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Customer
Delphi Iasi
Machine nr.
HC301
Machine type
HTC-1200/4-Spu/1PS
SAT date
26-05-2011
Service level
platinum-extra
Service nr.
301.91/0005
Laurens Juhsz
Date of visit
February 2013
Printed:
15 Feb
2013
Page 1 of 18
SYS
Magnet conf.
NSN/SNS
S-N-S
N-S-N
S-N-S
N-S-N
SYS SYSTEM
APS AIR PRESSURE SYSTEM
APS
ok
BL CONTROL CABINET
BL
X Check if cabinet is clean.
ok
V
X
X
X
Check fans.
Check roof cooler, (set at 25C).
Check voltage monitor.
V
V
V
X
X
X
X
X
PLC
Do not reset PLC, call Hauzer (S-Eng or JVR) first.
Check if PLC modules are securely engaged
Check run led on CPU, and +5 and +24V leds on PS407.
Check error led and error message (if apply to), in case of any fault call HTC
Check USB connections.
Check modem
V
V
V
V
V
nok
Printed:
15 Feb
2013
nok
Page 2 of 18
X
X
X
X
X
X
X
X
X
X
X
PC
Check modem.
PC maintenance
(Citect)
Check printer
Check keyboard and mouse
Check cabinet temperature.
Check reading and writing of drives
Check monitor
Check if cabinet is clean. *1)
Check EM-stops and reset button.
Check USB ports.
Check alarm lights.
ok
V
V
V
V
V
V
V
V
V
V
V
nok
ok
V
V
V
V
V
nok
Information:
- Do not reset PLC, call Hauzer (S-Eng or JVR) first.
- External UPS system (UPS power supplied by customer to Hauzer machine).
- Hauzer paging system: no actions.
- No door filters.
Remarks:
*1) The PC cabinet was very dirty (full of dust). Advised customer to clean the PC-cabinet
more frequently.
X
X
Bias-diode module.
Check Bias-diode module (R-C-D circuit) at output BPS.
Check function UNI-BI-polar relays.
V
V
Information:
-
1x Bias 4018
Remarks:
Printed:
15 Feb
2013
Page 3 of 18
BV CATHODES
BV:
X Check cathodes.
X Check magnet plate.
X Check water connections, hoses (leakage, tightened etc.)
X Check cover switches.
Action Customer: Check during target replacement: isolation flange, gas-pipe, gasX
pipe holes, gas-pipe O-rings, dust , dirt.
Explain [Action Customer: Check during target replacement: isolation flange, gasX
pipe, gas-pipe holes, gas-pipe O-rings, dust , dirt.] to customer.
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
Cathode Coils
Check coil power supplies sv/ av on computer and on machine.
Check cathode coils.
Check water connections, hoses (leakage, tightened etc.)
ok
nok
V
V
V
V
V
V
V
V
V
V
PLS
Check sv and av on machine and computer
PI source : voltage, current (DC)
PI support: power, voltage, current (AC)
PI filament: resistance
Check both filaments
Check cover switch
Check ignition circuit,
Check ignition feed through.
Check PLS-anode: isolation (megger 1000V), surface, damage, A/O coating.
Check ignition wire (robe).
Check anode-feed through.
Check for water leakage (plasma source and anode)
Check anode voltage machine PC.
Check bottom-shield (floating), pump shield (floating) and top-shield (non floating).
Check PLS chambers, cleaning is customer expected.
Serial switch.
Check serial switch (ARM-20/15C)
V
V
V
V
V
V
V
V
V
V
V
V
Information:
1x ARM-20/15C
Remarks:
Printed:
15 Feb
2013
Page 4 of 18
CAB - CABLING
CAB
X Check cables
X Check electrical connections.
Remarks:
ok
V
V
nok
ok
V
V
V
V
V
nok
Information:
- 2 x DC3016; 1xDC4016 1 x PMP16
- 4 x Kniel. 140V-10A.
Remarks:
Printed:
15 Feb
2013
Page 5 of 18
FRM FRAME
FRM
X Check frame covers.
X General check
Remarks:
Printed:
15 Feb
2013
ok
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
nok
ok
V
V
nok
Page 6 of 18
Printed:
15 Feb
2013
Ok
V
V
V
V
V
V
V
V
V
V
V
V
V
V
Page 7 of 18
nok
HC HAUZER COATER
HC
X Check/change lip seals.
