Instruction manual

EL-FLOW Base series

Mass Flow Controllers

Doc. no.: 9.17.061J Date: 18-12-2015

ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.

BRONKHORST

Eventhoughcarehasbeentakeninthepreparationand
publicationofthecontentsofthismanual,wedonot
assumelegalorotherliabilityforanyinaccuracy,mistake,
misstatementoranyothererrorofwhatsoevernature
containedherein.Thematerialinthismanualisfor
informationpurposesonly,andissubjecttochange
withoutnotice.

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TABLEOFCONTENTS

GeneralProductInformation..............................................................................................................4
1.1
Introduction.......................................................................................................................................................4
1.2
IntendedUse.....................................................................................................................................................4
1.3
Symbols..............................................................................................................................................................4
1.4
ProductSupportReferences..............................................................................................................................4
1.5
Warranty............................................................................................................................................................5
1.6
ProductDescription...........................................................................................................................................5
1.7
OperatingPrinciples..........................................................................................................................................8
1.8
Maintenance......................................................................................................................................................9
2 InstallationInstructions....................................................................................................................10
2.1
Introduction.....................................................................................................................................................10
2.2
Unpackingandinspection...............................................................................................................................10
2.3
Ratedpressuretestinspection........................................................................................................................10
2.4
Instrumentmounting.......................................................................................................................................10
2.5
Fluidicconnections..........................................................................................................................................11
2.6
Inlinefilterusage............................................................................................................................................11
2.7
Pipingrequirements........................................................................................................................................11
2.8
Electricalconnections......................................................................................................................................12
2.9
Powerandwarmup........................................................................................................................................12
2.10 Pressuresupply/Startup...............................................................................................................................12
2.11 Systempurging................................................................................................................................................13
2.12 Zeroing.............................................................................................................................................................13
3 BasicOperation................................................................................................................................14
3.1
General............................................................................................................................................................14
3.2
Analogoperation.............................................................................................................................................14
3.3
BasicRS232Flowbusoperation.......................................................................................................................14
3.4
ModbusRS485operation................................................................................................................................15
3.5
Pushbuttonoperation....................................................................................................................................22
3.6
Microswitchuseforreading/changingcontrolmode....................................................................................23
3.7
LEDindications.................................................................................................................................................24
3.8
BasicParametersandProperties.....................................................................................................................25
4 AdvancedOperation........................................................................................................................27
4.1
ReadingandChangingInstrumentParameters...............................................................................................27
4.2
Usingothergassesthanspecified...................................................................................................................32
5 Troubleshooting...............................................................................................................................33
5.1
General............................................................................................................................................................33
5.2
LEDindications.................................................................................................................................................33
5.3
Troubleshootingsummarygeneral..................................................................................................................33
6 RemovalandReturnInstructions......................................................................................................35
7 Service.............................................................................................................................................36

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GeneralProductInformation
1.1 Introduction
ThisuserguidecoverstheELFLOWBaseSeriesmassflowcontrollersforgassesasshowninthepictures
below.Includedhereinisproductinformation,installationinstructions,operation,maintenance,
troubleshootingandtechnicalspecifications.

F201CB
8mln/min20ln/min

F201AB
20ln/min70ln/min

F202BB
70ln/min200ln/min

1.2 Intended Use

TheintendeduseofELFLOWBaseinstrumentsistocontrolgasflowratesofthespecifiedgasnotedon
theinstrumentlabel.Thegashastobeclean.
Theinstrumentscanbeusedforeither(fast)switchingorcontrollingaconstantflowrate.

1.3 Symbols

Importantinformation.Discardingthisinformationcouldcauseinjuriestopeopleordamagetothe
Instrumentorinstallation.
Helpfulinformation.Thisinformationwillfacilitatetheuseofthisinstrument.

Additionalinfoavailableontheinternetorfromyourlocalsalesrepresentative.

1.4 Product Support References

Instructions:
Operatinginstructionsdigitalinstruments,documentnr.9.17.023.
RS232interfacewithFLOWBUSprotocol,documentnr.9.17.027.

Technicaldrawings:
HookupELFLOWBase,documentnr.9.16.091
DimensionaldrawingF201AB,documentnr.7.15.1
DimensionaldrawingF201CB,documentnr.7.15.166
DimensionaldrawingF202BB,documentnr.7.15.170

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Thesedocumentscanbefoundat:
http://www.bronkhorst.com/en/downloads

1.5 Warranty
TheproductsofBronkhorstarewarrantedagainstdefectsinmaterialandworkmanshipforaperiodof
threeyearsfromthedateofshipment,providedtheyareusedinaccordancewiththeordering
specificationsandtheinstructionsinthismanualandthattheyarenotsubjectedtoabuse,physical
damageorcontamination.
Productsthatdonotoperateproperlyduringthisperiodmayberepairedorreplacedatnocharge.
Repairsarenormallywarrantedforoneyearorthebalanceoftheoriginalwarranty,whicheveristhe
longer.
Seealsoparagraph9oftheConditionsofsales.

Thewarrantyincludesallinitialandlatentdefects,randomfailures,andundeterminableinternal
causes.

Itexcludesfailuresanddamagecausedbythecustomer,suchascontamination,improperelectrical
hookup,physicalshocketc.

Reconditioningofproductsprimarilyreturnedforwarrantyservicethatispartlyorwhollyjudgednon
warrantymaybechargedfor.

BronkhorstHighTechB.V.prepaysoutgoingfreightchargeswhenanypartyoftheserviceisperformed
underwarranty,unlessotherwiseagreeduponbeforehand,however,iftheproducthasbeenreturned
collecttoBronkhorstHighTechB.V.,thesecostsareaddedtotherepairinvoice.Importand/orexport
charges,foreignshippingmethods/carriersarepaidforbythecustomer.

1.6 Product Description

1.6.1

General Description

AnELFLOWBasemassflowcontrollerconsistsofathermalmassflowsensor,alaminarflowelement
whichactsasabypass,asolenoidproportionalcontrolvalveandadigitalelectronicPCboardforPID
controlandcommunication.
9pin SubD
Connector

PC-Board
Control Valve
Mass Flow
Sensor

Laminar Flow
Element
Body

Therearethreedifferentbasicmodelsfordifferentflowrates(F201CB,F201ABandF202BB).
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Withineachmodelthereisvariationinlaminarflowelementsize,orificesizeandsealingmaterial.
Thesevariablesareoptimizedforthecustomersgasandprocessconditions.

