en

GE Fanuc Automation
Computer Numerical Control Products
C Series Laser
Maintenance Manual
GFZ-70115EN/03
April 2000
GFL-001
Warnings, Cautions, and Notes

as Used in this Publication
Warning
Warning notices are used in this publication to emphasize that hazardous voltages, currents,
temperatures, or other conditions that could cause personal injury exist in this equipment or may
be associated with its use.
In situations where inattention could cause either personal injury or damage to equipment, a
Warning notice is used.
Caution
Caution notices are used where equipment might be damaged if care is not taken.
Note
Notes merely call attention to information that is especially significant to understanding and
operating the equipment.
This document is based on information available at the time of its publication. While efforts
have been made to be accurate, the information contained herein does not purport to cover all
details or variations in hardware or software, nor to provide for every possible contingency in
connection with installation, operation, or maintenance. Features may be described herein which
are not present in all hardware and software systems. GE Fanuc Automation assumes no
obligation of notice to holders of this document with respect to changes subsequently made.
GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory
with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or
usefulness of the information contained herein. No warranties of merchantability or fitness for
purpose shall apply.
Copyright 2000 GE Fanuc Automation North America, Inc.

All Rights Reserved.
B70115EN/03
Table of Contents
1. OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1
1.2
1.3
1.4
ORGANIZATION OF THE MANUAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

APPLICABLE MODELS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
RELATED MANUALS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TO USE THE LASER OSCILLATOR SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2
3
4
5
2. SAFETY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
LASER BEAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
HIGH VOLTAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
SAFETY ENCLOSURE (AT YOUR WORK STATION) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
FIRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
TOXIC FUME . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
HIGH TEMPERATURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
WARNING LABELS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
KEY CONTROL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
SHUTTER LOCK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
EMERGENCY STOP BUTTON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
WARNING LIGHT (OPTIONAL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3. INTERNAL STRUCTURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3.1
3.2
GENERAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
COMPONENT DETAILS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4. INSTALLATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
4.1
4.2
INSTALLATION PROCEDURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
PREPARATION PRIOR TO SHIPMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
4.2.1
Packing for Transportation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
4.2.2
Removing Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
4.3
DETAILS OF CHECKING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
4.4
OSCILLATOR CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
4.4.1
Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
4.4.1.1 Specification of the cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
4.4.1.2 Water treating agent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.4.1.3 Chemical cleaner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.4.1.4 Antifreezing agent . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
4.4.2
Laser Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4.2.1 Laser gas specification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4.2.2 Gas pipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4.3
Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
4.4.3.1 NCtooscillator connection and power supply cable connection . . . . . . . . . . . . . . . . . . . . . . 95
4.4.3.2 Details of safety circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
4.4.4
Interunit Connections (C3000C Only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4.4.4.1 Electrical cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4.4.4.2 Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4.4.4.3 Connection of cooling water pipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4.4.4.4 Gas piping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
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B70115EN/03
5. MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110
5.1
5.2
5.3
DAILY INSPECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PERIODIC MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DETAILS OF MAINTENANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.1
Turbo Blower Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.2
Exhaust Pump Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.3
Exhaust Pump Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.3.4
Exhaust System Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
5.4
MAINTENANCE PARTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
111
112
114
117
119
119
121
123
6. TROUBLESHOOTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
6.1
6.2
6.3
6.4
TROUBLESHOOTING PROCEDURE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ERROR MESSAGES AND COUNTERMEASURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
RESPONDING TO ALARM MESSAGES ON THE SCREEN . . . . . . . . . . . . . . . . . . . . . . . . . . . .
MAJOR FAULTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.1
Laser Power Supply Alarm Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.2
Power Supply cannot be Switched off Using CRT/MDI Switch. . . . . . . . . . . . . . . . . . . . . . . .
6.4.3
Power Supply cannot be Switched on Using CRT/MDI Switch. . . . . . . . . . . . . . . . . . . . . . . .
6.4.4
Laser Output Just After Switch on is Low. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.5
Display of Fluctuating Laser Output on CRT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.6
Nonfuse Breaker for Cooling Fans, Electromagnetic Valves;
and Stabilized Power Sources is Tripping. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.7
Electromagnetic Contactor of Vane Pump Trips Thermally. . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.8
Main Breaker Trips. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.9
Excessive Laser Gas Consumption . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.4.10 Highfrequency Inverter Alarm Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5
OBSERVING VOLTAGE OF POWER LINE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.1
Measurement of Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.2
Phase Relation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.3
Measurement of Voltage of DC Power Supply Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.4
Checking the IF PCB Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.5.5
Checking the Jumper Pins (FS16L, 16iL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6
INDICATION OF STATE BY MEANS OF SELF DIAGNOSTIC FUNCTION . . . . . . . . . . . . . . .
6.6.1
Data Items Displayed on the Diagnosis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6.2
Laser Oscillator Status Display (FS16L, 16iL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
6.6.3
Laser Oscillator Status Display (FS0L) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
135
135
136
157
157
159
159
159
160
160
161
161
162
162
165
165
165
166
170
170
171
171
173
180
7. OSCILLATOR CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186

7.1
7.2
7.3
ELECTRICAL CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187

COOLING WATER PIPING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194
GAS PIPING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
8. UNIT CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210

8.1
8.2
8.3
INPUT UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211

INTERMEDIATE PCB B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228
PRESSURE CONTROL UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
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9. SETTING AND ADJUSTMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232

9.1
9.2
9.3
9.4
9.5
9.6
9.7
9.8
LASER POWER SUPPLY UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

9.1.1
Checking before Adjustment, and Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2
Base Discharge Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.1 C1500B (without a trigger electrode) (step 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.2 C2000B (step 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.3 C3000C (step 1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.4 C2000B, C3000C (step 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.5 C6000B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.6 C1500B (with a trigger electrode), C2000C, C3000D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.2.7 C4000A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.3
Maximum Output Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.4
Fine Adjustment of VR11 and VR13 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.5
Pulse Output Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.6
Completion of Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.1.7
Alarm Level of Laser PSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TURBO PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
HIGHFREQUENCY INVERTER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.3.1
Adjusting the Inverter (A90L00010382/C: Model Name: HFCVAH2) . . . . . . . . . . . . . . .
9.3.2
Adjusting the Inverter (A90L00010464/CE and 0465/CE: Model Name: JH300) . . . . . . .
PRESSURE CONTROL UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.4.1
Setting the Gas Supply Pressure Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.4.2
Setting the Atmospheric Pressure Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ADJUSTING THE EXHAUST CONTROL UNIT
(ADJUSTING THE LASER GAS CONSUMPTION) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SETTING THE POWER INPUT COMPENSATION COEFFICIENT . . . . . . . . . . . . . . . . . . . . . .
WATER FLOW SENSOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
9.7.1
Adjusting the Water Flow Sensor for C1500B, C2000B, and C3000C . . . . . . . . . . . . . . . . . .
9.7.2
Adjusting the Flow Sensor of the C2000C, C3000D, C4000A, and C6000B . . . . . . . . . . . . .
DISCHARGE AGING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
233
233
235
235
235
236
236
236
238
238
240
240
241
241
243
245
248
248
251
258
258
258
260
261
262
262
264
265
10. REPLACEMENT PROCEDURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272

10.1 INPUT UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.1 Replacing the Stabilized Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.2 Replacing the Input Unit Control PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.1.3 Replacing the FS0L Interface PCB (A16B11100223) on the Oscillator Side . . . . . . . . . .
10.1.4 Replacing the FS16L, FS16iL Interface PCBs on the Oscillator Side . . . . . . . . . . . . . . . . .
10.2 REPLACING THE LASER POWER SUPPLY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.3 REPLACING THE MATCHING BOX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.4 REPLACING THE TURBO BLOWER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.5 REPLACING THE TURBO PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.6 REPLACING INTERMEDIATE PCB B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.7 REPLACING THE EXHAUST PUMP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.8 REPLACING THE PRESSURE CONTROL UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.9 REPLACING THE EXHAUST CONTROL UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.10 REPLACING A DISCHARGE TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.11 REPLACING A FAN UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
c3
273
273
273
273
274
276
288
289
292
292
293
295
296
299
300
TABLE OF CONTENTS
B70115EN/03
10.11.1 Replacing a Fan Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10.11.2 Replacing a Fanassisted Radiator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.12 REPLACING THE POWER SENSOR UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13 REPLACING THE SHUTTER SECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.1 Replacing the Shutter Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.2 Replacing the Shutter Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.13.3 Replacing the Shutter Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.14 REPLACING THE BEAM ABSORBER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.15 REPLACING THE HIGHFREQUENCY INVERTER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.16 REPLACING THE WATER DISTRIBUTION UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.17 REPLACING THE FLOW SENSOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.18 REPLACING THE DEW SENSOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.19 REPLACING THE SEMICONDUCTOR LASER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
10.20 REPLACING THE TRIGGER ELECTRODE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
300
300
301
302
302
302
302
305
309
310
319
321
321
322
11. LASER OPTICAL SYSTEM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324

11.1
CLEANING OPTICAL PARTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.1
Cleaning and Replacing the Output Coupler . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.2
Cleaning and Replacing the Rear Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.3
Cleaning and Replacing the Folding Mirrors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.1.4
Cleaning and Replacing the Zeroshift Mirror and Circular Polarization Mirror . . . . . . . . . .
11.2
OPTICAL AXIS ADJUSTMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1
Alignment of the Resonator (Maximum Power Method) . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.1 Method of obtaining a maximum power by adjusting all mirrors . . . . . . . . . . . . . . . . . . . . . .
11.2.1.2 Alignment procedure during installation after transportation . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.3 Alignment procedure at mirror cleaning time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.4 Obtaining a maximum power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.1.5 Burn pattern collection and beam mode evaluation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.2
Alignment of the Laser Diode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.2.1 Adjusting the beam center of the laser diode beam superimposed on the CO2 laser beam . .
11.2.2.2 Adjusting the diameter of the laser diode beam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
11.2.3
Alignment of the Beam Folding Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
325
330
334
336
339
341
341
341
343
344
345
346
354
354
354
356
APPENDIX
A. EXTERNAL VIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 363
B. FANUC LASER C SERIES SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 379
C. ERROR CODE LIST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 383
D. PARAMETERS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 385
D.1
D.2
PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS . . . . . . . . . . . . . . . . . . 386

PARAMETERS FOR DISCHARGE TUBE SELECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 392
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TABLE OF CONTENTS
B70115EN/03
D.3
D.4
D.5
D.6
D.7
D.8
D.9
D.10
D.11
D.12
D.13
D.14
D.15
D.16
D.17
D.18
D.19
D.20
D.21
D.22
D.23
D.24
D.25
D.26
PARAMETERS FOR CONTOURING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

PARAMETERS FOR EDGE MACHINING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR PIERCING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR HIGHSPEED PIERCING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR POWER CONTROL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS . . . . . . .
PARAMETERS FOR THE OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR DISCHARGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR GAS CONTROL (1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR LASER POWER/VOLTAGE DROP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR POWER TABLE SETTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
AUTOMATIC AGING FUNCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (DETECTION) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (DISPLAY) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (INTEGRAL PROCESSING) . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (PHASE COMPENSATION) . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (DISPLACEMENT) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (FEEDRATE COMMAND) . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR TRACING (APPROACH) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR CONSTANT OPTICAL PATH LENGTH CONTROL . . . . . . . . . . . . . . . . .
LASER GAS MIXER FUNCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
PARAMETERS FOR GAS CONTROL (2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
393
394
396
397
399
402
405
406
410
412
416
417
419
421
426
428
429
430
431
433
434
435
437
439
E. CONTROL SEQUENCES IN LASER OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . 441

E.1
E.2
E.3
E.4
OUTLINE OF LASER OSCILLATION SEQUENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

INTRATUBE GAS PRESSURE CONTROL SEQUENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TUBE VOLTAGE CONTROL SEQUENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
OSCILLATION SEQUENCES FLOW CHART . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
442
444
447
450
F. REFIXING AND REPLACING GAS TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456

F.1
F.2
REFIXING TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 457

REPLACING TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 458
G. REFIXING AND REPLACING WATER TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459

G.1
G.2
REFIXING TUBE TO BRASS FITTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460

REPLACING TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 461
H. GLOSSARY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 462
c5
1. OVERVIEW
B70115EN/03
OVERVIEW
This manual describes the maintenance of the FANUC LASER C series,

as well as the structure, configuration, and operation of the laser oscillator.
This manual is aimed at those personnel responsible for laser oscillator
maintenance.
1. OVERVIEW
B70115EN/03
1.1
This manual is organized as described below.
ORGANIZATION OF
THE MANUAL
1. Overview
This chapter describes the organization of this manual, applicable
models, related manuals, and notes on reading this manual.
2. Safety
This chapter describes the handling of lasers, and provides warnings,
cautions and notes on high voltages, high temperatures, and toxicity.
All users must read this chapter carefully to ensure safety.
3. Internal Structure
This chapter describes the structure and operation of the laser
oscillator.
4. Installation
This chapter describes the installation and checking of the laser
oscillator.
5. Maintenance
This chapter provides information on when and how the consumable
parts of the laser oscillator must be replaced.
6. Troubleshooting
This chapter describes the actions to be applied in the event of a fault
occurring in the laser oscillator.
7. Oscillator Connections
This chapter describes the internal connections of the electrical
system, cooling system, and gas system.
8. Unit Configuration
This chapter describes the internal units of the laser oscillator.
9. Setting and Adjustment
This chapter describes how to set and adjust the controls of the laser
oscillator.
10.Replacement Procedures
This chapter describes how to replace the individual units and parts of
the laser oscillator.
11.Laser Optical System
This chapter describes how to clean, replace, and align the optical
components of the laser oscillator.
Appendix
1. Appearance of the Laser Oscillator
2. FANUC LASER C series Specifications
3. Error Code List
4. Parameters
5. Control Sequences in Laser Oscillator
6. Refixing and Replacing Gas Tube
7. Refixing and Replacing Water Tube
8. Glossary
1. OVERVIEW
1.2
APPLICABLE
MODELS
B70115EN/03
This manual covers the following models :

Models
Abbreviation
FANUC LASERMODEL C1500B
C1500B
C2000B
FANUC LASERMODEL C2000C
C2000C
FANUC LASERMODEL C3000C
C3000C
FANUC LASERMODEL C3000D
C3000D
FANUC LASERMODEL C4000A
C4000A
C6000B
1. OVERVIEW
B70115EN/03
1.3
The following manuals are available for the FANUC LASER C series :
RELATED MANUALS
FANUC Series 0L
DESCRIPTIONS
B61572E
CONNECTION MANUAL B61573E
OPERATORS MANUAL B61574E
MAINTENANCE MANUAL B61575E
FANUC Series 16LA
DESCRIPTIONS
B61852E
OPERATORS MANUAL B61854E
PARAMETER MANUAL B61810E
FANUC Series 16LB
DESCRIPTIONS
B62442E
CONNECTION MANUAL
(HARDWARE)
B62443E
CONNECTION MANUAL
(FUNCTION)
B62443E1
OPERATORS MANUAL B62594EN
PARAMETER MANUAL B62600EN
FANUC Series 16iLA
DESCRIPTIONS
B63192EN
CONNECTION MANUAL B63193EN
OPERATORS MANUAL B63194EN
MAINTENANCE MANUAL B63195EN
PARAMETER MANUAL B63200EN
FANUC LASER C Series OPERATORS MANUAL B70114EN

MAINTENANCE MANUAL B70115EN
(This manual)
1. OVERVIEW
1.4
TO USE THE LASER
OSCILLATOR
SAFETY
B70115EN/03
In this manual, the words Warning and Caution, corresponding to

different levels of safety requirements, are provided to ensure the users
safety and protect against damage to the laser oscillator.
Moreover, sections entitled Note are used to provide supplementary
information.
Before attempting to use the laser oscillator, read Section 2.1 to 2.11, and
also the descriptions in the Warnings, Cautions, and Notes that appear in
the text.
Warning : Warnings are provided where there is a danger of death or
serious injury if the laser oscillator is handled incorrectly.
Caution : Cautions are provided where there is a danger of injury or
damage to the laser oscillator if the laser oscillator is handled
incorrectly.
Note
: Notes provide supplementary information other than

Warnings and Cautions.
Before starting any maintenance work, take time to become familiar with
the functions of the individual units constituting the laser oscillator, the
relationships between the units, and the locations where the units are
installed.
WARNING
Never attempt handling, adjustment, or replacement work
using a method or procedure other than those described
and specified in this manual. Otherwise, dangerous laser
light may be emitted.
The function of the laser machining system depends not only on the laser
oscillator but also on other system components such as the machine,
power magnetics cabinet, servo system, CNC, and operators panel. This
manual covers the laser oscillator only. For information about equipment
other than the laser oscillator, refer to the appropriate manuals provided
by the machine tool builder.
Take time to become familiar with the contents of this manual. Store this
manual in a safe place.
10
2. SAFETY
B70115EN/03
SAFETY
C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B

produce the rated output laser power of 1500W, 2000W, 3000W, 4000W,
6000W. The CO2 laser beam is the wavelength of 10.6 mm, far infrared,
and is invisible to human eyes. The adequate care must be taken when
CO2 laser is operated, therefore. When removing the panel, always turn
the power source off and confirm no power is applied to the laser machine.
This oscillator fulfills the requirements of the relevant product safety
standard of EN608251:1994.
11
2. SAFETY
2.1
LASER BEAM
B70115EN/03
1) Potential hazards
Laser oscillator emits CO2 laser beam(10.6 mm), which is high power
and invisible.
D Being directly exposed to the CO2 laser beam could severely burn
you.
D The CO2 laser beam could be scattered by your workpiece and burn
your eyes or skin.
FANUC LASER C series have a laser diode. The laser diode beam
is visible (red) and low power. It is used to ensure that the CO2 laser
beam is correctly positioned on your workpiece.
D The laser diode beam is not considered harmful to your skin. But
if you stared head on into the laser diode beam, it could harm your
eyes.
2) Safety recommendations
Never expose the eyes and skin to the laser beam. Be careful of the
laser beam when the inspection and maintenance.
Do not turn on the power supply to the oscillator when the door and
panel open and do not drive. It is exposed to radiation of the laser beam
and high voltage.
Do the countermeasure (For instance, installing safety glasses and the
protection gloves) to danger in case of stopping no finish and nor
opening the panel while it energizes the oscillator.
Install beam safety cover after mirror cleaning or replacement. If not
beam safety cover installation, do not operation and alignment.
Confirm the protection pipe (Safety cover) is installed. If it dose not
install the protection pipe, it will put the finger in the laser beam and
there is possibility to be burned.
When entering the area exposed to the scattered beam, wear the safety
glasses. Mount the stand made of acrylic resin or any material which
can absorb the CO2 laser beam to protect the personnel from the
scattered beam.
Avoid exposure of any part of your body to the CO2 laser beam.
When testing the beam output, any personnel other than the
maintenance personnel should be out of the working environment.
In designing a material processing machine utilizing FANUC LASER
C series, be sure that the CO2 laser beam goes from laser to the
workpiece only through the enclosed beam delivery system. This
prevents the exposure to laser beam by the operator switch could
otherwise take place. It is absolutely necessary to include the
instructions given here in the manuals of the laser materialprocessing
machine as a whole, which are to be read.
3) Position of laser beam emission
Fig. 2.1 (a) is the position of panel that laser beam exposure is
occurred without panel in C1500B, C2000B, C2000C,
C3000C, C3000D, when you maintain the oscillator.
Fig. 2.1 (b) is the position of panel that laser beam exposure is
occurred without panel in C4000A, when you maintain
the oscillator.
12
2. SAFETY
B70115EN/03
Fig. 2.1 (c) is the position of panel that laser beam exposure is
occurred without panel in C6000B, when you maintain
the oscillator.
Fig. 2.1 (d) is the beam path in the cabinet of C1500B, C2000B,
C2000C.
Fig. 2.1 (e) is the beam path in the cabinet of C3000C, C3000D.
Fig. 2.1 (f) is the beam path in the cabinet of C4000A.
Fig. 2.1 (g) is the beam path in the cabinet of C6000B.
Fig. 2.1 (a) The position of panel that laser beam exposure is occurred without panel in
C1500B, C2000B, C2000C, C3000C, C3000D.
Fig. 2.1 (b) The position of panel that laser beam exposure is occurred without panel in C4000A.
13
2. SAFETY
B70115EN/03
Fig. 2.1 (c) The position of panel that laser beam exposure is occurred without panel in C6000B.
Fig. 2.1 (d) The beam path in the cabinet of C1500B, C2000B, C2000C.
14
2. SAFETY
B70115EN/03
Fig. 2.1 (e) The beam path in the cabinet of C3000C, C3000D.
Fig. 2.1 (f) The beam path in the cabinet of C4000A.
15
2. SAFETY
B70115EN/03
Fig. 2.1 (g) The beam path in the cabinet of C6000B.
16
2. SAFETY
B70115EN/03
2.2
HIGH VOLTAGE
There is RF voltage of 3 to 4kVop in the cabinet of the laser oscillator.
There is 200 VAC power in the relay panel, be careful not to touch the
high voltage.
When it checks the oscillator and exchange the unit, intercept a main
breaker of the oscillator and the power supply. Lock the breaker to
prevent misconnection and display the sign while working.
Install safety cover after unit replacement or cable connection. Unless
safety cover is installed, never start operation.
Follow standard industrial safety practices for working with high
voltage.
EXAMPLES
D Do not work on the laser oscillator if you are tired or have taken
medicine.
D Use the buddy system.
D Do not wear anything metal, like a ring, bracelet, watch, belt
buckle, earrings, or keys.
D They might contact high voltage.
D Never stand on a wet surface.
D Do not touch electrical components in the cabinets with both hands
at once. Keep one hand in a pocket.
3) Position of high voltage
Fig. 2.2 (a) is the position of high voltage in C1500B (Front side,
Back side).
Fig. 2.2 (b) is the position of high voltage in C2000B (Front side,
Back side).
Fig. 2.2 (c) is the position of high voltage in C2000C (Front side,
Back side).
Fig. 2.2 (d) is the position of high voltage in C3000C (Front side,
Back side,AUX ).
Fig. 2.2 (e) is the position of high voltage in C3000D (Front side,
Back side).
Fig. 2.2 (f) is the position of high voltage in C4000A (Front side,
Back side).
Fig. 2.2 (g) is the position of high voltage in C6000B (Front side,
Back side).
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2. SAFETY
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Front side
Back side
Fig. 2.2. (a) The position of high voltage in C1500B (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.2. (b) The position of high voltage in C2000B (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.2.(c) The position of high voltage in C2000C (Front side, Back side)
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2. SAFETY
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Front side
Back side
Auxiliary unit
Fig. 2.2.(d) The position of high voltage in C3000C(Front , Back , AUX )
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2. SAFETY
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Front side
Back side
Fig. 2.2.(e) The position of high voltage in C3000D(Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.2.(f) The position of high voltage in C4000A (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.2.(g) The position of high voltage in C6000B (Front side, Back side)
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2. SAFETY
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2.3
SAFETY
ENCLOSURE (AT
YOUR WORK
STATION)
2.4
FIRE
CO2 laser beam is delivery from oscillator. Direct or scattered beam
is exposed.
Mount the safety enclosure made of acrylic resin which can absorb the
laser beam around the working environment.
Mount the interlock switch on the safety enclosure door which
extinguishes the laser beam output when the door is open. Never
perform operation without safety cover of laser machine.
When you work with the laser oscillator or machine, hot fragments or
slag can scatter from your workpiece. The CO2 laser beam or a
reflection of it could ignite flammable material.
The direct or scattered laser beam can ignite flammable materials such
as paper, cloth, and wood. Provide a beam absorber behind the
workpiece and around it during maintenance. The absorber can be
anodized aluminum, graphite or brick.
Put a shield between yourself and the workpiece when the CO2 laser
beam is on. Even diffuse reflections can harm eyes and skin and may
ignite flammable material.
2.5
TOXIC FUME
Some materials such as certain plastics can emit toxic fume when they
burn under the laser beam.
Install the exhaust system to remove toxic fume from the work
environment.
Consult the manufacturer of the material you are processing to learn
if it creates any fumes when heated or burned.
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2. SAFETY
2.6
HIGH TEMPERATURE
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When you touch a part of high temperature, your skin burn.
The pipes of the gas circular system are very a high temperature. Do
not touch pipes, heat exchanger and turbo blower because it does not
do the burn. It is hot immediately after having stopped driving. After
getting cold enough in case of removing, dismount it.
3) Position of high temperature
Fig. 2.6 (a) is the position of high temperature in C1500B (Front side,
Back side).
Fig. 2.6 (b) is the position of high temperature in C2000B (Front side,
Back side).
Fig. 2.6 (c) is the position of high temperature in C2000C (Front side,
Back side).
Fig. 2.6 (d) is the position of high temperature in C3000C (Front side,
Back side, Aux).
Fig. 2.6 (e) is the position of high temperature in C3000D (Front side,
Back side).
Fig. 2.6 (f) is the position of high temperature in C4000A (Front side,
Back side).
Fig. 2.6 (g) is the position of high temperature in C6000B (Front side,
Back side).
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2. SAFETY
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Front side
Back side
Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side)
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2. SAFETY
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Front side
Back side
Auxiliary unit
Fig. 2.6 (d) The position of high temperature in C3000C (Front , Back, Aux)
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2. SAFETY
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Front side
Back side
Fig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side)
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2. SAFETY
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Front side
Back side
Fig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side)
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2. SAFETY
2.7
WARNING LABELS
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Fig. 2.7 (a)(g) show the location of the warning labels indicating the high
voltage and laser beam path.
Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (b) is the location of the warning sticker at back side. (C1500B,
C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) is the location of the warning sticker (Auxiliary unit of
C3000C)
Fig. 2.7 (d) is the location of the warning sticker at front side. (C4000A)
Fig. 2.7 (e) is the location of the warning sticker at back side. (C4000A)
Fig. 2.7 (f) is the location of the warning sticker at front side. (C6000B)
Fig. 2.7 (g) is the location of the warning sticker at back side. (C6000B)
Fig. 2.7 (a) The location of warning sticker at front side (C1500B, C2000B, C2000C, C3000C, C3000D)
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2. SAFETY
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Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D)
Fig. 2.7 (c) The location of the warning sticker (Auxiliary unit of C3000C)
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2. SAFETY
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Fig. 2.7 (d) The location of warning sticker at front side. (C4000A)
Fig. 2.7 (e) The location of warning sticker at back side. (C4000A)
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2. SAFETY
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Fig. 2.7 (f) The location of warning sticker at front side. (C6000B)
Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B)
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2. SAFETY
D Detail of warning sticker
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1) Warning logotype (C1500B)
7000W
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2. SAFETY
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2) Warning logotype
3) Label for defeasible noninterlocked protective housing
4) Label for defeasible noninterlocked protective housing
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2. SAFETY
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5) Caution label for lifting
6) Aperture label
7) Label of noninterlocked protective panel
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2. SAFETY
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8) Identification label
9) Address label
10) High voltage warning label
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2. SAFETY
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11) Supply voltage label
12) Label of overcurrent protective
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2. SAFETY
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13) Label of motor and transformer (C1500B,C2000B,C2000C)
13) Label of motor and transformer (C3000C)
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2. SAFETY
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13) Label of motor and transformer (C3000D)
13) Label of motor and transformer (C4000A)
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2. SAFETY
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13) Label of motor and transformer (C6000B)
14) Label of warning light
15) Maintenance label
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2. SAFETY
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16) Certification label
17) Shortcircuit interrupting capacity of main breaker
18) Caution label for lifting
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2. SAFETY
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2.8
KEY CONTROL
All the laser products have to comply with the various kinds of laser safety
regulations, which include the use of key control. For instance, FDA
PART
1040
PERFORMANCE
STANDARDS
FOR
LIGHTEMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: Each
laser system classified as a Class III or IV laser product shall incorporate
a keyactuated master control. The key shall be removable and the laser
shall not be operable when the key is removed and EN608251:1994, 4.5
Key control state Any laser system belonging to one of the following
classes shall incorporate a key operation master control: Class 4 and Class
3B, except for Class 3B with not more than five times the AEL of Class
2 in the wavelength range from 400 nm to 700 nm. The key shall be
removable and the laser radiation shall not be accessible when the key is
removed.
Because the laser package products offered by FANUC cannot produce
the laser beam as they are in the state of shipment, the system integrator
who incorporates FANUC products into the system, which generates the
laser beam, is obliged to incorporate the master key as defined by the
relevant regulation.
2.9
SHUTTER LOCK
The shutter lock is prepared because it dose not put out the laser beam by
mistake. If you do not put out the beam, lock the shutter.
Use the mechanical switch at shutter lock switch, not electrical
component (Relay)or switching circuit (Transistor, FET).
Use the one with the compulsion dissociation mechanism for the switch
used for the shutter lock circuit and the switch for welding prevention.
To designer of laser processing machine
1. Use a mechanical switch for the switch used to lock the
shutter. Do not use an electric switch (For instance,
transistor circuit, etc.). Moreover, use the one with the
contact dissociation mechanism to prevent welding for a
mechanical switch.
2. Put it in the series of the contact of the emergency stop
button in the shutter lock circuit. When the emergency stop
switch is pushed, it is necessary to intercept the power
supply to the shutter.
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2. SAFETY
2.10
EMERGENCY STOP
BUTTON
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Press the emergency stop button when it is dangerous and breaks down.
The oscillator is stopped discharging, gas pressure control and stand by
purge state.
Use the one with the compulsion dissociation mechanism for the relay
used for the emergency stop circuit and the switch for welding prevention.
2.11
WARNING LIGHT
(OPTIONAL)
FANUC LASER C series are equipped with the warning light optionally.
The light is flashed during discharging and ready of laser beam emission.
Be careful of laser beam and high voltage.
To designer of laser processing machine

In 4.6 of EN608251, it needs the design with the fail safe
or redundant for warning equipment. The redundant
warning light is needed near the workpoint of processing
machine. The warning light is prepared for the oscillator.
Select this as a warning light more than the second for the
fail safe.
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3. INTERNAL STRUCTURE
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INTERNAL STRUCTURE
49
3.1
GENERAL
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Fig. 3.1 (a) to (g) show the block diagram of the laser oscillator.
The FANUC LASER C series consists of a laser resonator, laser excitation
power supply, forced gas circulating system, pressure controller, exhaust
controller, CNC interface, and a protective housing.
(1) Laser resonator
The laser resonator consists of several discharge tubes, connected in
series using folding mirrors, with a rear mirror and output mirror
placed at the open ends of the discharge tubes, thus sealing the tubes.
The resonator is fitted with a gas pipe connecting port through which
laser gas is fed into the discharge tubes.
A discharge from the electrodes of the discharge tube energizes CO2
molecules, which emit light. This light is amplified by stimulated
emission, repeated between the rear mirror and output mirror, a laser
beam being emitted from the output mirror.
(2) Laser excitation power supply
This is a 2 MHz highfrequency power supply, the output of which
is controlled by the CNC. This power supply is used to create a
discharge in the laser gas flowing through the discharge tubes, thus
energizing CO2 molecules.
(3) Forced gas circulating system
A gas circulating system is configured by connecting the resonator and
turbo blower with a circulating pipe. Laser gas is forced through the
discharge tubes at a speed of 200 m/s or higher.
A watercooled heat exchanger, used to cool the hightemperature gas
from the discharge tubes, is provided at the inlet side of the turbo
blower. At the outlet side of the turbo blower, another watercooled
heat exchanger dissipates the compression heat.
(4) Pressure control unit
The laser gas pressure within the forced gas circulating system is
controlled by commands issued from the CNC, thus ensuring stable
laser output.
(5) Exhaust control unit
The laser gas flow is controlled by commands issued from the CNC.
(6) CNC interface
Interface used to connect a FANUC Series 0L, 16L, or 16iL. CNC
commands that, control the operation of the laser oscillator, such as
start/stop and laser output, are input via this interface.
(7) Protective housing
An enclosure that houses the above components. The housing,
consisting of metal panels and doors, completely encloses the laser
oscillator, thus protecting the operator from exposure to laser radiation
and from high voltages. All panels are screwfixed and cannot be
removed without an appropriate tool. The doors are also designed to
prevent an accident from occurring as a result of careless operation.
The doors can be opened only when the main circuit breaker is open.
A door interlock function is also supported.
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Fig. 3.1 (a) Block diagram (C1500B)
51
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Fig. 3.1 (b) Block diagram (C2000B)
52
(TO CNC)
SIGNAL
CABLE
53
Fig. 3.1 (c) Block diagram (C2000C)
HOUR
METER
EXHAUST
GAS
EXHAUST
PUMP
EXHAUST
CONTROLLER
FOLDING
MIRROR
FOLDING
MIRROR
STABILIZED
PSU
INPUT
UNIT
INLET
H/E
LASER
GAS
PRESSURE
CONTROLLER
TURBO
BLOWER
TUBE
HF
INVERTER
TURBO PCB
OUTLET
H/E
DISCHARGE
TUBE
TUBE
DISCHARGE
DISCHARGE
TUBE
MATCHING
BOX
MATCHING
BOX
DISCHARGE
LASER
PSU UNIT
LASER
PSU UNIT
REAR
MIRROR
OUTPUT
COUPLER
DEW
SENSOR
SHUTTER
UNIT
FROM
PARTS
WATER
FLOW
SENSOR
BEAM
ABSORBER
WATER
DISTRIBUTOR
TO
PARTS
POWER
SENSOR
GUIDE
LASER
BEAM
FOLDING
UNIT
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Fig. 3.1 (d) Block diagram (C3000C)
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(TO CNC)
SIGNAL
CABLE
55
Fig. 3.1 (e) Block diagram (C3000D)
REAR
MIRROR
EXHAUST
GAS
EXHAUST
PUMP
EXHAUST
CONTROLLER
POWER
SENSOR
FOLDING
MIRROR
FOLDING
MIRROR
STABILIZED
PSU
INPUT
UNIT
TUBE
TUBE
LASER
GAS
INLET
H/E
TURBO
BLOWER
MATCHING
BOX
LASER
PSU UNIT
OUTLET
H/E
DISCHARGE
TUBE
TUBE
DISCHARGE
TUBE
TUBE
DISCHARGE
DISCHARGE
DISCHARGE
MATCHING
BOX
LASER
PSU UNIT
MATCHING
BOX
DISCHARGE
PRESSURE
CONTROLLER
MATCHING
BOX
LASER
PSU UNIT
HF
INVERTER
TURBO PCB
HOUR
METER
FOLDING
MIRROR
FOLDING
MIRROR
OUTPUT
COUPLER
DEW
SENSOR
SHUTTER
UNIT
SENSOR
FLOW
WATER
FROM
PARTS
WATER
DISTRIBUTOR
TO
PARTS
BEAM
ABSORBER
GUIDE
LASER
BEAM
FOLDING
UNIT
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(TO CNC)
SIGNAL
CABLE
56
Fig. 3.1 (f) Block diagram (C4000A)
EXHAUST
GAS
EXHAUST
PUMP
EXHAUST
CONTROLLER
FOLDING
MIRROR
FOLDING
MIRROR
FOLDING
MIRROR
FOLDING
MIRROR
STABILIZED
PSU
INPUT
UNIT
MATCHING
BOX
LASER
PSU UNIT
DISCHARGE
TUBE
LASER
GAS
PRESSURE
CONTROLLER
MATCHING
BOX
LASER
PSU UNIT
TURBO
BLOWER
INLET
H/E
MATCHING
BOX
LASER
PSU UNIT
OUTLET
H/E
DISCHARGE
TUBE
MATCHING
BOX
LASER
PSU UNIT
HF
INVERTER
TURBO PCB
HOUR
METER
REAR
MIRROR
WATER
DISTRIBUTOR
FROM
PARTS
SENSOR
FLOW
WATER
BEAM
FOLDING
UNIT
SHUTTER
UNIT
BEAM
ABSORBER
TO
PARTS
GUIDE
LASER
POWER
SENSOR
FOLDING
MIRROR
FOLDING
MIRROR
OUTPUT
COUPLER
DEW
SENSOR
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SIGNAL
CABLE
(TO CNC)
57
POWER
SENSOR
FOLDING
MIRROR
FOLDING
MIRROR
STABILIZED
PSU
INPUT
UNIT
INLET
H/E
INLET
H/E
TURBO
PCB
INLET
H/E
INLET
H/E
FROM
TO PARTS PARTS
GUIDE
LASER
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Fig. 3.1 (g) Block diagram (C6000B)
3.2
COMPONENT
DETAILS
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The following describes the details of each component of the FANUC

LASER C series. Fig. 3.2 (a) to (p) show the internal structure.
(1) Resonator
The resonator consists of an output mirror, rear mirror, folding
mirrors, discharge tubes, power sensor unit, etc. It converts electrical
energy first to laser gas, then to optical energy (10.6mm
singlewavelength laser beam).
(2) Output coupler
A transmitting/reflecting mirror which outputs the laser beam after
it has been amplified. The output mirror consists of a ZnSe (zinc
selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be
particularly careful, therefore, when handling the output mirror.
(3) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate, coated
with dielectric. Having a high reflectance of 99.5%, the rear mirror
is used to reflect the laser beam within the resonator while
transmitting 0.5% of the laser light so that the beam can be monitored
externally.
(4) Folding mirror
The folding mirror, consisting of a 45 block and a goldcoated Si
(silicon) substrate, is used to divert the laser beam through 90. It
also linearly polarizes the laser beam.
(5) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A highfrequency discharge between these
electrodes injects electrical energy into the laser gas. Each electrode
is coated with ceramic, preventing it from degrading and thus
improving system reliability.
(6) Power sensor
An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of the
laser output level.
(7) Gas circulating system
A gas circulating path including a turbo blower, heat exchangers, and
circulating pipes, which supplies and exhausts laser gas to and from
the discharge tubes at high speed.
(8) Turbo blower
During laser oscillation, the laser gas pressure is 100 to 700 (1330 to
9310 Pa) in DGN. The turbo blower circulates this roughvacuum
gas at high speed (up to 200 m/s within the discharge tubes) without
contaminating the gas.
(9) Heat exchanger (inlet)
Heat exchanger used to cool the laser gas that has been heated by
discharge, before it is drawn into the turbo blower.
(10) Heat exchanger (outlet)
Heat exchanger used to cool the laser gas that has been heated by
compression in the turbo blower, before being forced into the
discharge tubes.
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(11) Pressure control unit

This unit constantly monitors the gas pressure in the discharge tubes
and supplies fresh laser gas to the gas circulating system, thus
maintaining a constant pressure in the discharge tubes. This unit also
monitors the laser gas supply state and the purging state in the gas
circulating system.
(12) Exhaust pump unit
This unit is used to vacuumexhaust laser gas from the gas
circulating system such that its pressure falls to that used for laser
oscillation. Also, within this unit, a small amount of circulating gas
is constantly being exchanged, to prevent degradation of the
circulating gas.
(13) Exhaust control unit
The exhaust controller controls the flow rate of the laser gas
exhausted by the exhaust pump unit. It adjusts the gas flow rate from
that used for gas exchange to that used for pressure control. In the
event of a power failure, the exhaust controller immediately returns
the exhaust pump unit to atmospheric pressure, thus protecting the
pump.
(14) Exhaust system filter
The exhaust system filter is used to remove oil mist from the exhaust
pump to prevent contamination of the gas circulating system and
optical parts. The C1500B, C2000B, C2000C, C3000C, C3000D,
and C4000A do not have this filter.
(15) Hour meter
The hour meter indicates the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated), to indicate whether maintenance or inspection is
necessary.
(16) Shutter section
The shutter section consists of a shutter, beam absorber, shutter
cooling fan, etc., and is used to prevent output of the laser beam
during laser oscillation. While the shutter is closed, the laser beam
is reflected by the shutter then absorbed by the beam absorber. For
safety, the shutter is fitted with a photoelectric limit switch which
allows the system to monitor whether the shutter is open or closed.
(17) Shutter
The shutter consists of a goldcoated reflecting mirror, mounted on
the rotating arm of a rotary solenoid. The shutter can be opened and
closed instantaneously by issuing a CNC command. For safety, the
shutter is equipped with a temperature sensor which allows the
system to monitor the temperature of the shutter.
(18) Beam absorber
While the laser oscillator is operating with the shutter closed, the
laser beam is guided into the beam absorber. The beam absorber
absorbs nearly 100% of laser beam and is watercooled, allowing it
to safely absorb the beam for relatively long periods. For safety, the
beam absorber is equipped with a temperature sensor which allows
the system to monitor the temperature of the beam absorber.
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(19) Water distribution unit

This unit distributes cooling water, supplied from either a chiller unit
or a temperatureregulated external water supply, to each unit in the
laser oscillator. For safety, the water distribution unit is equipped
with a flow sensor which allows the system to monitor the flow rate
of the
(20) Laser power supply unit
This unit rectifies and smooths the 3phase 200/220 VAC input, then
supplies DC power to the RF inverter by controlling the PWM
DCDC converter, as directed by commands received from the CNC.
The RF inverter converts DC power to 3 to 4 kVPOP highfrequency
(2 MHz) power, then outputs it to the matching box.
(21) Matching box
The matching box contains a matching circuit, consisting of coils and
capacitors, which ensures that power is effectively input to the
discharge tubes. The matching box is connected to the laser power
supply unit via either a highvoltage cable.
(22) Beam folding unit
This unit reverses the direction of the laser beam in the oscillator.
Two zeroshift mirrors are used to ensure that the polarization of the
light remains constant. The C3000C employs a circular polarization
mirror as upper one, such that a circularly polarized beam is
produced.
(23) Intermediate PCB A
This PCB transmits signals output by the pressure control unit, such
as those from the pressure sensor, pressure control valve, and
pressure switch, to the interface PCB.
(24) Intermediate PCB B
This PCB transmits signals output by the shutter section, such as
those from the limit switch, absorber temperature sensor, power
sensor, and dew sensor, to the interface PCB.
(25) Input unit
The input unit consists of an interface PCB, stabilized power supply,
and power magnetics cabinet. It transfers signals between the laser
oscillator and CNC, and supply power to each unit.
(26) Interface PCB
FS0L:
Transfer analog, digital input (DI), and digital output
(DO) signals to and from the CNC (parallel interface).
FS16L/ : Transfers signals to and from the CNC via the FANUC
FS16iL I/O LINK (serial interface). Because this is a serial
interface, optical fiber cable can be used to enable
longdistance transmission.
(27) Stabilized power supply
This unit converts the 200/220 VAC power source to DC power for
the interface PCB and other units.
(28) Power magnetics cabinet
The power magnetics cabinet distributes power, supplied from an
external unit, to each unit in the laser oscillator. It also protects each
unit from overcurrents.
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(29) Control PCB

This PCB sends the contractor open/close signal to the power
magnetics cabinet, as directed by commands received from the CNC.
It also notifies the CNC of the open/close status of the circuit breaker
in the power magnetics cabinet.
(30) Dew sensor unit
For the C1500B, C2000B, or C3000C, the dew sensor unit is
mounted at the water port inlet; for the C2000C, C3000D, C4000A,
or C6000B, the unit is mounted on the output mirror holder. If the
sensor detects that the amount of dew has exceeded the maximum
allowable level, an alarm (abnormal water temperature) is issued and
laser output is stopped, thus preventing a fault from occurring.
(31) Highfrequency inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control during start and stop of the blower.
(32) Light source for superimposing visible beam (laser diode unit)
A CO2 laser beam is invisible to the naked eyes. The guide light
source, therefore, is provided to enable checking of the laser beam
optical axis by superimposing a visible laser diode beam on the same
optical axis. The operation of this light source is linked to the
mechanical shutter. The laser diode beam is output only while the
shutter is closed. Using this beam, the optical axis of the external
optical system can be adjusted roughly and a reference position for
the machining point determined.
(33) Turbo PCB
This PCB relays signals between the turbo blower and
highfrequency inverter, interface PCB.
(34) Trigger electrode
With preparatory discharge outside the laser oscillation area, main
discharge can be started easily, and the laser output becomes
completely zero at beamoff time.
A trigger electrode is installed in the C1500B, C2000C, C3000D,
and C4000A.
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Fig. 3.2 (a) C1500B internal structure (Front, Maintenance side)
Fig. 3.2 (b) C1500B internal structure (Back side)
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Fig. 3.2 (c) C2000B internal structure (Front, Maintenance side)
Fig. 3.2 (d) C2000B internal structure (Back side)
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Fig. 3.2 (e) C2000C internal structure (Front side)
Fig. 3.2 (f) C2000C internal structure (Back side)
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Fig. 3.2 (g) C3000C internal structure (Front side)
Fig. 3.2 (h) C3000C internal structure (Back side)
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Fig. 3.2 (i) C3000C internal structure (Auxiliary machine section)
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Fig. 3.2 (j) C3000D internal structure (Front side)
Fig. 3.2 (k) C3000D internal structure (Back side)
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Fig. 3.2 (l) C4000A internal structure (Front side)
Fig. 3.2 (m) C4000A internal structure (Back side)
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Fig. 3.2 (n) C6000B internal structure (Front side)
Fig. 3.2 (o) C6000B internal structure (Back side)
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Fig. 3.2 (p) Discharge tube and trigger electrode
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INSTALLATION
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4. INSTALLATION
4.1
INSTALLATION
PROCEDURE
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Use the following procedure to make adjustments and checks during

installation.
(1) Check the environment at the installation location.
D Environmental conditions
1) Ambient temperature : +5C to +30C
2) Temperature variation : 1.1C/minute maximum
3) Humidity
: 75% or below (relative humidity)
4) Vibration
: Acceleration not to exceed 0.05G.
Vibration amplitude not to exceed
5m.
5) Atmosphere
: Dust must be minimized. There must
be no organic volatile components.
6) Laser gas
: Composition
CO2 : 5"0.25%
He
: 40"2.0%
: 55"2.75%
N2
H2O : 5 ppm maximum
CmHn : 1 ppm maximum
Purity : 99.99% or more
(2) Remove all clamps.
The clamps are used only in transit. In particular, loosen the
resonator clamp before it is stored. If the resonator is left for a long
time with the clamp tightened, the resonator is likely to be deformed.
The clamp locations are shown in Fig. 4.1 (a) through Fig. 4.1 (d).
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4. INSTALLATION
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Fig. 4.1 (a) Clamp layout (C1500B, C2000B, C2000C, C3000C, C3000D)
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4. INSTALLATION
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Fig. 4.1 (b) Clamp layout (C4000A)
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Fig. 4.1 (c) Clamp layout (C6000B)
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Fig. 4.1 (d) Clamp layout (C6000B)
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4. INSTALLATION
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(3) Check the units installed in the main unit cabinet.

D Check items
1) Check whether any printed circuit boards are loose or removed.
2) Check whether any cables are damaged (such as damaged
sheathing).
3) Check whether any connectors are loose or detached.
4) Check that the discharge tubes are neither cracked nor damaged.
5) Check that the turbo blowers, exhaust pump, and other units are
neither loose nor missing.
6) Check that the power supply units and matching boxes are
neither loose nor missing.
7) Check that the input unit is neither loose nor missing.
8) Check that the connection to the electrode (copper plate) of each
discharge tube is not loose.
9) Check that the water and gas pipes are not loose.
(4) Check all screw terminals in the units.
D Check items
1) Terminal block of the input unit
2) Power supply units and matching boxes
(5) Check the oil level in the turbo blowers and exhaust pump, and check
for oil contamination.
For details of how to supply and replace the oil, see Section 5.3.
(6) Connect the power and signal lines to the oscillator.
See Section 4.4.3 for details.
D Check items
1) Cable between the NC and oscillator
To connect this cable, apply the procedure described in the
FANUC Series 0L/16L/16iL Connection Manual.
2) Oscillator power cable
3) Grounding cable (class1)
4) Interunit connection between the oscillator and supplement
unit (C3000C)
(7) Check all printed circuit board settings.
D Check items
1) Setting pins on the oscillator IF PCB
See Section 6.5.5 for an explanation of the setting pins on the
IF PCB.
(8) Laser gas and cooling water pipes.
See Section 4.4.1 and Section 4.4.2 for details.
D Check items
1) Laser gas pipe type
Recommended gas pipe
Nylon tube AS1, manufactured by Junko Co. Ltd.
Polyprotube, manufactured by Imperial Co. Ltd.
2) Gas leakage from external piping
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4. INSTALLATION
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3) Laser gas composition and purity (See Section 4.4.4.2.)

