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CICLO XXI
Dottorando:
LUCA DASSA
Tutor:
Prof. DANILO CAMBIAGHI
Coordinatore:
Prof. GIOVANNI LEGNANI
Acknowledgements
My special gratitude goes to prof. Danilo Cambiaghi and to Mr. Valerio Villa who have trusted me from the
beginning of my PhD.
I address my special thanks to all the members of the Mechanical Draw Group of the University of Brescia
for the advice, the help and the friendship found: thanks to Mr. Gabriele Baronio, Mr. Stefano Uberti,
Mr. Riccardo Metraglia and prof. Emilio Chirone.
I would also like to thank all the members of the Industrial and Mechanical Department of the University of
Brescia who helped me in this three years: specially prof. Laura Depero and prof. Elza Bontempi, who have
given me the possibility to approach, for the first time, the compliant mechanisms and Mr. Matteo Lancini,
who supported me during the setting of the Bydlo device.
It is a pleasure to address my special thanks to Mr. Simon Henein who took me under his wing in
Switzerland and who shared with me his knowledge about flexure mechanisms.
Many thanks also to the CSEM that has given me the possibility to work for nine months in Neuchtel:
special thanks to Mr. Jean-Marc Breguet, Mr. Peter Spanoudakis, Mr. Ivar Kjelberg, Mr. Philippe Schwab,
Mr. Laurent Giriens, Mr. Serge Droz, Mr. Yvon Welte, Mr. Jean-Michel Mayor, Mr. Mario El-Khoury, and to
all the colleagues of the Systems Engineering Division.
In the end, many thanks to Mrs. Jodi Villa who has provided me for my terrible English.
Luca Dassa
Abstract
After a fast review of the state of the art (chapter 1) as regards to the so-called compliant mechanisms
with flexure hinges, chapter 2 tries to clarify the terminology, introducing at the same time Heneins
approach to the mechanism based on flexure articulations.
Chapters 3 and 4 show the first designed devices, my first steps in this research field: a miniaturized
machine for traction/compression and the translation of the universal joint kinematics in flexure structure.
In particular the machine for traction/compression was manufactured and the first tests are reported here.
The naiveties due to the basic knowledge in flexure field are also presented and discussed.
The mechanism for space application (chapter 5), the 2-DOFs nanoconverter (chapter 6) and the MEMS for
optical applications (chapter 7) are three projects designed during or after my internship at the CSEM
(Centre Suisse dlectronique et microtechnique Neuchtel - Switzerland): a different approach to the
flexure mechanisms is presented. Above all, the study of the MEMS device is deepened until the test phase
and represents a very interesting attempt to transfer the rules in designing flexure structures from the
traditional scale to the MEMS scale.
The last chapter touches briefly on the design of flexure structures in plastics.
Contents
INTRODUCTION
1.1
1.2
1.3
Measure sensors
1.4
1.5
1.6
MEMS
1.7
12
2.1
Howells approach
12
2.2
Lobontius approach
15
2.3
Heneins approach
17
26
3.1
Introduction
26
3.2
27
3.3
Partial models
31
3.4
35
3.5
36
3.6
38
3.7
Conclusions
41
42
4.1
42
4.2
43
4.3
45
4.4
47
4.5
50
51
5.1
51
5.2
53
5.3
Symmetric design
55
5.4
56
5.5
61
5.6
62
64
6
6.1
64
6.2
65
6.3
67
7
7.1
68
7.2
Study based on existing generations
7.2.1
System description
7.2.2
Comb actuators
7.2.3
Optical deformable area
7.3
Comb guiding system
7.3.1
Vast01
7.3.2
Vast02
7.3.3
Vast03
7.4
Simulations of the full structure for previous generations
7.4.1
Vast01
7.4.2
Vast02
7.4.3
7.5
Vast03
7.6
New generation analysis (vast04)
Errore. Il segnalibro non definito.
7.6.1
Comb actuator
Errore. Il segnalibro non definito.
7.6.2
Design of the optical area
Errore. Il segnalibro non definito.
7.6.3
Extra-lateral anchors
Errore. Il segnalibro non definito.
7.6.4
Comb guiding mechanism design
Errore. Il segnalibro non definito.
7.6.5
Connection elements between optical area and combs systemErrore. Il segnalibro non
definito.
7.7
New generation devices
7.7.1
Deformable device with big optical area (1x1 mm2)
7.7.2
Deformable device with small optical area (0.5x0.5 mm2)
7.8
Tests on the implemented solutions
7.8.1
A1 device
B1 device
7.8.2
D1 device
7.8.3
D2 device
7.8.4
F1 device
7.8.5
K2 device
7.8.6
Blade thickness analysis
7.8.7
Results discussion
7.9
120
8.1
Laboratory pincer
120
8.2
Child highchair
122
CONCLUSIONS
124
BIBLIOGRAPHY
125
Introduction
The research on compliant mechanisms with flexure hinges was started from 2 projects developed by prof.
Danilo Cambiaghi and eng. Valerio Villa at the Mechanical and Industrial Engineering Department
University of Brescia.
The Cambiaghis device [1], shown in Fig. 1 and in Fig. 2, was related to space application. It was necessary
to place a pincer under vacuum on a satellite. Very little material was available because of the
environmental condition and the traditional mechanical design, such as ball bearings, was not advised due
to the lubrication problems. The hard work conditions pushed to find new solutions for the device: the
problem was smartly solved using flexible elements manufactured in stainless steel. The kinematics is very
simple but efficient: a limit was introduced into the device to shield the flexible blade and to avoid an
exaggerated deformation. In Cambiaghis design, the kinematics is very simple: a possible schema with rigid
link is shown in Fig. 2. Every flexible element is replaced with an ideal pivot coupled with a rotational
spring. At the same time also the stiffness of the hinge was exploited to guarantee the shell hold during
stand-by and to allow the return of the pincer in the closed position after opening. The Eureca satellite flew
and came back on Earth; the mechanism was open and it was possible to verify the correct functioning of
the pincers.
The Villas drafting compass [1] is made from a different material, a moulded polyamide reinforced with
glass fibres (Fig. 3). The aim of this design is completely different from the previous device because this
application is a mass device produced in thousands. The kinematics is more complex than the previous
device, as shown in Fig. 4. In this case, it should also be possible to replace the flexible elements with ideal
joints coupled with springs but because every hinge is loaded beyond the elastic limit, the low resulting
stiffness can be neglected. To verify the reliability, the drafting compass was tested for one million cycles
without failure. In this case the choice to use a compliant device allows reducing the assembly costs,
producing in one time the complete mechanism.
These two projects are very interesting for the opened perspectives: the new approached research field, in
the case of the Cambiaghis project about 25 years ago, is the topic of this PhD thesis.
1 / 126
The aim of my PhD thesis is to deepen the knowledge about the compliant mechanisms and above all about
the compliant mechanisms with flexure hinges. The review of the literature shows that the division
between compliant mechanisms and compliant mechanisms with flexure hinges is not so clear: a guideline
able to solve the question will be founded in the publication of Mr. Simon Henein.
My knowledge about the flexible mechanisms has greatly increased thanks to the 9 months spent at the
CSEM (Centre Suisse dlectronique et microtechnique Neuchtel - Switzerland) during the last year of my
PhD: the Systems Engineering Division of the CSEM, where I worked, is focused on the design of flexure
based mechanisms. Moreover at the CSEM I had the possibility to work directly with Mr. Simon Henein, one
of the most important researchers in this field.
The theoretical fundamentals of Heneins approach will be explained in the first part of the thesis and then
deepened in the whole thesis. In agreement with the philosophy of the Mechanical Draw Group where I
have spent most of my PhD, some different applications of flexure based mechanisms will be presented,
explaining for each one the design process, from the idea to the definition of the model and to the device
drawing. This thesis is mainly composed of a wide collection of exempla of devices with flexures: where the
applications were developed before meeting Mr. Henein, I will try to review the project with a point of view
closest as possible to Heneins approach.
2 / 126
In general the division is not so clear. Very often the flexible members of the compliant mechanisms
deform beyond the limit of small displacements, while in general for the flexure hinges the situation is the
opposite. Moreover the metallic compliant mechanisms are used under the elastic limit, while the plastic
materials can be exploited beyond this limit. With these considerations, does the device [5] in Fig. 9 have to
be considered compliant mechanism or should it be considered mechanism with flexure hinges? In fact,
it is quite difficult to find some flexure hinges, with respect to the previous definition, since the flexible
elements are quite long with respect to the size of the whole device. So, it should be better to use the term
compliant mechanism, even if the hypothesis of small displacement is valid. But is it possible to amplify
the field of the so-called flexure hinges to contain this device as well? After a fast review of some
application where the flexure hinges and the compliant mechanisms are employed, there will be an
attempt to answer to this question.
3 / 126
4 / 126
80 m 20%
80 m
LVDT
5/1
0.1%
20 nm
1.5 N/ m 20%
50/5 N
10 N
10 N
1000 Hz 20%
600 20%
170 g 5%
12,5x40x50 mm3
It is possible to find other commercial actuators, such as the DSM FPA-500E [7]. The mechanics (see Fig. 11)
is very simple: the flexure stage has the purpose to amplify the displacements; the steel wire preloads the
two piezos. In Table 2 there are the main specifications of the device. The amplification of the displacement
is based on the scheme shown in Fig. 12, where the two ends of the rigid link AB have to move along two
orthogonal directions: this linkage is a four-bars linkage where the two ground hinges are replaced by
prismatic joints (= hinges with rotation axis at the infinity).
Stroke:
500 m 10%
Stiffness:
440 Hz 5% (fixed-free)
110 N
Dimensions:
19 x 52 x 10 mm
5 / 126
fixed link
flexurebased
actuators
6 / 126
One of the most famous and beautiful devices for measurement purposes is the mechanism used in the
Mettler-Toldo balance [9] (Fig. 16), where the force from the mass is geared down by two levers before
the compensation, applied with electromagnetic actuators. The balance based on this device is currently in
production. With this design it is possible to increase the balance accuracy, without adding the complexity
typical of the manufacturing of the two levers with standard joints.
7 / 126
In Fig. 20 and in Fig. 21 it is possible to see the nano-stage mounted on the machine AGIETRON Micro-Nano
for micro wire EDM machining [12]. Presented in 2005 this machine was the most performing in the world.