1.6.2

Model Key

Example:F201CB200ABD00V

Range:
200ml/min
Analogoutput: 010Vdc
Seals:
Viton

1.6.3

Seals

TheinstrumentisfittedwitheitherVitonorKalrezseals.Whichsealingmaterialisusedisshowninthe
lastcharacterofthemodelkey.
Bronkhorsthasgatheredamaterialcompatibilitychartfromanumberofsourcesbelievedtobe
reliable.However,itisageneralguideonly.Operatingconditionsmaysubstantiallychangetheaccuracy
ofthisguide.Thereforethereisnoliabilityfordamagesaccruingfromtheuseofthisguide.
Thecustomersapplicationwilldemanditsownspecificdesignortestevaluationforoptimum
reliability.

Page6

CheckifthesealslikeOrings,plungerandpackingglandofcapillaryaresuitablefortheusedgasand
process.

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1.6.4

Calibration

ELFLOWBaseinstrumentsareAircalibrated.Bronkhorstcertifiesthatallinstrumentsmeettherated
accuracy.Theyhavebeencalibratedusingmeasurementstandardstraceabletothestandardsofthe
DutchMetrologyInstitute(VSL).

Thecalibrationisconvertedtothecustomersgasandconditionsusingadetailedconversionmodel.
Thisconversionaddsalevelofcalibrationuncertainty.

Thumbruleforcalculatingtheconversionuncertaintyistypical:

Uncertainty<2%xCF forCF>1

Uncertainty<2%/CF forCF<1

WithCFdefinedastheapproximateconversionfactor,whichcanbecalculatedwith:

CF

C p1 1

C p2 2

inwhich:

C pn

specificheat

densityatnormalconditions

(1)
(2)

calibrationfluid(Air)
customerfluid

CheckFLUIDATonhttp://www.fluidat.com
FLUIDATisacollectionofroutinestocalculatephysicalpropertiesofgasesandliquids.Theseroutines
aremadeavailableattheFLUIDATontheNetwebsite.

ELFLOWBaseinstrumentsarestandarddeliveredwithoutcalibrationcertificate.Calibrationcertificates
canbeorderedtogetherwiththeinstruments.Contactyourlocalsalesrepresentativeformore
information.

1.6.5

Features

EachinstrumentconsistsofanAnaloginterface,adigitalRS232interfaceandadigitalModBus/RS485
interface.Theanalogandthedigitalinterfacecanbeusedtogetheratthesametime.
AccordingtothepindesignationbothRS232andModbus/RS485areassignedtothesamepins.When
connectingthesepinstoeitherofthetwo,theinstrumentwillautomaticallydetectwhichprotocolto
use.

Digitaloperationaddsalotofextrafeatures(comparedtoanalogoperation)totheinstruments.
Suchas:
setpointslope(rampfunctiononsetpointforsmoothcontrol)
directreadingatreadout/controlmoduleorhostcomputer
severalcontrol/setpointmodes(e.g.purge/closevalve)
identification(serialnumber,modelnumber,devicetype,usertag)
adjustablecontrollersettingsforcustomcontrollerresponse

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1.7 Operating Principles

1.7.1

Thermal Gas Flow Sensor Principle

Thegasflowsensoroperatesonaprincipleofheattransferbysensingthetemperaturedifference
alongaheatedsectionofacapillarytube.Partofthetotalflowisforcedthroughthecapillarybymeans
ofalaminarflowelementinthemainstreamgeneratingapressuredifference.
Thedesignofthelaminarflowdeviceissuchthatflowconditionsinboththecapillaryandlaminarflow
devicearecomparable,therebyresultinginproportionalflowratesthroughthemeter.ThedeltaT
sensedbytheupstreamanddownstreamtemperaturesensorsonthecapillarydependsontheamount
ofheatabsorbedbythegasflow.
Thetransferfunctionbetweengasmassflowandsignalcanbedescribedbytheequation:

Vsignal K c p m

Vsignal=outputsignal
cp =specificheat
K =constantfactor
m=massflow

Thermalsensorinabridgeconfiguration

Thetemperaturesensorsarepartofabridgecircuit.Theimbalanceislinearisedandamplifiedtothe
desiredsignallevel.

1.7.2

Bypass Principle

ThemeasurementpartofanELFLOWBaseconsistsofathermalsensorandalaminarflowelement
(LFE).Alaminarflowelementconsistsofastackofdiscswithprecisionetchedflowchannels.Theflow
througheachchannelisproportionaltotheflowthroughthesensor.Inthisway,byaddingmoreorless
laminarflowdiscs,thetotalflowrateofaninstrumentcanbeadjustedwhileusingthesamesensor
flowrate.
Ingeneralinstrumentswiththesesensorsmaybemountedhorizontal,aswellasinaverticalposition,
atlowoperatingpressures.

Exampleofa50mln/minmeasurementpart
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1.7.3

Solenoid Valve Principle

ThecontrolvalveusedintheELFLOWBaseseriesisastandard,directoperatedcontrolvalve.Itisa
normallyclosedsolenoidvalve.Theplungerisliftedbytheforceofthemagneticfieldofthecoil.The
diameteroftheorificeundertheplungerisoptimisedforthecustomersapplication.

flo wcontrol
val ve

Thecontrolvalveisnotdesignedtoprovidepositiveshutoff.Itisrecommendedtoinstallaseparate
shutoffvalveinthelineifsorequired.Alsopressuresurges,asmayoccurduringsystempressurisation
mustbeavoided.

1.8 Maintenance
Noroutinemaintenanceisrequiredtobeperformedonthecontrollerswhentheyareusedwithclean
gas.
Unitsmaybeflushedwithclean,dryinertgas.

Incaseofseverecontaminationitmayberequiredtocleantheinsideoftheinstrument.Aftercleaning
arecalibrationisneeded.Bronkhorsthasatrainedstaffofservicemenavailable.Contactyourlocal
supplierforcleaningandrecalibrationoptions.

9.17.061

Iftheequipmentisnotproperlyserviced,seriouspersonalinjuryand/ordamagetotheequipment
couldbetheresult.Itisthereforeimportantthatservicingisperformedbytrainedandqualifiedservice
personnel.

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InstallationInstructions
2.1 Introduction
ThischapterdiscusseshowtopreparethesystemandinstallanELFLOWBasemassflowcontroller.

2.2 Unpacking and inspection

Checktheoutsidepackingboxfordamageincurredduringshipment.Shouldthepackingboxbe
damaged,thenthelocalcarriermustbenotifiedatonceregardinghisliability,ifsorequired.Atthe
sametimeareportshouldbesubmittedtoyourdistributor.

