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MEMS Links

This page provides a comprehensive and updated set of links to MEMS related
utilities, interview and historical recounts, companies, emerging companies,
research organizations, and products. For some companies, you can find most
updated news items pertaining to them.

MEMS Insight (collection of personal opinions and interviews)


Bosch sees huge potential in tiny MEMS (August 01, 2007) Link. pdf archive of
the article
Bosch sensor engineering VP Horst Mnzel and Bosch Sensortec general
manager and CEO Frank Melzer recounted the history of MEMS development at
Bosch and shared its plans for the technology in a conversation with EE Times.
Interview with Larry Hornbeck of Texas
Instruments DerNewsService EETimes EETimesAsia aggregate archive
MEMS pioneer draws up technology's course (August 16, 2007) Link MEMS
past,present,future
Interviews with Dr. Kurt Petersen, who played a pioneering role in
commercialization of MEMS technology.
Interview with InvenSense Founder Steve Nasiri 2009/Partner with design
company PDF backup
Ink Jet technology: past, present, and future Link
Yole technology interviews Rich Duncombe, Distinguished Technologist of the
Imaging and Printing Group of Hewlett-Packard.
The future of Pico Projector Link
An interview with the President and Head of R&D of Opus Microsystems, a
Taiwanese MEMS design company established in 2004.
MEMS Market size estimates
Smart phone market $115b estimate MEMS microphone market $1b in
2013 estimate
MEMS industralization history before Nova Sensors, a story by Art Zias,
Allsensors.com Link

MEMS Technology Companies


Large companies or companies with many products
Texas Instruments Company MEMS division History of DLP
development lightCrafter
Hewlett Packard ink jet printers Technology an HP inkjet cartridge teardown pdf
archive
General Electric Global Research Corporate link Micro/Nano Sector (include link
taken inside the cleanroom) History
Honeywell Corporate Microelectronics and sensors
Robert Bosch (~$450M/year, 2008) Company Research and Technology
Center Sensors division history geomagnetic sensors
Sensonor Technologies (Norway) Link Motion, pressure and accelerometers since

1965
ASM Sensor (Chicago area)
Freescale Semiconductors Company Sensor division Xtrinsic pressure sensor
NXP Semiconductors (Nasdaq: NXPI), a Eindhoven, Netherland based european
company with $3.9B revenue, Company sensor division ppt intro
Kulite - Leader in pressure transducer technology Link Technology
TRW Automotive Electronics Group Link Wikipedia and tech milestones
Sensirion AG, Switzerland, specializes in humidity sensor, pressure sensor, and
flow sensor Link ultra-low flow rate sensor
PCB Piezotronics, Link
Measurement Specialities (Nasdaq:MEAS) Link OEM manufacturer of sensors
Silicon Microstructures Inc (SMI), Link
Murata manufacturing Co., Ltd., Link
Sanmina-SCI, electronic and mechanical products, Link
FOGALEnanotech, French company with products in capacitive, optical, and
ultrasound sensors, Link
Companies primarily in the motion sensing space
Analog Devices (~$100M/year) Company MEMS division Analog Dialog, a forum
for exchange Article on Gyro and Motion
STMicroelectronics Company Wikipedia Description MEMS/sensor
division News 3/25/2011
InvenSense Company InvenSense Youtube Channel Planning IPO for $75M
Colibrys Link News
MEMSIC, accelerometers and wireless motes, IMUs, and vertical gyro $18M sales
in Q32011 Home
Endevco, accelerometers, Link pdf reference library about motion sensors
Systron Donner Inertial Division (SDI) Link
Bosch (see above)
ROHM Kionix, a company started by Cornell faculty in 1993 . Acquired by
ROHM on Nov 13, 2009. Link Link to parent company ROHM 3/25/2011
Denso, Japanese automotive parts (~$200M/year, 2008) Link
Sensata Technologies, (NYSE: ST)Multinational automotive safety products,
started in Germany formerly TI Sensors (~ $140M/year, 2008) Link Investor
Info History
Infineon Technologies, A German company with global imprint on many
challenging areas (~$130M/year, 2008). Spun off Siemens in
1999. Link Wikipedia
Schneider Electric, a French Company, a global expert on energy management
(~$100M/year, 2008) Link Company History Sensors Wiki
VTI, a Finland company focusing on automotive and sensors (~$80M/year,
2008) Link Asian Distributor QuadRep 3/17/2011 3/24/2011 acquired by Murata
on 10/11/2011
Panasonic Industrial Works, supplier of automation, electronics, and lighting
(~$70M/year, 2008) Link
Delphi, leading global supplier of electronics and technologies for automobiles (~
$70M/year, 2008) Link
Sumitomo Precision Products, Silicon Sensing Systems Link MEMS division MEMS
division 2
SensorDynamics, Austria, wireless motion sensor products, acquired
by Maxim (Nasdaq: MXIM) on July 18, 2011 for $160M, Link

