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Surface Acoustic
Wave
Multistrip
1973
Components
MARSHALL,
CLELAND
O. NEWTON,
Invited
Pafier
AbstractThe
multistrip
coupler is a directional
coupler which
operates on freely propagating surface acoustic waves with broad
bandwidth and low loss. The applications of simple multistrip
couplers with straight strips are discussed together with descriptions and
properties of a f smily of multistrip
components that can perform particular operations. Stepped couplers can perform the function of collinear besmwidth
compression and a surface-wave magic T may
be constructed. Bent, U-shaped, and J-shaped structures are considered that may redirect or reflect acoustic beams, and results are
presented for a multistrip
unidirectional transducer. Complex acoustic circuits may be built up using these elements. A beam may be reflected and stepped to the side by one track width, and both directions of a delay line maybe used sequentially to double its capacity.
The spurious triple transit signal of a delay line is shown to be virtually eliminated at the expense of an extra 3-dB single transit loss.
tively
1. INTRODUCTION
HE
multistrip
array
T
of parallel
electric
acoustic
track
with
can
strained
means
the
[1],
performance
perform
other.
devices,
derived
offer
significant
that
of various
functions
acoustic
surface
from
power
strips
into
the
the simpler
primary
objective
Several
of
the
subdividing
in the
devices
and also
to the SAW
system
paper
to
present
their
basic
IV).
components
discussed
All
using
components
structure.
multistrip
structure
Thus
(Section
tracks
as though
The
theory
quate
for
coupler
There
means
a given
have
not,
of
derived
devoted
to
stepped
coupler
structures
multistrip
in which
various
into
acoustic
circuits;
that
reported
with
sound
reasons
the number
these
is not excessive;
bandwidth
and this
were
for this
value
stopband
of NT is obtained
for designing
V)
MSCS
that
are in
circuits.
to be described
of the
coupler.
The
complete
the
energy
when
as gaps between
closely
propagate
in the practical
microwave
determining
for
follow
number
transfer.
the strips
them.
In this
on Y-cut
of
The
are approxi-
case a practical
Z-propagating
LINbO$
is
195 f/fo
NT =
(1)
1 Cos(153 f/fo)
where f is the working
and the cosine
of thumb
quarters
bandwidth
effects
is in degrees.
of the
is near
working
number
this
by the
of finger
stopband
and
we refer
j is the synchronous
in wavelengths.
Coupler
as N/~0, where
N is the number
of separate
had coupler
strips
All
approximately
reflection
are negligible.
n/f/1,
is the aperture
transducer
where
n is the
frequency,
parameters
strips
and 1
are given
in the design
multistrip
equal
rule
the coupler
strip
to interdigital
notation
frequency.
frequency,
a useful
where
coupler
of the stopband
paper
that
at approximately
frequency
shorthand
pairs,
We find
frequency
120 percent
Throughout
fo is the stopband
frequency,
angle
is to set the
components
to the
gaps between
II.
APPLICATIONS
OF THE SIMPLE
MSC
are
paral-
Full-Transfer-Length
Cou@er
Here we consider
the application
of
correct number of strips to give 100-percent
choice:
1)
from
required
to
transfer-length
couplers.
1) Bulk
Wave Sufi@ession:
2) multistrip
com-
can be most
effec-
one
track
to surface-wave
increases
Manuscript
The authors
Worcestershire,
of
material
them.
obtained
propagating
of strips
purpose
will
factor
is
only
wavelengths
and thus
(Section
presented
required
y as wide
parameters
presented
the
arise
are several
function
a broad
II),
and angled
substrates
ponents
sections
the
of the MSC
the
[6])
of
Z axis
being
100
be below
strips
minimum
of familiar
the
an isotropic
distances
subsystems
frequency
to
in
is an important
analogs
operating
simple
mate
Thk
anisotropy
diffraction
approximately
appreciable
of acoustic
is arranged
by
by a SO-Q transducer
guided.
man y respects
along
of that
beams
over
construction
A.
K2 is high,
perform
be
categories
(Section
observations
LiNb03
to
compo-
V.
experimental
which
we have
III),
combined
in Section
into
structure
Applications
are
F-cut
components
an
multistrip
simple
(Section
(as generated
defined
3) the
MSC
improvements
of this
multistrip
coupler
wide
quarter
acoustic
has led
appraisal
of this new class of components,
multistrip
nents, and to indicate
their practical
applications.
the
Free
material;
propagating
broadening
one
[5].
three
is the
from
approximately
Kz
sound
collimated,
con-
designer.
It
effectively
that
G. S. PAIGE
which
are not
from
on a high
is such
formula
transfer
flexibility
available
one
Because
tracks
wave
an
on a piezo-
This
acoustic
not previously
simply
power
of metallic
to each
of novel
in
deposited
acoustic
to 100-percent
by
to a family
is
be incorporated,
to be parallel
described
Up
little
which
strips
can transfer
to another.
is transferred
bends
(MSC),
metallic
substrate,
can be achieved
energy
coupler
exploited
LiNbO?
EDWARD
AND
to
another.
energy
as the number
one penalty
of increasing
by reducing
the number
wave signals
become
They
The
radiated
are
couplers
transfer
referred
proportion
to
is reduced
[7].
of an SAW
delay
of finger
is that
pairs
The inclusion
wave
transducer
the bandwidth
significant.
pairs
as full-
of bulk
by an interdigital
of finger
with
the
of energy
Thus
line
spurious
bulk
of a simple
full-
NARSHALL
et
MtJLTISTRIp
al.:
217
COMPONENTS
m..
IJi!
absorber
(a)
+
.-+.
. . . . . . .-
. . . . . . . ----.. . .
Fig. 3.
(b)
transducer
and
is received
directly).
on
The
output
the
weighted
implications
1. (a) Output
of delay line using single finger pair transducers,
showing a surface-wave
signal superimposed
on a background
due to
bulk acoustic waves. (b) Output
signal of delay line incorporating
a
full-transfer-length
MSC.
tages
can be gained
mally
suffered
may
be reduced
transducer
are that
with
coupler,
since
leaving
as though
1) weighted
the
by so doing
by signals
weighted
aperture.
to constant
and
2) advan-
diffraction
the narrow
if the coupler
is sited
fed
transducers
losses nor-
aperture
regions
transducer.
B.