4) Quality of cooling water (See Section 4.4.4.1.)
5) Flow of cooling water (IN, OUT)
(9) Check the input power supply voltage, frequency and phase
sequence.
D Check items
1) 200/220 VAC +10%, 15%, 50/60 Hz "1 Hz, 3phase. Note,
however, that the combination of 220 V and 50 Hz is not
supported.
2) Input power supply rating
3) Direction of phase rotation
(10) Turn on the power, then check the operation of the fan motors in the
housing.
The fan motors installed in the housing of the oscillator start as soon
as the power to the NC is turned on. Check the operation of each fan
motor. Note, however, that the fan motor installed in the laser power
supply does not start until the oscillator sequence reaches the turbo
blower ON operation.
(11) Check the parameters and setting data.
Check the parameters against the data sheets attached to the
oscillator. If a value other than those given on the data sheets is set,
correct the setting. Note, however, that parameter No. 15270 [199]
and parameter No. 15204 [241] are set automatically, so that these
parameters need not be modified.
CAUTION
Each oscillator has unique parameters. Check the setting
data according to the attached data sheets. Be particularly
careful to store these data sheets safely.
(12) Check that cooling water is supplied normally, and that there is no
water leakage inside the oscillator or at any external connection
points.
D Check items
1) Turn off the main circuit breaker of the oscillator and power
supply.
2) Check that the water inlet (IN) and outlet (OUT) of the oscillator
are connected correctly. If the connections are reversed, the
flow sensor installed at the outlet will not function. When a
valve is attached to the distributor unit (C3000D or C4000A:
see Fig. 10.16 (e) or (f)), check that the valve is open.
3) Fully open the valves on the exhaust side so that the flow of
water is not impeded. By manually operating the chiller unit,
pass cooling water through the system at a flow rate of about
10/minute. Then, check that there is no water leakage at the
following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including all tubes and joints) in the
oscillator
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4. INSTALLATION
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4) Provided no water leakage is observed in step 3) above, allow

cooling water to flow through the oscillator at the specified flow
rate. Set the output pressure of the cooling water circulating
unit to 0.5 MPa. Then, check that there is no water leakage at
the following locations:
1. The water inlet (IN) and outlet (OUT) of the oscillator
2. The water piping (including tubes and joints) in the
oscillator
5) Stop the chiller unit, then switch the operation mode from
manual (local) mode to automatic (remote) mode.
6) Provided no water leakage is observed, start the oscillator, then
set the RUN key to ON. Check that the cooling water
circulating unit can be operated according to commands issued
from the NC. At this time, check whether the cooling water is
flowing at the specified flow rate through each pipe in the
oscillator. If the flow rate is less than the specified value, alarm
No. 4072 [672] (low cooling water flow rate) is issued soon
after the chiller unit is started. If this alarm is issued, proceed
as indicated in the guidance corresponding to this alarm.
7) Check that the temperature of the cooling water is set to room
temperature plus 1C. (The temperature of the cooling water
may be set to about 27C throughout the year.) The highest
temperature that may be set is 30C.
(13) Conduct an oscillator vacuum leakage test.
1) Check the oscillator for any internal leakage.
The procedure for performing a leakage check is given in
Section 4.3 (6).
2) When first starting the oscillator, check that gas is output from
the gas outlet of the oscillator. Depending on the parameter
settings, it may take as long as one minute before gas is output.
If no gas is output, the exhaust pump rotation may be reversed.
If this situation is left uncorrected, the exhaust pump may
ultimately start to make an abnormal sound, and the thermal
switch may trip. In the worst case, the gas circulating system
may be contaminated with exhaust pump oil.
(14) Check that the laser gas pressure is controlled normally.
1) Set all bits of parameter No. 15025 [201] through parameter No.
15028 [203] to 0 because only the pressure control operation is
to be checked, without causing discharge. Set parameter No.
15240 [235] to the standard value 10, then check the pressure
control status of the laser oscillator. Turn on RUN (pressure
control signal), then check the pressure control status against
the following parameters, while referring to DGN 905 [860]:
1. Parameter No. 15241 [237] for discharge start state
2. Parameter No. 15242 [236] for base discharge state
If the pressure control status is abnormal, alarm No. 4073 [673],
No. 4081 [681], or No. 4078 [678] is issued. Proceed as
indicated in the guidance corresponding to this alarm. Check
also that the laser gas flow rate in the base discharge state
satisfies the specified value.
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4. INSTALLATION
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2) If the laser gas flow rate is abnormal, perform adjustment as

described in Section 9.5.
3) Reset the values of the bits of parameter No. 15025 [201]
through parameter No. 15028 [203] to their original values.
This completes the check.
(15) Perform laser oscillation to achieve discharge aging. If the oscillator
is left unused for one week or more, discharge aging is required. See
Section 9.8 for details of discharge aging.
(16) Check the oscillation characteristics and output. See Section 4.3 (1)
for details of the check method.
D Check items
1) Oscillation characteristic check :
S Check that the correction coefficient is 1100 or less.
S Check that the discharge voltage is within the factoryset
value plus 200 V.
If the correction coefficient or discharge voltage exceeds the
maximum, repeat discharge aging.
2) Discharge margin check S Check that a margin is provided.
3) Voltage margin check
S Check that no alarm is issued.
(17) Check the laser beam mode. For details of the check method, see
Section 4.3 (4).
D Check items
1) Check that there is no significant difference from the mode
specified in the data sheets attached to the oscillator.
2) Check that the mode shape is perfectly circular.
The beam mode (resonator alignment) may be displaced due to
transportation and storage. In such a case, make an adjustment
according to Section 11.2.1.
(18) Set the hour meter.
Set 50 Hz for those localities where the power supply frequency is
50 Hz. Set 60 Hz for those localities where the power supply
frequency is 60 Hz.
(19) Optical axis adjustment
To perform optical axis adjustment as part of the installation, adjust
the base table of the oscillator. Never place a heavy object on the
beam outlet plate. Moreover, never make a direct mechanical
connection between this plate and a part on the mechanical side.
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4. INSTALLATION
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4.2
PREPARATION
PRIOR TO SHIPMENT
Prior to shipment and transportation, the packing and checking operations

described below must be performed.
(1) Disconnect all NC connecting cables.
(2) Disconnect the power cable and ground cable of the input unit in the
main unit cabinet.
(3) Remove the laser gas pipes, and attach blanking plugs to the pipes to
prevent dust from entering.
(4) Remove all cooling water from the oscillator by using compressed air.
For details of how to remove the cooling water, see Section 4.2.2. Any
residual cooling water may result in corrosion or clogging;
furthermore, if any residual cooling water freezes, a pipe or the
oscillator itself may be damaged.
(5) Install all clamps and fit a blanking cap onto the beam outlet.
(6) Check the security of all connectors and printed circuit boards. Install
protective covers.
(7) Check that all removed mounting screws are reinstalled.
(8) Install the cabinet mounting panel and door panel.
4.2.1
Packing for
Transportation
For transportation, the packing requirements described below must be

observed.
FANUC LASER C series
(1) External dimensions: See the external views.
(2) Weights: 700 kg (C1500B, C2000C), 800 kg (C2000B, C3000D),
1300 kg (C3000B), 900 kg (C3000C: Oscillator section, C4000A),
150 kg (C3000C: Auxiliary machine section), 1800 kg (C6000B)
(3) Maximum allowable impact: 2 G
Note that the maximum allowable impact in transit depends greatly on
the means of transport employed, as indicated in Table 1.
Table 4.2.1 Maximum allowable impacts according to
means of transport (Units: G)
Means of transport
Direction
Airplane
Ship
Railroad
Truck
Forwards/
backwards
15
12
Left/right
2.5
12
Up/down
2.5
12
(4) Notes on transportation

When transporting a unit, always observe the notes provided on the
sticker attached to the unit. To lift a unit, run wires or slings through
the four eyebolts, then use a crane to lift the unit.
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4. INSTALLATION
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4.2.2
Remove cooling water according to the procedure below.
Removing Cooling
Water
(1) Open the cooling water inlet (IN) and outlet (OUT), and leave both
open. Cooling water will stop draining from the unit after about 10
minutes.
(2) Once the cooling water has stopped draining, connect a compressed
air hose to the cooling water inlet (IN). Check that the cooling water
outlet is open. Gradually supply compressed air, allowing the pressure
to build up to 0.1 to 0.2 MPa. Never apply full pressure suddenly.
(3) Continue to supply compressed air at this pressure for about 5 minutes.
Increase the compressed air pressure to 0.3 to 0.4 MPa, and supply air
until water inside the white water piping of the oscillator is completely
removed.
(4) When water is no longer output, set the compressed air pressure to 0.
When a drain valve is attached to the distributor unit (C4000A: Fig.
4.2.2), open the valve, and supply air according to the same procedure
as (2) and (3). When water is no longer output, set the compressed air
pressure to 0, then close the valve.
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4. INSTALLATION
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Fig 4.2.2 Detail of Distributor (C4000A)
(5) Next, connect the compressed air hose to the cooling water outlet
(OUT). At this time, ensure that cooling water inlet is open. Remove
water in the same procedure as (2), (3), and (4).
(6) Once all cooling water has been removed, disconnect the compressed
air tube. Then, seal the cooling water inlet (IN) and outlet (OUT) by
attaching the blanking plugs provided with the oscillator to the PT
plugs.
(7) When a valve is attached to the distributor unit (C3000D or C4000A),
check that the valve is open. Leave the valve open (for operation,
storage, or transport of the oscillator) except when water is removed.
CAUTION
Also, the cooling water should be removed from the
oscillator whenever the oscillator is to be stored over the
winter, when there is a danger of the cooling water freezing.
If the cooling water freezes, it may destroy the cooling water
pipes or other cooling system components.
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4. INSTALLATION
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4.3
(1) Oscillation characteristics
DETAILS OF
CHECKING
1) Check that bit 4 of parameter No. 15000 (16L or 16iL) or bit 4

of parameter No. 200 (0L) is set to 1.
2) Start the oscillator. When a discharge start switch is provided, do
not set the switch to ON until after LRDY has been set.
3) The oscillator enters correction mode for three minutes after start
of discharge, and the rated output is automatically specified. At
this time, record the peak output.
4) Record the output, discharge voltage, and current values two
minutes after making the specification. Discharge voltages (RFV)
and currents (RFI) are indicated in DGN 909 through 924 for 16L
or 16iL, and in DGN 861 through 876 for 0L, in order from RF
No.1 to RF No. 8. When one power supply unit is used to drive two
discharge tubes, however, the RFV and RFI values for No. 1
through 4 are the same as those for No. 5 through 8.
5) Record the output values immediately before the elapse of three
minutes after the specification.
6) Upon the termination of threeminute correction mode, record the
correction coefficient (parameter No. 15024 (16L or 16iL) or
parameter No. 241 (0L)).
7) Three minutes after the termination of threeminute correction
mode, record the base discharge output, discharge voltage (RFV),
and current (RFI) values.
Compare the measured values of 4) and 7), above, with the
discharge voltage and current characteristics given in the data
sheets. A discharge voltage (RFV) is abnormal if it exceeds the
data sheet value by 200 V or more. In such a case, check the
external laser gas piping and laser gas composition, or perform
aging.
(2) Discharge margin check
1) Modify the parameters listed below.
Bit 4 of parameter No. 15000 (16L or 16iL),
bit 4 of parameter No. 200 (0L);
1 0 (Threeminute correction is not performed.)
Parameter No. 15208 (16L or 16iL), parameter No. 233 (0L):
Setting 0 (Output feedback is turned off.)
[No Trigger type]
Parameter No. 15242 (16L or 16iL, 50 Hz),
parameter No. 15243 (16L or 16iL, 60 Hz),
Parameter No. 236 (0L):
Setting Setting +30
[Trigger type]
Parameter No. 15223 (16L or 16iL):
Setting Setting 60
2) When parameter No. 15242, 15243, 15223, or 236 is changed,
POWEROFF ALARM is output. In this case, turn off the power
to the NC, wait 4 or 5 seconds, then turn on the power again or press
the RESET key.
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4. INSTALLATION
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3) Remove the maintenance panel from the oscillator so that the

discharge tubes can be checked. Set the door interlock to OFF.
4) Start the oscillator. When a discharge start switch is provided, do
not set this switch to ON until after LRDY has been set.
5) Check that the discharge tubes do not stop discharging or trigger
discharging for 30 minutes after the start of discharge.
6) Upon the completion of the check, restore the parameters modified
in step 1) to their original values.
If discharge stops in step 5) , it indicates a discharge margin error.
Check the external laser gas piping and laser gas composition, or
perform aging.
(3) Power supply margin check (pulse check)
bit 2 of parameter No. 200 (0L):
0 1 (Use of assist gas is disabled at beamon.)
0 1 (Internal discharge is enabled in manual mode.)
0 1 (Internal discharge is enabled in automatic
operation mode.)
0 (Output feedback is turned off.)
1500 1650 (C1500B)
2000 3300 (C2000B)
2000 2700 (C2000C)
3000 3300 (C3000C)
3000 3600 (C3000D)
4000 4400 (C4000A)
6000 6600 (C6000B)
2) Start the oscillator. When a discharge start (HV ON) switch is
provided, do not set this switch to ON until after LRDY has been
set.
3) Set the following values on the laser setting screen:
Pc = 1650 W Du = 5% Fr = 5 Hz (C1500B)
3300 W Du = 5% Fr = 5 Hz (C2000B)
2700 W Du = 5% Fr = 5 Hz (C2000C)
3300 W Du = 5% Fr = 5 Hz (C3000C)
3600 W Du = 5% Fr = 5 Hz (C3000D)
4400 W Du = 5% Fr = 5 Hz (C4000A)
6600 W Du = 5% Fr = 5 Hz (C6000B)
4) Perform internal discharge in manual mode.
5) Check that no abnormality occurs for 30 minutes after beamon.
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4. INSTALLATION
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6) Upon the completion of the check, restore the parameters modified

in step 1) to their original values.
An alarm, if issued in step 5), indicates an error. Check the external
laser gas piping and laser gas composition, or perform aging.
(4) Beam mode check
1) Remove the guide pipe connecting the laser light outlet of the
oscillator to the machine.
2) Start the oscillator.
3) First, check the beam position. Laser light, if allowed to penetrate
the acrylic material because of incorrect operation, is very
dangerous. The paint of the machine is also likely to be damaged.
So, attach as feel plate, then an acrylic plate, about 30 cm 30 cm
in size. Then, output laser light for 0.1 seconds, with Pc = rated
output and Du = 100% set by programming. At this time, provide
a flow of air with a drier. If a guide laser is used, confirm that CO2
gas laser light is directed to the same spot as the guide laser.
4) Next, attach an acrylic block to the position indicated by the white
acrylic mark. Ensure that the surface of the acrylic block is
perpendicular to the direction of CO2 gas laser light. If a guide laser
is used, the perpendicularity of the acrylic block surface can be
checked by adjusting the block such that the guide laser is reflected
from the acrylic block surface and returns to the beam outlet.
5) Set the program as follows:
Output 1500 W Duty 100% Duration 4.0 seconds (C1500B)
Output 2000 W Duty 100% Duration 4.0 seconds
(C2000B, C2000C)
Output 3000 W Duty 100% Duration 3.0 seconds
(C3000C, C3000D)
Output 4000 W Duty 100% Duration 2.2 seconds (C4000A)
Output 6000 W Duty 100% Duration 2.5 seconds (C6000B)
6) Direct the drier so that it blows air at 45 to the acrylic block, then
output the beam. If air is not provided correctly, the acrylic vapor
will catch fire.
7) Observe the burn pattern, and record the directions (X direction, Y
direction) and output conditions.
1. Compare the recorded burn pattern with the burn pattern data
attached to the oscillator. Check that there is no significant
difference. Note, however, that the shape may vary, depending
on the distance.
2. Check that the shape is perfectly circular.
3. Check that no interference fringes can be observed nearby.
If a problem is detected, align the resonator of the oscillator.
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4. INSTALLATION
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(5) External gas piping leakage check (clamp test)

1) Using an approved gas pipe, connect the gas inlet of the oscillator
to the cluster piping, or to the secondary side of the regulator
mounted on the gas cylinder.
CAUTION
Rubber hoses were once commonly used for laser gas
piping, but these hoses allowed helium in the laser gas to
leak. The composition of the laser gas thus deteriorated,
reducing the output level and preventing continuous
discharge, such that the oscillator malfunctioned.
Moreover, when a brazed copper pipe was used,
contaminants in the brazing bled into the laser gas, thus
preventing continuous discharge. It is essential, therefore,
that the specified gas pipes and SUS pipes be used.
2) Open the valve of the regulator, then open the main valve of the gas
cylinder. Next, set the secondary pressure of the regulator to
0.175"0.025 MPa.
3) Upon the completion of setting, close the main valve of the gas
cylinder.
1. If the primary pressure of the regulator is abruptly reduced to 0,
gas will leak from the gas piping. Open the main valve of the
gas cylinder and locate the leaks using a liquid leakage checker.
Then, correct the leaks.
2. If the pressure is reduced gradually, gas will leak from the gas
piping. Recheck the joints. Very occasionally, gas may leak
from the primary pressure side to the secondary pressure side of
the regulator. In such a case, the primary pressure decreases,
while the secondary pressure is increases.
3. A primary pressure reduction of within 10% to 15% over 8
hours is normal.
CAUTION
If the amount of gas leakage from the gas piping is very
small, the gas composition will change more rapidly when
the pipe is longer, when the pipe diameter is larger, or when
a smaller amount of gas is consumed. In such cases, the
output will be reduced, and discharge will tend to turn off
more easily.
4) Upon the completion of this check, close the main valve of the gas
cylinder.
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4. INSTALLATION
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(6) Check for leakage within the oscillator

D Negative pressure method
1) On the setting screen, enable parameter rewriting.
2) On the parameter screen, change the setting of parameter No.
15240 (16L, 16iL) or parameter No. 235 (0L) to 0.
3) Set the oscillator start switch to ON. The gas pressure inside the
oscillator can be checked with DGN 905 (16L, 16iL) or DGN
860 (0L).
4) Alarm No. 4082 (16L, 16iL) or No. 682 (0L) is issued
several minutes after the oscillator is started.
5) Set the main circuit breaker of the oscillator to OFF. Then, turn
off the power to the NC.
6) Set the NC start switch (RUN ON KEY) to OFF, then turn on
the power to the NC.
7) Check the gas pressure on the diagnosis screen to determine
whether there is any increase in pressure over 15 minutes. An
increase in pressure of within 10 (133Pa) is normal.
8) Upon the completion of this check, set the start switch to ON,
then immediately return the switch to OFF. The oscillator will
perform a purge operation after 75 seconds.
9) Finally, restore the parameter settings to their original values.
CAUTION
A large increase in pressure indicates that, gas is leaking
from the oscillator. The cause of the leak may be:
1. Oring deterioration or failure
S Discharge tube section
S Mirror section
S Gas circulating piping
2. Failure to close the turbo oil inlet and outlet
3. Failure to lose the values after filter replacement
4. Water leakage from the heat exchanger
5. Water leakage from a location other than the above
6. Output mirror cracking
7. Discharge tube cracking
8. Cracking in a weld of the gas circulating system
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4. INSTALLATION
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D Pressurization
CAUTION
The turbo blower is not designed to withstand
pressurization. So, whenever possible, do not perform a
leakage check by pressurizing the turbo blower. Even when
internal pressurization is inevitable, never apply a pressure
in excess of 0.08 MPa. Otherwise, components such as
connectors or the oil gauge may be damaged. To minimize
the risk of connector damage, connect all cables to the turbo
blower when applying pressure.
1) Turn on the power to the oscillator, then open the valve of the
gas cylinder.
2) Set the secondary pressure of the gas cylinder regulator to 0.05
MPa.
3) To increase the internal pressure of the oscillator to a level
exceeding atmospheric pressure, turn the trimmer of the
atmospheric pressure sensor (installed in the pressure sensor
section) clockwise by half a division.
4) Set the RUN key on the oscillator to ON, then immediately
return the RUN key to OFF.
5) Apply leakage check liquid to possible leak points. Bubbles
will be seen if there is a leak. Thus, any leak points can be
identified.
6) Upon the completion of the above processing, return the
trimmer rotated in step 3) to its original setting.
(7) Parameter check
Laser oscillator parameter data is attached to each oscillator. Machine
tool builders may prepare a parameter table including the laser
oscillator parameter data. If the attached parameter data sheets are
missing, contact your machine tool builder.
1) On the NC setting screen, enable parameter rewriting.
2) Check the parameters, and enter the same values as those given in
the parameter table.
3) On the NC setting screen, disable parameter rewriting, then press
the reset key.
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4. INSTALLATION
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CAUTION
1 If the oscillator is started with an incorrect parameter value
specified, there is a risk of the oscillator being damaged or
destroyed. Be particularly careful when entering and
checking parameter values.
2 Some parameters may require modification to, for example,
suit the operating state of the oscillator or enable
maintenance. When modifying the parameters, the user
should record all changes (including dates, parameters
before modification, parameters after modification, and
reasons for modification) so that old parameters and invalid
parameters are not used.
(8) Discharge aging

If the oscillator is left unused for a long time (three days or more), or
if the laser gas circulating system has been opened to the atmosphere
(for example, to clean the mirrors or replace gas system components),
aging is required. This involves warming up the discharge tubes and
circulating gas by performing internal discharge to output absorbent
contaminants as gas. If the laser gas circulating system has been
opened to the atmosphere, perform a leakage check before attempting
aging. The aging procedure is described below.
(Be sure to record the settings. The settings may be different from
the data sheet values.)
Bit 3 of parameter No. 15000 (16L, 16iL),
0 1 (Internal discharge is enabled in manual mode.)
0 1 (Internal discharge is enabled in automatic
operation mode.)
1 0 (Evacuation is not performed after the RUN
OFF.)
Parameter No. 15201 (16L, 16iL), parameter No. 232 (0L)
Setting 0
Parameter No. 15208 (16L, 16iL), parameter No. 233 (0L):
Parameter No. 15209 (16L, 16iL), parameter No. 234 (0L):
Parameter No. 15242, No. 15243 (16L, 16iL),
parameter No. 236 (0L):
Setting *100
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4. INSTALLATION
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2) Set the RUN key to ON to start the oscillator.

3) Perform discharge by setting the HV ON switch to ON. Check that
discharge is performed continuously.
4) Then, perform internal discharge using the settings indicated
below. Two methods of internal discharge are supported. One is
automatic operation based on programming, while the other is
manual operation using switches.
1000 W Duty 30%
(C1500B: 15 minutes)
1500 W Duty 50%
(C2000B, C2000C: 15 minutes)
2000 W Duty 50%
(C3000C, C3000D: 15 minutes)
2500 W Duty 50%
(C4000A)
4000 W Duty 30%
(C6000B: 15 to 30 minutes)
The frequency is 100 Hz for all of the above.
D Automatic operation
1. Create the following program (when C1500B):
G32 P1 Q1;
G24 S1000 Q50 R900.;
S specifies an output (W), Q
G32 P0;
specifies a duty cycle (%),
and R specifies a time
(seconds).
2. Lock the shutter, then start the program.
D Manual
This method can be used when the machine operators panel has
a switch enabling manual internal discharge.
1) On the setting screen, enter the output power and duty
ratio.
2) Press the internal discharge switch to perform internal
discharge.
5) When a time determined above has elapsed, turn off the RUN ON
key to stop the oscillator. (With the new software, discharge can
be stopped with HV OFF.)
6) Return the discharge gas pressure to the normal setting, and
perform internal discharge with the settings below, then perform
purging.
Parameter No. 15242, No. 15243 (16L, 16iL) parameter No. 236
(0L)
Setting100 Setting
1500 W
2000 W
3000 W
4000 W
4000 W
Duty 50%
Duty 50%
Duty 50%
Duty 30%
Duty 30%
(C2000B, C2000C: 15 minutes)
(C3000C, C3000D: 15 minutes)
(C4000A: 15 minutes)

7) Repeat step 6) until the output power reaches the specified value
minus 2% or more, and the discharge voltage becomes the
factoryset value plus up to 200 V.
8) Upon the completion of aging, restore the parameter settings to
their original values.
91
4. INSTALLATION
4.4
OSCILLATOR
CONNECTIONS
4.4.1
Cooling Water
B70115EN/03
The oscillator has connections for cooling water piping, laser gas piping,
and power and signal cables. For details of the electrical connections for
the NC and machine, refer to the corresponding connection manuals.
FANUC Series 0L
FANUC Series 16LA CONNECTION MANUAL B61853E
FANUC Series 16LB
CONNECTION MANUAL B62443E, B62443E1
FANUC Series 16iLA CONNECTION MANUAL B63193EN
Fig. 4.4.1 (a) to Fig. 4.4.1 (f) shows the location where cooling water for
the oscillator is to be connected.
Fig. 4.4.1 (a) Water and laser gas connection (C1500B, C2000B)
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4. INSTALLATION
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Fig. 4.4.1 (b) Water and laser gas connection (C2000C)
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Fig. 4.4.1 (c) Water and laser gas connection (C3000C)
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4. INSTALLATION
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Fig. 4.4.1 (d) Water and laser gas connection (C3000D)
Fig. 4.4.1 (e) Water and laser gas connection (C4000A)
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4. INSTALLATION
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Fig. 4.4.1 (f) Water and laser gas connection (C6000B)
4.4.1.1
Specification of the
cooling water
The quality of cooling water is specified in the table below. If tap water
is used, it should be treated in an ion exchanger.
Refrigerator/airconditioner cooling water quality standard
(JRA90011980)
pH
(25C)
6.0 to 8.0
Conductivity
(25C)(m s/cm)
Chlorine ion
Cl* (ppm)
20 or less
Sulfate ion
SO42* (ppm)
50 or less
M alkalinity
CaCO3 (ppm)
50 or less
Total hardness
CaCO3 (ppm)
50 or less
Fe (ppm)
0.3 or less
S2* (ppm)
Not to be detected
Standard item
Iron
Sulfur ion
0.02 S/m or less
Reference item
96
Ammonia ion
NH4+ (ppm)
0.2 or less
Ionic silica
SiO2 (ppm)
30 or less
4. INSTALLATION
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4.4.1.2
Water treating agent
To avoid cooling water trouble and minimize the frequency of cooling

water exchange, the following anticorrosive should be added to the
cooling water. Consult the chiller manufacturer for use of the
anticorrosive.
Product name: CONTLIME K6000
Manufacturer: MITSUBISHI GAS CHEMICAL. Inc.
Use:
Add the anticorrosive to the cooling water to obtain a
concentration of 1000 ppm (100 m per 100 ). Every
month, check the concentration of the anticorrosive
using concentration test paper designed specifically
for the anticorrosive. Add anticorrosive, as required,
to maintain the concentration at about 1000 ppm.
Concentration test paper: A concentration test paper set (including
50 sheets of paper and a dropper) is
available together with the CONTLIME
K6000, manufactured by MITSUBISHI
GAS CHEMICAL, Inc.
Even when the concentration of the anticorrosive is controlled as
explained above, the cooling water must, nevertheless, be replaced every
year.
4.4.1.3
Chemical cleaner
To remove contaminants adhering to the inside surfaces of the cooling

water system, clean the system using the cleaning agent indicated below.
Consult with the chiller manufacturer prior to using the cleaning agent.
Product name: DESLIME
Manufacturer: MITSUBISHI GAS CHEMICAL. Inc.
Use:
Replace up to 10% of the cooling water with this agent,
then circulate the cooling water for one hour. Next,
drain the cooling water and thoroughly flush the
cooling system. Note that DESLIME is highly toxic
in its undiluted form. Never touch DESLIME. If you
get any DESLIME on your skin, wash it with copious
amounts of water. Never dispose of any waste liquid
until the hydrogen peroxide, which is a major
component, has decomposed such that its
concentration is reduced.
97
4. INSTALLATION
4.4.1.4
Antifreezing agent
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If the chiller is used in a cold district, it should be provided with an

antifreezing function. When it is extremely cold, the chiller should be
kept running. If it is necessary to use an antifreezing solution for lack of
an alternative, the following antifreezing solution should be used. Its
concentration should be 30% (usually) or 40% (in an extremely cold
district). Use of an antifreezing solution should be restricted within four
months in winter. Do not use antifreezing solution together with an
anticorrosive. The following antifreezing solution is already added with
an anticorrosive.
Product name: AURORA BRINE
Manufacturer: TOKYO FINE CHEMICAL Co.
Use:
Refer to the description indicated on the product.
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4. INSTALLATION
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4.4.2
Laser Gas
4.4.2.1
Laser gas specification
Supply the laser oscillator with a mixture of gases that satisfy the
conditions listed below.
(1) Composition ratio and accuracy
CO2 : 5 "0.25%
He : 40 "2.00%
N2 : 55 "2.75% (N2 balance)
(2) Water (H2O): 5 ppm or less
(3) Hydrocarbon (CnHm): 1 ppm or less
(4) Gas purity: 99.99% or higher
4.4.2.2
Gas pipe
Observe the following cautions for piping between the laser gas cylinder
and laser oscillator.
D Use nylon tube having an inside diameter of 8 mm or larger (Junlon
AS1 manufactured by Junkousha, or polyprotube manufactured by
Imperial Co.). Do not use a rubber or urethane tube.
D Use a swagelock vacuum joint (Fujikins product or equivalent). Do
not use a onetouch coupler, quick coupler, or hoseband joint.
D Minimize the length of tubing. It should be kept within 5 m. Never
exceed 15 m. For a length of 15 m or greater, use stainless pipe.
D If it is necessary to use metal pipe for lack of an alternative, use
stainless bright annealed pipe. Minimize the number of joints used.
Connect pipes, if necessary, using a swagelock vacuum joint or by
TIG welding. Do NOT use silver soldering or copper piping. Piping
should be installed by a vacuum piping specialist. Do not extend metal
piping over 30 m.
D Always keep the piping materials clean. Do not allow foreign matter
to get in the pipe.
D Use a pressure reducer that is free from gas leakage.
D After installing the pipe, check it for gas leakage, using a liquid leak
checker (Gyupoflex: A98L00010856, detecting bubbles caused by
leaking gas) or a clamp test1).
NOTE
Open the valve of the gas cylinder to pressurize the inside
of the pipe, then close the valve. Check to see if the
pressure in the pipe becomes low with time. Monitor the
primary pressure of the gas reducer for over 8 hours. If the
gas pressure becomes lower by 10% within 8 hours, gas is
likely to be leaking. Take an appropriate measure.
99
4. INSTALLATION
4.4.3
Electrical Connection
4.4.3.1
NCtooscillator
connection and power
supply cable connection
B70115EN/03
The laser oscillator incorporates a safety circuit. The safety circuit is

enabled by using a terminal board (XT20).
Figs. 4.4.3.1 (a) to (g) show the cable inlet and the point of connection.
Attach the following cable to the laser oscillator. Also refer to the
applicable NC connection manual.
1) Power supply cable (L1, L2, L3)
Power supply 200 VAC +10% 50/60 Hz "1 Hz, 3f
15%
Alternatively, 220 VAC +10%, 60 Hz "1 Hz, 3f
15%
D Cable specifications
Use a fourconductor heavyduty cable.
Oscillator
Conductor crosssectional area
Cable diameter
C1500B
22 mm2
19 to 32 mm
C2000B
35 mm2
28 to 38 mm
C2000C
C3000C
C3000D
C4000A
34 to 44 mm
For oscillator C6000B, use four cables having a conductor

crosssectional area of 100 mm2.
2) Grounding cable
There are two grounding locations.
One of the locations is for class1 grounding.
The other location is for protective grounding. Install a grounding
wire to the location marked PE.
3) Interface connection cable
a) I/O signals
D 16L or 16iL (one wire)
Connect an optical fiber cable to COP1B or COPI on the
interface PCB.
D 0L (two wires)
Connect metal cables to CN1 and CN2 on the interface PCB.
b) Emergency stop signals (ESP1 and ESP2)
These signals are not used. Strap the corresponding points.
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4. INSTALLATION
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Fig. 4.4.3.1 (a) Cable connection of C1500B
Fig. 4.4.3.1 (b) Cable connection of C2000B
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Fig. 4.4.3.1 (c) Cable connection of C2000C
Fig. 4.4.3.1 (d) Cable connection of C3000C
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4. INSTALLATION
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Fig. 4.4.3.1 (e) Cable connection of C3000D
Fig. 4.4.3.1 (f) Cable connection of C4000A
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4. INSTALLATION
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Fig. 4.4.3.1 (g) Cable connection of C6000B
c) OFF interlock signals (OFI1 and OFI2)

Making the power supply for the oscillator ready to be switched off
turns off these signals. Connect them in parallel with an NC OFF
switch.
Contact currentcarrying capacity: 3 A on 250 VAC or 5 A on 30
VDC
d) Laser oscillator ON/OFF signal (ON, OFF)
Connect 200 VAC in synchronization with the NC ON/OFF switch
to this signal.
Currentcarrying capacity: 10 mA on 200 VAC
4) XT20 terminal board cables
The figure shows the terminal board. For C4000A, use connector
CNL1.
B8
PF2
A8
PF1
B7
OFI2
A7
OFI1
B6
A2
A6
A1
B5
EMS2
A5
EMS1
B4
RUN2
A4
RUN1
B3
SHL2
A3
SHL
A2
SC
A1
IB1
B2
B1
IB2
CNL1 pin arrangement (as viewed from the wiring surface)

a) PF1 and PF2
These terminals are for QF1 voltage tripping. Connect +24 VDC
and 0 V to PF1 and PF2, respectively.
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4. INSTALLATION
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b) SHL1 and SHL2

These terminals are for shutter interlocking. Strapping these
terminals enables the shutter to be opened and closed.
Contact currentcarrying capacity: At least 1.2 A on 24 VDC
Wire: 1.25 mm2, 25 m or shorter
c) IB1 and IB2
These terminals are for semiconductor laser interlocking.
Strapping these terminals enables the semiconductor laser to be
turned on.
Contact currentcarrying capacity: At least 10 mA on 30 VDC
d) A1 and A2
These terminals are for supplying power to the safety box in the
laser oscillator and switching on and off the laser oscillator power
supply.
Connect +24 VDC and 0 V to A1 and A2, respectively.
Currentcarrying capacity: At least 250 mA
XT20 terminal
e) SC
This terminal is for outputting a shutterclosed signal. It outputs
the signal when the shutter is closed.
Connectable load capacity: 3 to 100 mA on 24 VDC
Note that the voltage applied to the load varies with the current
flowing through the load.
f) RUN1 and RUN2
Connect these terminals in series with the laser oscillator start
signal.
g) EMS1 and EMS2
Connect these terminals to emergency stop switch contact signals.
105
4. INSTALLATION
4.4.3.2
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The figure shows the safety circuit for each oscillator.
Details of safety circuit
Fig. 4.4.3.2 (a) Safety circuit of C1500B
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4. INSTALLATION
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Fig. 4.4.3.2 (b) Safety circuit of C2000B
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Fig. 4.4.3.2 (c) Safety circuit of C2000C
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Fig. 4.4.3.2 (d) Safety circuit of C3000C
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4. INSTALLATION
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Fig. 4.4.3.2 (e) Safety circuit of C3000D
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4. INSTALLATION
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Fig. 4.4.3.2 (f) Safety circuit of C4000A
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Fig. 4.4.3.2 (g) Safety circuit of C6000B
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4. INSTALLATION
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4.4.4
Interunit Connections
(C3000C Only)
4.4.4.1
Electrical cables
4.4.4.2
Connection
4.4.4.3
Connection of cooling
water pipes
The C3000C has an oscillator section and auxiliary machine section.

Interconnection is made according to the procedure described below.
(1) Power cable (CP200)

This cable feeds 200 VAC to the highfrequency inverter and exhaust
pump.
(2) Turbo blower No. 1 power cable (CP201)
Connect this cable between the highfrequency inverter and turbo
blower No. 1.
(3) Turbo blower No. 2 power cable (CP202)
Connect this cable between the highfrequency inverter and turbo
blower No. 2.
(4) Power cable for cooling fans, etc. (CN203)
This cable feeds 200 VAC to the cooling fans and other devices.
(5) Signal cable (CN204)
This cable carries those signals that are used to start the
highfrequency inverter and exhaust pump.
Connect the cables to the CP200, CP201, CP202, CN203, and CN204
connectors.
(1) Connect a water pipe between cooling water OUT of the oscillator
section and cooling water IN of the auxiliary machine section.
(2) Connect a water pipe between cooling water IN of the oscillator
section and cooling water OUT of the auxiliary machine section.
Route the pipes such that their lengths are minimized. (The maximum
allowable length is 3 m.)
Water pipe specification
Nylon pipe having a diameter of at least f10 mm (internal
diameter of at least f 7.5 mm) and a related pressure of
0.8 MPa
113
4. INSTALLATION
4.4.4.4
Gas piping
B70115EN/03
(1) Connect gas OUT of the oscillator section to gas IN of the auxiliary
machine section, using the gas pipe provided with the oscillator.
(2) Supply laser gas through gas IN of the oscillator section. Exhaust gas
from the exhaust pump is output through gas OUT of the auxiliary
machine section.
Route the pipes such that their lengths are minimized. (The maximum
allowable length is 3 m.)
Gas tube specification
Teflon tube having a diameter of at least f1/2 (internal
diameter of at least f 3/8) and a related pressure of
0.5 MPa
114
5. MAINTENANCE
B70115EN/03
MAINTENANCE
In FANUC LASER C series, periodic inspection items have been

reduced, and adjustments have been made easy. To keep the oscillator in
a satisfactory operating condition over a long period, however, it is
necessary to carry out periodic maintenance (including daily
maintenance) described in this chapter. The oscillator is designed to
maintain the same performance and reliability as it has when it is installed,
provided that maintenance is carried out as prescribed.
115
5. MAINTENANCE
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5.1
DAILY INSPECTION
Table 5.1 lists daily inspection items. Inspect the FANUC LASER C
series according to this table. When parts (including oil) have been used
for a prescribed period, replace them quickly.
Table 5.1 Daily inspection items for FANUC LASER C series

Item
Period
Content and instruction
Residual laser gas
Daily
Check to see if the primary pressure is 1MPa or less as measured at the regulator on the laser gas cylinder. If the primary
pressure is 1MPa or lower, replace the gas cylinder. See Section 4.6 for the gas specifications.
Exhaust pump oil
Weekly
Make sure that the oil level is between L (minimum) and H

(maximum). Usually, oil is supplied until the oil level is in the
middle between L and H. If the oil level is below L, supply oil
according to Section 5.3.2. Be sure to replace the oil periodically, every 6 months of use or every 1500 hours of operation,
whichever is earlier.
Exhaust pump oil leak
Weekly
Make sure that no oil is leaking from the vane pump main
body, drain cock and their periphery. If oil is leaking, immediately replace the exhaust filter according to Section 5.3.3, because it is likely to have been clogged. Be sure to replace the
exhaust filter periodically, every one year of use or every 3000
hours of operation, whichever is earlier.
Turbo blower oil
Daily
Make sure that the oil level is between L (minimum) and H

(maximum) according to Fig. 5.3.1. Usually , oil is suppled
until the oil level is at 3/4 above L. If the oil level is below L,
supply oil according to Section 5.3.1. Be sure to replace the
oil periodically, every 4 months of use or 1000 hours of operation, whichever is earlier.
Turbo blower oil leak
Weekly
Make sure that no oil is leaking from the turbo blower main
body, oil inlet, cock, and their periphery. If oil is leaking, locate
the leak. If oil leaks for any reason other than a cock being
open, call FANUC.
Laser output
Weekly
1. Check to see if the laser output measured at the outlet of

the short optical path oscillator is 5% or more lower than
the specified output. If this is the case, clean or replace
the optical components in the external reflection unit.
2. If the laser output decreases within the oscillator, warning
message No. 4085 [685] is issued. If this message appears, clean or replace the mirror in the oscillator quickly.
Cooling water
Daily
Make sure that the chiller discharge output is 0.5MPa or less.
Weekly
Check the quality of cooling water circulating in the chiller. If

the water is colored badly, replace it completely. Be sure to
replace the cooling water every two months. Adding an anticorrosive to cooling water can decrease the replacement frequency. See Section 4.4.1 for descriptions about the anticorrosive.
116
5. MAINTENANCE
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5.2
The FANUC LASER C series contains consumables that must be

replaced periodically. Table 5.2 (a), (b) lists such consumables and the
related periodic maintenance work. Perform periodic maintenance as
well as daily inspection described in Section 5.1 by using the listed
periods as guidelines. Also use the reading of the hour meter, which
roughly indicates how long the laser has been running. Note, however,
that the replacement and maintenance intervals are not guaranteed values
but standard values based on field records.
PERIODIC
MAINTENANCE
Table 5.2 (a) Periodic maintenance items and periods

Interval of maintenance (Operation hour)
Item
C1500B
C2000B
C2000C
C3000C
C3000D
3000 to 4000h
1500 to 2000h
800 to 1200h
Output mirror cleaning
Rear mirror cleaning
Folding mirror cleaning
3000 to 4000h
0shift mirror cleaning
1000h or processing quality go wrong
Output mirror change
4000h or inferior beam mode
Rear mirror change
Folding mirror change
0shift mirror change
Exhaust pump oil change
1500h or low exhaust ability
10
Exhaust pump filter change
11
Exhaust pump overhaul
12
Turbo blower oil change
1500h or inferior turbo blower oil
13
Turbo blower overhaul
12000h or low turbo blower ability
14
Pressure control filter change
12000h or pressure alarm occurs
15
Discharge tube Oring change
16
Cooling water
1500h or inferior water quality
17
Water tubing cleaning
3000h or water flow is blocked
18
Beam absorber
19
Nylon tube
15000h
20
Cable
15000h
6000h or intracavity leakage occurs
15000h or over heat alarm occurs
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5. MAINTENANCE
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Table 5.2 (b) Periodic maintenance items and periods

Interval of maintenance (Operation hour)
Item
C4000A
C6000B
800 to 1200h
800 to 1200h
Output mirror cleaning
Rear mirror cleaning
Folding mirror cleaning
0shift mirror cleaning
Output mirror change
Rear mirror change
Folding mirror change
0shift mirror change
Exhaust pump oil change
10
Exhaust pump filter change
11
Exhaust pump overhaul
12
Turbo blower oil change
1500h or inferior turbo blower oil
13
Turbo blower overhaul
12000h or low turbo blower ability
14
Pressure control filter change
12000h or pressure alarm occurs
15
Discharge tube Oring change
16
Cooling water
1500h or inferior water quality
17
Water tubing cleaning
3000h or water flow is blocked
18
Beam absorber
19
Nylon tube
15000h
20
Cable
15000h
3000 to 4000h
1000h or processing quality go
wrong
No install
No install
6000h or intracavity leakage occurs
15000h or over heat alarm occurs
Table 5.2 (c) Mirror cleaning periods
Cleaning of output and

rear mirrors only
Cleaning of all internal
mirrors
118
C1500B
C2000B
C2000C
C3000C, C3000D
C4000A, C6000B
None
Every 1500 to 2000

hours
Every 800 to 1200

hours
Every 3000 to 4000 hours
5. MAINTENANCE
B70115EN/03
5.3
DETAILS OF
MAINTENANCE
When opening the panels and doors during maintenance, keep the power
turned off.
Before replacing oil, be sure to check that purging is completed.
Fig. 5.3 (a) Oil gauge of Turbo Blower and Exhaust pump of C1500B
Fig. 5.3 (b) Oil gauge of Turbo Blower and Exhaust pump of C2000B
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5. MAINTENANCE
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Fig. 5.3 (c) Oil gauge of Turbo Blower and Exhaust pump of C2000C
Fig. 5.3 (d) Oil gauge of Turbo Blower and Exhaust pump of C3000C
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Fig. 5.3 (e) Oil gauge of Turbo Blower and Exhaust pump of C3000D
Fig. 5.3 (f) Oil gauge of Turbo Blower and Exhaust pump of C4000A
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Fig. 5.3 (g) Oil gauge of Turbo Blower and Exhaust pump of C6000B
5.3.1
(1) Check method
Turbo Blower Oil
Check the amount of oil in the turbo blower while referring to the
figure below. The oil level should be between graduations H and L.
This check should be made when the oscillator is at a rest. When the
turbo blower is running, it is impossible to check the amount of oil
correctly.
(2) Replenishment method
1) Remove the hexagonalhead screw from the oil inlet with a 17 mm
wrench. Be careful not to lose the Oring on the screw.
Before supplying turbo oil, stop the oscillator according to the
correct procedure and turn off the power. If the oscillator is not
stopped by the correct procedure, the pressure in the turbo blower
becomes negative. Opening the oil inlet under such a condition lets
a large amount of air get in the turbo blower. An air flow caused
this way can bring oil mist into the oscillator, possibly resulting in
the optical mirror getting dirty.
2) Take a bottle of oil from the oil kit (A04B0800K326). Unscrew
the nozzle from the bottle, remove the inner cap, then replace the
nozzle. Insert the nozzle into the oil inlet and supply oil. Be careful
not to allow dust to enter through the inlet. This task is made easier
by attaching the tube (included in the oil kit) onto the nozzle.
Supply oil until the oil reaches the 3/4 level relative to the L
indication when viewed through the oil window. Note that both too
little and too much oil can result in mechanical failure.
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5. MAINTENANCE
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3) Clean the oil inlet, hexagonalhead screw of the oil inlet, and
Oring by wiping with a clean cloth or paper. Ensure that these
parts are completely free of dust. If the oil is contaminated with
dust, the turbo blower may fail. Set the Oring in the groove
around the hexagonalhead screw of the oil inlet, then tighten the
hexagonalhead screw. Note that if the Oring is not set correctly,
or if the hexagonalhead screw is not tightened fully, the turbo
blower may not be airtight.
4) If oil has spilled over, wipe it up. Otherwise, the peripheral
equipment may be affected adversely.
5) If there is oil left over, put the inner lid back on the bottle, and keep
the bottle in a dark, cool place.
(3) Replacement method
1) Get a container for oil drain on hand, and put the tip of the drain tube
into the container.
2) Turn the oil drain cock through 90 clockwise, and the oil will start
draining.
3) After all the oil has been drained, close the oil drain cock by setting
it back in the initial place.
4) Supply oil by following the same procedure as for replenishment.
NOTE
Execute discharge ageing after changing turbo blower oil.
Fig. 5.3.1 Turbo blower oil check points
123
5. MAINTENANCE
5.3.2
Exhaust Pump Oil
5.3.3
Exhaust Pump Filter
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(1) Check method

Watch the oil gauge, and check that the oil level is between graduations
L and H. Also check whether the oil is dark.
If the oil level is below L, add oil to the turbo blower or replace the oil
in it. If the oil level is above H, drain until the oil level becomes below
H.
The exhaust of the turbo blower contains oil mist. The exhaust pump
will capture oil mist, and the amount of exhaust pump oil increases
with time. When the oil has increased too much, the filter gets
immersed in the oil, possibly causing white mist to come out from the
pump, or oil to leak. Furthermore, the exhaust capacity may get
lowered, or the pump may be damaged.
1) Stop the oscillator, and turn off the power.
2) Remove the maintenance panel.
3) Remove the oil inlet plug. There is an Oring on it. Be careful not
to damage it. A missing or damaged Oring can lower the exhaust
capacity of the pump.
4) Insert the drain tube into a drain oil pot.
5) Fully open the drain cock.
6) After the oil has been drained up, close the cock.
7) Supply 1.8 liters of new oil through the oil inlet, while watching
the oil gauge.
8) Attach the oil inlet plug.
9) Put the maintenance panel back in place, and turn on the power.

Replace the filter every 3000 hours, or when the exhaust power has
degraded. If the filter gets clogged, the pump output becomes low.
Fig. 5.3.3 shows where the filter of a vane pump is located.
1) Stop the oscillator, and turn off the power.
2) Remove the maintenance panel.
3) Remove the black screw button from the pump.
4) Remove the filter cover and Oring.
5) Remove the spring and washer.
6) Pull out the exhaust filter element.
7) Orient a new exhaust filter element correctly, and reverse the
procedure from step 6 to step 3. (An upward arrow is indicated on
the front surface of the filter element.)
NOTE
The exhaust filter element should be installed securely. If
it is installed incorrectly, or the Oring is not inserted
accurately, oil mist (white) will come out from the exhaust
outlet.
124
5. MAINTENANCE
B70115EN/03
SCREW KNOB
FILTER COVER
ORING
SPRING
WASHER
EXHAUST FILTER ELEMENT
OIL INLET PLUG
Fig. 5.3.3 Exchange of exhaust pump filter
125
5. MAINTENANCE
5.3.4
Exhaust System Filter
B70115EN/03
Replace the filter every 1500 hours, or when oil mist occurs. Fig. 5.3.4
shows the exhaust system filter. None of the C1500B, C2000B, C2000C,
C3000C, C3000D, and C4000A is equipped with this filter.
Clamp
Housing head
Housing
Oring
(G90 or G85, depending on model; indicated on the housing surface)
Fastening nut
Cartridge filter
(manufactured by AdvanTech Toyo; TCG045SIFS)
Plate gasket
Fig. 5.3.4 Exhaust system filter
1)
2)
3)
4)
5)
6)
7)
8)
9)
Stop the oscillator, and turn off the power.