Sitronix, Taiwan. Link


Epson Toyocom, Japan, QMEMS process Epson Electronics America (EEA) IMU
sensor Link Epson Microsystems Epson Electronics America
Pirelli Cyber Tyer Link
Moog Crossbow. Crossbow's 2010 revenue was 13 million dollars. It was acquired
by Moog (Nasdaq: MOG.A) in July 2011. New link
Qualtre, headquartered in Marlborough, MA, USA, venture backed SAW motion
sensor, founded in 2008, Link
Silicon Designs, military rugged capacitive sensors, Issaquah, WA, founded in
1983, Link
DyTran Instruments, Inc, Link
Acacia MEMTech, (Nasdaq:ACTG) Acacia Link
VectorNav Technologies, LLC, embedded navigation solutions Link
Goodrich, a Fortune 500 global supplier of system and services, Link News
related to IMU shipment 2012 development in Minnesota
MiraMEMS, China, link
QST, Quality Sensor Tehcnologies, China, gyros Link started 2012
Biospace
Cephied bioassay Home technology news
Abbott i-Stat wholeblood analysis Site
CardioMEMS, a startup from Georgia Tech Company Article background
ISSYS Integrated Sensing Systems Company
Omron Micro Device division, Pressure sensors, thermal sensors for human
presence, company industrial automation sensors History
Microprobe, a company specializing in neural implant devices,also entering probe
card market to compete with Formfactor, Link
Microvisk technologies, developer of handheld system to monitor the blood
clotting status of patients Company
Fraunhofer IPMS, MEMS laser microscope, Link
Axion Biosystems, multielectrode recording, Link
Experimetria, pre-clinical trial research company, Link
Miscellaneous Asian and European Companies
SONY Semiconductor Link
Toshiba Corporate Research and Development Link
Hitachi MEMS and Hitachi Display Link Article News
Mitsubishi
MEMSCAP company 2Q revenue $3.7M Q2 2012 profit=0.7million euro
Lingsen precision industries, Taiwan Link News
Acoustic sensor space Analysis 2
Knowles electronics, acoustic sensors, gaming joysticks for portable
devices, Home MEMS Knowles lead MEMS Microphone suppliers
Akustica (purchased by Bosch in 2010) Link to news
Sonion Link News
Analog Devices sold Microphone Business Line (MBL) to InvenSense Nov
2013 1, 2,
Wolfson Microelectronics (Edinburgh, UK) Link
BSE, Best Sound Electronics, Korea, websiteelectrete microphone design of BSE
Infineon All around German company with power IC, micro controller, sensors IC,

