Gyroscopes

Gyroscopes

Slide #2
Slide #2

Whatisisaagyroscope?
gyroscope?
What
devicethat
thatcan
canmeasure
measureangular
angularmotion
motionorordisplacement
displacement
AAdevice
Applications
Applications
Aerospace:
Aerospace:
Inertialguidance
guidancesystems
systems
Inertial
Automotive:
Automotive:
Angularrate
ratesensors
sensors(for
(fortraction
tractioncontrol,
control,etc.)
etc.)
Angular
Entertainment/consumer:
Entertainment/consumer:
Virtualreality
realitysensors,
sensors,pointing
pointingdevices,
devices,etc.
etc.
Virtual
Industrialautomation:
automation:
Industrial
Motioncontrol,
control,robotics
robotics
Motion

Mark
Bachman,
EECS179
Fall
Quarter
Mark
Bachman,
EECS179
Fall
Quarter

Slide #

Gyroscope principles
Gyroscope principles

Slide #5

Principle of operation
Principle of operation

The simplest gyroscopes use a high speed, rotating inertial disk that is loosely
The simplest
useholding
a high speed,
rotating inertial disk that is loosely
coupledgyroscopes
to the frame
it.
coupled to the frame holding it.

A rotation in the frame imparts a torque (rotation) on the spinning disk, which
A rotation
in the(rotates)
frame imparts
a torque
(rotation)of
onangular
the spinning
disk, which
precesses
as a result
(conservation
momentum).
precesses (rotates) as a result (conservation of angular momentum).
Precession is a change in the orienta-on of the rota-onal axis of a rota-ng body

Mark Bachman, EECS179 Fall Quarte

Gyroscope
principles
Gyroscope
principles

Slide #6
Slide #6

Principle
of operation
Principle
of operation
Practical
usually
limit
movement
to measure
of rotation
Practical
usesuses
usually
limit
the the
movement
to measure
onlyonly
oneone
axisaxis
of rotation
(roll,
pitch
or yaw).
(roll,
pitch
or yaw).

induced
torque
is monitored
a meter
which
counteracts
torque
TheThe
induced
torque
is monitored
by abymeter
which
counteracts
the the
torque
withwith
springs
a similar
restoring
force.
springs
or aorsimilar
restoring
force.

Slide #7

Slide

MEMS
gyroscopes
MEMS
gyroscopes
Problems
for MEMS
gyroscopes
Problems
for MEMS
gyroscopes
processes
produce
devices
with large
inertial
masses,
nor can
MEMS MEMS
processes
cannotcannot
produce
devices
with large
inertial
masses,
nor can
they produce
spinning
they produce
freelyfreely
spinning
disks.disks.

Evenbest
theMEMS
best MEMS
motors
still quickly
slow down
andifstop
not externally
Even the
motors
still quickly
slow down
and stop
not ifexternally
actuated.
The inertial
mass
the wheels
is very,
very small.
Furthermore,
actuated.
The inertial
mass of
theofwheels
is very,
very small.
Furthermore,
they cannot
be made
sothey
that precess
they precess
they cannot
be made
so that
freelyfreely
in 3D.in 3D.

Mark Bachman, EECS179 Fall Quart

Mark Bachman, EECS179 Fall Quarter

Slide #8

MEMS gyroscopes

So how to measure angular velocity in a micropackage?

Mark Bachman, EECS179 Fall Quarte

So how to measure angular velocity in a micropackage?

Mark Bachman, EECS179 Fall Quarter

When a mass (m) is moving in direc-on v and angular rota-on velocity is applied, then the
So how to measure angular velocity in a micropackage?
mass will experience a force in the direc-on of the arrow as a result of the Coriolis force. And the
resul-ng physical displacement caused by the Coriolis force is then read from a capaci-ve sensing
structure.

Slide #8

MEMS gyroscopes

Most available MEMS gyroscopes use a tuning fork congura-on.

Two masses oscillate and move constantly in opposite direc-ons.

When angular velocity is applied, the Coriolis force on each mass also acts in
opposite direc-ons, which result in capacitance change.

