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NEW METHODS OF ULTRASONIC METAL WELDING

Jiromaru TSUJINO, Tetsugi UEOKA, Ichiro WATANABE, Yusuke KIMURA,


Takahiro MORI, Koichi HASEGAWA, Yuki FUJITA, Toshiyuki SHIRAKI
and Mamoru MOTONAGA
Faculty of Engineering, Kanagawa University
Yokohama 221, Japan
New methods of ultrasonic metal welding and
characteristics of the welded specimens are studied. For
welding of small specimens such as thin wire bonding,
the bonding equipments designed using higher
vibration frequency and complex vibration welding
tips of 90, 120 and 190 kHz are significantly effective.
For medium size welding specimens, complex vibration
welding tips are also very effective, and onedimensional complex vibration systems are developed
to simplify the complex vibration systems. For welding
of large specimens, ultrasonic butt welding methods
joining thick metal specimens end to end are effective.
Using the methods and large capacity vibration sources
and power amplifiers of 5 to 50,100 kW, thick and large
various metal plate specimens are successfully welded.
Ultrasonic welding methods using two vibration
systems are also very effective, but not mentioned here.

1.

INTRODUCTION

Ultrasonic welding is featured that the same and


different materials are possible to weld easily in short
welding time, the characteristics of the weldment such as
weld strength and fatigue strength are superior to the
other welding methods, welding area is limited to very
narrow area and being applied for joining various
materials. New ultrasonic welding methods of metal
materials are proposed by the author and their
effectiveness is shown.
For welding of small specimens such as ultrasonic wire
bonding of integrated circuits or electronic devlces, the
bonding equipments using (1) higher vibration
frequency3 than 40 or 60 kHz which is used in the
conventional wire bonding systems, and using (2)
complex vibration welding tips14 vibrating in (a)
elliptical to circular loci or (b) rectangular to square loci
were proposed and have been shown that they are
significantly effective. The bonding systems of 90, 120
and 190 kHz and complex vibration welding tips are
designed. Using these equipments, required vibration
velocity becomes smaller and required welding time
shorter compare to conventional bonding systems.
For medium size welding specimens, (3) ultrasonic
welding method using two vibration systems1 1-13) have
been shown also effective for spot and multi-spot
continuous welding same as for large specimens, and (4)
complex vibration welding tips1-3) vibrating in (a)
elliptical to circular loci or (b) rectangular to square loci

1051-0117/93/0000-0405 $4.00 0 1993 IEEE

were shown very effective same as bonding of thin wire


and thick specimens. ( 5 ) One-dimensional complex
vibration systems4.s) are developed to simplify these
complex vibration systems and shown its effectiveness.
For welding of large and thick specimens, (6) welding
method using two vibration systemsll-13) crossed at a
right angle which drives the welding specimens from
upper and lower sides simultaneously, and (7) ultrasonic
butt welding methods-10)joining thick metal specimens
end to end are effective. Using the methods and large
capacity vibration sources and power amplifiers of 5 to
50, 100 kW, thick and wide plate specimens were
successfully welded. Among these methods, Ultrasonic
welding methods using two vibration systems (3)(6)1113) are not discussed here in detail.

2.
ULTRASONIC WIRE BONDING
USING COMPLEX AND HIGHERFREQUENCY VIBRATION WELDING TIPS
Ultrasonic wire bonding using 60 kHz, 90 kHz and 120
kHz complex vibration welding tips which vibrate in
linear to elliptical or circular and higher-frequency 190
kHz linear vibration welding tip are studied for
improving welding characteristics of wire bonding
system for various electronic devices. Aluminum wire
specimens of 0.1 mm diameter are welded successfully
using these welding equipments. The required vibration
velocity of these complex vibration systems are about
120 kHz vibration Comp!ex transverse 120 kHz vibration
system ( A )
vibration rod
system ( B )
( 1.2mm9)
( 8.0 mm @ )
( 8.0 mm @ )

Complex/ vibration welding tip

Welding

specimen

Fig.1 Arrangement of a 120 kHz complex vibration


ultrasonic wire bonding system.

