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coherent illumination
Y. Ichioka and T. Suzuki
Department of Applied Physics, Faculty of Engineering, Osaka University, Yamadakami, Suita, Osaka, Japan
(Received 28 June 1975; revision received 1 May 1976)
Combined effects of amplitude and phase variations on the irradiance in the image of a periodic complex
object, which has amplitude and phase distributions, have been investigated for an optical system with
partially coherent object illumination. A general expression to obtain the illuminance in the image and the
image contrast of such an object is derived by use of the concept of the effective source specifying the
coherence condition. The irradiance in the image for the diffraction-limited aberration-free optical system
illuminated with bounded effective sources that have uniform and nonuniform radiance, and also with annular
illumination, have been calculated. Numerical calculations have been made to obtain the image, in which
harmonics up to the thirteenth order are taken into account. One of the results is that abrupt amplitude and
phase variations are extremely influential for the appearance of the image of a periodic, low-contrast, complex
object for any mode of illumination. On the other hand, less abrupt changes of the amplitude and phase in a
complex object produce less variation of the appearance and contrast of the image for any illumination mode
except annular illumination. Images of pure amplitude and phase objects have also been obtained by use of the
general treatment, and their characteristics are evaluated. It is suggested that a technique to manipulate the
radiance distribution in the effective source is valuable in improving the fidelity of the image of a periodic
complex object formed by an optical system under partially coherent illumination.
in a complex
Knowl-
served in a microscope, (ii) photographic optical density accompanied by a phase-changing relief image is
measured with a microdensitometer, and (iii) partially
coherent image processing by laser scanning' is carried
out.
of the systems
mentioned
921
in the illuminance
bias, is also calculated, and is compared with the appearance of the corresponding images.
A general expression for the image of a periodic complex object is obtained by modification of the formula
originated
U
FIG. 1.
Arrangement
coherent light.
Although many papers have been published on image
However, because
of the nonlinear property of the partially coherent optical system, these results have provided information
only about the combined effects of the amplitude and
complex object that has periodic structure. By representing the complex transmittance of the periodic complex object by a Fourier series, we can also calculate
the image irradiance as a Fourier series.
For a diffraction-limited optical system, numerical
calculation
in Ref. 1.
the
- s) el i
A2dx,
(1)
(2)
(3)
of Dirac delta
EAnA*
T(n, m) e2ri
(n-m)x0U,
(4)
T(n,m) =
yx)f(x
(5)
T7 (nym)=T
7 (m,n) , Ti(n,m)=-Ti(m,n),
Y. Ichioka and T. Suzuki
(6)
922
AMPLITUDE
TRANSMITTANCE
(A)
RELATIVE
PHASE
SHIFT
0\s
B)
0(u)
cos27rxu) exp(ZEBi
= (C +A
cos2nixou)
(9)
(7)
eiBi cosirJx0 u =
>inJ"
A(u')=
A and
we may rewrite
=E
N1
k=O
3E
3 ij-J'-j3'3
Z2
1 M
_ABi),n-i-a(Bl)}
I (11)
a= 2j2 +3j3 *
(O8)
cos (2fkxau'-o)
' * Jj,(BN)
+Ai[J,+,
{CJn-. (BI)
k=O
(10)
(B) e 2lfnjxOU
=E
E,
=(Dk
+
D(Ba)
Parameters
+NJN,
where
order n.
If N= 1, then
An = i'CJn(Bl) + 2Ain.1[Jn+l(B
1 ) -Jn-,(Bi)];
ok =
tan'(Da/D>),
( n-k
- )]
Djp= [ [PnkTr(n,f -k) +Q,,nnTi
(8b)
(8c)
An =3jn"mJ.(B
(8d)
2 .(B1
2 ){CJn_
(12)
- Jn_2m i(B1)]}.
) + 2Ai[Jna2m+i(Bi)
D' =
(13)
[QnkTr(f, n - k) - PTkTi (l, n
k)],
(8e)
and
Qnh= Ek(Rn
where
-k I-nR,,-,) ,
e 0 = 1 and Ek =
(8f)
(k 0).
In Eq.