Remove the maintenance panel.
Wipe the dust off the periphery of the housing and the clamp.
Wash your hands and wear clean vinyl gloves.
Loosen the clamp, and remove the housing head from the
housing.
Loosen the fastening nut on the cartridge filter, and take out the
filter.
Remove the Oring, and clean it with lintfree paper dipped with
alcohol.
Clean the inner surface of the housing head and the Oring groove
with lintfree paper dipped in alcohol, then let them dry.
Put the Oring back in place. If the Oring is deformed or
deteriorated, replace it with a spare, whose rating is indicated on
the periphery of the housing.
126
5. MAINTENANCE
B70115EN/03
10) Take out a new cartridge filter (A97L02010211, AdvanTech

Toyo TCG045SIFS) from its bag, and put a plate gasket
(supplied together with the cartridge filter) on both ends of the
filter.
11) Insert the cartridge filter into the housing head, and fasten it with
the fastening nut.
12) Fasten the housing to the housing head. Before tightening the
clamp, make sure that the Oring touches the entire surface of the
seal uniformly.
If the Oring is not installed accurately, gas may leak.
127
5. MAINTENANCE
B70115EN/03
5.4
The maintenance parts are listed below. Refer to the following tables for
maintenance unit and part specification information.
MAINTENANCE
PARTS
NONREPAIRABLE PARTS
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C C3000C C3000D C4000A C6000B
OUTPUT COUPLER
A98L00010981
POISON
A98L00010960
A98L00030015/B
#1 A98L00030015/D
(1)
A98L00030027
A98L00030036
A98L00010750
A98L00010961
A98L00010757/B
A98L00030016/B
#1 A98L00030016/C
(1)
A98L00030037
A98L00010615
A98L00010615/B
A98L00010866/B
FOLDING MIRROR
A98L00030019
antireflection
#1
(1)
(1)
(1)
(1)
(1)
(1)
OPTION
Nonpolarizing mirror
A98L00010616/C
(0 degree shift)
#2
(2)
(2)
(2)
(1)
(1)
(1)
OPTION
ramda/4 retardar mirror

A98L00010617/C
(circular polarizer)
#2
(1)
(1)
(1)
OPTION
ORING FOR OC, RM
A98L00010619/1025
JBOR4DP28
A98L00010619/2030
A98L00010619/2031
JBOR4DP38
JBOR4DG55
JBOR4DG65
#1 A98L00010981/B
REAR MIRROR
FOLDING MIRROR
ORING FOR
FOLDING MIRROR
128
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
O RING FOR
DISCHARGE TUBE
C3000C C3000D
C4000A C6000B
A98L00030004/P22.4S
A98L00030004/P26S
12
12
16
A98L00030004/P30.6S
24
A98L00030004/P58
A2904513X252
A2904521X252
ORING FOR
COOLING CAP
JBOR4DG35
FITTING FOR
COOLING CAP
A97L02010554/
N06AS
A97L02010554/
L06AS
A2904523V186
A2904561V186
A2904522V121
A2904523V121
A2904532V121
A2904533V121
A2904540V121
A2904561V120
12
A2904515X121
A2904516T001
4
No. 14
A2904522T001
4
No. 14
4
No. 14
6
No. 16
6
No. 16
A2904533T001
8
No. 18
A2904561T001
6
No. 3,4,
6,7,9,12
A2904561T002
6
No. 1,2,
5,8,10,1
A2904516V020
A04B0815D410
TRIGGER O ring
JBORD4P10
EXHAUST PUMP
FILTER
A98L00010911
ORING FOR GAS

PIPE
#3
COOLING CAP FOR

FOLDING MIRROR
COOLING PLATE FOR

FOLDING MIRROR
DISCHARGE TUBE
NOZZLE
DISCHARGE TUBE
TRIGGER
ELECTRODE
129
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
C3000C C3000D
C4000A C6000B
EXHAUST PUMP OIL
A98L00400093/1.0L6
3.6L
3.6L
3.6L
3.6L
3.6L
3.6L
3.6L
TURBO BLOWER OIL
A04B0800K326
1/3
1/3
1/3
2/3
1/3
1/3
4/3
ORING FOR TURBO

BLOWER OIL INLET
JBOR4DP10A
DEW SENSOR
A04B0801D012
TEMP SW FOR
CABINET
A57L00010079/060
#7 A57L00010095/B050
A57L00010095/B080
#8 A57L00010095/B090
A57L00010057/080
#9 A57L00010057/090
PHOTO SW FOR
SHUTTER
A57L00010091
POSITION SW FOR
SHUTER
A57L00010119/X1R5F1
SHUTTER SM UNIT
A04B0810D010
SHUTTER TM UNIT
A04B0815D001
A04B0810D017
A04B0810D020
A04B0810D021
A04B0815D002
SHUTTER TM UNIT
A04B0810D022
WATER FLOW SW
A04B0808D003
A91L00010151/B
A91L00010214/180
#2 A55L00010225/01CBS
(2)
(2)
(2)
(2)
(2)
(2)
(1)
(1)
A04B0811D401
A90L00010455
A90L00010396
A90L00010335/B
FAN MOTOR
A90L00010396
18
24
16
25
24
37
46
HOUR METER
A91L00010191
TEMP SW FOR
ABSORBER
TEMP SW FOR
SHUTTER MIRROR
SHUTTER POSITION
DETECT SW UNIT
MICRO SW
DIODE LASER
FAN MOTOR FOR

SHUTTER
#12 A04B0805C414
130
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
AUTO BREAKER
RELEASE AC100V
#4
AUTO BREAKER
RELEASE DC24V
#4
AUTO BREAKER
BREAKER
C3000C C3000D
C4000A C6000B
A60L00010312/BESCN
1
QF1
A60L00010312/BESDN
1
QF1
A60L00010312/BGSDN
1
QF1
1
QF1
1
QF1
1
QF1
A60L00010312/BHSD
1
QF1
A60L00010312/CKSDN
1
QF1
A60L00010391/V050
2
QF2, 3
3
QF24
4
QF25
10
QF25,
813
A60L00010391/V030
1
QF4
1
QF5
1
QF6
1
QF4
1
QF6
MOTOR STARTER
A60L00010315/N
TERMINAL FOR
0315/N
A60L00010316/AA
BREAKER
A60L00010308/X010
2
QF5, 6
2
QF6, 7
2
QF7, 8
2
QF6, 7
MOTOR STARTER
A60L00010389/H
1
QF9
A60L00010389/J
1
QF7
1
QF8
1
QF14
A60L00010315/J
2
QF5, 7
2
QF7, 9
2
QF8, 11
TERMINAL FOR 0315/J
A60L00010316/AA
MOTOR STARTER
A60L00010341/BD
2
QF2, 3
4
QF25
4
QF25
BREAKER
A60L00010312/AD
1
QF6
CIRCUIT BREAKER
A60L00010314/GECE
1
QF8
1
QF7
A60L00010314/GDA
1
QF8
1
QF10
1
QF8
1
QF9
1
QF9
1
QF15
A60L00010314/GPCA
1
QF6
A60L00010314/GCA
1
QF10
A60L00010312/ACN
1
QF10
BREAKER
131
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
MG CONTACTOR
C3000C C3000D
C4000A C6000B
A58L00010243
3
KM13
4
KM14
5
KM15
8
KM14,
710
A58L00010313/
A2A3P13
1
KM5
1
KM5
1
MS6
1
KM6
A58L00010330/A2A
1
KM4
1
KM6
1
KM7
1
KM5
A58L00010297/2B
2
KM11, 12
SYSTEM CONTACTOR
A58L00010321/E0D0
3
KM13
5
KM15
4
KM14
MINI CONTACTOR
A58L00010325/BFE
2
KM4, 5
2
KM6, 7
2
KM5, 7
A58L00010321/G0D0
1
KM6
A44L00010153
A44L00010161
A61L00010149/
1110A
A61L00010167/
2SN1D24
SAFETY BOX
A58L00010427/000.5
SURGE ABSORBER
A58L00010322/AB
3
Z13
5
Z15
5
Z14, 6
A58L00010326/A
2
Z4, 5
2
Z6, 7
2
Z5, 7
A74L00010008/
10D50D
11
A74L00010008/
20D50F
A74L00010008/20D50
A74L00010100
A74L00010091/B
01
A70L00010064/10
A70L00010054
A97L02010659/
S6D10MON
12
A97L02010659/
S6B10MON
12
TRANSFORMER
TIMER
NOISE FILTER
QUICK COUPLER
(LPSU)
132
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
GAS FILTER
C3000C C3000D
C4000A C6000B
A97L02000649/22S
A97L02000649/
20.5S
A97L02010211
NYLON FERRULE 1/4 A98L00040348/2N
16
16
16
20
18
18
30
10
10
10
SHUTTER MIRROR
(FOR GUIDE LASER)
A98L00010708
SHUTTER MIRROR
A2904516X204
HEAT EXCHANGER
A97L02010008/B
(IN)
HEAT EXCHANGER
A97L02010556/B
(OUT)
HEAT EXCHANGER
A97L02010439/B
(IN)
HEAT EXCHANGER
A97L02010557/B
(OUT)
HEAT EXCHANGER
A97L02010828
(IN)
HEAT EXCHANGER
A97L02010691/B
(OUT)
HEAT EXCHANGER
(FOR CABINET)
A97L02000849
A97L02010588
BEAM ABSORBER
A97L02000937/B
BEAM ABSORBER
ASSY
A2904560V200
#7 A2904522V200
BEAM ABSORBER #13 A97L02000872/C
(1)
#13 A97L02000872/D
#13 A97L02000873
(1)
A97L02010972
A49L00010069
A49L00010069/L
A04B0810C320
CARTRIDGE FILTER
WARNING LIGHT
133
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
FET MODULE PCB
A20B10060050
STEPUP
A20B10060070
TRANSFORMER PCB
RF INVERTER PCB
A20B10060060
DIODE
A50L20010257/F
A50L20010257/R
DIODE HEAT SINK A
A50L60010569
DIODE HEAT SINK B
A50L60010570
DIODE SUPPORT A
A2500803X008
DIODE SUPPORT B
A2500803X009
DIODE PLATE A
A2500803X006
DIODE PLATE F
A2500803X011
DIODE PLATE G
A2500803X012
ISOLATION SHEET
A50L80010193
FET MODULE PCB
A20B10070140
A20B10070150
STEPUP
A20B10060071
TRANSFORMER PCB
DIODE
A50L20010257/F
A50L20010257/R
A20B10070140
A20B10070150
STEPUP
A20B10060131
TRANSFORMER PCB
DIODE
A50L20010257/F
A50L20010257/R
A20B10070140
A20B10070150
STEPUP
A20B10070132
TRANSFORMER PCB
DIODE
FET MODULE PCB
FET MODULE PCB
A50L20010439
C3000C C3000D
C4000A C6000B
This column is quantity of PSU parts per one LPSU.

(B204, B205)

(B206, B207)

(B208)

(B209)
134
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
FET MODULE PCB
A20B10070140
A20B10070150
STEPUP
A20B10060072
TRANSFORMER PCB
DIODE
A50L20010439
C3000C C3000D
C4000A C6000B

(B210)
135
5. MAINTENANCE
B70115EN/03
REPAIRABLE PARTS
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C C3000C C3000D C4000A C6000B
LASER PSU UNIT
A14B0082B204
(2)
(2)
A14B0082B205
(4)
(2)
(4)
A14B0082B206
(4)
A14B0082B207
(2)
(2)
(2)
(3)
(4)
A14B0082B208
(4)
(2)
A14B0082B209
A14B0082B210
MATCHING BOX
(For no trigger type)
A14B0082B305
MATCHING BOX
A14B0082B306
A14B0082B308
A14B0082B310
A14B0082B311
MATCHING BOX
(For trigger type)
A14B0082B312
MATCHING BOX
A14B0082B313
A14B0082B314
A14B0082B315
IF PCB
0L A16B11100223
IF PCB
16L A02B0128C203
(1)
(1)
(1)
IF PCB
16L, 16iL A16B21000141
16iL A04B0800C341
ADDITIONAL PCB
A16B16000780
INTERMEDIATE PCB B
A16B16000361
INTERMEDIATE UNIT
A04B0813C323
A04B0814C323
A04B0815C323
A16B16000660
A16B16000661
A16B16000663
A16B16000670
A16B16000770
ADAPTER for
INPUT UNIT CTRL

PCB
TURBO PCB
136
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
C3000C C3000D
C4000A C6000B
CONNECTION PCB
A16B17000460
TERMINAL PCB
A16B17000470
STABILIZED PSU
A20B10050124
POWER SENSOR
UNIT
A04B0803D001
A04B0807D001
(1)
A04B0809D001
#5 A04B0800C005
(1)
#5 A04B0800C007
(1)
#6 A04B0800C009
#6 A04B0800C011
A04B0800C015
EXHAUST PUMP
A90L00010425
SHUTTER UNIT
A04B0810C414
A04B0812C414
A04B0815C411
#5 A04B0810C402
(1)
#6 A04B0810C405
#5 A04B0807C402
(1)
#6 A04B0807C405
#6 A04B0811C405
A04B0812C404
A04B0810C403
(1)
(1)
(1)
A91L00010201
A97L02000797/B
TURBO BLOWER
EXHAUST CTRL
UNIT
PRESSURE CTRL
UNIT
PRESSURE
SENSOR
CTRL VALVE
#15 A91L00010102
137
5. MAINTENANCE
B70115EN/03
MODEL QUANTITY
NAME
SPECIFICATION
NOTE
C1500B C2000B C2000C
WATER DISTRIBUTOR
C3000C C3000D
C4000A C6000B
A04B0810C420
A04B0807C420
A04B0813C420
A04B0811C420
A04B0814C420
A04B0815C420
WATER DISTRIBUTOR A04B0812C420

A
WATER DISTRIBUTOR A04B0812C421

B
(1)
A90L00010464/CE
A90L00010465/CE
#2 A04B0810C451
#2 A04B0811C451
#2 A04B0811C453
HF INVERTER
BEAM FD UNIT
A90L00010382/C
#1
For special optics (Refer to the data sheet with oscillator).
#2
Short optical path length type (C1500B, C2000B). Refer to the data sheet with oscillator (C3000C).
#3
With assy pipe (Without welding pipe).
#4
Confirm the voltage release type of breaker.
#5
Turbo blower without pistion ring. Exhaust controller for this turbo blower only.
#6
Turbo blower with piston ring. Exhaust controller for this turbo blower only.
#7, 8, 9, 10
Be careful of combination.
#11 Use the service stock for the C3000B. Specify A98L00010757/B when newly ordering.
#12 A04B0805C414 isold type. If you have this one. It avairable for all type of laser oscillator.
#13 Confirm the actual oscillator and specify A97L02000872/C or A97L02000873.
The following parts are needed though both A97L02000872/C and A97L02000873 can be maintained when A2904532V200 or
A2904532V202isinstalled.
*A97L02000872/C
NAME
SPECIFICATION
CLAMP A
A2904532X266
CLAMP B
A2904532X267
BOLT
A97L02000666/516S
*A97L02000873
NAME
SPECIFICATION
CLAMP A
A2904532X263
CLAMP B
A2904532X264
BOLT
A97L02000666/516S
138
5. MAINTENANCE
B70115EN/03
#14 Use the service stock for the model specified in this list. Specify A20B10050124 when newly ordering.
#15 Use the service stock for the model specified in this list. Specify A91L00010201 when newly ordering.
When A91L00010102 is installed, the following parts are necessary besides A91L00010201.
NAME
SPECIFICATION
SENSOR BASE
A2904532X040
SENSOR HOLDER
A2904532X041
BASE BLOCK
A2904532X042
139
6. TROUBLESHOOTING
B70115EN/03
TROUBLESHOOTING
140
6. TROUBLESHOOTING
B70115EN/03
6.1
TROUBLESHOOTING
PROCEDURE
CHECKING ON FAULTS
The troubleshooting procedure to be applied depends on the failure

occurrence status as indicated below. Perform checking according to the
items listed below.
(1) Action in response to alarm screen display (See Sections 6.2 and 6.3.)
(2) Major faults
1) Laser power supply unit alarm display (See Section 6.4.1.)
2) The power cannot be turned off with the CRT/MDI power switch.
(See Section 6.4.2.)
3) The power cannot be turned on with the CRT/MDI power switch.
(See Section 6.4.2.)
4) The laser output level is low immediately after the power is turned
on. (See Section 6.4.2.)
5) The laser output displayed on the CRT screen is unstable. (See
Section 6.4.2.)
6) A cooling fan circuit breaker trips. (See Section 6.4.2.)
7) The magnetic contactor for a vane pump causes thermal trip. (See
Section 6.4.2.)
8) The main circuit breaker trips. (See Section 6.4.2.)
9) Excessive laser gas consumption. (See Section 6.4.2.)
10) A highfrequency inverter related alarm is displayed. (See
Section 6.4.2.)
After identifying the following items, call the FANUC service center. In
some cases, a symptom is not actually a fault in the oscillator, although
it looks like a fault. So, check it with the following sections.
(1) Symptoms
1) State of operation
(machining in progress, oscillator being started, etc.)
2) Timing of a fault (alarm)
3) Alarm number
4) How often the fault occurs
5) Oscillator serial number
(2) Other information
1) Software system and edition indicated on the CRT screen when
power is turned on
2) Parameter settings;
check the current parameter settings with the corresponding values
indicated on the unit, and report your finding to the FANUC service
center.
6.2
ERROR MESSAGES
AND
COUNTERMEASURES
See the conceptual diagram of alarm processing and the list of error code
in the appendix.
141
6. TROUBLESHOOTING
6.3
RESPONDING TO
ALARM MESSAGES
ON THE SCREEN
Alarm No. 4061 [661]
B70115EN/03
The alarm number, DGN, and parameter number (PRM NO.) vary with
the CNC model. So, the FS16L or FS16iL number comes first, and the
FS0L number is enclosed in parentheses.
Anomaly of AD converter 1 (Refer to DGN = 981 [844, 845/bit 7])

FS0L: AD converter 1 on Printed Circuit Board A16B12120270
(CNC side) is not normal.
FS16L, FS16iL:
AD converter 1 on Printed Circuit Board A16B11100260
or A16B21000141 (oscillator side)
No.
Alarm No. 4062 [662]
Cause of trouble
Solution
Anomaly of AD
converter 1
For FS0L: Replace AD converter 1 installed at

G9 on A16B12120270 (CNC side).
For FS16L, FS16iL:
Replace AD converter 1 installed at
C11 on A16B11100260 (oscillator
side).
B8 on A16B21000141 (oscillator
side).
Anomaly of printed If this alarm is still issued after replacing AD concircuit board
verter 1, replace the following printed circuit board:
For FS0L: A16B12120270
For FS16L, FS16iL:
A16B11100260 or
A16B21000141
Anomaly of AD converter 2 (Refer to DGN = 982 [846, 847/bit 7] )

FS0L: AD converter 2 on Printed Circuit Board A16B12120270
(CNC side) is not normal.
FS16L, FS16iL:
AD converter 2 on Printed Circuit Board A16B11100260
or A16B21000141 (oscillator side) is not normal.
No.
Cause of trouble
Solution
Anomaly of AD
converter 2
Anomaly of printed If this alarm is still issued after replacing AD concircuit board
verter 2, replace the following printed circuit board:
For FS0L: A16B12120270
For FS16L, FS16iL:
A16B11100260 or
A16B21000141
142
For FS0L: Replace AD converter 2 installed at

J9 on A16B12120270 (CNC side).
For FS16L, FS16iL:
R11 on A16B11100260 (oscillator
side).
D7 on A16B21000141 (oscillator
side).
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4063 [663]
Anomaly of laser power supply unit

(Refer to DGN 966, 967, 974, 975 [842, 854].)
This alarm is issued, if a fault occurs in the laser power supply unit.
The cause of the fault and the required action are described below.
The laser power supply unit issues this alarm and stops operation to
protect itself, even if a fault occurs outside the power supply. In many
cases, this alarm is issued when the laser power supply is normal. So,
sufficient investigation is necessary. If the power supply is turned on
without removing the cause of the alarm, the alarm will be issued
again.
(1) Preliminary inquiry
No.
Cause of trouble
Solution
Checking parame- Confirm that all the parameters described in the

ters
attached parameter sheets are correctly set.
In case there exists any error, correct it.
Checking the discharge tubes
2
3
Check whether the mounting bracket and cooling fin of a discharge tube are loose or missing.
Correct any abnormalities.
Check whether the metallized electrode has
separated.
Check whether the inside and outside of a discharge tube is dirty. Replace a discharge tube
if it is dirty.
Check whether a discharge tube suffers any
damage such as a crack.
Checking cooling
water temperature
Confirm that the cooling water temperature is in the

range of 20C to 30C. In case it is not so, adjust
it.
Checking cable
connectors
Check the cables and connectors for any looseness. If a cable or connector is loose, remake the
connection.
Insufficient discharge aging
Perform another aging operation according to Section 4.3 (8).
(2) Confirming operation and investigating the cause of a fault

Switch on the failing power unit, observe the condition and clarity the
cause retering to the following tables.
No.
Phenomenon
Presumption cause
An alarm is issued when the LED of a laser

power supply unit is not turned on.
The IF PCB of the CNC is

faulty.
An alarm occurs before discharge begins.
The laser power supply is

defective.
The RF discharge current is small in comparison with other units. The base discharge is narrow and tends to disappear.
The laser power supply is

maladjusted.
The RF discharge current is large in comparison with other units. The alarm is DCV
alarm.
143
6. TROUBLESHOOTING
B70115EN/03
No.
Phenomenon
Presumption cause
The RF voltage of all the units is high during discharge and the laser power is low.
The base discharge is narrow and tends to
disappear. When the purge is repeatedly
performed, the RF voltage gradually decreases and the laser power recovers.
This phenomenon often appears after the
laser was not used for a long period.
The external laser gas

pipe is abnormal.
The RF voltage of all the units is high during discharge and the laser power is low.
disappear. Even though the purge is repeatedly performed, the situation does not
recover.
Internal leakage
The RF voltage of all the units is high during discharge but the laser power is normal.
disappear. In the high laser power region, it
is lower than the normal value.
The intratube pressure

of the laser gas is high
(pressure sensor anomaly) or the gas composition
is not normal (excessive
amount of N2).
The RF voltage of all the units is low during

discharge and the laser power is low. The
base discharge is widely spread. In the
high laser power region, the power is low
but in the low power region, it is higher than
the normal value. The alarm is DCV alarm.
The intratube pressure

of the laser gas is low
(pressure sensor anomaly) or the gas composition
is not normal (excessive
amount of He).
An alarm is generated notwithstanding the

Anomaly of the Laser
absence of anomaly either in the diagnostic powersupply unit itself
data, discharge state or laser power char(anomaly of alarm circuit).
acteristics.
(3) Solution
No.
Cause of trouble
Solution
PCB abnormal
Replace the faulty PCB.
Laser power supply abnormal
Locate the faulty component, then replace

it.
Laser power supply maladjusted
Adjust the laser power supply as explained

in Chapter 9.
External laser gas pipe

abnormal
Identify the faulty location, then repair the

external pipe as explained in Chapter 4.
Gas composition ratio ab- Replace the laser gas with laser gas satisfynormal
ing the specification.
Pressure sensor abnormal
144
Replace the pressure sensor.
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4065 [665]
Shutter anomaly (Related DGNs are shown below.)

The table below lists the valid combinations of shutter open and close
commands and open and close position detection signals. The shutter
position is detected three seconds after opening or closing of the
shutter is specified. This alarm is issued for any state other than those
states that are marked f in the combination table below. Refer to the
following table when applying countermeasures for this alarm.
Command
Open command
DGN973, bit0=1
[DGN856, bit2=1]
Close command
DGN973, bit0=0
[DGN856, bit2=0]
Open detector state signal

DGN961, bit4
[DGN841, bit5]
Close detector state signal

DGN961, bit5
[DGN841, bit6]
Valid (f)/Invalid ( )
State
The table below lists the causes of faults and the corresponding
countermeasures.
No.
Cause of trouble
Solution
Shutter clamp not removed.
Remove the shutter clamp.
Anomalous detecting position
Correct the position of the

position detector.
Anomaly of position detecter
Replace the position detector.
Shutter cam loosened.
Secure the position detector

in the correct position.
Shutter balancer loosened.
Secure the position detector

in the correct position.
Shutter arm section caught
Replace the shutter unit.
Intermediate PCB B (A16B16000361)

is faulty.
For FS0L:
Oscillator IF PCB (A16B11100223) is
faulty.
NC IF PCB (A16B12120270) is faulty.
For FS16L, FS16iL:
IF PCB (A16B21000080,
A16B11100260, or A02B0128C202
(unit specification)) is faulty.
A16B21000141 is faulty.
Anomaly of cables connecting each PCB. Check the connection of

each cable.
145
6. TROUBLESHOOTING
Alarm No. 4066 [666]
B70115EN/03
Discharge anomaly (Refer to DGN = 909 to 914 [861 to 868]

Pressing the HVON (start discharge) button causes the unit to start
discharging. This alarm is issued, if at least one discharge tube fails
to operate.
No.
Cause of trouble
Solution
Anomaly of parameter
setting
Make a setting using the values of PRM.

No. 15220 [0247], 15221 [0248], 15241
[0237], 15222 [0249], 15223 [0250] listed in
the parameter table attached to the machine.
Anomaly of laser gas

composition
Specified laser gas: CO2/N2/He = 5/55/40%

(volume ratio)
Composition accuracy:
Replace the laser gas with laser
gas having an accuracy of within
"5% for each gas component.
Discharge tube electrode

mounting bracket loosened
Check the electrode contacts, and secure

any loose mounting brackets.
Gas circulating system

leakage of gas or water
Tighten or replace the component(s) at any

leak point.
The gas flow control valve Adjust the gas flow control valve to obtain
is closed
the specified gas flow rate.
Matching box monitor abnormal
Crack or hole (which

Replace the discharge tube.
often obscures a crack) in
the discharge tube
146
Replace the matching box.
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4067 [667]
Overheat of laser cabinet (Refer to DGN = 961/bit 1 [841/bit7])

The temperature of the input side of the electrode cooling fan is
monitored and sends alarm when it exceeds 60C. When the
temperature decreases, the alarm state is solved automatically. Before
that it cannot be reset.
No.
Cause of trouble
Solution
Excessive environmental temperature
Reduce the ambient temperature (to 5C to 30C).
Excessive cooling water temperature
Change the temperature

setting of cooling water to a
normal temperature (20C to
30C).
Anomaly of cooling fan motor
Replace the cooling fan motor.
Anomaly of temperature sensor
Check the continuity of the

temperature sensor. If any
disconnection is found, replace the temperature sensor.
For FS0L:
Oscillator IF PCB (A16B11100223) or
CNC IF PCB (A16B12120270) is faulty.
For FS16L, FS16iL:
A16B21000080, A16B11100260,
A02B0128C202 (unit specification), or
Anomaly of connecting cables between

the PCBs.
147
Check the connection of

each cable.
6. TROUBLESHOOTING
Alarm No. 4068 [668]
Alarm No. 4069 [669]
B70115EN/03
Too much incident laser beam back to the resonator.

(Refer to DGN = 906 [878])
This alarm is issued, if a workpiece reflects laser beam more than the
rating to the laser oscillator. This can happen when the laser beam is
used to drill, cut, or weld materials (such as copper, brass, and
aluminum) having a high reflectivity to the laser beam (10.6 mm).
No.
Cause of trouble
Solution
Excessive returning
beam back into the resonator
Lower the output specified in the command,

or take an action to reduce the reflected laser
beam.
for alarm detection
Check the settings of parameter Nos. 15265

[3982] and 15266 [3983] with the corresponding values in the parameter table attached to
the unit.
for output power table
Check the settings of parameter Nos. 15280

to 15308 [265 to 294] with the corresponding
values in the parameter table attached to the
unit.
Set the parameter PRM. No. 15215 [259] to
for input calibration coef- be the values as shown in the attached table.
ficient
If rear mirror or power sensor was replaced,
change the parameter.
Anomaly of power supply unit voltage of IF PCB

(Refer to DGN = 960/bit 0 [841/bit 0])
This alarm appears when there occurs the anomaly in the stabilized
power unit voltage +5, "15, +24V of IF PCB for NC interface.
No.
Alarm No. 4070 [670]
Cause of trouble
Solution
Fuse blowing
Correct the cause of the blown fuse, then replace the fuse.
Anomaly of stabilized
power source unit
Check the output voltage (24 V "5%) of the

stabilized power source unit. If the allowable
voltage range is exceeded, replace the unit.
Anomaly of power unit

of IF PCB
See Section 6.5 for details of the normal supply voltage. If the allowable voltage range is
exceeded, replace the IF PCB.
Laser oscillator main cir- Check whether the main circuit breaker is
cuit breaker abnormal
conducting (ON).
Anomaly of chiller unit (Refer to DGN = G221/bit 6 [145/bit6]

Setting the RUN (start pressure control) to ON causes the NC to output
a chiller unit start signal to the machine, which will respond with a
chiller unit ready signal. The NC monitors this signal. If the chiller
ready signal stops, the NC issues this alarm. Check the operation of
the chiller.
148
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4071 [671]
Anomaly of assist gas (Refer to DGN = G221/bit 7 [145/bit7]

When starting machining, the NC monitors for a ready signal from the
assist gas supply unit in the machine. If this signal is not sent normally,
the NC issues this alarm.
Check the DGN data and the signal from the assist gas supply unit.
If the signal is abnormal, check the assist gas supply unit.
This alarm is issued if an value other than 0 to 3 or a value other
than 1 to 7 is selected for G32PQ during program execution.
Alarm No. 4072 [672]
Shortage of cooling water (Refer to DGN = 961/bit 1 [840/bit 1])

This alarm appears when the water shortage takes place.
If the 4070 chiller abnormality alarm also appears, the chiller is
defective. Check the chiller unit.
No.
Cause of trouble
Shortage of cooling water
Solution
1
The capacity of the chiller unit is insufficient, or the water flow rate is reduced
due to a clogged pipe. Use a chiller unit
having sufficient capacity, or clean the
piping.
Check whether the cooling water is distributed normally throughout between
the external optical system and the laser
oscillator. Ensure that cooling water is
supplied to the laser oscillator at the
specified flow rate. This alarm is issued
if cooling water is supplied at a flow rate
even slightly below the specified value.
Anomaly of connecting
cables
Check the connection of each cable.
Anomaly of water flow

rate sensor
If this alarm is issued even when the specified flow rate is satisfied, clean or replace
the water flow rate sensor. When the rate is
lower than rated flow, this alarm occurs.
149
6. TROUBLESHOOTING
Alarm No. 4073 [673]
Alarm No. 4074 [674]
B70115EN/03
Decrease of laser gas pressure (Refer to DGN = 960/bit 5 [840/bit 4])

The pressure of the laser gas supplied to the laser oscillator is
monitored. This alarm is issued, if this pressure becomes lower than
the permissible level (0.1 MPa).
No.
Cause of trouble
Solution
Tool low supply pressure

of laser gas
Adjust the secondary pressure at the regulator on the gas cylinder so that the pressure of laser gas supplied to the laser oscillator is 0.1 to 0.2 MPa (rating) as measured
at the entry of the oscillator. If the distance
between the gas cylinder and the oscillator
is larger than 5 m, it is necessary to set the
pressure slightly higher.
No laser gas.
Check whether the gas cylinder is empty or

whether the connection valve is closed. If
empty, replace the gas cylinder.
Leakage from the gas

tube leading to the oscillator
Check that the gas pipe joint is secure.

Also check whether the tube or pipe is broken. If so, replace it.
Gas supply pressure sen- Check whether the gas supply pressure
sor or cable abnormal
sensor is set correctly. If not, set the sensor
as explained in Chapter 9. If the sensor
cannot be reset, replace the sensor.
Roots blower overheat (Refer to DGN = 960/bit 6 [840/bit 6]

This alarm is issued if the maximum allowable temperature of the
motor sequence section of the Roots blower is exceeded. When an
oscillator having turbo blowers is used, this alarm is not issued.
No.
Cause of trouble
Solution
Excessively high cooling

water temperature
Reduce the temperature of cooling water.
Insufficient cooling water
The amount of cooling water being supplied

to the Roots blower may be insufficient.
Check whether the cooling water tube between the water branch unit and Roots
blower is twisted or clogged. If the tube is
twisted or clogged, replace the tube.
Anomaly in temperature
sensor cable connection
Check whether the cable is securely connected to the temperature sensor. If not,
reattach the cable.
Anomaly in temperature
sensor
The temperature sensor is designed to be

actuated by temperatures of 60C or above.
If the temperature sensor is actuated at lower temperatures, replace the sensor.
150
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4075 [675]
Condensation (Refer to DGN = 961/bit 2 [840/bit 6])

There is a condensation sensor at the inlet of the water branch unit in
the oscillator. This alarm is issued, when condensation is detected.
No.
Cause of trouble
Solution
Tool low cooling water

temperature
Set the water temperature near the room

temperature (plus 1C).
Connecting anomaly of
condensation sensor
cable
Check whether the cable is securely connected to the condensation sensor. If not,
reattach the cable.
Anomaly of condensation
sensor
If the condensation sensor is actuated when

the water branch unit exhibits no condensation, the sensor is faulty. Replace the sensor.
If this alarm is issued, the alarm state cannot be reset until the
condensation has been removed.
Check DGN 961/bit 2 [840/bit 6] and dry the inside of the cabinet.
CAUTION
It is strictly forbidden to blow hot air higher than 60C to the
sensor.
Alarm No. 4076 [676]
Laser output decrease (Refer to DGN = 906 [878])

This alarm is issued, if the monitored laser output is much lower than
the specified laser output, that is the monitored laser output is lower
than the specified output by a value specified in parameter No. 15271
[242].
No.
Cause of trouble
Lack of output from laser

power sensor unit
The thermocouple inside the power sensor

unit may be damaged, or there may be a
poor terminal connection. Measure the direct current resistance between the terminals of the power sensor unit, and check
that the measured value falls within 100
ohms to 500 ohms. If the measured value
falls outside this range, replace the power
sensor unit.
Connecting anomaly of
the cable of laser power
sensor unit.
Check whether the cable is securely connected to the power sensor unit. If not, reattach the cable.
Anomaly of intermediate
PCB B
A16B16000361
If the above checks do not reveal any abnormality, and there is no output from intermediate PCB B, replace the PCB.
151
Solution
6. TROUBLESHOOTING
Alarm No. 4077 [677]
B70115EN/03
Overheat of beam absorber (Refer to DGN = 961/bit 7 [841/bit 3])

Laser beam is introduced into the beam absorber, when the oscillation
takes place with shutter closed. This absorber is watercooled and
sends alarm when the temperature exceeds a critical one. In the usual
operation, the irradiation of the absorber takes place only during the
calibration lasting 3 minutes just after the RUN start.
No.
Cause of trouble
Solution
Temperature sensor wired Check if the cable is securely connected to

incorrectly
the temperature sensor. If not, reattach the
cable.
Temperature sensor abnormal
152
The amount of cooling water being supplied

to the beam absorber may be insufficient.
Check whether the cooling water tube between the water branch unit and beam absorber is clogged. If the tube is clogged,
replace the tube.
The temperature sensor is designed to be

actuated by temperatures of 80C or higher.
If the temperature sensor is actuated at lower temperatures, replace the sensor.
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4078 [678]
Gas pressure anomaly in discharge tube (Refer to DGN = 905 [860])

The gas pressure is monitored after the discharge start ready condition
(LRDY) is established. This alarm is issued, if the monitored gas
pressure deviates by "100 (="1330 Pa) from the set gas pressure.
No.
Alarm No. 4079 [679]
Cause of trouble
Solution
setting of gas pressure
control
Check whether the values of PRM Nos.

15000/bit 1 [200/bit 1], 15244 [0264], 15245
[0207], and 15246 [0246] are set as indicated in the attached data sheets. If a different value is set, set the value specified in
the data sheets.
Gas leakage from piping
1) Check whether any joints in the gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components of the
gas circulating system are cracked. If a
cracked component is found, replace
that component.
3) Check whether there is a hole in a discharge tube. If a hole is found in a discharge tube, replace the discharge tube.
Abnormal supply laser

gas pressure setting
Anomaly of pressure sen- Replace the pressure sensor.

sor
The gas flow control valve Adjust the gas flow control valve to supply
is closed.
gas at the specified flow rate.
Anomaly of pressure con- If the above checks do not reveal any abtrol unit
normality, replace the pressure control unit.
The emergency stop button was pressed.

If the emergency stop button is pressed after the discharge start ready
condition (LRDY) is set up, the shutter is closed, discharge stops, and
the LRDY condition is resumed, then this alarm is displayed. To reset
the alarm, remove the cause of trouble, release the emergency stop
button, and press the reset key on the operators panel.
153
6. TROUBLESHOOTING
Alarm No. 4080 [680]
B70115EN/03
Leakage of gas tube/anomaly of exhaust pump

(Refer to DGN = 905 [860])
When the RUN (pressure control start) button is pressed, the exhaust
pump starts operating and expels gas from the gas circulating system
to cause a lowpressure condition. This alarm is displayed, if the
pressure is not reduced to the level specified in parameter No. 15240
[0235] within 10 minutes from the start of discharging.
No.
Cause of trouble
Solution
Incorrect gas pressure

control parameter setting
Check if the value of PRM No. 15240 [0235]

is set as indicated in the attached data
sheets. If a different value is set, set the
value specified in the data sheets.
Anomaly of IF PCB
For FS0L:
A16B11100223
For FS16L, 16iL:
A16B21000080
A16B11100260
Unit specification:
A02B0128C202
A16B21000141
If the gas pressure of the gas circulating

system does not decrease at all, the IF PCB
may be faulty. Check whether the CP89
connector on the PCB is loose. Also check
the signals of the IF PCB. If an abnormal
signal is detected, replace the IF PCB.
1) Check whether any component joints in

the gas circulating system are loose. If
a loose joint is found, tighten the joint
firmly.
2) Check whether any components in the
that component.
3) Check whether the Oring of each discharge tube is worn. Replace any O
rings that exhibit excessive wear. If a
Teflon Oring is ever removed, it must
be replaced with a new one.
4) Check whether there is a hole or crack
in a discharge tube. If a hole is found in
a discharge tube, replace the discharge
tube.
Anomaly of exhaust
pump
If the above checks do not reveal any abnormality, the performance of the exhaust
pump has deteriorated. Check the following
items.
1) The oil level is too low.
Supply oil as explained in Chapter 5.
2) Other than the approved type of oil is
being used.
Supply the approved type of oil as explained in Chapter 5.
3) The exhaust filter is clogged.
Replace the exhaust filter as explained
in Chapter 5.
4) The exhaust pump outlet is locked or
clogged to disable exhaust operation.
Remove the cause of the locking or
clogging.
5) If the steps above do not clear the fault,
replace the exhaust pump.
154
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4081 [681]
Anomaly of gas pressure control (Refer to DGN = 905 [860]

Pressing the RUN (pressure control start) button starts expelling air
from the laser gas tube. When a specified degree of vacuum is attained,
laser gas is supplied into the laser gas tube, and gas pressure control
begins. Fortyfive seconds after the turbo blower is started, a check
is made to see whether the vacuum in the laser gas tube has reached
to the level specified in parameter No. 15241 [0237] "20
(="266 Pa). If the specified level has not been reached, this alarm is
issued. When there is no abnormal condition, the turbo blower is
started and frequency matched signal appears then a discharge start
ready condition (LRDY) is set up.
No.
Cause of trouble
Solution
setting of gas pressure
control

15000/bit 1 [200/bit 1], 15244 [0264], 15245
[0207], and 15246 [0246] are set as indicated in the attached data sheets. If a different value is set, set the value specified in
the data sheets.
1) Check whether any component joints of

the gas circulating system are loose. If
a loose joint is found, tighten the joint
firmly.
2) Check whether any components of the
that component.
3) Check whether there is any hole in a
discharge tube. If a hole is found in a
discharge tube, replace the discharge
tube.
Anomaly of supply laser

gas pressure
Anomaly of IF PCB
For FS0L:
A16B11100223
For FS16L, 16iL:
A16B21000080
A16B11100260
Unit specification:
A02B0128C202
A16B21000141
Measure the pressure monitor voltage (1V =

Pressure value 100 (=1330 Pa) at the LTP
test terminal) and command voltage (about
5 V to 10 V at the GPC test terminal) being
output by the IF PCB. If a measured voltage is abnormal, replace the IF PCB.
Anomaly of pressure sen- If the pressure indication (DGN 905 [0860])

sor
varies significantly at irregular intervals, the
pressure sensor is faulty. Replace the sensor.
Anomaly of pressure con- If the above checks do not reveal any abtrol valve
normality, replace the pressure control
valve.
155
6. TROUBLESHOOTING
Alarm No. 4082 [682]
B70115EN/03
Anomaly of pressure sensor (Refer to DGN = 905 [860]

This alarm appears when the signal of the pressure sensor used for
pressure control detector vanishes.
No.
Cause of trouble
Solution
Disconnected cable between pressure sensor

and IF PCB
Check the cable connection. If the connection is abnormal, remake the connection.
Disconnected cable between oscillator IF PCB

and CNC IF PCB
Check the cable connection. If the connection is abnormal, remake the connection.
Anomaly of IF PCB
If a signal is received from the pressure

sensor, but there is no output from the IF
PCB, the IF PCB is faulty. Replace the IF
PCB.
Anomaly of CNC IF PCB

A16B12120270
If a signal is detected at the input terminal

(cable side) of the CNC IF PCB, but the
CNC monitor detects no signal, the CNC IF
PCB is faulty. Replace the CNC IF PCB.
Anomaly of pressure sen- If the power supply ("15 V) for the pressure
sor
sensor is normal, but there is no output, the
pressure sensor is faulty. Replace the pressure sensor.
Oscillator IF PCB specification:

For FS0L:
A16B11100223
For FS16L, 16iL: A16B21000080, A16B11100260
(Unit specification: A02B0128C202)
A16B21000141
Alarm No. 4083 [683]
Shutter failure to open

This alarm occurs when the shutter does not reach the correct position
at a certain time (preflow time of assist gas) after the shutter open
command.
This alarm takes place in the following cases.
No.
Cause of trouble
Solution
The preflow time of assist gas is too short for

the shutter to open.
Adjust the preflow time on setting screen.

It should be longer than 0.6 sec.
Movable part caught
Replace the shutter unit.
When beam output was

specified, an alarm was
issued.
Check the cause of the alarm, then take appropriate action.
156
6. TROUBLESHOOTING
B70115EN/03
Alarm No. [684]
Alarm No. 4085 [685]
Anomalous selection of the number of discharge tubes.

Anomalous selection of the number of discharge tubes. (Only FS0L)
No.
Cause of trouble
Solution
The case of FS0L.

The number of discharge
tubes is selected tube
other than 2 or4.
The number of discharge tubes should be

selected to be one of 2or 4. The selection
can be done in the laser setting screen and
the result is indicated as PRM. No. [0226]
unselected.
Decrease of laser output power (Refer to DGN = 906 [878])

This alarm appears when the laser output power decreases and takes
an abnormally higher calibration coefficient.
No.
Cause of trouble
Solution
An optical part in the laser Align the laser resonator.

resonator is out of position.
An optical part in the laser Clean or replace the optical part.

resonator is dirty.
The supplied laser gas is

not the one specified.
Cooling water temperaCheck whether the temperature of cooling

ture out of specified range water falls within the range of 20C to 30C.
Laser oscillator ambient

temperature out of specified range
157
Replace the laser gas with the specified

one, that is CO2:N2:He = 5:55:40% (volume
ratio) with a composition ratio accuracy of
"5%.
Check whether the ambient temperature

falls within the range of 5C to 30C.
6. TROUBLESHOOTING
Alarm No. 4087 [687]
B70115EN/03
Shutter temperature abnormal (Refer to bit 6 of DGN 961 [bit 2 of 841].)

This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum. The table below lists the causes of faults
and the corresponding countermeasures.
No.
Alarm No. 4088 [688]
Solution
Contamination of shutter mirror
Clean or replace the shutter

mirror.
Anomaly of temperature sensor
Replace the temperature

sensor.
Temperature sensor cable broken
Replace the cable.
Intermediate PCB B (A16B16000361) Replace the faulty PCB.

is faulty.
For FS0L:
Oscillator IF PCB (A16B11100223) is
faulty.
CNC IF PCB (A16B12120270) is faulty.
For FS16L, 16iL:
A16B21000080, A16B11100260,
A02B0128C202 (Unit specification), or
Anomaly of PCB connection cables
Check the connection of

each cable.
Discharge tube voltage drop (Refer to DGN 909 [861].)

This alarm is issued, if the voltage applied to the discharge tube drops
largely. More specific, the discharge tube voltage for reference
discharge is set up automatically to parameter No. 15270 [199] each
time the RUN button is pressed. This alarm is issued, if the
automatically set discharge tube voltage is lower than the discharge
voltage specified at the previous RUN time, by at least the amount
specified in parameter No. 15272 [243].
No.
Alarm No. 4089 [689]
Cause of trouble
Cause of trouble
Solution
The laser gas composition is not as specified.
Replace the laser gas with the specified

one, that is CO2:N2:He = 5:55:40% (volume
ratio) with a composition ratio accuracy of
"5%.
Anomaly of discharge
tube voltage detection
system
If discharge is performed, but the monitored

discharge tube voltage is extremely low, replace the matching box.
Degradation of turbo
blower gas circulating
performance
Check whether the turbo blower and high

frequency inverter are normal. Replace the
turbo blower or highfrequency inverter if
found to be faulty.
Assist gas not output

(Refer to bits 0 to 2 of DGN F222 [bits 0 to 2 of 173].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
no assist gas is selected, or an assist gas condition is not set up.
158
6. TROUBLESHOOTING
B70115EN/03
Alarm No. 4090 [690]
Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
the laser oscillator is not in the LSTR state (discharging state).
Alarm No. 4094 [ ]
Exhaust pump operation abnormal (Refer to bit 3 of DGN.)

The thermal magnetic contactor for the vacuum pump has tripped.
No.
Alarm No. 4099 [695]
Cause of trouble
Solution
Anomaly of exhaust
pump
Replace the exhaust pump.
Anomaly of IF PCB
If no thermal switch has tripped, replace the

IF PCB.
Signal cable broken
Replace the cable.
Gas pressure not reached (Refer to DGN 905 [860].)

This alarm is issued, if the discharge tube gas pressure does not reach
[specified discharge tube gas pressure during oscillation tolerance]
after HV is set to ON.
No.
Cause of trouble
Solution
Invalid parameter setting

15001/bit 3 [3981/bit 6], 15247 [4398], and
15248 [4399] are set as indicated in the attached data sheets. If a different value is set,
set the value specified in the data sheets.
Gas leakage from internal piping
1) Check whether any component joints of the

gas circulating system are loose. If a loose
joint is found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system have cracked. If a
cracked component is found, replace that
component.
3) Check whether there is a hole in a discharge tube. If a hole is found in a discharge tube, replace the discharge tube.
Pressure sensor abnormal
159
6. TROUBLESHOOTING
Alarm No. 4100 [691]
Alarm No.
4101, 4111 [691]
B70115EN/03
Inverter abnormal
If the inverter used to power the turbo blower is abnormal, this alarm
is issued. When this alarm is issued, check that the alarm LED on the
LED indicator section of the inverter is lit. At this time, do not turn
off the power to the inverter because the alarm will be reset if the power
is turned off.
For an explanation of faults and corresponding countermeasures, see
the next alarm item. If the turbo blower faults listed in the following
table are not observed, replace the inverter.
No.
Cause of trouble
Solution
Excessive intake pressure
Check whether the values of PRM Nos. 15240

[235], 15241 [237], and 15242 [236] are set
according to the attached data sheets.
Turbo blower rotor

locked
Replace the turbo blower. The rotor may have

locked as a result of one or more of the following causes:
1) Foreign matter in the circulating system
2) Failed bearing
So, check for foreign matter.
Failed bearing in turbo

blower
Replace the turbo blower. The bearing may

have failed as a result of one or more of the
following causes:
1) Deteriorated oil
2) Foreign matter in the bearing
So, always replace the oil at the recommended
intervals.
Invalid inverter setting
Check if the inverter is set as indicated in the

attached data sheets.
Defective pressure
sensor
Invertor frequency reached signal abnormal

This alarm is issued, if a frequency reached signal (bit 1 of DGN 962,
963, and 964) is not received within 120 seconds after the turbo blower
is started.
No.
Cause of trouble
Solution
Cable connection abnormal Check whether the cable is securely connected to the inverter. If not, reattach the
cable.
Invertor abnormal
See the next item explaining inverter

alarms indication.
Invalid invertor setting
Set the inverter correctly as explained in

Chapter 9.
Turbo blower abnormal
The rotor lock or bearing may be destroyed. Replace the turbo blower.
160
6. TROUBLESHOOTING
B70115EN/03
Alarm No.
4103, 4113 [691]
Turbo blower not stopped

This alarm is issued if a turbo blower is not stopped within 120 seconds
after RUN OFF. The power can be turned off even if the purge
complete signal is not turned on.
No.
Alarm No.
4105, 4115 [ ]
Solution
Cable connection abnormal Check the cable connection.
Set the inverter correctly as explained in

Chapter 9.
Turbo blower temperature abnormal

This alarm is issued, if the temperature of the turbo blower motor
winding becomes higher than the permissible level.
No.
Alarm No. 4106 [620]
Cause of trouble
Cause of trouble
Solution
Cooling water temperature high
Reduce the temperature of the cooling water.
The amount of cooling water supplied to the

turbo blower may be insufficient. Check
whether the cooling water tube between the
water branch unit and blower is twisted or
clogged. If the tube is twisted or clogged,
replace the tube.
Anomaly of temperature
sensor or temperature
sensor cable connection
Check whether the cable is securely connected to the temperature sensor. If not,
reattach the cable.
Low turbo blower oil

This alarm is issued if the signal from the turbo blower oil sensor
indicates that the oil level has fallen below the setting.
No.
Cause of trouble
Solution
The oil level is lower than

specified.
Replenish the turbo blower with oil until the

oil level on the oil gauge is between H and
L. Replace the oil every 4 months of use or
every 1000 hours of operation, whichever is
earlier.
Invalid sensor setting
Set the sensor correctly as explained in

Section 10.2.
Sensor abnormal
Replace the turbo blower.
Insufficient turbo blower

cooling
Check whether cooling water is flowing

through the turbo blower. When the temperature of the turbo blower motor section is
high, check whether the cooling water path
is clogged. If the cooling water path is
clogged, wash or replace the turbo blower.
161
6. TROUBLESHOOTING
Alarm No. 4107 [621]
B70115EN/03
External reflecting mirror not installed

This alarm is issued, if the beam reflecting unit is not attached with a
mirror or mirror holder.
No.
Alarm No. 4132 [622]
Cause of trouble
Solution
Mirror not mounted
Mount a 0degree shift mirror.
Sensor abnormal
Replace the switch.
Cable abnormal
Replace the cable.
Parameter changed
This alarm is issued if the gas pressure (parameter No. 15241 [237],
15242, or 15243 [236]) or the base bias command value (parameter
No. 15223 [250]) has been modified.
Action: Press the RESET key to release the alarm.
162
6. TROUBLESHOOTING
B70115EN/03
6.4
MAJOR FAULTS
6.4.1
Laser Power Supply
Alarm Display
(1) If an alarm is issued to indicate the occurrence of a power supply fault,

check the diagnosis screen to determine which power supply unit
issued that alarm signal. The bit corresponding to the power supply
unit that issued the alarm signal is set to 1.
Unlike conventional power supply units, the power supply unit does not
have a circuit protector. Therefore, a check using the circuit protector
cannot be made.
Diagnosis
screen
0L
DGN.854
7
No.8
6
7
5
6
4
5
3
4
2
3
1
2
0 bit
1
16L,
16iL
DGN.974
No.8
No.16 15 14 13 12 11 10
975
(2) Check the LEDs of the power supply unit that issued the alarm signal.
Fig. 6.4.1 (a) shows the location of the LEDs.
The LED display is extinguished when the power to the
oscillator is turned off after an alarm is issued.
VR VR
13 11
LED1
LED2
Controls for power

supply adjustment
LEDs for laser power

supply alarm display
Fig. 6.4.1 (a) Location of LEDs for laser power supply alarm display
(3) Fig. 6.4.1 (b) shows the types of alarms displayed by the LEDs.
DCI
1
LED1
LED2
Vi PFI PFV OH Vc DCV
DCI 1 : DC momentary overcurrent alarm

DCI 2 : DC peak current alarm
(DC power alarm)
DCI 3 : DC steady current alarm
DCV : DC overvoltage alarm
Vc
: DC control power supply
alarm
OH : Power supply overheat
(In case of C6000B, power
supply or matching box
overheat)
RFV : RF overvoltage alarm
RFI : RF overcurrent alarm
Vi
: Inverter overvoltage alarm
Fig. 6.4.1 (b) Types of power supply alarms and corresponding LED
positions
163
6. TROUBLESHOOTING
B70115EN/03
(4) Table 6.4.1 explains each type of alarm.

Table 6.4.1 Causes of power supply alarms
Type of alarm
Source
Major causes
DCI 1
DCI 2
DCI 3
This alarm is issued if the DC

Load shortcircuit
current of the power supply unit
is high when the oscillator is op- Discharge tube dielectric
erating in CW/pulse mode.
breakdown
DCV
This alarm is issued if the DC

voltage of the power supply unit
is high when the oscillator is operating in CW/pulse mode.
Vc
This alarm is issued if an overcurrent or overvoltage occurs in

the control power supply of the
power supply unit.
OH
This alarm is issued if water is

not flowing through the cooling
water heat sink of the power
supply unit.
In case of C6000B, it is occurred when the fan of power
supply (or matching box) is broken.
RFV
This alarm is issued if a high

voltage is applied to the discharge tube when the oscillator
is operating in CW/pulse mode.
RFI
This alarm is issued if a high RF

current flows through the discharge tube when the oscillator
is operating in CW/pulse mode.
Vi
This alarm is issued if a high inverter voltage is detected in the

power supply unit when the oscillator is operating in CW/pulse
mode.
164
Infinite load
Discharge tube separation
Failure to install a feeder
6. TROUBLESHOOTING
B70115EN/03
(5) If an alarm is issued at restart or at the start of discharge (HV ON), the
power supply unit has been damaged.
1) When only the DCI alarm is issued
The highspeed diode or FET module may be damaged. Locate the
problem and replace any faulty component or module.
2) When an overheat alarm is issued
Check whether cooling water is flowing through the power supply
unit.
3) When other alarms are issued
In addition to the causes displayed on the alarm screen, consider the
following:
Failure of a circuit internal to the power supply unit
Failure of a coaxial cable
Loose screw in a matching box
Failure of a discharge tube (dielectric breakdown, occurrence of pin
holes)
6.4.2
Power Supply cannot
be Switched off Using
CRT/MDI Switch.
6.4.3
Power Supply cannot
be Switched on Using
CRT/MDI Switch.
6.4.4
Laser Output Just After
Switch on is Low.
The power supply cannot always be switched.

