MALAVIYA NATIONAL INSTITUTE OF TECHNOLOGY

A report on HEATING, VENTILATION

And AIR CONDITIONING
FOR
CLEAN SPACES

Submitted by
Prakhar Parashar
2010 UME 164
Batch M2
And
Pritam kumar Chandel
2010 UME 142
Batch M2

Submitted To
Prof. G.D. Agrawal
Mechanical Engineering Department

1. HVAC FOR CLEAN SPACES

Cleanrooms are specially constructed, environmentally controlled enclosed spaces where the
concentration of airborne particles (contaminants) is kept within specified limits. In industry, cleanrooms
are used in the manufacturing of electronic hardware such as integrated circuits (ICs) and hard drives. In
biotechnology and medicine, cleanrooms are used when it is necessary to ensure an environment free of
bacteria, viruses, or other pathogens.
Four fundamental rules apply to cleanrooms.
1) First, contaminants must not be introduced into the controlled environment from the outside.
2) Second, the apparatus or equipment within the controlled environment must not generate or otherwise
give rise to contaminants (for example as a result of friction, chemical reactions, or biological
processes).
3) Third, contaminants must not be allowed to accumulate in the controlled environment.
4) Fourth, existing contaminants must be eliminated to the greatest extent possible, and as rapidly as
possible.
These requirements are defined in Federal industry standard 209 and ISO 14644-1. The HVAC system for
cleanrooms is a specialized field requiring thorough understanding of cleanliness guidelines, airflow
streams, room pressurization, temperature, humidity and filtration requirements, knowledge of codes and
standards, specialty equipment, instrumentation and control, and many more details.
1. Airborne particles Characteristics
Airborne particles are solids suspended in the air. For our purposes, particles are defined as bodies with:
1) Definite physical boundaries in all directions.
2) Diameters ranging from 0.001 micron to 100 microns.
3) Liquid or solid phase material characteristics.
1.1 Sources of Contamination
The airborne contamination level of a cleanroom is largely dependent on the particle generating activities
in the room, besides the personnel who also contribute to the contamination levels. It has been found that
many of these contaminants are generated from five basic sources: (1) the facilities, (2) people, (3) tools,
(4) fluids and (5) the product being manufactured.
1) Facilities
Walls, floors and ceilings
Paint and coatings
Construction material (sheet rock, saw dust
etc.)
2) People

Air conditioning debris

Room air and vapors
Spills and leaks

Skin flakes and oil

Cosmetics and perfume

Spittle

Clothing debris (lint, fibers etc.)

Hair

3) Tool Generated
Friction and wear particles
Lubricants and emissions

Vibrations
Brooms, mops and dusters

4) Fluids
Particulates floating in air
Bacteria, organics and moisture
Floor finishes or coatings

Cleaning chemicals
Plasticizers (out-gasses)
Deionized water

5) Product generated
Silicon chips
Quartz flakes

Cleanroom debris
Aluminum particles

2. What is a Cleanroom?
A cleanroom is defined by ISO14644-1 as a room in which the concentration of airborne particles is
controlled, and which is constructed and used in a manner to minimize the introduction, generation, and
retention of particles inside the room and in which other relevant parameters, e.g. temperature, humidity,
and pressure, are controlled as necessary.
2.1 Cleanroom Classification
Cleanroom specifications for particulate matter (such as dust) are defined according to the maximum
allowable particle size (diameter), and also according to the maximum allowable number of particles per
unit volume. For non-particulate contaminants, the maximum allowable density in terms of microbes per
cubic meter, or molecules per cubic meter, is specified.Class number refers to the maximum number of
particles of 0.5 micron size or bigger that would be allowed in one cubic foot of cleanroom air.
A Class 100 cleanroom, for example, would not contain more than 100 particles bigger than 0.5 micron in
a cubic foot of air. A Class 10,000 - Particle count not exceeding a total of 10,000 particles per cubic foot
of a size 0.5 microns and larger or 70 particles per cubic foot of a size 5.0 microns and larger.
Classes and their Typical Uses
Class 1 & 10 - production laboratories for electronic integrated circuits.
Class 100 - production areas for photo labs, medical implants.
Class 10,000 - production locales for TV tubes, hospital operating theaters.