,~
P ,,~
A coupler
output
bond
input
msc~
Half-Transfer-Length
~M
transfer
splits
tensity,
the
advance
over
the
bulk
wave
MSC
wave
line
l(a)
the
of
width
20 pm
finger
wave
by
the
path.
delay
length
bate,
strates
the
An
l(b)
line
reduces
the
surface-
from
pair
a delay
transducers
of
unacceptably
shows
the
has
been
both
lWSC
size in this
to
substrates
way.
was
This
long
dissimilar
lithium
nioIn-
up sub-
could
be used
described
lines.
materials
in
The
is
ducer
being
raised
of different
A
By
introducing
impedance
shown
to
If
using
working
transducer
width,
in
example,
be obtained
a different
the
if
the
a fraction
of
This
aperture,
to the launching
situation
(finger
of an aperture
and
in reverse
passes through
may
(the
beam
the full-length
dealing
in
can be
the original
this is readily
from
coupler
difference,
it is found
that
the
a 90
track.
removed
from
tracks,
as
depenclent.
of
+0.5
of 25 percent
dB
can
for a working
frequency,
coupler
This
and as
between
an imbalance
in-
phase
action
is frequency
over a bandwidth
A modification
bandwidth
is discussed
in
VI.
Tqansfer-Length
1) Precision
triple
Attenuator:
transit
acoustic
waves.
is/3 dB,
then
may
added
obvious
An
If the increase
attraction
suffered
coupled
bulk
of increasing
SAW
will
transit
acoustic
from
of strips
loss (STL)
be 2P dB.
attenuator
by an MSC
delay
by the propagating
in the single
as a precision
of the number
means
of a simple
in the TTS
of rejecting
of a signal
effective
(TTS)
the attenuation
be used
as a function
Cou@er
suppression
the increase
simply
An MSC
that
waves.
one track
N is given
has the
by
= -sin[%si:;)l
tions
low,
from
by
the standard
unchanged
the coupler
Line
4(a).
reflects
energy
most
to receive.
The
length
multistrip
removed
defect
strongly
Also,
at frequencies
the simple
of this
This
each
shown
will
be-
has been
in Fig.
this
which
a fraction
The effect
4(b)
delay
is that
pattern
line
each tap
it is de-
retransmit
a complex
to overcome
tapped
structure
at the frequency
device
caused by reflec-
frequency.
if the application
is to introduce
MSCS
are negligible
Consider
together
received
transducers
signals
devices.
Tap:
A severe
be connected
nals.
itself
are as defined
spurious
of the stopband
in practical
2) Delay
power
in [1] that
say, 90 percent
confirmed
2)
It is calculated
signed
as shown
be rendered
at frequencies
increasing
of Fig.
structures.
transducer
full
aperture
while
maintaining
diffraction
effects are ignored,
the structure
when
conpler
weighted
have
a trans-
transducer.
weighted)
a full-transfer-length
energy,
will
by
arises
length
having
balance
aimed
Section
track
energy
of equal
in the original
frequency
at
outputs
of the coupler
amplitude
phase
for complete
two
the
in
[1],
only
length.
can be intercepted
important
weighted
3, the output
converted
weighting.
from
loss and
particularly
aperture
discussed
in the transfer
launched
diffraction
As
are of unequal
is transferred
with
Fig.
Transformation:
of the coupler
the energy
though,
For
where O= mxf/~0
3) Aperture
changed
the
only
question
discussion.
tracks
from
ation
to build
technique
delay
surface
indistinguishable
device,
remaining
of frequency
The
line is to increase
substrate,
be achieved.
be possible
track-changer
to build
couple
were
could
composite
and it would
between
used
coupled
is a basic property
C. Fractionalinto
full-transfer-
to an adjacent
transfer
of the
crystal
into
large
improvement
140/86
Seg5a~ate Substrates:
2. When
paragraphs,
coupling
20 ~m.
one substrate
reflecting
following
finger
Fig.
100-percent
of any
with
gap
coupler
behavior
a single
single
at 43 MHz
a full-transfer-length
from
in Fig.
the
from
of
and
Between
virtually
deed,
unaffected.
signal
delay
leaving
the
waves
as shown
bandwidth
is evident.
multistrip
acoustic
while
output
inserting
Coupling
2)
niobate
a pair
signal
obtained
of
and
shows
consisting
bulk
a lithium
15 to 20 dB
by
transmission
Fig.
into
signal
the signal
stopband.
distinct
required
signal
in the
such is independent
the
transfer-length
signal
CouPlev
the length
an input
phase advance
(3-dB)
of half
to
of the
of a line of such
of spurious
sig-
uses fractional-transfer-
problem.
Reflection
from
the
218
lEEE
TRANSACTIONS
ON MICROWAVE
THEORY
AND
TECHNIQUES,
1973
APIUL
fractional
absorber
transfer
msc
---/l...ha......~11.a
(b)
b = z
a )
bs = ~
(a, + a,)
bl = >
(al
matrix,
3
delay line. (b) Use of fractionalcouplers to isolate taps.
as the magic
which
the
exactly
as the
by
the
transducer
and most
small
4, for
to perform
example,
of the energy
fraction
line cannot
they
are directional)
transducer
to be described
III,
with
of magic
by
that
be disposed
the
taps (because
in Section
into
of at the
construction
that
the signal
a 90 phase
track.
stressed,
frequency
transferred
advance
Without
modified
track
may
in
the
structure
these
the signal
this
arbitrary
to the other.
be displaced
those
over
to produce
relative
by it from
violating
along
adjacent
one track
the
For example,
of the MSC
phase
where
R = a.Jai,
the design
relative
are as defined
The
SAW
to
a stepped
from
structures.
Magic
positioned
two
Ports
signals,
length
is half
a magic
In this
into
a transfer
T, familiar
structure,
two of equal
phase
with
referring
length,
then
the structure
as a microwave
a signal
magnitude
each other.
injected
which
Numbering
to a and b as input
component
the ports
and output
we have
as
[8].
at one port
are either
and the
behaves
will
be split
1 and
transducers
directed
wave
(a, +
a,)
entering
port
between
1 (excluding
sinz 0/2)/0,
and
was
(5)
O= raj/jo.
and other
f!
is
symbols
experimentally
in Fig.
and
5. 3/61/90
at A
number
strips
equal
and
1?. The
strips
strips
at their
a signal
amplitude.
coupler
in each
in the coupler
midpoint
input
verified
transducers
between
of active
split
with
a laser
at one port
52 strips
were
into
found
and
then
driven
the output
a calibration
and
signal
B positioned
at port
ports
equal
received
this calibration
inverted
to be
on either
the
1 and 2. The
2 was then
amplitude
3 was found
to receive
transducers
25 dB below
with
at port
of two
backwards-
signal
signal.
on port
The
phase
at
reversed.
q of Fig.