It can be switched only before the switching on of RUN (pressure control
start) or after the completion of purge with RUN off and the PURGE lamp
lit.
If the laser gas supply is suspended during operation, discharge halts with
the occurrence of laser gas decrease alarm (alarm 4073/673). Then
because of the lack of laser gas supply, purge cannot be done even with
RUN switch on and PURGE lamp are not lit. In this case the power
supply cannot be switched off.
It is necessary here either to resume the laser gas supply or break power
supply externally (using the breaker of the machine or the external one).
If the oscillator is left with a vacuum established, foreign matter may enter
the oscillator. Perform purge processing immediately.
1) Nonfuse breaker(NBK1) for cooling fans, electromagnetic valves,

and stabilized power sources is tripping.
2) Electromagnetic contactor(MS3) for vane pump is tripping thermally.
In the above cases the power supply is automatically switched off and
cannot be switched on.
Remove first the causes of trip , reset the thermal relay and then switch
on the power supply.
1) The cooling water temperature is not normal, although the chiller unit
is operating.
This is the case when the room temperature is high and can be solved
in 5 to 10 minutes automatically.
2) Slight leakage exists in the tube between laser and gas cylinder.
This is the case in which the laser output in the first run after a long
halt is low and becomes normal after the second run. Check for
leakage, loose fixing or crack. Correct the tube and fitting if any
anomaly exists.
165
6. TROUBLESHOOTING
6.4.5
Display of Fluctuating
Laser Output on CRT
B70115EN/03
First check if PRM No. 15216 [262] is taking the value of 60, which is
a standard. In case the fluctuation continues with this value used, read the
laser output monitor value indicated in DGN=906 [878]. Its range of
fluctuation is smaller than 50. If it exceeds this value, check the
followings.
1) Is the coaxial cable between the laser power sensor mounted on the rear
mirror holder and the relay PCB B or the cable between the
intermediate PCB B and the IF PCB (A16B11100223: FS0L,
A16B0128 C202 or A16B21000141: FS16L, 16iL) inside the
laser oscillator fixed tightly?
2) Is there anomaly in the laser power sensor output? Is the DC resistor
between the terminals of the power sensor unit in the range
100500W?
3) Is the ratio of input(LPWI0V)/output(LPWT0V) of the relay PCB
B (A16B16000361) amplified by the factor of 120 in DC level?
If there exists any anomaly in the results of the above investigations,
replace the anomalous component.
6.4.6
Nonfuse Breaker for
Cooling Fans,
Electromagnetic
Valves; and Stabilized
Power Sources is
Tripping.
When there occurs short circuit in either cooling fan, electromagnetic

valve, or stabilized power unit, nonfuse breaker (NBK1) trips.
Replace the anomalous component and check the state of cables. If any
anomaly exists there, correct it.
166
6. TROUBLESHOOTING
B70115EN/03
6.4.7
Electromagnetic
Contactor of Vane
Pump Trips Thermally.
No.
Cause of trouble
Solution
Anomalous setting
of thermal relay
Ascertain if the setting of the contacter is done at

5.5 A. If not so, correct it.
Too high viscosity

of oil
(1) Check if the room temperature is lower than 5

degree. If so, raise it.
(2) Check the deterioration of oil which causes the
viscosity increase. If so, change it. Recommended exchange period is 1500 H depending on the surroundings.
Reverse rotation
direction of pump
The normal direction is anticlockwise when seen

from the side of motor fan. If not so, correct it at
the terminal.
Excessive oil
Check the oil level through sight glass. The level

should be 1/3 to 2/3 from the bottom.
Undesignated oil is
used.
Use the designated oil, NEOVAC SAH synthetic

oil manufactured by Matsumura Oil Co. Japan,
available through FANUC.
Exhaust filter
choked.
Replace it. Recommended replacement period is

3000 hours depending on the surroundings.
Loosened terminal Fix it tightly.

of connecting cable
Presence of particles inside vane

pump or its vane
damaged
Replace the vane pump.
6.4.8
Main Breaker Trips.
No.
Cause of trouble
Solution
Electric leakage in- (1) Check the state of cables, such as fixing, presside locker
ence of damage or electrical contact with the
In this case a yellocker. If so, correct it.
low button
(2) Check the grounding of Laser PSU and if not
mounted in No fuse
complete correct it.
breaker gets
raised.
Excessive current
167
Check the state of input unit of the oscillator.
6. TROUBLESHOOTING
B70115EN/03
6.4.9
Excessive Laser Gas
Consumption
6.4.10
Highfrequency
Inverter Alarm Display
No.
Cause of trouble
Solution
Gas leakage between gas cylinder

and oscillator
Ascertain the following.

(1) Anomalous mounting of regulator.
(2) Anomalous connection between tube and regulator.
(3) Anomalous connection of gas inlet fitting of
oscillator.
Anomalous adjustment of exhaust

controller
Adjust in accordance with the description of Chapter 9.
Gas leakage inside Check the presence of leakage of tube to the gas
gas controller
flow rate controlling valve.
If a fault is detected in the inverter, an alarm indicator lamp on the inverter

will light.
(1) Inverter (A90L00010382/C: Model HFCVAH2)
Fig. 6.4.10(a) shows the locations of the alarm indicator lamps.
Indicator lamp layout

f UV : Power supply voltage drop,
momentary loss
f OC : Load shortcircuit,
momentary overcurrent
f OV : Overvoltage
Indicator lamps
f OV : Fin overheated
Fig. 6.4.10 Inverter alarm indicator lamps
UV : Power supply voltage drop

No.
Cause of trouble
Solution
Drop in supply voltage.

(The supply voltage failed momentarily.)
Check the supply voltage.

Turn off the power to the oscillator,
then perform a reset.
Chattering occurred in a contactor

connected to the inverter.
Check the magnetic contactor.

Replace the magnetic contactor if
faulty.
168
6. TROUBLESHOOTING
B70115EN/03
OC : Momentary overcurrent
No.
Cause of trouble
Solution
Turbo blower or cable shortcircuited
Replace the shortcircuited unit or

cable.
Turbo blower or cable shortcircuited with ground
Replace the shortcircuited unit or

cable.
Invalid setting of inverter acceleration/deceleration
Check the setting of the inverter,

and correct any invalid setting according to the appropriate procedure.
OV : Overvoltage
No.
Cause of trouble
Invalid setting of inverter acceleration/deceleration
OH:
No.
Solution
Check the setting of the inverter,
and correct any invalid setting as
explained in Chapter 9.
Overheat protection
Cause of trouble
Solution
Inverter cooling fan stopped
Replace the inverter.
Increase in internal oscillator temperature
Check the temperature switch in

the oscillator housing, and the temperature of the cooling water.
Inverter fan temperature sensor

abnormal
Fault other than the above: Blower fails to start

No.
Cause of trouble
The cable is not connected to the

inverter, or the cable is connected
incorrectly.
Check the connection.
Inverter faulty
Turbo PCB faulty
Replace the turbo PCB.
169
Solution
6. TROUBLESHOOTING
B70115EN/03
(2) Inverter (A90L00010464/CE, 0465/CE: Model JH300)

When an alarm is issued, the digital panel displays a message
indicating the type of alarm. The table below lists the messages,
descriptions, and causes.
Message
Description
Cause
E01
Overcurrent during turbo blower

constantspeed operation
E02
Overcurrent during turbo blower deceleration
E03
Overcurrent during turbo blower acceleration
E04
Overcurrent when turbo blower is not

operating
E05
Inverter overload (overload operation)
E06
Regenerative braking operation time

exceeding the setting
E07
Direct current smoothing circuit overcur- Inverter faulty

rent
E08
EEPROM error
E09
Abnormal power supply (voltage drop)
Supply voltage drop
E10
CT error
Inverter faulty
E11
CPU error
E12
Alarm related to external trip function
E13
Alarm related to function for preventing

restart by repower operation
E14
Inverter output side groundfault
Turbo blower or wiring

groundfault
E15
High received voltage (supply voltage

increase)
Increased supply voltage
E16
Abnormal power supply (momentary

loss)
Momentary loss of supply voltage
E17
Option board 1 connection abnormal
Inverter faulty
E18
Option board 2 connection abnormal
E19
Option board 1 abnormal
E20
Option board 2 abnormal
E31
Abnormal temperature during turbo

blower constantspeed operation
E32

blower deceleration
E33

blower acceleration
E34
Abnormal temperature when turbo

blower is not operating
170
Turbo blower rotor

locked
Motor shortcircuited or
groundfault
Inverter CT faulty

Turbo blower faulty
6. TROUBLESHOOTING
B70115EN/03
6.5
OBSERVING
VOLTAGE OF POWER
LINE
6.5.1
Ascertain the followings,
Measurement of
Voltage
1) line voltage: 200/220 VAC, +10%, 15%

2) frequency: 50/60 Hz 1 Hz
3) 3 phases
Here the combination of 220 V and 50 Hz is prohibited.
6.5.2
Using a phase rotation sensor, L1, L2 and L3 phases of which are

connected to U, V and W phases of the input terminal respectively as
shown in the figure, select the phase of the power line in such a way that
the rotation direction becomes clockwise.
In the absence of a phase relation indicator, complete the connection of
the main breaker so that the exhaust gas is emitted from the laser gas
exhaust outlet.
Phase Relation
Input terminal
U
1st does grounding
Phase rotation sensor

L3
L2
L1
171
6. TROUBLESHOOTING
6.5.3
Measurement of
Voltage of DC Power
Supply Unit
B70115EN/03
Ascertain if the voltage of each DC power unit is within rated range. Here
refer to Fig. 6.5.3 (a), (b), (c) for the external view of the IF PCB in the
oscillator. Refer to Fig. 6.5.3 (d) for the external view of the stabilized
power supply unit.
IF PCB
FS0L
A16B11100223
FS16L, 16iL
A02B0128C202 (A16B11100260 and A16B21000080)
A16B21000141
(1) Rated output voltage
Terminal
name
Rated voltage
Voltage error
allowance
Application
5V
+5V
"5%
logic circuit
+24V
+24V
"10%
input, output signal
+15V
+15V
"5%
analog circuit
15V
15V
"5%
analog circuit
0V
0V
Take this 0 V as the base

in measuring voltage.
(2) Direct current adjustment locations (Only for A16B21000080)

In general, the user need not adjust the reference voltage (+10 V).
However, a power alarm may be issued if the voltage deviates from the
specified value for some reason. For adjustment, measure the voltage
between check pin A10 and the 0V level, then adjust variable resistor
VR1 to set +10.00 V. (Use a digital voltmeter for adjustment.)
(3) IF PCB
Fuse used on the PCB
(a) When IF PCB (A16B21000140, 0141) for FS16L, 16iL
FU3: A60L00010175#3.2 +5V (3.2A)
(b) When IF PCB (A02B0128C202 (A16B11100260 and
A16B21000080)) for FS16L, 16iL
FU1: A60L00010175#3.2 +5V (3.2A)
FU2: A60L00010175#0.5 +15V (0.5A)
FU3: A60L00010175#0.5 15V (0.5A)
FU4: A60L00010175#0.3 +24V (0.3A)
(c) FS0L
FU1: A60L00010175#0.5 +15V (0.5A)
FU2: A60L00010175#3.2 +5V (3.2A)
FU3: A60L00010175#0.5 15V (0.5A)
The layout of the terminals used for checking power supply unit
voltage is shown in Fig. 6.5.3 (a), (b), (c).
172
6. TROUBLESHOOTING
B70115EN/03
(4) Stabilized power supply unit

Fig. 6.5.3 (d) shows the external appearance of +24V stabilized power
unit.
Fuse of the stabilized power supply unit
Designation of power supply unit
A20B10050120
Designation of fuse
FU : A60L00010175#5.0 (5.0A)
FU : A60L00010175#5.0 (5.0A)
or
Designation of power supply unit
A20B10050124
Designation of fuse
FU : A60L00010175#3.2 (3.2A)
FU : A60L00010175#3.2 (3.2A)
Fig. 6.5.3 (a) IF PCB (A16B21000141)
173
6. TROUBLESHOOTING
B70115EN/03
CN
23
CN
11
CN
12
CN
13
CN
14
CN
15
CN
16
CN
17
CN
18
CN
24
COPIB
COPIA
CN
25
123
SP5
RELAY
G6B
123
LPW
SP6
MBI
JD1A JD1B
LB6
PTM
LTP
COR
A16B11100260
RII
CII
A/D
CONVERTOR1
CN34
MOUT
A/D
CONVERTOR2
GPC
5
+24
MAI
SPI
123
15
123
SP2
15
SP3
MPI
123
123
SP4
CP87
* LB6 SHUTTER RELAY(A58L00010265#24P)
A16B21000080
CP89
CP80
FU4
LV3
PATLITE
RELAY
RELAY
G6B
(A58L00010265#24P)
CP88
MA1
FU1
CN30
FU2
MBI
FU3
+24
+5
+15
15
0
A15
A10
CP87
MA2
VRI
* This printed circuit board is below A16B11100260.
Fig. 6.5.3 (b) External appearance of IF PCB (FS16L)
174
6. TROUBLESHOOTING
B70115EN/03
CN
23
CN
11
CN
12
CN
13
CN
14
CN
24
CN
25
CNX
CN2
SHUTTER
RELAY
(A58L00010265#24P)
A16B1110022
LA4
COR
GPC
MOUT
LPW
LTP
CN1
0
+5
15
+15
+24
0
F1
A10
F2
F3
PATLITE
RELAY
(A58L00010265#24P)
LF16
Fig. 6.5.3 (c) External appearance of IF PCB (FS0L)
TPII
FU
FU
Fig. 6.5.3 (d) Layout of fuse for stabilized power supply unit
175
6. TROUBLESHOOTING
6.5.4
Checking the IF PCB
Signals
B70115EN/03
By using the IF PCB pins, check that each signal of the IF PCB is normal.
Fig. 6.5.3 (a) and Fig. 6.5.3 (b) show the pin locations.
FS0L
FS16L
FS16iL
COR
COR
Voltage to operate the laser power supply
GPC
GPC
Specification of pressure inside the laser tube

13 V
MOUT
Sampling output of monitored laser power supply currents and voltages and monitored pressures inside the
laser tube.
Data is output in the order: pressure, voltage (No. 1);
pressure, current (No. 1); pressure, voltage (No. 2);
and so on.
MOUT
Sampling output of monitored laser power supply currents and voltages.

Data is output in the order: voltage (No. 1), current
(No. 1), voltage (No. 2), current (No. 2), and so on.
LPW
LPW
Monitoring of laser output power
LTP
LTP
Monitoring of pressure inside the laser tube 0 V to 9 V

1V/Pressure value 100 (=1330 Pa)
Monitored values are clamped to 9 V.
PTM
PAN1
Sampling output of monitored laser output power values and pressure values inside the laser tube.
These two types of data are output alternately.
Pin
Setting
SP1
12
Disables the safety interlock function.
23
Enables the safety interlock function. (The power to the

IF PCB can be turned on only when pin 1 of CN34 is
connected with pin 2 of CN34.)
12
Enables door interlock operation with the oscillator

only. (Note, however, that when the door is opened, an
NMI communication error occurs because communication with the CNC is disabled.)
23
Enables door interlock operation interactively with the

CNC. (When DIL1 and DIL2 are connected with the
door interlock terminal of the CNC, door interlock operation is performed interactively with the CNC. When
no connection is made, this mode of door interlock operation is disabled.)
SP4
23
Be sure to use this setting at all times.
SP5
SP6
12
Enables communication with the CNC via a metal

cable (when JD1B is used).
23
Enables communication with the CNC via an optical

cable (when COP1B or COP are used).
Signal function
0 V to 5V
0 V to
0 V to 10 V
6.5.5
Checking the Jumper
Pins (FS16L, 16iL)
SP2
SP3
176
Description
6. TROUBLESHOOTING
B70115EN/03
6.6
When the machine breaks down, it is necessary to know if the trouble is

in the CNC, PMC, machine or laser.
Even when there does not exist machine failure, the machine might
hangup for waiting of external signals. Then the check of inside state
of CNC, interface between CNC and PMC, one between laser and CNC
needs to be done.
Here the description is given on the indication of troubles taking place in
laser using the selfdiagnostic function of CNC.
The indication of troubles in CNC, PMC as well as machine is described
in the maintenance manual.
FANUC Series 0L
: B61575E
FANUC Series 16LA : B61855E
FANUC Series 16LB : B62595EN
FANUC Series 16iLA : B63195EN
INDICATION OF
STATE BY MEANS OF
SELF DIAGNOSTIC
FUNCTION
6.6.1
When the diagnosis function is used, the data indicated below can be
displayed.
*** : Series 16L, 16iL
[***] : Series 0L
Data Items Displayed

on the Diagnosis
Screen
[PMCCNC status display]

#7
#6
#5
G220
[G140]
#4
*DU16
#3
*DU8
#2
*DU4
#1
*DU2
#0
*DU1
#3
#2
#1
#0
*DU1 *DU16 Duty override signal (input)
G221
[G145]
#7
AGRDY
#6
CLRDY
#5
#4
AGRDY Assist gas prepared signal (input)

CLRDY Chiller prepared signal (input)
G222
[G146]
#7
HVON
#6
RUN
#5
AGST
#4
BEMON
#3
SHTON
#2
#1
#0
SCLON *BEMLC *SHTLC
HVON Discharge start signal (input)

RUN Gas pressure control start signal (input)
AGST Assist gas start signal (input)
BEMON Beam on signal (input)
SHTON Shutter open signal (input)
SCLON Guide light on signal (input)
*BEMLC Beam lock signal (input)
*SHTLC Shutter lock signal (input)
177
6. TROUBLESHOOTING
B70115EN/03
G223
[G147]
#7
POV7
#6
POV6
#5
POV5
#4
POV4
#3
POV3
#2
POV2
#1
POV1
#0
POV0
#2
#1
#0
#2
PURGE
#1
LRDY
#0
LARM
#1
AG2
#0
AG1
POV7 POV6 Power override signal (input)

[CNCPMC status display]
#7
F220
[F171]
#6
MWRM
#5
#4
#3
SHTONL
SHTOFL
MWRM Laser power alarm signal (output)

SHTONL Shutter on state signal (output)
SHTOFL Shutter off state signal (output)
F221
[F172]
#7
BEAM
#6
LSTR
#5
RFHV
#4
CLON
#3
WAIT
BEAM Beam on signal (input)

LSTR Inoscillating signal (output)
RFHV Base indischarging signal (output)
CLON Chiller start request signal (output)
WAIT Gas pressure incontrolling signal (output)
PURGE Purge completed signal (output)
LRDY Discharge start prepared signal (output)
LARM Laser alarm signal (output)
#7
F222
[F173]
#6
CW
#5
PULSE
#4
#3
#2
AG3
CW Continuous wave mode state output signal (output)

PULSE Pulse mode state output signal (output)
AG1 AG3 Assist gas select signal (output)
178
6. TROUBLESHOOTING
B70115EN/03
6.6.2
Laser Oscillator Status
Display (FS16L, 16iL)
900
DOIML0A
LASER POWER COMMAND
Displays a value specified in a laser output power command and sent to

the DA converter.
901
DOIML08
LASER BIAS COMMAND
Displays a value specified in a preparatory discharge command and sent to

the DA converter.
902
R@LSPON
PULSE ON TIME
Displays the ON time period of an output power command pulse signal.
903
R@LSPOF
PULSE OFF TIME
Displays the OFF time period of an output power command pulse signal.
904
DOIML06
GAS PRES. CONTROL
Displays a value specified in a pressure command for the pressure

controller that controls pressure inside the discharge tube, and sent to the
DA converter.
905
R@LSPRS
LASER TUBE PRES.
Displays the pressure inside the discharge tube.

[Display range] 0 to 900
[Unit]
13 Pa
906
R@POWER
LASER POWER
Displays monitored laser output power values.

[Unit] W (watt)
907
R@EIN
TRACE DATA
908
R@LSEFCY
LASER SEQUENCE
179
6. TROUBLESHOOTING
B70115EN/03
909
RF VOLTAGE 1
910
RF CURRENT 1
911
RF VOLTAGE 2
912
RF CURRENT 2
913
RF VOLTAGE 3
914
RF CURRENT 3
915
RF VOLTAGE 4
916
RF CURRENT 4
917
RF VOLTAGE 1
918
RF CURRENT 1
919
RF VOLTAGE 2
920
RF CURRENT 2
921
RF VOLTAGE 3
922
RF CURRENT 3
923
RF VOLTAGE 4
924
RF CURRENT 4
Unit of voltage applied to discharge tubes No. 1 through No. 4: V

Unit of current applied to discharge tubes No. 1 through No. 4: mA
(milliampere)
960
DIIML00
#7
*SFI
#6
*RBT
#5
*MGP
#4
*AP
*ENB IntraIF enable signal

0 : Disabled
1 : Enabled
*ESAL Emergency stop signal
0 : Emergency stop
1 : Normal processing
180
#3
#2
FRQ
#1
*ESAL
#0
*ENB
6. TROUBLESHOOTING
B70115EN/03
FRQ Power frequency detection

0 : 50 Hz
1 : 60 Hz
*AP Air pressure sensor
0 : Lower than air pressure
1 : Same as air pressure
*MGP Laser gas pressure
0 : Low
1 : Normal
*RBT Blower temperature
0 : Abnormal
1 : Normal
*SFI Safety interlock
0 : Interlocked
1 : Normal
961
DIIML01
#7
*ABT
#6
*SHT
#5
*SHOF
#4
SHON
#3
*RPAL
#2
*WT1
*MVW Water amount sensor

0 : Abnormal
1 : Normal
*CAT Chamber temperature sensor
0 : Abnormal
1 : Normal
*WT1 Condensation sensor
0 : Abnormal
1 : Normal
*RPAL Exhaust pump alarm
0 : Abnormal
1 : Normal
SHON Open shutter sensor
The shutter is open when this bit is set to 1.
SHOF Closed shutter sensor
The shutter is closed when this bit is set to 1.
*SHT Shutter temperature sensor
0 : Abnormal
1 : Normal
*ABT Absorber temperature sensor
0 : Abnormal
1 : Normal
181
#1
*CAT
#0
*MVW
6. TROUBLESHOOTING
B70115EN/03
#7
#6
962
DIIML02
#5
*OH1
#4
*TCA1
#3
*MR
#2
*LV
#1
*AR1
#0
*IAL1
#2
*VIB2
#1
*AR2
#0
*IAL2
*IAL1 Inverter alarm 1

0 : Abnormal
1 : Normal
*AR1 Frequency signal 1
0 : Mismatch
1 : Match
*LV Turbo blower oil
0 : Oil level too low
1 : Normal
*MR External folding mirror
0 : Mirror not mounted
1 : Normal
*TCA1 Turbo current sensor 1
0 : Abnormal
1 : Normal
*OH1 Abnormal turbo temperature 1
0 : Abnormal
1 : Normal
#7
963
DIIML03
#6
#5
*OH2
#4
*TCA2
#3
*REV2

0: Abnormal
1: Normal
0: Mismatch
1: Match
*VIB2 Vibration sensor 2
0: Abnormal
1: Normal
*REV2 Rotation sensor 2
0: Less than 8000 rpm
1: 8000 rpm or more
0: Abnormal
1: Normal
0: Abnormal
1: Normal
182
6. TROUBLESHOOTING
B70115EN/03
#7
#6
964
DIIML04
#5
*OH3
#4
*TCA3
#3
*REV3
#2
*VIB3
#1
*AR3
#0
*IAL3
#2
*PSA03
#1
*PSA02
#0
*PSA01

0 : Abnormal
1 : Normal
0 : Mismatch
1 : Match
*VIB3 Vibration sensor 3
0 : Abnormal
1 : Normal
*REV3 Rotation sensor 3
0 : Less than 8000 rpm
1 : 8000 rpm or more
0 : Abnormal
1 : Normal
0 : Abnormal
1 : Normal
966
DIIML06
#7
*PSA08
#6
*PSA07
#5
*PSA06
#4
*PSA05
#3
*PSA04
Displays the operating states of power supply units No. 1 through No. 8.
#7
968
DOIML00
#6
ACSI
#5
PLS
#4
SEL1.4
#3
SEL1.3
#2
SEL1.2
#1
SEL1.1
#0
SEL1.0
SEL1.0 to SEL1.4 Select signals for discharge tube monitor data

PLS Pulse command signal
0 : Filter provided
1 : No filter provided
ACSI Access notice signal
0 : OFF
1 : ON
#7
#6
#5
#4
#3
969
DOIML01
SEP1 Pressure/power select signal

SEP2 Pressure/power select signal
HSCST Highspeed A/D conversion start
183
#2
HSCST
#1
SEP2
#0
SEP1
6. TROUBLESHOOTING
B70115EN/03
970
DOIML02
#7
PS08
#6
PS07
#5
PS06
#4
PS05
#3
PS04
#2
PS03
#1
PS02
#0
PS01
#3
VEN
#2
RPA
#1
RBA
#0
PUG
#3
IB
#2
*PCL
#1
OFS
#0
SHOP
PS01 PS08 Power select signals 1 to 8

0 : Not selected
1 : Selected
972
DOIML04
#7
TWV
#6
BPV
#5
PTL
#4
GRDY
PUG Purge valve

0: Closed
1: Open
RBA Turbo blower activation
0: Stopped
1: Activated
RPA Exhaust pump activation
0: Stopped
1: Started
VEN Air release valve
0: Closed
1: Open
GRDY Laser gas supply valve
0: Closed
1: Open
PTL Flashing light
0: Off
1: On
BPV Bypass valve
0: Closed
1: Open
TWV Threeway valve
0: Air release
1: Open
973
DOIML05
#7
LSCST
#6
#5
PCS
#4
FW
SHOP Shutter open command

0: Closed
1: Open
OFS Off sequence
0: OFF
1: ON
*PCL DC power alarm clear
0: Clear
1: Normal
184
6. TROUBLESHOOTING
B70115EN/03
IB Semiconductor laseron command

0: OFF
1: ON
FW Inverter start signal
0: Stopped
1: Started
PCS Gas pressure PWM command
LSCST Low speed A/D conversion start
0: OFF
1: ON
974
R@LSDIC2
#7
PSAR8
#6
PSAR7
#5
PSAR6
#4
PSAR5
#3
PSAR4
#2
PSAR3
Power unit alarms 1 to 8

0: Normal
1: Abnormal
980
R@SNSAL
GAS PRES. SENSOR ALM
981
R@ADALM1
A/D CONV1 ALM
982
R@ADALM2
A/D CONV2 ALM
983
R@ALVLT
VOLTAGE DOWN
984
R@ALPWR
POWER DOWN
985
R@RFPWR
BEAM REFLECTION
986
LASER EFFICIENCY
987
Cylinder replacement
111 : Cylinder replacement request

0:
Cylinder replaced
988
Mixing
111 : Abnormal mixing

0 : Normal mixing
185
#1
PSAR2
#0
PSAR1
6. TROUBLESHOOTING
B70115EN/03
6.6.3
Laser Oscillator Status
Display (FS0L)
DGN No
88
#7
#6
#5
#4
#3
#2
Output command value + Bias command
#1
#0
89
(CNC internal DO)
Displays a value specified in a laser output power command and sent to

the DA converter.
DGN No
90
#7
#6
#5
#4
#3
Bias command
#2
#1
#0
91
(CNC internal DO)
Value written in the DA converter at pre discharge.

DGN No
92
#7
#6
#5
#4
#3
#2
Laser gas pressure command
#1
#0
93
(CNC internal DO)
Pressure command value written in the DA converter which is sent to the

pressure controller for the discharge tubes
Assist gas pressure command value written in the DA converter
DGN No
94
#7
#6
#5
#4
#3
#2
Assist gas pressure command
#1
#0
(CNC internal DO)
Pressure command value written in the DA converter which is sent to the

pressure controller for the discharge tubes
Assist gas pressure command value written in the DA converter
DGN No
840
#7
#6
WT1
#5
RBT
#4
MGP
(CNC internal DI)
WT1 Condensation sensor

0 : Abnormal
1 : Normal
RBT Turbo blower temperature
0 : Abnormal
1 : Normal
MGP Laser gas pressure
0 : Abnormal
1 : Normal
186
#3
#2
#1
MVW
#0
AP
6. TROUBLESHOOTING
B70115EN/03
MVW Quantity of cooling water

0 : Abnormal
1 : Normal
AP Atmospheric pressure sensor
0 : Less than standard value
1 : Greater than standard value
DGN No
841
#7
CAT
#6
SHOF
#5
SHON
#4
DL1
#3
ABT
#2
SHT
#1
IAL
#0
ENB
#3
PSA4
#2
PSA3
#1
PSA2
#0
PSA1
#2
#1
#0
(CNC internal DI)
CAT Cabinet temperature

0 : Abnormal
1 : Normal
SHOF Shutter close detecting signal
1 : Shutter close position
SHON Shutter open detecting signal
1 : Shutter open position
DL1 Door interlock
1 : Open
ABT Beam absorber temperature
0 : Abnormal
1 : Normal
SHT Shutter temperature
0 : Abnormal
1 : Normal
IAL Inverter status signal
0 : Abnormal
1 : Normal
ENB Power supply of IF PCB
0 : Abnormal
1 : Normal
DGN No
842
#7
PSA8
#6
PSA7
#5
PSA6
#4
PSA5
(CNC internal DI)
*PSA8 *PSA1 The power supply unit status signal

0 : Abnormal
1 : Normal
DGN No
844
#7
845
EOC1
#6
#5
#4
#3
ADDT1
(CNC internal DI)
ADDT1 Data read from the AD converter 1

EOC1 Conversion completion signal of the AD converter 1
0 : Under conversion
1 : Completion
187
6. TROUBLESHOOTING
B70115EN/03
DGN No
846
#7
#6
847
EOC2
#5
#4
#3
#2
#1
#0
ADDT2
(CNC internal DI)
ADDT2 Data read from the AD converter 2

EOC2 Conversion completion signal of the AD converter 2
0: Under conversion
1: Completion
DGN No
848
#7
#6
#5
#4
PCBID
#3
#2
#1
#0
#2
#1
#0
#3
#2
#1
#0
#3
PSAR4
#2
PSAR3
#1
PSAR2
#0
PSAR1
(CNC internal DI)
PCBID PCB A16B12120270 is mounted.

DGN No
850
#7
#6
#5
#4
#3
851
(CNC internal DI)
Output command pulse ON period.

DGN No
852
#7
#6
#5
#4
853
(CNC internal DI)
Output pulse OFF period.

DGN No
854
#7
PSAR8
#6
PSAR7
#5
PSAR6
#4
PSAR5
(CNC internal DI)
PSAR8 PSAR1 Latch signal of the power supply unit alarm

The power supply unit abnormal signal in DGN No. 842 is the status
signal latching the alarm signal.
DGN No
855
#7
RPA
#6
RBA
#5
PUG
#4
SEL4
#3
SEL3
(CNC internal DO)
RPA Exhaust pump start signal

0 : Stop
1 : Pump is operating
RBA Turbo blower start signal
0 : Stop
1 : Blower is operating
PUG Purge valve open/close signal
0 : Close
1 : Open
188
#2
SEL2
#1
SEL1
#0
SEL0
6. TROUBLESHOOTING
B70115EN/03
SEL4 SEL0 AD converter 2 switching signal
DGN No
856
#7
PLS
SEL4
SEL3
SEL2
SEL1
SEL0
Pressure in side tube
Output voltage of RF power supply unit (1)
Output current of RF power supply unit (1)
#6
BPV
#5
PCL
#4
OFI
#3
PTL
(CNC internal DO)
PLS Pulse waveform control signal

0 : OFF
1 : ON
BPV Bypass valve open/close signal
0 : Exhaust valve close
1 : Exhaust valve open
PCL DC power unit alarm clear signal
0 : OFF
1 : ON
OFI Power off masking signal
0 : Enables power off
1 : Unavailable power off
PTL Patrol light signal
0 : Patrol off
1 : Patrol on
STO Shutter open/close signal
0 : Shutter close
1 : Shutter open
189
#2
STO
#1
GRDY
#0
VEN
6. TROUBLESHOOTING
B70115EN/03
GRDY Laser gas supply valve open/close signal

0 : Laser gas supply valve close
1 : Laser gas supply valve open
VEN Exhaust valve open/close signal
0 : Exhaust valve close
1 : Exhaust valve open
DGN No
857
#7
PSS8
#6
PSS7
#5
PSS6
#4
PSS5
#3
PSS4
#2
PSS3
#1
PSS2
#0
PSS1
(CNC internal DO)
PSS8 PSS1 Power source switching signal

0 : Not selected
1 : Selected
DGN No
860
LSPRS
(CNC internal DI)
LSPRS Pressure value inside the discharge tape (Unit :

DGN No
861
LSVLT1
862
LSCRT1
863
LSVLT2
864
LSCRT2
865
LSVLT3
866
LSCRT3
867
LSVLT4
868
LSCRT4
869
LSVLT5 (1)
870
LSCRT5 (1)
871
LSVLT6 (2)
872
LSCRT6 (2)
873
LSVLT7 (3)
874
LSCRT7 (3)
875
LSVLT8 (4)
876
LSCRT8 (4)
(CNC internal DO)
LSVLT 1X8 Discharge tube voltate (Unit V)

LSCRT 1X8 Discharge tube current (Unit mA)
190
13 Pa)
6. TROUBLESHOOTING
B70115EN/03
DGN No
877
EIN
(CNC internal DI)
EIN Input from tracing sensor.

(Value which is not multiplied by the correction factor)
+10V . . . . . . 2047
0V . . . . . . 0
10V . . . . . . 2047
DGN No
878
LSADC
(CNC internal DI)
LSADC Power sensor output. (Unit W)

(Value which is not multiplied by the powerinput calibration coefficient
factor)
DGN No
890
LSEFCY
(CNC internal DO)
LSEFCY Laser efficiency

DGN No
892
Cylinder replacement for gas mixer
111 : Cylinder replacement request

0 : Cylinder replaced
DGN No
893
Mixing by gas mixer
111 : Abnormal mixing

0 : Normal mixing
191
7. OSCILLATOR CONNECTIONS
B70115EN/03
OSCILLATOR CONNECTIONS
192
B70115EN/03
7.1
ELECTRICAL
CONNECTIONS
Fig. 7.1 (a) Electrical connection diagram (C1500B)
193
B70115EN/03
Fig. 7.1 (b) Electrical connection diagram (C2000B)
194
B70115EN/03
Fig. 7.1 (c) Electrical connection diagram (C2000C)
195
B70115EN/03
Fig. 7.1 (d) Electrical connection diagram (C3000C)
196
B70115EN/03
Fig. 7.1 (e) Electrical connection diagram (C3000D)
197
B70115EN/03
Fig. 7.1 (f) Electrical connection diagram (C4000A)
198
B70115EN/03
Fig. 7.1 (g) Electrical connection diagram (C6000B)
199
B70115EN/03
7.2
COOLING WATER
PIPING
200
B70115EN/03
Fig. 7.2 (a) Water flow diagram (C1500B)
201
B70115EN/03
Fig. 7.2 (b) Water flow diagram (C2000B)
202
B70115EN/03
Fig. 7.2 (c) Water flow diagram (C2000C)
203
B70115EN/03
Fig. 7.2 (d) Water flow diagram (C3000C)
204
B70115EN/03
Fig. 7.2 (e) Water flow diagram (C3000D)
205
B70115EN/03
Fig. 7.2 (f) Water flow diagram (C4000A)
206
B70115EN/03
Fig. 7.2 (g) Water flow diagram (C6000B)
207
7.3
GAS PIPING
B70115EN/03
Fig. 7.3 (a) shows the flow of supply gas and exhaust gas in the laser
oscillator. Figs. 7.3 (b) to (h) are system diagrams showing the piping in
Pressure value
100 (=1330Pa)
or more
Pressure value
300 to 700
(=4000 to9300Pa)
Pressure value
700 (=9300Pa)
or more
Fig. 7.3 (a) Schematic diagram of laser gas flow
208
B70115EN/03
Fig. 7.3 (b) Laser gas flow diagram (C1500B)
209
B70115EN/03
Fig. 7.3 (c) Laser gas flow diagram (C2000B)
210
B70115EN/03
Fig. 7.3 (d) Laser gas flow diagram (C2000C)
211
B70115EN/03
Fig. 7.3 (e) Laser gas flow diagram (C3000C)
212
B70115EN/03
Fig. 7.3 (f) Laser gas flow diagram (C3000D)
213
B70115EN/03
Fig. 7.3 (g) Laser gas flow diagram (C4000A)
214
B70115EN/03
Fig. 7.3 (h) Laser gas flow diagram (C6000B)
215
8. UNIT CONFIGURATION
B70115EN/03
UNIT CONFIGURATION
216
B70115EN/03
8.1
The input unit consists of a power magnetics cabinet, interface PCB, and
stabilized power supply. The power magnetics cabinet is configured as
described below:
(1) C1500B
INPUT UNIT
Input unit (C1500B)
QF1
QF2
Thermal
Relay
KM1
PSU
No. 1
QF3
Thermal
Relay
KM2
PSU
No. 2
QF4
Thermal
Relay
KM3
Inverter
QF5
Thermal
Relay
KM4
Exhaust
pump
Thermal
Relay
Turbo
blower
Hour
meter
AC FAN
QF6
QF7
Transformer
unit
QF8
Magnetic valve
Stabilized PSU
IF PCB
CNC INPUT UNIT
AS ALARM SHORT
POWER OFF
When an alarm is occured,
it is shorted.
217
B70115EN/03
Fig. 8.1 (a) Input unit (C1500B)
218
B70115EN/03
(2) C2000B
Input unit (C2000B)
QF1
QF2
Thermal
Relay
KM1
PSU
No. 1
QF3
Thermal
Relay
KM2
PSU
No. 2
QF4
Thermal
Relay
KM3
PSU
No. 3
QF5
Thermal
Relay
KM4
PSU
No. 4
QF6
Thermal
Relay
KM5
Inverter
QF7
Thermal
Relay
KM6
Exhaust
pump
Thermal
Relay
Turbo
blower
Hour
meter
QF8
QF9
AC FAN
Transformer
QF10
Magnetic valve
Stabilized PSU
IF PCB
CNC INPUT UNIT
AS ALARM SHORT
POWER OFF
it is shorted.
219
B70115EN/03
Fig. 8.1 (b) Input unit (C2000B)
220
B70115EN/03
(3) C2000C
Input unit (C2000C)
QF1
QF2
KM1
PSU
No. 1
QF3
KM2
PSU
No. 2
QF4
KM3
Inverter
QF5
KM4
AC FAN
KM5
Exhaust
pump
Thermal
Relay
QF6
QF7
Thermal
Relay
Transformer
unit
QF8
Turbo
blower
Hour
meter
Magnetic valve
Stabilized PSU
IF PCB
CNC INPUT UNIT
AS ALARM SHORT
POWER OFF
it is shorted.
221
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Fig. 8.1 (c) Input unit (C2000C)
222
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(4) C3000C
Input unit (C3000C)
QF1
QF2
Thermal
Relay
KM1
PSU
No. 1
QF3
Thermal
Relay
KM2
PSU
No. 2
QF4
Thermal
Relay
KM3
PSU
No. 3
QF5
Thermal
Relay
KM4
PSU
No. 4
QF6
Thermal
Relay
Thermal
relay
KM5
QF7
QF8
AUXLIARY UNIT
Transformer
QF9
AC FAN
Magnetic valve
Stabilized PSU
IF PCB
AUXILIARY UNIT
To
OSCILLATOR
QF10
Thermal
Relay
KM6
Inverter
Turbo
blower
QF11
Thermal
Relay
KM7
Exhaust
pump
Hour
meter
CNC INPUT UNIT

AS ALARM SHORT
POWER OFF
it is shorted.
223
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Fig. 8.1 (d) Input unit (C3000C) 1/2
224
B70115EN/03
Fig. 8.1 (d) Input unit (C3000C AUX) 2/2
225
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(5) C3000D
Input unit (C3000D)
QF1
QF2
KM1
PSU
No. 1
QF3
KM2
PSU
No. 2
QF4
KM3
PSU
No. 3
QF5
KM4
Inverter
Turbo
blower
KM5
Exhaust
pump
Hour
meter
Thermal
Relay
QF6
Thermal
Relay
Intermediate
unit
QF8
Transformer
QF9
QF7
KM6
Magnetic valve
Stabilized PSU
IF PCB
AC FAN
CNC INPUT UNIT

AS ALARM SHORT
POWER OFF
it is shorted.
226
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Fig. 8.1 (e) Input unit (C3000D)
227
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(6) C4000A
Input unit (C4000A)
QF1
QF2
KM1
PSU
No. 1
QF3
KM2
PSU
No. 2
QF4
KM3
PSU
No. 3
QF5
KM4
PSU
Inverter
No. 4
QF6
KM5
Inverter
Turbo
blower
KM6
Exhaust
pump
Hour
meter
Thermal
Relay
QF7
Thermal
Relay
Intermediate
unit
QF9
Transformer
QF10
QF8
KM7
Magnetic valve
Stabilized PSU
IF PCB
AC FAN
CNC INPUT UNIT

AS ALARM SHORT
POWER OFF
it is shorted.
228
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Fig. 8.1 (f) Input unit (C4000A)
229
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(7) C6000B
Input unit (C6000B)
QF1
QF2
KM1
PSU
No. 1
QF3
KM2
PSU
No. 2
QF4
KM3
PSU
No. 3
QF5
KM4
PSU
No. 4
QF6
KM5
AC FAN
KM6
Exhaust
pump
QF8
KM7
PSU
No. 5
QF9
KM8
PSU
No. 6
QF10
KM9
PSU
No. 7
QF11
KM10
PSU
No. 8
QF12
KM11
Inverter
No. 1
Turbo
blower
No. 1
QF13
KM12
Inverter
No. 2
Turbo
blower
No. 2
Thermal
Relay
QF7
QF14
Thermal
Relay
Transformer
QF15
Magnetic valve
Stabilized PSU
IF PCB
Intermediate
unit
CNC INPUT UNIT

AS ALARM SHORT
POWER OFF
it is shorted.
230
Hour
meter
B70115EN/03
Fig. 8.1 (g) Input unit (C6000B) 1/3
231
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232
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233
8.2
B70115EN/03
Intermediate PCB B is used to group signals sent from the shutter section
and to output the grouped signals to the interface PCB. CN59 is an output
terminal for connecting a measuring instrument used in alignment.
Fig. 8.2 shows the layout of intermediate PCB B.
INTERMEDIATE
PCB B
CN
50B
CN52B
CN53B
CN54B
TEST
CN55B
INPUT
CN59
CN56
Output terminal for the instruments used

in alignment procedure.
Fig. 8.2 Intermediate PCB B
234
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8.3
PRESSURE
CONTROL UNIT
Fig. 8.3 (a) shows installation, and Fig. 8.3 (b) shows piping of the
pressure controller respectively. The functions of each of the components
shown in the figures are outlined below:
(1) Pressure control valve
This valve is provided to maintain a specified laser gas pressure in the
oscillator. The valve is consistently and precisely opened or closed
according to commands issued from the CNC, controlling the flow
rate of the fresh laser gas supply.
(2) Gas supply valve
This magnetic contactor opens to supply fresh laser gas to the
oscillator while the machine is operating. While the machine is
stopped, the valve closes to prevent air from entering the oscillator.
(3) Purge valve
When the machine stops, this magnetic contactor opens to supply laser
gas to the oscillator. Gas is supplied until the pressure in the oscillator
matches atmospheric pressure. When the atmospheric pressure sensor
5 detects that the pressure in the oscillator has reached atmospheric
pressure, the valve closes.
(4) Gas pressure sensor
This sensor continuously monitors the pressure of the laser gas
supplied from an external source (such as a gas cylinder). When the
remaining amount of laser gas drops to a preset level or when the
supply pressure falls to 0.1 MPa or less, the sensor outputs an alarm
signal.
(5) Atmospheric pressure sensor
This sensor monitors whether the pressure in the oscillator has reached
atmospheric pressure.
(6) Pressure sensor
This sensor continuously monitors the pressure in the oscillator, from
the heat exchanger on the inlet side of the Turbo blower. The sensor
outputs a signal to the CNC. The sensor is of the capacitance
manometer type, which is notable for drifting little with changes in
temperature and for exhibiting very little deterioration with time.
(7) Filter
The filter prevents impurities from entering the oscillator.
(8) Gas distributor
The distributor distributes the laser gas, supplied from an external
source (such as a gas cylinder), to the output mirror, rear mirror, and
folding mirror.
(9) External pipe exhaust valve
This valve allows laser gas to escape from the laser gas pipe between
the oscillator and gas cylinder. If any leakage is detected, or if the
oscillator has not been operated for a long time, the valve can prevent
gas whose composition has changed, or gas containing impurities,
from entering the oscillator.
235
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Fig. 8.3 (a) Pressure control unit layout
236
B70115EN/03
Fig. 8.3 (b) Block diagram of gas pressure control unit
237
9. SETTING AND ADJUSTMENT
B70115EN/03
SETTING AND ADJUSTMENT
238
B70115EN/03
9.1
LASER POWER
SUPPLY UNIT
9.1.1
Checking before
Adjustment, and
Setting
This unit is precisely adjusted at the factory and should not require any
further adjustment. If the power supply unit, matching box, or discharge
tube is replaced, however, the unit should be set and adjusted as described
below.
When an FET module or diode in the laser power supply is replaced, no
adjustment is necessary.
(1) Check the cable, water fitting, and discharge unit connections.
(2) Check that the discharge tube electrode is not damaged.
(3) Rewrite the settings of the parameters below to the values after the
column (:).
NOTE
The parameters parenthesized below are used for the 0L.
1) C1500B (without a trigger electrode)
Output compensation disable
Bit 4 of parameter No. 15000, parameter No. 15201 (bit 4 of
parameter No. 200, parameter No. 231, No. 232): 0
Laser power feedback disable
Parameter No. 15208 (parameter No. 233): 0
Intratube pressure setting at oscillation time
Parameter No.15242, No. 15243 (parameter No. 236): +30
Maximum output command setting
Parameter No. 15207, No. 15210, No. 15212: Value of
parameter No. 15307
2) C1500B (with a trigger electrode)
parameter No. 15306
(Parameter No. 3986, No. 238): Value of parameter No. 292
Bias command value
3) C2000B
Parameter No.15242, No. 15243 (parameter No. 236): +30
parameter No. 15304
239
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Enhanced pulse setting disable