Class 100,000 - production of ball bearings

Maximum number of particles in Air (particle per cubic feet of air) [ Federal Std. 209]
Class

0.1 m

0.2 m

0.3 m

0.5 m

35

10

350

75

30

10

100

3500

750

300

100

5 m

1,000

1,000

10,000

10,000

70

100,000

100,000

700

Maximum Concentration Limits (particles/m of air) [ISO]

Class

0.1 m

0.2 m

0.3 m

0.5 m

ISO 1

10

ISO 2

100

ISO 3

1 m

5 m

24

10

1000

237

102

35

ISO 4

10000

2370

1020

352

83

ISO 5

100000

23700

10200

3520

832

29

ISO 6

1000000

237000

102000

35200

8320

293

ISO 7

352000

83200

2930

ISO 8

3520000

832000

29300

ISO 9

35200000

8320000

293000

2.2 ISO Classification of Cleanrooms

ISO 14644 classification for cleanrooms is based on the formula :

Cn = 10N (0.1 / D) 2.08

Where,
Cn = maximum permitted number of particles per cubic meter equal to or greater than the specified
particle size, rounded to whole number
N = is the ISO class number, which must be a multiple of 0.1 and be 9 or less D = is the particle size in
micrometers

An ISO 1 cleanroom has the lowest levels of contamination, while an ISO 9 has the highest allowable
level. To give a perspective, the ambient air outside in a typical urban environment might contain as many
as 35,000,000 particles per cubic meter, 0.5 um and larger in diameter, corresponding to an ISO class 9
cleanroom.
2.3 Cleanroom class comparison (ISO v/s Federal Std.
209)
ISO is based on metric measurements whereas Federal Standard 209 is based on imperial measurements.
The classes, according to ISO14644, are in terms of class levels 3, 4, 5of airborne particulate
cleanliness corresponding to 1, 10, 100..class Fed 209 standards. A Class 5 means that less than 3,520
particles (0.5 microns in size) are present per cubic meter, which equals 100 particles per cubic
foot.
Federal Std.
209*
1

ISO
ISO 3
ISO 4

10

ISO 5

100

ISO 6

1000

ISO 7

10,000

ISO 8

100,000

*In US, FED-STD-209E was used until November 2001 to define the requirements for cleanrooms. On
November 29, 2001, these standards were superseded by ISO specification 14644.

2.4 HVAC SYSTEM DESIGN FOR CLEAN FACILITY

What differentiates
systems?

cleanroom

HVAC

to

conventional

Typical office building air contains from 500,000 to 1,000,000 particles (0.5 microns or larger) per
cubic foot of air. A Class 100 cleanroom is designed to never allow more than 100 particles (0.5 microns
or larger) per cubic foot of air. Class 1000 and Class 10,000 cleanrooms are designed to limit
particles to 1000 and 10,000 respectively. A cleanroom differs from a normal comfort air conditioned
space, in the following ways.

1. Increased Air Supply: Whereas comfort air conditioning would require about 2-10 air changes/hr,
a typical cleanroom would typically require 20 - 60 air changes and could be as high as 600 for
absolute cleanliness. The large air supply is mainly provided to eliminate the settling of the
particulate and dilute contamination produced in the room to an acceptable concentration level.
2.

The use of high efficiency filters: The use of high efficiency particulate air (HEPA) filters
having filtration efficiency of 99.97% down to 0.3 microns is another distinguishing feature of
cleanrooms. The HEPA filters for stringent cleanrooms are normally located at the terminal end and in
most cases provide 100% ceiling coverage.
ULPA filters provide a minimum of 99.999% efficiency (0.001% maximum penetration) on 0.3 micron
particles for achieving ultra-cleanrooms, where contamination levels have to be controlled at levels
better than that which can be achieved with conventional HEPA filters.