1993 ULTRASONICS SYMPOSIUM

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one-half to one-third and required vibration weld time is


shorter than those for a conventional system of linear
vibration locus. The required vibration velocity of a
higher-frequency system is smaller than that of a
lower-frequency system because of the large number of
repetitions of vibration stress3).
2.1 Ultrasonic Wire Bonding Systems and welding
specimens
2.1.1 Ultrasonic wire bonding systems of 60, 90,
120 and 190 kHz
The complex ultrasonic vibration welding system
consists of a complex transverse vibration rod driven by
two longitudinal vibration systems of the same frequency
of 60 kHz, 90 kHz or 120 kHz which is crossed at a right
angle and a welding frame with a static clamping
pressure source.
Figure 1 shows a 120 kHz complex vibration bonding
system with two longitudinal vibration driving systems
crossed at a right angle. A free-free 3rd mode transverse
complex vibration rod whose free edge is a welding tip
is driven at a vibration loop position in two directions
crossed at a right angles to each other. These vibration
systems are driven simultaneously by independent
controllers and amplifiers, and welding tip vibration locus
shape and direction are controlled by regulating the
vibration amplitude and phase difference of two driving
systems. The vibration locus is changed from linear to
elliptical or circular shape. The dimensions of vibration
systems of 60 kHz, 90 kHz used are 15 mm in diameter
and 1.O in longitudinal wavelength. The dimensions off
120 kHz are 8 mm in diameter and 1.5 in longitudinal
wavelength. Figure 2 shows a 190 kHz wire bonding
system using linear vibration welding tip. The vibration
systems of 190 kHz are 7 mm in diameter and 1.5 in
longitudinal wavelength. The quality factor of these
vibration systems is about 1000 under a no-load
condition. Vibration amplitude is measured by ring-type
magnetic vibration detectors installed at a loop position
of the vibration systems. These complex vibration
systems may consist in one-dimensional systems using
complex vibration converters4.5).

plates. The copper plates are cleaned and degreased by


trichloroethylene and diluted hydrochloric acid. Weld
strength measured is the maximum force required to
break the specimen wire or welding surface in a direction
perpendicular to the welding surface.
2.2

Welding characteristics of 60,90, 120 and


190 kHz linear and complex vibration bonding
systems

2.2.1 Relationship between vibration velocity and


welding strength of linear vibration welding tips of 60,
90 and 120 kHz
The relationship between linear velocity of 60 kHz. 90
kHz and 120 kHz welding tips and weld strength of 0.1mm-diameter aluminum wire specimen is shown in Fig.3.
The direction of the linear vibration welding tip is set
parallel to the specimen wire length. Welding tip
vibration velocity is altered to 1.3 m/s (peak-to-zero
value), which is equal to vibration amplitudes of 3.45 pn
for 60 kHz, 2.30 pn for 90 kHz and 6.9 pn for 120 kHz.
Bold marks in the figures indicate that the specimens
were not torn at the weldment and broken at wire
specimen part under strength test.
The required vibration velocities for sufficient weld
strength are about 1.1 4 s at the frequency of 60 kHz,0.8
m/s at 90 kHz and 0.4 m/s at 120 kHz. The required
velocity of 90 kHz is smaller than that of 60 kHz which is
about 1.4 times that of 90 kHz. The required velocity of
120 kHz is about 1/3 of 60 kHz system.
2.2.2 Relationship between welding time and welding
strength of circular vibration welding tips of 90 and
120 kHz
Figure 4 shows weld strength of aluminum wire
specimens obtained from various welding times of 10 to
100 ms under the same vibration amplitude of 1.0 pn of
60 and 90 kHz circular vibration welding tips. The
required welding time of the' 120 kHz complex vibration
welding tip is about half that of the 90 kHz one3).
Welding time required for the complex vibration systems
is shorter than that of the linear system as shown in Fig.3.
110.1 mm diameter aluminum wire and

2.1.2 Welding specimens


Welding specimens used are 0.1-mm-diameteraluminum
wires (tensile strength=60 gf) and 1.0-mm-thick copper
c
0,

190 kHz lonaitudinal vibration system ( 7.0 mm @ )

60

5
0,
C

22

40

c
U)

20

-I

U '

Linear vibration welding tip

1
Welding specimen

Fig.2 Arrangement of a 190 kHz linear vibration


ultrasonic wire bonding system.

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- 1993 ULTRASONICS SYMPOSIUM

OArBrokenatwirepartlI

0.4
0.8
Vibration velocity ( m/s )

1.2

Fig.3 Relationship between vibraion velocity and weld


strength of aluminum wire of 0.1 mm diameter
welded by 60 kHz, 90 kHz and 120 kHz welding
tips of linear vibration locus.