In this machine instead of the axis C (vertical axis), there is mounted a parallel stage X, Y, Z, where each axis
is moved by a Voice Coil actuator, and the measurement is performed by 3 optical rules. The most
important features are the following:
displacements (X x Y x Z): 6 x 6 x 6 mm
Resolution: 0.02 m
8 / 126
1.6 MEMS
The compliant mechanisms are already diffused in MEMS field but it is not usual to find flexure hinges
based MEMS. One of the main reasons is that the displacements required to the device are big with respect
to the overall dimensions of the device. Some interesting devices are presented in Overstolz PhD thesis
[13]. This PhD thesis presents the realization of micro electro-mechanical systems for optical applications
requiring very precise actuation. Two devices have been realized following two different concepts for
vertical comb drive actuators. One device provides a tilting platform of 22mm2 (see Fig. 22 and Fig. 24)
with to the possibility to set a tilt angle in a range of 3.5. The other device provides a triangular mirror of
1.7mm edge length which is suspended by three beams (see Fig. 23 and Fig. 25). The mirror, actuated by
three sets of asymmetric vertical comb actuators, can perform either a pure vertical (piston) displacement
of up to 18 m, or a tip-tilt of up to 2.2 mrad. The Overstolz thesis performs an analysis of the suspension
beams in every case, with analytical formula and with FE software.
In the first device, two elementary articulation allow the displacement with their torsion; in the second
device, the suspension (similar to the membrane shown in Fig. 14 and in Fig. 15) is based on the flexion of
three rods (the beams have an aspect ratio of beam height vs. beam width of 1:2 - 1:3).
by Tupper Ware S.p.A. [14]. In this case the device is very simple, usually composed of only one flexure
hinge, manufactured by moulding process. In this case it is important to have devices able to stand a
sufficient cycle number.
Rarely it is possible to find complex mechanisms based on flexure hinges. One of the most interesting
devices, actually on sale, is the device in Fig. 29 and in Fig. 30. Designed by Mr. Villa, it is a drafting compass
where the kinematics chain is monolithically manufactured in glass-fibre-reinforced polyamide. The
conception of the whole drafting compass is very different from the traditional design: in this case it is clear
that the design process to reach the needed kinematics is based on flexure hinge approach and is not the
attempt to copy a well-knew kinematics replacing traditional joints with flexure hinge. The result is a very
elegant, functional and robust design: the drafting compass has stood until 1 million of cycles without
failure. Another interesting feature is the sliding joint manufactured in a different way: in this case the joint
is not manufactured with flexure hinges but it is a passive joint, using the definition presented by Howell
in [3] (page 183). The Villas drafting compass shows very interesting characteristics and can be useful to
amplify the flexure hinges use.
10 / 126
Another very impressive device is the bi-stable switch, presented by Howell [3] (Fig. 31). The kinematics
seems very simple but it is not true. In fact the device has two positions of stable equilibrium, shown in Fig.
32, not a standard feature for every mechanism. It is not important to introduce here the explication of the
bistable behaviour (function of the linkage kinematics and the stiffness of every hinge) but this exemplum
shows that it is possible to realize devices with flexure hinges with uncommon behaviour.
In Table 3 there is a resume of the most interesting plastic materials used in flexure based mechanisms:
note that often (always considering the exempla in this paragraph) the flexure hinges are used expressly
over the yield strength. For this reason it is not possible to approach the stress study with traditional
approach. Some interesting advises in studying plastic hinges are provided by Howell [3].
Table 3: plastics for flexure devices
Material
Youngs
modulus
[GPa]
yield
strength
[MPa]
Polyethylene (HDPE)
1.4
28
2.8
55
Polypropylene (PP)
1.4
34
11 / 126
a)
c)
b)
d)
Fig. 33: Hooken mechanism
12 / 126
This exemplum shows that the replacement of a rigid body mechanism with a compliant mechanism (and
vice-versa) can be performed in different ways. This exemplum also clarifies that in the opinion of Howell,
the flexural pivots are only one of many different ways to replace traditional pivots.
Howell tries to find some elementary components of a generalized compliant mechanism: different types of
compliant segments are presented, each with a specific pseudo-rigid-body-model (see Table 4). The flexure
hinges, in this approach, are only one of many different compliant segments. In general the most of the
compliant mechanism members presented by Howell undergo large deflections and the hypothesis of small
displacements is not valid.
Table 4: compliant segments (Howell)
13 / 126
Fixed-guided beam
14 / 126
One of the most critical factors in this analysis is the fact that very few three-dimensional devices are
studied, reducing the application field. In the opposite way, this one is the only publication that diffusely
approaches the study of mechanisms where the hypothesis of small displacements is removed. In addition,
the approach foresees both the synthesis of a mechanisms and its analysis: for this reason, Howells rules
can be useful for the designer.
Chapter 10 is very interesting because it studies special-purpose mechanisms, with an interesting analysis
on compliant constant-force mechanisms. Special mention goes to chapter 11, where bistable mechanisms
are presented: some fundamentals about stability are introduced and the particular translation in the
compliant mechanism is presented.
Howell has also established a research group, the BYU Compliant mechanisms Research Group [12515],
which is deepening the research about compliant mechanisms with the collaboration of industrial partners.
15 / 126
a) corner-filleted
b) circular
c) elliptical
d) hyperbolic
e) parabolic
f) inverse parabolic
g) secant
For each hinge the deformations are assumed small within the elastic body (with the small displacement
hypothesis valid) and the compliances are given with an analytic formula. For example for a constant
rectangular cross section hinge (see Fig. 34), the following compliances are evaluated: CxFx, CyFy, CyMz, CzMz,
CzFz, CzMy, CyMy (first index: x, y, z are the displacements, x, y, z are the rotations; second index: Fx, Fy, Fz
are the loads, Mx, My, Mz are the torques).
A comparison between hinges of the same family is performed with respect to the flexibility, the precision
of rotation, the stress limitation and the energy consumption.
Fy
My
Fz
Fx
Mz
Mx
16 / 126
It is important to focus on the analysis of the hinge DOFs performed by Lobontiu: the single-axis flexure
hinge, studied only in a two-dimensional space, does not have 1 DOF but 3 DOFs; the two-axis hinge and
the multiple-axis hinge are modelled with 5 DOFs and 6 DOFs respectively. In Fig. 33 there is the definition
of the DOFs for a single-axis ([16] on page 24), constant-width flexure hinge, in the opinion of Howell: if the
red link is locked, the mobile rigid link can move in x and y directions and can rotate around z axis. It means
that the white rigid link has 3 DOFs, even if it is necessary to introduce 3 springs to simulate correctly the
hinge behaviour.
flexure hinge
ky
rigid link
rigid link
kx
y
z
kt
After that, Lobontiu presents new methods to analyze the statics and the dynamics of flexure-based
compliant mechanisms: each component of a flexure-based compliant mechanism, either flexible or rigid,
will be considered a separate link. Generically, every compliant mechanism is composed only of flexure
hinges since a rigid link is virtually a flexure hinge with zero compliance. The Lobontius efforts are directed
to suggest a way to write an equation system from which it is possible to derive the system behaviour: the
obvious consequence of this analysis is the presentation of a new finite-element formulation for flexure
hinges and flexure-based compliant mechanisms.
The last two chapters of the book are interesting: the second to last approaches some interesting topics like
large deformations, buckling, torsion of non-circular cross-section hinges, composite flexure hinges,
thermal effects, shape optimization, means of actuation and fabrication; the last chapter presents a few
applications of flexure-based compliant mechanisms.
Resuming, the complexity of the approach is very heavy for the designer: the rules presented in Lobontius
book can be easily applied in analysis phase but not in the design phase. The use of FEA becomes
competitive with the Lobontiu approach.
Elementary flexure articulations: the simplest flexural elements, such as beams, torsion bars,
membranes etc In general it is not possible to obtain with them one mechanical connection with
1 DOF. These articulations do not have, in general, a close equivalent in standard mechanical
connections.
17 / 126
Flexure guiding systems: combinations of flexure elementary articulations and rigid links. The
flexure guiding systems are comparable with traditional guiding systems such as revolute joints or
sliders. In general, it is possible to find an equivalent in standard mechanical connections (prismatic
joint, revolute joint, etc).
Articulated structures based on flexure guiding systems (flexible structures): structures composed
of flexure guiding systems and rigid links. In general these structures are comparable with
traditional articulated structures. These structures can have a maximum of 6 DOFs. Some rigid links
are designed to be connected to an actuator, a rigid link is the fixed link and another rigid link is the
output link.
The three definitions represent the ideal way in the design process of a complex mechanism: it starts from
the analysis of the simplest flexure device and then evolutes to more complex devices generally with only
one DOF and finally arrives to structures with 6 DOFs.
In general, Henein ([17], page 19/20) tries to find an equivalence between articulated structures based on
flexure guiding systems and structures based on ideal guiding systems and not an equivalence between
elementary flexure articulations and ideal guiding systems. Simplifying, Henein affirms that it is impossible
to use only a simple elementary flexure articulation to constitute a single DOF connection between rigid
links, consistently with the original analysis preformed on numerous elementary flexure articulations.
In Table 6 there are the elementary flexure articulations introduced by Henein, showing the DOF number
for each articulations. The dotted lines show the locked DOFs, whereas the continuous lines show the
articulation DOFs.
Table 6: elementary flexure articulations
l
blade: 3 DOFs
18 / 126
bellows: 5 DOFs
Here there is only the evaluation of the DOFs for a simple blade. For the other elementary articulations, it is
possible to perform the same analysis. Henein defines the different stiffness for the bade (see Fig. 36): KM,
KtM, Ktors, Ktrac, KP, KtP, Kcis, Ktcis and then evaluates the stiffness ratios:
Ktors/KM1.5: the DOF corresponding to the torsion is free because the two values are almost equal
The conclusion is that the simple blade is a connection with 3 DOFs, locking better the others DOFs if b/h
and l/h increase: with respect to the Fig. 36, a connection performed with a simple blade makes 1
translation and 2 rotations possible.
19 / 126
Note that even the circular hinge has 3 DOFs: the fact that the section of the blade change rapidly is not
enough to have a different number of DOFs with respect to the simple blade. An important consequence is
that changing the shape of the blade (for instance from the simple blade to the circular hinge) does not
help in modifying the kinematics of the device.