6 shows,
as a function
of frequency,
the
5 and
2 were
from
as in Fig.
respectively,
The
of exactly
than
antiphase,
q within
curves
device
was obtained
experimental
in the
gave
b, = A
42
that
of the device,
port
by breaking
3 dB larger
in phase or anti-
vectors,
in
of power
Rsin2~sinkx
shown
at each
in phase,
Curve
to ~ wavelength
be
the ratio
performance
the coupler
signals
may
discussed
by
was at 86 MHz
until
frequency
of the coupler
[I].
was 14 pm.
burner
T
is equal
in
is
in performance
that
+Rz
the arrangement
of the signal
3 and
frequency
expected
the output
.4.
design
for
coupler
to be necessary.
in one
emerge
the
theory
~ = (NFK2
center
the
The degradation
be shown
R7
at the frequency
at which
be
in one track
producing
properties
may
shifts
direction
thereby
has
in the original
coupler
the strips
the propagation
simple
is given
track
to another
remaining
condition
additional
track,
port
loss)
sinz~.(1
and
from
leaving
was adjusted
feature
varies
the simple
the signal
stopband
FROM STEPPED
it is an intrinsic
as indicated
h/4
long.
transducer
using
COUPLER STRUCTURES
As previously
length
]. It may
were
DERIVED
work
trans-
V-B.
COMPONENTS
only
is exactly
B,
by A. The
is coupled
offset
by using
Pa
=
PI
T.
absorber
by 4 is absorbed
energy
be received
and
function
is removed
reflected
of the reflected
delay
mitter
stepped
will
~ transfer
found
(4)
[8].
The device
MSC
011
0 011
1 100
lloo
----
ME
Fig. 5.
(3)
aJ.
......
.. ..
Fig. 4.
In
error)
ports
expected
measured
bandwidth,
the curve
for
intensity
but
the difference
4 (identical
r for port
3 and 4 as inputs
port
gain
the
for port
and curve
carrying
sum
of 3 dB + ~ dB
frequency
signal
(not
the
varied
of the
between
plotted
signal
across
peak
to
3. The
the
loss in
60 and
70
MARSHALL
d d:
MULTISTKIP
COMPONENTS
219
50r
--
I!
----9dB
--8dB
rq,s
.5 ~
80
frequency, MHz
Fig. 7.
MHz.
This
can be accounted
efficiencies
Fig.
of the different
6 was obtained
using
the
required
transducers
phase
(curves
dictates
a difference
@ and
the
signal
the bandwidth
Fig. 8.
cal problems
shift
previously
being
by
of more
-.
is 12+ percent.
achieved
by
could
have
by the struc-
coupler
is that
it
functions
is exploited
in the
beamwidth
com-
of (3) that
a uniform
wave-
this
over
a displaced
mum
of 9 dB.
inspection
(al = aJ incident
coupler
beam
will
these
achieved
produce
width
for
modest
large
on a normally
demanded
ducers
or SAW
Besides
beamwidth
The
does
by other
about
not
of the stepped
half
its width;
by a factor
power
of 2. By
densities
voltage
inputs,
This
approach
require
the
approaches
the
as an intensifier,
in fact,
a feature
of
to acoustic
sophistication
such as curved
it should
can, of course,
plays
performance
in
trans-
the role
be noted
expand
of an acoustic
of a three-stage
beamwidth
that
the
the width
10 ~m),
the input
narrowest
[10]
aperture
and compared
the input
was
with
transducer,
of 8% dB was measured,
at 108 MHz.
observed
with
compressor
only
in the figure.
* dB below
in
of
had
of the
a potential
probe
beam
An intensity
the theoretical
from
gain
maxi-
indicated
that
8 dB over a bandwidth
COMPONENTS
the inten-
of 35 percent
DERIVED
FROM ANGLED
An
bent
obvious
coupler
coupling
derivative
shown
then
are
paragraphs.
problem
different
the
same
materials,
is trivial
three
as discussed
B.
that
and
output
allowance
as considered
in the
the
between
on Z-cut
separated
by
be used to construct
Surface-Wave
increasing
to 180 so that
Fig. 9, another
and
two
LiNb03
120
a long
[9].
delay
experimentally.
Multk&@
By
input
be exploited
directions
is the
velocity
could
might
the
wires
If the properties
such
structure
provided
connecting
directions
investigated
in
Equivalent
has
multistrip
8. If the surface-wave
the design
following
of the
in Fig.
coefficient
directions,
is made
Element
The output
the backwards-traveling
as shown
measurements
than
Beam-Redirection
which
transformer.
and a stopband
compressor
A.
of a
-.
COUPLER STRUCTURES
cas-
can be
lenses.
acting
. .
86 MHz.
design
compressor
and,
devices.
width
over
acoustic
interdigital
SAW
intensification
design
an output
compression
structures
in nonlinear
power
beam
only
undergoes
cading
value
Other
IV.
from
pressor.
It is obvious
L3
technologi-
of the stepped
arrangement
Fig. 9.
We
-----
-----
of
overlays.
significant
.-
coupler,
displacement
thin-film
it introduces
beam;
described
introducing
because
advantage
propagating
front
-------.
----Ilu
useful
-+~z
introducing
or
the latter
transducer
in
FK2 = 0.043.
signals
criterion
If we take
performance
without
the
The
in the
curve
Compressor
been achieved
ture.
This
as acceptable,
The magic-T
discard
dashed
the difference
of the device.
Bearnwidth
differences
The
is reasonable.
be low.
25 dB down
by small
(5) with
operation
6) should
for
transducers.
the
the
Rejlector
angle
coupler
multistrip
between
becomes
component
the arms
U shaped,
is formed,
of the coupler
as shown
a broad-band
in
lEEETRANSACLIONS
220
reflector
[2],
which
of loss. The
a signal
leave
input
the
reenter
of strips
at port
coupler
the
into
as a reflector.
into
3 and
ports.
The
introduces
4 in phase
power
working
Considerations:
circular
strips
of the
chosen
acts
portion
(a)
together
the straight
reflector
that
because
require
these
no increase
properties
that
introduce
reflector:
tance;
1) they
2) they
number
consider
which
radiate
these
affect
acoustic
of strips
in turn
for
a standard
gap between
sec. V]
ports
indicate
no more
loss for
than
a few tenths
estimate
probing
surface
waves
The
is more
number
is increased
for
the
necessary
parts
wires
of the strips.
a simple
half-transfer-length
the analysis
presented
that
the number
of strips
required
to
from
coupler
always
The
is N~/2,
(6)
d is the strip
port,
Techniques
1 is the active
of the smallest
for
example,
repeat
modifying
strips
(stopband
at
8 pm
107
MHz)
was no central
signals
coupler
pair
In
there
100 MHz,
7 MHz
is 2 dB
and
the
of 4 mm.
surface-
were first
An
passed
gener-
through
untuned
2* finger
smaller
than
transducer
this
transducer
are given
visible
from
pulse
in Fig.
distortion
the stopband),
limited
frequency
curve
only
at fre10(a).