X Check shielding.
X Check vacuum chamber
X Check cover switches.
X Check door switch door 1+2
X Check if bolds of door-hinges are tightened.
X Check position from table rail to shaft
X Check horizontal position substrate table, rails and end-stops.
X Check doorstop door 1 and 2
X Check door-locks.
Cool plates.
X Check cool plates.
X Check radiation shield. Damages, if installed correct, clean.
Remarks:
ok
V
V
V
V
V
V
V
V
nok
ok
V
V
V
V
V
V
V
V
V
V
nok
V
V
Printed:
15 Feb
2013
Page 8 of 18
HCR - HEATERS
HCR
Check if HTR nut is tightened.
X Visually check Heaters.
X Check heating of each heater (heater cleaning).
X Check heater-plates.
X Check (2) stationary thermocouples (values, visual).
ok
V
V
V
V
V
nok
Thyristor.
X Check regulating of thyristor.
Remarks:
HCS SHUTTERS
HCS:
X Check if shutters open and close correct.
X Check if shutters move correct
X Check feedback signals
X Check pneumatics valves
X Check coupling between actuator and rotary feed through
X Check shutter stops.
X Check view port shutters.
X Check view port protection glasses *1)
Remarks
*1) Advised customer to have protection glasses on store.
ok
V
V
V
V
V
V
V
V
Printed:
15 Feb
2013
nok
Page 9 of 18
ok
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
nok
Information:
Torque limiter: Mayr type 3; setting: 150Nm.
After every activation the limiter has to be resetted again by a lever.
Remarks:
*1) Change gearbox oil in February 2014.
Printed:
15 Feb
2013
Page 10 of 18
ok
V
nok
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
V
Information:
3 x Pfeiffer Hipace 2300 U turbo pumps.
Gas ballast valve is part of pump group.
Remarks:
*1) The roughing pump (DUO255) is in poor condition an overhaul to the Pfeiffer work shop
is necessary. Advised the customer to do an overhaul of the roughing pump and have a
spare roughing pump in store at the Delphi Iasi plant. Having a spare Roughing pump
saves production down time. It is advisable to change the oil and dust filters of the
Roughing pump every 3 months. (See also remarks in the Pfeiffer document attached to
this HTC document.)
*2) The Roots pump (Octa 1000) is filled at the engine side with P3 oil and at gearing
side with D1 (note: D1 = Androl555 oil).
*3) Showed the customer how to refill oil and do maintenance on the Roughing- Rootsand Turbo pump.
*4) (on going issue of the deviation of the Baratron) Replaced the temporary MKS627
Baratron by a new Baratron MKS120A. For one week the Baratron MKS120A values
remains reliable but then after one week they are not any more. The problem with the
Baratron can be related to vibrations generated by the Roughing pump. (Note: the
software need to be changed when you replace a Baratron MKS120A to MKS627
please Contact HTC when you want to do this!) Further action on the Baratron issue
will be done by HTC.
M:\Customer Service\servicecontracts\Delphi\Delphi Iasi\HC301\Training and
maintenance program 2012\Service checklist 301.91.0005-HC301,
FEB.2013.doc
Date
1-2-2013
Revision
0
Signed
LJH
Printed:
15 Feb
2013
Page 11 of 18
PRC PROCESS
PRC
X After every service visit run process
Remarks:
(on going issue) Customer has still hardness problems (not every batch is within the limits).
Customer did a test with a bottle of acetylene gas connected close to the machine.
The result of this test was that the harness was within the limits.
PCR PRODUCTCARRIER.
PCR
Check PCR-recipient catch: lock, unlock, handle.
Check table-rail: horizontal, water leveled.
Check table-blocking mechanism on PCR table-rail.
Check table-stop on rail.
Check hydraulic system: up/ down movement, rollers, oil-(level), high-pressure hose.
Check table weight supports: magnets, adjustment, and safety pin.
Check if PCR rolls correct.
Check breaks.
General check.
ok
Ok
V
V
V
V
V
V
V
V
V
nok
V
nok
Information:
No maintenance only a general check.
Remarks:
ok
V
nok
ok
nok
Information:
No maintenance only a general check.