The results of this approach are very different from the Howell and Lobontiu approach. Considering a
simple blade in a two-dimensional space:
in the opinion of Howell, if the blade is short, it is a connection with 1 DOF, if the blade is longer,
the evaluation of the DOFs is not so clear;
in the opinion of Lobontiu, the flexible link does not lock any DOF, even if he shows that the
compliances are different;
in the opinion of Henein, in a bi-dimensional space, the simple blade has 2 DOFs, since the other
DOF, corresponding to the torsion of the blade, is an out-of-plane DOF.
Only Henein performs an analysis of the blade in a three-dimensional space and the results have been
previously shown.
Table 7: translation flexible bearings
20 / 126
Comparing the three approaches, the Lobontiu approach is rigorous (the flexible element has a stiffness in
each direction and it is not infinitely rigid in any direction, for sure) but it does not help to design a
mechanism. In the opposite way, Henein affirms that if there is a ratio bigger than 100 between two
compliances it is possible to consider a DOF locked and the other one free. This approach is very useful, and
it will be used in the following.
After the analysis of the elementary flexure articulations, Henein introduces some flexure guiding systems
with a single DOF (flexure pivots and flexure sliders), describing the main features of all the systems. The
aim is to combine elementary flexure articulations to obtain devices with single DOF, translational or
rotational. At first, Henein presents some flexure prismatic joints (flexure sliders): in Table 7 it is possible to
see these mechanisms. These are the simplest designs. Note that these are not the only single-DOF
prismatic joints but it is possible to imagine different mechanisms (see chapter 3). An exhaustive analysis is
performed on these systems in terms of stiffness, maximum displacement, and motion path of the output
link.
The simplest flexure slider is the 2-parallel-blades translation bearing: if N=0, the stiffness of the devices is
bh 3
(b = blade width / h = blade thickness / l = blade length) and the maximum
12
l3
l2
displacement is f = adm (adm = maximum stress for the material). Note that the motion of the output
3Eh
k=
24 EJ y
with J y =
link is a translation but not a rectilinear motion (see Fig. 37). In fact during motion the blades deform in
such a way as to cause a parasitic motion in the direction orthogonal to the needed translation (the result is
a parabolic displacement of the mobile link). Henein shows that it is also possible to evaluate this
displacement: if f is the displacement in x direction and is the displacement in y direction, it is possible to
demonstrate that
3f 2
.
5l
N
l
l/2
y
x
Furthermore Henein shows that the motion of the output link is a translation only if the actuation force is
applied in a particular point, at a distance from the fixed link equal to half the length of the blades. In the
21 / 126
other way the output link will not only have a translation, but will also rotate. Remember that the stiffness
of the 2-parallel-blades translation bearing depends on the load N on the stage.
It is necessary to highlight a remark about the over-constrained 4-parallel-blades linear bearing (Fig. 38).
The guiding system is frequently used in mechanisms since it looks symmetrical; however it is mandatory to
understand that this design is over-constrained. Comparing the 2-parallel-blades bearing and the overconstrained-4-parallel-blades linear bearing, it should be clear. During motion, the 2-parallel-blades
bearings have a parasitic displacement as previously mentioned. The over-constrained 4-parallel-blades
linear bearing can be imagined such as a composition of two opposite 2-parallel-blades translation
bearings. During motion the parasitic translation of the two 2-parallel-blades translation bearings is
avoided by the symmetry: the consequence is that the blades are obliged to stretch themselves. The overconstrained design has to be avoided because the rigidity of the compliant mechanism, as well the stress,
can change in an unforeseeable way.
y
x
About the articulated structures based on flexure guiding system, Henein affirms that it is possible to use
the Grbler formula to determine the DOFs of a planar or a tridimensional structure with n guide with di
DOFs (1in) and b closed loops:
Planar devices:
DOFs = d i 3b
i =1
Tridimensional devices:
DOFs = d i 6b
i =1
Only to clarify the big advantages of this approach, the evaluation of the DOFs of the 4 prismatic hinges
guide ([17] page 146) in a three-dimensional space will be explained. In the device there are 4 articulations
with 3 DOFs and 1 closed loop: with the Grbler formula the DOFs are 6. But a deep analysis shows that the
device has 6 internal DOFs (see Fig. 39), the same number as the result of the Grbler formula. The
experience also shows that the system has 1 DOF: the conclusion is that this device is 1-time overconstrained. In fact the device can function only if the two identical links are in the same plane. In this case
it is not a dangerous problem because it is very simple to respect this condition with EDM machining.
22 / 126
It is important to note the following: the term over-constrained condition has been used in two different
ways: during the description of the over-constrained 4-parallel-blades linear bearing and during the
evaluation of the DOFs of the 4-prismatic-hinges translation bearing. If the used term is the same, the
device behaviour is different. In the first case the design is intrinsically over-constrained: the motion of the
output link is strongly affected by the inevitable traction load in the blades. The critical point in this case is
the traction load in the blade, since the blade is obliged to deform in a direction in which it is very stiff. In
the second case the effect of the over-constrained design is lower: in fact, a good EDM machine can
guarantee very easily the alignment of the two arms of the 4-prismatic-hinges guide. During motion, the
blades can deform correctly - they bend - without an undesired load. After all that, the first case has to be
avoided, while the second case is not a big problem: in fact, a lot of the flexure guiding systems are in the
same condition but the functioning does not have any problem.
In addition, Henein introduces some elementary flexure revolute joints (flexible pivots), presenting some
interesting features for each device. Note also in this case that these are not the only single-DOF revolute
joints but it is possible to imagine different mechanisms (see chapter 5). For the most of the pivots, Henein
evaluates the angular stiffness, the maximum angular displacement, the parasitic translation of the mobile
link and the displacement of the instantaneous rotation centre. In the end, Henein compares the different
pivots with respect to:
the displacement of the instantaneous rotation centre: the 2 crossed-separated blades pivot has
the best performances
the stress with the same dimensions: the 2 crossed-separated blades pivot has the lowest stress
with the same displacement (less than 2 times)
to the simplicity of manufacturing: the 2 blades RCC pivot is the simplest to manufacture
For the over-constrained pivot, the same remarks as the over-constrained 4-parallel-blades linear bearing
are valid.
23 / 126
over-constrained pivot
With the flexure guiding systems shown in Table 8, it is possible to approach the design of more
complicated structures, such as the mechanisms shown by Henein in chapter 10 and chapter 11 [17]. Also,
the second part of the Heneins book is very interesting, providing important knowledge about wire EDM
and the materials to be used in flexure based mechanisms.
24 / 126
In conclusion, Heneins approach is very innovative and different from the other ones. It is recommended
to adopt this approach during the design of metallic flexure based mechanisms, but this approach could
also be used for other materials without validity loss. The power of this approach is the generality and the
simplicity of the models. Henein favours the simplicity of the model instead of the exactitude: in this way it
is possible to apply it in the design phase, providing the instruments to foresee the device behaviour.
In this thesis the Henein approach will be the landmark. The discovery of the Henein approach came late
during my PhD: for this reason some devices were designed without this knowledge. In this case I will try to
review these devices with respect to Heneins guidelines. Some of the others mechanisms were designed in
collaboration with Mr. Henein, some were designed after meeting him. Therefore the design is based on his
point of view.
Also the terminology will be changed, adopting the division in elementary flexure articulations, flexure
guiding systems and articulated structures based on flexure guiding systems: due to this, the term flexure
hinge will be neglected and replaced with elementary flexure articulation.
At this point, it is possible to observe once again the butterfly pivot (Fig. 40), designed by Mr. Henein ([5]).
Since it is composed of four 2-blades RCC pivot in series, there is not the problem to evaluate if the blades
are flexure hinges or not. The device can be named flexure guiding system, with respect to Heneins
definition.
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it must apply a load of 100 N (traction and compression) with a displacement of 2 mm as regards
to the zero position;
it must avoid interference with the standard operations of the microdiffractometer, especially with
reference to overshadowing the detector area;
26 / 126
it must be fit to allocate a wide specimen variety, ranging from rubbers to metals and from thin
films to wires.
To start the design of the device, a virtual 3D model of the diffractometer was needed. In lack of
information from the manufacturer, the model was developed starting from some digital photos calibrated
by way of traditional measurement tools (Fig. 42).
The main concern was related to the positioning of
the goniometer axis with reference to the
collimator and to the axis of the detector area,
since an error in this positioning would have
dramatic impacts on the possibility to focus the
specimen.
The detector area, the video camera and the
collimator are the most critical components: during
the mounting/dismounting phase it is necessary to
avoid any contact between the device and the
detector area, the camera and the collimator;
during the focusing phase it must be possible to
move the specimen until precisely reaching the
front view of the collimator; during the
measurement phase the detector must avoid
overshadowing.
The traction/compression machine was designed
around a 3-axis positioning stage, used to move the
whole device and consequently to focus the camera
on the specimen.
Fig. 42: Rigaku D-MAX Rapid (draw)
27 / 126
The design of the Bydlo frame was the most difficult step of the project. The frame has different functions:
it must perform the tasks of being a linear guide, holding the two grips, supporting the motor/transmission
group and interfacing the whole device to the diffractometer. All such goals were achieved by way of a
proper evolution of the Sarrus linkage, developed in order to allow acceptable displacement by way of
flexure hinges.
The preliminary design was coped during my master thesis [20], where I approached for the first time the
Sarrus linkage and the flexure hinges. In Fig. 44 it is possible to observe the first Bydlo device.
At that time the knowledge about flexure hinges was not very developed at the University of Brescia and
the translation from Sarrus mechanism based on traditional joints to the flexure-based Sarrus mechanism
was performed replacing directly the revolute joints with nonsymmetrical-circular flexure hinge. The Sarrus
linkage seemed the good solution for the guiding system because it was possible to have a lot of free space
in the desired position. In fact it was necessary to have the entire diffractometer detector free during
specimen traction/compression (see Fig. 42).
Later on, the process to design a flexure-based compliant mechanism is presented. To face the design of
this kind of mechanism, it is useful to replace the flexible mechanism with a corresponding structure based
on rigid links and ideal joints (the pseudo-rigid-body model suggested by Howell in [3]). For the first version
of the Bydlo device, this translation was performed replacing simply the circular hinges with ideal revolute
joints, assuming that the circular hinge had 1 DOF (note that it is not true, as presented in chapter 2). The
second step is to determine the stiffness / compliance of the hinge used in the mechanism. In my master
thesis [20] it was shown that it is possible to derive by analysis a set of simple expressions suitable to
evaluate stiffness and related stresses/strain relationship for single flexure hinges, such values depending
on the geometry of the flexure hinge. Two hinges were compared: the circular hinge and the nonsymmetrical circular hinge. If for the circular hinge the analytic formula was already well-knew, for the nonsymmetrical circular hinge the analytic formula was developed autonomously.