At
(even
In
perfectly
duction
Unidirectional
principle,
a unidirectional
matched
into
loss and
zero
reflections.
The
(UDT)
to give
TTS
may
zero
of a delay
be
line
insertion
finger
is offset,
setting
required
the
midpoint
the desired
at ports
The
same
design
traversed
the
transducer
curved
portions
for this
an even
number
central
# wavelength
gap
by
of
off-
away
port.
except
into
port.
in phase
of the
will
will
output
differ
is achieved
apply
that
be reduced
the
because
wave.
U means
be increased
in determining
to the
UDT
as to
of the
the
line
desired
with
an odd
to the center
3 and 4 then
considerations
generation
band-
with
quadrature
reflector
struc-
broad
phase
output
thus
these
of a U so that
relative
towards
arriving
of an
[2],
been produced.
the
the
However,
that
the
length
of the
must
of strips.
The
be
num-
from
in Fig.
for
11. A total
this
within
delay
65/86
is large
increased
U-shaped
with
levels
UDT
TTS
aperture.
designs
synchronous
at frequencies
transit
signal.
by decreasing
were
enclosed
[12],
[13],
the
reaches
un-
within
the 3-dB
bandwidth
a 4% finger
pair
of finger
previously
required
burner
but
the number
transducer
is then
a load
multistrip
used
may
UDT
to adjust
be
of only
by reducing
passband
of course
[2] that
TTS
simply
was
[6],
frequency
still
The
to give maximum
A laser
3 dB was observed
transducers
couplers.)
other
at the
(6).
loss of only
(7+/61/108
constructed
mum
minimum
line.
In common
(1) and
is
insertion
the number
and
structure
of the single
trans-
loss,
have
4~/107/108
load
3-dB
having
by 90.
ducer,
transducer
an electrical
lines
fingers,
acceptable
Transducer
Using
signals
ance required
C. Muliistrip
unidirectional.
U, by + wavelength
Fig.
response.
a transducer
TTS
be used
signals
signal
a transducer
over
stopband
output
the arms
pulse.
by the coupler
a single
may
output
UDT,
is flat
shows
described
directed
within
TTS
10(b)
into
of the
at
a bandwidth
previously
of the
two
to
must
is made to match
is placed
the input
frequency
60 percent,
from
if any attempt
oppositely
of the central
made
which
load.
center
only
be superior
of fingers
acoustic
intervals
3 and 4. The
and then
waves.
100 MHz
is little
of at least
bulk
16-pm
therefore
transducers
construction
number
for
with
two
and low
the U-shaped
reflector
aperture
ports
by the structure
of the output
each frequency
that
an active
transducer
at
by,
VI.
such
delay
from
situated
close to port 1 served to probe the
approached
and were reflected
from the struc-
Photographs
pulse
and
repeated
of
semicircle.
in Section
a multistrip
gap between
to exclude
pair transducer
signals as they
quencies
wide
to be reflected
ated by a 2* finger
ture.
here for
aperture
performance
are considered
are presented
60 U-shaped
simple
the reflection
SiOa underlays
Results
There
distance,
should
3-port
coupler
transducer
The
where
U-shaped
interdigital
tures,
is
an electrical
the
widths,
by
the input
into
of strips
reflector
of UDTS
interdigital
to combine
by a U-shaped
simple
them
making
a capacitive
coupler
in [1, sec. V]
a pair
one using
reflected
If the number
(a)
incorporating
loss to
a 3-dB
form
MHz
10.
the
will
but
the total
on the main
120
of [1,
resistance
to form
connecting
then
given
13 dB down
of strips
because
on the active
required
than
and
results
power,
that
Fig.
100
frequency.
We
of acoustic
increase
to the reflection
No attempt
potential
signal.
of a decibel
Al strips.
L;o;o
on LiNb02
The
gz=--L-J-
resis-
aperture
zero.
i-
(b)
of the
coupler.
U structure
5000-~-thick
connec-
3) they
a 3-dB
acoustic
3 and 4 effectively
that
of the
The
electrical
and
to form
has a 100-wavelengths-wide
shortest
the functioning
power;
necessary
regions
the
the structure.
60 MHZ
semi-
in the resolution
tions
have several
active
offer
used to fabricate
wave
80 MHz
is
as a full-
to use nested
photolithography
load
the
thus
bandwidth
We have
to connect
multistrip
connections
add
and
coupler.
Design
the
device
IOOMHZ
These
recombines
same large
2 dB
quadrature
1. The
APRIL 1973
so that
signals.
then
at port
only
is chosen
two equal
coupler
output
If acoustic
it has the
length
split
at ports
a single
form
in the structure
1 will
opposite
two signals
ignored,
in its current
number
ON MICROWAVE
50 Q; a
15 Q. We have
that
had a maxi-
the transducer
the
number
of
MARSHALL
d al.: MULTISMUP
COMPONENE3
----------
frequency, MHz
60
70
55
------ ----------
80
+fL+
----.-----
10m-
cfB
Fig. 13.
to the 61-MHz
unidirectional
(Fig.
11) except
one U-shaped
The TTS
332
tical
40Fig. 11.
----------
it
could
band
that
pair
previously
coupler
perhaps
be improved
bidirectional
within
further
transducer
into
described
was absent.
by
the passband:
feeding
a UDT
a narrow-
of broader
band-
width.
fre~ency,
1n a practical
F&k
is necessary
to avoid
that
D.
delay
line
to dispose
reflections
from
are needed
development
can be formed
U into
transducers
wave
if UDTS
it
in order
We find
are used.
Structures
As a further
structure
bidirectional
no such precautions
J-Shaped
using
of the backwards-going
an adjacent
directional
of angled
into
acoustic
transducer
and, in particular,
couplers,
the U-shaped
a J by extending
track.
In conjunction
the J forms
an efficient
one arm
a unidirectional
tap.
Without
of the
with
a bi-
transducer
the transducer
it
acts as a reflector.