Carefullyremovetheequipmentfromthepackingbox.Verifythattheequipmentwasnotdamaged
duringshipment.Shouldtheequipmentbedamaged,thenthelocalcarriermustbenotifiedatonce
regardinghisliability,ifsorequired.Atthesametimeareportshouldbesubmittedtoyourdistributor.

Refertochapter6,RemovalandReturnInstructions,aboutreturnshipmentprocedures.

BeforeinstallinganELFLOWBaseitisimportanttoreadtheattachedlabelandcheck:
Flowrate
Fluidtobemeasured
Upanddownstreampressures
Input/outputsignal
Temperature

Donotdiscardspareorreplacementpartswiththepackingmaterialandinspectthecontentsfor
damagedormissingparts.

2.3 Rated pressure test inspection

EachELFLOWBaseispressuretestedtoatleast1.5timestheworkingpressureoftheprocess
conditionsstipulatedbythecustomer,withaminimumof8bar.

Pressuretestingsticker

Eachinstrumentisheliumleaktestedtoatleast2109mbarl/sHeliumoutboard.

ThetestedpressureisstatedontheflowcontrollerwithaREDCOLOUREDsticker.Checktestpressure
beforeinstallingintheline.
Ifthestickerisnotavailableorthetestpressureisincorrect,theinstrumentshouldnotbemountedin
theprocesslineandbereturnedtothefactory.

2.4 Instrument mounting

ThebottomsideofanELFLOWBaseconsistsoftwomountingholesforstablemechanicalfixationof
theinstrument.Refertothefollowingdocumentsforexactpositionofthemountingholes.

DimensionaldrawingF201AB,documentnr.7.15.165.
DimensionaldrawingF201CB,documentnr.7.15.166.
DimensionaldrawingF202BB,documentnr.7.15.170.

ThepreferredmountingpositionofELFLOWBasemassflowcontrollersishorizontal.Othermounting
positionsmayintroduceazeroshiftand/orlittlegasandpressuredependencyofthezerosignal.When
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mountinganinstrumentotherthanhorizontal,zeroingoftheinstrumentisadvised.Thezeroing
procedureisdescribedinchapter2.12.
Avoidinstallationincloseproximityofmechanicvibrationand/orheatsources.

2.5 Fluidic connections

ThefluidconnectionsofELFLOWBaseinstrumentsconsistofBSPPfemalethread.Theadapter
chambersareoptimisedfortheuseofSwagelokRStypeadapterscombinedwithAS013(70Sh)orings
forleaktightinstallation.

BronkhorsthighlyrecommendstheuseofSwagelokRStypestainlesssteeladapters,e.g.partnumber
SS40014RS.
Adapterscanbeorderedseparatelytotheinstruments.Contactyourlocaldistributorformore
information.

Alwayscheckyoursystemforleaks,beforeapplyingfluidpressure.Especiallyiftoxic,explosiveorother
dangerousfluidsareused.

2.6 In-line filter usage

Fluidstobemeasuredshouldbeabsolutelyfreeofdirt,oil,moistureandotherparticles.Fluidsthatare
heavilycontaminatedorcontainparticulatesaredetrimentaltoprecision.Ifliquidphasesenterthe
sensorchamber,thefunctionofthesensorandthemassflowcontrollermaybeimpaired.
Itisrecommendedtoinstallaninlinefilterorliquidseparatorupstreamoftheflowcontroller,andif
backflowcanoccur,adownstreamfilterisrecommendedtoo.Beawareofthepressuredropcausedby
thefilter.
Contactyourdistributorforfurtherinformation.

2.7 Piping requirements

Besurethatpipingisabsolutelyclean!

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DONOTinstallsmalldiameterpipingonhighflowrates,becausetheinletjetflowwillaffectthe
accuracy.
DONOTmountabruptanglesdirectoninandoutlet,especiallynotonhighflowrates.Atleast10pipe
diametersdistancebetweentheangleandtheinstrumentisrecommended.
DONOTmountpressureregulatorsdirectontheinletofgasflowmeters/controllers,butallowsome
metersofpiping(atleast25pipediameters).

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2.8 Electrical connections

2.8.1

Interface

ELFLOWBaseinstrumentscanbeoperatedbymeansof:

1.
2.
3.

Analoginterface(0...5Vdcor0...10Vdcor0...20mAor4...20mA)
RS232interfacewithFLOWBUSprotocol
RS485interfacewithModbusprotocol

AllaboveoperationoptionsarestandardavailableinELFLOWBaseinstruments.
AccordingtothepindesignationbothRS232andRS485areassignedtothesamepins.When
connectingthesepinstoeitherofthetwo,theinstrumentwillautomaticallydetectwhichprotocolto
use.Whensendingafrequentrequesttotheinstrument,itwillbecapableofrecognisingtheprotocol,
oncetheinstrumentdetectthisprotocol,itwillsendananswer.
Theinstrumentwillrememberthedetectedprotocolaslongastheinstrumentispowered.Thisauto
detectioncannotbeswitchedofforbypassed.

Forelectricalhookupdiagramsrefertodocument9.16.091,HookupELFLOWBase

Thisdocumentscanbefoundat:
http://www.bronkhorst.com/en/downloads

2.8.2

Power Supply

ELFLOWBasecontrollersarepoweredwith+15Vdcto+24Vdc.
Whenprovidingyourownpowersupplybesurethatvoltageandcurrentratingareaccordingtothe
specificationsoftheinstrument(s)andfurthermorethatthesourceiscapableofdeliveringenough
powertotheinstrument(s).RefertoHookupELFLOWBase,documentnr.9.16.091,formoredetails.

Bronkhorstrecommendstheuseoftheirstandardcables.Thesecableshavetherightconnectorsand
iflooseendsareused,thesewillbemarkedtopreventwrongconnection.

Whenusingothercables,cablewirediametersshouldbesufficienttocarrythesupplycurrentand
voltagelossesmustbekeptaslowaspossible.Whenindoubt:contactyourdistributor.
ELFLOWBaseinstrumentscarrytheCEmark.ThereforetheyhavetocomplywiththeEMC
requirementsasarevalidfortheseinstruments.HowevercompliancewiththeEMCrequirementsisnot
possiblewithouttheuseofpropercablesandconnector/glandassemblies.

Whenconnectingthesystemtootherdevices(e.g.toPLC),besurethattheintegrityoftheshieldingis
notaffected.Donotuseunshieldedwireterminals.

2.9 Power and warm-up

Beforeswitchingonpower,checkifallconnectionshavebeenmadeaccordingtothehookupdiagram.
Itisrecommendedtoturnonpowerbeforeapplyingpressureontheinstrumentandtoswitchoff
powerafterremovingpressure.Checkfluidconnectionsandmakesurethereisnoleakage.Ifneeded
purgethesystemwithaproperfluid.Onlypurgingwithgasesisallowed.Turnonpowerandallowat
least30minuteswarmingupandstabilizing.Duringwarmupperiod,fluidpressuremayeitherbeonor
off.