The stiffness is strictly related to the geometry of the hinge. Under this hypothesis, assuming a beam model
with variable section for the flexural hinge to allow the concentration of its properties on the neutral axis,
an expression that represents the compliance of each hinge can be founded. In general the compliance of a
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+ z*
1
flexure hinge is
=c=
dz
M
EJ ( z )
z*
b s (z )
with J ( z ) =
12
frequently the thickness t of the hinge is negligible comparing with the radius R of the hinge and the
thickness h of the connected bodies and a simplified expression can approximately represent the
compliance and, avoiding secondary motions, the associated stiffness can be calculated as the reciprocal of
the estimated compliance.
1
The formula for the compliance of a non-symmetrical circular hinge is the following: c =
9R 2
2 Ebt
valid
5
2
t
t
The flexure hinges are also the zones of the mechanism with highest mechanical stress, therefore an
evaluation of the maximal stress MAX can be reached computing the bending torque M and using the
previous simplified expression for the compliance of the hinge, under proper hypotheses, i.e. linear and
elastic material, De Saint Venants assumptions, homogeneous and isotropic material, and so on:
MAX =
2 2
t
E
.
3
r
To be exhaustive, the formulas for the circular hinge are the following: the compliance is c =
9R 2
2 Ebt
5
2
, valid
t
t
The nonsymmetric circular hinges were selected due to better compliance (i.e. a larger displacement for
the Bydlo linear bearing) with respect to widely used symmetric circular hinges.
Evaluating the behaviour of a single kinematics chain in Sarrus linkage, one of the most critical problems
was the high stress level in hinge A (see Fig. 47): in fact the angular displacement in hinge A is the double
with respect to the angular displacement in hinge B. A new kinematics chain was introduced (see Fig. 48) to
obviate this problem: in this case the new linkage has 1 DOF and 8 hinges. Every hinge has the same angular
displacement as the hinge B in Fig. 47. The conceptual hinges arrangement in Sarrus linkage, as shown in
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Fig. 44, evolved into the final arrangement as shown in Fig. 49, in order to cope with the basic differences
between flexural and standard hinges. Note once again that at this time it was not clear the DOF evaluation
in a flexure based mechanism. A flexure hinge was considered like an articulation with 1 DOF in the plane;
the out-of-plane behaviour was not so clear but it was decided to consider the hinge such as an articulation
with 1 DOF also in the space.
B
B
Fig. 47: scheme of one arm of the Sarrus' linkage (version of the master thesis)
Fig. 48: scheme of one arm of the Sarrus' linkage (definitive version)
Two solutions were possible, as it is possible to see in Fig. 49 and in Fig. 50, but it was impossible to decide
evaluating only the model with rigid links and ideal joints, because the two designs have the same scheme.
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The use of FE Analyses helped to choose the final arrangement, which was aimed to reduce stresses and
increase displacements. Because of the availability of a not very performing software it was impossible to
verify a complete model of the device. For this reason it was necessary to analyze a partial device. As
shown in Fig. 53 and Fig. 54, the comparison between the two solutions in Fig. 51 and Fig. 52, was
performed with FEA. Because the solution 1 was slightly stiffer than solution 2, it was decided to use
solution 1.
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A
D
B
Assumed value
AB
BC
i
13.0 mm
30.3 mm
30
s
.
d
The flexure hinge consists, as shown in Fig. 55, in a non symmetric circular hinge with the parametric values
listed in Table 10.
Table 10: Geometrical characteristics of the proposed compliant hinge
Geometrical
parameter
t
b
R
h
Within a stress range that do not produces material yield, the pseudo-rigid-body model obtained can be
examined with an energetic approach: the whole system can be compared with a prismatic joint consisting
in a vertical spring characterized by a stiffness kvert. Observing that the potential energy Ec stored in a single
hinge is a quarter of the energy Emec stored in the equivalent prismatic joint ( Ec = 0.5k 2 ,
E mec = 0.5k vert s 2 ), the expression of kvert can be deducted from the evaluation of f:
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4k i arcsin sin i
d
k vert =
; therefore the statics of the system can be described by the
2
s
approximate statics of the prismatic joint: P = k vert s .
The proposed model should be validated and calibrated by means of experimental tests, thus a specimen
was realized in Al 7075 T651 (Ergal), an aluminium alloy with optimal mechanical properties, using wire
erosion technology in two passes: the first is a roughing-out that releases the residual stresses in the
material while the latter is a finishing; finally the specimen was anodized for a protection against corrosion.
Fig. 56: Experimental curve obtained with a quasi static load process
The experimental curve represented in Fig. 56 can be perfectly superimposed, in the linear domain, to the
diagram of expression P = k vert s ; therefore the proposed approximations do not limit the validity of the
model, furthermore the comparison, in the linear domain, with a least square line and with finite element
analyses shows a good correspondence between numerical and experimental models. Finally the
calculation of MAX with the proposed formula appears too conservative, as a matter of fact the forecasted
yield point is really lower than the experimental results; therefore a wider measurement campaign should
be performed on a congruous number of specimens to clear this incongruity.
Besides just described static, or quasi static, tests, also dynamical and fatigue analyses were carried out
with a four bar mechanism analogous to the previous one provided with a vertical mass adequately
dimensioned to be submitted to mechanical vibrations by means of an electro-dynamical shaker rigidly
connected to the link CD of the sample. Initially the specimens are subjected to a frequency sweep to
identify the dynamical characterization of the system, then they are stressed with oligocyclic fatigue loads
according to the forecasted applicative situations. Due to the displacement sin imposed by the shaker to
the link CD, a movement sout of the link AB can be observed; assuming a Fourier expansion for sin, the
resulting output motion sout is not, generally, phased with the input motion, hence the relative motion
between CD and AB constitutes the dynamical load for the four bar mechanism. The scheme of this second
four-bars mechanism (Fig. 57), with the geometrical characteristics listed in Table 11, is different to the
previous one in order to limit transversal accelerations, i.e. secondary motions, of the calibrated mass; as a
matter of fact the morphology of the second mechanism offers transversal motions with a lower order of
magnitude than the previous sample, assuming the same relative displacement between AB and CD.
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Geometrical
parameter
AB
BC
Assumed value
[mm]
15
26
The proposed system can be dynamically associated to a simple prismatic joint realized starting from a
fixed connection and removing it with a compliance, therefore it can be described by a 1 DOF model with a
relative natural angular frequency 0 =
k vert
, or its natural frequency f0. Then the equivalent mass can be
me
valued as the sum between the calibrated mass and the mass of the link AB, while the determination of the
equivalent stiffness kvert can be achieved with a procedure similar to the one used for quasi static analysis:
known the stiffness of a single compliant hinge (1.230), the dependence of kvert on the displacement s is
neglected for the sake of simplicity by means of a proper choice of the displacement s as a mean value of
1.5 mm in presence of a maximum value of 2.5 mm. Therefore, the behaviour of the mechanism can be
described by the equations
sout
=
sin
2
kvert
+ (2fc )
(k
2
vert
4me f
2
) + (2fc )
2 2
and tg ( ) =
2me cf
,
2
k vert
4 2 k vert me f 2 + 4 2 cf 2
which represents, respectively, the modulus and the phase of the transfer function of the system, while the
graphical representation of sout/sin is depicted in Fig. 58.
The experimental sweep was carried out within a 01000 frequency range with a maximum acceleration
equal to 0.5 g. Then the transfer function, measured from the accelerometer on the translating plane of the
shaker to the other accelerometer on the test mass on the specimen (Fig. 57), is depicted in Fig. 59 and
compared with the forecasted diagram in Fig. 58, the result is a good correspondence between the
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experimental and the theoretical approaches, particularly in the peak at the frequency f0 equal to 41.3 Hz,
therefore the model can be validated. The sample is realized in a metallic material, hence the damping
coefficient assumes a low value, as a matter of fact a calibration of the model should be implemented to
further reduce the value of the coefficient c in the evaluation of sout/sin. Moreover the presence of a low
frequency peak in Fig. 59 can be attributed to the motion controller, while the high frequency peak is
associated with the second natural frequency of the system; however a further study of this second peak
was not performed because the application range for the four-bars compliant mechanism is expected to be
at a lower frequency.
Oligocyclic fatigue tests was executed on the same specimens used for the frequency analysis, exposing
them to a sinusoidal excitation of input/output bars with an amplitude of the movement equal to 2 mm, a
frequency of 30 Hz and over the expected lifetime of 12000 cycles; the theoretical expected results should
be negligible in agreement with the ASM Specialty Handbook [21] for the aluminium 7075 T651.
Table 12: 8 Oligocyclic fatigue test on two specimens
s [mm]
1.0
1.3
1.6
A
12000
12000
-
B
16800
9900
The two samples A and B were subjected, as listed in Table 12, to different cyclic movements with semiamplitudes s at a frequency equal to 30 Hz: the specimen B showed a residual plasticization in the end of
the test with a visible yield of the material confirmed also by an additive analysis of both samples A and B.
Each specimen supported the number of cyclic excitations, but they disappointed the forecasted damage,
probably because of the electro erosion process in presence of thin sections, but further studies should be
performed to confirm this intuition.
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Fig. 60 and Fig. 61 show the device integrated in the microdiffractometer: during the mounting phase the
goniometer of the diffractometer must be set in the 150 position, while in the 0 position, when the
detector area overshadowing is minimised, it is possible to perform transmission measurements (for
instance with plastic materials samples). Around the 0 position (the device can be tuned between 0 and
150) the measurements are to be performed in reflection mode, taking care not to overshadow the
sensible area.
Finally the requirements were fulfilled, with respect to the maximum load (100 N) and the maximum
displacement (2 mm) required. Fatigue tests are also possible but, since the machine is designed above all
for static loads, it is necessary to be careful to the test frequency.
The device was also calibrated to check the real tolerance range of the sensors: 0.4 N for the load cell and
2 m for the displacement sensor were verified. The DVRT resulted slightly less precise than stated by
data sheet, which may reduce the usability for very short metal specimen (until replacing the sensor). To
face up this issue the designers are evaluating an additional displacement sensor, more performing. To test
the copper wire (paragraph 3.5), the grips were used in a non conventional manner to allow one to insert a
rather long wire: the design of proper grips for small metal wires will be coped in the next future.