Fourier coefficients, and E, and 0k indicate the amplitude and the image shift of kth harmonic in the irradiance in the image.
Equations (8) are the general expression for the image irradiance
of a periodic
are described
respectively.
by the parameters
Pn1,and Qnk,
mined, Rn and I,in Eqs. (8e) and (8f) for any n can be
in Eqs. (8) is repreobtained easily. Although I(u')
sented by double sums for n and k, it can be evaluated
by calculating a finite number of terms for n and k in
with the contrast of the object, B with the phase variation, and s 1 s 4 with the form of the object. This model
is suitable for assessment of the quality of the image of
a complex object formed by a practical image-forming
system such as a microscope, because most fine structures and characteristics in a practical object can be
described by combinations of seven parameters.
The real and imaginary parts of a trapezoidal complex object with a fundamental frequency x3 (=1/D) are
calculated to be
Y. Ichioka and T. Suzuki
923
(C-A)1s 2 sin7r(Bv(B
+
+[C(s 3
-s
2ns2)
sin2rnsl]
+sl
2ns2 - 2ns,)]
- 2ns 2 +2ns1)
2 )sincn(s 2
2ns2
2ns,)]\
w(B - 2ns2+22ns
1)
(A - C)[s4 sin2rns 4 +s3sinu(B - 2ns9)] (A - C)(s3 -s 4 ) sinc[ (B - 2ns3 +2ns4)]sin[ 7r(B- 2ns4 - 2ns3)]\
7T(B - 2ns3 +2nS4)
r(B - 2ns3 +2ns4 )
(14a)
In=[-As sinc(ns
1 )sin7Tns
1 + ((As2 -Csi)sinc[(Bn-2ns2+2nsi)]sin[7r(B-2ns2-2nsl)]
(C-A)[s 2 cos7T(B-2ns2)
-s cos2vnsl] + (C-A)(s2 -sl) sinc[#(B-2ns2 +2ns)] cos[7r(B-2ns2-2ns,)]1
b
I
-I n
/ -
(A
C)(s3 -s 4 )sinc['(B
2ns3 +2ns4)]sin[fT(B
-2ns
4 -2ns3 )]
cos[2(B
- 21s3+2nS4)
3
(B - 2ns3 +2ns4),
2ns 4 - 2ns3)]
+S4)3,
+ [-A(1 -s 4 ) sincn(1 -s4 )sinsn(1
(14b)
where sincx = sinrlx/rx. Adjusting seven object parameters appropriately, periodic complex objects with useful forms are determined, as shown in Table I. By use
of Eq. (14), the real and imaginary parts,
IfA=0andBOinEq.
(11)orA=CandB0QinEq.
and if A * C and B = 0,
OBJECT
MODEL BBJECT
PARAMETERS A, (FOURIER
COEFFICIENT)
A
P
A
A, B,C, Si-P
1
.,F1 L
l
P J
A
P
A /A,
lR
EQ.(14A)
I, EQ. (14B)
A, B, C
IN
EB.(14A)
In, 1sT! I
IN
EQ.(41A)
A, B, C,
R, 2ND! I
IN
EQ. (14A)
s-B, S=2S53=54=B
1n
IN
EQ. (14n)
= S2,3-=P,,
S4=D In
A
P
3RD! I1
2NDI ]
R0, 2ND! I
/-If
2ND!
4TH! I
1+ 4TH( I
5TH:
AA
-S2.S
A, B, C, s1 =P
1
S3'P2
S45P3
Pi
1 P2 , P3 ,
924
RB 1ST!
]
In : 1STy
RELATIVE
PHASE
SHIFT
EQ.
IN
(14a)
I
5TH
5TH! I
ND
(a)
IN EQ. (14A)
A.B, C,
R0 1ST! 1 + 2ND!] + 3RD!I
+ 3RD!
]
s1Pi,S2-P2,s3=s4=D In: 1ST! B + 2ND I]
In general, the flux transmittance of a periodic complex object, that has both amplitude and phase distributions, and the irradiance in the corresponding image
formed by an optical system under partially coherent
illumination, contain infinite numbers of harmonics.