3. Room pressurization: The cleanroom is positively pressurized (to 0.05 in-wc) with respect to the
adjacent areas. This is done by supplying more air and extracting less air from the room than is supplied to
it.
2.5 Know the basic principles behind how a cleanroom works
The majority of cleanrooms, easily more than 90%, are positive-pressure roomsdesigned to keep
contaminants from entering the room. Air is introduced into the cleanroom, typically at the ceiling level,
after passing through a fan-powered HEPA filter that removes particles as small as .5 microns. This creates
a pressurized room in which the air pressure in the room is greater than outside the roomhence, positive
pressure. The air, and the contaminants in the air, are then pushed down towards the floors, and ultimately
pushed out vents in the lower portions of the walls of the room. This means that air and contaminants from
the processes in the room are constantly flowing out of the room. In addition, the air exiting the room,
either through vents or when doors are opened, is at a pressure sufficient enough to prevent contaminants
from entering via those openings.
Negative-pressure rooms are designed to keep contaminants from leaving the room. A negative pressure
room is used in instances of infectious diseases and pathogens, bio-contaminants and some hazardous
processes using chemicals, flammables and potentially explosive liquids and powders.
In a negative pressure room, air is pulled out of the enclosure through reversed HEPA filters, creating a
negative pressure inside the room (which prevents contaminants from leaving the room), while air is
constantly being drawn in through venting and other openings. The force of the air entering the room
prevents contaminants from escaping.
2.6 Every cleanroom has three different states or conditions
Cleanrooms are measured for particulate count at three different levels: As Built, At Rest and Operational.
As Built refers to the cleanroom as it is when it is built, empty of any equipment, materials or workers.
Cleanrooms are typically certified by the manufacturer as to their level of cleanliness at the As Built level.
At Rest refers to the cleanroom once equipment, machinery, furniture and product have been moved in,
before the workers. All these elements bring with them sources of contamination, so you can expect a
change in particulate count. Finally, there is the Operational level. This refers to the cleanroom when all the
equipment and materials are moved in and there are workers in there performing tasks. Again, you are
likely to see a change in particulate count. Machinery that performs an excellent function outside of a
cleanroom can be a source of pollution inside a cleanroom. Metal shavings, gases and oil mist from
pneumatic machinery and vapors from outgassing plastics are all sources of contamination. Any process

that involves friction or movement is going to cause particulation. In order to prevent a drastic increase in
contamination at the operational level it is important to adhere to proper protocol and proceduresthings
like gowning, house cleaning and workflow. If your process must involve machinery, then it may be
necessary to further isolate that machine within the cleanroom in order to prevent it from contaminating the
rest of the operation. A common solution is to build a cleanroom within the cleanroom using either
partitions, or more commonly curtains, to isolate the machine. It may also be necessary to vent that area
separately from the rest of the room. This change in particulate count from As Built, At Rest and
Operational levels is another reason that you need to involve a cleanroom expert early on in the process.
2.7 Modularity
A cleanroom with a modular design allows the original layout to be expanded without having to rebuild
from scratch. Your need for clean manufacturing space will increase or expansion will dictate that you
move to larger facilities. Modularity in a cleanroom is important. With a modular design you can, with ease,
expand the size of your cleanroom as your needs increase, without having to toss out part or all of your
original cleanroom investment. And in the event you move to a new facility, you can disassemble your
modular cleanroom and take it with you. There are also cleanroom designs that incorporate casters so that
the enclosure can be easily moved around your factory floor. An example where this might be applicable is
an injection mold facility where the manufacturing area is ISO Class 9, but production has an order for an
I.V. component that requires an ISO Class 7 environment (an I.V. system has to be manufactured in at least
an ISO Class 7 cleanroom). You can create this environment on the factory floor by enclosing the injectionmold machine in a portable cleanroom outfitted with casters and a HEPA unit installed in the ceiling grid.
Simply roll the enclosure to the appropriate machine and attach softwall curtains to contain it.