Parameter No. 15213: 32000
4) C2000C
parameter No. 15306
Bias command value
5) C3000C
Parameter No.15242, No. 15243: +30
parameter No. 15307
6) C3000D, C4000A
parameter No. 15307
Bias command value
240
B70115EN/03
7) C6000B
parameter No. 15307
(4) For power supplies 2, 3, 6, and 7 on the C6000B (A14B0082B205
or B208), change the setting of the setting pin S2 from B202 to B201,
and rotate VR11 one turn counterclockwise. (See Note 5.)
9.1.2
Base Discharge
Adjustment
9.1.2.1
C1500B (without a
trigger electrode)
(step 1)
9.1.2.2
C2000B (step 1)
(1) Start the oscillator, and wait until the gas pressure is stabilized in the
base discharge state. (Wait about 3 minutes. See DGN 905 [16L,
16iL] or DGN 860 [0L].) Then, check that all discharge tubes are
continuously discharging. If a discharge tube stops discharge, turn
VR11 of the power supply corresponding to the discharge tube
clockwise until the discharge tube discharges. Adjust VR11 so that all
discharge tubes are continuously discharging in the state immediately
before blinking starts.
(2) Record the value of RFI or the values of RFI and DCV. (See Note 1.)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (a)
(3) Turn VR11 of power supply 1 gradually counterclockwise to decrease
the value of RFI by 4 mA or the value of DCV by 0.7 V. Perform this
operation until the discharge tube stops discharge. When the discharge
tube stops discharge, turn VR11 of power supply 1 gradually
clockwise to increase the value of RFI by 4 mA or the value of DCV
by 0.7 V. Adjust VR11 of power supply 2 in the same way as for power
supply 1.
16iL] or DGN 860 [0L].) Check that all discharge tubes are
clockwise until the discharge tube discharges.
(2) Adjust VR11 of power supply 1 so that the discharge tube is
continuously discharging in the state immediately before blinking
starts. Adjust VR11 of each of power supplies 2, 3, and 4 so that each
discharge tube blinks.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (a)
241
9.1.2.3
C3000C (step 1)
B70115EN/03
(1) Start the oscillator, and wait 10 minutes in the LRDY state. Then set
HV ON and wait until the gas pressure is stabilized in the base
discharge state. (Wait about 3 minutes. See DGN 905 [16L, 16iL]
or DGN 860 [0L].) Check that all discharge tubes are continuously
discharging. If a discharge tube stops discharge, turn VR11 of the
power supply corresponding to the discharge tube clockwise until the
discharge tube discharges.
(2) Turn VR11 of power supply 1 counterclockwise so that the discharge
tube is discharging in the state immediately before stopping discharge.
Adjust power supply 2 for discharge tube 3, adjust power supply 3 for
discharge tube 4, adjust power supply 4 for discharge tubes 5 and 6 in
the same way as for power supply 1.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (a)
9.1.2.4
C2000B, C3000C (step 2)
(1) Check that discharge continues for 30 minutes after adjustment. If a

discharge tube stops discharge (C2000B, C3000C) or blinks (C1500B
(without a trigger electrode)), turn VR11 of the power supply
gradually clockwise to increase the value of RFI by 4 mA or the value
of DCV by 0.7 V. Set HV OFF then set HV ON to check that discharge
continues 30 minutes. Repeat this until checking that discharge
continues 30 minutes.
(2) Set HV OFF, return the value of parameter No. 15242 and No. 15243
[16L, 16iL] or parameter No. 236 [0L] (intratube pressure setting
at oscillation time) to the original value (Note 2), and wait until the gas
pressure is stabilized in the base discharge state.
(3) Adjust VR11 to increase the value of Iplus RFI or the value of Vplus
DCV. (See Note 4.)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (A)
9.1.2.5
C6000B
(1) Start the oscillator, and wait 10 minutes in the LRDY state. Then set
HV ON and wait until the gas pressure is stabilized in the base
discharge state. (Wait about 3 minutes. See DGN 905 [16L, 16iL]
or DGN 860 [0L].)
(2) Adjust VR11 of power supply 1 so that discharge tubes 1 and 2
discharge up to the point indicated by the arrow shown below. Adjust
power supply 2 for discharge tube 3, power supply 3 for discharge tube
4, power supply 4 for discharge tubes 5 and 6, power supply 5 for
discharge tubes 7 and 8, power supply 6 for discharge tube 9, power
supply 7 for discharge tube 10, and power supply 8 for discharge tubes
11 and 12 in the same way as for power supply 1.
242
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Power supplies 1, 2, 3,
7, 8, and 9
Power supplies 4, 5, 6,
10, 11, and 12
Fig. 9.1.2.5 Base discharge adjustment points (indicated by arrows)
(3) Check that the laser output Pa becomes 100 W or less after 3 minutes.
If the laser output exceeds 100 W, make the adjustment below.
(a) Check that the discharge areas of all discharge tubes are the same.
(b) Set HV OFF, and decrease the setting of parameter No. 15233 (bias
command value) by 5. (See Note 2.)
(c) Repeat (a) and (b) until Pa becomes 100 W or less 3 minutes after
the base discharge state is set.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (A)
(5) Set HV OFF, increase parameter No. 15242 and No. 15243 [16L,
16iL] or parameter No. 236 [0L] or parameter No. 236 [0L]
(intratube pressure setting at oscillation time) by 30 (Note 2), and
wait until the gas pressure is stabilized in the base discharge state.
(6) Check that discharge continues 30 minutes. If a discharge tube stops
discharge, turn VR11 of the power supply gradually clockwise to
increase the value of RFI by 4 mA or the value of DCV by 0.7 V. Set
HV OFF then set HV ON to check that discharge continues 30
minutes. Repeat this until checking that discharge continues 30
minutes.
(7) Set HV OFF, return parameter No. 15242 and No. 15243 [16L,
16iL] or parameter No. 236 [0L] (intratube pressure setting at
oscillation time) to the original value (Note 2), and wait until the gas
pressure is stabilized in the base discharge state.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (A)
243
9.1.2.6
C1500B (with a trigger
electrode), C2000C,
C3000D
B70115EN/03
(2) Record the value of RFI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (a)
(3) Decrease the value of RFI by 250 mA by turning VR11
counterclockwise. Set HV OFF, set parameter No. 15223 [16L,
16iL] or parameter No. 250 [0L] (bias command value) to 2790
(Note 2), and check that trigger electrode discharge continues for 5
minutes in the base discharge state. If a discharge tube stops discharge,
turn VR11 of the power supply gradually clockwise to increase the
value of RFI by 4 mA or the value of DCV by 0.7 V. Set HV OFF then
set HV ON to check that discharge continues 5 minutes. Repeat this
until checking that discharge continues 5 minutes.
(4) Set HV OFF, set parameter No. 15223 [16L, 16iL] or parameter No.
250 [0L] (bias command value) to 2850 (Note 2), and wait until the
gas pressure is stabilized in the base discharge state.
(5) Record the value of RFI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (A)
9.1.2.7
C4000A
(2) Record the value of RFI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (a)
(3) Only for power supply 1, increase RFI by +70 mA from the value
recorded in (2). Set HV OFF, set parameter No. 15223 [16L, 16iL]
or parameter No. 250 [0L] (bias command value) to 2790 (Note 2),
and check that the trigger electrode continues discharge for 5 minutes
in the base discharge state. If a discharge tube stops discharge, turn
gradually clockwise to increase the value of RFI by 4 mA or the value
of DCV by 0.7 V. Set HV OFF then set HV ON to check that discharge
continues 5 minutes. Repeat this until checking that discharge
continues 5 minutes.
(4) Set HV OFF, set parameter No. 15223 [16L, 16iL] or parameter No.
250 [0L] (bias command value) to 2850 (Note 2), and wait until the
gas pressure is stabilized in the base discharge state.
(5) Record the value of RFI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (A)
244
B70115EN/03
Fig. 9.1.2.7 (a) Laser power supply unit layout (6 kW PSU)
Fig. 9.1.2.7 (b) Adjust trimmer position (6 kW PSU)
245
B70115EN/03
Fig. 9.1.2.7 (c) Adjust trimmer position (9 kW PSU)
9.1.3
Maximum Output
Adjustment
9.1.4
Fine Adjustment of
VR11 and VR13
(1) Specify the output of a half of the rated output value, and turn on the
beam. While checking that the power supply output (Note 4) does not
exceed the maximum power supply output (Note 4) and that the value
of DCV (Note 4) does not exceed 220 V with A14B0082B204, and
B205, and 230 V with A14B0082B206, B207, B208, B209, and
B210, increase the output gradually to the maximum command value
(Note 4). If the maximum value is about to be exceeded, turn VR13
counterclockwise to prevent the maximum value from being
exceeded.
(2) After output of the maximum command value, wait 3 minutes. Then,
adjust VR13 to set the power supply output to the maximum power
supply output (Note 4).
(3) Record the value of RFI or the values of RFI and DCV (See Note 1.)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (B)
(1) Three minutes after the beam is turned off, adjust RFI or DCV to the
value of (A) with VR11.
(2) Three minutes after the maximum command value is output, adjust
RFI or DCV to the value of (B) with VR13.
(3) Repeat (1) and (2) until no adjustment is required.
(4) Turn off the beam, and wait 3 minutes. Then, check that the laser
output Pa does not exceed the maximum base output (Note 4), and that
heatsensitive paper does not react in the test of Note 3. If a problem
is observed, make another power supply adjustment.
(5) After output of the maximum command value, wait 3 minutes. Then,
check that the value of RFV does not exceed the maximum RFV (Note
4).
246
B70115EN/03
9.1.5
Pulse Output Test
9.1.6
(1) With the C2000B and C2000C, specify a pulse test command in the
table of parameter No. 15207 and No. 15210.
(2) Output the pulse test command specified in the table by 5 Hz and 5%
for a pulse test time, and check that no alarm is issued. If a problem
is observed, make another power supply adjustment.
Return the modified parameter values to the original values.
Completion of
Adjustment
NOTE
1 RFI and DCV value recording and adjustment
The laser power supply involves feedback at RFI. So, if the laser power feedback function is
disabled, RFI is stable when the continuous output command is used. Basically, measure RFI
for power supply adjustment.
If the NC monitor is away from the oscillator, and you have no assistant, make an adjustment
by using the value of DCV instead of RFI. However, use the value of RFI for final confirmation.
RFI+ (Voltage between RFIN and RFIO of CN18)/2
[A]
RFV+ (Voltage between RFVN and RFVP of CN18) 1000
[V]
DCI+ (Voltage between DCIN and DCIP of CN17) 5
[A]
DCV+ (Voltage between DCVN and DCVP of CN17) 30
[V]
Power supply output+DCI DCV
[W]
2 Alarm processing after modification of intratube pressure at oscillation time and bias
command setting
After modification of parameter No. 15242 and No. 15243 [16L, 16iL] or parameter No. 236
[0L] (intratube pressure at oscillation time) and parameter No. 15223 [16L, 16iL] or
parameter No. 250 [0L] (bias command), take the actions below.
(a) If an alarm indicating a parameter value modification is displayed, reset the alarm, and set
HV ON.
(b) If an alarm requesting that the NC power be turned off is displayed, and purge operation
is started, turn off the power to the NC upon completion of purge operation, and restart.
3 Checking of electric shutter operation
(a) Insert heatsensitive paper into the laser optical path after passing through the shutter
mirror, and output the continuous rated command value for 3 minutes. Then, execute the
following program (specifying OW for 60 seconds):
G32 P1 Q1;
G24 S0 P500 Q0 R60.0
G32 P0;
M02;
%
(b) Check that the heatsensitive paper has not reacted.
247
B70115EN/03
NOTE
4 Settings for each oscillator
C1500B
without a trigger
electrode
C2000B
C3000C
(No.1, 4 PSU)
C3000C
(No.2, 3 PSU)
C6000B
(No. 1, 4, 5, 8
PSU)
C6000B
No. 2, 3, 6, 7
PSU)
S2 setting
B201
B202
B201
B202
B202
B201
S5 setting
SHORT
SHORT
SHORT
SHORT
USUAL
SHORT
Iplus
)12mA
)10mA
Vplus
)2.0V
)0.7V
)3.5V
)1.5V
Maximum command
value
PRM15307
PRM15304
PRM15307
PRM15307
PRM15307
PRM15307
Maximum power
supply output
DCI DCV+
6200"50W
4400"50W
6600"50W
4400"50W
8000"50W
4000"50W
Maximum base
output
+0W
+0W
Note 3
Note 3
t100W
t100W
t4600V
t4800V
t4600V
t4600V
t4600V
t4600V
Maximum
command value
PRM15305
Maximum
command value
Maximum
command value
Maximum
command value
Maximum
command value
u10 min
u10 min
u30 min
u30 min
u30 min
u30 min
C1500B
with a trigger
electrode
C2000C
C3000D
C4000A
Maximum RFV
Pulse test command
)20mA
Pulse test time
S2 setting
B201
B201
B201
B201
S5 setting
USUAL
USUAL
USUAL
USUAL
Electric shutter
adjustment
250mA
180mA
250mA
Maximum command
value
PRM15306
PRM15306
PRM15307
PRM15307
Maximum power
supply output
DCI DCV+
5400"50W
7800"50W
8000"50W
8300"50W
t4600V
t4800V
t4600V
t4600V
Maximum
command value
Maximum
command value
Maximum
command value
Maximum
command value
u30 min
u30 min
u30 min
u30 min
Maximum RFV
Pulse test command
Pulse test time
5 Setting pins
Setting pin
S5
Usual
S2
B201
Power supply alarm LED
VR13 VR11
CN18
CP73
LED1
LED2
CP51
CN17
Location of setting pin S2
Short
Details of S5
B202
Details of S2
Locations of setting pins S5 and S2, and monitor connectors CN17 and CN18
248
B70115EN/03
9.1.7
Alarm level setting value of laser PSU is shown the following table.
Alarm Level of Laser

PSU
Table 9.1.7 (a) Alarm level setting value
Specification of laser PSU
B204
B205
B206
B207
B208
B209
B210
DCI1
DC peak over
current
100A
100A
(100A)
120A
120A
120A
120A
120A
DCI2(P)
DC over power
7375W
7kW
(9.9kW),
12.7kW
12.7kW
12.7kW
12.7kW
12.7kW
DCI2(I)
DC over current at
Base discharge
45A
45A
(60A)
78.8A
78.8A
78.8A
78.8A
78.8A
DCI3
DC average over
current
40A
40A
55A
55A
55A
55A
55A
DCV
DC over voltage
250V
250V
(250V)
260V
260V
260V
260V
260V
Vc
Standard voltage
anomaly
OH(W)
Over heat (Water)
60C
60C
60C
60C
60C
60C
60C
OH(In)
Over heat (Inside)
80C
80C
80C
80C
80C
OH(MB)
Over heat
(Matching box)
RFV
RF over voltage
5.8 to 6kV
5.8 to 6kV
5.8 to 6kV
5.8 to 6kV
5.8 to 6kV
5.8 to 6kV
5.8 to 6kV
RFI
RF over current
3.78A
5.45A
3.78A
3.78A
5.45A
5.45A
5.45A
Vi
Inverter PCB
390V
390V
390V
390V
390V
NOTE
There is two kinds of PSU PCB in B206.
249
B70115EN/03
Table 9.1.7 (b) Specification of PSU

Number of laser PSU
No. 1
No. 2
No. 3
No. 4
No. 5
No. 6
No. 7
No. 8
C1500B
B209
(B207)
(B204)
B209
(B207)
(B204)
C2000B
B208
(B205)
B208
(B205)
B208
(B205)
B208
(B205)
C2000C
B209
(B207)
B209
(B207)
C3000C
B207
B208
B208
B207
C3000D
B209
(B207)
B209
(B207)
B209
(B207)
C4000A
B209
B209
B209
B209
C6000B
B209
(B206)
B210
(B208)
(B205)
B210
(B208)
(B205)
B209
(B206)
B209
(B206)
B210
(B208)
(B205)
B210
(B208)
(B205)
B209
(B206)
PSU specification will change from B207, B208 to B210, B209 after
shipping of 1999, spring.
B207 and B210 are one discharge driving. B208 and B209 are two
discharge driving.
250
B70115EN/03
9.2
TURBO PCB
These PCBs are precisely adjusted at the factory and should not require
any further adjustment. If the turbo blower or turbo PCB is replaced,
however, VR1 to VR4 should be adjusted and set oil level sensor as
described below.
Turbo PCB: A16B16000670:C1500B, C2000B, C2000C, C3000C,
C3000D, C4000A
A16B16000770:C6000B
(1) Prior to activating the oscillator, check the level of the turbo blower
oil through the oil window. If the level is higher than the specified
level, drain the excess oil. If the level is lower, add oil.
Specified level: 3/4 level, between Hi and Lo marks (See the figure.)
Hi
3/4
Specified level
Low
Oil window
(2) Turn trimmers VR1 to VR4 fully counterclockwise.

(3) Start the oscillator. Execute internal discharge at the rated output for
15 minutes. Then, set the unit to the base discharge state.
(4) Measure voltage VSO across VL1 and 0V (GND). This voltage
corresponds to the oil level sensor output.
(5) While monitoring voltage VC across VA1 and 0V (GND), turn
trimmer VR1 clockwise (VC increases). This voltage corresponds to
the alarm setting voltage.
(6) Check that the following alarm occurs when VC exceeds VSO
measured in step (4) above.
Alarm No.4106 (FANUC Series 16LA, 16iLA),
620 (FANUC Series 0L)
Message: BLOWER OIL SHORTAGE
(7) In the alarm state, adjust trimmer VR1 so that VC (voltage across VA1
and 0V) matches the following value:
VC = VSO
0.778
(8) Press the reset key of the NC. Check that the alarm is reset.
(9) Adjust VR2 to VR4 in the same way, regarding VL1 and VA1 in the
above description as VL2 to VL4 and VA2 to VA4, respectively.
NOTE
VR1 and VR4 are threeturn trimmers.
251
B70115EN/03
Adjustment position C1500B :

C2000B :
C2000C :
C3000C :
C3000D :
C4000A :
C6000B :
VR1 only
VR1 only
VR1 only
VR1 VR2 only
VR1 only
VR1 only
VR1 to VR4
Fig. 9.2 (a) Detail of turbo PCB (A16B16000670)
252
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VL4 Terminal
VL3 Terminal
VL2 Terminal
VL1 Terminal
VR3
VR1
VR4
VR2
VA4 Terminal
VA3 Terminal
Upper
VA1 Terminal
Base mounting
face
VA2 Terminal
0V (GND)
Fig. 9.2 (b) Turbo PCB (A16B16000770) details
253
9.3
HIGHFREQUENCY
INVERTER
B70115EN/03
The inverter is precisely adjusted at the factory and should not require any
further adjustment. If it is replaced, however, the highfrequency inverter
should be set and adjusted as described below.
The type of the highfrequency inverter varies with the oscillator model.
The C1500B, C2000B, C2000C, C3000D, and C4000A all use the
A90L00010382/C or A90L00010464/CE inverter while the
C3000C and C6000B use the A90L00010465/CE. The following
subsections describe how to adjust the three types:
9.3.1
Adjusting the Inverter
(A90L00010382/C:
Model Name:
HFCVAH2)
The FMD and L terminals of the inverter output pulse signals having the
same frequency as the output frequency. So, the output frequency can be
measured by connecting a frequency counter to these terminals.
(1) Remove the cable connector of the turbo blower. Then, remove the
front panel of the inverter.
(2) Set test mode.
Switch the rightmost switch of DIP switch DS2 from the DR (drive)
position to the TE (test) position. This enables test operation of the
inverter.
(3) Set the maximum frequency.
Adjust the following four positions to set the maximum frequency to
1000 Hz.
F. CN
: A (1)
F. RNG
: 4
F6 of DS1 : ON
FH of DS1 : ON
(4) Set the acceleration/deceleration period.
Set the leftmost switch of DS1 to the T10 (OFF) position.
(5) Set the torque boost.
The torque boost is not used. Turn the T.BST trimmer fully
counterclockwise.
(6) Perform fine adjustment of the maximum frequency.
1) Connect a frequency counter to the FMD and L terminals of the
inverter.
2) Apply the threephase 200V power to the inverter. Check that the
POWER LED lights.
3) Connect the SP1 jumper on the turbo PCB to RUN. This enables
operation of the turbo blower alone.
4) Press SW1 (RUN switch) of the turbo PCB to start the turbo
blower. Once the frequency reading stabilizes, turn the 0.REF
trimmer so that the frequency reading is between 998 and 1002 Hz
("2 Hz).
254
B70115EN/03
Setting the acceleration

period
Setting the deceleration

period
(7) Adjust the acceleration/deceleration period.

Adjust the period from when the turbo blower starts rotating until the
rotation stabilizes, and the period from when deceleration starts until
the turbo blower stops.
1) While the inverter output frequency is 0 Hz, press SW1 (RUN
switch) on the turbo PCB. At the same time, start measuring the
time.
2) Turn the ACCEL trimmer so that the frequency set in step (6) can
be obtained 70 to 75 seconds later.
Turning the trimmer clockwise increases the period while turning
the trimmer counterclockwise reduces the period.
1) While the inverter output frequency is stable, release SW1 (RUN
switch) on the turbo PCB. At the same time, start measuring the
time.
2) Turn the DECEL trimmer so that the inverter output frequency is
reduced to 0 Hz 70 to 75 seconds later. Turning the trimmer
clockwise increases the period while turning the trimmer
counterclockwise reduces the period.
(8) Cancel test mode.
1) Return the SP1 jumper on the turbo PCB from RUN to RESET.
2) Switch the rightmost switch of DIP switch DS2 on the inverter
from TE to DR. This cancels inverter test mode.
Once the adjustment has been completed, turn the power off, remove
the frequency counter, and replace the front cover of the inverter.
255
B70115EN/03
DR
Selection of T1 or T10 of the DS1 switch determines the factor of

the acceleration or deceleration time. When T10 is selected, the
time is multiplied by 10. TX1: 3 to 15 sec TX10: 15 to 150 sec.
ON
DS2
OFF
ON
DS1
OFF
F60
F.FIN
DB
F.OS
ACCEL DECEL T.BST F.STP D.BRK
T10
ABCDE
STB1
STB2 V.GAIN V.LMT
Set the regulators correctly

with reference to the relevant items.
F.CN
F.RNG
F6 and FH of the DS1 switch and the F.CN and

F.RNG switches are selector switches for selecting
various maximum frequencies. Set the switches
correctly with reference to Table 6.
Printed circuit board
O.REF
R S
U V
W P
P1 N
Fig. 9.3.1 Highfrequency inverter adjustment unit (HFCVAH2)
256
B70115EN/03
9.3.2
Adjusting the Inverter
(A90L00010464/CE
and 0465/CE: Model
Name: JH300)
(1) Connection
The following cables are connected to the inverter:
R. S. T:
Threephase power supply
U. V. W:
Turbo blower power supply
H, O, L:
Frequency command
1:
Reset signal
2:
Parameter soft lock signal
8:
Inversion signal
11:
Frequency reach signal
AL0, AL1: Alarm contact (ON: Normal)
PLCP24: Jumper
CM1, CM2: Common
(2) Setting and Checking the parameters
Another H type remote operator (HOPOJ) and Copy unit (HRWOJ)
are required to set and to check the parameters.
Operate the inverter while the oscillator is turned on. While a cable
is connected to inverter terminal 2, parameters and other inverter
settings cannot be changed. To change a parameter, therefore, first
disconnect the cable from terminal block 2.
Be sure to connect the cable of terminal block 2 after changing the
parameter.
Remote operator
D Connecting the remote
operator
Be sure to turn the power supply off when connecting the connector.
High performance remote operator (HOP)
High performance copy unit (HRW)
Digital operator
Remote operator (DOP)

Copy unit (DRW)
(1) Insert the connector straight into the remote operator and inverter unit
printedcircuit board.
(2) Turn on the power supply.
(3) Make sure that the liquid crystal display of the remote operator is lit.
When the power supply of the inverter is turned on, FS000.0@@@@@@
of the monitoring mode will be displayed. If, however, any of the
following is displayed when the inverter is turned off, they will be
displayed when power is turned on again.
257
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D Frequency setting, multispeed setting or other frequency

displays, motor rotational speed display, frequency conversion
display, or output current display.
NOTE
When conflicting data is set, a warning WARN.... will be
displayed. For 6 seconds thereafter, do not perform the key
operation, reset operation, running operation, powerOFF
operation. (Otherwise, a communication error may occur in
the operator.)
High performance
remote operator
D Kyes and LCD Screen
[READ and COPY keys]

(valid only for HRW).
READ
S Used to read data from the
inverter.
NOTE : If a set value of the
inverter is updated after
the data is read from the
inverter, the set value is
only updated in the
inverter. To copy the
updated data to another
inverter, press the
READ key again, then
press the COPY key.
COPY
S Used to transfer data read from
the inverter by pressing the
READ key to another inverter.
[LCD Screen]
S Used to display monitor/
function mode messages in the
format of 16 characters 1
line or 17 characters 4 lines.
[FWRUN (Forward Run),
REVRUN (Reverse Run), and
STOP/RESET keys]
S Used to send operation
commands to the inverter.
[MON (Monitor) and FCTN
(Function) keys]
S Used to select the monitor/
function mode screen.
[Read Lock Selection key (MON
(Monitor) + FCTN (Function))]
S Used to select READ VALID/
INVALID.
[TenKey]
S Used to change parameters.
[[Y] and [B] keys]

S Used to move the cursor.
NOTE : These keys are used to
move the cursor and
scroll screens. To
update set values, use
the tenkey.
[Confirmation key (1 + 2 + 3)]

S Used to reference to the
function screen while the
inverter is operating. This key
cannot be used to update set
values.
[RETN (RETURN) key]

S Used to return to the before
setting screen.
[SEL (SELECT) key]
S Used to go to the next screen of
the setting item on which the
cursor exists. If the next screen
does not exists, this key entry is
ignored.
[STOR (Store) key]
S Used to store data in the
inverter memory.
258
B70115EN/03
D MONITOR/FUNCTION
mode
The operator has two modes; MONITOR mode and FUNCTION mode.
In the MONITOR mode, the monitor screen to display operation status
appears. In the function mode, the function screen appears. The function
screen has a hierarchical structure used to change operation status.
D Fixed field (Top row on

screen)

Function
OR FR
" 1 Command
"
2 Initial
"
3 Function
"
4 Option
"
} Fixed field
Operation status/screen hierarchy

Used to display the operation status in the monitor mode and the screen
hierarchy in the function mode.
Operation
mode
Monitor
screen
Status
Operation
status
Display
At stop
time
During standby after immediate return

At tripping At forward At reverse
f
0
Under
time
run
run
Alignment
Start
voltage
ST
TR
1st layer
Function
screen
2nd layer
FR
RR
3rd layer
AJ
RT
Stop
DB
UV
4th layer
Screen
hierarchy
Display title
Displays the current mode name or hierarchical layer name.
Total items
Displays the current mode name or the total number of items in the
selected hierarchical layer.
Operation command
Displays the current operation command status.
Operation mode
Display
Remote operator
Terminal
Optional PCB 1
Optional PCB 2
OR
OT
O1
O2
Monitor/function mode
259
B70115EN/03
Frequency command
Displays the current frequency command status.
Operation mode
Display
Remote operator
Terminal
Optional PCB 1
Optional PCB 2
FR
FT
F1
F2
Monitor/function mode
D Monitor screen display

MONITOR key
ST
Monitor
" FS
29
OR FR
0.00 Hz
0.00Hz
AC1
30.00s
OC1
30.00s
Screen scrolling range
Item selection cursor

Used to update set values including the frequency. Move the cursor
to the target item using the [Y] and [B] keys, then update the set value
using the tenkey. Finally, press the
key.
Set value changeable mark

This mark indicates a set value that can be updated, which is
underlined within the scrolling range. No other values can be updated.
260
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D Function screen display

FUNCTION key
ST
Monitor
29
OR FR
" 1 Command
"
2 Initial
"
3 Function
"
4 Option
"
Function mode menu

screen
(Function mode 1st layer)
Next layer mark

This mark indicates that there is one more layer to display. To go to
the next layer, move the cursor to the item with this mark using the [Y]
and [B] keys, then press the
just press the
Examples
Function
1 Command
" 2 Initial
key. To return to the befor layer,
key.
The Initial go to the next layer.
OR FR
Initial
"
" 1 TCNT
"
3 Function
"
4 Option
"
0:CNT
[01]
2 DEBG
261
OR FR
B70115EN/03
(3) Parameter settings

The following table lists the parameters for which the values have been
changed from the initial values. If the inverter has been shipped alone
from FANUC, the user must change the parameters as listed below.
To change the parameters, an Htype remote operator (HOP0J) or
copy unit (HPW0J) is required.
JH3008LF2 (A90L00010464/CE): C1500B, C2000B, C2000C,
C3000D, C4000A
JH30016LF2 (A90L00010465/CE): C3000C, C6000B
Mode
Name
Hierarchy
Display
Before
change
After
change
Monitor
Frequency setting
FS
0.00
1000
Monitor
Acceleration time
AC1
60.0
70.0
Monitor
Deceleration time
DC1
60.0
70.0
Monitor
Number of motor poles
RPM
1:4P
0:2P
Function Operation command method
2:F/R
1:REM
0:TRM
Function Rotational direction setting
3:DOPE
0:FWD
1:REV
Function Output voltage gain adjustment
311
8:VGain
100%
95%
Function Motor rating selection
312
1:K
5:3.7 KW
Remarks
6:5.5 KW For JH3008LF2

8:11 KW For JH30016LF2
Function
Selection of number of motor

poles
312
2:P
1.4P
0:2P
Function
Setting of wait time for repower

on
354
2:WAIT
1.0S
0.0S
Function
Selection of restart from momentary interruption
3:POWR
0:ALM
2:RST
355
2:SLOCK
1:MD1
0:MD0
355
3:STOP
1:ON
0:OFF
Function Operation direction selection
355
4:F/R
2:FRE
1:REV
Function Input terminal setting 1
363
1:I1
18:RS
363
2:I2
11:FRS
363
3:I3
6:DB
(6:DB)
363
4:I4
9:CH1
11:FRS
363
5:I5
3:CF3
9:CH1
363
6:I6
2:CF2
(2:CF2)
363
7:I7
1:CF1
(1:CF1)
363
8:I8
0:REV
(0:REV) Reverse operation
Function R0T0 option selection
42
1:R0T0
0:OFF
Function Soft lock selection

Function
STOP key selection during TM

operation
262
Only for
JH3008LF2
(18:RS) Reset
15:SFT Soft lock
1:ON
Only for
JH3008LF2
440
415 "1
B70115EN/03
220 "1
250
Monitor (LED display)

This display shows frequency, motor current, motor revolution speed, and trip history
POWER Lamp
Power lamp of
control circuit
Up key, Down key

These keys are used
to change data and
increase or decrease
the frequency.
FUNC (Function) key

This key is used for
changing commands.
When pressing key after setting data and parameter, they are automatically memorized.
RUN key
This key is used for
starting.
(When terminal run
is selected, this key
does not work.)
STOP/RESET key
This key is used for stopping the
motor or resetting errors.
(When either operator or terminal
is selected, this key works. If the
extension function is used, this
function is void.)
Fig. 9.3.2 Highfrequency inverter adjustment unit (JH300)
263
9.4
PRESSURE
CONTROL UNIT
9.4.1
Setting the Gas Supply
Pressure Sensor
9.4.2
Setting the
Atmospheric Pressure
Sensor
B70115EN/03
further adjustment. If the pressure controller is replaced or requires
readjustment, however, it should be set and adjusted as described below:
(1) Turn the CNC on. Never turn on the gas pressure control start signal
(RUN) at this stage.
(2) Set the secondary pressure of the regulator of the external laser gas
supply (gas cylinder, for example) to 0.1 MPa.
(3) The gas supply pressure sensor is indicated as PSW1 on the pressure
controller. This sensor can be adjusted by a trimmer. Turn the
adjustment trimmer with a crossheaded precision screwdriver until
the red LED next to the trimmer lights. Then, turn the trimmer through
a further 30 degrees.
(4) To check the setting, reduce the secondary pressure of the regulator on
the laser gas supply unit (gas cylinder, for example) to 0.05 MPa. The
red LED of the gas supply pressure sensor (PSW1) should go off.
(5) This completes the setting.
While setting the sensor, the pressure controller is open to the atmosphere.
To prevent dust from entering the controller, pay particular attention to the
immediate surroundings.
(1) Turn off the CNC. Then, turn off the power supply and open main
circuit breaker on the back panel of the laser oscillator.
(2) Remove the orange gas tube by loosening the hexagon cap nuts
securing the tube. This causes the atmospheric pressure sensor to
detect the atmospheric pressure.
(3) Close the main circuit breaker and turn on the power supply, then turn
on the CNC. A voltage of 24 V is supplied to the sensor. Never turn
on the gas pressure control start signal (RUN).
(4) The atmospheric pressure sensor is indicated as PSW2 on the front of
the pressure controller. Turn the adjustment trimmer with a
crossheaded precision screwdriver until the red LED next to the
trimmer just lights.
(5) Replace the gas tube and secure the nuts.
(6) Turn on the gas pressure control start signal (RUN). Check that the
red LED next to the sensor goes off after the exhaust pump starts.
264
B70115EN/03
PRESSURE
SENSOR
ATMOSPHERIC
PRESSURE SWITCH
LASER GAS PRESSURE

SWITCH
Fig. 9.4.2 Pressure control unit sensor layout
265
9.5
ADJUSTING THE
EXHAUST CONTROL
UNIT (ADJUSTING
THE LASER GAS
CONSUMPTION)
B70115EN/03
further adjustment. If the exhaust adjustment valve is accidentally
touched or if the exhaust controller is replaced, however, the gas flow
should be checked and the exhaust flow adjustment valve adjusted as
described below.
Note that indiscriminate adjustment may increase the laser gas
consumption or may adversely affect the gas pressure control.
(1) Set parameters 15025 to 15028 [201 to 203] to 0. Then, start the
oscillator.
(2) Set the laser oscillator to the base discharge state (LSTR). No
discharge occurs in the discharge tube with the above parameter
settings.
(3) The gas flow to the laser oscillator is factoryadjusted in this state.
Check the flow rate with a laser gas flowmeter, mounted between the
external laser gas supply (gas cylinder, for example) and oscillator.
(4) While observing the flow rate on the gas flowmeter, adjust the exhaust
flow adjustment valve to obtain a predetermined flow rate.
(5) Stop the oscillator.
(6) Return parameters 15025 to 15028 [201 to 203] to their original
values.
(7) This completes the adjustment.
D Predetermined flow rate
Oscillator model
Flow rate
C1500B, C2000B, C2000C,

C3000D, C4000A
10 /h
C3000C
20 /h
C6000B
40 /h
266
B70115EN/03
9.6
SETTING THE
POWER INPUT
COMPENSATION
COEFFICIENT
This coefficient is precisely adjusted at the factory and should not require
any further adjustment. If the rear mirror of the laser oscillator or the
power sensor unit is replaced, however, the power input compensation
coefficient should be checked and set as described below.
The coefficient is set by measuring the laser beam. Always apply the
safety precautions related to laser beams, as explained in Chapter 2.
(1) Change the following parameter settings:
Parameter 15208 (16L, 16iL) or 233 (0L)
Predetermined value (Enable output feedback)
Parameter 15209 (16L, 16iL) or 234 (0L)
Predetermined value (Enable output feedback)
(2) Set the laser oscillator to the base discharge state (LSTR). Check
whether the oscillator alignment is optimized, by following the
procedure described in Chapter 11. If not, repeat the adjustment.
(3) Execute an internal discharge at the rated output for one minute or
longer. Run the following program in automatic mode. Measure laser
output value Pr with a laser power meter (Model P2000C
manufactured by Optical Engineer, Ltd., for example). It is
recommended that measurement be performed just behind the beam
panel. While measuring Pr, record laser output value Pa, detected by
the internal sensor and displayed on the laser setting screen.
G32 P1 Q1 ;
G24 S1500 Q100 R20000 ;
G32 P0 ;
(Radiation of 20 seconds duration)
M30
Specify S2000 for the C2000B/C2000C or S3000 for the
C3000C/C3000D.
To change the duration of the radiation applied to the power probe,
calculate the duration based on the probe display output.
(4) If power input compensation coefficient K in parameter 15215 [259]
is correct, Pa should match Pr. If there is a difference between Pa and
Pr and if the difference is "5% of Pr or greater, set the value obtained
from the following expression as power input compensation
coefficient K [Parameter 15215 (16L) or 259 (0L)].
K (new value) =
Pr (calculated from probe output)/Pa K (old value)
(5) Repeat step (2) above. Check that Pa equals Pr.
267
9.7
WATER FLOW
SENSOR
9.7.1
Adjusting the Water
Flow Sensor for
C1500B, C2000B, and
C3000C
B70115EN/03
This sensor is precisely adjusted at the factory and should not require any
further adjustment. If the water distribution unit or water flow sensor is
replaced, however, this sensor should be set and adjusted as described
below:
(1) Loosen the four bolts securing the flow switch (brown or green
component) so that it can be moved freely. Note, however, that if the
bolts are loosened excessively, the bakelite plate will float, causing an
error when the bolts are subsequently retightened.
(2) Mount a jig using the sensor cover fixing bolts.
CAUTION
When mounting the jig, fit an adjustment screw into the flow
switch lower groove (without a reed switch). Note that if the
screw is fitted into the upper groove, the reed switch will
break.
(3) Disconnect the flow switch cable from the connector. Connect a
multimeter to the cable (Faston terminal).
(4) Adjust the flow rate the cooling water entering the oscillator to a
predetermined alarm flow rate. To perform this adjustment, use a
flowmeter having an appropriate capacity and accuracy.
Model
Predetermined alarm flow rate
Rated flow rate
C1500B
35 /min
50 /min
C2000B
52 /min
75 /min
C3000C
85 /min
120 /min
(5) Turn the jig adjustment screw while observing the multimeter
reading. Lower the flow switch until it trips on.
(6) While observing the multimeter reading, raise the flow switch from
the position obtained in step (5). Check the position at which the
switch trips off.
(7) Return the switch to the on position, then again move the switch back
towards the point where it trips off. With the switch positioned to a
point immediately before it trips off, gradually turn the jig
adjustment screw (fine adjustment) to find the precise position at
which the switch trips off.
(8) After adjusting the switch to the point where it trips off, temporarily
fasten the flow switch.
(9) While observing the multimeter reading, increase the flow rate of the
water supply until the flow switch trips on.
268
B70115EN/03
(10) Gradually reduce the flow rate of the water supply. Check the rate
at which the switch trips off. Then, gradually increase the flow rate.
If the alarm flow rate is within the following range, the sensor is
normal.
If the alarm range is exceeded, repeat step (8) and subsequent steps.
Model
Alarm range
C1500B
33 to 37 /min
C2000B
49 to 55 /min
C3000C
81 to 89 /min
(11) Reduce the flow rate to turn off the flow switch. Gradually open the
valve, checking the flow rate at which the switch trips on. If the flow
rate is within the following range, the sensor is normal.
If the range is exceeded, the system flow rate may fluctuate. Repeat
the check.
Model
Sensor ON range
C1500B
37 to 46 /min
C2000B
55 to 69 /min
C3000B
C3000C
89 to 110 /min
(12) Fully tighten the flow switch. Test its operation again.
(13) Remove the jig and replace the sensor cover. Be careful not to
damage the cable with the edge of the cover. Connect the cable to the
connector.
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9.7.2
Adjusting the Flow
Sensor of the C2000C,
C3000D, C4000A, and
C6000B
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(1) Adjust the flow rate of cooling water flowing into the oscillator to an
alarm setting flow rate. Use a flowmeter with a proper and accurate
rated flow rate.
Model
Alarm setting flow rate
Rated flow rate
C2000C
50 /min
75 /min
C3000D
79 /min
120 /min
C4000A
120 /min
160 /min
C6000B
95 /min
120 /min
(2) Check that the LED (green) of the flow sensor is turned on.
(3) Adjust the knob of the flow sensor to a minimum level where the LED
(red) is turned on.
(4) Open the valve gradually for adjustment to an alarmoff setting flow
rate, and check that the LED (red) is turned on.
Model
Alarm setting flow rate
C2000C
55 /min
C3000D
84 /min
C4000A
125 /min
C6000B
100 /min
(5) Close the valve for adjustment to an alarm setting flow rate, and check
that the LED (red) of the flow sensor is turned on.
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9.8
DISCHARGE AGING
If the laser oscillator is not used for a long time (one week or more) or if
the laser gas circulation system is opened to the atmosphere (when a
mirror is cleaned or when a component of the gas system is replaced, for
example), aging must be performed before the start of operation.
Specifically, the discharge tube and circulating gas should be warmed by
internal discharge, and adsorbent impurities should be expelled by
evaporating them. When the laser gas circulating system has been opened
to the atmosphere, perform a leak check before starting aging. The aging
procedure is described below:
(1) Change the following parameter settings:
(Be sure to record the settings. The settings may be different from the
data sheet values.)
Parameter 15000, bit 3 (16L, 16iL) or parameter 200, bit 3 (0L):
0 1 (Enable internal discharge in manual mode)
1 0 (Disable threeminute compensation)
0 1
(Enable internal discharge during automatic operation)
1 0 (A vacuum is not created after run off)
Parameter 15201 (16L, 16iL) or parameter 232 (0L):
Predetermined value 0
Predetermined value 0 (Stop output feedback)
Predetermined value 0 (Stop output feedback)
Parameters 15242 and 15243 (16L, 16iL) or parameter 236 (0L):
Predetermined value (Predetermined value) 100
(2) Turn on the RUN ON key to start the oscillator.
(3) Turn on the HV ON switch to start discharge.
(4) Ensure the discharge has not stopped, then execute internal discharge
under the following conditions. The internal discharge can be started
by a program (automatic operation) or by pressing a switch (manual
operation).
1000 W
1500 W
2000 W
2500 W
4000 W
Duty 30%
Duty 50%
Duty 50%
Duty 50%
Duty 30%
(C2000B, C2000C: 15 minutes)
(C3000C, C3000D: 15 minutes)
(C4000A)
(C6000B: 15 to 30 minutes)
D Automatic operation
1) Create this program (when C1500B):
G32 P1 Q1 ;
G24 S1000 Q100 R900. ;
S specifies an output (W), Q
G32 P0 ;
specifies a duty cycle (%),
and R specifies a time
(seconds).
2) Lock the shutter. Then, run the program.
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D Manual operation
This method can be used if the machine operators panel has a
switch for starting internal discharge manually.
1) Enter the desired output and duty cycle on the setting screen.
2) Press the internal discharge switch to start internal discharge.
(5) When a time determined above has elapsed, turn off the RUN ON key
to stop the oscillator. (With the new software, discharge can be
stopped with HV OFF.)
(6) Return the discharge gas pressure to the normal setting, and perform
internal discharge with the setting below, then perform purging.
Parameter No. 15242, No. 15243 (16L, 16iL), parameter No.
236 (0L)
Setting100 Setting
1500 W Duty 50%
2000 W Duty 50%
(C2000B, C2000C: 15 minutes)
3000 W Duty 50%
(C3000C, C3000D: 15 minutes)
4000 W Duty 30%
(C4000A: 15 minutes)
4000 W Duty 30%
(7) Repeat step (5) until the output is *2% or more than the specified
value and the discharge voltage is up to 200 V plus the
factoryadjusted data.
(8) After the completion of aging, restore the parameters to their original
settings.
Gas flow system aging
Perform gas flow system aging, after a part such as a turbo blower, heat
exchanger, or a pipe is replaced or if dust or any other impurity gets in the
vacuum section.
Procedure
1) Fig. 9.8 (a) shows the outline of the cleaner flange.
First attach bothsided adhesive tape to the cleaner flange. (The
shown flange is for the left side.)
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Fig. 9.8 (a) Detail of the Cleaner Flange
2) Mount the cleaner flange on the oscillator.

Be sure to keep the flange in the correct orientation.
Figs. 9.8 (b) to 9.8 (h) show the locations where the cleaner flange is
to be fastened.
Fig. 9.8 (b) Inlet of cleaner flange in C1500B
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Fig. 9.8 (c) Inlet of cleaner flange in C2000B
Fig. 9.8 (d) Inlet of cleaner flange in C2000C
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Fig. 9.8 (e) Inlet of cleaner flange in C3000C
Fig. 9.8 (f) Inlet of cleaner flange in C3000D
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Fig. 9.8 (g) Inlet of cleaner flange in C4000A
Fig. 9.8 (h) Inlet of cleaner flange in C6000B
3) Start the oscillator, and check it for leakage.

Vacuum it twice.
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4) Start the oscillator, and keep the turbo blower rotating (LRDY).
Leave the oscillator in this state overnight.
5) More impurities can be captured by using also discharge aging to raise
the gas temperature.
6) When gas flow system aging is completed, stop and purge the
oscillator.
7) Dismount the cleaner flange, and attach the flange that was initially
used.
8) Check the oscillator for leakage.
9) Vacuum the oscillator twice.
10) End.
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10. REPLACEMENT PROCEDURES
10
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REPLACEMENT PROCEDURES
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10.1
INPUT UNIT
10.1.1
Replace the stabilized power supply as follows:
Replacing the
Stabilized Power
Supply
(1) Turn off the power to the CNC, then turn off the power to the laser
oscillator. In addition, open the main circuit breaker for the laser
oscillator.
(2) Disconnect all cables from the stabilized power supply.
(3) Remove the four screws or edge supports, then remove the stabilized
power supply.
(4) Mount a new stabilized power supply by reversing steps (2) and (3).
Connect the cables, noting the alignment marks. Ensure that no
terminals are loose.
10.1.2
oscillator.
Replacing the Input

Unit Control PCB
(2) Disconnect all cables from the control PCB.

(3) Remove the four screws, then remove the input unit control PCB.
(4) Mount a new PCB by reversing steps (2) and (3). Connect the cables,
noting the alignment marks. Ensure that no terminals are loose.
10.1.3
Replace the FS0L interface PCB on the oscillator side as follows:
Replacing the FS0L

Interface PCB
(A16B11100223) on
the Oscillator Side
oscillator.
(2) Disconnect all cables from the interface PCB.
(3) Remove the four screws or edge supports, then remove the interface
PCB.
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10.1.4
Replace the FS16L interface PCBs on the oscillator side as follows:
Replacing the FS16L,

FS16iL Interface
PCBs on the Oscillator
Side
When IF PCB (A02B0128C202)

(1) Replacing the upper PCB (A16B11100260)
1) Turn off the power to the CNC, then turn off the power to the laser
oscillator.
2) Disconnect the cables from connectors CN11 to CN18, CN23 to
CN25, JD1B (or COP1B), CN34, MA1, MB1, MP1, and CP87, as
well as those connected to the terminal block.
3) Remove the PCB from the ten PCB holders, by tilting the holder
claws outwards.
4) Mount a new PCB by reversing steps 2) and 3). Connect the cables,
(2) Replacing the lower PCB (A16B21000080)
oscillator.
2) Disconnect the cables from the interface PCB, with the exception
of those connected to MA1, MB1, MP1, and CP87.
3) Remove the screws then remove the entire PCB unit (two PCBs:
A16B11100260 and A16B21000080).
4) Remove the upper PCB (A16B11100260) from the ten PCB
holders, by tilting the holder claws outwards. (Also disconnect the
cables from MA1, MB1, MP1, and CP87.)
5) Mount the upper PCB (A16B11100260), removed in the
previous step, on a new lower PCB (A16B21000080). Then,
connect the cables to MA1, MB1, MP1, and CP87.
6) Mount the PCB unit by reversing steps 2) and 3). Connect the
cables, noting their alignment marks. Ensure that no terminals are
loose.
When IF PCB (A16B21000141)
For replacement, use the same procedure as described in Section 10.1.3.
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A20B10050124
Fig. 10.1.4 (a) Removing the IF PCB unit (FS16L: A02B0128C202)
Fig. 10.1.4 (b) Removing the PCB from the PCB holder
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10.2
REPLACING THE
LASER POWER
SUPPLY
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Figs. 10.2 (a) to (l) show the laser power supply. Replace the laser power
supply as described below.
(1) Replacing the power supply
1) Turn off the power to the laser oscillator, then drain the cooling
water.
2) Remove the following water joints, power cables, and signal
cables:
See Fig. 10.2 (a). S Water joint A
S Water joint B
S TL17 or XT21
S TL18 or XT22
S CP51
S CP73
S Ground cable
3) Remove the bolts securing the power supply, then remove the
power supply. If it proves difficult to pull out the power supply,
slightly shift it to the right or left, then retry.
4) Once the power supply has been replaced, tighten the bolts, then
connect the water joints, power cables, and signal cables correctly.
Mount the cover for TL18 or XT22. The new power supply must
be adjusted before it can be used.
(2) Checking for and replacing a damaged highspeed diode or FET
module PCB
1) Preparation
1. Turn off the power to the CNC, then turn off the power to the
laser oscillator. In addition, open the main circuit breaker for
2. Remove the top cover of the laser power supply from inside the
oscillator. (See Fig. 10.2 (b) and (h). To remove the top cover,
remove the screw indicated by A.)
3. Once the top cover has been removed in case of 6 kW power
supply, eight FET module PCBs (A in the figure 10.2 (c), (d))
and two diode units (B and C) appear. In case of 9 kW power
supply, two FET module PCBs (in the figure 10.2 (i), (j)) and
two diode units appear.
2) Checking for and replacing a damaged highspeed diode (See Fig.
10.2 (e), (f), (i) and (k).)
1. To check whether a diode is damaged, measure the resistance
between the anode and cathode of each of the twelve diodes in
the diode unit, by using a multimeter. A resistance of less than
10W indicates that the diode is damaged. (a normal diode will
have a resistance of about 3 MW to 10 MW.)
CAUTION
When measuring the diode resistance, apply the positive
probe of the multimeter to the cathode of the diode, and
apply the negative probe to the anode.
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2. Remove the damaged diode by removing the screws and nuts

at the both ends.
In case of 9 kW power supply at first replace the cooling heat
sink and diode plate 1 and 2, then replace the diode block A and
B to remove diode.
CAUTION
When removing a diode, if it proves necessary to remove
the heat sink to which the diode is fixed, be careful not to
damage the insulating sheet under the heat sink.
3. Mount a new diode, then fix the diode using the screws and nuts.
In case of 9 kW power supply mount the diode block with
temporarilly fastening of replaced diode and fix after deciding
the direction of mounting diode.
CAUTION
Two types of diodes, UES806 and UES806R (alternative
model: UES805R) are used (see Fig. 10.2 (e), (f) and (j)).
When replacing a diode, it must be replaced with one of the
same type.
3) Checking for and replacing a damaged FET module PCB (See Fig.
10.2 (g) (i).)
1. To check whether an FET module PCB is damaged, measure the
resistance between check pins D and S or screws A and B (6 kW
power supply) shown in the figure. When the 9kW power
supply is being used, measure the resistance at both of these
points for each of FET (1) and FET (2). These are separate
circuits. A resistance of less than 10 kW indicates that the FET
module PCB is damaged. (A normal FET module PCB will
have a resistance of about 30 kW to 10 MW.)
2. Remove the damaged FET module PCB as follows: Remove
the six screws shown in the figure (A, B, and C), disconnect the
green cables from connectors CN72 and CN73, then lift the
PCB upwards.
When the 9kW power supply is being used, disconnect the
cables and remove the screws, then remove the stepup
transformer PCB, before removing the damaged FET PCB.
CAUTION
Do not disconnect the green cables from the lower PCB
(A20B10060060).
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3. Mount a new FET module PCB, fix it using the six screws, then
connect the cables.
When the 9kW power supply is being used, connect the CN51
or CN52 cable to the new FET PCB securely, then temporarily
tighten all the screws so that the FET PCB is free to move. As
shown in Fig. 10.2 (m), first tighten screw a. Then, gradually
tighten screws b and c, in turn, taking two or three steps to
tighten each screw. Connect the CN71 cable securely, mount
the stepup transformer PCB, then reconnect all the other
cables.
CAUTION
1 The new PCB should be oriented such that its printed
pattern is aligned with those of the other PCBs (no problem
will result, however, if the orientation is inverted.)
2 Ensure that the green cables are connected as before.
4) Checking
1. Recheck that all removed screws and disconnected cables are
securely tightened or connected.
2. Mount the top cover of the power supply.
CAUTION
If any screws are loose, or if any cable is disconnected,
turning on the power may damage the power supply.
3. Turn on the oscillator, then adjust the power supply as described
in Section 9.1.
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Fig. 10.2 (a) Laser power supply unit layout (front side): B204, B205
Fig. 10.2 (b) Laser power supply unit layout (upside): B204, B205
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Fig. 10.2 (c) Laser power unit layout (inner side): B204, B205
Fig. 10.2 (d) Laser power unit layout (inner part details): B204, B205
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Fig. 10.2 (e) Diode unit layout (Fig. 10.2 (d) B part details): B204, B205
Fig. 10.2 (f) Diode unit layout (Fig. 10.2 (d) C part details): B204, B205
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Fig. 10.2 (g) FET module PCB layout (Fig. 10.2 (d) A part details): B204, B205
Cover mounting
screw
Cover for XT22
Fig. 10.2 (h) Layser PSU layout: B206 to B210
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Step up transformer PCB
Diod unit 2
Diod unit 1
Fig. 10.2 (i) Laser PSU internal details: B206 to B208
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F type
Anode
Cathod
R type
Anode
Cathod
Fig. 10.2 (j) Mounting position of diode: B206 to B208
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Cooling heat sink

Diode plate 2
Diode plate 1
Diode block A
Diode block B
Fiber reinforced plastic
Diode block face of A