2.10 Pressure supply / Start-up

Whenapplyingpressuretothesystem,takecaretoavoidpressureshocksinthesystemandincrease
pressuregraduallyuptotheleveloftheactualoperatingconditions.

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2.11 System purging

Ifexplosivegasesaretobeused,purgetheprocesswithinertdrygaslikeNitrogen,Argonetc.forat
least30minutes.
Insystemswithcorrosiveorreactivefluids,purgingwithaninertgasisabsolutelynecessary,becauseif
thetubinghasbeenexposedtoair,introducingthesefluidswilltendtocloguporcorrodethesystem
duetoachemicalreactionwithoxygenormoistair.
Completepurgingisalsorequiredtoremovesuchfluidsfromthesystembeforeexposingthesystemto
air.Itispreferrednottoexposethesystemtoair,whenworkingwiththesecorrosivefluids.

2.12 Zeroing
Thezeropointofeachinstrumentisfactoryadjusted.However,thezeropointmayshiftslightlydueto
temperature,pressure,gastypeandmountingpositioninfluences.Ifsorequired,thezeropointofthe
instrumentmaybereadjusted.

ZeroingispossibleoverRS232Flowbus,RS485ModBusorbymeansofusingthemicroswitch.Zeroing
bymeansofusingthemicroswitchisdescribedinthismanual.

Warmup,pressureupthesystemandfilltheinstrumentaccordingtotheprocessconditions.
Makesurenoflowisgoingthroughtheinstrumentbyclosingvalvesneartheinstrument.
Thesetpointmustbezero.
Pressthemicroswitchandholdit.AfterashorttimetheredLEDwillgoONandOFF,thenthegreen
LEDwillgoON.Atthatmomentreleasethemicroswitch.
ThezeroingprocedurewillstartatthatmomentandthegreenLEDwillblinkfast.Thezeroing
procedurewaitsforastablesignalandsavesthezero.Ifthesignalisnotstablezeroingwilltakelong
andthenearestpointtozeroisaccepted.Theprocedurewilltakeapprox.10sec.
Whenindicationisshowing0%signalandthegreenindicationLEDisburningcontinuouslyagain,
thenzerohasbeenperformedwell.

ForinformationhowtostartthezeroingprocedureoverRS232FlowBusorRS485ModBuscheck
chapter4.1.4,AutoZeroing

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BasicOperation
3.1 General
AnELFLOWbaseinstrumentcanbeoperatedbymeansof:
Analoginterface(0...5Vdc/0...10Vdc/0...20mA/4...20mA)
DigitalRS232Flowbusinterface(connectedtoCOMportbymeansofspecialcableon38400Baud)
DigitalRS485Modbusinterface.

Operationviaanalogordigitalinterfacecanbeperformedatthesametime.Aspecialparametercalled
controlmodeindicatestowhichsetpointthecontrollershouldrespond.

3.2 Analog operation

Atanalogoperationfollowingsignalsareavailable:
measuredvalue(analogoutput)
setpoint(analoginput)

Thetypeofinstalledanaloginterface(05V,010V,020mAor420mA)canbefoundinthemodelkey
oftheinstrument.Refertoparagraph1.6.2.

Setpointsbelow2%ofthefullscalewillbeinterpretedas0%setpoint.

Whenoperatingtheinstrumentthroughtheanaloginterfaceitispossibletoconnecttheinstrument
simultaneouslytoRS232orModbus/RS485forreading/changingparameters(e.g.controllerresponse
orotherfluidselection).

3.3 Basic RS232 Flowbus operation

RS232FlowbuscommunicationcanbeusedforoperatingyourinstrumentusingtheBronkhorst
FLowDDEserverapplication.

Physicallayerandcommunicationprotocolaredetectedautomaticallyuponreceptionofmessages.
Thesemessagesmustbesentusingthecorrectcombinationofphysicallayerandcommunication
protocol.Aftereverypowerupthecommunicationdetectionmodeisactive.

DynamicDataExchange(DDE)providestheuserabasiclevelofinterprocesscommunicationbetween
Windowsapplications.
FlowDDEisaDDEserverapplication.Togetherwithaclientapplication,eitherselfmadeorwitha
SCADAprogramfrom3rdparties,itispossibletocreateaneasywayofdataexchangebetweenthe
flowcontrollerandaWindowsapplication.
Forexample,acellinMicrosoftExcelcouldbelinkedtothemeasuredvalueoftheflowcontrollerand
whenthemeasuredvaluechanges,itwillbeautomaticallyupdatedintheExcelspreadsheet.

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Application1
DDElink
RS232

DDElink
FlowDDE
server

Application2

DDElink
Base

Instrument

Applicationn

WindowsbasedPersonalComputer

ExamplesofDDEclientapplications:FlowPlot,FlowView,MSOffice,LabView,Intouch,Wizcon.

TheFLowDDEserveralsooffersalotoftestfacilitiesanduseradjustablesettingsforefficient
communicationwiththeconnectedflowcontroller.

HowtosetupaDDElinkwithFlowDDEisdescribedinthehelpfileoftheFlowDDEapplication.
Programmingexamplesareavailableformakingapplicationsin:VisualBasic,LabViewandExcel.

FLowDDEparameternumbers:
Reading/changingparametervaluesviaFLowDDEofferstheuseradifferentinterfacetotheinstrument.
Besidestheapplicationname:FLowDDEthereisonlyneedof:
topic,usedforchannelnumber:C(X)
item,usedforparameternumber:P(Y)
ADDEparameternumberisauniquenumberinaspecialFLowDDEinstruments/parameterdatabase
andnotthesameastheparameternumberfromtheprocessonaninstrument.
NodeaddressandprocessnumberwillbetranslatedbyFLowDDEtoachannelnumber.

FlowDDEandotherBronkhorstapplicationsareavailableattheBronkhorstdownloadsite:
http://www.bronkhorst.com/en/downloads

AspecialRS232cable(7.03.366)canbeorderedseparately.ItconsistsofaTpartwith1maleand1
femalesubD9connectorononeinstrumentsideandanormalfemalesubD9connectoronthesideof
thecomputer.BymeansofthiscableitispossibletoofferRS232communicationandstillbeableto
connectpowersupplyandanaloginterfacethroughthe(analog)subD9connector.