3. AIRFLOW
Airflow is usually specified either as average air velocity within the room or as air changes per hour.
Supply air volume is also highest in Class 1, and decreases as the requirement for cleanliness decreases.
The primary objective is to maintain airflow in parallel flow streams that has two purposes: first, it
needs to dilute particle concentrations that may have formed in the room due to personnel or process
activity and second, to carry away particles or contaminants generated within the room. Higher air
velocity is advantageous in particle removal/settlement, but very energy inefficient.
Cleanroom Industry Design Thumb Rule

ISO Class

Fed 208

Controls

1
2
3
4
5
6
7

1
10
100
1,000
10,000

100,000

Stringent
Stringent
Stringent
Stringent
Stringent
Intermediate
Intermediate
Less
Stringent

Air Velocity
at table level
in FPM
70 - 130
70 - 130
70 - 130
70 - 110
70 - 90
25 - 40
10 - 15

Air Changes
Rate per
Hour
>750
>750
>750
500 - 600
150 - 400
60 - 100
25 - 40

3-5

10 - 15

3.1 Airflow based on Air change rate(ACR)

Air change rate is a measure of how quickly the air in an interior space is replaced by outside (or
conditioned) air. For example, if the amount of air that enters and exits in one hour equals the total
volume of the cleanroom, the space is said to undergo one air change per hour. Air flow rate is measured
in appropriate units such as cubic feet per minute (CFM) and is given by
Air flow rate = Air changes x Volume of space/60
Designing a flexible system with variable air flow can achieve the objectives of optimized airflow
rates,thus:
1) Reduced Capital Costs - Lower air change rates result in smaller fans, which reduce both the initial
investment and construction cost. A 20 percent decrease in ACR will enable close to a 50 percent
reduction in fan size.
2) Reduced Energy Consumption - The energy savings opportunities are comparable to the potential fan
size reductions. According to the fan affinity laws, the fan power is proportional to the cube of air
changes rates or airflow. A reduction in the air change rate by 30% results in a power reduction of
approximately 66%. A 50 percent reduction in flow will result in a reduction of power by
approximately a factor of eight or 87.5 percent.

3.2 Air Flow Pattern

Airflow pattern have evolved into three major types:
1) Unidirectional flow (also referred to as laminar flow)
2) Non-unidirectional flow (also referred to as turbulent flow)
3) Mixed flow, where air streamlines may be parallel in one part of the cleanroom and not
parallel in other parts.
Cleanroom
classs
Airflow
Type

10

100

Unidirectional Unidirectional Unidirectional

1000

10,000

100,000

NonNonNonUnidirectional Unidirectional Unidirectional

Mixed flow approach

The mixed-flow approach is used where critical and non -critical processes are in
the same clean space. Zones are created by adjusting the filter pattern in the ceiling; in
a stringent area, more filters are installed in the ceiling and in less cr itical areas, fewer
filters are installed.
3.3 AIR DISTRIBUTION STRATEGIES
Two common design strategies for air handling s ystem are:
(1) Single Pass System or Once Thru System:
F ilter ed air enters the r oom and is not r e- cir culated. All the air is exhaus ted
outdoors.

(2) Re-circulated System.

Filtered air enters the room, exits through plenum walls and is re-circulated
t h r o u g h a s e a l e d p l e n u m u s i n g m o t o r i z e d f a n m o d u l e s w i t h H E PA f i l t e r s .
There are two fundamental recirculation system configurations:

(a) C ent ral i z ed reci r cul at i on ai r -handl i n g uni t s (R AHs ) and

- Uses custom rooftop or package air handlers for makeup air supply.
(b) C eili ng di st ri but ed fan -fi lt er unit s (FFU).
- Uses terminal fan filter units using spider leg ducting for air supply.