This dieren-al value in capacitance is propor-onal to the angular velocity
and is then converted into output voltage for analog gyroscopes

So how to measure angular velocity in a micropackage?

Slid
Slide #9

MEMS
Gyroscope
principles
MEMS
Gyroscope
principles
Coriolis effect
Coriolis effect

Motion in a rotating reference frame leads to sideways movement.

Motion in a rotating reference frame leads to sideways movement.

Ground
Desired path (as
Actual path (as seen
Ground speed
seen
in(as
local frame)
local
frame)
Desired
path
Actual pathin(as
seen
speed changesin local
To frame)
stay along original
seen in local frame)
along path!
changes
path
requires
To stay along
original
along path!
additional force:
path requires
additionalCoriolis
force: force.
Coriolis force.

Cant walk a straight line in a rotating reference (merry-go-round) without

Cant walk a straight line in a rotating reference (merry-go-round) without
exerting a sideways force (or acceleration).
exerting a sideways force (or acceleration).

Mark Bachman, EECS179 Fall Qua

Slide #
Slide #10

MEMS
Gyroscope
principles
MEMS
Gyroscope
principles
Coriolis effect
Coriolis effect

This effect shows up on earth since we are in a rotating reference frame.

This effect shows up on earth since we are in a rotating reference frame.

Air moving in straight

Focault demonstrated
Air lines
moving
in
straight
Focault
demonstrated
is forced sideways
the Coriolis
effect (and
lines
is
forced
sideways
the
Coriolis
effect
(and
by the fact that it is
measured the rotation
by the
fact in
that
it is
measured
the rotation
moving
a rotating
of the earth)
using his
moving
in a rotating
of the
earth)
using his
reference
frame (the
famous
pendulum.
reference
(the is
famous pendulum.
earth). frame
The result
earth).
The motion
result isof storms.
circular
circular motion of storms.

No: toilets and sinks

No:do
toilets
and sinks
not show
the
do not
show
the
Coriolis effect.
Coriolis
effect. design
(Geomerirc
(Geomerirc
design
of drain more
of drain
more
important).
important).

Mark Bachman, EECS179 Fall Quar

MEMS
Gyroscope
principles
MEMS
Gyroscope
principles

Slide #11

Coriolis
effect
Coriolis
effect
Constrained
motion
means
a force
is imparted.
Constrained
motion
means
a force
is imparted.

If path is constrained,
the contraining device
will feel
the is
Coriolis
If path
constrained,
theforce.
contraining device

will feel the Coriolis

force.

For oscillating body,

motion (oscillation)
will beFor
induced
oscillating body,
sideways.
motion (oscillation)

will be induced
sideways.

By measuring the imparted force (or its effect on an oscillator), we can

measure the angular velocity. Almost all MEMS gyroscopes use this feature.

By measuring the imparted force (or its effect on an oscillator), we can

measure the angular velocity. Almost all MEMS gyroscopes use this feature.
Mark Bachman, EECS179 Fall Quarter

ring gyroscope and the piezoelectric

Slide #12
the Draper Lab comb
drive tuning
fork
Slide #12

MEMS Gyroscope principles

plate gyroscope.
MEMS Gyroscope principles
measured
Tuning fork gyroscope

in

capacitive

fashio

Electrostatic, electromagnetic, or

Tuning
forkis gyroscope
mechanisms
can be used
A tuning fork
simple example of the Coriolis effect and howpiezoelectric
it can be used
to
Draper
Tuning
Fork
monitor angular motion.
A tuning fork is simple example of the Coriolis effect detect
and how
it can[6]
be used to
the force.
Gyroscope
monitor angular
motion.

Advancements and
Applications
One of the most widely used
micro-machined gyroscopes is the tuning

Figure 2: Tuning Fork Physics [6]

By measuringfork
the amplitude
of oscillation
in the Stark
sideways direction, the
design from
the Charles
Since the development of the
angular motion can be deduced. Used in Daimler Benz AG MEMS gyroscope.

