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Freescale Pressure Sensors

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Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

Freescale Pressure Sensors

Pressure Sensors
Blood Pressure
Barometer/Altimeter
Engine Control
HVAC Applications
Respiratory Applications
Drug Delivery for Inhalers
Consumer Appliance
Industrial Equipment

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

TM

What are Sensors?


A sensor is a device that detects either a real world condition, or a change in a
physical quantity, and converts that change into a useful input signal for a
decision making center.
Some examples of physical quantities that our sensors measure include
temperature, pressure, flow rate, acceleration, vibration, tilt, and touch.

Sensor Input

Data Processing,
Control, and Connectivity

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

Actuator
or
Output

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Signal
Conditioning
Circuit

Diaphragm

Ion-implanted
Strain
Gauge

Single Chip Integrated Silicon Pressure Sensor

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

TM

Pressure Sensor Cross Section

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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Types of Measurements
P1

Differential
P2

P1

Gauge
P2 = ATM

P1

Absolute

Vacuum
Constraint Wafer

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

The difference in pressure between


two points is measured where
pressure is applied to both sides of
sensor.

The bottom (P2) side is exposed to


the atmosphere and P1 is where
pressure is applied.

Pressure is applied to the top of the


die while the bottom of the die is a
vacuum sealed reference.

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ABSOLUTE

Altimeter
Barometer

Each needs a pressure measurement that is


compared to a fixed reference pressure
(vacuum).

MAP/BAP
Internal Tire Pressure

Blood Pressure Monitor

GAGE

Water Level
Exhaust Gas Recirculation
Air Mattress

DIFFERENTIAL

HVAC Applications
Air Flow

Sensor is in an enclosed environment with


pressure medium
Each needs a measurement that compares
the barometric
pressure in its surroundings to the
measurement pressure.
In general, anything below 10 psi (70 kPa).
Each requires a comparison of the pressure
between two ports
of the sensor.

Filter Pressure
Pressure Drop

Flow measurement

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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Understand our Data Sheet


Output
Voltage

Y = mX + B
Vout

V FS O

Offset Sensor output at zero


pressure

S pa n

S e n s it iv it y

Span Sensor output at full scale

Vo f f

pressure minus the offset


Pressure

Zero Pressure

Full Scale Pressure

Sensitivity - Slope of the line

(m),

mV/kPa

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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PRODUCT OFFERINGS
Pressure Sensor Levels of Integration
Temperature
compensation

Amplification

MCU

Output

Amplification

MCU

Output

MCU

Output

MPX10DP

UN-COMPENSATED

MPXM2010GS

COMPENSATED

MPXV5004G

INTEGRATED PRESSURE SENSOR (IPS)

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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Level of Integration
Pressure Sensor Levels of Integration
Temperature
compensation

Amplification

MCU

Output

Amplification

MCU

Output

MCU

Output

MPX10DP

UN-COMPENSATED

MPXM2010GS

COMPENSATED

MPXV5004G

INTEGRATED PRESSURE SENSOR (IPS)

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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PRODUCT OFFERINGS
Design Advantages
Uncompensated:

Temperature Compensated
& Calibrated:

Integrated:

High sensitivity
Lowest cost
Provides positive and negative
pressure measurement
Minimal device to device
variations (interchangeability)
Temperature compensation
included on chip.
Provides positive and negative
pressure measurement

Design Considerations
Device to device variation
Temp-compensation circuitry required
Amplification circuitry required

AUTO ZERO +
Lowest sensitivity than due to
compensation features
Priced higher than uncomp
Amplification circuitry required

AUTO ZERO +

PLUG N PLAY
Priced higher than uncomp & comp
Connect directly to MCU
devices.
Amplified, calibrated for
span & offset. (Interchangeability) Lower piece part count
Temperature compensation
AUTO ZERO +
included on-chip

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

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Package Options

MPAK

MPAK Axial Port

Small
Outline
Package
(SOP)

Case
482

Super
Small
Outline
Package
Case
(SSOP) 1317

Through
Hole 482B

Unibody

Tire
Pressure
Monitor

Vacuum
Port

Axial
Port

Side
Port

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

BASIC
ELEMENT

Dual
Port

Axial
Port

Dua
l
Port

Medical
Chip Pak

GAUGE
PORT

Case
423A

Through Through Through


Hole
Hole
Hole
Axial Port Axial Port Axial Port

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MAP/BAP
(Manifold/Barometric Absolute Pressure)
Freescale Pressure sensor

Modules produced by Customer


Placement in end product: engines, 2-stroke scooters.

Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are
the property of their respective owners. Freescale Semiconductor, Inc. 2006.

TM