Remarks:
UTI - UTILITIES
UTI
The utilities should be according Hauzer specification and are to customers
X
responsibility.
See utility list.
Information:
- 3 x 400VAC 10%, +PE, 50Hz.
Remarks:
Printed:
15 Feb
2013
Page 12 of 18
SYSTEM DESCRIPTION
APS
CWS
C/W
Cold
UTI
VFS
Bar
Instr. list
5.5 -6.5
Actual
7-Feb2013
6,2
Bar
1.2-9
5,1
Bar
C
C
L /min
L /min
L /min
L /min
L /min
L /min
L /min
Bar
Bar
C
C
L /min
L/min
1.2-9
13-20
15-60
>5
>32
>25
>25
>25
>25
>25
4,5-6
1,5-2
13-20
13-20
>15
>1,5
1,2
15,7
16,4
9,5
92,8
34,8
34,8
33,3
36,3
42,4
5,1
1,9
15,7
17
25,9
4,4
C
Bar
12- 15
3-5
15
4
m Bar
mB.ltr/
sec.
<5E-6
2,34E-6
<5E-4
3,48E-5
Air pressure
T Chiller
P city water
[234]
Printed:
15 Feb
2013
Page 13 of 18
HC301
301.91.05
FEB 2013
SYS HTC.nr.
Description
Amount
on
machine
Amount
Amount for
used
Periodical
during
maintenance
visit
Remarks
BL
1
PLC-Battery.
S7-300 no
battery installed.
filter cartridge
AMA filter
Aquastop is
removed.
Open the plug
4
4
4
2
2
2
1
1
1
8
4
4
0
1
1
0
1
1
0
0
4
4
0
1
1
0
1
1
0
0
CWS
1
2
33623
35330
Caleffi De-aerator
34877
Cath.gas vlv's
34878
Cath.gas vlv's
34879
Cath.gas vlv's
34877
34878
34879
34877
34878
34879
10
6172
Gasfeedthrough O-ring
Cath.(4) gasfeedthro
33661
GFW
SUB
1
gear box
Printed:
15 Feb
2013
Page 14 of 18
HC301
301.91.05
FEB 2013
FVS
HTC.nr.
Description
3387
30909
26451
35848
Roughing valve
35849
Roughing valve
35850
Roughing valve
34877
VAT DN 16 Gate-seal
34878
34879
10
30906
Backing valve
11
30907
Backing valve
12
26450
Backing valve
13
36726
14
36725
15
36724
16
34898
17
34897
18
35484
19
34877
20
34878
21
34879
22
11406
Printed:
15 Feb
2013
Amount for
Amount
Periodical
on
machine maintenance
Amount
used
during
visit
Remarks
Page 15 of 18
3
3
1
1
1
1
1
1
1
3
3
0
1
1
0
1
1
0
3
3
0
1
1
0
1
1
0
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
0
1
1
0
1
1
0
1
1
0
1
1
1
0
0
0
1
1
1
0
1
1
0
1
HC301
301.91.05
FEB 2013
VFS
HTC.nr.
Description
23
24
14908
36592
26
36720
Amount
used
during
visit
Remarks
Main+Rough.vent.filter,
For 5 - 6 x HVV's VAT
12.1 extensive maint.
1
2
1
0
1
0
Amount
1
2
3
4
5
Used parts but parts are not listed on spare part list (e.g. from extra sn'r).
1
2
3
4
5
35529
35527
26451
2
2
CWS
High vacuum valve 1+2
Printed:
15 Feb
2013
Page 16 of 18
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
L. Juhsz
Date
3-Feb-2013
4-Feb-2013
5-Feb-2013
6-Feb-2013
7-Feb-2013
8-Feb-2013
11-Feb-2013
12-Feb-2013
13-Feb-2013
14-Feb-2013
15-Feb-2013
17-Feb-2013
Hours
Travel hours
9
10
11
9
10
10
10
12
8,5
9,5
10
Printed:
15 Feb
2013
Page 17 of 18
Service
number:
Date:
301.91/0005
15-Feb- 2013
Coating unit:
HC301
Name / adress
customer:
Name
customer
representative:
Name
Hauzer
Engineer:
Signature
customer
representative:
Signature
Hauzer
Engineer:
Laurens Juhsz
Printed:
15 Feb
2013
Page 18 of 18