Fig. 12.
finger
pairs
and to progressively
transducers
and U-shaped
previously
described.
lengths),
width
a 35-dB
for a 4+-dB
Smith
et al.
have confirmed,
a finger
calculated,
MHz
delay
pairs
load
line
resistance
transducer
of only
fied
reflection
to have
There
the
only
finite
the
of finger
finger
pairs
tuning
coil
with
of
generated
number
of
the
the transducer
the
pairs
waves
to
minimize
the
of+ wavelength
They
have
delay
stray
increases
to
acoustic
capacitance
if there
its
Second,
negligible
line tap.
are only
transfer
interaction
The
subsystems
the
compared
of the
various
to construct
strate
power
of the
of the number
and matched,
absorb
traveling
then
a predeter-
along
loss and
the line.
negligible
taps.
SUBSYSTEMS
in this
components
acoustic
survey
devices.
be used as an efficient
minimum
to be considered
simple
some
a fraction
may
MULTISTRIP
multistrip
band-
structures
U-shaped
are tuned
have
between
~.
an exhaustive
a few finger
would
an
UDT,
by the intrinsic
completely
of the acoustic
line
acts
that
investigated.
only
If the transducers
fraction
a delay
only
with
for full
acoustic
as the
for few
between
when
required
advantage
as in the U-shaped
been experimentally
transducer
of the J to
3, the structure
the equivalent
Such
is reduced.
increases
not
than
incident
as a reflector.
of the aforementioned
First,
fingers
comparable
larger
A J-shaped
of strips
Both
is
each
has sufficient
in the hook
marginal
is limited
of the coupler.
leaving
of the
acts
port
is not required
effect.
transducer
has the
so the bandwidth
all
structure
from
modi-
for this
surface
device
then
centrally
outputs
3 of the coupler
signal
If the coupler
1; the
is placed
the opposing
the
transfer,
at port
This
half.
energy
if a transducer
13. Port
halves,
the other
complete
are considerably
A resistance
was further
becoming
is no longer
capacitance
reemerges
in Fig.
opposing
reenter
power
width
4*
and
is shown
two
for
and
61-
to
burner,
frequency.
transducer
acoustic
Third,
must
mined
by an interdigital
earth
half
offset
an aperture
converted
required
the device
of finger
pairs decreases,
[7].
and
bulk
workers
used in the
a laser
explanations
as the number
into
strips
receive
pairs.
three
resistance
proportion
waves
2+ finger
with
was
with
then
when
split
Also,
band-
to that
at the resonant
are at least
significance
pairs
described
4 fingers
20 Q was required
line
(81 wave-
numerous
on LiNbOs
finger
of 33 Q was
delay
a 10-percent
and
identical
previously
by breaking
of the
structure
now
as a UDT.
a transducer
and many
The
width
of 4.7 mm
over
have
ance of 50 Q. A transducer
finger
width
was obtained
STL.
that
the active
of the 61-MHz
minimum
[6]
of 108 wavelengths
couplers
At
TTS
reduce
transducer
circuits.
of possible
advantageous
section
make
previously
They
do not
combinations
features
use
described
represent
but
which
demon-
can
be ob-
tioned
reversing
effects
Whereas
is dominant
strip
UDT
that
for a bidirectional
of achieving
bine
shows
the reflection
increases
with
with
a tuned
frequency
transducer
a uniform
a bidirectional
from
TTS
and
matched
deviation
from
decreases.
Thus
a unidirectional
of such a delay
transducer.
line
which
multi-
resonance,
its propagation
meander-type
delay
line
delay
direction.
line.
This
We also show
can be doubled
using
forms
the basis of a
multistrip
of a
components.
a method
is to comFig.
12
was iden-
A.
Rejleclivzg
The
Track
reflecting
in the following
Changer
track
changer
paragraphs
both
and
employ
described
the configuration
of
IEEEIXANSACTIONS
ON MICROWAVET HEORYANDT
frequency,
ECHNIQUES,APRIL
1973
MHz
~
smg[e
10
transd
LJ
..
Fig. 14.
20
loss
. .
Input
dummy
-+
. .
dB
50 -
absorber -
30
Lo
30 -
20
Lo
50
:
,0.!
10-
Fig.
tions
6.
.5~
from
The
MHZ
with
components
coupler
of this
port
imposed
on it,
reflected
energy
are U-shaped
introduced
with
port
2. By repeated
to produce
collinear,
crystal
maximum
cut,
ther,
The
ratio
track
between
changer.
the input
The
55/107
simple
60/107
U-shaped
band
in Section
(Section
diffraction
of propagation
Curve
signal
coupler
here
a of Fig.
and
Apart
two
were
in adjacent
from
2 and
tracks
the
4 mm
wide.
to those
region
3 dB over
signal.
of the
destop-
a bandwidth
Complete
transfer
frequency
for which
length
long.
At
other
power
will
return
to
that
of the
was
output
from
sistor.
60/86
central
at the
the
the
triple
expense
of
and
couplers
56/86
respectively.
over
coupler
could
if the value
The
from
than
results
properties
used
signals
over
were observed
smaller
are fully
than
consistent
of individual
with
couplers
transit
number
and
variation
that
in
was ad-
were caused
coupler,
but
transit
the previously
and
of
a similar
resistor
the single
reand
to the single
The
load
the
Us
the triple
a 10-percent
40 dB
the
critical,
of the dummy
and
variable
for
bandwidth.
not
4+/61/54
coil
40 dB relative
was
be obtained
spurious
by reflections
than
a 25-percent
performance
were
It is seen that
by more
this
more
Each
a small
central
Small
line incorporat-
UDTS.
signal
number
U-shaped
these
signal.
meareflec-
tors.
Since the reflection
deviation
from
centered
over
by reflec-
is removed
to port
Thus
to
transducer
previously
caused
rise
series
device
signals
energy
absorber.
give
to a
as the
Y are therefore
an identical
coupler,
in the
were
and
acoustic
normally
in Fig.
is suppressed
j usted.
the reflected
line
at X
characteristics
with
is a very
spurious
delay
given
ducers
Other
would
1 of the
are placed
3 dB in the STL.
delay
Y and X is connected
from
a suitable
tuned
sured
frequencies
it encounters
signal
from
diverts
transducer
in
excess of 50 percent.
and
also be used to
to feed port
transducers
reflections
and three
strips
the decibel
The
The results
on
15 gives
at
was con-
coupler
a surface-wave
signal
a single
is taken
having
signal
transit
made
identical
Fur-
for
14 may
from
A is positioned
an extra
significantly
the track-changed
spanned
reflectors
IV-B.
were
circuit.
transit
of a favorable
loss of YZ LiNbOB.
direction
output
reflected
can be
changer
measured
in Fig.
signal
of identical
output
load
changers
2 dB
shown
transit
a pair
~ummy
are
on a sub-
circuit
triple
Y. The
2 where
30 dB down
Trap
and
at port
than
input-transducer
identical
bandwidth,
track
be taken
2.
