qualification

Improved planning efficiency

Transparency of operations

Shop Floor Control functions mapped on ISA95

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

SAP MII - Manufacturing

MES - Level 3
RSuite / Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 18
April 2013

Work Preparation Create and Release Routing in ECC

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 19
April 2013

Work Preparation - Create sub-routings in GRE

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 20
April 2013

Work preparation:
Public

Routing Sub-routing Work package per operator

Main routing in SAP-ECC

Sub-routing in Graphical Routing Editor

Optimized Work Package in SAP-ME

10

Operator A
Operator B

Slide 21
July 2012

30

20

9
7

Work Preparation - Create optimal sequence per operator

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 22
April 2013

Work Preparation Release routing to SAP ME,

Public

report to SAP ECC

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 23
April 2013

Manufacturing Execution: Create Production Order in ECC

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 24
April 2013

Manufacturing Execution: Release Order to SAP ME

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 25
April 2013

Manufacturing Execution: Schedule Routing Steps in time

Public

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Slide 26
April 2013

Manufacturing Execution: Start 1st Routing Step in the

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

Production Operator Dashboard

Public
Slide 27
April 2013

Public
Slide 28
April 2013

Manufacturing Execution: POD accesses dashboards,

Production Operator Dashboard (GUI)

ERP - Level 4
Siemens
TCE

SAP ECC

Quintiq
Operational
Planning

MII
SAP MIISAP
- Manufacturing

MES - Level 3
Indicenter /
RSuite / Coach
Coach

Graphical Routing
Editor

Machine - Level 1 & 2

Test Scripts

SAP
Manufacturing
Execution
Integration & Intelligence

Quintiq
Shift Planning

SAP Business Objects (Reports/Dashboards)

reports, work instructions, etc.

Public
Slide 29
April 2013

Public
Slide 30
April 2013

Public
Slide 31
April 2013

Shop Floor Control impact on FLOW improvement

Public
Slide 32
April 2013

Real-time progress tracking

(even available for operator during shift)
Monitoring and reporting

Escalate disturbance
notifications
Assure production
progress

Disturbance
resolution process

Trigger the just-in-time

delivery of kit carts

Execute Work Packages in takts

Dynamic Work instructions

Operator assignments

Graphical Routing Editor to

define blueprint
Calculate optimal sequence
(in 2 min. instead of 5 days)
Fair Work Packages
per operator, per shift
Dynamic sequencing

Whats next ?
Public

This week

: Start of Work preparation in PRD

Next week : Final UAT

Sept. 30

: Start Roll-out to 1st workcenters

Till end Q1 : Roll-out in ASML Netherlands

To be planned / follow-up projects:
- Potential enhancements after pilot in EUV factory;
- MES Machine interfacing;
- World-Wide roll-out:
USA - Wilton
USA - San Diego
Taiwan - Linkou
- Next step for disturbance resolution (QIM ??)
- Workplace efficiency Use of Mobile / iPad

Slide 33
July 2012

Questions