FRACTAL GEOMETRY

APPLICATIONS IN MEMS

NEERAJA JOHN
R.No: 16
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Introduction

FRACTALS

Self similar designs.

Fractal geometry is used for several

electronic applications.

Fractals possess many interesting and

extremely useful properties.

Compact

Self scaling...

Introduction

MEMS

Miniaturized mechanical and

electromechanical devices and
structures.

Performance exceeds those of their

macroscale counterparts.

Same fabrication techniques similar to ICs

Properties of fractal geometry used in MEMS

technology largely

Contents

Fractal geometry

MEMS technology

Applications Review

Fractal Geometry

HISTORY

First appearance of fractal geometry work

by B. Mandelbrot : The Fractal
Geometry of Nature 1983

Many works appeared later onwards in

diverse field:
Environmental studies
Economics
Image processing
Communication
Nanotechnology, MEMS

Fractal Geometry

DEFINITION

Fractals provide a workable middle

ground between geometric order and
geometric chaos

Ordered or organized geometric chaos

Characterized by symmetries, which do

not vary under dilation and/or
contractions

Mathematical and natural fractals are

shapes whose roughness and
fragmentation remain unchanged as one
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zooms in continually

Fractal Geometry

PROPERTIES

Self similar structures

Each part is a geometric reduction
of the whole.
Same reduction ratio in all
directions.
Example: Sierpinski Gasket
May include self affine structures
also
Reduction ratios are different
in different directions

Fractal Geometry

Fractal Geometry

PROPERTIES

Simple rules can generate rich

structures
Algorithms that generate fractals are
very much short(simple).
Algorithms involves loops
Outputs will be fractals of rich
structures.
This simplicity is the key to fractal
geometry's effectiveness
e.g IFS algorithm
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Fractal Geometry

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Fractal Geometry

PROPERTIES

Self Assembly
Natural growth processes exhibit
fractal geometry
Can be used in fabrication
processes
More efficient at assembling vast
numbers of components
Constructs circuits by the addition of
material rather than the wasteful
removal of material

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Fractal Geometry

PROPERTIES

Huge surface area or perimeter

For example can be used to design

solar cells
Two merging patterns connect together
very efficiently
Enhanced information processing

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Fractal Geometry

DIFFERENT FRACTAL STRUCTURES

The von Koch curve

Koch islands

Cantor set

The Sierpinski triangle or gasket

The Sierpinski carpet

Julia set

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Fractal Geometry-Applications

FRACTAL CAPACITORS

Make use of lateral flux

Higher capacitance density

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Fractal Geometry-Applications

FRACTAL ANTENNA

Many antenna system components can be

made using fractals.
Loads
Counterpoises
Ground planes
Fractal inductors
Fractal resonators
Fractal filters
Excellent performance at many frequecies

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Fractal Geometry-Applications

FRACTAL ANTENNA

Very compact

Multiband or wideband

Perimeter of material that can receive or

transmit EM radiation within a given
surface area is increased

Larger resonant frequencies(>20GHz)

Can be assimilated into ICs

Applications:
Smartphones, RF MEMS electronics
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Satellite communication, etc.

Fractal Geometry in MEMS

MEMS

Micro Electro Mechanical Systems

Miniaturized mechanical and electromechanical elements

Physical dimensions of MEMS devices

are below one micron

Multiple moving elements under the

control of integrated microelectronic

Performances exceeding those of their

macroscale counterparts
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Fractal Geometry in MEMS

MEMS

Same fabrication techniques similar to ICs

MEMS structures can utilize fractals to improve

their performance

Main motivation: Reconfigurability

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Fractal Geometry in MEMS

Fractal capacitors applied to MEMS format

Capacitance can be generated in single

layer, far from substrate.

Significantly reduces parasitic capacitance

Increaes Q-factor and resonant frequency

Fractal structures increases capacitance

density

Commonly employed fractal shapes:

Moore's fractal
Koch Islands

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Fractal Geometry in MEMS

Fractal antennas applied to MEMS format

Antenna elements are shaped into a

fractal geometry

RF MEMS switches used to interconnect

portions of fractal geometry

Thus creating reconfigurable antennas

Electronic steering of the radiation

patterns are possible

Commonly employed fractal shapes:

Koch fractals
Size reduction and bandwidth increase

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Fractal Geometry in MEMS

TOOLS

CAD Layout generators

Accepts a technology file and a

fractal library input
Desired area and final shape is
provided by user
SEMulator3D

Gives 3D isometric view of gnerated

patterns
COMSOL

Finite element software package

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Overview

Many studies are progressing in this field

Fractal aplications in MEMS devices have
improved performance
Different tools aid us in genrating and
simulatin the fractal structures

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Questions?

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THANKYOU

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