2.2.3 Relationship between welding time and


welding strength of linear vibration welding tips
of 120 and I90 kHz
The relationship between linear velocity of 60 kHz and
90 kHz welding tips and weld strength of 0.1-mmdiameter aluminum wire specimen is shown in FigS.
Clamping force used is 300 gf, which is the same as in the
cases of 60 and 90 kHz. Required welding time of 190
kHz linear vibration welding system is smaller than 120
kHz and about 1/3 of 120 kHz system, although vibration
velocity 0.42 m/s of 190 kHz is smaller than 0.45 4 s of
120 kHz.
2.2.4

Weld conditions

of

aluminum

the deformations of the specimens welded by 90 kHz


welding tips of linear and circular loci. Weld strength is
maximum in the range where specimen width is 140 % to
180 % of wire specimen diameter. Excessive wire
deformation damages specimens and decreases their weld
strength. Weld conditions of the wire specimens of
different deformations welded by 90 kHz welding tip are
shown in Fig. 7. Figure 7 (b) shows sufficient
deformation of specimen welded successfully~3.
80
A

wire

0)

specimens
Relationship between weld strength and deformation
of wire specimens welded by 60 kHz and 190 kHz
welding tips of linear vibration locus is shown in Fig.6.
Deformations of wire specimens joined by 60 kHz and
190 kHz with enough weld strength near to the wire
specimen welding tips are about same, and also same as

60

40
'D

20

80

c
0,

??

150
200
Indentation width ( pm )

250

Fig.6 Relationship between indentation width and


weld strength of a 60 kHz and a 190 kHz
vibration wire bonding system.

5
0)

100

60

40

c
v)

'D

20

20

40
60
80
Welding time ( ms )

100
Weldment width
120 %
Short
weld condition

Fig.4 Relationship between welding time and weld


strength
aluminum
wire of 0.1 mm diameter
welded byof 90
kHz and 120 kHz welding tips of
circular vibration locus.
80

2 40

??
c

U)

I!

20

0
Welding time ( ms )

Fig.5 Relationship between welding time and weld


strength of aluminum wire specimens of 0.1 mm
diameter welded by 120 kHz and 190 kHz
welding tips of linear vibration locus.

Weldment width
210 0%
Excessive
weld condition

Fig.7 Welded conditions of aluminum wire specimens


of 0.1 mm diameter bv a 90 kHz wire bonding
system.

3.

60

Weldment width
150 Oh
Good
weld condition

ONE-DIMENSIONAL COMPLEX
VIBRATION WELDING SYSTEM

Welding characteristics of metal plate specimens are


significantly improved by ultrasonic lapped spot welding
system using a complex vibration welding tip.
The welding characteristics of the complex vibration
system have been shown very effective using (1) the
same vibration frequency ( 27 kHz ), or (2) different
frequency ( 20 kHz and 27 kHz ) complex vibration.
Welding tip vibration locus shapes were controlled from
linear to (1) elliptical,circular or to (2) rectangular, square
by regulating vibration amplitudes and vibration phase
difference of the driving vibration systems.
For simplifying the configurations of the complex
vibration systems, one-dimensional complex vibration
welding systems of 27 kHz are designedW.

1993 ULTRASONICS SYMPOSIUM - 407

3.1 One-dimensional vibration converter


3.1.1 Configuration of one-dimensional longitudinaltransverse vibration converter
For simplifying the configuration of the complex
vibration welding system, one-dimensional complex
vibration welding systems of 27 kHz which vibrate in
elliptical or circular locus are designed. Figure 8 shows
an arrangement of a one-dimensional complex welding
system which consists of a longitudinal vibration system
using a 27 kHz bolt-clamped Langevin type PZT
transducer and a stepped horn, a longitudinal to
transverse vibration converter and a complex vibration
rod which vibrates in longitudinal and transverse
vibration modes simultaneously within near resonance
frequency. A longitudinal-transverse vibration converter
consists of two kind of metals of 17 mm diameter and 5
mm thickness which have different sound velocities. The
converter is installed between the driving longitudinal
vibration system and a complex vibration rod.
Welding tip vibration locus shape is controlled from
linear to (1) elliptical, circular by regulating vibration
frequency of the driving longitudinal systems.
3.1.2 Vibration characteristics of onedimensional longitudinal-transverse
vibration
converter
Free admittance loops of a complex vibration system
with a longitudinal to transverse converter are shown in
Fig.9. It is shown that a longitudinal resonance mode at
26.7 kHz and a transverse resonance at 26.9 kHz are

measured. The amplitude of motional admittance of


longitudinal vibration is larger than transverse one, but
quality factors of these vibration modes are high as 2074
and 1493 and the both modes can be driven at large
vibration amplitude simultaneously by compensating the
power factor at the transverse mode.
Relationship between driving frequency, vibration
amplitude and vibration phase of longitudinal and
transverse vibration modes, and vibration locus shapes
are shown in Fig.10. Vibration locus shape at welding
tip part is almost circular where phase difference between
these vibration modes is 90 degrees.
3.2

Welding characteristics of one-dimensional


complex vibration system

Welding conditions of linear and complex vibration


welding tips
Figure 11 shows relationship between welding time and
weld strength of aluminum plate specimens of 0.5 mn
thickness welded by welding tips of linear and circular
loci under the same vibration amplitude of 2.0 pm. The
obtained weld strengths by a welding tip of circular
locus are larger than those joined by a conventional
welding system whose welding tip vibration is linear.