Unfortunately, there is no linear relation between the
spatial frequency components in the object and the resultant image, because partially coherent optical systems are nonlinear for either complex amplitude or irradiance. Moreover, the image irradiance involves,
sometimes, frequency components which do not exist in
the flux transmittance of the original object due to nonlinear modulation of an object. Therefore, we cannot
define a useful measure such as the transfer function in
the incoherent case to evaluate system performance in
partially coherent illumination. Hence, to evaluate the
characteristics of the image of a periodic complex object in a partially coherent optical system, the terms
AMPLITUDE
TRANSMITTANCE
s2=P2. S3=P
, S4=P4
3
B, C.
IN
EC.(14A)
IN
EQ.(1B)n
N EQ.(14A)
AND P4 5B:
(b)
924
(b)
(a)
-1 x
1]
COHERENT
(c)
PAR.COHERENT PAR.COHERENT
r(x)=l
r(x)=l
FIG. 4.
(f)
(e)
(d)
Six effective
sources.
CTk=EEk/Eo,
Referring
to Eqs.
(15)
Sk
(16)
The effective sources are specified by six configurations depicted in Fig. 4, which are
may be specified by
PAR.COHERENT
2
r(x)=-x +1
PAR.COHERENT PAR.COHERENT
r(x)=x2
ANNULAR
ILLUMI.
(a)
y(x) = 6(x)
(b) y(x) = 1
for IxJ'1.0
(c) y(x) = 1
=0
for 0. 95 (R')-
Ix|
C 1. 0 (R)
(annular source);
(R)
otherwise,
=0
otherwise,
=0
(R)
otherwise,
(d) y (x =1
(f) y(x)=-x
otherwise,
=0
(e) y(x)=x
(coherent source);
otherwise
where R is the size of the effective source and is equivalent to the ratio of the condenser numerical aperture
to the objective numerical aperture. R plays an important role in describing the coherent condition of the
illuminating light.
tial-frequency component is treated, because the transmission cross coefficient has nonzero value for n, k
(positive) and spatial frequency x0 satisfying 0 kxo - 2,
I(n-k)xo+1 1_R, and Inx 0 -1I-R, otherwise it becomes zero.
series of the product of the transmission cross coefficient T(n, n - k) and the combined terms of the real and
imaginary parts of the object spectrum, in which the
transmission cross coefficient T(n, n - k) for any n and
k, can be evaluated by the overlapping area of three
mutually shifted functions y(x), f (x+nxo), and f*{x+ (n
- k)x0}. Fortunately, the numerical calculation of the
above infinite series can be made by taking sums of finite terms for limited n unless the extremely low-spa925
S4 = 0. 75.
The fundamen-
925
B=31T/2
B-3TV2
C
F-
F-
B= or
B-Tl
C,
B=Tr/2
C2:
<
_/
B=O
B-/
-D/2 -D/4
A-S
CS1 XD-0.18
A-A.7
COHERENT
A-A.5
A-1
C-1 X.o".18
A-A
A.0.7
BOUNDED
SOURCE
R_-U.
A5-.5
D/4 D/2
A-S
INCREASE
OF AMPLITUDE
CONTRAST
INCREASE
OF AMPLITUDE
CONTRAST
FIG. 7.
ment facilitates systematic evaluation of combined effects of amplitude and phase variations on the appearances of the images.
Figure 11 shows the image contrast of the images of
the square gratinglike complex objects under six illumination conditions shown in Fig. 4, in which curves
FT,and
ject), 0.7, 0.5, and 0 for A, and from the bottom to the
top, 0 (pure amplitude object), 21r, 7r,and 37rfor B, re-
the image contrast of the second harmonics is reversed. The image contrast of the second harmonic
component provides information about nonlinear effects
due to the partially coherent optical system and about
nonlinear modulation of the object, because there is no
harmonic components of the even order in the ideal
image of the square gratinglike complex object.
spectively. Further analysis shows that, for the diffraction-limited aberration-free optical system, images
for B= 37Tcoincide with those for B= 1FT.This arrange-
Careful observation of Figs. 5-11 reveals the following significant facts and phenomena related to combined
effects in the specified illumination modes:
B-32
-1
B-3 V2
1
C
F-
inLl_
C
02:
B."