3.4 Modbus RS485 operation

ThischapterislimitedtothedescriptionoftheinterfacebetweentheModbusMassFlowController
withamasterdevice.ItwillexplainhowtoinstallanELFLOWBaseinstrumenttoyourModbussystem.
Itonlycontainstheinformationthatisneededmost.

TheimplementationoftheModbusinterfaceisbasedonthefollowingstandards:
[1] MODBUSApplicationProtocolSpecificationV1.1b,December28,2006
[2] MODBUSoverSerialLinespecificationandimplementationguideV1.02

ThereisnomutualcommunicationbetweenModbusslaves;onlybetweenmasterandslave.

9.17.061

MoredetailedinformationaboutModbuscanbefoundathttp://www.modbus.orgoranywebsiteof
the(local)Modbusorganisationofyourcountry(whenavailable).
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Physicallayerandcommunicationprotocolaredetectedautomaticallyuponreceptionofmessages.
Thesemessagesmustbesentusingthecorrectcombinationofphysicallayerandcommunication
protocol.Aftereverypowerupthecommunicationdetectionmodeisactive.

3.4.1

Slave address, baud rate and parity setup

Defaultinstrumentswillbedeliveredtocustomersonaddress1andwithabaudrateof19200baud
andEVENparity.

Theslaveaddress,baudrateandparityoftheBronkhorstmeter/controllerModbusslavecanbe
changedtofittheinstrumentinyourexistingModbusnetwork.Changingtheslaveaddress,baudrate
andparitycanbedoneinthefollowingways.

UsingRS232:FlowDDE
OfflineviatheRS232communicationportbymeansofFlowDDE.Thisprogramcanbeusedto
read/changeparameters,includingtheslaveaddress,baudrateandparity.

ConnectyourBronkhorst
meter/controllerModbusslaveinstrumenttoafreeCOMportusingthespecialcablewithononeside
aTpartwithmaleandfemalesubD9connectorandontheothersideafemalesubD9connector
(partnumber7.03.366).ThesinglesubD9connectorshouldbeconnectedtoyourCOMportandthe
femalesubD9oftheTparttothemalesubD9oftheinstrument.Standardcablesareapprox.3
meters.MaximumlengthbetweenPCandinstrumentallowedisapproximately10meters.

StartFlowDDEandopencommunicationviathemenu(asshownbelow)orbypressing<F3>.

OncetheDDEserverisactive,opentheFlowDDETestFormviathemenu(asshownbelow)orby
pressing<F6>.

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Thefollowingscreenappears:

Toread/changetheslaveaddress,parameter199:Busaddressmustbeselected.Toread/changethe
baudrate,parameter201:Baudratemustbeselected.Andtoread/changetheparityparameter335:
Bus1Paritymustbeselected.Tochangeoneoftheseparametersparameter7:Initresethastobesetto
64first.

Validvaluesfortheslaveaddressarebetween1and247,validvaluesforthebaudrateare9600,19200
and38400,validvaluesforparityare0(=None),1(=Odd)and2(=Even).Thechangedvalueswillbe
effectiveimmediatelyafterchanging.

Note:TherearenohardwareswitchesavailableontheBronkhorstinstrumentsforSlaveaddressand
Baudratesetting.

UsingmicroswitchandLEDsontopoftheinstrument
Readoutbusaddress/MACIDandbaudrate:
Pressingtheswitch3xbrieflywithintervalsofmax.1secondinnormalrunning/operationmodewill
triggertheinstrumenttoshowitsbusaddress/MACIDandbaudrate.

Forindicationthebusaddress/MACIDthegreenLEDwillflashtheamountoftensandtheredLEDthe
amountofunitsinthenumber.Forindicationofbaudratesetting,bothLEDswillflash.
Theflashesarecalledcountflashesandhaveapatternof0.5sec.on,0.5sec.off.

Table:LEDindicationsforbusaddressandbaudrate
GreenLED
RedLED
Time
Indication
amountofcount Off
0...12sec.
tensinbusaddressforinstrument
flashes(0...12)
Maximum
Off
Amountofcountflashes 0...9sec.
unitsinbusaddressforinstrument
(0...9)
Maximum
amountofcount amountofcountflashes 1...3 sec.
baud ratesettingforinstrument
flashes(1...3)
(1...3)
Maximum
1=9600Baud
2=19200Baud
3=38400Baud
Note:Valuezerowillbeindicatedbyaperiodof1sec.off(0.5sec.off+0.5sec.off).

Examples:
Forbusaddress35/9600baudthegreenLEDwillflash3times,theredLEDwillflash5timesand
bothLEDswillflash1time.
Forbusaddress20/19200baudthegreenLEDwillflash2times,theredLEDwillflash0timesand
bothLEDswillflash2times.
Forbusaddress3/38400thegreenLEDwillflash0times,theredLEDwillflash3timesandboth
LEDswillflash3times.
Changebusaddress/MACIDandbaudrate:
Pressingtheswitch5xbrieflywithintervalsofmax.1secondinnormalrunning/operationmodewill
triggertheinstrumenttoenterthebusconfigurationmode.
Withinthetimeoutperiodof60sec.itispossibletostartchangingthebusaddress/MACIDofthe
instrument(seetablebelow).

Table7:Procedureforchangingbusaddressandbaudrate
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Step
1

Action
Setinstrumentto
busconfig
mode
Settensofbus
address

Indication
bothLEDsoff

Time

Handling
Pressswitch5xbriefly

GreenLEDflashes
0.1secon,
0.1secoff

countflashes
startwhenswitch
ispressed:
0.5secon,
0.5secoff

timeout:
60sec

Pressswitchandcountgreenflashes
fortensofbusaddress.
Releasewhenwantedamounthas
beencount.

Countsuptomax.12andthanstarts
at0again.
Whencountingfails,keepswitch
pressedandrestartcountingfornext
attempt.
Pressswitchandcountredflashes
forunitsofbusaddress/MACID.
Releasewhenwantedamounthas
beencount.

Countsuptomax.9andthenstarts
at0again.
Whencountingfailed,keepswitch
pressedandrestartcountingfornext
attempt.
Pressswitchandcountredand
greenflashesforbaudratesetting.
Releasewhenwantedamounthas
beencount.

Countsuptomax.3andthanstarts
at0again.
Whencountingfailed,keepswitch
pressedandrestartcountingfornext
attempt.

Note:selectionof0means:No
change

Setunitsofbus
Address

redLEDflashes
0.1secon,
0.1secoff

countflashes
startwhenswitch
ispressed:
0.5secon,
0.5secoff

timeout:
60sec

Setbaudrateof
fieldbus
communication.