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The polyamide, a reinforced component, may be prepared by way of several processing techniques,
involving thermal and mechanical treatments, which impact on its crystalline structure and, hence, on its
mechanical properties. Although there is a large number of studies relating the structure or the properties
of polyamide to the conditions of its orientation and annealing, relatively few works have been published
on the relationship between the mechanical properties and structure/microstructure [23].
Fig. 62 shows XRD2 image of polyamide sample collected before the load test. The observed crystal
structure is the phase of polyamide, the most thermodynamically stable crystalline form: it is possible to
observe two crystalline peaks at about 20.3 (1) and 23.3 (2). This sample shows high preferred
orientation (fibre orientation).
The intensity distribution around the diffraction rings on the 2D X-ray patterns can be plotted as a function
of azimuthal angle: it is so possible to evidence the preferred orientation. The diffraction intensity profile
was then measured at several load values. Fig. 63 shows that, as the load increases, theres a change in the
intensity distribution along the Debye ring of 2 peak, inversely related to the crystalline orientation (the 1
peak has the same behaviour). This figure shows the change in the preferred orientation induced by
mechanical load and, in particular, the increase of fibres orientation along the load direction.
The second experiment, with a Cu wire (0.3 mm in radius and 30 mm in length) was performed to follow
the sample deformation during mechanical load. Fig. 64 shows XRD2 image collected on the unloaded
sample: all the Debye rings appearing in the 2D image are attributed to Cu phase.
It is well known that, when a mechanical load is applied, it is possible to follow the shift of a Bragg
reflection that is directly associated with a variation of the corresponding interplanar spacing. The lattice
spacing dhkl of a lattice plane (hkl) which is normal to q vector is calculated, using Braggs law from 2 angle
that corresponds to the maximum diffracted intensity. The strain in the direction q is then given by: = (dhkl
- d0)/d0 where d0 is the lattice spacing of a stress-free plane.
In test phase the output of the XRD diffraction analysis was made available in the end of each load cycle.
To evaluate lattice deformations only the portion of the Debye ring in the equatorial plane (orthogonal to
the applied load direction) for the 420 reflection of Cu was considered. In this case, the relative variation
in d spacing allows one to compute the strain of 420 planes orthogonal to the uniaxial applied load. The
change in peak position as the load increases allows one to determine the wire deformation.
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Fig. 65 reports the , imposed by the designed device, as a function of the , evaluated with the
diffractometer. From the slope of the fitting line it is possible to extract the elastic modulus, providing that
Poissons ratio is known. In this case the Youngs modulus E420 =100 GPa of the sample is in accord with
the value of the bulk material, as from literature.
z
y
x
A kinematics analysis of the linear bearing based on the Sarrus mechanism was performed with Henein
guidelines: in Fig. 66 there is the linear guide of the Bydlo machine. The blue piece is the fixed link and the
grey piece is the mobile link. To simplify the analysis the DOFs only the system in Fig. 67 was considered. As
shown in paragraph 2.3, the circular hinge is an articulation with 3 DOFs, such as the simple blade. In this
case applying the Grbler formula, with 4 hinges and 1 loop, the result is 6 DOFs. Deepening the analysis
there are 2 internal DOFs and the mobile link has 5 DOFs, because only its rotation around y axis is locked
twice (and the device is over-constrained). In Bydlo kinematics, every orange chain is composed of two
elements such as the four-bars linkage in Fig. 67: the DOFs in the end of the chain (one arm of the Bydlo
38 / 126
linear bearing) are the same as the single element (Fig. 68). At this moment, composing the 2 chains it is
possible to analyze the DOFs of the mobile link: the Grbler formula (two joints with 5 DOFs + 1 closed
loop) shows that the output link has 4 DOFs. The composition is possible with simplicity because the two
chains are orthogonal: the result is shown in Fig. 69. It is possible to conclude that the Bydlo linear stage is
not a linear bearing with respect to the Henein guidelines. This comment can be useful to increase the
device performances.
Fig. 68: output link of the Bydlo linear bearing with the
DOFs of the two arms (actual version)
Later on, two solutions to obtain a real linear guide for the Bydlo machine with simple modifications will be
presented.
The second possibility is to use the Sarrus/Henein mechanism, a single-DOF linear bearing. Henein ([17]
page 154) presents his personal vision of Sarrus linear guide. In fact, he uses the three-dimensional
coupling of two kinematics chains to have a perfect linear displacement. The idea at the basis of this design
starts from a traditional 2-parallel-blades guide: to compensate the parasitic transversal motion Henein
introduces another 2-parallel-blades guide in an orthogonal direction (Fig. 73). At this moment the mobile
link has 2 DOFs: Henein adds a second kinematics chain with the purpose to lock the transversal motion of
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the mobile link: linking the second chain directly to the mobile link, the mobile link will have a perfect linear
motion.
Fig. 71: output link of the Bydlo linear bearing with the
DOFs of the two arms (I solution)
An analysis of the DOFs can be performed with the Grbler formula: with 7 articulations with 3 DOFs and 4
closed loops (see Fig. 73), the structure is 3 times over-constrained. However, since the experience shows
that this mechanism has 1 DOF, it is possible to affirm that the internal structure is 4 times overconstrained. In fact, in this device there are 3 complete 2-parallel-blades translation bearings: each one is
time 1 over-constrained (such as the 4-prismatic-hinges guide in paragraph 2.3), for a total of 3 overconstrained conditions. To find the last one, every 2-parallel- guide blades is replaced by an equivalent ideal
joint, as shown in Fig. 74. The loops 1 and 2 (stage 1 and 2) have the effect to lock all the DOFs except two
translations; the remaining flexures (one 2-parallel-blades guide and a single blade) locks one DOF more,
the rotation around x axis (Fig. 75). The conclusion is that this device is 4 times over-constrained. The big
advantages are that this mechanism does not have internal DOFs (avoiding all the problems due to the
internal DOFs) and that the motion is perfectly rectilinear.
1
2
Adding a blade in the loop 3 (see Fig. 76), the device becomes more over-constrained, but with the
advantage to have two equal kinematics chains: it is possible to manufacture two planar equal piece to be
assembled later. Adding the new blade has the effect to increase the over-constrained condition of the
mechanism: in this case the device is 7 times over-constrained (because all the 3 DOFs locked by the new
blade were already locked).
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It is possible to implement this solution also in the Bydlo machine. In Fig. 77 there is a possible design. Note
that the Sarrus/Henein device in Fig. 77 seems different from this one in Fig. 76: in fact in Fig. 77 2-parallelblades guides were replaced by two 4-prismatic-hinges bearing. With respect to the functionality of the
device, there is no difference. The difference will be in the stiffness in displacement direction and in
stiffness ratios of the guide, that is the ratios between stiffness in displacement direction and the stiffness
in the other direction, for instance the stiffness in blade direction (see [17], page 95). In the future, to
choose the new solution it will not be sufficient to verify the kinematics but it will be mandatory to verify
the stiffness of the new solutions, comparing these one with the actual device.
3.7 Conclusions
This work presents a new laboratory device designed to study the change in the structural/microstructural
properties of small components during mechanical loading.
The first tests were performed on wire samples of known materials to verify the instrument reliability. The
results are very encouraging and the researchers are planning future experiments with more complicated
samples (thin film on a substrate, multilayers, etc.).
A collaboration with research group designing a similar device for Synchrotron applications has been
planned to compare the instrumentations and the results for thin film samples.
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Fig. 78: the foresee employment for the compliant universal joint
Considering the traditional universal joint shape, some different solutions were proposed with different
blades dispositions. In fact, the idea was to replace the traditional hinges in the joint directly with flexure
hinges. Considering the two rotation axes in a universal joint, it is possible to dispose the hinges in two
ways: with the blades in the axial direction, such as in Fig. 79 A, or in transversal direction, such as in Fig. 79
B.
42 / 126
It was immediately clear that the disposition A could be useful to pass on the axial loads but not a torque.
In fact, the blades have a high stiffness in axial direction but a very low stiffness in transversal direction. The
disposition B presents the opposite condition, good for torque but not for axial load. A monolithic design
was presented for both the solutions. Working on the solution A, a more elegant design was derived: it is
possible to design this solution starting from a pipe, with very simple EDM machining. The solution A
obtained from a pipe was named pipe universal joint and the solution B was named wall universal joint.
The will to find a flexible universal joint with better properties with respect to the loads led to the
combination of the solution A and B in a new design, the version C. In solutions C, the pipe universal joint
and the wall universal joint are coupled, so as to have the advantages and to cancel the disadvantages of
both solutions. In this way the core, very stiff with respect to the traction/compression load, will support
the entire axial load, while the external part, very stiff to the tangential loads, will support the torque. The
only disadvantage is that the number of the blades is doubled and if all the blades are identical, the
rotation stiffness is double with respect to solutions A and B. One of the most important requirements in
this solution is the alignment between external blade and internal blade: if the 2 blades of the same axis
have a circular profile, it should be very difficult to align the external and the internal joint. With a linear
profile this problem has a low importance. The solution C was named complete universal joint.
To obviate the small displacement of piezo actuators, the a piezo inch-worm was chosen: the actuator, the
PI N-214, has a big displacement ( 20 mm) with respect to the traditional piezo stack. The nanometric
resolution is another important feature. The technical data sheet shows that this kind of actuator is advised
for vacuum applications, in clean rooms and where the magnetic field must be avoided. The PI can provide
the actuator with an integrated encoder and controller for closed-loop operations.
The material chosen for the universal joints was Titanium Ti6Al4V STA. The flexure hinges were
dimensioned for a maximum displacement of 4,5, with an axial load of 300N. A fast analysis was
performed on the working space for the robot: the results are shown in Fig. 85, Fig. 86, Fig. 87 and resumed
in Table 13.
17 mm
displacement in y direction
17 mm
displacement in z direction
11.5 mm
actuator displacement
20 mm
500 N
90 Nm
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E [MPa]
rupture
strength
r [MPa]
yield strength
sn [MPa]
density
[kg/m3]
114000
1170
1100
4430
infinite life
strength
(alternate flexion
load) [MPa]
600
Then it is possible to start the dimensioning of the two universal joints: in fact the complete universal joint
is composed of two joints, the joint for the axial load and the joint for the torque. For both the joints it was
decided to use the circular hinges but the dimensioning was performed independently for each joint.