These
and
of the
X and
IV-B).
incident
reported
The
scribed
the elements
can be anticipated
to be
or spiral guided structures.
observations
reflecting
whole
at port
a wide
advantage
channels,
crosstalk
lower than in helical
the
signal
previously
of the signal
delay
The
coupler,
of producing
an acoustic
a long
at port
The
more
[4].
Y reflect
emerges
[3],
reflectors
and reflection
changer
the objective
efficiency,
through
track
that
line
X and
advance
recombines
beam
at
insertion
0.5 dB
acoustic
the
incident
to the coupler.
the 90 phase
coupler
multistrip
signals.
Y both
were
versus frequency.
100 MHz.
the
The Echo
remove
of a3-dB
X and
A signal
back
a single
In the reflecting
elements
two equal
energy
the
into
14. It consists
the coupler.
into
3 maintains
and
in Fig.
reflecting
from
by the coupler
some fraction
high
shown
coupler
and TTS
respectively.
The
multistrip
below
reflector,
B.
the simple
measured
sistent
triple
transtt
suppression
Echo-trap
frequencies
I,eqenc,
output
dB
++
the
band
from
center
severe
test
described
25-percent
a UDT
increases
increases,
as the frequency
trans-
of the
echo-trap
principle.
The
was just
capable
of a 40-dB
TTS
transducer
bandwidth.
The
reflection
MARSHALL
MULTISTRIP
et d.:
223
COMPONENTS
stances
II El
absorber
---------
!3
delay
M
------
device.
path
from
17.
Use of MSCtodouble
D is multistrip
a simple
as the
TTS
bidirectional
frequency
greater
limited
only
C. Double
the capacity
reflector.
interdigital
deviation
than
from
Length
coupler
Delay
It is possible
by using
a delay
Fig.
Half
transducer
could
line
in fact
of the power
delay
delayed
is received
applies
diverted
by
delayed
at the output
double
have negligible
significant
trap
line
The
that
(Fig.
Y and
the
served
as an efficient
was
UDT
of 4} finger
from
The
pairs
decoupling
could
the
studied
in
UDT
the
adjacent
and
had
6+ finger
so
experi-
STL
14 dB over
than
had
a 16-percent
30 dB
and
the
the
delayed
had
traversed
that
35 dB below
originated
the delay
simultaneously
Anticipated
that
times
Reflections
were
the delayed
Overlayers
one
property
of
1) Increased
derive
that
concentrated
demonstrating
from
to the basic
it. There
structure
we discuss
on
under-
and exploiting
are improvements
that
should
improve
have
of
Ejiciency:
the
An
coupler
As
and
discussed
in
certain
in
[1],
Kz
circum-
The
a metal
surface.
added
by
advantage
the
capacity
(though
this
selective
of multistrip
may
to inactive
inclusion,
components,
length
parts
in,
Depositing
can
and hence
for
an
bandwidth
will
example,
a
U-
over
occur
which
since
SiOz
layer
substrate
be-
is expected
NT remains
the coupling
essential
will
fall
off
frequency.
alternative
This
could
in
technique
nullify
[1],
is to randomize
the effect
this
the
of the stopband.
technique
would
strip
posi-
However,
present
technical
difficulties.
4) Reduced
and
Reelections:
the
that
the MSC
are small,
from
some applications
reduced
by
gradually
increasing
reductions
cussed
in the
of
of reflections
so far,
Separation:
embed yi ng
the tracks
be an advantage,
the
typically
level
behavior
of the
mrrltistrip
com-
stopband,
reflec-
30 dB or more down.
is not
acceptable.
into
coupling,
the strips,
strip-width
weighting.
The latter
Track
from
the coupler
the
basic
various
away
this
matching
clude tilting
and aperture
5)
Both
performance
it is evident
components
in depth.
Cou@ing
length
we have
the
increasing
tions
has been
by
strips.
LiNb03
caused
is reduced
de-
substrate
inserting
the
in transfer
Bandwidth:
[21 ]. This
ponents,
work
by
loss. Their
parts
reduction
the coupler
constant
with
of loss
A method
structures.
tween
For
that
also reduce
on active
Increased
coupler
AND CONCLUSION
and both
but
3)
source
the curved
has the
strips
IV),
is responsi-
is to electrically
and
length
per
low
(Section
be favored.
enhanced
underlay
dB
where
is also included).
of active
as discussed
to tap
IV-D).
space of time
may
ratio
tions.
two oppositely
possible
film
to a significant
greater
coupler
signal.
Si02
the curved
i.e., deposition
earlier
piezoelectric
under-layer
in transfer
if a metal
to increase
four
and
MSC,
which
performance
the
bandwidth,
path
I-C
short
its operation
can be made
dictates
this
signal.
it is still
DISCUSSION
on the
the components
device
delay
was more
Improvements
In the relatively
in progress
over
the
of these by making
(see Sections
pickup
signal
30 dB below
though
MSC
standing
at the
than
and
Direct
the main
signals
VI.
A.
bandwidth.
that
directed
of 12+ dB
below
echo
observed
a minimum
with
be offset
shaped
The
Si02
increase
associated
lead
be further
of the
the
the
ob-
structures,
(N2
a possible
the
Introduction
that
trans-
circuit
transducer
between
from
been
of multistrip
higher
loss mechanism
strips
if the delay
multistrip
open
possible
a layer
ment.
the
this
metal
introducing
A was left
reflector.
also
The
output
was taken
third
of reducing
couple
losses,
have
in reflectors
accidentally
due
less
Additional
generation
remains
it may
exists
parts
As stated
generation
since
evidence
on LiNbO$
are significantly
is
it occurs
desirable.
mode
in U-shaped
loss
in
and
length,
mode
the
the
and because
but direct
used to demonstrate
14)
configuration.
output
ducer
Bulk
film
resembling
delay
pairs instead
are
Spurious
amplitude,
become
used as a dummy
transducer.
transducers
absorber.
length
X previously
these
because
resistive
ble.
from
echo
length)
particularly
acoustic
closely
transfer
of the echo
to the
of the
significant
neither
They
the bends
by
losses occur
losses
Al films
per transfer
example,
loss is particularly
and half
wave
ohmic
of losses in ineffective
for
is more
B. If A and
reflected
A to B could
track-changing
reduction
offered
effectively.
the stopband.
transducer
signals
therefore
(this
bandwidth
more
to
length
0.5 dB
even below
The
The
strips.
of approximately
components,
in
by
acoustic
served
Further,
also covered
and experimental
the
size
of transducers
due
0.2 dB in a transfer
C is a
path
along
on
physical
of 2 is possible.
losses in 5000-~-thick
flow
overlayers
of the
as an increase
Surface
theoretical
the
NT can be sig-
be interpreted
[14].
structure
Both
that
because
through
SiOz or ZnO
be exploited
Losses:
ohmic
[16]
by a factor
then
circuits
of a signal
A reduction
bandwidth
MSC
B are
the input
delay
than
depositing
LiNbOt.
is increased
Reduced
basic
C, the principle
coupler
from
A device
from
and
to the coupler
the
propagation
principle
returns
and
signals
RF pickup
line
to the
A
from
line employing
signal
the
of a given
employed,
and
signal
the coupler
circuit
both
so double
capacity
reflector,
of the forward-going
be a folded
The
to utilize
and
storage
the acoustic
A passes via
elements).
circuit
sequentially
D is a multistrip
transducers.