1=9600Baud
2=19200Baud
3=38400Baud

bothredandgreen
LEDflashes
0.1secon,
0.1secoff

countflashes
startwhenswitch
ispressed:
0.5secon,
0.5secoff

timeout:
60sec

Instrumentreturnstonormalrunning/operationmode.
Changesarevalidwhentheyaremadewithinthetimeouttimes.
Actualsettingcanbecheckedbypressingtheswitch3xbrieflywithintervalsofmax.1sec.forreadout
thebusaddress/MACIDandbaudrate.

Note1:
Valuezerowillbeindicatedbyaperiodof1sec.off(0.5sec.off+0.5sec.off).
Whenvaluezeroiswanted,pressswitchshortlyandreleaseitagainwithin1sec.

Note2:
Beforeeachactionofflashcounting,theLED(s)tobeusedforcountingwillflashinahighfrequency.
(Pattern:0.1secon,0.1secoff).Assoonastheswitchispresseddown,thisLED(orbothLEDs)willbe
offandthecountingsequencewillstart.

Note3:
Theparitysettingcannotbereadorchangedusingthemicroswitch.

3.4.2

Implementation class

Thephysicalanddatalinklayerareimplementedconformingtothe"basicslave"implementationclass
asdescribedindocument[2],MODBUSoverSerialLinespecificationandimplementationguide
V1.02.Thefollowingoptionshavebeenimplemented:

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Parameter
Addressing
broadcastsupport
baudrate
parity
transmissionmode
databits
electricalinterface

Options
addressconfigurablefrom1to
247(default1)
Yes
9600,19200(default),38400
None,Odd,Even(default)
RTU/ASCII
RTU=8,ASCII=7
RS4852Wcabling

connectortype

DB9Male

Remarks
seesection3.4.1

seesection3.4.1
seesection3.4.1
Autodetection
notconfigurable
Seedocument:
9.16.091HookupdiagramELFLOW
Base
Seedocument:
9.16.091HookupdiagramELFLOW
Base

MoredetailedinformationaboutModbuscanbefoundathttp://www.modbus.orgoranywebsiteof
the(local)Modbusorganisationofyourcountry(whenavailable).

3.4.3

Response time

Thisslavedevicewillrespondoneachvalidrequestfromthemasterwithin100msec.Thismeansthat
theresponsetimeoutsettingofthemastershouldbesettoavaluelargerthanorequalto100ms.

3.4.4

Supported Modbus functions

ThissectiondescribesthesupportedModbusfunctioncodes.Refertodocument[1]MODBUS
ApplicationProtocolSpecificationV1.1b,December28,2006formoredetails.

MoredetailedinformationaboutModbuscanbefoundathttp://www.modbus.orgoranywebsiteof
the(local)Modbusorganisationofyourcountry(whenavailable).
ReadHoldingRegisters(03)
Possibleexceptionresponses:
02,ILLEGALDATAADDRESS,incaseofreadingofnonexistingaddress,orreadingapartofa
multiregisterparameter(float,long,etc)
03,ILLEGALDATAVALUE,incaseofreadinglessthan1ormorethan125registers
04,SLAVEDEVICEFAILURE,incaseofreadingawriteonlyregister

ThemaximummessagesizefortheReadHoldingRegistersfunctionis100bytesat9600baud(200
bytesat19200baudand400bytesat38400baud).Whenthissizeisexceeded,corruptedresponses
maybereceived.
WriteSingleRegister(06)
Possibleexceptionresponses:
02,ILLEGALDATAADDRESS,incaseofwritingtononexistingaddress,orwritingtoapartofa
multiregisterparameter(float,long,etc)
04,SLAVEDEVICEFAILURE,incaseofwritingtoreadonlyregister
04,SLAVEDEVICEFAILURE,incaseofwritingillegalvaluetoregister

WriteMultipleRegisters(16)
Possibleexceptionresponses:
02,ILLEGALDATAADDRESS,incaseofwritingtononexistingaddress,orwritingtoapartofa
multiregisterparameter(float,long,etc)
03,ILLEGALDATAVALUE,incaseofreadinglessthan1ormorethan123registers
04,SLAVEDEVICEFAILURE,incaseofwritingtoreadonlyregister
04,SLAVEDEVICEFAILURE,incaseofwritingillegalvaluetoregister

Whenoneofthewrittenregistersraisesanexception,thevaluewrittentoallsubsequentregistersare
discarded(ignored).

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Diagnostics(08)
Thefollowingsubfunctionsaresupported:
Subfunctioncode(dec)
Name
00
ReturnQueryData
10
ClearCountersandDiagnosticsRegister
11
ReturnBusMessageCount
12
ReturnBusCommunicationErrorCount
13
ReturnBusExceptionErrorCount
14
ReturnSlaveMessageCount
15
ReturnSlaveNoResponseCount
16
ReturnSlaveNAKCount(always0)
17
ReturnSlaveBusyCount(always0)
18
ReturnBusCharacterOverrunCount

ThemaximummessagesizefortheReturnQueryDatasubfunctionis100bytesat9600baud(200
bytesat19200baudand400bytesat38400baud).Whenthissizeisexceeded,corruptedresponses
maybereceived.

Possibleexceptionresponses:
01,ILLEGALFUNCTION,incaseofnotsupportedsubfunction
03,ILLEGALDATAVALUE,incaseofanincorrectvalueforthedatafield
ReportSlaveID(17)
TheSlaveIDfieldintheresponseisastringwiththesamecontentsasFlowDDEparameter1(indent
number+versionnr/serialnr).TheRunIndicatorStatusfieldinthismessagewillindicateONwhenthe
deviceisinnormaloperatingmode(FB_NORMAL).

Possibleexceptionresponses:
04,SLAVEDEVICEFAILURE,incaseofaninternalerror

3.4.5

Available parameters

Modbusregisters(inthedatamodel)arenumberedfrom1to65536.InaModbusPDU(ProtocolData
Unit)theseregistersareaddressedfrom0to65535.

Thefollowingtableliststhemostcommonlyusedparameters.