and almost everything. website


HOSIDEN, Japan, website
Suzhou MEMSensing Microsystems Link
NEOMEMS, website
Shenzhen AAC Acoustic Technologies Company website Link AAC vs. Knowles
Patent 1 2 3
Shandong Weifang Goer Acoustic Technology Link Listed on China
Shenzhen Stock Exchange 002241 since 2008 analysis1Goer vs Knowles Patent2
Product listing on digikey speakerknowles microphone on
DigikeySTMicroelectronics microphones on digikeyInvenSense Microphones on
Digikeyvs. Panasonic Electret Microphones
Companies and technologies related to printers, print heads, e-paper, display,
and optics: Wikipedia link
Qualcomm Mirasol display Group page Video Kyobo, Korea's largest bookseller,
uses Mirasol-display technology, Nov 22, 2011 Koobe collaboration Bambook
Pixtronix Link Story Collaborating with Chimei Innolux
Pixel Qi Link is a spin off of One Laptop Per Child
Plastic Logic Link manufacturers polymer-based organic electronics
E-Ink Corporation Link Supplier of low power display to Amazon Kindle
Hewlett Packard Flexible Display technology Link
Liquivista, electrowetting display Link
Organic LED Display Taiwan ITRI
Silicon Light Machine and Grating Light Valve (GLV) technology SLM GLV
Keynote photonics, a developer of solutions, tools and processors for photonics
applications using MEMS Company
FLIR, leader in thermal imaging Link
Sofradir, a B2B company headquarterd in France (since 1986). It develops
infrared (IR) and wave detectors for military applications. Link
ULIS, infrared sensor manufacturer, Link
Pyreos, Edinburgh, Infrared technology, Link
DiCon Fiberoptics and MEMS, secure switching unit, Link
Santec Corporation, manufacturer of high speed swept laser for medical
applications, MEMS scanner Link
MEMSCAP Link
Boston Micromachines Corporation, deformable mirrors Link
Wavien, low cost pocket projector
Lemoptix, LSCAN micromirror device Link
Optilux liquid lens for smart phones and tablets Link related:smart contact
lens
MicroVision, portable display device maker (Nasdaq:MVIS). Link
Boston Micromachines, Adaptive optics, deformable mirrors. Link
IMEC, Belgium, a company that focuses on nanoelectronics, including micro
mirror arrays Link
Fujifilm Dimatix, maker of large format ink jet printing Company link 3/25/2011
Eastman Kodak 3/25/2011

poLight AS, reflowable autofocus actuated lenses for camera phones, TLens,
series B funding $18.5M in July 2011 Link
Tessera Siimple MEMS autofocus lens Link 2Q revenue $70M Tessera is traded
on Nasdaq under TERA.(TSRA)
Chsistie, maker of 3D cinema projector Link
Vuzix, video eyewear maker, Rochester, NY, Link
Panorama Synergy, Magneto-optics devices, Link
Kaiam, MEMS optics integration technology, Link
Communications and electronics space - RF switch, discrete tunable elements,
resonators, filters, acoustic wave resonators
Avago Technologies, Link, Acoustic FBAR (film bulk acoustic resonator) filters
(shipment news 1 2), analysis acquired Infineon AG's BAW business in 2008.
Agilent, FBAR filter and duplexer News
WiSpry, developer of MEMS RF capacitors, tunable filters, duplexers, and RF
switches Link Analysis
XCOM Wiress MEMS relays Link
Dust Networks (smart dust sensors) Company History
SiTimes resonator Company 3/25/2011 ships 50Millionth unit around June 2011
Discera (resonator) Company
Shinsegi Communications Systems (oscillator) Korea, Company
Siward, Taiwan, MEMS quartz oscillator
Silicon Laboratories (Nasdaq: SLAB), which acquired Silicon Clocks and
SpectraLinear, both in timing solution Company EE Time Article Jan/2011*
Sand9, precision timing products for wireless applications Link raised $3.1M in
Nov 2011
Ecliptek, founded in 1987, oscillators Link
Cavendish Kinetics, a fabless semiconductor manufacturer in RF tuning
products Link
RF Micro Devices, cellular RF components, Link
Enpirion, DC-DC power convertor chip with integrated core magnet, Link, Started
in 2001 from Bell Labs, Enpirion bought by Altera for $140M in May 2013.
Wireless modules:
Mccdaq, MC Measurement and Computing, Link
Companies in the energy and materials space
MicroGen Systems LLC, energy harvestors link
mPhase technologies, nanobattery technology, link
MicroPelt, thin film cooler technology, Link
Small companies/relatively new start-ups/Products covering emerging markets
(private held companies)
MEMScubemonolithic MEMS
Senodia, Chinese maker of gyro Link Collaborating with X-Fab on a variety of
projects
Fluidigm, developer of microfluid platforms Link
Veeco MEMS Probes Link
Nanoink MEMS Probes
Other companies in the scanning probe space K-Tek (Korea), Micro2Nano.com
Formfactor (Nasdaq:FORM), making of probe cards Link Q32011 revenue=$52M,