26.65 26.70 26.75 26.80 26.85


Driving frequency
( kHz )
mens

Fig.8 .Arrangement of a 27.kHz Ion 'tudina1.-transverse


vibration converter usin a half!rrn
Half ring used : Brass 5300 mls , H ~ ? S l S O m/s.

Fig.10

26.90

Relationship between driving frequency,


vibration locus shapes and phase difference
between longitudinal and transverse vibrations.
30 10.5 mm and 0.5 mm thick
pure aluminum plate specimens

20
lu =26738.51Hi!

IYlmax 0.038 ( s)
L

--

0.01

v)

10

In=26909.30Hi!

al

Transverse vibration
ho = 2691 5.52Hi!

4.01
0.02

IU 26745.78Hi!
I

IYlmax =0.0034(s)

= 1493

Fig9 Free admittance loops of


a longitudinal-transverse vibration converter.

408

- 1993 ULTRASONICS SYMPOSIUM

,.

U '

'

Welding time
( s)
Relationship between welding time and weld strength
using welding tip of linear and circular loci.
Specimens : 0.5 mm thick pure aluminum plates.

4.

ULTRASONIC BUTT WELDING OF


LARGE VARIOUS METAL PLATE
SPECIMENS

about 18 pm and 15.5 to 17 pm. Thin burrs are produced


on either side of the aluminum specimen. The required
input power for joined aluminum, copper and steel plate
specimens is about 5 kW/cm2 and 4 kW/cm2.

Ultrasonic lapped spot welding is possible to weld up to


2 or 3 mm plate specimens. But, large and thick
specimens are impossible to weld because the driving
surface of the upper specimen can not endure the
increasing driving force of the thick weldment and
increasing shear displacement along the thickness of the
specimen. Ultrasonic butt welding is adequate for
welding thick specimens such as over 10 mm thickness.
4.1

Ultrasonic butt welding system

Ultrasonic butt welding system


The ultrasonic butt welding system consists of one
powerful ultrasonic vibration source, an upper passive
vibration system and a welding frame with hydraulic
static pressure sources for clamping welding specimens
between the upper and lower vibration system and for
inducing static clamping pressure on a welding surface
(Fig. 12). The ultrasonic vibration source consists of
eight bolt-clamped Langevin-type PZT transducers of 60
mm diameter and a radial-to-longitudinal converter as a
vibration power accumulator. Dimensions of the welding
tip are 20 mm thickness and 52 mm width. The 15 kHz
vibration source with 8 transducers used is 542 mmin
diameter and 28.5 kg in weight. Vibration amplitude is
measured by ring-type magnetic vibration detectors
installed in various positions in vibration systems. The
vibration source is driven by a 50 kW or 100 kW static
induction thyristor power amplifier.
4.1.1

4.2

Welding characteristics of different metal


plate specimens

4.2.1
Welding conditions of aluminum, copper
and steel plate specimens
The relationship between vibration amplitude, input
power and weld strength of 6-mm-thick aluminum,
copper and steel plate specimens is shown in Fig.13. The
maximum weld strength obtained is almost equal to
aluminum specimen strength at a vibration amplitude of

30 r

-E

9-300

VI

Specimen elongationI

2 2 0 3

a,
.-

position

f 200

VI
K

a,

-E,

mC
.II
c 10m

0
C

-0

100

. %

0
-

u s
c

o L

- 20

60

80

100

120

Weld strenqth ( MPa)

Fig .14 Relationship between weld strength; measured


temperature and elongation at tensile test of pure
aluminum plate specimens.

Hvdraulic clarnDina vice

- 80
$ 4 0 t (1y lAlurninum date
x

U)

a,

Welding plate specimen


of 30 mrn width
.Fig.

Lower
welding tip

12 l5kHz ultrasonic butt welding system using a


lower vibration source with eight BLT transducers.