Since the pipe joint is turned into the axial load, whereas it is not affected by the torque on the complete
joint, it is possible to conclude that the loads acting on this pivot are: an axial load, equal to the holding
torque of the actuators (Ftot=300 N F=150 N on each hinge of the pipe joint) and an angular deformation
(max = 4.5). The maximum stress is evaluated with the formula max = ax + flex =
F 6 max
+
A c f bt 2
where c f =
9R 2
2 Ebt
5
2
With proper considerations, for instance choosing the percentage of the axial stress with respect to the
total maximum stress in the blade, the geometry of the blades of the pipe joint is completely defined:
t = 0.3 mm
b = 13 mm
R = 25 mm
l = 9 mm
Some FE analysis with the software CosmosWorks were performed to check the simplified dimensioning of
the blades. To begin with, a comparison was performed by analyzing the node values and the element
values provided by the software in order to choose the right dimension of the mesh (Fig. 89).
It was decide to analyze the joint with the intermediate mesh, rounding the node stresses up to the nearest
unit. As it is possible to see in Fig. 90, it was impossible to perform an analysis on the whole pivot due to
the limits of the software Cosmos Works.
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elements in the
thickness
1
2
3
max[MPa]
Node stress
457.3
456.6
457
max[MPa]
Element stress
399.9
417.3
435.3
max[%]
12.5
8.6
4.7
As it is possible to observe in Fig. 90, the stressed area in the pivot is concentrated around the minimum
thickness, whereas the other part of the structure is comparable to a rigid link. It is also interesting to note
that the motion of the rotation axis of the hinge is limited. The results of the FE analyses are very close to
the stresses evaluated with a theoretical approach. In Table 16, there is a comparison between FEA and
theory.
Table 16: comparison between theory and FEA (pipe un. joint)
analysis
theory
FEM
max [MPa]
458.5
457.2
flex [MPa]
420
417.8
axial [MPa]
38.5
39.7
To guarantee homogeneity in the elastic behaviour, the same geometry of the pipe joint was adopted into
the wall universal joint, evaluating only a different width b of the blades. The maximum foreseen torque on
the joint is 30 Nm. To perform a simple evaluation of the stress on the wall pivot, the torque was
decomposed in different forces, located in the middle of the hinges. The value of the distance r from the
hypothetic cross of the two rotation axes was chosen in order to limit the overall dimensions of the pivot:
r=40 mm. Then it is possible to evaluate the load T=torque/r=375 N. In the end, since the load condition for
a blade of the wall universal joint is the same as the pipe universal joint, the same formulas were used to
define the dimension b. Imposing a maximum stress due to the force T, the dimension b assumes the value
of 28 mm.
Also in this case, an FE analysis was performed to check the obtained result. Because the geometry of the
blades and the load conditions of the wall universal joint are comparable to those of the pipe joint, it was
decided to use a mesh with 2 elements in the minimum thickness. Also in this situation it was not possible
to perform the analysis of the whole structure because of the unavailability of performing FE software: the
von Mises stresses for analyzed model is shown in Fig. 92.
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Table 17: comparison between theory and FEA (wall un. joint)
analysis
max, tot [MPa]
flex [MPa]
torsion [MPa]
theory
465
420
45
2.36
FEM
493.0
416.8
80.48
2.23
The comparison between FEA and theory presents good results, also in this case. The main difference is the
transformation of the torque acting on the pivot in a force acting axially on the blades.
In the end it is possible to collect in Table 18 the information from the different analyses to obtain the
features of the complete universal joint, used in the PK robot for high vacuum applications.
Table 18: features of the complete universal joint
-1
Kf [Nmrad ]
2.07
4.14
6.21
Ka [Nm-1]
5.6E+07
/
5.6E+07
Kt [Nmrad-1]
/
1.75E+04
1.75E+04
Mf4.5 [Nm]
1.63E-01
3.25E-01
4.88E-01
lmax [mm]
5.358E-03
/
5.358E-03
max [deg.]
/
9.8E-02
9.8E-02
Kf is the flexional stiffness of the whole pivot for each rotation axis, Ka is the axial stiffness of the whole pivot, Kt is the
torsional stiffness of the whole pivot, Mf4.5 is the needed torque to have the rotation of 4,5 around one axis, lmax is
the deformation in axial direction due to the maximum force (300 N), max is the deformation due to the maximum
torque (30 Nm).
fixed link
cross link
output link
Fig. 93: DOFs for the pipe un. joints and comparison with the simple rod
Performing the same analysis on wall universal joint, the result is different: the mechanism has 3 DOFs
since the rotation around the longitudinal axis and the 2 translations in the plane of the blades are locked
48 / 126
(see Fig. 94). But the analysis on the complete universal joint provides a very different result: the pipe
universal joint and the wall universal joint in a parallel disposition provide only 2 DOFs on the output link,
as it is possible to obtain adding the locked DOFs shown in Fig. 93 C and in Fig. 94. Only the complete
universal joint has the same kinematics as the traditional universal joint.
Focusing the attention on the disposition of the flexible blades, the blades 1 and 2 in Fig. 96 A are linked to
fixed link of the complete universal joint and each one is linked to one of the two cross elements, in the
intermediate position in the joint.
blade 1
blade 2
blade 1
fixed
link
blade 2
output link
cross link 1
cross link 2
Fig. 96: a different possibility for the universal joint
The positions of the blades remind one of the crossed-separated-blades revolute joint introduced by
Henein. Using four of these joints it is possible to realize a universal joint, with 2 DOFs. It is possible to
affirm that the complete universal joint approaches the solution with four crossed-separated-blades
revolute joints but only the last one translates the traditional universal joint in a flexible device.
Fig. 98: un. joint with a single rev. joint for each axis
It is necessary to add that the last solution presents the same characteristics as the traditional universal
joint with respect to the over-constrained design. In fact, two revolute joints would not be necessary to the
kinematics. With respect to Fig. 97, it would be sufficient to have only one revolute joint between link 1 and
link 2, and one between link 2 and link 3, as shown in Fig. 98.
49 / 126
During the research in the literature, it was discovered that the flexible joint had already been used in some
application, often in a version with incorrect DOF number. In Fig. 100 and Fig. 101 there is the balance for
high precision measurements designed by the IMGC (Istituto Metrologico Gustavo Colonnetti - C.N.R. Torino), for calibration of masses between 10 kg and 50 kg, with an accuracy of 10 mg. In this application
the joint has the task to allow the alignment of the weight (such as the traditional knives): in this way the 5
DOFs do not disturb the functioning since the joint works only in axial direction. Note that the blades were
manufactured with silicon steel 52SiCrNi5, subjected to hardening at 850 C, quenching in oil and
tempering at 50C.
50 / 126
2,8mHz
1,5 pm
in the same frequency range. The stability requirement was translated
defined as
1 +
f
Hz
in a static requirement of a maximum parasitic displacement of the axis at 412 rad of 21.786 pm (= 21.8
nm).
ESA have required also the redundancy in the actuation: if one actuator fails, the other one has to
guarantee the mechanism functions.
Moreover, the device has to support the lunch without locking devices, with a first eigenfrequency higher
than 150 Hz. Last but not least, the allowable volume is very small - 40 x 60 x 60 mm3 - and the maximum
weight has to be 100 g.
51 / 126
control the steps, with thermal problems due to the presence of a continuous alimentation. It was decided
to use a piezo inchworm, which is designed to make small steps with a high precision. The working principle
is shown in Fig. 104: in every unit, the piezo A has the function to give the piezo B in contact with the
mobile bar; then the piezo B (shear piezo, for which the deformation is not in the axial direction) deforms
pushing the mobile bar. Because there are two sets of piezos, while the set 1 moves the bar, the set 2 is not
in contact with the bar. When the set 1 has finished the step, the set 2 acts to hold the bar. After that the
set 1 has released the bar, it is the turn of the set 2 to deform and to push forward the bar. In this way it is
possible to have a very big displacement, bigger than the shear deformation of a single B piezo.
A
B
Set 1
Set 2
Description
Requirement
Piezolegs
PI N-310.01
NEXACT PiezoWalk
35 mm
40 mm
~ 40 um
Absolute accuracy
~ 50 nm
Resolution
--
10 nm
5 nm
Go-to-position speed
~ 500 nm/s
12.5 mm/s
10 mm/s
< 10 mW
5mW/Hz
--
Volume (mm3)
30 x 30 x 30
22 x 11 x 20
25 x 25 x 12
Mass
--
20 g
50 g
No launch locking
self-locking
7.3 N
10 N
Yes
Yes
Non magnetic or no
ferromagnetic materials
Vacuum capability
10-7 torr
UHV
Yes
Operating Temperature
+10 - +40C
-20C - +70C
0 to 50 C
Two suppliers were chosen, Piezolegs and PI. In Table 19 there are the most important features of both the
actuator: the only difference between the two is that the Piezolegs has one set of walking legs and the PI
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has two opposite sets of walking legs (such as the Fig. 104). The Piezolegs Piezo Bimorph Drive was chosen
because of the smaller dimensions and the availability in a reasonable time. The PI N-310.01 was
maintained as second choice.
About the sensor, it was necessary to find the most performing sensor on the market, with the smallest
dimensions as possible. With the required resolution it was mandatory to look for a capacitive sensor. In
the end of the trade-off the Micro-Epsilon sensor was chosen: the most problem is that this sensor is not
available for space application. In this moment the CSEM is verifying the possibility to have a custom
version. It seems possible because the capacitive sensor exploits the geometry to make a measurement,
independently from the material. The second selection is the Queensgate sensor: the most disadvantage of
this solution is the volume, very high with respect to the specs.
Table 20: sensors for LISA PAAM
Description
Sensor range
Sensor Linearity
Resolution
Sensor Temp. stability (zero drift)
Sensor Temp sensitivity (scale)
Electronics Temp stability
Sensor dimensions
Target diameter
Space heritage
Micro-Epsilon
S601-0.05
50 m
0.2%FSO
0.1 m
0.5 nm
0.06 m/C
11 ppm/C
< 0.01%FSO/C
< 0.005 m/C
6mm x 12mm
3mm
No
Queensgate
SPNS 1100
240 m
<0.08%FSO
<0.2 m
18 nm 0.0077%FSO*
---9.5mm x 22mm
-Yes
Then it was decided to couple two identical sensors, in such a way as to have a differential measurement,
to provide a better accuracy and at the same way.