MODBUSREGISTERS

PARAMETERNAME
PARAMETER
ACCESS PDUADDRESS
REGISTERNUMBER
REMARK
TYPE
hex

Hex
Dec
Wink
Unsignedchar
W
0x0000
0x0001
1
Value14592
Init/reset
Unsignedchar
RW
0x000A
0x000B
11
Valveoutput
Unsignedint
RW
0x001F
0x0020
32
0..32767
Measure
Unsignedint
R
0x0020
0x0021
33

Setpoint
Unsignedint
RW
0x0021
0x0022
34

Setpointslope
Unsignedint
RW
0x0022
0x0023
35

Analoginput
Unsignedint
R
0x0023
0x0024
36
Setp.controlmodes Unsignedchar
RW
0x0024
0x0025
37
Sensortype
Unsignedchar
RW
0x002E
0x002F
47
Capunit
Unsignedchar
RW 0x002F
0x0030
48

Fluidnumber
Unsignedchar
RW
0x0030
0x0031
49

Alarminfo
Unsignedchar
R
0x0034
0x0035
53

Temperature
Unsignedint
R
0x0427
0x0428
1064
Identnumber
Unsignedchar
RW
0x0E2C
0x0E2D
3629
ContrResp
Unsignedchar
RW
0x0E45
0x0E46
3654
CycleTime
Unsignedchar
R
0x0E4C
0x0E4D
3661

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RespStable
Unsignedchar
RW
0x0E51
0x0E52
3666
RespOpen0
Unsignedchar
RW
0x0E52
0x0E53
3667
Calibrationmode
Unsignedchar
RW 0x0E61
0x0E62
3682

Monitormode
Unsignedchar
RW 0x0E62
0x0E63
3683

Reset
Unsignedchar
W
0x0E68
0x0E69
3689

Sensorzeropotmeter Unsignedchar
RW 0x0E85
0x0E86
3718

Modbusslaveaddr. Unsignedchar
RW
0x0FAA
0x0FAB
4011
PolycnstA
Float
RW
0x8128..0x8129 0x8129..0x812A 33065..33066
PolycnstB
Float
RW 0x8130..0x8131 0x8131..0x8132 33073..33074
PolycnstC
Float
RW 0x8138..0x8139 0x8139..0x81A
33081..33082
PolycnstD
Float
RW 0x8140..0x8141 0x8141..0x8142 33089..33090
TdsDn
Float
RW 0x8158..0x8159 0x8159..0x815A 33113..33114
TdsUp
Float
RW
0x8160..0x8161 0x8161..0x8162 33121..33122
Capacity
Float
RW
0x8168..0x8169 0x8169..0x816A 33129..33130
Fluidname
String(10bytes) RW
0x8188..0x818C 0x8189..0x818D 33161..33165
Capacityunitstring
String(7bytes) RW 0x81F8..0x81FB 0x81F9..0x81FC 33273..33276
Fmeasure
Float
R
0xA100..0xA101 0xA101..0xA102 41217..41218
Fsetpoint
Float
RW
0xA118..0xA119 0xA119..0xA11A 41241..41242
Temperature
Float
R
0xA138..0xA139 0xA139..0xA13A 41273..41274
Capacity0%
Float
RW
0xA1B0..0xA1B1 0xA1B1..0xA1B2 41393..41394
Devicetype
String(6bytes) R
0xF108..0xF10A 0xF109..0xF10B 61705..61707
Modelnumber
String(14bytes) RW 0xF110..0xF116 0xF111..0xF117 61713..61719
Serialnumber
String(16bytes) RW 0xF118..0xF11F 0xF119..0xF120 61721..61728
Manufacturerconfig String(16bytes) RW 0xF120..0xF127 0xF121..0xF128 61729..61736
Firmwareversion
String(5bytes) R
0xF128..0xF12A 0xF129..0xF12B 61737..61739
Usertag
String(13bytes) RW
0xF130..0xF136 0xF131..0xF137 61745..61751
IOStatus
Unsignedchar
RW
0xF258..0xF259 0xF259..0xF25A 62041..62042
PIDKp
Float
RW 0xF2A8..0xF2A9 0xF2A9..0xF2AA 62121..62122
PIDTi
Float
RW 0xF2B0..0xF2B1 0xF2B1..0xF2B2 62129..62130
PIDTd
Float
RW 0xF2B8..0xF2B9 0xF2B9..0xF2BA 62137..62138
Kspeed
Float
RW
0xF2F0..0xF2F1 0xF2F1..0xF2F2 62193..62194
Dynamicdispl.factor Float
RW
0xF508..0xF509 0xF509..0xF50A 62729..62730
Staticdispl.factor
Float
RW
0xF510..0xF511 0xF511..0xF512 62737..62738
Exp.Smoothingfilt.
Float
RW 0xF520..0xF521 0xF521..0xF522 62753..62754
Modbusbaudrate
Longinteger
RW 0xFD48..0xFD49 0xFD49..0xFD4A 64841..64842

Notes:
AccessindicateswhetherparametercanbeReadand/orWritten.
Whenabyteparameterisread,theupper8bitsoftheModbusregisterwillbe0.Whenabyte
parameteriswritten,theupper8bitsmustbesetto0.
Longintegerparametershavealengthof4bytesandaremappedontwoconsecutiveModbus
registers.Thefirstregistercontainsbit3216,thesecondregistercontainsbit150.
Floatingpointparametershavealengthof4bytesandaremappedontwoconsecutiveModbus
registers.FloatsareinsingleprecisionIEEEformat(1signbit,8bitsexponentand23bitsfraction).
Thefirstregistercontainsbit3216,thesecondregistercontainsbit150.
Stringparameterscanhavealengthofmaximal16bytesandcantakeupto8Modbusregisters
whereeachregistercontainstwocharacters(bytes).Theupperbyteofthefirstregistercontainsthe
firstcharacterofthestring.Whenwritingstrings,thewriteactionshouldalwaysstartfromthefirst
registerasacompleteblock(itisnotpossibletowriteapartofastring).Ifthestringisshorterthan
thespecifiedmaximumlengththestringshouldbeterminatedwitha0.

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3.5 Push-button operation

Bymeansofmanualoperationofthemicropushbuttonswitchsomeimportantactionsforthe
instrumentcanbeselected/started.Theseoptionsareavailableinbothanaloganddigitaloperation
mode.