,
I

116 Pm; 77 Mpal;/G-Welding suriace


I
0
1 0 8 6 4 2. 0 2 4 6 8 1 0
Specimen position from welding surface ( rnm )

Fig.15 Hardness distributions along weldment sections


across welding surface of 6 mm thick (1) aluminum,
(2) aluminum - copper and (3) aluminum - steel plate
specimens.

1993 ULTRASONICS SYMPOSIUM

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Temperature rise in welding specimens


Figure 14 shows the temperature rise at a side surface of
aluminum Specimens measured by an infrared radiation
thermometer. Maximum measured temperature is about
200 "C where the obtained weld strength is almost equal
to the strength of aluminum. Hardness distributions
along the sectional surface of the welded specimen are
shown in Fig.15. Hardness decreases slightly at the
welding surface by tempering effect due to temperature
rise at the weldment. The temperature rise at welding
surface is estimated about 480 "C at least from the
measured tempering effect by an electric furnace.

4.2.2

4.2.3 Mechanical characteristics of welded specimens


Figure 14 also shows relationship between elongation
length of welded specimens at tensile strength test and
the weld strength of the same specimens. The elongation
length increases as weld strength increases up to the
elongation of base metal specimen. The mechanical
characteristics of welded specimens are about same as .
base metal specimens, and the hardness adjacent to the
weldment decreases slightly by welding conditions.

4.2.4 Weld conditions of the same and different metals


Figures 16 (1)(2)(3) show the cross sections of the
specimens. Burrs are produced on upper and lower
welding parts of the aluminum-plate side mainly due to
the higher hardness of copper or steel specimens.
Welding
.Bum\sudace

B
-

~Welding
\surface

Weldlng
Bum\surface

(specimen width at the weldment) for maximum weld


strength was 140 to 180 % of wire diameter and about
same in these frequencies and in the linear and complex
vibration loci. The required vibration velocity becomes
smaller and required welding time shorter compare to
conventional bonding systems. Moreover, using these
complex vibration methods, the weld strength of wire
bonding becomes independent of the difference in the
direction between welding tip vibration and wire length.
2) F o r m e d i u m size welding specimeng, complex
vibration welding tips vibrating in (a) elliptical to
circular loci or (b) rectangular to square loci were shown
very effective same as the bonding of thin wire
specimens. One-dimensional complex vibration
systems were developed for simplifying the complex
vibration systems, and may be applied for various
purposes such as wire bonding hereafter and welding of
large specimens in future.
3) Using
'
-and
large
capacity vibration sources and power amplifiers of 5 to
50,100 kW, aluminum plate specimens of 6 mm thickness
and 400 m width were successfully welded by shifting
welding driving position with the input power of 3.5 .
kW/cm2. The same and different metal specimens of
aluminum, copper, and steel plate specimens of 6 nm
thickness were joined successfully with the weld
strength almost equal to the specimen. Temperature rise
in an aluminum welding surface was estimated about 480
OC. The elongation lengths of the welded specimens at
tensile test which had weld strength near to the specimen
were almost equal to that of the base metal.

--

REFERENCES
Ultrasonic wire bondi'ng

Alumlnum

( 1 ) Aluminum

plates

Alumlnum Copper

( 2 ) Aluminum and
copper plates

Alumhum

Steel

( 3 ) Aluminum and

steel plates

Fig.16 Weld conditions of 6 mm thick aluminum, copper,


and steel plate specimens.

5.

CONCLUSION

New ultrasonic welding methods of metal materials


were proposed and their effectiveness was shown.
1)For ultrasonic bonding of small specimens such as thin
wires, the bonding equipments using higher vibration
frequency than 40 or 60 kHz which is used in the
conventional wire bonding systems, and using complex
vibration welding tips vibrating in (a) elliptical to
circular loci or (b) rectangular to square loci were
proposed and it was shown they are very effective.
The bonding systems of 90, 120 and 190 kHz and
complex vibration welding tips of the same vibration
frequency were designed. Welding aluminum wire
specimens of 0.1-mm-diameter were welded successfully
by these higher-frequency complex vibration welding
equipment. The deformation of the welded specimen

410

- 1993 ULTRASONICS SYMPOSIUM

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Ultrasonics Symp. (IEEE, New York, 1990) pp. 1103-1 106.
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Part 1, No. 5B, May 1993
..

nal complex vibration s v m

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Ultrasonic butt weldinp

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Symp.(IEEE, New York,1993) p.859-866.
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Fujita, K. Maru and Y. Onishi
: Proc. National meeting of
Acoustical Society of Japan, 1993.10., pp.915-916. (in Japanese)

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