In fact during motion every blade deforms with an S shape and is not stressed by a traction/compression
load. The consequence is a parasitic vertical displacement of the mobile link (Fig. 106). Because there were
no strong requirements about the displacement in this direction, this pivot was judged acceptable.
53 / 126
The first version of the complete device is shown in Fig. 107 and Fig. 108: the flexible pivot is moved by a
tangential force applied through a long flexible blade. The length of this blade was chosen to avoid a too big
parasitic load in the direction orthogonal to the mirror: in fact during motion the blade deforms, applying a
reaction load in this direction. Because the main pivot is not infinitely stiff, the blade reaction has an effect
on the axis rotation of the pivot, displacing it. This effect has to be minimized (21.786 pm at 412 rad).
pivot
actuators
sensors
Fig. 108: LISA PAAM (I version) - B
Fig. 107: LISA PAAM (I version) - A
18 mm
y
x
Nominal
actuator (B)
Redundant
actuator (A)
mirror
38 mm
54 / 126
To have the redundancy in the actuation, a lever was added: in normal functioning only the actuator B is on
and the redundancy lever pivots around the flexure hinge connecting itself and the other actuator. If there
is a failure of the nominal actuator, the redundant actuator has to have the necessary stroke to maintain
the device functionality. With this design the maximum required displacement for the actuators is 66 m.
ESA requested to double the pivot because the single pivot seemed too weak with respect to the launch
conditions and the configuration was judged not optimal with respect to the thermal requirements. The
ESA was contended (Fig. 99and Fig. 100) but doubling the blades causes a different mechanism behaviour.
In fact the new pivot becomes over-constrained: with respect to the Fig. 112, during motion the mobile link
should go up because of the flexion of the top blades but it is obstructed by the blades of the bottom pivot.
The result is that during motion the blades are stressed by a traction load, giving rise to a non linear
behaviour of the pivot. In this case, the over-constrained solution was accepted by the CSEM because the
displacement is very small and the behaviour can considered linear.
55 / 126
with rectangular cross section constant along the blade. It is the direct consequence of the consideration
that the circular hinge has the same number of DOFs than the blade with constant rectangular cross
section. With respect to the ESA pivot, it was decided to use the pivot already introduced, since it does not
have a parasitic displacement of the rotation axis during motion.
The second step is the choice of the dimensions of the blades in the flexure structure. A preliminary
analysis can be performed considering the load condition of each blade. Henein in [17] collects almost all
the formulas necessary for the first dimensioning of a blade: different load cases are considered and for
each one the stiffness of the blade and the maximum displacement are evaluated. In this case, under ideal
conditions, the pivot is loaded by a torque Mz and two forces Fx and Fy (see Fig. 116). The loads were
considered separately: for instance, the torque was divided on the three blades, as it is shown in Fig. 117.
At this point it was possible to consider each blade separately.
z
x
Mz
Fx
Fy
The load condition shown in Fig. 119 was considered: the deformed blade shape is an S shape, that is the
free end does not rotate under load. For the over-constrained pivot, the right load condition should be that
one in Fig. 120, because the blades are loaded axially, but for small displacements the traction load can be
neglected and the 2 cases are equivalent. The stiffness of the blade in this condition is K cis =
Jy =
12 EJ y
l3
with
l2
bh 3
and the maximum displacement is f cis = adm , where adm is the fatigue strength for the
12
3Eh
material (in Fig. 118 there is the legend for stiffness analytic formulas).
z
y
x
l
P
h
f
Fig. 119: load case for a blade
of the pivot
57 / 126
To evaluate the radial stiffness of the pivot, only one active blade per pivot was considered. The blade can
be considered with the same load condition as the previous case but with a different stiffness because the
t
load is in a different direction with respect to the previous case: K cis
=
adm l 2
3Eb
12 EJ x
b3h
with
J
=
and the
x
l3
12
y
x
To dimension the remaining flexures, the driving rod and the two pivots of the redundant lever, the scheme
shown in Fig. 112 was adopted.
M1
main pivot
F1
B
A
M2
F2
Fig. 123: scheme for flexures of the redundant lever
In Table 21 there are all the formulas used for the dimensioning of the flexures: for each case in Table 21, h
is the thickness of the blades and b is the width. As previously mentioned, the radial load on the flexible
main pivot is due to the deformation of all the flexures placed in the device, in particular the flexure A, the
driving rod. Therefore, studying the flexure A with the scheme in Fig. 124, it is possible to derive the load F
acting on the main pivot. A fast analysis shows that, once M1 is evaluated (see Table 21), M 2 =
F1 = F2 =
M2
and
2
3M 1
.
2l
58 / 126
The dimensions of all the flexures were chosen trying to have the lowest angular stiffness of the pivot with
the maximum radial stiffness.
Table 21: schemes for flexures in redundant lever
k =
Jy =
4 EJ y
l
l
bh 3
; adm = adm
12
2 Eh
l
B
bh 3
;
l
12
2 l
adm = adm
Eh
k =
EJ y
; Jy =
k =
8 EJ y
; Jy =
l
C
M
adm =
l
adm l
bh 3
;
12
2 Eh
All the formulas were introduced in a Matlab file to derive the ideal dimensions of flexure blades in the
device. Considering the copper-beryllium, the results for the pivot blades are the following:
b=10 mm
h=130 m
l=2.3 mm
Note that these dimensions do not change if the material changes. In fact, the goal is to limit the radial
displacement of the main pivot but the disturbance in the radial direction is caused by an elastic load, the
deformation of the driving rod that gives rise to the rotation of the main pivot. If the material changes, the
stiffness of the main pivot (due to the Youngs modulus) increases, for exemplum, and the stiffness of the
driving rod increases as well, increasing the radial load (because the angular displacement of the lever is
constant). Concluding, with a stiffer material the disturbance increases and the radial stiffness of the main
pivot increases as well: the displacement of the pivot in radial direction does not change.
Table 22: comparison between analytic evaluation and FEA (main pivot))
Matlab
Angular
stiffness
Radial
Stiffness
Matlab (with
shear effect)
ka = 192 Nm/rad
ka =217.11 Nm/rad
(Matlab with
shear/FEA*100)
88.4
kr = 2.86E+09 N/m
kr = 4.77E+07 N/m
kr = 7.88E+07 N/m
60.6
59 / 126
Then the following step was the check of the stiffness with a FEW software. In fact the introduced
hypotheses helped during the dimensioning but it was necessary to verify it. It was observed during the first
analyses that the FEM stiffness in radial direction was lower than that one evaluated with the analytical
formulas. As it is possible to observe, the blade is very short with respect to the width: for this reason the
shear effect was added in the analytic evaluation of the radial stiffness of the pivot. The results in this case
were similar and it was decide to keep the dimensions of the blades (Table 22).
An ideal FEM model has been constructed with identical meshing in all six blades in order to avoid inherent
errors that exist from differences due to meshing. Automatic meshing has been avoided since this would
cause parasitic effects due to the difference in apparent stiffness in each blade. Some figures of the FEM
analyses are reported here.
fixed
applied
Forces/Moment
Actuation
lever
fixed
Fig. 125: model of the main pivot for FEA
With the previous 3D model the stiffness matrix of ideal flex pivot was evaluated. In Table 23 there is an
elaboration of the stiffness matrix, where the displacements of the centre of the pivot are presented under
different loads.
Table 23: 3D displacements of the pivot centre
Force Fx= 1N
Force Fy= 1N
Force Fz= 1N
Mx = 1Nmm
My = 1Nmm
Mz = 1Nmm
X
12688 pm
~0 pm
~0 pm
22111 prad
~0 rad
~0 rad
Y
~0 pm
12688 pm
~0 pm
~0 rad
22111 prad
~0 rad
Z
~0 pm
~0 pm
2043 pm
~0 rad
~0 rad
4.606 rad
The analysis of the ideal pivot provided good results, that is maximum deformation in radial direction was
acceptable. With FE analyses the machining tolerances were evaluated also to define the error budget of
Optical Path piston error. In Table 24 there is the evaluation of the piston error contribution at 0.13 rad:
note that the max value budget is 1.2 pm.
The results of the tolerance analysis are the same for all the considered materials for the reason described
before (the disturbance to be minimize is caused by an elastic load). In the end, three materials were
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evaluated, as shown in Table 25. The Aluminium alloy was chosen as baseline because of the weight, the
high actuator force margin and the high torsional pivot frequency. It should be added that the mirror to be
mounted in PAAM is made from Zerodur glass and the Aluminium has the worst thermal conductivity with
respect to the Zerodur. It is possible that the material chosen will be different if the thermal stability will
become more important than the maximum allowable weight.
Table 24: results of the nominal tolerance analysis
Max value
Ideal pivot piston error
Case 1B Blade Thickness: nominal 5 m
Case 2 Blade Length: nominal 10 m
Case 3 Blade Width: nominal 10 m
Youngs Modulus variation: nominal 2%
Mirror mounting tolerance (detail design)
Optical bench alignment tolerance static offset
Direct Sum:
2
0.057 pm
0.9 pm
0.0255 pm
0.112 pm
0.3 pm
TBD
TBD
1.39 pm
0.92 pm
Actually the CSEM is working on this project. A first physical model based on this study will be
manufactured and tested to verify the performances and the stability.
Table 25: comparison between different materials
Material
Material
CuBe
Copper Beryllium
CuBe C17200 TM04
(BW 190 HM)
Ti
Ti-6Al-4V
(DIN 3.7165,
AMS 4911)
272
217.4
78.8
3.58 E-05
89.565 E-03
Al
Al 6061-T6
(DIN
AlMg1SiCu.
71)
88
111.9
40.6
1.16 E-05
46.119 E-03
2.84
1.46
2.34
1.42
1.78
3.6
10.5 E-03
0.73
0.91
7.0
5.407 E-03
1.17
1.46
4.4
8.619 E-03
392
4390
495
5550
488
5474
144
178.4
64.7
1.90 E-05
73.523 E-03
connection between the two is the heart of the idea: since the transmission blade acts on the intermediate
link, the motion is transferred to the internal link (where there is the mirror) by means of two flexible
blades. Due to the placement of the two blades, the rotation is transmitted to the internal link but the
disturbance load is filtered. The disturbance will be present on the internal link but with a lower order of
magnitude. This idea was not implemented on the PAAM mechanism because of the complexity of the
manufacturing. In fact it is very difficult, almost impossible, to obtain monolithically the double pivot with
redundant lever too.
intermediate
link
fixed
link
Fig. 127: 3D view of the doubled pivot
internal link
During the PAAM development a different pivot was evaluated. In this case, the blades in the pivot have
different bonds and different load condition with respect to the pivot actually implemented in the LISA
PAAM. To evaluate the angular stiffness of the pivot, it is possible to use the scheme in Table 26. Note that
in this case the blade has only a different spatial placement. However during flexion, the blades get shorter:
for this reason, if the central link is linked to the fixed link with more than two blades, the pivot is over
constrained (for the same pivot with 2 blades see paragraph 2.3). In this case it was not possible to have
only two blades because of the required radial stiffness: additionally the radial stiffness can be changed
62 / 126
with a different blade number. Moreover the manufacturing of this pivot is simpler than the actual pivot;
however in this case it is more difficult to obtain monolithically the device with the lever as well. Note that
the highest performances in EDM actually are obtained with wire EDM.