2)
the
time
in NT may
may
conversion.
a multistrip
17 shows
overlayer
to current
of
coupler.
the
and
over bandwidths
Line
substrate.
increases,
the optimum
the coupler
in acoustic
transit
components
K2,
for low
directions
3-dB
center
decreases
stopband.
delay
time
band
by
on YZ
transducer
its inclusion
lowered
of multistrip
of delay line.
by the
Recently
the coupler
D U1
out
costs or the
nificantly
..--..------
Fig.
can rule
of material
the
free
Techniques
It
can be
surface
by
available
in-
weighting
[1, sec. IV],
is simplest and has yielded
of 10 dB.
In
the
parallel
MSC
are adjacent.
particularly
and
tracks
in long
the
that
Track
we
multistrip
have
separation
structures,
discould
as a means
IEEE TRANSACTIONS
224
ON MICROWAVE
APRIL
1973
have
been
C. Conclusions
In this
paper
introduced,
width.
tbe
They
than
transducers.
Meander
reflecting
track
built
into
after
require
problem
in
range
crosstalk.
introduce
a nonpiezoelectric
coupler
which
corporation
it
is desired
as shown
to separate
Aspects
make
tracks
in the portion
inactive.
delay
18. The
but
as previously
Further
to
a meander
in Fig.
the tracks
reflectors
of separating
underplayer
of undedays
structed,
B.
One technique
line
SiOz strips
to improve
is to
of the
With
the
could
be con-
serve
in-
not only
the performance
of the
discussed.
of Multistri+
Components
T,
portant
range
of SAW
Coupling
pling
between
Between
two
demonstrated
coup[ing
(Section
for
matching
to
This
raises
materials,
the
of power
can,
material
previously
material
the
high
has been
and
coupling
other.
and
while
maintaining
prohibitive
without
By
recourse
to over-
2)
coupling
other
parallel
is used.
to achieve
acoustic
distance
waves
as an
be applied
between
flexibility
in
each
of
if
MSC
to coupling
be-
the
along
coupler
line
include
their
waves
dissimilar
strip
be utilized
ability
of
which
design
structures,
amplifier
using
does
conductor
transducers
simpler
surface
an d then
not
the
require
be
become
feasible.
a tapped
have
delay
but
out
delay
from
further
lines
which
One may
very
to transduce
transistors,
where
a premium,
with
choose
the avail-
low transduction
of the
transduce
development
delay
line,
again.
This
of a new
semi-
technology.
ACKNOWLEDGMENT
The
Maines
for
authors
for
troller
this
wish
their
the
of the
of
H.
to
valuable
A. S. Young
fabricating
Director
is
could
with
to another
as freedom
long
wave
track
delay,
could
amplification.
of broad-band
approach
of very
loss
area of
can be con-
at
for forming
components
level,
If necessary,
long
as well
the
reflecting
lines
is not
stages of signal
loss it is perhaps
paper;
of
in a semiconductor
waves
Multistrip
on the
several
taps
im-
a wide
signal
V).
In
track
most
insertion
one substrate
unidirectionality
signals.
the
hence
the
delay
II).
re-
is simply
of the multistrip
by
taps,
important
(Section
(Section
virtues
spurious
of
and
Using
from
propagation
structures
One
Another
doubled
The
field
adjustment
Coupling
the
waves.
simple
could
through
track.
example
The
of an electric
vector
of the
has
waves.
dissimilar
existence
condition
discussion
surface
and
wave
a phase-matched
periodic
cited
the
Our
two
can
is the
to
The
Waves:
between
waves
requirement
component
coupler
Different
principle
identical
essential
the
Between
to the coupling
multistrip
tween
An
length
loss
includes
by reducing
lines.
can be transmitted
significant
described
the spurious
and
length
amplify
Coupling
by reducing
transit,
and
without
advance
components
structed
their
in
performance,
delay
similar
individual
unidirectional
compressor.
line
or shorts
the
the
for
UDT,
the bandwidth.
to use acoustic
Iayers.
been limited
triple
render
we have
changer,
delay
and therestrips
with
allowed
their
can be
strips.
18), meander-type
require
of strips
be
of multistrip
is to long
repercussions
However,
simply
(as in Fig.
on each ma-
number
Broken
changer
a significant
be transferred.
the
of
lithium
efficiency
of the
frequency),
discussed
cou-
question
quartz
(stopbands
same
in principle,
prove
Efficient
coefficient
the
amount
might
same
phase velocity
be at
for
necessary
of the
temperature
the effective
the
Subst~ates:
to exploit
the zero
adjusted
II).
dissimilar
example,
of one and
terial
substrates
between
niobate,
Separate
track
devices,
bulk
the signal
1)
can
beamwidth
both
application
they
and
in
for
components
compared
of additional
applications
improvement
interdigital
are required
treatment.
unimportant
band-
nor higher
standard
the multistrip
of components
and
processing
produce
connections
transducers;
reflecting
magic
of reducing
are
inclusion
The
exceptional
inoperative
flectors,
to
words,
no special
strips
components
enjoy
additional
used
external
the mask
between
changers.
neither
that
In other
judicious
18.
of which
No
operation.
Fig.
of multistrip
require
resolution
strips
a range
majority
for
A.
Baynham
on the
the devices;
bridging
Radar
M, Stationery
C.
discussion
supplying
coupler
Royal
thank
two
for
J.
D.
of this
J. R, Morgan
substrates,
Establishment
Office
and
subject
and
permission
and
the
the
Con-
to publish
paper.
coupled.
3) Othev Multistri@
Structures:
In
true coupler
the multistrip
structure
convenient
with
means
a surface
medium
of transferring
acoustic
photoconductor,
electrical
system
by
semiconductor
struction.
cussed
Other
by Tournois
the
structure.