B-fl
CD
C
I
(-I
B'W2
1)
CA
02
B-S
B-S
A-l
C-B Xo-.18
A-0.7
BOUNDED
SOURCE
R-0.5
A-0.5
INCREASE
OF AMPLITUDE
CONTRAST
FIG. 6.
A-1
C-B XSo.A18
A-0.7
A-,.5
ANNULAR
ILLUMINATION
INCREASEOF AMPLITUDE
CONTRAST
926
J-
B-3m'2
1
0
u>O ,
0
Oa(u) = ) 2(1 +AeiB) u=O
(17)
u<O.
(AeiB
F-
B--n
given by
CD
B-rV2
..
1.
B-0
A-1
A-0,7
A-0.5
SOURCE
RB- r(X)IX2
C 1 XSoA.18 BOUNDED
aries.
(ii) There is a rapid decrease in the amount of ringing in the image and a monotonic decrease in edge gra-
and
On the contrary,
(18)
by reduced coordinate,
CONTRAST
INCREASEOF AMPLITUDE
FIG. 9.
The
(19)
27T(A2 - 1)
2
Ci(X 1 )] }) ,
(20)
Equation (20) gives the irradiance in the diffractionlimited image of the edge object under annular illumination at all values of u' excepting u'=0, since Ci(O)=- co.
The image irradiance
the integral of the complex amplitude of the object spectrum within the diffraction-limited aperture. 12 By doing
so, the image irradiance at u' = 0 is obtained by
I,(u'= 0)
[7
[r2(1+A2+
2A cosB)
(21)
B-3'o'2
nO
ILnr
B-nV
1
0
<U
B-U
A-1
A-S.7
A-0.5
-D/2 -D/ 0 0
A2O
DD/2
to as the
C-1 Xo-.S18
SOURCE
R-i r(X)_-X.1
BOUNDED
FIG. 10. Same as Fig. 5 but with the bounded effective source
with nonuniform radiance distribution specified by yx =- x 2 + 1
in Fig. 4(f).
Y. Ichioka and T. Suzuki
927
COHERENT
A-O.25
C-D.0
BOUNDED
SOURCE
R-U.S T(DIA-0.25
C-D.O
FUNDAMENTAL
FUNDAMENTAL
X"
2.0
REDUCED
]UENCY
SPATIALFRE(
1.0
0o
1.D
(a)
Xo
2.0
REDUCED
SPATIAL
FREQUENCY
REDUCED
SPATIAL
FREQUENCY
(b)
(c)
ANNULAR
ILLUMINATION
R-S.D
A 0.25
C-D.O
BOUNDED
SOURCE
R-D.D
A-0.25
C-S.D
D-'1t2
FUNDAMENTAL
D-n
1.0
'
T(X)I-X201
20
2.D0 "
REDUCED
SPATIAL
FREQUENCY
Xo
Xo
REDUCED
SPATIAL
L___1_
(d)
(e)
(f)
FIG. 11. Effects of phase variations on the image contrast for the fundamental and second harmonic components in the image of
the square gratinglike complex object illuminated by six different effective sources in Fig. 4. Illuminating light sources to obtain
contrast curves are; (a) the coherent source in Fig. 4(a); (b) the bounded effective source with uniform radiance with R =0.5 in
Fig. 4(b); (c) the bounded effective source with uniform radiance with R=1.0 in Fig. 4(c); (d) the annular source in Fig. 4(d); (e)
the bounded effective source with nonuniform radiance specified by y(X)= x2 ; and (f) the bounded effective source with nonuniform
radiance specified by y(x)=- x2 +1 in Fig. 4(f).