A. Conventional Flow cleanrooms

Conditioned air in cleanrooms should be directed to obtain the cleanest airat the most critical work areas.
Thereafter, as the particles are entrained, they are led to the less critical areas. These criteria require
introduction of large quantities of air at low velocities.
Further all rooms should be maintained at positive pressure, i.e. at static pressure sufficiently above
atmospheric pressure- so as to prevent infiltration of contaminated outside air and permit only exfiltration.
Major design features of conventional flow cleanrooms are 20 air changes per hour, positive pressure, final
filters to be HEPA filters, installed only on discharged side of fan, and to be preferably terminally mounted,
people/particle generating activities near air exit, etc. The building materials used should not chip off or
flake. All surfaces should be flush finished. Surface finish is done by apoxy paint etc. Special lint free
garments and clothing are to be used

B. Laminar Flow Cleanrooms

Conventional flow

It was found that even after taking all the measures described above, cleanliness levels could not be
improved any further in conventional flow rooms. Major drawback is build-up of small sized particles. This
method also does not prevent from cross contamination from one work area to another.
There was a major breakthrough in this respect with application of laminar flow to clean rooms. It was
realized, that instead of providing multiple outlets , if the entire ceiling or one wall were to be made of
HEPA filters and used as a supply panel, and the entire flooring or opposite wall were to be made of return
air grills with pre-filters installed, then air distribution will be the most effective having following
advantages:
i) air flow in parallel stream lines,
ii) no cross-contamination of stream lines,
iii) predictable air path,
iv) independent of operation/activity/personnel,
v) HEPA filters give lowest contamination,
vi) No build up of particles,
vii) Isolating operations possible.
There are two versions of laminar flow:1. Down flow: herein air is supplied from ceiling and return is taken from floor, and
2. Cross flow: air is supplied from one wall and return is taken from the opposite wall.
3.4 DUCT SYSTEM DESIGN AND CONSTRUCTION w.r.t. clean spaces
1) Return air risers should be designed for velocities not exceeding 1800 fpm with
a minimum velocity of 1200 fpm at the highest point in order to carr y particulate matter
along with return air. However, the inlet velocity at the retu rn grille should be in the
range of 300 to 400 fpm gradually in creasing the same to 1200 to 1800 fpm.
2) Provision should be left in each return air riser for periodic cleaning. Toda y, duct
cleaning equipment is available for this purpose.
3) Whenever terminal filters are mounted in the false ceiling, proper sealed access door
should be provided to reach the dampers above each filter.
4) Return air grilles should be located low near the floor and made as long as possible to
increase the colle ction of dust particles over a larger area.
5) To cater for the proper supply air quantity, balancing dampers should be installed at
critical points. Opposed blade dampers should be provided above each HEPA filter in
order to properly balance the air dist ribution system.
3.5 INDOOR CONDITIONS

1. Temperature Recommendations
For cleanrooms, the temperature set point for comfort is usually 68F or less depending on the
required level of the personnel working in the process area. For recirculation units, a s
the majority of cooling load is attributed to the heat release from process equipment and
therefore in most cases, cooling load sensible heat ratio* exceeds 95%.
* Sensible heat ratio in % = Sensible heat x 100 / (Sensible heat + Latent
heat)
2. Relative Humidity recommendations
Ambient relative humidity levels between 45% and 50% RH would work with most
products and provide a comfortable working environment because:
1) If the RH is too low, Space relative humidity (RH) affects personnel pa rticulate shedding
(skin flakes), and when too high promotes the growth of toxic molds and other forms of biological
contaminants.
2) The corrosion of electronic circuits and semiconductors is more pronounced at higher
humidity levels.
3) High RH could be detrimental to hydroscopic powder materials mainly used in
pharmaceutical industries.
4) Low RH results in Electrostatic discharge(ESD) concern.
3.6 Conclusion
Building a cleanroom is a complex exercise carried out in order to assure the product
quality within the overall guidelines of good manufacturing practices (GMP) in the
industry. As alwa ys, owners nee d to remain committed to performing the due
diligence necessary to analyse multiple approaches for a cleanroom's design and construction.