This
be replaced
and
from
fields
might
a multistrip
to
give
advantages
et al.
[19]
could
medium
structure
a robust
of
this
and Adler
as a
as a
associated
piezoelectric
an array of transistor
circuits,
which
might
advantageously
the running
sound
in the actual path
The
the electric
wave
to some adjacent
addition
to its role
may also be used
delay
be a strip
of
or any other
interact
with
not be constructed
amplifier
linklng
device
of planar
modification
[20].
[17]
may
piezoelectric
are
condis-
REFERENCES
[1] F. G. Marshall,
C, O. Newton,
and E. G, S. Paige, Theory
and design of the surface acoustic wave multistrip
coupler, this issue, pp.
206215.
[2] F. G. Marshall,
E. G. S. Paige, and A, S. Young, New unidirectional
transducer
and broadband
reflector
of acoustic
surface waves,
~/fXt)0?2.
.LW.,
vol.
7, pp. 638-640, 1970.
[3] F, G, Marshall,
Reflecting
trackchanger:
IVew acoustic-surfacewave component
for folding long delay lines onto small substrates,
Electron.
Lett.,
vol. S, pp. 89, 1972.
[4] F. G. Marshall,
New technique
for the suppression of triple-transit
signals in surface-acoustic-wave
delay lines, -?31ect70?J.Left., VO1. g,
Dp.
311312, 1972.
[5] J. C. Crabb, J. D. Maines, and N. R. Ogg, Surface wave diffraction
on LiNbOs, Electron. Lett., vol. 7, pp. 253255, 1971.
[6] W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J.
Shaw, Design of surface wave delay lines with interdigital
transducers, IEEE
Trans. Microwave
Theory
Tech.,
vol. MTT-17,
pp.
865873, NOV. 1969.
IEEE TRANSACTIONS
ON MICROWAVE
[7]
[15]
[16]
[17]
[11] A. Armstrong,
private communication.
Broadband
unidirectional
surface
[12] J. C. Worley and H. Matthews,
wave transducer, IEEE
Trans.
Sonics
Ultrason.
(Abstracts),
vol.
SU-18, P. 52, Jan. 1971.
[13] R. A. Waldron,
Principles
of wideband
unidirectional
piezoelectric
transducers, M. I.T. Lincoln
Lab., Cambridge,
Mass., Tech. Note
54, 1969.
[14] W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J.
Shaw, Analysis
of interdigital
surface wave transducers
by use of
an equivalent
circuit model, IEEE
Trans.
Mittowave
Theory
Tech.,
[18]
Acoustic
E.
IAIN
LAGASSE,
M.
Invited
AbsfractThe
properties of acoustic surface waveguides are reviewed, with particular reference to topographic structures in which
guiding is achieved by drastic deformation
of the substrate surface.
A nnmericaf technique, capable of computing efficiently
and with
high accuracy the mode spectrum of an anisotropic piezoelectric
heterogeneous
waveguide of arbitrary
cross section, is described.
Characteristics
of both the ridge guide and the recently discovered
wedge waveguide are dkscussed in some detail.
Techniques for the f abdication of and transduction
onto acoustic
surface waveguides are dk.cussed, and a preliminary
assessment is
made of potential linear and nonlinear waveguide applications.
A
number of ezperimentaf devices are described.
space.
wave
surface
One can,
however,
guides
devices
fact
device
by
[1].
confined
most
the
which
energy
curvature
the
waves
equation
the
INTRODUCTION
acoustic
the surface
design,
choice
near
lead
to
make
wave,
represent
the
since
free
it will
surface
which
been considered
though
one may
a low
of
MASON,
[2]-[4].
like
as one
of the
free
so far
of the
seek to
diffraction
waves
convex
is there-
surface.
one accepts
constraints
minimize
propagation
In
its
in
effects
direction
Manuscript
received October 4, 1972; revised November
20, 1972.
This paper incorporates
work carried out under a C.V.D. contract and is
published
by permission
of tbe U.K. Ministry
of Defence (Navy
Department).
P. E. Lagasse is with Laboratorium
voor Electromagnetism
en
Acustica, University
of Ghent, Ghent, Belgium.
I. M. Mason and E. A. Ash are with the Department
of Electronic
and
Electrical
Engineering,
University
College London,
Torrington
Place,
London W.C. 1, England.
A. ASH
of acoustic
past,
papers
to
some
to
guides
the
which
which
bear
is the
understanding
has
been
acoustic
must,
less than
the
classified
in accordance
velocity
causing
ments
leading
guides,
change
~f
bulk
with
in
which
In
open guide
the
the
substrate
for
the
this
the
minimum
However,
[12]
[13],
in
the
by
or
the
electric
topographic
by a change
[15] [17].
characteristic
action,
fields
by
are thin-film
is effected
[7],
by
be develop-
[14], and
is achieved
of the guiding
of the
be done
well
[10]
single
be
or by depoling
guides.
reduction
the
may
for example,
may
elastic
the
for effecting
can
[8],
such
the acoustic
tha~
be reduced
itself;
thin
film
reduction
important
side
implies
region,
been considered
to which
determines
with
of such
experiments
adopted
There
have
by
most
on either
paper
both
Waveguides
principle,
velocity
is the strength
by the extent
present
some
velocity
waves.
[9].
properties
of a deposited
guides, in which the velocity
Perhaps
review
in the material
that
effected
in the topography
in the
recent
field,
leakage,
the means
to applications
categories
perturbation
which
to
main
of types
characteristics
in the guiding
case of a ferroelectric
two
this
and
Rayleigh
coupled
reduction.
a local
doping
the
any
in
of the
in
waveguides
devoid
of
purpose
would
considered
be found
achieved
surface
velocity
A number
been
of the
one
applications.
action,
velocity
this
will
advances
on possible
guiding
have
main
recent
where
plane
completely.
accounts
[5 ] [7 ]. It
rezard
in the
waveguides
detailed
review
situations
action
diffraction
surface
and
however,
are,
guiding
so as to eliminate
to a value
to propa-
a small
ERIC
There
of the
that
and Assessment
AND
to obtain
propagation
statement
1969.
Paper
the
of a half-
continue
have
plane-that
have
surface
stronger
for acoustic
diffraction
solutions
to a concentration
the
to a single
of
[21]
true
Diffraction
of lateral
[20]
Since
I.
[19]
856864,
Surface WaveguidesAnalYsis
PAUL
COUSTIC
225
of an
as portrayed
extend
guiding
structure.
radius
of curvature
within
It
the
is this
through