Fiber reinforced plastic
Diode block face of B
Fig. 10.2 (k) Replacing diode: B206 to B208
Fig. 10.2 (l) FET PCB heat sink fixing: B206 to B208
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Fig. 10.2 (m) Laser PSU internal details: B209 to B210
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Fig. 10.2 (n) Mounting position of diode: B209 to B210
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10.3
Replace the matching box as follows:
REPLACING THE
MATCHING BOX
oscillator.
(2) Disconnect the power and signal cables from the matching box.
(3) Remove the resonator fan unit, then remove the discharge tube feeder.
(4) Remove the two rods (a long one and a short one) from the matching
box, using an 8mm spanner.
(5) Remove the two securing screws, then remove the matching box by
slightly pulling it toward you. If it proves difficult to remove the
matching box, slightly shift it to the right or left, then retry.
(6) Mount a new matching box by reversing steps (5) to (2).
CAUTION
The screws used to fix the power cables are made of brass.
These screws may be damaged if tightened excessively.
Steel screws cannot be used because they generate heat.
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10.4
REPLACING THE
TURBO BLOWER
When the turbo blower is replaced, the gas circulating system is open to
the atmosphere for a long time. Pay particular attention to the immediate
surroundings to ensure that dust and other contaminants do not enter the
gas circulating system.
Clean the flanges of the turbo blower and the pipe flanges before replacing
the turbo blower.
CAUTION
Do not incline the turbo blower while transporting and
installing it. Doing so will cause lubricating oil to enter the
pump, contaminating the laser gas circulating system and
optical mirrors. Usually, all oil is drained from a turbo blower
prior to shipping. Even so, however, the turbo blower must
not be inclined because trace amounts of oil will inevitably
remain inside the unit.
If a turbo blower is inclined, it can no longer be used.
(1) Replacement procedure
Be careful not to damage the Orings or their mating surfaces
on the pipes. A damaged Oring or mating surface will result
in gas leakage.
oscillator.
2) Disconnect the cooling water tubes and power cables from the
turbo blower, then drain the oil from the turbo blower.
3) Disconnect the two pipes from the turbo blower outlet and one pipe
from turbo blower inlet. Cover the removed gas pipes and turbo
blower to prevent dust from entering.
4) Remove the hexagon headed bolt which secures the damping
rubber and blower base, then remove the turbo blower by sliding
it horizontally. Note that the turbo blower weighs about 30 kg.
5) Remove the two metal brackets, used to secure the turbo blower,
from the removed turbo blower, then mount them on the new turbo
blower.
6) Mount the new turbo blower on the oscillator, then fix the gas
pipes. Be careful not to damage the Orings and ensure that no
Oring is missing.
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7) Tighten the nut of the damping rubber. Carefully follow the

procedure below to prevent the damping rubber from being twisted
and damaged.
Tightening procedure (C1500B, C2000B, C2000C, C3000C,
C6000B)
1. Position the antivibration rubber such that its parting line is
clearly visible (to enable any twisting to be observed).
2. Temporarily tighten the bolt.
3. Tighten the nut to a torque of 12 N@m.
4. Loosen the bolt, and eliminate the twist caused in step 3.
5. Hold the lower part of the rubber using water pliers, to
prevent the rubber from twisting, then tighten the bolt to a
torque of 12 N@m.
6. Check whether the rubber is twisted, by observing the
parting line (the displacement between the top and bottom
of the line must not exceed 2 mm).
8) Connect the cooling water tubes and the power and ground cables.
9) Supply a prescribed amount of turbo oil to the turboblower.
10) Check that there are no cooling water leaks, turn on the oscillator,
then check for gas leakage.
11) Set an oil level alarm for the turboblower as described in Section
9.2, Setting the Turbo PCB.
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Fig. 10.4 Turbo blower layout
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10.5
Replace the turbo PCB as follows:
REPLACING THE
TURBO PCB
oscillator.
(2) Disconnect all cables from the turbo PCB.
(3) Remove the four screws or four edge supports, then remove the PCB.
noting the alignment marks.
(5) Once the turbo PCB has been replaced, the turbo blower oil level alarm
must be set. Set the alarm as explained in Section 9.2.
10.6
Replace intermediate PCB B as follows:
REPLACING
INTERMEDIATE PCB
B
oscillator.
(2) Disconnect all cables from intermediate PCB B.
(3) Remove the four screws or four edge supports, then remove the PCB.
noting the alignment marks.
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10.7
REPLACING THE
EXHAUST PUMP
When the exhaust pump is replaced, the gas circulating system is open to
Replace the exhaust pump as follows (refer to the accompanying figure).
oscillator.
(2) Drain the cooling water from the oscillator, then disconnect the two
water tubes.
(3) Disconnect the tubes from the pump outlet and inlet. Then, disconnect
the heavyduty power cables from the terminal block on the side of the
pump.
(4) Remove the bolts securing the exhaust pump unit, then remove the
pump unit. Remove the bolts securing the pump to the mounting plate,
then remove the pump.
(5) Position the new exhaust pump on the mounting plate, then secure the
pump unit by reversing steps (2) to (4). The new pump may not be
fitted with gas and water joints. In such a case, remove the joints from
the old pump, wind sealing tape around each joint, then fit them to the
new pump.
Ensure that the terminal block is wired correctly. Incorrect wiring may
cause the pump rotation to be reversed, causing the pump oil flow to
be reversed. Connect the cables, noting the alignment marks.
(6) Pumps are shipped without lubricating oil. Fill the pump with
Matsumura Oil SAH. Operating the pump without lubricating oil
will cause the thermal switch to trip, and will ultimately damage the
pump.
(7) Close the main circuit breaker, turn on the power to the oscillator, then
turn on the power to the CNC. Then, perform a laser oscillator leakage
test and check the operation of the exhaust pump.
When the power is first turned on, check that gas is output from the gas
outlet of the oscillator. The pump starts after gas has been discharged
from the external pipes for a few seconds. Gas being drawn into the
oscillator, or abnormal noise, indicates that the pump rotation is
reversed. In such a case, check the wiring of the terminal block.
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Fig. 10.7 Exhaust pump unit layout
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10.8
REPLACING THE
PRESSURE
CONTROL UNIT
When the pressure control unit is replaced, the gas circulating system is
open to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do not
enter the gas circulating system.
Replace the pressure control unit as follows:
oscillator.
(2) Close the valve of the external laser gas supply (for example, a gas
cylinder).
(3) Disconnect all removable tubes and cables. Pressurized laser gas may
remain in the control unit. Discharge this gas by loosening the nut on
the joint.
(4) Remove the unit securing screws, then remove the unit.
(5) Mount a new unit by reversing steps (3) and (4).
(6) The new pressure control unit must be adjusted. Adjust the unit as
explained in Chapter 9.
(7) Turn on the oscillator, then perform a gas leakage check.
Fig. 10.8 Pressure control unit layout
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10.9
REPLACING THE
EXHAUST CONTROL
UNIT
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When the exhaust control unit is replaced, the gas circulating system is
open to the atmosphere for a long time. Pay particular attention to the
immediate surroundings to ensure that dust and other contaminants do not
enter the gas circulating system.
Replace the exhaust control unit as follows:
oscillator.
(2) Disconnect the tubes and cables from the control unit.
(3) Remove the unit securing screws, then remove the unit.
(4) Mount a new unit by reversing steps (2) and (3). Ensure that all tubes
are connected and tightened, and that the cables are connected
correctly.
(5) Perform all settings as described in Section 9.5, then check the
operation. If a laser gas flowmeter is not provided, adjust the exhaust
valve of the new exhaust control unit such that the amount by which
it opens (the angle and number of turns by which the valve is open
relative to the fully closed state) is the same as that of the exhaust valve
of the removed control unit.
Fig. 10.9 (a) Exhaust control unit C1500B
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Fig. 10.9 (b) Exhaust control unit C2000B, C2000C, C3000D, C4000A
Fig. 10.9 (c) Exhaust control unit C3000C
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Fig. 10.9 (d) Exhaust control unit C6000B
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10.10
REPLACING A
DISCHARGE TUBE
When a discharge tube is replaced, the gas circulating system is open to

oscillator.
(2) Remove the panel from the maintenance side and top panel of the
oscillator.
(3) Remove the resonator fan unit.
(4) Remove the copper plate (feeder) which connects the two matching
box rods to the discharge tube, by loosening the wing screw.
(5) Remove all the screws from the flange which secures the discharge
tube (six screws are used for each discharge tube).
(6) Move the discharge tube toward the output, rear, and folding mirrors,
while rotating it. If the Oring is too tight to allow the discharge tube
to be moved, lubricate the Oring with alcohol. Before attempting
to move the discharge tube, however, move the flange to the center
of the tube. Then, hold the supported end of the discharge tube,
leaving a gap of 5 mm, then push the discharge tube while rotating
it. At this time, be careful not to damage the end of the discharge tube.
If the discharge tube is damaged, glass chips may enter the gas
circulating system.
(7) Move the Oring to the center of the discharge tube, then remove the
discharge tube. If the Oring is at the end of the discharge tube, the
end of discharge tube may be damaged while it is being removed.
(8) Remove the copper plate (feeder) from the removed discharge tube,
then mount it on a new discharge tube.
(9) Mount the flange on the new discharge tube, then mount the Oring.
Before mounting the Oring, wipe it with alcohol. A Teflon Oring
is hard, and must be expanded slightly (by hand) before being
mounted.
The surface of the Oring may exhibit cracks or some white deposits,
indicating deterioration. Such an Oring may cause gas leakage or
generate dust. Replace it with a new one.
(10) Insert the new discharge tube into the discharge tube holder by
reversing step (6), then perform assembly by reversing steps (4) and
(5).
(11) Mount the resonator fan unit, then connect the fan cables to the
terminal block.
(12) Turn on the oscillator, then perform a gas leakage check.
(13) If no gas leakage is detected, perform discharge aging. If the
discharge area of the new discharge tube greatly differs from those
of the other discharge tubes, adjust the power supply.
305
10.11
REPLACING A FAN
UNIT
10.11.1
Replacing a Fan Unit
10.11.2
Replacing a
Fanassisted Radiator
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The laser oscillator contains many fan units, which are classified into the
following two types:
(1) Fan unit
Consists of several fans and a terminal block.
(2) Fanassisted radiator
Consists of a watercooled radiator, several fans, and a terminal block.
The replacement of each type of fan unit is described below.
Replace a fan unit as follows:

oscillator.
(2) Remove the panel from the oscillator.
(3) Disconnect the Faston terminal and ground cable from the terminal
block.
(4) Remove the fan unit from the oscillator.
(5) Mount a new fan unit, then secure it by tightening the screws. Before
tightening the screws, however, check that the damping rubber is
fitted. Otherwise, the screws cannot be tightened.
(6) Connect the Faston terminal and ground cable.
turn on the power to the CNC. Then, check that the fans rotate.
Replace a fanassisted radiator as follows:

oscillator.
(2) Cooling water is passed through the radiator of the fan unit. Drain
the water from the radiator, then disconnect the water pipes. To drain
the cooling water, open the drain valve of the water distribution unit.
(3) Remove the panel from the oscillator.
(4) Disconnect the Faston terminal and ground cable from the terminal
block.
(5) Remove the fan unit from the oscillator. At this time, the radiator
may still contain water. Therefore, plug the radiator joints with rag
to prevent water being spilled on the other units.
(6) Mount a new fan unit, then secure it by tightening the screws. Before
tightening the screws, however, check that the damping rubber is
mounted. Otherwise, the screws cannot be tightened.
(7) Connect the water tubes.
(8) Connect the Faston terminal and ground cable.
(9) Operate the chiller unit manually to circulate the cooling water.
Check that no water leaks from the joints that were disconnected
during the replacement. After checking, restore the original chiller
setting.
(10) Close the main circuit breaker, turn on the power to the oscillator,
then turn on the power to the CNC. Then, check that the fans rotate.
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10.12
REPLACING THE
POWER SENSOR
UNIT
The power sensor is a very delicate component. Be careful not to touch

or apply force to the black, lightsensitive surface. Also, ensure that no
dust enters the sensor.
When removing the power sensor unit from the rear mirror or mounting
the unit on the rear mirror, be careful not to touch the alignment
micrometer on the rear mirror.
Replace the power sensor unit as follows:
oscillator.
(2) Disconnect the coaxial cable from the power sensor unit.
(3) Remove the three securing bolts, then remove the power sensor unit
from the mirror holder.
turn on the power to the CNC.
(6) Turn on the laser, then check that the laser output indication appears.
(7) The power input compensation coefficient must be changed. Change
the coefficient as explained in Section 9.6.
307
10.13
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Replace the shutter section as follows:
REPLACING THE
SHUTTER SECTION
10.13.1
Replacing the Shutter
Unit
10.13.2
Mirror
oscillator.
(2) The C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A also
require that the cables be disconnected from intermediate PCB B.
(3) Remove the bolts which secure the unit, then remove the unit.
(5) The shutter unit is fitted with a semiconductor laser unit. Superimpose
the semiconductor laser beam on the CO2 gas laser beam, as explained
in Section 11.2.2.
Replace the shutter mirror as follows. Be careful not to leave fingerprints

on the shutter mirror.
(1) Remove the four bolts, then remove the shutter arm.
(2) Remove the temperature switch, then disconnect its cables.
(3) Remove the three bolts, then remove the shutter mirror together with
the heat sink.
(4) Apply a minute amount of thermal compound (Ryosan 91050) to the
rear of a new shutter mirror, then mount the new shutter mirror by
reversing steps (1) to (3).
10.13.3
Replace the shutter switch as follows:

Switch
(1) Remove connector CN52B from intermediate PCB B, then disconnect

its cable.
(2) Remove the photoelectric switch together with the metal bracket.
(3) Mount a new photoelectric switch and cable on the metal bracket.
Reverse steps (1) and (2) by mating the wire mark with the label on the
shutter section.
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Fig. 10.13.3 (a) C1500B, C2000B, C2000C, C3000C, C3000D, and C4000A
shutter unit layout
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Fig. 10.13.3 (b) Shutter unit layout
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10.14
Replace the beam absorber as follows:
REPLACING THE
BEAM ABSORBER
oscillator.
(2) The beam absorber is watercooled. Drain the water from the beam
absorber, then disconnect the water pipes. To drain the cooling water,
open the drain valve of the water distribution unit.
(3) Disconnect the temperature sensor Faston terminal.
(4) Remove the bolts, then remove the absorber. Before removing the
absorber, mark the position of the absorber or mounting metal bracket.
If the position of the absorber is shifted as a result of the replacement,
the laser beam is not directed to the center of the absorber. In such a
case, the absorber must be adjusted.
(5) Mount a new absorber, aligning it with the marked position.
(6) Connect the water tubes and temperature sensor cable.
(7) Operate the chiller unit manually to circulate the cooling water. Check
that no water leaks from the joints that were disconnected during the
replacement. After checking, restore the original chiller setting.
turn on the power to the CNC. Check the position of the absorber, as
described below.
D Adjusting the absorber position
1) Draw a cross on an acrylic plate, then fix the plate such that
the center of the cross is aligned with the center of the
absorber aperture.
2) Provide a flow of cooling air to the acrylic plate, using a drier,
for example.
3) Turn on the oscillator, then press the high voltage switch.
Monitor the output display screen. Once the output reaches
300 to 500 W, immediately turn off the high voltage switch.
During this period, a laser beam is output, leaving a circular
mark on the acrylic plate.
4) Adjust the absorber such that the mark on the acrylic plate
is aligned with the center of the absorber.
5) Repeat step 3), then check the position of the absorber. If
the mark is still not aligned with the center of the absorber,
adjust the absorber again.
6) In step 3), soot from the burnt acrylic plate may adhere to
the shutter mirror. Check whether the shutter mirror has
been contaminated with soot or other particles, and clean
the mirror if necessary.
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Fig. 10.14 (a) Beam absorber layout (C1500B, C2000B, C2000C)
Fig. 10.14 (b) Beam absorber layout (C3000C, C3000D)
312
THERMAL SW
POSITION ADJUSTMENT SCREW
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Fig. 10.14 (c) Beam absorber layout (C4000A)
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Fig. 10.14 (d) Beam absorber layout (C6000B)
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10.15
Replace the highfrequency inverter as follows:
REPLACING THE
HIGHFREQUENCY
INVERTER
oscillator.
(2) Disconnect the cables from the highfrequency inverter.
(3) Remove the four screws, then remove the inverter.
(4) Mount a new inverter, then secure it by tightening the screws.
(5) Connect the cables correctly. If the inverter output wiring is incorrect,
the turbo blower rotation may be reversed, thus contaminating the
oscillator.
(6) Set the highfrequency inverter as explained in Section 9.3.
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10.16
Replace the water distribution unit as follows:
REPLACING THE
WATER
DISTRIBUTION UNIT
oscillator.
(2) Drain all cooling water from the oscillator, using compressed air, for
example. Compressed air must be supplied only from the cooling
water inlet. Supplying compressed air from the cooling water outlet
may tangle the flow sensor balancer, such that it cannot operate. In
such a case, remove the flow sensor, as described in Section 10.17,
then mount it again.
(3) Remove the panel on the cooling water inlet/outlet side of the
oscillator.
(4) Mark the water pipes connected to the distribution unit, then
disconnect the pipes.
(5) Remove the bolts securing the distribution unit, then remove the unit.
(6) Mount a new distribution unit by reversing steps (4) and (5). Connect
the water pipes correctly, noting the alignment marks.
(7) Operate the chiller unit manually to circulate the cooling water. Check
Check the amount of water in the chiller unit, and add water if
necessary.
(8) Adjust the flow sensor as described in Section 9.7. If the sensor of the
new unit cannot be adjusted for some reason, remove the flow sensor
from the old distribution unit, as described in Section 10.17, then
mount it on the new distribution unit.
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Fig. 10.16 (a) Detail of water destributer unit (C1500B)
Refer to water flow diagram (Fig. 7.2 (a)).
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Fig. 10.16 (b) Detail of water destributer unit (C2000B)
Refer to water flow diagram (Fig. 7.2 (b)).
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Fig. 10.16 (c) Detail of water destributer unit (C2000C)
Refer to water flow diagram (Fig. 7.2 (c)).
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Fig. 10.16 (d) Detail of water destributer unit (C3000C)
Refer to water flow diagram (Fig. 7.2 (d)).
320
Valve (open)
Normal position
Valve (closed)
Position when
water is removed
B70115EN/03
Fig. 10.16 (e) Detail of water destributer unit (C3000D)
Refer to water flow diagram (Fig. 7.2 (e)).
321
Valve (open)
Normal position
Valve (closed)
Position when
water is removed
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Fig. 10.16 (f) Detail of water destributer unit (C4000A)
Refer to water flow diagram (Fig. 7.2 (f)).
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Fig. 10.16 (g) Detail of distribution unit A (C6000B)
Refer to water flow diagram.
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Fig. 10.16 (h) Detail of distribution unit B (C6000B)
Refer to water flow diagram.
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10.17
Replace the flow sensor as follows:

oscillator.
(2) Drain all cooling water from the oscillator, using compressed air, for
example. Compressed air must be supplied only from the cooling
water inlet.
(3) Disconnect the sensor Faston terminal from the terminal block.
(4) Remove the four bolts, then remove the sensor. Be careful not to
damage the float.
(5) The flow sensor consists of a float and read switch section. When
replacing the float, shift and remove the float core from the shaft hole
on the sensor flange, then mount a new float core. When replacing the
read switch section, replace the Bakelite plate.
(6) Mount the float section on the sensor flange. (Be careful not to deform
the wire ring. To prevent this, hold the plate of the float section
between your fingers.) Then, insert the sensor into the block of the
distribution unit, ensuring that the Oring is fitted correctly. At this
time, the wire ring of the float must be hanging downwards. Also, be
careful not to disconnect the float. Secure the sensor by tightening the
four bolts.
(7) Operate the chiller unit manually to circulate cooling water. Check
Check the amount of water in the chiller unit, and add water if
necessary.
(8) Adjust the flow sensor as described in Section 9.7.
REPLACING THE
FLOW SENSOR
REMOVE SCREWS
(4POS.)
REED SWITCH
MAGNET
BALANCER
Fig. 10.17 (a) Detail of water flow rate sensor (C1500B, C2000B, C3000C)
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Fig. 10.17 (b) Detail of flow sensor (C2000C, C3000D, C4000A, C6000B)
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10.18
Replace the Dew sensor as follows:
REPLACING THE
DEW SENSOR
oscillator.
(2) Disconnect the dew sensor Faston terminal from the terminal block.
(3) Remove the screws securing the dew sensor, then replace the sensor
with a new one.
(4) Connect the Faston terminal to the terminal block.
10.19
Replace the semiconductor laser as follows:

oscillator.
(2) Remove connector CN59 from intermediate PCB B, then disconnect
the cable.
(3) The semiconductor laser unit consists of the semiconductor laser and
adjustment stage. In the case of this model, the semiconductor laser
must be replaced together with the adjustment stage.
(4) Remove the three screws securing the laser unit, then replace the laser
unit with a new one.
(5) Insert the cable of the semiconductor laser into the connector on
intermediate PCB B, then secure the cable.
(6) Replacing the semiconductor laser causes the direction of the laser
output to shift.
To adjust the direction, superimpose the
semiconductor laser beam on the CO2 laser beam, as explained in
Section 11.2.
REPLACING THE
SEMICONDUCTOR
LASER
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10.20
Use the procedure below for trigger electrode replacement.
REPLACING THE
TRIGGER
ELECTRODE
(1) Turn off the power to the CNC, then turn off the main circuit breaker
and power supply.
(2) Remove bolt and screw , then remove the trigger electrode.
(3) Check that Oring is set in the nozzle A , and install a new trigger
electrode.
(4) Set the parameters below.
Bit 4 of parameter No.15000 (16L, 16iL), bit 4 of
Setting 0
Parameter No. 15220, No, 15221 (16L, 16iL),
parameter No. 231, No. 232 (0L): Setting 0
Parameter No. 15223 (16L, 16iL),
Setting Setting 60
Parameter No. 15240 (16L, 16iL),
Setting 0
(5) Make a leakage check. See Section 4.3.
(6) Draw a vacuum twice. Then, return the setting of parameter No. 15240
(16L, 16iL) or parameter No. 235 (0L) to the original value.
(7) Restart the laser oscillator, and check that trigger electrode discharge
continues for 5 minutes. If trigger electrode discharge stops, make a
power supply adjustment according to Section 9.1.
(8) Return the values of the parameters modified in step (4) to the original
values.
(9) Perform aging according to Section 9.8.
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Trigger electrode
Feeder
Feeder mounting screw
Trigger electrode mounting screw
Oring (P10)
Discharge tube nozzle A
Fig. 10.20 Trigger electrode replacement
329
11. LASER OPTICAL SYSTEM
11
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LASER OPTICAL SYSTEM
Table 11 lists the optical parts and their features. Use this table to
determine the feature of each optical part. When mounting these parts,
be careful to orient them correctly and ensure that they are being mounted
on compatible units. If a part is not mounted correctly, beam mode
distortion, reduced output, a deterioration in the machining
characteristics, or damage to the power sensor unit may occur.
Table 11 Optical parts and their features
Name
Specification
Substrate
material
Color (front/rear)
Dimensions
(in.)
Application
Marking
Output coupler
A98L00010981
ZnSe
Transparent: Amber
1.1 f
C1500B
Output coupler
A98L00010981/B
ZnSe
Transparent: Amber
1.1 f
C1500B
Output coupler
A98L00010960
ZnSe
Transparent: Amber
1.1 f
C2000B
C2000C
Output coupler
A98L00030015/B
ZnSe
Transparent: Amber
1.5 f
C3000D
Output coupler
A98L00030015/D
ZnSe
Transparent: Amber
1.5 f
C3000C
Output coupler
A98L00030027
ZnSe
Transparent: Amber
1.5 f
C6000B
Output coupler
A98L00030036
ZnSe
Transparent: Amber
1.5 f
C4000A
Rear mirror
A98L00010750
Ge
Opaque: Silver/silver
1.1 f
C1500B
Rear mirror
A98L00010961
Ge
1.1 f
C2000B
C2000C
10 Rear mirror
A98L00030016/B
Ge
1.5 f
C3000D
11 Rear mirror
A98L00030016/C
Ge
1.5 f
C3000C
12 Rear mirror
A98L00010757/B
Ge
1.5 f
C6000B
13 Rear mirror
A98L00030037
Ge
1.5 f
C4000A
14 Folding mirror
A98L00010615/B
Si
Opaque: Gold/(harsh) gray
2.0 f
C1500B, C2000B
C2000C, C3000C
HP or
DEMMR
C3000D, C4000A
15 Folding mirror
A98L00010866/B
Si
2.5 f
C6000B
HP or
DEMMR
16 Zeroshift
mirror
A98L00010616/C
Si
2.0 f
l/0 45
17 Circular polarization mirror
A98L00010617/C
Si
2.0 f
l/4 45
330
Laser oscillators with

short optical path
C3000C
(long optical path)
Laser oscillators with
short optical path
C3000C
(long optical path)
B70115EN/03
11.1
CLEANING OPTICAL
PARTS
The optical parts in the laser oscillator, including the output mirror, rear
mirror, folding mirrors, and circular polarization mirror, must be cleaned
or replaced periodically. Similarly, if the laser output or beam mode
pattern becomes abnormal, the optical parts must be cleaned or replaced.
When the output coupler, rear mirror, and folding mirrors are cleaned or
replaced, the discharge tubes are open to the atmosphere for a long time.
Therefore, pay particular attention to the immediate surroundings to
ensure that dust does not enter the discharge tubes.
When cleaning and replacing the output coupler and rear mirrors, deal
with one mirror at a time. If both mirrors are removed at the same time,
it may prove impossible to attain the specified output level after they are
reinstalled. As a result, the alignment work required after mirror
replacement will become more difficult. Before removing the folding
mirrors, adjust the mode; it will subsequently be easier to perform
correction even if the folding mirrors are displaced.
To remove the folding mirrors, remove two or three mirrors at a time.
Reduced output or the inability to attain a good mode pattern after
cleaning or replacement indicates that the folding mirrors are displaced.
Perform adjustment using the micrometers of the folding mirrors.
Follow the cleaning procedure given below.
C1500B, C2000B, C2000C
C3000C, C3000D, C6000B
1)
Clean the output coupler
Clean the output coupler
2)
Clean the rear mirror
Clean the rear mirror
3)
Clean three folding mirrors
Clean two folding mirrors
Clean two folding mirrors
4)
When cleaning the zeroshift mirror and circular polarization mirror in

the beam folding unit, clean the two mirrors at the same time.
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Fig. 11.1 (a) Structure of diagram output coupler (C1500B, C2000B, C2000C)
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Fig. 11.1 (b) Structure of diagram rear mirror (C1500B, C2000B, C2000C)
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Fig. 11.1 (c) Structure of diagram output coupler (C3000C, C3000D, C4000A, C6000B)
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Fig. 11.1 (d) Structure of diagram rear mirror (C3000C, C3000D, C4000A, C6000B)
335
11.1.1
Cleaning and
Replacing the Output
Coupler
B70115EN/03
To clean the output coupler, follow the procedure given below. Since it
is necessary to touch the optical parts and vacuum parts while cleaning
the output coupler, wear clean gloves or finger cots. Do not touch these
parts with your bare hands.
The output coupler is fabricated using a toxic material. Be careful not to
touch the mirror with your bare hands. If you should touch it, wash your
hands thoroughly under clean running water.
Before starting cleaning, wipe away any foreign matter from around the
parts to be removed. If a removed part is inadvertently soiled, wipe it
clean with ethyl alcohol.
[Procedure]
(1) Turn off the power to the CNC, then open the main circuit breaker or
turn off the power supply of the laser oscillator.
(2) Remove the three beam cover mounting screws (M4 hexagon socket
head bolts), then remove the beam cover.
(3) When the pressure of the vacuum system of the oscillator is lower
than the atmospheric pressure, it may prove impossible to remove the
output coupler. Confirm that the oscillator is in the purge state and
loosen the yellow and orange tube joints to allow the internal pressure
of the vacuum system to equalize with the atmospheric pressure.
If a negative pressure exists in the vacuum system, the atmospheric
pressure sensor must be adjusted. (See Section 9.4.2.)
(4) Slightly loosen the mirror holder screw. Loosen the mirror holder
mounting screw (M4 hexagon socket head bolt), and remove the
mirror holder from the alignment unit.
NOTE
If the Oring is so tight that the mirror holder cannot be
removed easily, insert the three M4 hexagon socket head
bolts into the beam cover mounting screw holes, and tighten
them evenly. Then, it should be possible to remove the
mirror holder. Note that unevenly tightening the three
screws may damage the Oring. In this case, coat a small
vaccum grease (Apiezon) to the Oring of mirror holder.
(5) Remove the output mirror and Oring from the mirror holder, and
place them on lens cleaning paper. To simply replace the output
coupler at this point, go to step (12).
(6) Place the mirror with its reflecting side (the side facing the discharge
tubes) facing up. Gently blow clean air (using, for example, a camera
blower) across the mirror surface to remove dust and dirt. Drop ethyl
alcohol or lens cleaner onto the mirror surface, moisten a cotton swab
with the fluid, and gently wipe any dirty areas.
(7) Place lens cleaning paper over the mirror, then spray ethyl alcohol or
lens cleaner over the paper and mirror.
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Fig. 11.1.1 (a) Cleaning mirror 1
Fig. 11.1.1 (b) Cleaning mirror 2
Fig. 11.1.1 (c) Cleaning mirror 3
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Fig. 11.1.1 (d) Schematic diagram of mounting of output coupler/

rear mirror to the holder
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(8) Move the lens cleaning paper horizontally to and fro across the
mirror.
NOTE
Since the lens cleaner has a high surface tension, it may be
difficult to move the cleaning paper. As the paper is slowly
moved to and fro across the mirror, however, the ethyl
alcohol will gradually evaporate.
(9) Blow clean air (using, for example, a camera blower) across the
mirror surface to completely evaporate the ethyl alcohol or lens
cleaner.
(10) Repeat steps (7) to (9) until all dirt on the mirror surface has been
removed. Finally, clean the mirror surface with ethyl alcohol.
(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if an
excessive amount of ethyl alcohol or lens cleaner is applied, it may
flow around the back of the mirror, leading to contamination.
(12) Wipe the mirror holder and Oring with ethyl alcohol.
(13) Reinstall the output coupler in the mirror holder, then insert the
Oring. When installing the output mirror, pay particular attention
to the mirror orientation. The reflecting plane (the plane indicated
by the arrow on the side of the mirror) must face the discharge tubes.
The arrow is both scribed and marked with ink such that, even if the
ink is entirely removed, it will still be possible to find the scribed
arrow. Align the arrow on the side of the output mirror with the
mirror holder position.
(14) Mount the mirror by reversing steps (2) to (4). Install the mirror
holder in the alignment unit so that the mark on the mirror holder
faces down.
Tighten the mirror holder screw manually, then further tighten the
screw through approximately 30 degrees using a jig. If an
appropriate jig is not available, use the key for the cabinet of the
oscillator instead.
(15) Close the main circuit breaker or turn on the power supply of the laser
oscillator, then turn on the power to the CNC.
(16) Perform a leak check. If the Setting value of the DGN905 (FS16L,
16iL) or DGN860 (0L) is 100 or less, tighten the mirror holder
screw again. In this case, loosen the mirror holder screw first, tighten
the screw manually, then tighten the screw through approximately 30
degrees, using the jig.
(17) This completes cleaning and replacement.
(18) Perform discharge aging.
(19) Then, perform alignment.
NOTE
Never attempt to adjust any part other than the output
coupler.
339
11.1.2
Cleaning and
Replacing the Rear
Mirror
B70115EN/03
To clean the rear mirror, follow the procedure given below. Since it is
necessary to touch optical parts and vacuum parts while cleaning the rear
mirror, wear clean gloves or finger cots. Do not touch these parts directly
with your bare hands.
[Procedure]
(2) Remove the power sensor mounting screw, then remove the power
sensor.
(3) When the pressure of the vacuum system of the oscillator is lower
than the atmospheric pressure, it may prove impossible to remove the
rear mirror. Confirm that the oscillator is in the purge state and loosen
the yellow and orange tube joints to allow the internal pressure of the
vacuum system to equalize with the atmospheric pressure.
If a negative pressure exists in the vacuum system, the atmospheric
pressure sensor must be adjusted. (See Section 9.4.2.)
(4) Slightly loosen the mirror holder screw. Loosen the mirror holder
mounting screw (M4 hexagon socket head bolt), and remove the
mirror holder from the alignment unit.
NOTE
If the Oring is so tight that the mirror holder cannot be
removed easily, insert the three M4 bolts into the beam
cover mounting screw holes, and tighten them evenly.
Then, it should be possible to remove the mirror holder.
Note that unevenly tightening the three screws may
damage the Oring. In this case, coat a small vaccum
grease (Apiezon) to the Oring of mirror holder.
(5) Remove the rear mirror and Oring from the mirror holder, and place
them on lens cleaning paper. To simply replace the rear mirror at this
point, go to step (12).
(6) Place the mirror with its reflecting side (the side facing the discharge
tubes) facing up. Gently blow clean air (using, for example, a camera
blower) across the mirror surface to remove dust and dirt. Drop ethyl
alcohol or lens cleaner onto the mirror surface, moisten a cotton swab
with the fluid, and gently wipe any dirty areas.
mirror.
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B70115EN/03
NOTE
moved to and fro across the mirror, however, the ethyl
alcohol will gradually evaporate.
cleaner.
removed. Finally, clean the mirror surface with ethyl alcohol.
(11) Check the transmitting side of the mirror. If its surface is dirty,
perform steps (6) to (9) for the transmitting side also. Note that if an
excessive amount of ethyl alcohol or lens cleaner is applied, it may
flow around the back of the mirror, leading to contamination.
(12) Wipe the mirror holder and Oring with ethyl alcohol.
(13) Reinstall the rear mirror in the mirror holder, then insert the Oring.
When installing the rear mirror, pay particular attention to the mirror
orientation. The reflecting plane (the plane pointed to by the arrow
marked on the side of the mirror) must face the discharge tubes. The
arrow is both scribed and marked with ink such that, even if the ink
is entirely removed it will still be possible to find the scribed arrow.
Align the arrow on the side of the rear mirror with the mirror holder
position.
(14) Mount the mirror holder by reversing steps (2) to (4). Install the
mirror holder in the alignment unit so that the mark on the mirror
holder faces down.
Tighten the mirror holder screw manually, then further tighten the
screw through approximately 30 degrees using a jig. If an
appropriate jig is not available, use the key for the cabinet of the
oscillator instead.
(16) Perform a leak check. If the Setting value of the DGN905 (FS16L,
16iL) or DGN860 (0L) is 100 or less, tighten the mirror holder
screw again. In this case, loosen the mirror holder screw first, tighten
the screw manually, then tighten the screw through approximately 30
degrees, using the jig.
NOTE
Never attempt to adjust any part other than the rear mirror.
(20) After the rear mirror has been replaced, it must be calibrated. See the
section covering the setting of the power input compensation
coefficients.
341
11.1.3
Cleaning and
Replacing the Folding
Mirrors
B70115EN/03
To clean the folding mirrors, follow the procedure given below. Since it
is necessary to touch the optical parts and vacuum parts while cleaning
the folding mirrors, wear clean gloves or finger cots. Do not touch these
parts with your bare hands.
[Procedure]
(2) Loosen the mirror holder mounting screw, and remove the mirror
holder from the folding mirror unit. To simply replace the folding
mirror at this point, go to step (11).
(3) The folding mirror is attached to its holder using vacuum grease. It
is, therefore, very difficult to remove the mirror from its holder.
Therefore, clean the folding mirror without removing it from its
holder.
(4) Place the mirror with its reflecting side facing up. Gently blow clean
air (using, for example, a camera blower) across the mirror surface
to remove dust and dirt. Drop ethyl alcohol or lens cleaner onto the
mirror surface, moisten a cotton swab with the fluid, and gently wipe
any dirty areas.
mirror.
moved to and fro across the mirror, however, the ethyl alcohol
will gradually evaporate.
cleaner.
removed.
(9) By using a cotton swab moistened with ethyl alcohol, clean that part
of the alignment unit which touches the mirror. This is because flakes
of coating may remain in this area. If the flakes of coating are not
removed, they may cause the mirror to become misaligned.
(10) Install the mirror holder by reversing steps (2) to (3). Insert the holder
perpendicular to the alignment unit, so that the mirrors touch the
alignment unit evenly. When tightening the fixing screws, tighten
them evenly in a crisscross sequence.
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(11) When replacing a mirror, remove the mirror from its holder. Since
vacuum grease is applied to the rear of the mirror, insert a tool such
as a standard screwdriver into the slot on the side plane of the mirror
mounting section, and pry out the mirror. Be careful not to apply
excessive force to the mirror holder.
(12) Apply a thin coat of vacuum grease to the rear of the new mirror. In
those cases where the reflecting side of the mirror faces down, the
mirror will fall unless grease is applied.
(13) Place the mirror in its holder and, using a dryer, blow warm air onto
the holder to warm it. This will soften the vacuum grease and bond
the mirror onto the holder. Mount the mirror holder as explained in
step (10).
(14) Turn on the main circuit breaker of the laser oscillator, then turn on
the power to the CNC.
(15) Perform a leak check.
NOTE
Never adjust any part other than the cleaned or replaced
folding mirrors.
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FOLDING MIRROR UNIT

FOLDING MIRROR
ORING (G55)
MIRROR HOLDER
MIRROR HOLDER ATTACHMENT SCREW
Fig. 11.1.3 (a) Structure diagram of folding mirror unit
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FOLDING MIRROR UNIT

FOLDING MIRROR
ORING (G65)
MIRROR HOLDER
MIRROR HOLDER ATTACHMENT SCREW
Fig. 11.1.3 (b) Structure diagram of folding mirror unit: C6000B
11.1.4
Cleaning and
Replacing the
Zeroshift Mirror and
Circular Polarization
Mirror
The zeroshift mirror and circular polarization mirror are used in the
optical path length unit, installed in those oscillators of short optical path
type, and in the C3000C of long optical path type.
C1500B, C2000B, C2000C : Two zeroshift mirrors
C3000C, C3000D, C4000A : One zeroshift mirror and one circular
polarization mirror
The C3000C can output a circularlypolarized beam even when the
zeroshift mirror is installed in place of the circular polarization mirror,
and vice versa. However, the circular polarization mirror should be set
in the first mirror position which is less susceptible to the buildup of dust
and dirt.
To clean the zeroshift and circular polarization mirrors, follow the
procedure given below. Since it is necessary to touch the optical parts
while cleaning the mirrors, wear clean gloves or finger cots. Do not touch
these parts with your bare hands.
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[Procedure]
(2) Remove the mirror holder from the block (alignment unit) by
loosening the mirror holder mounting screw.
(3) Remove the mirror from its holder, and place the mirror on lens
cleaning paper. Be careful not to drop the mirror; although grease is
applied to the rear of the mirror, it is not physically attached to the
holder.
(4) Place the mirror with its reflecting side facing up. Blow clean air
(using, for example, a camera blower) across the mirror surface to
remove dust and dirt. Drop ethyl alcohol or lens cleaner onto the
mirror surface, moisten a cotton swab with the fluid, and gently wipe
the cotton swab over the mirror surface. Wipe the mirror dry with
lens cleaning paper. Do not try to remove dust by rubbing
vigorously; doing so is likely to damage the mirror.
mirror.
(7) Blow clean dry air across the mirror surface to completely evaporate
the ethyl alcohol or lens cleaner.
removed.
(9) Using a cotton swab moistened with ethyl alcohol, clean that part of
the alignment unit which touches the mirror. This is because flakes
of coating may remain in this area.
(10) After the completion of cleaning, reinstall the zeroshift mirror in its
holder, then install the mirror and holder. Slide the mirror into its
holder, bonding the mirror to the holder with vacuum grease.
(11) To replace a mirror with a new one, apply a thin coat of vacuum
grease to the rear of the new mirror, and install it in the holder.
(13) Start the laser oscillator. Check the position of the output beam. This
check completes cleaning and replacement.
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11.2
OPTICAL AXIS
ADJUSTMENT
11.2.1
Alignment of the
Resonator (Maximum
Power Method)
The internal surfaces of the output mirror and rear mirror are concave. For
laser oscillation, the curvature centers and mirror surfaces of the two
mirrors must lie on the same axis. When this axis matches the tube axis
of the discharge tubes, in other words, when the laser beam reflected by
these mirrors passes through the center of the discharge tubes, the output
level is maximized, and symmetric beam mode and a round section are
obtained.
The theory of alignment is such that while monitoring the output power
level with a tester, you adjust the angle of each mirror to obtain a
maximum output power. Once this adjustment is made, all mirrors are set
for maximum output. So, if a mirror is misaligned, the original state or
original beam mode can be restored by adjusting the misaligned mirror
only to maximize the output power. Thus, with this method, mode
adjustment is simple, and can be performed with a good reproducibility.
Section 11.2.1.1 describes the procedure for adjusting all mirrors of an
oscillator not adjusted with this method, to obtain the maximum output
state. This procedure takes a rather longer time. However, once this
adjustment is made, adjustment work required at the time of mirror
cleaning can be remarkably reduced.
Section 11.2.1.2 describes the maximum output state adjustment
procedure required to correct an optical path shift caused by a resonator
distortion during transmission or installation.
Section 11.2.1.3 describes the adjustment procedure at the time of mirror
cleaning for an oscillator adjusted to the maximum output state according
to Section 11.2.1.1 or Section 11.2.1.2.
Section 11.2.1.4 describes the method of obtaining a maximum power.
Section 11.2.1.5 describes burn pattern collection and beam mode
evaluation.
11.2.1.1
Method of obtaining a
maximum power by
adjusting all mirrors
(1) Record the adjustment screw readings of the output mirror (O.C.), rear
mirror (R.M.), and folding mirrors (F.M.).
(2) Collect a burn pattern, and use it as the start state for mode adjustment.
Near (3 m): Hot mode and cold mode
Far:
Hot mode and cold mode
(3) C3000C, C3000D, C6000B
1) Obtain a maximum power based on the output mirror (O.C.) by
using the rear mirror (R.M.) as the reference.
2) Obtain a maximum power based on the folding mirror (FM1) by
using the output mirror (O.C.) as the reference.
using the rear mirror (R.M.) as the reference.
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using the folding mirror (FM4) as the reference.
5) Collect a burn pattern. If the mode is good, end this procedure. If
not, start all over again from step 1). At this time, collect a burn
pattern in each step. If the mode is finally good, end this procedure.
FM4
R.M.
FM3
FM2
Beam
FM1
O.C.
Fig. 11.2.1.1 (a) Mirror locations of C3000C, C3000D, and C6000B
(4) C1500B, C2000B, and C2000C

1) Obtain a maximum power based on O.C. by using the R.M. as the
reference.
2) Obtain a maximum power based on FM1 by using the O.C. as the
reference.
3) Obtain a maximum power based on FM1 by using the R.M. as the
reference.
R.M.
FM3
FM2
Beam
FM1
O.C.
Fig. 11.2.1.1 (b) Mirror locations of C1500B, C2000B, and C2000C
(5) C4000A
1) Obtain a maximum power based on O.C. by using the R.M. as the
reference.
2) Obtain a maximum power based on O.C. and R.M. by using FM4
as the reference.
3) Obtain a maximum power based on FM2 by using the O.C. as the
reference.
4) Obtain a maximum power based on FM6 by using the R.M. as the
reference.
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FM4
R.M.
FM3
Beam
O.C.
FM5
FM2
FM6
FM1
Fig. 11.2.1.1 (c) Mirror locations of C4000A
11.2.1.2
Alignment procedure
during installation after
transportation
(2) Collect a burn pattern, and use it as the start state for mode adjustment.
If the mode is good, end the adjustment.
Far:
(3) C3000C, C3000D, C6000B
1) Obtain a maximum power based on FM1.
3) Obtain a maximum power based on FM1 by using FM4 as the
reference.
4) Obtain a maximum power based on FM1 by using O.C. as the
reference.
5) Obtain a maximum power based on FM4 by using R.M. as the
reference.
not, proceed to step 7).
7) Obtain a maximum power based on O.C. by using R.M. as the
reference. Then, repeat this procedure starting with step 3). At this
time, collect a burn pattern in each step. If the mode is finally good,
end this procedure.
(4) C1500B, C2000B, C2000C
reference.
reference.
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end this procedure.
(5) C4000A
2) Obtain a maximum power based on O.C. and R.M. by using FM4
as the reference.
reference.
reference.
end this procedure.
11.2.1.3
Alignment procedure at
mirror cleaning time
(2) Collect a burn pattern. This is used for checking mirror dirt. If the
mode is good, end the adjustment.
Far:
(3) C3000C, C3000D, C6000B
1) Clean the O.C. and R.M. mirrors.
reference.
3) Clean the FM1 and FM2 mirrors.
(4) C1500B, C2000B, C2000C
reference.
3) Clean the FM1, FM2 and FM3 mirrors.
(5) C4000A
reference.
5) Clean the FM1, FM2, FM5, and FM6 mirrors.
6) Obtain a maximum power based on FM2 and FM6.
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11.2.1.4
Obtaining a maximum
power
(1) Minimize the output power of internal discharge. If a large output is

used, the mode present when a maximum power is obtained is not
always the best mode due to thermal distortion of each mirror.
However, a capability of detecting an output variation due to base
output fluctuation, tester resolution, chiller temperature, and so forth
is required, so that an output power of about 1,000 W is adequate.
(2) Use a discharge area of 100% in the discharge tube. If the area is
narrow, the output variation dependent on a shift of the internal optical
axis becomes small. So, with the C3000C and C3000D, use the base
conditions Pc = 3,000 W, Duty cycle = 30%, and Frequency = 100 Hz,
and adjust the duty cycle to determine the actual conditions for internal
discharge. With the C6000B, the conditions will be Pc = 6,000 W and
Duty cycle = about 15%.
(3) Start discharge, and obtain a maximum power when the output is
stabilized after 5 minutes.
(4) Using mirrors A and B, and obtaining a maximum power based on
mirror B by using mirror A as the reference
While turning mirror A in one direction in steps of an interval of the
adjustment screw, for example, 0.5 division (5 m) or 1 division (10
m), adjust mirror B for each division, and obtain a maximum power
at each point of mirror A. From data obtained at each point of mirror
A, determine a mirror A position representing a maximum power.
Then, by aligning mirror A at such a position, adjust mirror B to obtain
a maximum power. Two adjustment screws are provided for each
mirror. So, be sure to obtain a maximum power with one axis, then
obtain a maximum power with the other axis. Never move the X and
Y axes at the same time. The method of adjusting a folding mirror
depends on the model. See the description below.
(a) C1500B, C2000B, C2000C
For each of the X and Y axes of the folding mirror (FM), an
independent adjustment screw is not provided. So, to make
adjustments in the X and Y directions, obtain a maximum power
by using two adjustment screws M and N.
(b) C3000C, C3000D, C6000B
For each of the X and Y axes of the folding mirror (FM), an
independent adjustment screw is provided. So, obtain a maximum
power by using an adjustment screw available for each axis. For
example, when obtaining a maximum power with an output mirror
and folding mirror, make an Xaxis adjustment by using (M) of the
folding mirror and (m) of the output mirror, then make a Yaxis
adjustment by using (B) and (b).
(5) Method of output power measurement
An output power can be viewed by connecting a tester to the relay
PCB. A voltage signal proportional to a power is output. See Section
8.2.
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11.2.1.5
(1) For information about burn pattern collection, see Section 4.3(1).
Burn pattern collection

and beam mode
evaluation
(2) In the automatic operation mode, execute the program below to emit
a laser beam to an acrylic block.
[Example of program: For the C1500B]
G32 P1 Q1;
G24 S1500 Q100 R4.0;
G32 P0;
M30;
In the program above, S represents an output (W), R represents a time
(seconds). Depending on the oscillator, rewrite the program. Be sure
to enter a decimal point when specifying R.
(3) For determination of whether a beam mode is good, see Section 4.3(1).
15
Initial setting of A = 7.590
10
5
Power
B is adjusted to obtain a maximum power.
Clockwise
5
Same state as 1
A maximum power is obtained based on B.

A=7.580
A=7.570
A=7.590
B is adjusted to obtain a maximum power.
Power
Counterclockwise
10
A=7.590
A maximum power is obtained based on B.