AMPLITUDE
IRRADIANCE
on the
right- and left-hand sides in Fig. 12 indicate the behavior of the amplitude component of the diffractionlimited images of the edge objects and that of the cor-
responding image irradiance. The complex transmittance of the edge object is given by putting A= 0. 87 in
Eq. (17). Phase parameter B is changed for the figures
from the top to the bottom as 7T, 2ir, and 0. It is evident
B-TV2
A-O.87
C-1.D
the negative amplitude in the object. Thus, the diffraction-limited images of complex object that have sharp
boundaries of the amplitude and/or phase contain heavy
ringing and sharp dark lines (i. e., notches) at the location of sharp boundaries in the object. Quantitative dependence of these effects is clearly observed in the
image structure diagram in Fig. 5.
928
D-D
FIG. 12.
Generation
objects that have sharp boundaries of amplitude and phase under coherent illumination. The parameter A specifying amplituLdecontrast in Eq. (17) is 0. 87 for every figure, and tho
parameter B is Or, P21r,and 0 for the top, middle, and bottom
figures.
Y. Ichioka and T. Suzuki
928
.5
0
.0.
-1.
0
1.0
R=0.
735
1.0
-1.0
1.0
-1.0
.245
1.0
-1.0
-0.5
0.5
at
In'__R)
dR .
(24)
(COHERENT)
-1,0
)f=
IR=D(U'=
1.0
REDUCED
DISTANCE
From the fact that the annular source with R = 1 enables to enhance the edge structure, light radiated from
the source rim of the bounded effective source men-
source.
Si(X1)12+ [Ci(X2 )
0) = (l/7r2)In2[(1 +R)/(1-R)]
is given by
Ci(X)12},
(22)
(23)
at
in Figs.
...
1.
1t
1.01t-
Increase of the source size in the annular source corresponds to shift of the object spectrum
in the pupil
0. sI-
.I
S-
SI
Io
jects.
929
0.5
1.0
1.5
2.0
SOURCESIZE
FIG. 14.
B-31V2
1
C
at the
of the
in the
sharp
6 and 7.
I-Tr
LL
C>
B-O
termined
-D/2
A-1.0
C-IA. XI-.18
A-0.7
COHERENT
A-0.5
I
A-A
0/2
INCREASEOF AMPLITUDECONTRAST
jects that have trapezoidal amplitude and phase variations formed by an optical system illuminated with coherent source and the bounded effective source with
uniform radiance distribution in Figs. 4(a) and 4(c), respectively. Form factors of the object in Fig. 3 are deas s, =0. 1, s 2 = 0. 3, s 3 = 0. 5, S4 = 0. 8, and
B-3r42
If1
,2
B-rTr
l:E
,I-
C,
B-I2
"I
2'/'1+R
ym(R) ln
i-
R) dR =.
-D/2
A-.1.
C-1.0 Xa-.18
A-0.7
A-0.5
BOUNDED
SOURCE
R-1 r()-l
0
A-A
D/2
INCREASEOF AMPLITUDECONTRAST -
FIG. 16.
930
W=. 5
P-0,5
a0.8r
-B=O
U,
DISTANCE
REDUCED
the ringing effect and notches in the images of the complex objects due to a nonlinear system. Effect of this
bounded effective source with uniform radiance (R= 0. 5).
The complex amplitude of the original object is
(1 + - cos27x~u) exp(iB cos27Tx0u). Individual curves are
creases.
boundaries of amplitude and/or phase provide, sometimes, quite different appearances to an observer in accordance with difference of coherence conditions and
phase variations in the objects, even though the amplitude contrast in the objects is the same. Therefore, when
we observe
com-
to an observer.
(ii) In partially
of the
In addition,
we would like to
point out that the results of this paper indicate that appropriate consideration must be paid to coherence effects on measurement of photographic optical density
with a microdensitometer because variation of density
in an emulsion is accompanied by a phase-changing
relief.
Moreover, the results obtained also apply to partially
coherent image processing by changing laser systems,
because the image processing operations which can be
implemented in a conventional partially coherent optical system such as that analyzed here can also be implemented by a scanning laser. The detector spatial
sensitivity profile in the laser scanning system plays
the same role as the radiance distribution of the incoherent source in the system treated in this paper.
We also point out that the results are applicable to the
problem of image evaluation in electron microscopy to
some extent, because in such a field observation of the
low-amplitude contrast complex object with the high
degree of coherence of illumination is a very important
subject.
1
931
932
10
Copyright
932