net profit $6-9M. (reference: Microprobe)


MEMjet, maker of large format ink printing head Link
MOVEA SA, maker of motion sensing applications, including the Gyration
mouse and airmouse app Link Company News Link
Hillcrest Labs, Motion sensing remote, software, Link
NovAtel, SPAN GNSS/Inertial Systems, Link
InterSense, motion sensing technology, Link Global Navigation Satellite
Systems, GNSS
XSens, motion tracking, Link
Baolab, Spain, NanoEMS platform, motion sensing, magnetic sensing,
packaging, Link
Audio Pixels (AKP:ASX), Australia, MEMS digital speakers, collaboration with
SONY and others Link
Bluechiip Limited (ASX ticker: BCT), a company specializing in wireless tracking
solutions that monitors temperature of objects Link
Melexis NV (MELE: Euronext), Belgium, a company specializing in
microelectronics integrated sensors such as pressure sensors, claiming to help
cars become greener LinkWikipedia
Telecardia, MEMS based pH sensors Link
BlockMEMS, a Mass company affiliated with Block Engineering. Link to news
MicroSense LLC, high resolution capacitive position sensors, Link
Applied Research Institutions
CEA LETI (France) Link
Alchimer, provider of advanced deposition technology Link
A*STAR IME (Institute of Microelectronics, Agency for Science, Technology and
Research) Link Singapore ASTAR
ITRI, Taiwan (Industrial Technology Research Institute), Link
Microelectronics Innovation Collaboration Center (C2MI), Quebec, Canada, Link
Collaboration Innovation Center, Carnegie Mellon University Link
Fraunhofer IPMS, a custom research institute for microelectronics and
MEMS Link
SINANO research MEMS line
Circuit/component Players
Maxim Integrated Products, analog and mixed signal IC Link
Cypress, Link touch sensor
EPCOS AG, a German maker of electronics components, including MEMS
barometric pressure sensor Link Wikipedia
Altera, developer of packaging solutions for circuits Link
MEMS Consultants
A.M. Fitzgerald, Link
Nanoshift, Link
SystemPlus consulting, France, MEMS cost consulting, Link
Equipment makers
Plasma-therm Link
Applied Materials , Link MEMS division
KLA-Tencor, Link
EV Group (EVG), headquartered in Austria, founded in 1980. Specializes in double