A=7.580
A=7.610
A=7.620
A=7.630
A=7.640
NOTE
In 3, the power is decreased, indicating that the direction is wrong. So, in 5, the adjustment
screw is returned to the original position.
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Do not determine the maximum power position of A at the actual

maximum power point (peak point). Instead, find the first position 1
with the same power after a peak, and set a position halfway between
1 and 1. Adjust B to obtain a maximum power at that position.
Maximum power position of A
= (7.590+7.638)/2
= 7.614
Power
10
A=7.590
353
A=7.614
A=7.638
A=7.650
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BEAM PATH (SHORT PATH TIME)

ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ALIGNMENT (N: Y AXIS)
REAR MIRROR SIDE (R.M.)
OUTPUT COUPLER SIDE (O.C.)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ALIGNMENT (M: X AXIS)
ADJUSTMENT SCREW
FOLDING MIRROR SIDE (FM1)
OF ALIGNMENT (M)
ADJUSTMENT SCREW
OF ALIGNMENT (N)
Fig. 11.2.1.5 (a) Adjustment place of alignment (C1500B, C2000B)
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ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF

ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW
OF ALIGNMENT (M)
ADJUSTMENT SCREW
OF ALIGNMENT (N)
Fig. 11.2.1.5 (b) Adjustment place of alignment (C2000C)
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ADJUSTMENT SCREW OF
ALIGNMENT (n: Y AXIS)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ALIGNMENT (m: X AXIS)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
Fig. 11.2.1.5 (c) Adjustment place of alignment (C3000C)
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ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF

ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
Fig. 11.2.1.5 (d) Adjustment place of alignment (C3000D)
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ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
REAR MIRROR
SIDE (R.M.)
ADJUSTMENT SCREW OF
OUTPUT COUPLER
SIDE (O.C.)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF

FOLDING MIRROR
SIDE (FM5)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
FOLDING MIRROR
SIDE (FM2)
Fig. 11.2.1.5 (e) Adjustment place of alignment (C4000A)
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ADJUSTMENT SCREW OF
OUTPUT COUPLER
SIDE (O.C.)
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
ADJUSTMENT SCREW OF
Fig. 11.2.1.5 (f) Adjustment place of alignment (C6000B)
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11.2.2
Alignment of the Laser
Diode
11.2.2.1
Adjusting the beam
center of the laser diode
beam superimposed on
the CO2 laser beam
11.2.2.2
Adjusting the diameter
of the laser diode beam
(1) Attach an acrylic plate approximately 3 to 10 m from the outlet of the

laser oscillator, and obtain a burn pattern for the CO2 laser beam (one
shot, rated output, CW 100%, 0.1second duration). Do not attempt
to touch the plate immediately after the pattern has been obtained.
(2) By turning the X and Yaxis adjustment screws, align the
semiconductor laser beam with the center of the burn pattern obtained
in step (1).
When using the A04B0811D401 (laser diode unit), turn the
adjustment screws using a 2mm hexagon wrench.
(3) After completing the adjustment, tighten the X and Yaxis clamps.
(4) Compare the optical axis of the laser diode beam with the burn pattern
of the CO2 laser beam, obtained approximately 1 m from the laser
oscillator outlet. If the difference between the two beam centers is
within "2 mm, the optical axis adjustment can be regarded as being
successful.
(5) If an optical axis mismatch is detected in step (4), adjust the optical
axis of the laser diode beam by moving the plate and stage of the laser
diode unit. Then, repeat the adjustment procedure from step (2).
The diameter of the laser diode beam can be adjusted by turning the knurl
of the laser diode head. Thus, the pattern size, focal length, and so forth
can be changed.
The laser diode beam is factory set so that its pattern is circular having a
diameter of 8.5 +1.0 0 mm (at a distance of 2.6 m from the laser oscillator
outlet).
Normally no adjustment is required. If adjustment becomes necessary for
some reason, however, follow the procedure given below.
(1) Loosen the hexagonal setscrew or lock nut securing the knurl of the
semiconductor laser head.
(2) While checking the laser beam pattern, slowly turn the knurl or lens
section to obtain a required beam diameter.
(3) Secure the hexagonal setscrew or lock nut of the knurl.
(4) After completing the adjustment, check that the semiconductor laser
beam has no focus at some point on the beam propagation path to the
machining point, that is, that the laser beam does not narrow or widen.
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Fig. 11.2.2.2 Laser diode unit (A04B0811D401)
361
11.2.3
Alignment of the Beam
Folding Unit
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The oscillators of the short optical path types and the C3000C of long
optical path type contain a beam folding unit to divert the laser beam
within the oscillator. If the beam output direction changes as a result of
aligning the resonator, the beam folding unit must be adjusted.
The first mirror to reflect the laser beam from the output mirror is fixed
and not movable. The second mirror is movable.
The movable mirror holder has adjustment screws for inclining the mirror
horizontally and vertically, or adjustment screws for inclining the mirror
to the right and to the left. Never touch the fulcrum screw. This fulcrum
is used to adjust the space between the holder and support to 3 mm.
First, adjust the beam so that it does not interfere with the resonator
folding block and duct. This adjustment allows the beam to be output
from almost the center of the oscillator outlet.
Perform adjustment by following the procedure given below.
(1) Insert a target in the hole of the resonator folding block or circulating
pipe. If a target is not available, attach wires to indicate the center of
the hole.
(2) Place an acrylic plate at the oscillator outlet, and blow air across it,
using a dryer, for example.
(3) Start the oscillator to ready it for laser output.
(4) Execute a program to output a laser beam of the rated output, CW
100%, and 0.1 second duration. Then, a mark like that of the target
(crisscross) will appear on the acrylic plate.
[Sample program]
G32 P1 Q1 ;
G24 S*** Q100 R0.1 ;
G32 P0 ;
(5) While referencing the mark, turn the adjustment screws on the holder
so that the beam center is aligned with the intersection of the crisscross
mark.
(6) Repeat steps (4) and (5) until the beam center is aligned with the
crisscross mark.
Next, adjust the oscillator or bend mirror of the machine tool by
moving it so that the beam strikes the center of the bend mirror. When
this adjustment has been performed at installation, it subsequently
need not be performed.
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Fig. 11.2.3 (a) Corner reflectors unit (C1500B, C2000B, C2000C)
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Fig. 11.2.3 (b) Corner reflectors unit (C3000C, C3000D, C4000A, Short optical path length type)
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Fig. 11.2.3 (c) Corner reflectors unit (C3000C, Long optical path length type)
365
APPENDIX
APPENDIX
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EXTERNAL VIEW
369
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (a) C1500B (short optical path length type)
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APPENDIX
Fig. A (b) C1500B (long optical path length type)
371
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (c) C2000B (short optical path length type)
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APPENDIX
Fig. A (d) C2000B (long optical path length type)
373
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (e) C2000C (short optical path length type)
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APPENDIX
Fig. A (f) C2000C (long optical path length type)
375
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (g) C3000C (short optical path length type, resonator section)
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APPENDIX
Fig. A (h) C3000C (Long optical path A type)
377
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (i) C3000C (Long optical path B type)
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APPENDIX
Fig. A (j) C3000C (auxiliary equipment section)
379
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (k) C3000D (short optical path length type)
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APPENDIX
Fig. A (l) C3000D (long optical path B type)
381
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (m) C4000A (short optical path length type)
382
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APPENDIX
Fig. A (n) C4000A (long optical path B type)
383
A. EXTERNAL VIEW
A. EXTERNAL VIEW
APPENDIX
Fig. A (o) C6000B
384
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APPENDIX
B. FANUC LASER C SERIES

SPECIFICATIONS
FANUC LASER C SERIES SPECIFICATIONS
385

SPECIFICATIONS
APPENDIX
C1500B
(short
optical path)
Item
Type
C1500B
(long
optical path)
B70115EN/03
C2000B
(short
optical path)
C1500B
Method
C2000B
(long
optical path)
C2000C
(short
optical path)
C2000B
C2000C
(long
optical path)
C2000C
Highspeed axial carbon dioxide gas laser using highfrequency discharge excitation
Structure
Combination resonator/power supply type
Rated laser output
1500W
Maximum laser output
1500W
2000W (continuously
variable output range
of 50 W or greater)
2000W (continuously
variable output range
of 100 W or greater)
3300W (for 500 Hz

or less and a duty
cycle of 50% or less)
2700W (for 500 Hz

or less and a duty
cycle of 50% or less)
Pulse peak value
2000W
"1% (for 8hour rated output under output feedback control)
Output stability
10.6 m m
Laser wavelength
Beam mode
Loworder mode
Beam diameter
(at oscillator outlet)
Approximately
24 mm
Approximately
20 mm
Polarization
Approximately
27 mm
Circular polarization
5 to 2000 Hz
Pulse output command duty

cycle
0 to 100%
Composition
CO2:He:N2 = 5:40:55
(volume ratio with N2 balance) with a composition ratio accuracy of "5%
Gas pressure
0.175MPa (0.15 to 0.20MPa) measured with a gauge
Consumption
10 /h
Flow rate
50 /min
Temperature
stability
Power requirements
Required input power
Max. current
75 /min
20 C to 30C/"1 C (for laser output stability of "1%)
Circulating
water pressure
Recommended
cooling capacity
0.5MPa or less measured with a gauge

15.7kW or higher
22.1kW or higher
200 VAC +10%/15%, 50/60 Hz "1 Hz or 220 VAC +10%/15%, 60 Hz "1 Hz

23KVA
33KVA
70 A
90 A
Interlock
Hour meter
No
Total number of hours exhaust pump has been operating
Electric shutter
Mass
Approximately
23 mm
2 mrad
Pulse output command

frequency
Cooling
water
Approximately
27 mm
45 linear polarization
Angle of beam divergence

(full angle)
Laser gas
Approximately
23 mm
Provided
Approximately 700 kg
386

SPECIFICATIONS
APPENDIX
B70115EN/03
C3000C
(short optical path)
Item
Type
C3000C
(long optical path)
C3000C
Method
C3000D
Oscillator and auxiliary sections

separated from each other
Rated laser output

3000W
3000W (continuously variable output range of 100 W or greater)
Pulse peak value

Output stability
3800W (for 500 Hz or less and a

duty cycle of 50% or less)
3300W

10.6 m m
Laser wavelength
Beam mode
Loworder mode
Beam diameter
Approximately
27 mm
Approximately
24 mm
Polarization
Approximately
27 mm
Approximately
24 mm

(full angle)
2 mrad

frequency
5 to 2000 Hz

cycle
0 to 100%
Composition
CO2:He:N2 = 5:40:55
Gas pressure
Consumption
20 /h
10 /h
120 /min
Flow rate
Cooling
water
C3000D
(long optical path)
Structure
Laser gas
C3000D
Temperature
stability
20 C to 30C/"2 C (for laser output stability of "2%)
Circulating
water pressure
Recommended
cooling capacity
33.7kW or higher
Power requirements
44KVA
Max. current
130 A
Interlock
Hour meter
No
Electric shutter
Mass
Provided
Approximately 900 kg (oscillator section)
(auxiliary equipment section)
387

SPECIFICATIONS
APPENDIX
C4000A
Item
B70115EN/03
C4000A
(long optical path)
Type
C6000B
C4000A
Method
C6000B
Structure
Rated laser output
4000W
6000W
4000W
6000W
Pulse peak value

Output stability
5000W (for a pulse width of 0.3 ms or more)

10.6 m m
Laser wavelength
Beam mode
Loworder mode
Beam diameter
Polarization
Approximately
27 mm or less
Approximately
24 mm or less
Approximately 28 mm

(full angle)
2 mrad

frequency
5 to 2000 Hz

cycle
Laser gas
Composition
CO2:He:N2 = 5:40:55
Gas pressure
Consumption
Flow rate
Temperature
stability
Cooling
water
0 to 100%
Circulating
water pressure
Recommended
cooling capacity
Power requirements
10 /h
40 /h
160 /min
250 /min
20 C to 30C/"1C (for laser output stability of "2%)
20 C to 30C/"2 C
(for laser output stability of
"2%)

41.9kW or higher
67.4kW or higher
55KVA
90KVA
Max. current
175 A
260 A
Interlock
Hour meter
No
Electric shutter
Mass
Provided
388
C. ERROR CODE LIST
APPENDIX
B70115EN/03
ERROR CODE LIST
No.
Contents
Alarm level
16L
0L
4061
661
Anomaly in AD converter 1
ALARM 1
4062
662
Anomaly in AD converter 2
ALARM 1
4063
663
Anomaly in RF/DC power unit
ALARM 2
4065
665
Anomaly in shutter action
ALARM 2
4066
666
There exists discharge tube without

discharge
ALARM 2
4067
667
Overheat in laser oscillator
ALARM 1
4068
668
Reflected laser beam back into oscillator
4069
669
Anomaly in power unit voltage of IF

PCB
ALARM 1
4070
670
Anomaly in chiller unit
ALARM 1
4071
671
Anomaly in assist gas unit
Shutter : close
Beam : off
in LSTR
4072
672
Shortage of cooling water
ALARM 1
4073
673
Decrease of laser gas supply pressure
ALARM 1
4074
674
Overheat in Roots blower
ALARM 1
4075
675
Condensation
ALARM 1
4076
676
Decrease of laser output
ALARM 1
4077
677
Overheat in beam absorber
ALARM 1
4078
678
Anomaly in discharge tube gas pressure control unit
ALARM 1
4079
679
Emergency button pressed
ALARM 1
4080
680
Anomaly in exhaust pump/Leakage in

gas flow system
ALARM 1
4081
681
Anomaly in gas pressure control
ALARM 1
4082
682
Anomaly in pressure sensor
ALARM 1
4083
683
Shutter not open (in beam on state)
684
Anomalous selection of discharge tube
389
Shutter : close
Beam : off
in LSTR
Shutter : close
Beam : off
in LSTR
ALARM 2
C. ERROR CODE LIST
APPENDIX
B70115EN/03
No.
Contents
Alarm level
16L
0L
4085
685
Decrease of laser output
Warning can be
reset
4087
687
Overheat in shutter mirror
ALARM 2
4088
688
Decrease of discharge tube voltage
ALARM 1
4089
689
Selection signal of assist gas not commanded (in beam on state)
4090
690
Not in the state of oscillation (in beam

on state)
4091
691
Anomaly in inverter
ALARM 1
4094
Vacuum pump operation abnormal
ALARM 1
4099
695
Insufficient gas pressure
ALARM 1
4100
Inverter abnormal 1
ALARM 1
4101
Inverter frequency reached signal abnormal 1
ALARM 1
4103
Turbo blower not at stop 1
ALARM 1
4105
Turbo blower abnormal temperature 1
ALARM 1
4106
620
Turbo blower oil low
ALARM 1
4107
621
External folding mirror not installed
ALARM 2
4132
622
Parameter is changed
ALARM 2
Shutter : close
Beam : off
in LSTR
PURGE : Completion state
RESET
alarm?
Yes
No
RUN ON
START
LRDY : Discharge ready state

ALARM 1
RESET
MONITOR
/TREAT
alarm?
Yes
No
ALARM 2
HV. ON
MONITOR
/TREAT
START
LSTR : Discharge ready state
Alarm treatment of FANUC LASER C series
390
D. PARAMETERS
APPENDIX
B70115EN/03
PARAMETERS
This appendix describes the parameters related to sequence control inside

the laser oscillator and laser cutting conditions for FS16L, FS16iL, and
FS0L.
Many parameters are specific to one type of laser oscillator and one
machine. So, the user should always refer to the parameter data sheet
delivered with the machine when checking or modifying settings.
A number from 15000 to 15999 indicates that the parameter is for Series
16L, and a number from 0200 to 0299 and from 3900 to 3999 indicates
that the parameter is for Series 0L.
PRM No.
(Series 16L)
Item
[Oscillator]
[machinig] Enabling/Disabling Various

Functions
15000
or later
15025
or later
[machinig] Contouring Conditions
15040
or later
[machinig] Edge Machining Conditions
15050
or later
[machinig] Piercing Conditions
15070
or later
[machinig] HighSpeed Piercing

Conditions
15080
or later
[machinig] Power Control
15092
or later
[machinig] Assist Gas Pressure And

Time Setting
15100
or later
[Oscillator]
Discharge Tube Selection
[Oscillator]
Laser Maintenance Timing

Indication Functions
15150
or later
[Oscillator]
Oscillator Control
15200
or later
[Oscillator]
Discharge
15220
or later
[Oscillator]
Gas Pressure Control (1)
15240
or later
[Oscillator]
[machinig] Highly Reflective Material

Alarm
15265
or later
[Oscillator]
Laser Power/Voltage Drop
15270
or later
[Oscillator]
Power Table Setting
15280
or later
Automatic Aging Function
[Oscillator]
15320
or later
[machinig] Tracing (Detection)
15500
or later
[machinig] Constant Optical Path

Length Control
15700
or later
[Oscillator]
Laser Gas Mixing Function
15710
or later
[Oscillator]
Gas Pressure Control
15800
or later
NOTE
16L, 16iL
(15000 to 15999)
Parameter description
0L
(0200 to 0299,
3900 to 3999)
391
D. PARAMETERS
APPENDIX
D.1
B70115EN/03
Parameter numbers starting from 15000 are used for the FS16L or
FS16iL. Those starting from 0200 or 3900 are used for the FS0L.
PARAMETERS FOR
ENABLING/
DISABLING VARIOUS
FUNCTIONS
No.
Parameter description
15000
#7
#6
#5
FLT
#4
CLB
#3
BMO
#2
AGA
#1
LGC
#0
LPC
0200
FLT
CLB
BMO
AGA
LGC
LPC
FLT 1 : filter in power control valid (standard)

0 : Invalid
This function is enabled when the power control function (bit 0 of PRM
No. 15000 [200]) is enabled. A specified feedrate is used as a feedrate for
power control, but the actual feedrate of the machine in
acceleration/deceleration is generally lower than the specified value.
With larger machines, the difference between the specified feedrate and
actual feedrate is larger, so power control using a specified feedrate may
be degraded. This function is provided to bring the specified feedrate
closer to the actual feedrate by approximating the transfer function of the
machine to the primary system. When this bit is set to 1, the primary delay
filter is activated.
CLB 1 : Power calibration enabled (standard)
0 : Power calibration disabled
When this bit is set to 1, power calibration, which measures the variation
of oscillator power characteristics, is performed for the time (3 minutes
usually) set in PRM No. 15205 [3991] after turning on HV. The actual
power immediately before the termination of power calibration is
compared with the specified power value, then the required calibration is
automatically set in PRM No. 15204 [241]. When this bit is set to 0,
power calibration is not performed. In this case, 1024 is automatically set
in PRM No. 15204 [241].
BMO 1 : Beam on only with beam off in manual mode valid (for maintenance)
0 : Invalid (usually)
When output is commanded usually, beam comes out with shutter
opened. When this bit is set as 1, beam is obtained internally with shutter
closed in manual mode
AGA 1 : Assist gas preparation check with beam on invalid (for maintenance)
0 : Valid (usually)
When assist gas is not prepared, commanding beam output leads to alarm
No. 683 usually. However, if this bit is set as 1, beam output can be
obtained without preparation of assist gas.
392
D. PARAMETERS
APPENDIX
B70115EN/03
LGC 1 : Two stage gain selection of intratube

Pressure control valid (usually)
0 : Invalid
(When this bit is 1, PRM No. 15245 [207] becomes valid.)
When this bit is 1, different control gains are used in the pressure control
in discharge start preparation completion state (LRDY) and in oscillate or
preparation completion state (LSTR) in controlling pressure of gas flow
system
LPC 1 : Power control valid
0 : Invalid
This is the function by which laser output is controlled by changing duty
in accordance with the acceleration and deceleration of work table/nozzle.
Set according to the instruction of machine builder.
15001
#7
#6
LHC
3978
LHC
#7
3981
#6
NGC
#5
#4
PC8
#3
NGC
PC8
#5
#4
#2
PES
#1
GOB
PES
#3
#2
#0
EXA
EXA
#1
#0
EXA 1 : Selects up to 7 types of assist gas.

0 : Selects up to 3 types of assist gas (standard).
This parameter allows the user to select up to seven types of assist gas or
up to three types of assist gas. When this bit is set to 0, the assist gas select
signals (AG1, AG2, and AG3) correspond to the commands on a
onetoone basis. When this bit is set to 1, the assist gas select signals are
coded before output.
GOB 1 : Outputs a beam when G00 is specified.
0 : Does not output when G00 is specified.
PES 1 : Ignores piercing time in MLK or DRN.
0 : Does not ignore piercing time in MLK or DRN (standard).
When a program is checked in the machine lock or dry run mode, piercing
time (G24) can be ignored.
NGC 1 : Presets an integral gas pressure control value.
0 : Does not preset an integral gas pressure control value.
PC8 1 : Enables steplike power calibration: C6000A
0 : Disables steplike power calibration. (as usual)
LHC 1 : Controls the oscillator with external signals.
0 : Does not control the oscillator with external signals (standard).
In the automatic operation mode, external signals can be used to turn on
and off the shutter and beam output.
393
D. PARAMETERS
APPENDIX
#6
PSH
#5
15002
#7
3979
C10M
BMA
B70115EN/03
#4
#3
#2
PCG
#1
ADC
#0
BMA
GVW
BMA 1 : Enables beam output with the shutter closed in the automatic
operation mode (for maintenance).
0 : Disables beam output with the shutter closed in the automatic
operation mode (standard).
PCG 1 : Performs highspeed piercing even when H is not specified in a G24
block.
0 : Does not perform highspeed piercing when H is not specified in a
G24 block.
PSH 1 : Uses four of the six discharge tubes.
0 : Uses all discharge tubes.
GVW 1 : Enables evacuation when RUN is turned off (standard).
0 : Disables evacuation when RUN is turned off (for maintenance).
C10M 1 : C1500B or C2000B
0 : Other than above
ADC 1 : Identifies AD conversion2 data with a DI signal.
0 : Identifies AD conversion2 data with a select signal.
15003
#7
C60
#6
TR1
#5
TON
3980
#4
#3
IVT
BPV
#2
GVW
#1
HPT
#0
TIV
PCST
IVT
TIV 1 : Inverts the sign (+/) of the amount of tracing displacement.

0 : Does not invert the sign (+/) of the amount of tracing displacement.
HPT 1 : Does not rewrite parameter settings for extending or shortening
piercing.
0 : Rewrites parameter settings for extending or shortening piercing.
GVW 1 : Enables evacuation when RUN is turned off (standard).
0 : Disables evacuation when RUN is turned off (for maintenance).
IVT 1 : Oscillator with an inverter.
0 : Oscillator without an inverter.
TON 1 : Oscillator with a turbo blower.
0 : Oscillator without a turbo blower.
TR1 1 : Uses one turbo blower.
0 : Uses two turbo blowers.
C60 1 : Up to sixteen discharge tubes are used.
0 : Up to eight discharge tubes are used (standard).
PCST 1 : Uses the power control function.
0 : Does not use the power control function.
When this bit is set to 1, the setting of bit 0 of PRM No. 15000 [200] is
valid.
BPV 1 : Opens the bypass valve during power calibration: C1500B, C2000B,
C2000C, C3000C, C3000D, C4000A
0 : Closes the bypass valve during power calibration.
394
D. PARAMETERS
APPENDIX
B70115EN/03
15004
#7
CWY
#6
ECH
AGC 1 :
0:
STC 1 :
0:
SPB 1 :
0:
EDG 1 :
0:
ECH 1 :
0:
CWY 1 :
0:
BMC 1 :
0:
15005
#7
DLY
3981
#5
#4
EDG
#3
BMC
#2
SPB
#1
STC
#0
AGC
Controls machining pressure for the set time.

Uses a flow pattern.
Controls the shutter with an external signal.
Controls the shutter with a G code.
Outputs no beam in skip operation.
Outputs a beam in skip operation.
Does not turn the beam off when switching the assist gas during edge
machining.
Turns the beam off when switching the assist gas during edge
machining.
Clears the active E number upon reset.
Does not clear the active E number upon reset.
A CWYAG laser oscillator is used.
A CO2 laser oscillator is used.
Enables gas flow rate reduction.
Disables gas flow rate reduction.
#6
ITR
#5
#4
NGC
NCS
TTD
#3
BPV
#2
TTD
#1
NCS
#0
INB
INB 1 : Stops beam output upon completion of pulse distribution.

0 : Stops beam output upon completion of inposition check.
NCS 1 : Oscillator sequence is compatible with a turbo blower.
0 : Oscillator sequence is compatible with a Roots blower.
This parameter is valid when PRM No. 15003 bit 5 [3980 bit 5], used to
specify whether a turbo blower is used, is set to 1.
TTD 1 :
0:
BPV 1 :
0:
ITR 1 :
0:
NGC 1 :
0:
DLY 1 :
0:
Each laser power supply drives two discharge tubes.

Each laser power supply drives only one discharge tube.
Closes the bypass valve during power calibration.
Opens the bypass valve during power calibration: C1500B, C2000B,
C2000C, C3000C, 3000D, C4000A
Enables the tracing control interlock signal (G227#6 *TRIL).
Disables the tracing control interlock signal (G227#6 *TRIL).
Presets an integral gas pressure control value.
Does not preset an integral gas pressure control value.
Enables the beam output condition delay function.
Disables the beam output condition delay function.
395
D. PARAMETERS
APPENDIX
#7
#6
#5
15006
B70115EN/03
#4
PCL
#3
#2
PIN
#1
TRM
#0
TRM 1 : Disables the startpoint and endpoint soft keys for the trace setting
screen.
0 : Enables the startpoint and endpoint soft keys for the trace setting
screen.
PIN 1 : Specifies a G13 address using inch input.
0 : Specifies a G13 address using metric input.
PCL 1 : Onscreen pressure display in MPa.
0 : Onscreen pressure display in kgf/cm2.
15008
#7
RMP
#6
EGE
#5
#4
#3
SOC
#2
TAL
#1
GPC
#0
MST
MST When tracing is specified:

1 : If a reference displacement amount is specified with a plus sign, a
movement is made away from the workpiece, and if a reference
displacement amount is specified with a minus sign, a movement is
made toward the workpiece.
0 : If a reference displacement value is specified with a plus sign, a
movement is made toward the workpiece, and if a reference
displacement value is specified with a minus sign, a movement is
made away from the workpiece.
GPC 1 : Tracing control is exercised using a gap amount (distance from the
nozzle to the workpiece).
0 : Tracing control is exercised using a reference displacement amount.
TAL When TRCKM (G225#2) = 1:
1 : Both the tracing outofrange alarm and the tracing
excessivedisplacement alarm are masked.
0 : The tracing outofrange alarm only is masked.
SOC When the machining condition setting function is used:
1 : A reference displacement amount for tracing control is used as a
reference displacement amount for piercing only during piercing.
0 : A reference displacement amount for tracing control is used as a
reference displacement amount for piercing during operation other
than machining.
EGE 1 : Enables the automatic aging function.
0 : Disables the automatic aging function.
RMP 1 : With the ramping function, a travel distance measurement is made
considering an up/down step distance and specified feedrate value.
0 : With the ramping function, a travel distance measurement is made
considering an up/down step distance.
396
D. PARAMETERS
APPENDIX
B70115EN/03
15009
#7
TEM
#6
BCG
#5
BEM
#4
AFZ
#3
BS2
#2
BS1
#1
AS2
#0
AS1
This parameter is used for the laser gas mixing function to record and
monitor the operating state of the mixer. This parameter is automatically
set, so this parameter need not be set manually.
AS2,AS1 The state of tank A is indicated.
AS2 AS1 :
0
0
Tank A is being filled with gas.
0
1
Gas is being mixed in tank A.
1
0
Gas is being supplied from tank A.
1
1
A preparation is being made to fill tank A with gas.
BS2,BS1 The state of tank B is indicated.
BS2 BS1 :
0
0
Tank B is being filled with gas.
0
1
Gas is being mixed in tank B.
1
0
Gas is being supplied from tank B.
1
1
A preparation is being made to fill tank B with gas.
AFZ 1 : Does not include the Zaxis in calculation for actual feedrate display.
0 : Includes the Zaxis in calculation for actual feedrate display.
BEM 1 : Gas cylinder supply pressure is normal.
0 : Gas cylinder supply pressure has dropped.
BCG 1 : The gas cylinder is not replaced.
0 : The gas cylinder is replaced.
TEM 1 : The tank supply pressure is normal.
0 : The tank supply pressure has dropped.
#7
#6
#5
15011
#4
#3
#2
#1
#0
EDS
EDS 0 : During return distance execution in edge machining or startup

machining, the conventional cutting condition is used.
1 : During return distance execution in edge machining or startup
machining, the laser power, assist gas type, and assist gas pressure of
the piercing condition for edge machining are used.
397
D. PARAMETERS
APPENDIX
B70115EN/03
D.2
PARAMETERS FOR
DISCHARGE TUBE
SELECTION
15025
#7
PS8
#6
PS7
#5
PS6
#4
PS5
#3
PS4
#2
PS3
#1
PS2
#0
PS1
15026
#7
PS16
#6
PS15
#5
PS14
#4
PS13
#3
PS12
#2
PS11
#1
PS10
#0
PS9
PS1 16 Discharge tube selection when half of the discharge tubes are used
[How to set] Select desired discharge tubes when half of the discharge tubes integrated
in the oscillator are used. Set the bit for each discharge tube to be used
to 1, and set the other bits to 0.
[Standard setting] Refer to the parameter data sheet delivered with the machine. Set PS9 to
PS16 to 0.
15027
#7
PS8
#6
PS7
#5
PS6
#4
PS5
#3
PS4
#2
PS3
#1
PS2
#0
PS1
15028
#7
PS16
#6
PS15
#5
PS14
#4
PS13
#3
PS12
#2
PS11
#1
PS10
#0
PS9
PS1 8 Discharge tube selection when all discharge tubes are used
[How to set] Select desired discharge tubes when all discharge tubes integrated in the
oscillator are used. Set the bits for discharge tubes to be used to 1 in
ascending order of bit numbers, and set the other bits to 0.
[Standard setting] Refer to the parameter data sheet delivered with the machine. Set PS9 to
PS16 to 0.
0202
#7
PS8
#6
PS7
#5
PS6
#4
PS5
#3
PS4
#2
PS3
#1
PS2
#0
PS1
PS1 8 Discharge tube selection when four discharge tubes are used
PS1 8 :
Discharge tube selection when the number is 4.
[How to set] Among 4 and 8 tubes four tubes can be selected.
Set the bits for the tubes to use as 1, and others as 0.
[Standard setting] Refer to the parameter data sheet delivered with the machine.
0203
#7
PS8
#6
PS7
#5
PS6
#4
PS5
#3
PS4
#2
PS3
#1
PS2
#0
PS1
PS1 8 Discharge tube selection when six discharge tubes are used
PS1 8 :
Discharge tube selection when the number is 8.
[How to set] All the tubes of 8 ones are to be used. Set all the bits as 1.
398
D. PARAMETERS
APPENDIX
B70115EN/03
D.3
PARAMETERS FOR
CONTOURING
CONDITIONS
15040
LPWR
0204
LPWR
LPWR Power output setting for contour processing (cutting/welding)

(Setting data)
[Setting range] 0 to 7000
[Unit] WATT
[How to set] This parameter can be set in laser setting screen and processing program.
15041
LHZ
0205
LHZ
LHZ Pulse frequency setting for contour processing (cutting/welding)

(Setting data)
[Unit] Hz
15042
LDTY
0206
LDTY
LDTY Pulse duty ratio setting for contour processing (cutting/welding)

(Setting data)
[Unit] %
399
D. PARAMETERS
APPENDIX
B70115EN/03
D.4
PARAMETERS FOR
EDGE MACHINING
CONDITIONS
15050
EDANG
EDANG Edge detection angle

A corner is assumed to be present when the angle formed by two blocks is
smaller than the specified angle.
[Unit] deg
15051
PCPWR
PCPWR Peak piercing power value

Set a peak power value for piercing to be performed at the top of a corner.
[Unit] WATT
15052
PCPFRQ
PCPFRQ Piercing pulse frequency

Set a pulse frequency for piercing to be performed at the top of a corner.
[Unit] Hz
15053
PCPDTY
PCPDTY Piercing pulse duty ratio

Set a pulse duty ratio for piercing to be performed at the top of a corner.
[Unit] %
15054
EPCTIM
EPCTIM Piercing time

Set a piercing time used for piercing to be performed at the top of a corner.
[Unit] msec
15055
EPCAGP
EPCAGP Piercing assist gas pressure

Set an assist gas pressure for piercing to be performed at the top of a
corner.
400
D. PARAMETERS
APPENDIX
B70115EN/03

[Unit] 0.01 MPa
15056
EPCAGS
EPCAGS Type of piercing assist gas

Set a type of assist gas to be used for piercing.
15057
ERTLGH
ERTLGH Return distance

Set a return distance from the top of a corner to the next block.
[Unit] 0.001 mm
15058
ERTF
ERTF Return feedrate

Set a return feedrate to be used for movement from the top of a corner to
the next block.
[Unit] 1 mm/min
15059
ERTPWR
ERTPWR Peak return power value

Set a peak return power value to be used for movement from the top of a
corner to the next block.
[Unit] WATT
15060
ERTFRQ
ERTFRQ Return frequency

Set a return frequency to be used for movement from the top of a corner to
the next block.
[Unit] Hz
15061
ERTDTY
ERTDTY Return duty ratio

Set a return duty ratio to be applied to movement from the top of a corner
to the next block.
[Unit] %
401
D. PARAMETERS
APPENDIX
B70115EN/03
D.5
PARAMETERS FOR
PIERCING
CONDITIONS
15070
LPWRP
0227
LPWRP
LPWRP selection of laser power for piercing (Setting data)

[Unit] WATT
[How to set] This parameter can be set in laser setting screen or processing program.
15071
LHZP
0228
LHZP
LHZP Selection of pulse frequency for piercing (Setting data)

[Unit] Hz
[How to set] This parameter can be set in laser setting screen or in processing program.
15072
LDTYP
0229
LDTYP
LDTYP Selection of pulse duty for piercing (Setting data)

[Unit] %
[How to set] This parameter can be set in laser setting screen or in processing program.
15073
PEASTM
3998
PEASTM
PEASTM Piercing time (Setting data)

This parameter sets a time to be used for piercing.
[Unit] msec
[How to set] This parameter can be set using G24 in a machining program.
402
D. PARAMETERS
APPENDIX
B70115EN/03
D.6
PARAMETERS FOR
HIGHSPEED
PIERCING
CONDITIONS
15080
HPPWR
HPPWR Highspeed piercing power

[Unit] Watt
15081
HPFRQ
HPFRQ Initial highspeed piercing frequency

[Unit] Hz
15082
STFRQ
STFRQ Incremental highspeed piercing frequency

[Unit] Hz
15083
HPDTY
HPDTY Initial highspeed piercing duty ratio

[Unit] %
15084
STDTY
STDTY Incremental highspeed piercing duty ratio

[Unit] %
15085
STPTM
STPTM Highspeed piercing step time

[Unit] msec
403
D. PARAMETERS
APPENDIX
15086
B70115EN/03
STPNM
STPNM Number of highspeed piercing steps

15087
HPTIM
HPTIM
Highspeed piercing end time

[Unit] msec
404
D. PARAMETERS
APPENDIX
B70115EN/03
D.7
PARAMETERS FOR
POWER CONTROL
#7
#6
#5
#4
#3
#2
#1
15088
#0
IPC
IPC For power control mode specification (models A and B):

0 : The format for specifying S and F in the same block is used.
1 : The format for specifying G63 or entering the external signal
(G224#1) is used.
15089
#7
LP8
#6
LP7
#5
LP6
#4
LP5
#3
LP4
#2
LPZ
#1
LPY
#0
LPX
LP* 0 : Does not use the *axis for speed calculation with the power control
function.
1 : Uses the *axis for speed calculation with the power control function.
When no axis is specified, the specification of the first axis (LPX) and the
second axis (LPY) is assumed for operation.
Usually, specify those axes that are used for interpolation. Do not specify
axes such as a PMC axis and synchronous axis for simple synchronous
control.
15090
Minimum output power
[Unit] W
15091
Minimum pulse frequency
[Unit] Hz
15092
LDTYLW
0245
LDTYLW
LDTYLW Duty lower limit (Setting data)

When PRM No. 15000 [200]/bit 0 is valid, power control is performed by
this value.
If the duty cycle is reduced according to the feedrate, the specification of a
value less than this value will cause this value to be clamped.
[Unit] %
[How to set] This parameter can be set using the laser setting screen.
405
D. PARAMETERS
APPENDIX
B70115EN/03
15093
LDTY0
0244
LDTY0
LDTY0 Power control constant

When power control has been enabled with bit 0 of PRM No. 15000 [200],
power control is performed according to the value of LDTY0. LDTY0 is
used to specify the duty ratio when the feedrate is 0, thus enabling
modification of the rate at which the duty ratio is varied according to the
feedrate.
Duty ratio (%)
Programmed value
Dm
LDTY0
0
Fm
Feedrate (F)

[Unit] %
[Standard setting] 10
15094
PCTC
0263
PCTC
PCTC Power control filter time constant

When power control (LPWC) has been enabled with bit 0 of PRM No.
15000 [200] and the power control filter has also been enabled, PCTC is
used as the time constant used to vary the pulse duty ratio, based on the
primary delay, during power control.
[Units]
msec
15095
Allowable variation in power control speed
This parameter specifies the amount by which the power control speed is
allowed to vary.
406
D. PARAMETERS
APPENDIX
B70115EN/03
#7
#6
#5
15096
#4
#3
#2
PCD
#1
PCF
#0
PCP
PCP 0 : Does not exercise feedratebased output control in newly specified

power control.
1 : Exercises feedratebased output control in newly specified power
control.
PCF 0 : Does not exercise feedratebased frequency control in newly
specified power control.
1 : Exercises feedratebased frequency control in newly specified power
control.
PCD 0 : Does not exercise feedratebased duty cycle control in newly
specified power control.
1 : Exercises feedratebased duty cycle control in newly specified power
control.
15097
Parameter for output inclination calculation (output when feedrate F = 0)
[Unit]

15098
Parameter for frequency inclination calculation (frequency when feedrate F = 0)
[Unit]
Hz

15099
Parameter for duty cycle inclination calculation (duty cycle when feedrate F = 0)
[Unit]
407
D. PARAMETERS
APPENDIX
B70115EN/03
D.8
PARAMETERS FOR
ASSIST GAS
PRESSURE AND
TIME SETTING
15100
LAGASL
0214
LAGASL
LAGASL Selection of assist gas (Setting data)

[How to set] This parameter can be set either in laser setting screen or in material
processing program.
15101
LAFWSL
0225
LAFWSL
LAFWSL Selection of flow pattern (Setting data)

[Setting range] 1, 2, 3
[How to select] This parameter an be set in either laser setting screen or processing
program.
15102
LPRE1
0208
LPRE1
15103
LPRE2
0209
LPRE2
15104
LPRE3
0210
LPRE3
LPRE1, 2, 3
[Setting range]
[Unit]
[How to set]
Preflow time 1, 2, 3 (Setting data)

0 to 32767
10 msec
This parameter can be set in laser setting screen.
15108
LAFT1
0211
LAFT1
15109
LAFT2
0212
LAFT2
15110
LAFT3
0213
LAFT3
LAFT1, 2, 3 Afterflow time 1, 2, 3 (Setting data)

[Unit] 10 msec
[How to set] This parameter can be set in laser setting screen.
408
D. PARAMETERS
APPENDIX
B70115EN/03
15114
LAGPR1
0215
LAGPR1
15115
LAGPR2
0216
LAGPR2
15116
LAGPR3
0217
LAGPR3
LAGPR1, 2, 3 Preflow pressure 1, 2, 3 (Setting data)

[Unit]
0.01 MPa

15120
LAGEX1
0218
LAGEX1
15121
LAGEX2
0219
LAGEX2
15122
LAGEX3
0220
LAGEX3
LAGEX1, 2, 3 Processing flow pressure 1, 2, 3 (Setting data)

[Unit]
0.01 MPa

15126
LAGAF1
0221
LAGAF1
15127
LAGAF2
0222
LAGAF2
15128
LAGAF3
0223
LAGAF3
LAGAF1, 2, 3 After flow pressure 1, 2, 3 (Setting data)

[Unit] 0.01 MPa
409
D. PARAMETERS
APPENDIX
B70115EN/03
15132
AGPST
3990
AGPST
AGPST Maximum assist gas pressure

Set an assist gas pressure (MPa) at which 12.5 V is output.
[Unit] MPa
15135
AGTIM
AGTIM Assist gas pressure set time

Set a desired assist gas pressure set time.
[Unit] 10 msec
15136
AGPRS
AGPRS Assist gas pressure

Set a desired assist gas pressure.
[Unit] 0.01 MPa
15137
AGTIP
AGTIP Assist gas pressure set time for piercing

Set a desired assist gas pressure set time for piercing.
[Unit] 10 msec
15138
AGPRSP
AGPRSP Assist gas pressure for piercing

Set a desired assist gas pressure for piercing.
[Unit] 0.01 MPa
410
D. PARAMETERS
APPENDIX
B70115EN/03
D.9
PARAMETERS FOR
LASER
MAINTENANCE
TIMING INDICATION
FUNCTIONS
15150
LTTIME
0187
LTTIME
LTTIME Laser RUN ON time

A cumulative RUN ON time is automatically set.
[Unit] 0.1 hour
Standard setting: Automatically set
15151
VPTIME
VPTIME Vacuum pump operation time

A cumulative vacuum pump operation time is automatically set.
[Unit] 0.1 hour
[Standard setting] Automatically set
15152
SHTTIM
SHTTIM Shutter alarm mask time

Set a time from when shutter operation is directed until shutter alarm
monitoring starts.
[Unit] msec
411
D. PARAMETERS
APPENDIX
B70115EN/03
D.10
PARAMETERS FOR
THE OSCILLATOR
15200
LPCMD1
LPCMD1 Power used for power calibration factor determination when half of the
discharge tubes are used
Set a power to find the power calibration factor when half of the discharge
tubes are used.
[Unit] WATT
15201
LPCMD2
LPCMD2 Power used for power calibration factor determination when all discharge
tubes are used
Set a power to find the power calibration factor when all discharge tubes
are used.
[Unit] WATT
0230
LPCMD1
LPCMD1 Power command for power calibration in mode of 2 discharge tubes.

This is power command for power calibration in mode of 2 discharge tube
Duty is 100%
[Unit] WATT
0231
LPCMD2

This is power command for power calibration in mode of 4 discharge
tubes.
Duty is 100%.
[Unit] WATT
[Standard setting] Refer to the parameter data sheet delivered with the machine
412
D. PARAMETERS
APPENDIX
B70115EN/03
0232
LPCMD3

This is power command for power calibration in mode of 8 discharge
tubes.
Duty is 100%.
[Unit] WATT
15203
MRLMT
0240
MRLMT
MRLMT Power calibration limit

This is upper limit of power calibration When the value set for exceeds
this value, alarm appears and warms the decrease of laser power.
[Unit] 1/1024
15204
CAL
0241
CAL
CAL Power calibration coefficient

This is to calibrate command power for real power. This parameter is
automatically set in power calibration after RUN start.
[Standard setting] (automatic setting)
15205
PCLBTM
3991
PCLBTM
PCLBTM Power calibration time

Set a power calibration time.
[Unit] sec
15206
LPWRTC
LPWRTC Time constant of the filter used for laser power variation suppression
If a value less than 8 is specified, the filter does not function.
[Unit] msec
413
D. PARAMETERS
APPENDIX
B70115EN/03
15207
PCLMT
3986
PCLMT
PCLMT Maximum specifiable power

If a specified laser power after power compensation and power feedback
processing exceeds the setting in this parameter, the laser power is
clamped to the setting.
[Unit] WATT
15208
PFBGN
0233
PFBGN
PFBGN Laser power feedback gain

This is the gain with which power feedback is done only in continuous
wave mode (DUTY = 100%).
[Unit] 1/1024
15209
PFBCP
0234
PFBCP
PFBCP Power feedback clamp

This is the clamp to limit laser power in feedback control only in
continuous mode (DUTY = 100%).
[Unit] WATT
15210
LPWMAX
0238
LPWMAX
LPWMAX Maximum command power

This is power clamp when power command is greater than this value.
Here power command includes power override.
[Unit] WATT
15211
LPIMIN
0239
LPIMIN
LPMIN Minimum command power

This is power clamp (including power override) when power command is
smaller than this value.
414
D. PARAMETERS
APPENDIX
B70115EN/03
[Unit] WATT
15212
PPCLMT
PPCLMT Maximum specifiable power when the duty ratio is not clamped
If PRM No. 15213 does not clamp the duty ratio to 50%, and a specified
power after power compensation and power feedback processing exceeds
the setting in this parameter, the power is clamped to the setting.
If the duty ratio is clamped by PRM No. 15213, the power is clamped to
the value specified with PRM No. 15207.
[Unit] WATT
15213
PPWMAX
PPWMAX Duty ratio clamp criterion

When a specified power multiplied by an override value exceeds the value
set in this parameter, the duty ratio is clamped to 50% (fixed value), and
the peak value is clamped to the value set in PRM No. 15210.
[Unit] WATT
15215
PWCM
0259
PWCM
PWCM Power input calibration coefficient

The laser power is monitored through the rear mirror. This parameter
specifies the calibration coefficient used to convert the monitored value to
the actual laser power, as output from the output mirror.
[Setting range] 102 (0.1
210) to 10240 (10
210)
[Units] 1/1024
NOTE
If 0 is specified, 1024 (1
15216
TCNST
0262
TCNST
210) is assumed.
TCNST Power display filter time constant

This is the filter time constant with which fluctuation in power display is
suppressed.
[Unit] msec
415
D. PARAMETERS
APPENDIX
B70115EN/03
D.11
PARAMETERS FOR
DISCHARGE
15220
LVICMD
0247
LVICMD
LVICMD Maximum bias command at discharge start

Discharge current command is given when discharge start signal (HVON)
is commanded in discharge preparation completion (LRDY) state to start
discharge. This command is increased by ramp.
Command to the value set by this parameter 6.sec after the start of HVON.
[Unit] mV
[Standard setting] Refer to attached parameter sheet because this must be proper to the
machine.
15221
LVBEAM
0248
LVBEAM
LVBEAM Voltage for conforming discharge

All the discharge tubes must be in discharge after discharge start waiting
time (PRM 15222 [249]), which is after bias command of discharge start
becoming maximum (PRM 15220 [247]). This discharge state is checked
by monitoring tube voltage.
When monitored voltage is lower than this value, the tube is confirmed its
discharge.
When the voltage is higher than this value, alarm No. 666 appears.
[Unit] V
[Standard setting] Refer to attached parameter sheet.
15222
LWTBMS
0249
LWTBMS
LWTBMS Discharge waiting time

In discharge start bias command is maintained as maximum during this
time.
After this time tube voltage is compared with PRM No. 15221 [248] to
check the state of discharge.
[Unit] 10 msec
416
D. PARAMETERS
APPENDIX
B70115EN/03
15223
LVCMD
0250
LVCMD
LVCMD Bias command in oscillator preparation completion state

After the start of discharge is confirmed, the bias voltage of discharge
current command is replaced by this parameter. This replacement is
performed during a rise in the gas pressure (time set with parameter No.
15249: FS16L, FS16iL, or 20 sec: FS0L).
[Unit] mV
15224
VD
VD Modulation voltage
This parameter specifies a voltage value by which the normal bias
command value is decreased with the base modulation function.
[Unit] mV
15225
TD
TD Modulation time
This parameter specifies a time for which the bias command value is
decreased with the base modulation function.
[Unit] 10 msec
417
D. PARAMETERS
APPENDIX
B70115EN/03
D.12
PARAMETERS FOR
GAS CONTROL (1)
15240
LEXPS
0235
LEXPS
LEXPS Negative pressure in exhaust completion

This is the ultimate vacuu when gas flow system is evacuated in laser
[Starting range] 0 to 32767
[Unit]
13 Pa
15241
LPIPS
0237
LPIPS
LPIPS Intratube pressure in discharge start

This is intratube gas pressure in discharge preparation completion
(LRDY) state.
[Unit]
13 Pa
[Standard setting] 300: C1500B, C2000B

240: C3000C
200: C2000C, C3000D, C4000A, C6000B
15242
LPPS
LPPS Tube pressure for oscillation (50 Hz)

This parameter specifies the gas pressure inside the discharge tube in the
laser oscillation ready state (LSTR).
[Unit]
13 Pa
15243
LPPS60
LPPS60 Tube pressure for oscillation (60 Hz)

This parameter specifies the gas pressure inside the discharge tube in the
laser oscillation ready state (LSTR).
[Unit]
13 Pa
418
D. PARAMETERS
APPENDIX
B70115EN/03
0236
LPPS
LPPS Intratube pressure during oscillation

This is intratube gas pressure in laser preparation completion (LSTR)
state.
[Unit]
13 Pa
15244
LCCGN
0264
LCCGN
LCCGN Gas pressure control gain

This is the gain to feedback control the intratube laser gas pressure.
[Unit] 1/1024
15245
LCCGNH
0207
LCCGNH
LCCGNH Intratube pressure control gain 2

Set pressure control gain in discharge start preparation completion
(LRDY).
When PRM No. 15000 [200]/bit1 is 1, this parameter is valid.
[Unit] 1/1024
15246
LCCGNI
0246
LCCGNI
LCCGNI Pressure control integration gain

This is feedback integration gain for gas pressure control.
[Unit] 1/1024
15247
IPVST
4398
IPVST
IPVST Integral element preset value

Set a value for presetting a gas pressure change value and integral
element.
419
D. PARAMETERS
APPENDIX
B70115EN/03
15248
GPNRAV
4399
GPNRAV
GPNRAV Allowable gas pressure insufficiency

The insufficient gas pressure alarm is issued when the gas pressure in the
discharge tube does not reach [(specified tube pressure for oscillation)
(this allowable value)].
[Unit]
13 Pa
15249
GPRST
GPRST Gas pressure increase time

This parameter specifies a gas pressure increase time in sequence 27.
[Unit] sec
15255
VENWT
3994
VENWT
VENWT RUN ON evacuation time

This parameter specifies the time between the threeway valve being
opened and the exhaust valve being opened, when the laser is turned on.
[Units] sec
15256
GEVWT
3995
GEVWT
GEVWT RUN OFF evacuation time

When the oscillator is turned off, the gear box is evacuated prior to purge.
This parameter specifies the time required for evacuation. The minimum
time is fixed to 600 seconds. Therefore, specify a value of at least 600.
[Units] sec
420
D. PARAMETERS
APPENDIX
B70115EN/03
15257
VIBCNT
VIBCNT Number of abnormal vibrations detected

If the number of abnormal vibrations detected exceeds the value specified
in this parameter, an abnormal vibration alarm is issued.
[Unit] Number
15258
LGPTC
LGPTC Time constant of the filter used for laser gas pressure variation
suppression
[Unit] msec
If a value less than 16 is specified, the filter does not function.
15259
EXTM
EXTM Exhaust time when RUN is ON

Set a desired evacuation time when RUN is ON.
[Unit] sec
15260
OPVTM
3997
OPVTM
OPVTM Period when the exhaust value of the external pipe is open
Set the time the exhaust valve of the external pipe is open. When a time
beyond 60 sec is specified, the time is clamped to 60 sec.
[Unit] sec
421
D. PARAMETERS
APPENDIX
B70115EN/03
D.13
PARAMETERS FOR
HIGHLY REFLECTIVE
MATERIAL ALARMS
15265
PWRUP
3982
PWRUP
PWRUP Maximum allowable power increase

If the actual power exceeds the specified power by the value specified in
this parameter, a beam reflection error is reported.
[Unit] WATT
[Standard setting] Refer to the prameter data sheet delivered with the machine.
15266
ALPUPL
3983
ALPUPL
ALPUPL Maximum allowable power

If the actual power exceeds the value set in this parameter, a beam
reflection error is reported.
[Unit] WATT
[Standard setting] Refer to the prameter data sheet delivered with the machine.
422
D. PARAMETERS
APPENDIX
B70115EN/03
D.14
PARAMETERS FOR
LASER
POWER/VOLTAGE
DROP
15270
NRMLTV
0199
NRMLTV
NRMLTV Discharge tube voltage in normal operation

In this parameter, the voltage to be applied to the discharge tube in normal
base discharge is set. The value set in this parameter serves as the
reference voltage used for discharge tube voltage monitoring in the LSTR
state. The discharge tube voltage is automatically measured before the
start of power compensation factor processing. If the difference between
the measured value and the previously set NRMLTV value is found to be
within the discharge tube voltage decrease limit specified in PRM No.
15272 [242], the measured value is automatically set in this parameter.
[Unit] VOLT
[Standard setting] Automatically set
15271
PWRDP
0242
PWRDP
PWRDP Power decrease limit

When real power is lower than command power by more than this value,
alarm appears.
[Unit] WATT
15272
TVOFST
0243
TVOFST
TVOFST Discharge tube voltage decrease limit

When tube voltage in oscillator preparation completion (LSTR) state is
lower than the value of PRM No. 15270 [199] by more than this value,
alarm appears.
[Unit] VOLT
423
D. PARAMETERS
APPENDIX
B70115EN/03
15276
GCHTM
3992
GCHTM
GCHTM Laser gas replacement time

Set a time for laser gas replacement in laser start operation.
[Unit] sec
424
D. PARAMETERS
APPENDIX
B70115EN/03
D.15
PARAMETERS FOR
POWER TABLE
SETTING
15280
LPCPW1
15281
LPCPW2
LPCPW1 Table interval when half of the discharge tubes are used
Set a power command setting interval.
LPCPW2 Table interval when all discharge tubes are used
0266
LPCPW2
0267
LPCPW3
LPCPW2 Table interval when four discharge tubes are used

LPCPW3 Table interval when eight discharge tubes are used
Set the power command setting interval.
15290
LPCP10
0277
LPCP20
15291
LPCP11
0278
LPCP21
15292
LPCP12
0279
LPCP22
15293
LPCP13
0280
LPCP23
15294
LPCP14
0281
LPCP24
425
D. PARAMETERS
APPENDIX
B70115EN/03
15295
LPCP15
0282
LPCP25
15296
LPCP16
0283
LPCP26
15297
LPCP17
0284
LPCP27
15298
LPCP18
0285
LPCP28
LPCP2028 Power command in mode of 4 discharge tubes

Power command is increased by increment of PRM No. 15280[266] for
mode of 4 discharge tubes starting from 0.
[Unit] WATT
15300
LPCP20
0286
LPCP30
15301
LPCP21
0287
LPCP31
15302
LPCP22
0288
LPCP32
15303
LPCP23
0289
LPCP33
15304
LPCP24
0290
LPCP34
15305
LPCP25
0291
LPCP35
15306
LPCP26
0292
LPCP36
15307
LPCP27
0293
LPCP37
15308
LPCP28
0294
LPCP38
LPCP3038 Power command in mode of 8 discharge tubes