Draper Lab (Fig 1). The design consists

first tuning fork gyroscope in 1993, t

-Two -nes connected

to a junc-on
bar to
which
resonate bar
at certain amplitude.
of the
two amplitude
tines
connected
a junction
By
measuring
of
oscillation
in the
sideways direction, the
-When the -nes rotate, Coriolis force causes a force perpendicular
to
the
-Laboratory
nes
of the
fork.
Draper
has made significa
Mark
Bachman,
EECS179
Fall Quarter
angular
motion
can
be
deduced.
Used
in
Daimler
Benz
AG
MEMS
gyroscope.
which
resonate
at
certain
amplitude.
-The force is then detected as bending of the tuning fork or a torsional force.
to the device.
-These forces When
are propor-onal
the applied
angular
rate, from wimprovements
hich the displacements
can be Their fi
the tinesto rotate,
Coriolis
force
measured in a capaci-ve fashion. Electrosta-c, electromagne-c, ogyroscope
r piezoelectric
mechanisms
can be for t
was
developed
causes
a force perpendicular to the tines
used to detect
the force.
Mark Bachman, EECS179 Fall Quarter

Slide #12

MEMS Gyroscope principles

Tuning fork gyroscope
A tuning fork is simple example of the Coriolis effect and how it can be used to
monitor angular motion.

The underlying physical principle is that

Vibra-ng object tends to con-nue vibra-ng in the same plane as its support rotates. This
type of device is also known as a Coriolis vibratory gyro because as the plane of
oscilla-on is rotated, the response detected by the transducer results from the Coriolis
term in its equa-ons of mo-on ("Coriolis force").

By measuring the amplitude of oscillation in the sideways direction, the

angular motion can be deduced. Used in Daimler Benz AG MEMS gyroscope.

Mark Bachman, EECS179 Fall Quarter

Slide #1
Slide #13

MEMS
principles
MEMS Gyroscope
Gyroscope principles
Vibrating
Vibratingring
ringgyroscope
gyroscope

AA
ring
The Coriolis
Corioliseffect
effectinduces
induces
ringis isflexured
flexuredback
backand
andforth
forth in
in resonant
resonant mode.
mode. The
flexure
the driving
driving flexure.
flexure.
flexurethat
thatisissideways
sideways(and
(andout
out of
of phase)
phase) with the

The Coriolis force

The
Coriolis
force
always
pushes
always
pushes
sideways
to the
motion
sideways
to ring.
the motion
of the
of the ring.

The result is an
The rotation
result isofan
effective
the
effective
rotation
of the
ring
oscillation
mode.
ring oscillation mode.

Since the Coriolis force vibrates the ring sideways, it produces a second mode
Since the Coriolis force vibrates the ring sideways, it produces a second mode
of vibration which adds to the first. The result is a rotation of the mode
of vibration which adds to the first. The result is a rotation of the mode
pattern of the ring. Most MEMS gyros use this method in closed-loop mode.
pattern of the ring. Most MEMS gyros use this method in closed-loop mode.

MEMSGyroscope
Gyroscope
example
MEMS
example

Slide #14

Example device:
device: Delco
Corp.
Example
DelcoElectronics
Electronics
Corp.
Vibrating ring
ring assembly
on on
CMOS
substrate.
Vibrating
assemblyelectroformed
electroformed
CMOS
substrate.

Device is freestanding metal. High precision capacitance circuits monitor ring

vibration and provide electrostatic actuation for closed loop operation.

Device is freestanding metal. High precision capacitance circuits monitor ring

vibration and provide electrostatic actuation for closed loop operation.
Mark Bachman, EECS179 Fall Quarter

Slide #15
Slide #1

MEMS
Gyroscope
example
MEMS
Gyroscope
example
Example
device:
Silicon
Sensing
Systems
Example
device:
Silicon
Sensing
Systems
(Formerly
British
Aerospace
Systems)
VSGVSG
ringring
sensor.
(Formerly
British
Aerospace
Systems)
sensor.