side alignment products and specialties wafers and processes. Link


Oxford Instruments, Link
Xactix (XeF2 etcher), Link
Primaxx (dry etch release) Link
Tegal, Japan an innovator of specialized production equipment including DRIE,
Tegal ProNova, etc (maker of DRIE equipment) Link Link
Finetech (bonding, assembly) Link
SUSS MicroTec AG, founded as Karl Suss in 1949, headquartered in Munich
Germany, coater, 3D integration, bonding, nanoimprint Link
Sumitomo Precision Products, SPP, maker of etching, deposition, thermal
processing equipment, Link
EV Group, headquartered in Austria, with presence in US and Asia, lithography,
bonding, advanced packaging, Link
Brewer Science, bonding, wafer handling, lithography tools, anti-reflection,
etc Link
MEMSStar, UK, special equipment including surface treatment and zenon
difluoride etching Link $20M order in 2010
Tousimis, Supercritical carbon dioxide dryer maker Link
Xaxtix, Zenon difluoride etcher maker Link
Lumera Laser for pico second laser processing Link
E M Optomechanical, EMOpto, maker of 3D MEMS profiler Link
SPP Process Technology Systems (SPTS), a supplier of capital equipment and
process technology, maker of APS etch system Link Omega APS etch system
OAI, semiconductor lithography instruments link
Sonoscan, acoustic imaging, wafer bonding inspection. Link
Advanced Diamond Technologies, diamond film deposition, UNCD diamond, Link
Rasco GmbH, testing equipment, a Cohu Inc. (Nasdaq: COHU) Link
Multitest, a maker of test equipment, part of Dover, Link
Moritex, machine vision and digital imaging products, link
CMSF, Plures Technologies, Owner of Advanced MicroSensros Corp, magnetic
sensor fab, Shrewsbury, MA Link
Resonetics LLC, excimer laser MEMS processing tool, Link
Surfx Technologies, atmospherical plasma technology, acquired by Precision
Mechatronics in Nov 2011
3D Systems Corporation (NYSE:DDD) acquires Huntsman
Corporation (NYSE:HUN)'s Digitalis resin MEMS platform for $41M, Nov 2011
Micronit MEMS division, design, prototyping and manufacturing of MEMS on
glass Link
Scannano, Deep vacuum gap (DVG) technology Link
Schott, maker of thin glass wafer MEMpax
Heidelberg Instruments, maker of table top lithography systems Link
4Wave, ion beam sputtering system, Link
PVA TePla, system engineering company in hard-metal sintering, plasma
processing, and crystal growing. Link
Solid State Equipment LLC, single wafer wet processing and cleaning, Link
USHIO, Japanese maker of optical systems, including steppers. Link
MEMS Foundry: A complete list of MEMS foundries, Listed according to 2006
revenue

The first ten below are listed top ten by MEMS Investor Journal, Oct 14,
2010 Link PDF Backup
Pure play MEMS foundries (MEMS only)
IMT, Innovative Micro Technology (Santa Barbara), largest pure play MEMS
foundry, through wafer via technology Link
Asia-Pac Microsystems (APM) Hsinchu, Taiwan, Link
Tyledyne Dalsa (Canada, near Montreal) Link (Teledyne acquired Dalsa for
canadian dollar 341 million around Dec 22, 2010)
Micralyne (Canada, near Edmonton) Link Success stories
Silex Microsystems (Sweden, Boston, San Francisco) Link Unique Technology
Colibrys, Switzerland and North America, manufacturer of motion sensors, and
provider of foundry services Link Foundry
MEMSCAP (formerly Microelectronics Center of North Carolina, MCNC) Link
XFab mixed-signal foundry experts, Germany, Texas and Malaysia Link
Tronics, Grenoble, Dallas, Link
Touch Micro (founded 2004) Taoyuan, Taiwan, Link
Advanced MicroSensors, owned by Plures and CMSF. Strewsbury, MA.
Specializing in magnetoresistive sensors. Link
Honeywell foundry Link
Omron Foundry Link
SONY Foundry Services, foundry customers include Knowles Electronics, $31M in
2011 Link
Mixed mode foundry 2011 outlook
ST Microelectronics, foundry with $228 revenue in 2010 for HP joint lab opened
with China's Harbin Inst. of Tech in 2012
GlobalFoundries, Link
TI foundry, one of the largest through joint collaborative efforts, customers
include Lexmark, spin off from a former IBM ink jet division.
MEMS Tech, Malaysia and Singapore, Link
SVTC (development and commercialization services), Silicon Valley, Austin,
Texas Link Laid off people in 2012
Texas Microfactory (Pilot scale production) Link
Sensoror, Norway, $38M for 2011
Semefab, a new player, Link
Tronics Group, MEMS foundary operating facilities in Grenoble, Dallas, Japan,
Beijing Link
Primary IC Manufacturing Foundries
TSMC, taiwanese foundry specializing in electronics, enabling and leading
the fabless semiconductor movement, founded 1987 by Morris Chang and
ITRI, Link Wikipedia
Hua Hong NEC, Shanghai, China, founded 1997 , Link
Grace Semiconductor Manufacturing, , Shanghai, China, formed in
2000, Link
MEMSmart, Suzhou Nano, Link
Midwest MicroDevices, Ohio, USA, Link
UMC, , Hsingchu, Taiway, Link CMOS-MEMS process
, HJTC, subcidiary of UMC in China