Power command is increased by increment of PRM No. 15281[267] for
mode of 8 discharge tubes starting from 0.
[Unit] WATT
426
D. PARAMETERS
APPENDIX
B70115EN/03
D.16
AUTOMATIC AGING
FUNCTION
15320
LPCD
LPCD2C Command power for power calibration coefficient calculation (valid

when EGE = 1)
If the automatic aging function is enabled, a power calibration coefficient
is calculated after aging ends.
[Unit] W
15321
LFCD2C
LFCD2C Oscillation frequency command for power calibration coefficient

calculation (valid when EGE = 1)
[Unit] Hz
15322
LDCD2C
LDCD2C Pulse duty cycle command for power calibration coefficient calculation
(valid when EGE = 1)
[Unit] %
15323
PCLTMC
PCLTMC Command time for power calibration coefficient calculation (valid when
EGE = 1)
[Unit] sec
427
D. PARAMETERS
APPENDIX
15324
B70115EN/03
LPSC
LPSC Intratube pressure setting at oscillation time for power calibration

coefficient calculation (50 Hz) (valid when EGE = 1)
For an oscillator with an inverter mounted, the same value as parameter
No. 15325 is to be set.
This parameter specifies a value when an oscillator with no inverter
mounted is used in an area where the power supply frequency is 50 Hz.
[Unit]
13 Pa
15325
LPS60C
LPS60C Intratube pressure setting at oscillation time for power calibration

coefficient calculation (60 Hz) (valid when EGE = 1)
This parameter specifies a value when an oscillator with an inverter
mounted or an oscillator with no inverter mounted is used in an area where
the power supply frequency is 60 Hz.
[Unit]
13 Pa
15326
LPCD2E
LPCD2E Power command when aging is performed with the automatic aging
function (valid when EGE = 1)
[Unit] W
15327
LECD2E
LFCD2E Oscillation frequency command for aging (valid when EGE = 1)

This parameter specifies a frequency to be used when aging is performed
with the automatic aging function.
[Unit] Hz
428
D. PARAMETERS
APPENDIX
B70115EN/03
15328
LDCD2E
LDCD2E Pulse duty cycle command for aging (valid when EGE = 1)
This parameter specifies a duty cycle to be used when aging is performed
with the automatic aging function.
[Unit] %
15329
PLCTME
PLCTME Power command time for aging (valid when EGE = 1)

This parameter specifies a command time for each aging operation
performed with the automatic aging function.
[Unit] sec
15330
LPSE
LPSE Gas pressure setting (50 Hz) for aging (valid when EGE = 1)
Intratube pressure setting at oscillation time for aging with the automatic
aging function
For an oscillator with an inverter mounted, the same value as parameter
No. 15331 is to be set.
This parameter specifies a value when an oscillator with no inverter
mounted is used in an area where the power supply frequency is 50 Hz.
[Unit]
13 Pa
15331
LPS60E
LPS60E Gas pressure setting (60 Hz) for aging (valid when EGE = 1)
Intratube pressure setting at oscillation time for aging with the automatic
aging function
This parameter specifies a value when an oscillator with an inverter
mounted or an oscillator with no inverter mounted is used in an area where
the power supply frequency is 60 Hz.
[Unit]
13 Pa
429
D. PARAMETERS
APPENDIX
15332
B70115EN/03
LFCMD2
LFCMD2 Oscillation frequency command value for power calibration

[Unit] Hz
15333
LDCMD2
LDCMD2 Pulse duty cycle command during power calibration and aging
[Unit] %
15334
NES
NES Number of aging operations (valid when EGE = 1)

This parameter specifies the number of times the aging sequence is
executed. The number of aging operations (0 or 2 to 7) is automatically
set, depending on the halt time, when the automatic aging function is
enabled.
[Setting range] 0, 2 to 7 (Automatically set by the CNC)
15335
LOFTIMY
LOFTIMY Aging time data 1 (valid when EGE = 1)

When the automatic aging function is enabled, the year when the
oscillator was stopped previously is recorded.
[Setting range] 1 to 65535 (Automatically set by the CNC)
15336
LOFTIMM
LOFTIMM Aging time data 2 (valid when EGE = 1)

When the automatic aging function is enabled, the month when the
15337
LOFTIMD
LOFTIMD Aging time data 3 (valid when EGE = 1)

When the automatic aging function is enabled, the day when the oscillator
was stopped previously is recorded.
430
D. PARAMETERS
APPENDIX
B70115EN/03
15338
LOFTIMH
LOFTIMH Aging time data 4 (valid when EGE = 1)

When the automatic aging function is enabled, the hour when the
431
D. PARAMETERS
APPENDIX
B70115EN/03
D.17
PARAMETERS FOR
TRACING
(DETECTION)
15500
KE
0252
KE
KE Detector gain factor

This parameter sets a gain factor for the displacement detector in Zaxis
tracing control.
212) to 6144 (1.5
[Setting range] 2048 (0.5
212)

NOTE
This parameter can be set on the tracer setting screen.
15502
EZR
0253
EZR
EZR Detector zeropoint compensation

This parameter sets a zeropoint compensation value for displacement
detector zeropoint compensation in Zaxis tracing control.
[Setting range] 32767 (2048
[Unit] (0.001
24) to 32753 (2047
24)
24) mm
[Standard setting] Automatically set (0)

NOTE
This parameter can be set on the tracer setting screen.
15503
FILTT
0254
FILTT
FILTT Time constant of the filter

Set a time constant of the filter used to remove displacement disturbance
components in Zaxis tracing control.
[Unit] msec
432
D. PARAMETERS
APPENDIX
B70115EN/03
15504
EMUL
0295
EMUL
EMUL Displacement multiplication factor

Set a displacement multiplication factor to match a greater value to be
detected in tracing control. (Usually, 1 is set.)
[Setting] 1 or 5
Set value
Maximum displacement
(mm)
Resolution
(mm)
1
2
3
4
5
"2
"4
"6
"8
"10
0.001
0.002
0.003
0.004
0.005
433
D. PARAMETERS
APPENDIX
B70115EN/03
D.18
PARAMETERS FOR
TRACING (DISPLAY)
#7
15510
#6
#5
TRA
#4
#3
#2
#1
#0
TRA 1 : Uses an absolute coordinate system to display the current position on

the tracer setting screen.
0 : Uses a relative coordinate system to display the current position on
the tracer setting screen.
434
D. PARAMETERS
APPENDIX
B70115EN/03
D.19
PARAMETERS FOR
TRACING (INTEGRAL
PROCESSING)
15510
INTGT
0255
INTGT
INTGT Integral time constant

Set an integral time constant for integral processing of deviations in
Zaxis tracing control.
[Unit] msec
15511
ZRWTH
0256
ZRWTH
ZRWTH Integral compensation zero width

Set a displacement for disabling integral processing in Zaxis control.
Integral processing is not performed when:
Standardized displacement x integral compensation zero width
[Unit] 0.001 mm
15512
ECLMP
0297
ECLMP
ECLMP Integral clamp value

Set an integral clamp value for integral deviation processing in Zaxis
tracing control.
[Unit] 0.001 mm
435
D. PARAMETERS
APPENDIX
B70115EN/03
D.20
PARAMETERS FOR
TRACING (PHASE
COMPENSATION)
15520
ISOUT
0257
ISOUT
ISOUT Phase compensation time constant

Set a time constant for displacement phase compensation in Zaxis
tracing control.
[Unit] msec
[Standard setting] 0 (Values of less than 2 are invalid.)
15521
CMPG
0258
CMPG
CMPG Phase compensation gain

Set a gain for displacement phase compensation in Zaxis tracing control.
[Unit] 0.01 [1/sec]
[Standard setting] 0 (Values of less than 2 are invalid.)
436
D. PARAMETERS
APPENDIX
B70115EN/03
D.21
PARAMETERS FOR
TRACING
(DISPLACEMENT)
15530
NMDEF
0224
NMDEF
NMDEF Reference displacement

Set a reference distance to be controlled from the quill top to a workpiece
to be controlled in Zaxis tracing control.
[Setting range] PRM No. 15531 [260] to PRM No. 15532 [261]
[Unit] 0.001 mm
NOTE
This parameter can be set on the tracer setting screen or in
a machining program.
15531
EMIN
0260
EMIN
EMIN Minimum reference displacement

Set the minimum specifiable reference displacement in Zaxis tracing
control.
[Setting range] 0 to "32767
[Unit] 0.001 mm
15532
EMAX
0261
EMAX
EMAX Maximum reference displacement

Set the maximum specifiable reference displacement in Zaxis tracing
control.
[Setting range] 0 to "32767
[Unit] 0.001 mm
15533
EOVR
0299
EOVR
EOVR Excessive displacement detection value

An excessive displacement alarm is issued when this value is exceeded by
a standardized displacement in Zaxis tracing control.
437
D. PARAMETERS
APPENDIX
B70115EN/03

[Unit] 0.001 mm
15537
EOVRS
3987
EOVRS
EOVRS Detection displacement for issuing the tracing range exceeded alarm
In Zaxis tracing control, when the absolute value, DE, of a tracing
deviation (detection displacement (E) reference displacement (Eo))
exceeds the value set in this parameter
( DE y EOVRS), the tracing range exceeded alarm is issued because the
system determines that the tracing range is exceeded.
[Unit] 0.001 mm
15538
EOVRTM
3988
EOVRTM
EOVRTM Tracing range exceeded alarm detection mask time

When the reference displacement is changed, set a time for masking the
tracing range exceeded alarm in a transient state. When the value set in
this parameter has elapsed, detection operation is resumed.
[Unit] msec
15539
EOVRD
3989
EOVRD
EOVRD Detection compensation displacement for issuing the tracing range

exceeded alarm
This displacement can be added to the specified value of EOVRS
(detection displacement for issuing the tracing range exceeded alarm) for
a detected displacement value in approaching (when detection
displacement (E) > reference displacement (Eo)) may be greater by this
compensation displacement. As a result, the tracing range exceeded
alarm is issued when:
DE x EOVRS, (EOVRS+EOVRD) x DE
[Unit] 0.001 mm
438
D. PARAMETERS
APPENDIX
B70115EN/03
D.22
PARAMETERS FOR
TRACING
(FEEDRATE
COMMAND)
15540
ZTCGM
0296
ZTCGM
15541
WTCGM
3984
WTCGM
15542
XTCGM
15543
YTCGM
ZTCGM Conversion factor for feedrate control voltage in Zaxis tracing control
WTCGM Conversion factor used to convert a voltage for feedrate specification in
Waxis tracing control
XTCGM Conversion factor used to convert a voltage for feedrate specification in
Xaxis tracing control
YTCGM Conversion factor used to convert a voltage for feedrate specification in
Yaxis tracing control
Method of calculation:
Use the following formula to find the conversion factor to set in this
parameter:
P 4
2
10 3 4096
Conversion factor + G
1000 Le
G : Tracing control loop gain
Le : Amount of machine movement per motor revolution (mm/rev)
P : Number of pulses detected by the pulse coder per motor revolution
(P/rev)
439
D. PARAMETERS
APPENDIX
B70115EN/03
D.23
PARAMETERS FOR
TRACING
(APPROACH)
15550
APRCH
0251
APRCH
APRCH Approach completion detection range

Set a range of displacements assumed to represent approach completion
in Zaxis tracing control. Approach completion is assumed when the
state where displacements lie within a specified approach completion
detection range continues for the approach completion time interval
(APINT) or longer.
[Unit] 0.001 mm
15551
APINT
0298
APINT
APINT Approach completion time interval

When the state where displacements lie within the specified approach
completion detection range continues for the time set in this parameter or
longer, approach completion is assumed in Zaxis tracing control.
[Unit] msec
15552
APRLEN
3985
APRLEN
APRLEN Approach completion detection displacement

Set an approach completion displacement in approach feed.
[Unit] 0.001 mm
15553
TRCFMAX
TRCFMAX Maximum allowable feedrate in approaching

Set a maximum allowable feedrate in approaching.
[Unit] 1 mm/min
440
D. PARAMETERS
APPENDIX
B70115EN/03
D.24
PARAMETERS FOR
CONSTANT OPTICAL
PATH LENGTH
CONTROL
15700
#7
8
#6
7
#5
6
#4
5
#3
4
#2
Z
#1
Y
#0
X
X 8 Set axes required to calculate a move command for a mirror movement

axis.
1 : Used for move command calculation
0 : Not used for move command calculation
NOTE
Set the bits for nonexistent axes to 0.
15701
#7
8
#6
7
#5
6
#4
5
#3
4
#2
Z
#1
Y
#0
X
X 8 Selects a polarity for move command calculation for each axis when
calculating a move command for a mirror movement axis.
1 : Selects the positive polarity for calculation.
0 : Selects the negative polarity for calculation.
NOTE
Set the bits for nonexistent axes to 0.
#7
#6
#5
#4
#3
15702
#2
#1
FMSW
#0
TRAXC
TRAXC 1 : Includes tracing axis travel distance data in Uaxis move command
calculation in tracing control.
0 : Does not include tracing axis travel distance data in Uaxis move
command calculation in tracing control.
FMSW 1 : Enables constant optical path length control.
0 : Disables constant optical path length control.
15703
MIRAXS
MIRAXS Axis selection for mirror movement

Specify mirror movement axes in this parameter. The Xaxis, Yaxis,
and Zaxis cannot be specified. If there is a simple synchronized axis, the
fifth and later axes can be specified.
441
D. PARAMETERS
APPENDIX
15704
B70115EN/03
MIRCOM
MIRCOM Mirror block axis reference position compensation

When correcting the mirror block axis position to obtain an optimum
propagation distance, set the distance from the origin in this parameter.
[Setting range] "32767
[Unit] mm
15705
LRCRAT
LRCRAT Optical path length compensation factor

The travel distance along a mirror block axis is the total travel distance
along the axes set in PRM No. 15700 divided by the factor set in this
parameter.
[Unit] 1/64
442
D. PARAMETERS
APPENDIX
B70115EN/03
D.25
LASER GAS MIXER
FUNCTION
15710
BMBCTM
4390
BMBCTM
BMBCTM External piping exhaust time

[Unit] sec
[Standard setting] 10 (2/m pipe length)
15711
GMMWT
4411
GMMWT
GMMWT Gas mixture wait time

[Unit] min
15712
GMVWT
4412
GMVWT
GMVWT Gas mixer evacuation time

[Unit] min
15713
HEOUT
4413
HEOUT
HEOUT Helium exhaust time

[Unit] msec
15714
NCOUT
4414
NCOUT
NCOUT Nitrogen and CO2 exhaust time

[Unit] msec
443
D. PARAMETERS
APPENDIX
15715
B70115EN/03
VCCKPR
VCCKPR Vacuum criteria gas pressure

[Unit]
13 Pa

15716
TVTMR
4391
TVTMR
TVTMR Evacuation wait time

[Unit] min
444
D. PARAMETERS
APPENDIX
B70115EN/03
D.26
PARAMETERS FOR
GAS CONTROL (2)
#7
#6
#5
#4
#3
15800
#2
#1
#0
TPC
TPC 0 : Disables the turbo blower constant power drive control function.
1 : Enables the turbo blower constant power drive control function.
15801
LPPSM
LPPSM Maximum intratube pressure when the turbo blower constant power
drive control function is enabled
This parameter specifies a maximum laser intratube pressure command
value. If a laser intratube pressure command value calculated from a
laser power command value exceeds the setting of this parameter, the
intratube pressure is clamped to the value set in this parameter.
[Unit]
13 Pa
15802
LPWSM
LPWSM Laser power command value leading to a maximum intratube pressure

when the turbo blower constant power drive control function is enabled
This parameter specifies a laser power command value when a laser
intratube pressure command value is set in the parameter No. 15801.
From this parameter and parameter No. 15801, the proportional constant
of a laser intratube gas pressure command and laser power command is
determined.
[Unit] W
15803
PCDCAL
PCDCAL Intratube pressure command compensation coefficient when the turbo

blower constant power drive control function is enabled
This parameter specifies a compensation coefficient by which a laser
intratube pressure command value is multiplied. For the parameter
setting 1024, a laser intratune pressure command value is multiplied by
the compensation coefficient 1.0.
[Unit] 1/1024
445
D. PARAMETERS
APPENDIX
15804
B70115EN/03
TPW
TPW Maximum open time of the exhaust valve for intratube pressure control
at oscillation time
[Unit] msec
446
B70115EN/03
APPENDIX
E. CONTROL SEQUENCES
IN LASER OSCILLATOR
CONTROL SEQUENCES IN LASER OSCILLATOR
447
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
E.1
OUTLINE OF LASER
OSCILLATION
SEQUENCES
SEQ 0
PURGE
LRDY
PTLP
LSTR
=0
=0
=0
=0
POWER ON
POWER OFF
SEQ 10
PURGE
LRDY
PTLP
LSTR
=1
=0
=0
=0
INITIAL
SEQ 11
(WAIT = 1)
RUN ON
SEQ 19
(WAIT = 1)
RUN OFF
SEQ 20
PURGE
LRDY
PTLP
LSTR
=0
=1
=0
=0
READY OF DISCHARGING
SEQ 21
(RFHV = 0)
HV ON
SEQ 29
(RFHV = 1)
HV OFF
SEQ 30
PURGE
LRDY
PTLP
LSTR
=0
=0
=1
=1
READY OF
BEAMON
OPERATION
As is shown in the flow chart, the laser oscillation sequences can be

divided into four steps.
Throughout this description the following notations are used.
RUN: Oscillator start switch
PURGE: Purge in tube completion signal
LRDY: Discharge preparation completion signal
PTLP: Warning light signal
LSTR: Oscillation preparation completion signal
448
APPENDIX
B70115EN/03
IN LASER OSCILLATOR
[SEQ 0] POWER OFF state

This is the state prior to power on where all the signals are in off state.
[SEQ 10] INITIAL state
After power is turned on, laser comes into PURGE=1 state. This signal
is on when atmospheric pressure sensor monitors that the intratube
pressure equals atmospheric pressure. Usually when this signal is on,
purge completion lamp on operational board is lit.
[SEQ 20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and then
gas pressure control begins. When gas pressure reaches the set value, laser
comes into discharge preparation completion (LRDY) state and it
becomes possible to turn on HV.
[SEQ 30] READY OF BEAMON OPERATION state
When HV (high voltage command) is turned on, high voltage is applied
to discharge tube. Then with the command from CNC, base discharge is
established. Further intratube pressure control is performed. When this
is completed normally, laser comes into oscillation preparation
completion state.
Sequence
number
Meaning
10
Initial state (purge completed state)
11
State waiting for the REV signal when RUN is turned on again
12
Purge operation being performed
13
State waiting for the rotation sensor to be turned on when

RUN is off
14
State waiting 75 seconds
16
Execution with RUN turned on
17
State waiting for exhaust completion and negative pressure

arrival
18
State waiting for the AR signal to be turned on
20
LRDY state
23
State waiting for setting from gas pressure during laser oscillation to discharge start time gas pressure
26
Execution with HV ON (state waiting for start of discharge)
27
State waiting for setting from a maximum base discharge value to base discharge state
28
Power calibration being performed
30
LSTR state
49
Vacuum being drawn with RUN turned off (parameter No.

15256)
50
State waiting 75 seconds with RUN turned on again
449
IN LASER OSCILLATOR
APPENDIX
E.2
B70115EN/03
Intratube gas pressure control is performed in the following steps as

shown in the figure.
INTRATUBE GAS
PRESSURE
CONTROL
SEQUENCES
: COMMAND
GAS PRESSURE
: REAL
PRM15249
PRM15242
15243
[236]
Pressure value "20

(="266 Pa)
PRM15241
[237]
PRM15240
[235]
45)70sec
SQ16
SQ17
RUN
ON
SQ18
PRM15205
SQ20
SQ26
SQ27
SQ28
LRDY HV ON
START OF
GAS CONTROL
PRM15256
SQ30 SQ23
LSTR HV
OFF
Fig. E.2
450
SQ20
LRDY
SQ49
SQ13
RUN
OFF
SQ12
[TIME]
B70115EN/03
APPENDIX
IN LASER OSCILLATOR
[SQ 10]
This is the state after power is turned on in which intratube gas pressure
equals atmospheric pressure.
[SQ16, 17, 18]
Setting the laser start switch (RUN) to ON starts evacuation, which
continues until the pressure designated by PRM No. 15240 [235]
(evacuation completion pressure) is reached. As soon as this pressure has
been detected, gas pressure control is applied. Then, the intratube
pressure increases to that designated by PRM No. 15241 [237] (intratube
pressure setting at the start of discharge) and is stabilized there. Forty five
seconds after the start of pressure control, the intratube pressure is
checked to confirm whether it conforms to the value set with PRM No.
15241 [237], an error of "20 (="266 Pa) being allowed. If the error
exceeds the allowable range, an alarm is issued. Once this check has been
completed the turbo blower starts, reaching the specified speed within
about 70 seconds. Once the specified speed has been reached, LRDY is
set to 1, at which point the laser enters the discharge start preparation
completion state. If the frequency reached signal is not issued by the
inverter within 120 seconds of the turbo blower being started, an alarm
is issued.
[SQ 20]
This is the state of discharge start preparation completion (LRDY=1) and
HV(high voltage command) is read.
[SQ 26, 27, 28]
This sequence begins when HV is turned on after discharge start
preparation completion (LRDY=1).
Applying high voltage leads to base discharge in the tube. Gas pressure
control begins simultaneously and the pressure changes from the value of
PRM No. 237 to the one of PRM No. 236 (intratube pressure at base
discharge). The error tolerance is "100 (="1330 Pa). When it is so, the
calculation of power calibration coefficient begins and if not so alarm
appears.
[SQ 30]
This is oscillation preparation completion state(LSTR=1) in which laser
oscillation is ready.
[SQ 23]
By turning off HV, intratube pressure shifts from the value of PRM No.
236 to the value of PRM No. 237. Here discharge is extinguished and
laser leaves oscillation preparation completion state and enters discharge
start preparation completion state.
451
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
[SQ49, 13, 12]

In the SQ20 state, setting the laser start switch (RUN key) to OFF
terminates gas pressure control, after which the turbo blower is shut
down, taking about 70 seconds to stop. If evacuation after RUN OFF has
been enabled, evacuation is performed for 15 minutes. Then, laser gas is
supplied until the intratube pressure reaches atmospheric pressure. Once
the atmospheric pressure sensor detects that the intratube pressure has
reached atmospheric pressure, the laser enters the PURGE state and the
purge lamp on the operator panel lights. Upon the completion of purge,
the poweroff interlock of the CNC is released, allowing the power to be
turned off.
452
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
E.3
The control of tube voltage is done simultaneously with that of gas

pressure as shown in Fig. E.3 in the following sequences.
TUBE VOLTAGE
CONTROL
SEQUENCES
GAS PRESSURE
PRM15242, 15243
(PRM236)
PRM15241
(PRM237)
SQ26
SQ20
SQ27
SQ28
LSTR
(In power
calibration)
LSTR
(No power
calibration)
H.V.ON
Command voltage
Tube voltage
SQ30
In Power
Calibration
PRM15200, 15201
(PRM231, 232)
PRM15220, 15201 (PRM231, 232)
Note :
Parameter numbers
for FS0L are
described after PRM.
Eight step power

calibration
1/2
Command voltage
PRM15220
(PRM247)
PRM15221
(PRM248)
PRM15223
(PRM250)
Tube voltage
6sec
PRM15222
(PRM249)
SQ291
SQ292
In no Power
Calibration
PRM15249
(20sec)
SQ293
Fig. E.3
453
Gas
voltage
check
PRM15205
(PRM3991)
SQ294
[TIME]
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
[SQ 291]
When HV is turned on, high voltage is applied to discharge tubes and
voltage control begins. Here command is increased in ramp mode up to
the value of PRM 15220 [247] (maximum bias command at discharge
start). The time required to reach PRM 15220 [247] from HV on is
determined to be 6 sec by software. Although tube voltage increases
together with command, it drops immediately after the start of discharge.
[SQ 292]
This sequence retains laser in discharge start waiting time (PRM15222
[249]). During this time maximum bias command(PRM15220 [247]) is
kept. Here all the tubes must be in discharge. The state of discharge is
checked by comparing tube voltage with discharge start voltage (PRM
15221 [248]).
[SQ 293]
When discharge start is confirmed in SQ 292, power command changes
to PRM 15223 [250] (bias command).Here base discharge is established
for a while and the comparison between tube voltage and PRM 15270
[199] (tube voltage in normal discharge) is done using the following
decision equation.
V(n1) Vn < PRM15272 [243]
(1)
V(n1)
: PRM No. 199 (tube voltage in normal discharge)
Vn
: Monitored voltage of tube No.1 (monitored voltage of
the tube of the smallest number)
PRM15272 [243] : Tube voltage decrease limit
The decision of normal state is given by the holding of the inequality of
(1). When normal, monitored voltage of No. 1 tube is set for PRM15270
[199]. If PRM15000 bit 4 [200 bit 4] is 0 then, laser enters oscillation
preparation completion (LSTR) state.
454
B70115EN/03
APPENDIX
IN LASER OSCILLATOR
[SQ 294]
When normal base discharge is confirmed and PRM15000 bit 4 [200 bit
4] is 1 (power calibration is done), this sequence begins to obtain power
calibration coefficient. Power calibration is to calibrate so that real and
command powers become equal. The equation used is as follows.
PRM15204 [241] = Pc/Pa1024 (2)
PRM15204 [241] : Power calibration coefficient
Pc
: Command power
Pa
: Actual power
The power calibration coefficient is calculated by outputting the value
specified with PRM 15200 (power used for power calibration when half
of the discharge tubes are used) or PRM 15201 (power used for power
calibration when all the discharge tubes are used) [PRM 230 for two
discharge tubes][PRM 231 for four discharge tubes][PRM 232 for eight
discharge tubes] then assigning that value to the above equation. The
actual power measured three minutes after the start of output is used as
Pa.
The difference between the specified power and actual power is also
monitored. The laser is judged as being normal provided the difference
is less than the value specified with PRM 15271 [242] (power decrease
limit).
The power calibration coefficient is clamped to the value specified for
PRM 15203 [240] (power calibration limit).
Once the above procedure has terminated normally, the laser enters the
LSTR state.
455
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
E.4
OSCILLATION
SEQUENCES FLOW
CHART
Power ON sequence
PURGE = ON
OFI
= OFF
NO
RUN = ON
YES
PCR
OFI
PURGE
WAIT
CLON
Alarm 1 monitor
treatment start
= OFF
= ON
= OFF
= ON
= ON
Wait for 3 seconds
RPA = ON
CAMCON = FULL OPEN
Chiller monitor start
TIMER A = RESET
Wait for 3 seconds
PURGE=ON
This signal becomes on when intratube pressure is

conformed to be equal to atmospheric pressure after
POW ON.
OF1=OFF
This is power off interlock off state in which power off
is valid.
RUN=ON
Laser start switch on.
PCL=OFF
DC unit alarm indication and holding circuit is cleared.
(+24 V off).
OF1=ON
NC POW OFF is invalid.
WAIT=ON
LRDY waiting.
CLON=ON
Ciller start requested.
RPA=ON
Vane pump start.
Chiller monitor
The start of monitor if chiller unit is supplying
normal flow rate of cooling water to laser.
456
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
TIMER A RESET
This timer begins counting after the start of

evacuation.
1
VEN
PCL
= ON
= OFF
Wait for 5 seconds
GRDY = ON
GRDY
= OFF
CAMCON = FULL CLOSE
Intratube pressure
NO
Timer count
<PRM 15240[235]
YES
Timer A >
PRM15259 [600 sec]
NO
YES
ALM 4080 [680]
VEN
RBA
GRDY
= OFF
= ON
= ON
VEN =ON
PCL=ON
Exhaust valve is opened.

Alarm indication of DC unit is valid.
GRDY=ON
Laser gas supply valve is opened.

The time required for intratube pressure to reach
PRM15240 [235] after RUN ON is not definite. It
depends on many factors including vane pump capacity,
leakage characteristics of laser, etc. The pumping
capacity further depends on the state of oil
contamination.
After RUN ON (laser start switch on), evacuation
proceeds to the vacuum of PRM15240 [235].
When the evacuation time exceeds PRM15259 [600 sec],
alarm appears.
457
IN LASER OSCILLATOR
APPENDIX
VEN=OFF
RBA=ON
B70115EN/03
Exhaust valve is closed.

Start of Roots blower.
2
Gas pressure control

start
200 VAC to DC
power supply unit
PRM15240 [235] PRM15241 [237]
Wait for 45 seconds
PRM15241 [237] +20 > Intratube pressure

> PRM15241 [237] 20
NO
YES
WAIT
LRDY
= OFF
= ON
ALM4081 [681]
NO
HV = ON
YES
Alarm 2 monitor
treatment start
LRDY
PSS 18
PSRDY
RFHV
PTLP
= OFF
= SET
= ON
= ON
= ON
After RUN ON intratube pressure reaches that of PRM15240 [235] and

gas pressure control begins. Then pressure shifts from the value of
PRM15240 [235] to that of PRM15241 [237], which is the pressure for
discharge start. Gas pressure control begins and AC 200V is supplied to
DC units. Forty five sec after the beginning of gas pressure control,
intratube pressure must be equal to the value PRM15241 [237] within
the error of 20. If not so, alarm 4081 [681] appears.
WAIT=OFF
LRDY=ON
Waiting signal for LRDY is off.

Discharge preparation completion signal is on by which
HV ON becomes ready.
458
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
HV=ON
When HV is turned on, laser can proceed to the next

sequence. HV ON can either be done in manual mode or
automatic mode using PMC.
LRDY=OFF When HV is turned on, LRDY becomes off.
PSS18=SET This is to select power units and usually is sent to the
units selected by PRM15025 to 15028 [201 to 203]
PSRDY=ON This is the signal to make DC unit ready, and is sent to
the units selected by PSS18.
RFHV=ON
DC voltage is supplied to RF unit from DC unit.
3
BIAS COMMAND
0 PRM15220 [247]
PRM15220 [247] WAIT
Tube
voltage < PRM15221 [248]
YES
NO
ALM4066 [666] display
GAS PRESS CONTROL

PRM15241 [237] PRM15242
15243 [236]
PRM15242, 15243[236]100
< PRM15242, 15243[236]
< PRM15242, 15243[236]+100
YES
BIAS COMMAND
PRM15220 [247] PRM15223 [250]
NO
ALM4078
[678]
In order to begin discharge, power command is increased in ramp mode

by BIAS COMMAND. This ramp input is clamped by the value of PRM
15220 [247] (maximum bias command in discharge start). The time
required to reach peak value is 6 sec. During this time discharge takes
place. Intratube voltage decreases, upon discharge start, and then takes
a constant value. The BIAS COMMAND after reaching peak is retained
for the time designated by PRM15222 [249] (discharge start waiting
time). Then the comparison is made between intratube voltages and
PRM 15221 [248] (discharge start voltage). If the monitored voltage is
lower than PRM15221 [248], discharge is confirmed. When this normal
459
IN LASER OSCILLATOR
APPENDIX
B70115EN/03
discharge is confirmed, BIAS COMMAND is changed automatically

from PRM15220[247] to PRM15223 [250] (BIAS COMMAND). If all
the tubes are confirmed normal discharge, intratube pressure is changed
from PRM15241 [237] to PRM15242, 15243 [236] (intratube pressure
in base discharge).
4
NO
PRM1500 bit 4 [200 bit 4]
YES
CHECK COMMAND POWER ON
Wait for 180 seconds
PRM15204 [241] = Pc/Pa 1024
PRM15204 [241] >

PRM15203 [240]
NO
YES
PRM15204 [241] > PRM15203 [240]
COMMAND POWER OFF
LSTR = ON
Enables discharge
PRM 15000 bit 4 = 1

In the setting of doing power calibration, the following sequences
proceed. In the setting of not doing power calibration, laser enters
immediately oscillation preparation completion (LSTR) state.
CHECK COMMAND POWER ON
In the setting of power calibration, power command designated by
PRM15200 to 15201 [230 to 232] (calibrated power) is given. Using
monitored power 3 min after the command, PRM15204 [241] is
obtained as follows.
PRM15204 [241] = Pc (power command)/Pa (real power) 1024
Example) Pc=2000W, Pa=1900W and PRM No. 241=2000/1900
1024 = 1077
460
B70115EN/03
APPENDIX
IN LASER OSCILLATOR
The result is compared with PRM15203 [240] (power calibration

limit). When PRM15204 [241] exceeds PRM15203 [240], the former
is clamped by the latter.
LSTR=ON Oscillation preparation completion signal is on.
Here oscillation in both manual and programing mode becomes
possible.
461
F. REFIXING AND REPLACING

GAS TUBE
APPENDIX
B70115EN/03
REFIXING AND REPLACING GAS TUBE
Replacing both of polyethylene and copper tubes is the same. Take care
only for the combination between tube materials and ferrule materials.
Polyethylene tube : nylon ferrule (back, front)
(A98L00040348/2N : 1/4)
(A98L00040348/3N : 3/8)
(A98L00040348/4N : 1/2)
Copper tube : brass ferrule (back, front)
(A98L00040348/2B : 1/4)
(A98L00040348/3B : 3/8)
(A98L00040348/4B : 1/2)
Take care also not to introduce dust into laser because exposure to ambient
air is inevitable.
462
B70115EN/03
F.1
REFIXING TUBE

GAS TUBE
APPENDIX
1 Loosen tube fixing nut.

Make sure to hold the fitting base with wrench.
2 Remove tube.
Removed tube is accompanied by ferrule as shown in Fig. F.1. Make
sure that neither of tube nor ferrule is contaminated with dust. When
contaminated, wipe them with clean and soft cloth.
Nut
Back feffule
Tube
Front ferrule
Fig. F.1 Removing/remounting the gas tube
3 Fasten tube.
i) Push tube so that the front ferrule fastened to tube contacts sealing
surface of the fitting.
ii) Rotate nut with finger as tight as possible.
iii) Holding the fitting base with wrench, rotate the nut with wrench by
1/4 rotation.
463

GAS TUBE
F.2
REPLACING TUBE
APPENDIX
B70115EN/03
1 Cut the tube perpendicular to its length, then mount new ferrules on
the tube.
Referring to Fig. F.1, mount fixing nut, back ferrule, and front ferrule
onto tube.
Here make sure not to introduce dust into tube and ferrule. If dust
entered, wipe with soft and clean cloth.
NOTE
Old fixing nut can be used. However, only new ferrules can
be used. Otherwise it leads to vacuum leakage.
2 Mount tube. In fixing nut, hold fitting base with wrench.
3 Fasten tube.
i) Push tube so that the front ferrule contacts sealing surface of fitting.
ii) Rotate nut with finger as tightly as possible.
iii) Holding the fitting base with wrench, rotate nut with wrench by 1/4
rotation.
464
B70115EN/03
APPENDIX
G. REFIXING AND REPLACING

WATER TUBE
REFIXING AND REPLACING WATER TUBE
For brass and stainless steel tubes, be careful to make proper selection of
fitting material and structure.
Here make sure not to wet inside of apparatus in draining and removing
tube.
465

WATER TUBE
G.1
REFIXING TUBE TO
BRASS FITTING
APPENDIX
B70115EN/03
1) Loosen tube fixing nut.

Make sure to hold the fitting base with wrench.
2) Remove tube.
a) In case of brass fitting:
Removed tube is accompanied as shown in Fig. G.1 by plastic
sleeve.
Nut
Tube
Plastic sleeve
Fig. G.1 Removing/remounting the water tube
b) In case of stainless steel fitting:

Removed tube is not accompanied by sleeve. Make sure not to
contaminate tube with dust. If contaminated, wipe with soft and
clean cloth.
3) Remount the tube.
a) In case of brass fitting
Push the tube into the fitting until the sleeve on the tube butts
firmly against the sealing surface of the fitting.
b) In case of stainless steel fitting
When the tube is filled with a sleeve, it is remounted in the same
way as when using a brass fitting. If the tube does not have a
sleeve, however, trim 3 mm from the end of the tube, then push it
into the fitting until it stops.
Fixing the tube without first trimming the end may cause water
leakage. Also, be careful not to trim the tube excessively.
4) Rotate nut with finger as tight as possible.
a) In case of brass fitting
Holding fitting base with wrench, rotate nut with wrench by 1 and
1/2 rotation.
b) In case of stainless steel fitting
Holding fitting base with wrench, rotate nut with wrench so that
nut contacts fitting.
466
B70115EN/03
G.2
REPLACING TUBE
APPENDIX

WATER TUBE
1) (a) In case of brass fitting

Mount a new sleeve on the tube.
(b) In case of stainless steel fitting
If a sleeve is necessary, mount a new sleeve on the tube. If no
sleeve is necessary, insert the tube as is.
In mounting sleeve, refer to Fig. G.1 and follow the order shown
in the figure.
Here make sure not to introduce dust into sleeve and tube. If
contaminated, wipe with soft and clean cloth.
NOTE
Old nut can be used but only new sleeve can be used.
Otherwise there may occur water leakage.
2) Mount tube and fasten it.
In fixing, hold fitting base with wrench. Follow the procedures of Sec.
G.1 3), 4) in fixing.
467
H. GLOSSARY
APPENDIX
B70115EN/03
GLOSSARY
Name
Meaning
Access panel
That protective component of a housing or

enclosure which, when removed or shifted, can
cause exposure to laser radiation
AEL Accessible
emission level
Maximum accessible emission level set up for each

class of laser products
Alighment
Optical axis adjustment
Aperture
Iris, or stop
Beam
Aggregate of unidirectional, diverging, or conversing

rays
Beam diameter
Distance between two symmetrical points in a cross

section of a beam where the power per unit area is
86.5% of the maximum power per unit area
Beam divergence
Angle through which a beam spreads
Burn pattern
Laser beam mode pattern generated on a plate such

as an acrylic plate for confirmation purposes
Circular Polarization
Polarization in which a plane of polarization rotates

about the axis along which the light progresses and
does not have directivity; an electric or magnetic
field based on circular polarization has a constant
intensity.
CO2 laser
Laser that uses a carbon dioxide gas as a laser

medium
CW Continuous wave
Continuously radiated laser output
Diode Laser
Laser that uses a semiconductor as an exciting medium
Discharge excitation
Realization of inverted population by means of discharge
Enhanced pulse
Pulse peak output, greatly amplified relative to CW

rated output
Excitation
Transition of atoms or molecules to a higher energy

level by supplying them with external energy
Exposure time
Duration through which laser radiation is emitted
Fast axial flow laser
Laser in which gas flows rapidly in the same direction as the laser beam
468
H. GLOSSARY
APPENDIX
B70115EN/03
Name
Meaning
Feedback
Corrective action in which a quantity to be controlled

is compared with a target value by feeding part of an
output signal to the input through a specially created
closed loop so that the quantity to be controlled
matches the target value
Laser
Device for generating light by stimulated emission
Laser controlled area
Area in which activities are controlled or monitored

for protection from hazards resulting from
laser radiation
Laser mirror
Reflecting mirror used in a laser resonator
Laser safety officer
Person having sufficient knowledge about evaluation

and management of hazards of lasers and in charge
of safety management of lasers
Laser safety standard
Standard to protect human bodies from hazards resulting from laser beams in view of use of lasers and
about laser products for sale
Linear polarization
Polarization in which a plain of polarization is at a

constant angle with the axis along which the light
progresses
Maintenance
Action taken by a user to preserve normal operation

of a product, such as adjustment or other measures
specified in documents created by the manufacturer
for users
Mode
State of a resonant system in which an electromagnetic field has a specific distribution
MPE : Maximum
permissible exposure
Maximum laser radiation level that can be radiated

onto human bodies without harmful influence to
them in an ordinary environment
Muximum output
Maximum radiation power or maximum radiation

energy per pulse that a laser product outputs in all
directions where there is a hazard of exposure in
view of operational capacity in every area at any
point of time after the production of the laser product
Operation
Laser products action covering all intended

functions, not including maintenance or service
Optical resonator
Device in which stimulated emission of light is used

for a laser and which consists of a pair of reflecting
mirrors facing each other
Parameter
Variable that is assigned a given value for a specific

purpose and indicates that purpose
Phase
Amount representing a positional relationship

between two adjacent highest or lowest points on a
wave
Power density
Energy per unit area
469
H. GLOSSARY
APPENDIX
Name
B70115EN/03
Meaning
Protective housing
Laser product housing or its part designed to protect

humans from exposure to a laser beam exceeding
an accessible emission level or strong collateral
radiation
Pulse duration
Time interval between the points at which an instantaneous value on the leading and trailing edges is
half the peak pulse amplitude
Pulse duty
Ratio (%) of a duration in which a pulsating laser

output is on, to its entire cycle
Pulse frequency
Repetition frequency at which pulsating laser beams

are radiated from an oscillator
Pulse laser
Laser that outputs energy in the form of a single

pulse or a pulse train
Pulse output
Laser output radiated in the form of a pulse train
Radian
Measurement unit of angle; 1 radian equals 360/2p.
Radiant energy
Energy emitted, transmitted, or received (measured

in joules, or J)
Safety interlock
Device combined with the protective housing of a

laser product to stop its operation automatically
when part of the housing is removed
Sequence
A succession of steps carried out in a prescribed

order
Stimulated emission
Emission of light stimulated by incident light and

having the same frequency, phase, and polarization
state as the incident light
Target
Jig used to radiate and position a laser beam
Threshold
Physical quantity necessary to generate laser

beams
470
Index
B70115EN/03
Connection of cooling water pipes, 108

Control sequences in laser oscillator, 441
Adjusting the beam center of the laser diode beam

superimposed on the CO2 laser beam, 354
Cooling water, 87
Cooling water piping, 194
Adjusting the diameter of the laser diode beam, 354

Adjusting the exhaust control unit (adjusting the laser gas
consumption), 260
Adjusting the flow sensor of the C2000C, C3000D, C4000A,

and C6000B, 264
Adjusting the inverter (A90L00010382/C: model name:
HVCVAH2), 248
Daily inspection, 111
Adjusting the inverter (A90L00010464/CE and 0465/CE:

model name: JH300), 251
Details of checking, 79
Data items displayed on the diagnosis screen, 171
Details of maintenance, 114
Adjusting the water flow sensor for C1500B, C2000B, and

C3000C, 262
Details of safety circuit, 101
Alarm level of laser PSU, 243
Discharge aging, 265
Alignment of the beam folding unit, 356
Display of fluctuating laser output on CRT, 160
Alignment of the laser diode, 354

Alignment of the resonator (maximum power method), 341
Alignment procedure at mirror cleaning time, 344

Alignment procedure during installation after transportation,
343
Electrical cables, 108

Electrical connection, 95
Antifreezing agent, 93
Electrical connections, 187
Applicable models, 3
Electromagnetic contactor of vane pump trips thermally., 161
Automatic aging function, 421
Emergency stop button, 43

Error code list, 383
Error messages and countermeasures, 135
Excessive laser gas consumption, 162
Basic discharge adjustment, 235
Exhaust pump filter, 119

Exhaust pump oil, 119
Exhaust system filter, 121
External view, 363
C1500B (with a trigger electrode), C2000C, C3000D, 238

C1500B (without a trigger electrode) (step 1), 235
C2000B (step 1), 235

C2000B, C3000C (step 2), 236
FANUC laser C series specifications, 379
C3000C (step 1), 236
Fine adjustment of VR11 and VR13, 240
C4000A, 238
Fire, 20
C6000B, 236
Checking before adjustment, and setting, 233
Checking the IF PCB signals, 170

Checking the jumper pins (FS16L, 16iL), 170
Gas pipe, 94
Chemical cleaner, 92
Gas piping, 109, 202
Cleaning and replacing the folding mirrors, 336
Glossary, 462
Cleaning and replacing the output coupler, 330

Cleaning and replacing the rear mirror, 334
Cleaning and replacing the zeroshift mirror and circular

polarization mirror, 339
High temperature, 21
Cleaning optical parts, 325
High voltage, 12
Completion of adjustment, 241
Highfrequency inverter, 248
Component details, 53
Highfrequency inverter alarm display, 162
Connection, 108
i1
INDEX
B70115EN/03
Obtaining a maximum power, 345

Optical axis adjustment, 341
Indication of state by means of self diagnostic function, 171
Organization of the manual, 2
Input unit, 211, 273
Oscillation sequences flow chart, 450
Installation, 66
Oscillator connections, 87, 186
Installation procedure, 67
Outline of laser oscillation sequences, 442
Interunit connections (C3000C only), 108

Intermediate PCB B, 228
Internal structure, 44
Intratube gas pressure control sequences, 444
Packing for transportation, 76

Parameters, 385
Parameters for assist gas pressure and time setting, 402

Parameters for constant optical path length control, 435
Key control, 42
Parameters for contouring conditions, 393

Parameters for discharge, 410
Parameters for discharge tube selection, 392
Parameters for edge machining conditions, 394
Laser beam, 7
Parameters for enabling/disabling various functions, 386
Laser gas, 94
Parameters for gas control (1), 412
Laser gas mixer function, 437
Parameters for gas control (2), 439
Laser gas specification, 94
Parameters for highspeed piercing conditions, 397
Laser optical system, 324
Parameters for highly reflective material alarms, 416
Laser oscillator status display (FS0L), 180
Parameters for laser maintenance timing indication functions,

405
Laser oscillator status display (FS16L, 16iL), 173
Parameters for laser power/voltage drop, 417
Laser output just after switch on is low., 159
Parameters for piercing conditions, 396
Laser power supply alarm display, 157
Parameters for power control, 399
Laser power supply unit, 233
Parameters for power table setting, 419

Parameters for the oscillator, 406
Parameters for tracing (approach), 434
Parameters for tracing (detection), 426
Main breaker trips., 161
Parameters for tracing (displacement), 431
Maintenance, 110
Parameters for tracing (display), 428
Maintenance parts, 123
Parameters for tracing (feedrate command), 433
Major faults, 157
Parameters for tracing (integral processing), 429
Maximum output adjustment, 240
Parameters for tracing (phase compensation), 430
Measurement of voltage, 165
Periodic maintenance, 112
Measurement of voltage of DC power supply unit, 166
Phase relation, 165
Method of obtaining a maximum power by adjusting all

mirrors, 341
Power supply cannot be switched off using CRT/MDI switch.,

159
Power supply cannot be switched on using CRT/MDI switch.,
159
Preparation prior to shipment, 76
Pressure control unit, 229, 258
NCtooscillator connection and power supply cable

connection, 95
Pulse output test, 241
Nonfuse breaker for cooling fans, electromagnetic valves; and

stabilized power sources is tripping., 160
R
Refixing and replacing gas tube, 456
Refixing and replacing water tube, 459
Observing voltage of power line, 165
Refixing tube, 457
i2
INDEX
B70115EN/03
Refixing tube to brass fitting, 460
Responding to alarm messages on the screen, 136
Related manuals, 4
Removing cooling water, 77
Replacement procedures, 272

Replacing a discharge tube, 299
Safety enclosure (at your work station), 20
Replacing a fanassisted radiator, 300
Setting and adjustment, 232
Replacing a fun unit, 300
Setting the atmospheric pressure sensor, 258
Replacing intermediate PCB B, 292
Setting the gas supply pressure sensor, 258
Replacing the beam absorber, 305
Setting the power input compensation coefficient, 261
Replacing the dew sensor, 321
Shutter lock, 42
Replacing the exhaust control unit, 296
Specification of the cooling water, 91
Replacing the exhaust pump, 293

Replacing the flow sensor, 319
Replacing the FS0L interface PCB (A16B11100223) on the

oscillator side, 273
To use the laser oscillator safety, 5
Replacing the FS16L, FS16iL interface PCBs on the

oscillator side, 274
Toxic fume, 20
Replacing the highfrequency inverter, 309
Troubleshooting, 134
Replacing the input unit control PCB, 273
Troubleshooting procedure, 135
Replacing the laser power supply, 276
Tube voltage control sequences, 447
Replacing the matching box, 288
Turbo blower oil, 117
Replacing the power sensor unit, 301
Turbo PCB, 245
Replacing the pressure control unit, 295

Replacing the semiconductor laser, 321
Replacing the shutter mirror, 302
Replacing the shutter section, 302
Unit configuration, 210
Replacing the shutter switch, 302

Replacing the shutter unit, 302
Replacing the stabilized power supply, 273
Replacing the trigger electrode, 322

Replacing the turbo blower, 289
Warning Labels, 29
Replacing the turbo PCB, 292
Warning light (optional), 43
Replacing the water distribution unit, 310
Water flow sensor, 262
Replacing tube, 458, 461
Water treating agent, 92
i3
Apr., 2000
Jul., 1996
May, 1995
Date
03
02
01
Edition
D Correction of errors
D Addition of C3000C.
Contents
D Additional descriptions of C2000C, C3000D, C600B and

C4000A.
Edition
Date
FANUCLASER C series MAINTENANCE MANUAL (B70115EN)
Revision Record
Contents
No part of this manual may be

reproduced in any form.
All specifications and designs

are subject to change without
notice.

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GE Fanuc Automation

Computer Numerical Control Products

Warnings, Cautions, and Notes

Copyright 2000 GE Fanuc Automation North America, Inc.

ORGANIZATION OF THE MANUAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

7. OSCILLATOR CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186

ELECTRICAL CONNECTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 187

8. UNIT CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210

INPUT UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211

9. SETTING AND ADJUSTMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232

LASER POWER SUPPLY UNIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

10. REPLACEMENT PROCEDURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 272

10.11.1 Replacing a Fan Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

11. LASER OPTICAL SYSTEM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 324

PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS . . . . . . . . . . . . . . . . . . 386

PARAMETERS FOR CONTOURING CONDITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

E. CONTROL SEQUENCES IN LASER OSCILLATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . 441

OUTLINE OF LASER OSCILLATION SEQUENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

F. REFIXING AND REPLACING GAS TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 456

REFIXING TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 457

G. REFIXING AND REPLACING WATER TUBE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459

REFIXING TUBE TO BRASS FITTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460

This manual describes the maintenance of the FANUC LASER C series,

This manual is organized as described below.

This manual covers the following models :

FANUC LASERMODEL C1500B

FANUC LASERMODEL C2000B

FANUC LASERMODEL C2000C

FANUC LASERMODEL C3000C

FANUC LASERMODEL C3000D

FANUC LASERMODEL C4000A

FANUC LASERMODEL C6000B

FANUC Series 16LA

FANUC Series 16LB

FANUC Series 16iLA

FANUC LASER C Series OPERATORS MANUAL B70114EN

In this manual, the words Warning and Caution, corresponding to

: Notes provide supplementary information other than

C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B

Fig. 2.1 (f) The beam path in the cabinet of C4000A.

Fig. 2.1 (g) The beam path in the cabinet of C6000B.

Fig. 2.2.(d) The position of high voltage in C3000C(Front , Back , AUX )

D Detail of warning sticker

1) Warning logotype (C1500B)

3) Label for defeasible noninterlocked protective housing

4) Label for defeasible noninterlocked protective housing

5) Caution label for lifting

7) Label of noninterlocked protective panel

10) High voltage warning label

11) Supply voltage label

12) Label of overcurrent protective

13) Label of motor and transformer (C1500B,C2000B,C2000C)

13) Label of motor and transformer (C3000C)

13) Label of motor and transformer (C3000D)

13) Label of motor and transformer (C4000A)

13) Label of motor and transformer (C6000B)

14) Label of warning light

15) Maintenance label

16) Certification label

17) Shortcircuit interrupting capacity of main breaker

18) Caution label for lifting

To designer of laser processing machine

Fig. 3.1 (a) Block diagram (C1500B)