Table 26: load case for a blade of the different solution
k =
Jy =
l
8EJ y 3 p 3 p 2
1 +
+ 2 ;
l
l
l
adml 2
bh 3
; adm =
12
E (2hl + 3hp )
63 / 126
In a recent paper [25] Henein introduces an interesting mechanism, named nanoconverter: the most
important feature is that with this mechanism it is possible to have a very big reduction factor (between 20
and 1000) in a very small volume (Fig. 130 and Fig. 131). In this way it is possible to use commercial
actuator with micrometric accuracy to have a nanometric accuracy. Note that this device has been
patented. The working principle is explained in the following. In Fig. 132 there is a scheme of the
nanoconverter. If the output link of the nanoconverter should be free to move rigidly linked to the
intermediate stage, it would follow the red path (a parabola, see paragraph 2.3). However since it cannot
move in x direction and because the converting blade has an S shape, it is necessary that it recovers the x
displacement following the blue path (another parabola). Since the two parabolas are shifted one with
respect to the other one of a quantity x0, the resulting motion is the black straight line. The reduction factor
is a function of L and x0: i =
5L
.
6 x0
-4
x 10
x
L
1
0
-1
-2
-3
-4
x0
-5
-6
-2
-1.5
-1
-0.5
0
0.5
int.stage displ.
1.5
2
-3
x 10
64 / 126
This mechanism, with 1 DOF, is applied in the Differential-Phase-Contrast Interferometer setup in the SLS
Synchrotron Radiation TOMCAT Beamline (Zurich).
The dimensioning of the nanoconverter is quite simple, once the reduction factor is chosen. In fact in the
structure it is possible to find one parallel-springs linear bearing, two 4-circular-hinges linear bearings and a
converter blade. The first stage, the input stage, has the task to connect the linear actuator used to move
the device, allowing the transversal parasitic motion of the second stage, that would be prevented if the
output shaft of the linear actuator was directly linked to the intermediate stage. The displacement of this
stage is equal to the very small parasitic displacement of the intermediate stage: for this reason, it is
possible to use a 4-cirular-hinges linear bearing. The 4-cirular-hinges linear bearing presents, in addition, a
very high transversal stiffness (with respect to the parallel-springs linear bearing), feature exploited to
transmit the load from the actuator to the second stage. The second stage, the intermediate stage, has to
guarantee a long displacement, even longer if the lever ratio increases. For this reason, the second stage is
a parallel-springs linear stage, a stage characterized by a bigger displacement than the 4-cirular-hinges
linear stage with the same volume. The converter blade is dimensioned just as the blades of the second
stage, since the shift does not affect appreciably the behaviour. The displacement of the last stage is in
nanometric scale: the 4-cirular-hinges linear stage guarantees a sufficient displacement with good
performances in terms of transversal stiffness.
intermediate
stage 1
Fx
output stage
Fx
int.
stage 1
output
stage
fixed stage
flexure C
flexure A
flexure B
flexure D
intermediate
stage 2
int.
stage 2
y
x
Fy
Fy
Fig. 135: XY flexure stage equivalent model
The first step was to find an idea to realize a planar parallel kinematics with 2 DOFs: it is necessary to have
2 rectilinear DOFs, locking the rotation in the mechanism plane and all the out-of-plane DOFs. The good
kinematics was found in the Awtars PhD thesis [26] and it is shown in Fig. 134. This figure is one of the
starting points for the PhD thesis, but in this case it is sufficient. In fact, the motion stage has 2 translational
65 / 126
DOFs, that it is possible to control with 2 actuators linked to the 2 intermediate stages. Considering only a
two-dimensional space, the flexible device can be translated in an ideal device as shown in Fig. 135. The
problem is that the displacement of both the intermediate stages is a translation but not a straight line and
it is not simple to connect the actuator to them. Awtar solves the problem using the way that is shown in
Fig. 136 and in Fig. 137, that is a connection able to transfer the axial load but compliant in all the other
directions. Acting with the actuator x there will be a translation of the motion stage in x direction, with a
parasitic displacement in y direction: as shown in paragraph 2.3, it is possible to foresee with a good
accuracy the transversal displacement of a parallelogram flexure.
intermediate stage
connection
actuator
connection
Fig. 136: : connection between actuator and flexure
stage (1)
The simple idea to obtain the 2 DOFs nanoconverter is the fusion of the 2 systems presented earlier: in
particular a nanoconverter can be linked to each intermediate stage in the XY stage. In addition it is
possible to fuse the nanoconverter output stage with the parallelogram flexures that link each intermediate
stage to the ground (Fig. 138).
The result is shown in Fig. 139. The simplicity of the original nanoconverter was maintained, with the
possibility to manufacture it monolithically. This device maintains all the advantages of the original one,
such as the possibility to reduce the cost of the scanning operations, with an interesting improvement of
66 / 126
the performances. Moreover, the dimensioning of the whole device does not present any additional
difficulty.
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The most important problems in designing the grip device were related to the weight of the device itself
and to the alignment requirements of the specimen. The weight problem was solved manufacturing the
grip in plastic material. The required alignment was achieved through the design of the grip. To design the
mechanism reference was made to a Mr. Villas work [1], the one piece drafting compass. The main
difference is the manufacturing process: with regard to production numbers, the compasses are made with
injection moulding while the grip device is machined with a conventional machining process. The design of
the grip device wasnt a particular challenge. The cinematic scheme is simple: to study motion, every
flexure hinge is replaced by an ideal revolute joint. In agreement with Lobontiu [16] a pseudo-rigid-body
model with negligible spring stiffness was used. This approximation is due to selected flexure hinges:
symmetric circular flexure hinges with small dimensions were chosen to simplify the manufacturing. The
second reason of this approximation is the following: the hinges work in large displacements and being
made by plastic material the strength in the smallest thick exceeds the yield strength during the first
motion. Consequently the compliant mechanism was studied as a standard mechanism.
With regard to the material choice, the polyamide 6.6 was chosen because of its mechanical properties: it
has a good yield limit in comparison to Youngs module and its easy to machine. It is also promptly
available. Flexure hinges were obtained by standard drilling and milling operations. The device is operated
by a screw with bounded spring (Fig. 144 and Fig. 145).
After assembly, the device was tested and a peculiar phenomenon was detected: after gripping further
screw rotations induce a specimen raise as shown in Fig. 146.
120 / 126
It was supposed that this phenomenon was due to a not proper positioning of flexure hinges: Fig. 147
shows the forces acting on the hinges in gripping phase. It seems that a slight difference between the real
geometry of the flexure hinges and the schematized hinges as modelled can justify a different disposition of
the real forces with references to the modelled ones. Such difference, as shown in figure, may give reason
of the unexpected vertical resulting component. After gripping the specimen, the grip is in the position
shown in Fig. 147. The same figure evidences loads acting on link ABC, as derived from pseudo-rigid-body
model (the link A-D is a simple crank, so it is axially loaded). It is clear that the flexure hinge A is the
problematic point: the flexure hinge is almost orthogonal to the direction of the load that is it is loaded not
only in axial direction axially but it is also loaded by a shearing component.
A
C
A
C
D
A modified device was designed, as shown in Fig. 148. In this case special care was paid to hinges
disposition. This is an important conclusion: during the design of a compliant mechanism, hinges must be
located paying attention both to kinematics and to loads acting lines. This hypothesis will be verified after
manufacturing the modified grip device.
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A
C
A
C
D
The second one (Fig. 150) is composed of a seat designed to be monolithically moulded flat and a support
with one linkage with only 1 DOF able to set the high of the highchair in the first part of the displacement
and able to close the highchair in the second part.
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A
B
C
For sure these designs are not directly suitable for the industrialization but they can suggest that this
technology can be improved to be interesting for macro scale applications.
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Conclusions
The goal of this PhD thesis was to increase and to organize the knowledge in flexure field at the University
of Brescia. Both the synthesis process and the analysis process were faced and the results are reported in
this thesis.
Regarding the synthesis, the most important step was my experience with Mr. Simon Henein and the
researchers of the Systems Engineering Division of the CSEM. Their vision of the design process in
compliant mechanisms based on flexure articulations was entirely adopted. One of the consequences is
that it is not advisable to use the famous term flexure hinge: in fact hinge is associated to an ideal
revolute joint, with 1 DOF. It was shown that the so-called flexure hinges have usually more than 1 DOF.
The use of the term flexure articulations should create less confusion.
The analysis process is shown by means of the study of different applications. In general, the first step is the
evaluation of the behaviour of every blade in the device, considering separately each blade with proper
bonds and loads. In this way it is possible to perform a preliminary dimensioning of the device. The FEM
software has to be used in a subsequential phase, to verify the hypothesis introduced in the first
dimensioning and to evaluate the most complex load cases.
In agreement with the vision of the Mechanical Draw Group of the University of Brescia, where I did my
PhD, a practical approach was adopted: for this reason a lot of applications were presented, showing in
each case the exploited features of the mechanisms based on flexure articulations. When possible, the
devices have been manufactured and tests were performed in order to verify the used models in the
designing phase.
This thesis can also be read as a useful collection of different exempla of mechanisms based on flexure
articulations. Also the naiveties, due to the initial inexperience, are shown and discussed by the light of the
knowledge developed during the PhD: it can be instructive for the beginner, since it clarifies the advantages
of a correct approach to the mechanisms with flexure articulations.
This thesis shows the actual interest, the ample prospects in the compliant mechanism field and the
possibility to apply it in very different domains, from the MEMS (see chapter 7) to the meso devices (see
chapters 3, 4 and 5).
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Luca Dassa