Advanced Semiconductor Manufacturing Corporation, Shanghai, Link


Semiconductor Manufacturing International, , China, SMIC, formed April
2000, Link
Siware Systems, fabless semiconductor company focusing on custom ASIC and
MEMS Link
Asahi Kasei Microdevices (AKM), Tokyo, Japan, and San Jose, CA Link
INO, Quebec, CANADA, link
Jiangyin Changdian, microelectronics packaging house in southern
China
Suzhou WLCSP, microelectronics and camera chip packaging
MEMS Product Vendors and "MEMS-inside" Products
Component vendors: Newark electronics Link
Digi-Key Link
Robot Simple, a neat site that sells parts for building robots toys, including MEMS
parts Link
Projectors and TVs (InFocus, )
E-readers: Amazon Kindle, Barnes and Noble Nook
Gaming machines: Nintendo Wii
Consumer electronics: Apple iPod
VectorNav, (Dallas, TX, founded 2008) GPA aided inertial navigation systems on
chip Link
Spirent, indoor positioning hybrid sensor fusion (see also Omron) Link
Nike FuelBand, high end pedometer that use MEMS to count steps and color to
provide feedback
XSens motion tracking | X2Impact, helmet mount brain injury detector
| Lifecomm LLC, watch for fall detection
Runtastic Gmbh, smart phone apps for tracking exercise status | Tanita Corp,
activity monitors | Polar Electro, activity monitors
BodyMedia, body tracking | Motorola Mobilities, MotoACTV
Organizations
Transducer Research Foundations
MANCEF: Micro and Nanotechnology Commercialization Education
Foundation Link
MEMS Industry Group Link
MEPTEC: Microelectronics Packaging and Test Engineering Council Link
IEEE: Institute of Electrical and Electronics Engineers
ASME: American Society of Mechanical Engineers
CINN,Chinese International NEMS Network, Link
CSMNT: Chinese Society of Micro and Nanotechnology Link
MEMS.net Link MEMS user community containing information about the field and
various tools and applications
SEMI, the global industry association serving the manufacturing supply chain for
the micro- and nanoelectronics industries. Link
VDI/VDE Innocvation, a German organization, Link
Minalogic, a Grenoble, France company with many projects and clusters. Link
MEMS Design Tools

Kic, a free graphic editor for MEMS layout


L-Edit, by Tanner Research, for circuit design
SoftMEMS
Coventor, maker of CoverntorWare
Synopsys, silicon multi die design tool, Link
Noteworthy link to technical notes
Packaging of three axis accelerometers Link
Venture capital funding of semiconductor industry Link
Where are MEMS found, a list of MEMS devices used in various industry
sectors Link
* If a company derives over 70% of revenue from one product, the company will
listed in one category. If a company has two or three products that are roughly
equal in revenue, the companies will be listed across two categories. If a
company has more categories but none of the product is larger than 70%, the
company will be listed under "large company or companies with multiple
products".

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