MALIF:
Figure
MALIF:
Figure
4.214.21

Device
is freestanding
metal
silicon
metal
traces.
External
magnetic
field
Device
is freestanding
metal
silicon
withwith
metal
traces.
External
magnetic
field
is applied
current
loops
through
device
initiating
movement.
is applied
andand
current
loops
passpass
through
the the
device
initiating
movement.
Other
metal
loops
to measure
induced
current.
Other
metal
loops
are are
usedused
to measure
induced
current.

Slide #1

MEMS Gyroscope example

Slide #16

MEMS Gyroscope example

Example device: Daimler Benz AG
Example device: Daimler Benz AG
Tuning fork sensor (process flow).
Tuning fork sensor (process flow).

Device is fabricated from silicon with piezoelectric actuator (Al Nitride) and

Device is fabricated from silicon with piezoelectric actuator (Al Nitride) and
piezoresistive (diffused) sensor. SOI wafers are fusion bonded together to form
piezoresistive
final device. (diffused) sensor. SOI wafers are fusion bonded together to form
final device.

Slide
Slide
#17#17

MEMSGyroscope
Gyroscopeexample
example
MEMS
Exampledevice:
device:Roger
RogerBosch
BoschGmbH
GmbH
Example
Tuningfork
forkwith
withlateral
lateralaccelerometer
accelerometer
Tuning

Device
Deviceis isfabricated
fabricatedfrom
fromsilicon
siliconusing
usingsurface
surfaceand
andbulk
bulkmicromachining
micromachining
methods.
methods.OnOntop
topofoflarge
largebulk
bulkmicromachined
micromachinedoscillator
oscillatoris issurface
surface
micromachined
micromachinedaccelerometer
accelerometersimilar
similartotothe
theADXL
ADXLseries.
series.Actuation
Actuationis isbyby
external
externalmagnetic
magneticfield
fieldand
andinductive
inductivecurrent
currentloops.
loops.

Mark
Bachman,
EECS179
FallFall
Quarter
Mark
Bachman,
EECS179
Quarter

Slide #18
Slide #18

MEMS Gyroscope
Gyroscope example
example
MEMS
Example device:
device: Roger
Roger Bosch
Bosch GmbH
GmbH
Example
Process flow
flow
Process

Device is
is fabricated
fabricated from
from silicon
silicon using
using surface
surface and
and bulk
bulk micromachining
micromachining
Device
methods. Deep
Deep silicon
silicon etch
etch processes
processes and
and MEMS
MEMS level
level packaging.
packaging.
methods.

Mark Bachman, EECS179 Fall Quarter

Mark Bachman, EECS179 Fall Quarter

MEMS Gyroscope example

MEMS Gyroscope example

Slide #19

Example device: UCI (Cenk Akar / Andrei Shkel)

Device device:
made at UCI
UCI and
at Microfabrica
Example
(Cenk
Akar / Andrei Shkel)

Device made at UCI and at Microfabrica

Deep etched micromachined vibrating ring gyroscope.

Deep etched micromachined vibrating ring gyroscope.

Mark Bachman, EECS179 Fall Quarte

Mark Bachman, EECS179 Fall Quarter

Slide #2
Slide #20

MEMS
Gyroscope
example
MEMS
Gyroscope
example
Example application: Segway
Example application: Segway
Silicon Sensing Systems VSG ring sensor Dynamic Stabilization
Silicon Sensing Systems VSG ring sensor Dynamic Stabilization

sensors
to monitor
orientation
of the
scooter,
sampled
at 100
FiveFive
sensors
usedused
to monitor
orientation
of the
scooter,
sampled
at 100
times/second.
Sensors
include
gyroscopes
liquid-filled
sensors.
times/second.
Sensors
include
VSGVSG
ringring
gyroscopes
andand
liquid-filled
tilt tilt
sensors.

Mark Bachman, EECS179 Fall Quarte

Mark Bachman, EECS179 Fall Quarter

Slide
Slide #21
#21

MEMS Gyroscope example

Applications on the horizon: Human motion sensing
VR, Human/Machine interface

Virtual Reality / Gaming

Consumer and game markets require lower performance specs and lower costs.
These represent an emerging market for inertial MEMS devices.

Mark Bachman,
Bachman, EECS179
EECS179 Fall
Fall Quarter
Quarter
Mark