Green
Off

LEDs

Red
Off

Time
Pushed
01sec

Indication

Time
Pushed
04sec

Indication

Pressingaswitchshortlybyaccidentwillnotcause
unwantedreactionsofinstrument.
Pressingtheswitch3xbrieflywithintervalsofmax.1sec.
willforceinstrumenttoindicateitsbusaddress/MACID
andevt.baudrate.Checkchapter3.4,ModbusRS485
operationformoredetials.
Off
Off
14sec

Off
On
48sec
Resetinstrument
Instrumentprogramwillberestartedandallwarningand
errormessagewillbecleared
During(new)startupinstrumentwillperforma(new)
selftest
On
Off
812sec Autozero
Instrumentwillbereadjustedformeasurementofzero
flow(notforpressuremeter/controller)
NOTE:Firstmakesurethereisnoflowandinstrumentis
connectedtopowerforatleast30minutes!
On
On
1216sec PrepareinstrumentforFLASHmodeforfirmwareupdate.
InstrumentshutsdownandbothLEDsturnoff.
Atnextpowerupinstrumentwillbeactiveagain.
LEDindicationsusingmicroswitchatnormalrunningmodeofaninstrument

Green
off

LEDs

Red
Off

Noaction
Pressingaswitchshortlybyaccidentwillnot
causeunwantedreactionsoftheinstrument
off
normalflash 48sec
Restoreparameters
Allparametersettings(exceptfieldbussettings)willbe
restoredtosituationoffinaltestatBHTproduction
normalflash Off
8 12sec
Noaction
normalflash normalflash 12 16sec Manualinstall.Thebusaddressandbaudratecanbe
changedbymeansofmicroswitchenLEDs.
Theprocedureisdescribedin3.4.1(Changebus
address/MACIDandbaudrate).
LEDindicationsusingmicroswitchatpowerupsituationofaninstrument

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3.6 Micro-switch use for reading/changing control mode

3.6.1

Read control mode

Forswitchingbetweendifferentfunctionsinuseofadigitalmeterorcontrollerseveralmodesare
available.MoreinformationabouttheavailablecontrolmodescanbefoundatparameterControl
mode.
Pressingtheswitch2xbrieflywithintervalsofmax.1secondinnormalrunning/operationmodewill
triggertheinstrumenttoshowitscontrolmode.Forindicationofthecontrolmodenumberthegreen
LEDwillflashtheamountoftensandtheredLEDtheamountofunitsinthenumber.Theflashesare
calledcountflashesandhaveapatternof0.5sec.on,0.5sec.off.Thecontrolmodenumberscanbe
foundatparametercontrolmode

Viewcurrentcontrolmode(pressswitch2xbriefly)
LEDs
Time
Indication

Green
Red
amountofcount
off
02sec.maximum tensincontrolmodenumber
flashes(02)
amountofcount
off
09sec.maximum unitsincontrolmodenumber
flashes(09)

Valuezerowillbeindicatedbyaperiodof1sec.off(0.5sec.off+0.5sec.off).

3.6.2

Change control mode:

Forswitchingbetweendifferentfunctionsinuseofadigitalmeterorcontrollerseveralmodesare
available.MoreinformationabouttheavailablecontrolmodescanbefoundatparameterControl
mode.
Pressingtheswitch4xbrieflywithintervalsofmax.1secondinnormalrunning/operationmodewill
triggertheinstrumenttochangeitscontrolmode.
Changecurrentcontrolmode(pressswitch4xbriefly)
Step Action
Indication
Time
Handling

timeout:
Pressswitchandcountgreenflashes
1
Settensof
greenLEDflashes
60sec
fortensofcontrolmodenumber.
setpoint/control 0.1secon
Releasewhenwantedamounthas
0.1secoff
modenumber

beencount.

Countflashes
Countsuptomax.2andthenstarts
startwhenswitch
at0again.Whencountingfails,keep
ispressed:
switchpressedandrestartcounting
0.5secon
fornextattempt.
0.5secoff

timeout:
Pressswitchandcountredflashes
2
Setunitsof
redLEDflashes
60sec
forunitsofcontrolmodenumber.
setpoint/control 0.1secon
Releasewhenwantedamounthas
0.1secoff
modenumber

beencount.

Countflashes
Countsuptomax.9andthenstarts
startwhenswitch
at0again.Whencountingfailed,
ispressed:
keepswitchpressedandrestart
0.5secon
countingfornextattempt.
0.5secoff
Instrumentreturnstonormalrunning/operationmode.
Changesarevalidwhentheyaremadewithinthetimeouttimes.
SeeparameterControlmodeforbehaviouratpowerupoftheinstrument.

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Valuezerowillbeindicatedbyaperiodof1sec.off(0.5sec.off+0.5sec.off).
Whenvaluezeroiswanted,pressswitchshortlyandreleaseitagainwithin1sec.

Beforeeachactionofflashcounting,theLEDstobeusedforcountingwillflashinahighfrequency.
(Pattern:0.1secon,0.1secoff).Assoonastheswitchispresseddown,thisLED(orbothLEDs)willbe
offandthecountingsequencewillstart.

3.7 LED indications

LEDs

Green
Red
slowwink

Time

Indication

0.2secon, Winkmode
0.2secoff Byacommandsendtotheinstrument.
fastwink
0.1secon, Switchreleased,selectedactionstarted.
0.1secoff
GreenandRedLEDturnbyturnindicationmodes(noswitchused)

GreenLED Time
Indication
Off
Continuously
Powerofforprogramnotrunning
On
Continuously
Normalrunning/operationmode
Flash
0.2secon,
Specialfunctionmode
0.2secoff
Instrumentisbusyperforminganyspecialfunction.
E.g.autozeroorselftest
GreenLEDindicationmodes(noswitchused)

RedLED
Off
Flash
On

Indication
Noerror
BusactivityontheModbusinterface
Criticalerrormessage
Aseriouserroroccurredintheinstrument
Instrumentneedsservicebeforefurtherusing
RedLEDindicationmodes(noswitchused)

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Variable
Continuously

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3.8 Basic Parameters and Properties

3.8.1

Introduction

Everyparameterhasitsownproperties.Thesepropertiesaregiveninatableasshown:

Type
Access
Range FlowDDE FlowBus
ModBus
[type]
RW [x][y] [FB]
[Pro]/[Par] [address]/[index]

Type
Unsignedchar
Unsignedchar[x]
Unsignedint
Float

1bytecharacter
xbytearray(string)
2byteunsignedinteger
4bytefloatingpoint

Access
R
Theparameterisreadonly
RW
Theparametercanbereadandwrite
RW TheparametercanonlybewrittenwhentheInitResetparameterissetto64.SeeChapter
4.1.1,GeneralProductInformationformoredetails.

Range
Someparametersonlyacceptvalueswithinacertainrange:
[x]
Minimalvalueoftherange.
[y]
Maximalvalueoftherange.

FlowDDE
ParameternumberinFlowDDE.Checkchapter3.3,BasicRS232Flowbusoperation,fordetailed
information.

FlowBus
ProcessandparameternumbertoaddressparametersusingtheFlowBusprotocol.
[Pro]
Flowbusprocessnumber
[Par]
Flowbusparameternumber
Checkdocument9.17.027,RS232interfacewithFLOWBUSprotocol,fordetailedinformation.

ModBus
PDUAddressandregisternumbertoaddressparametersusingtheModBusprotocol.
[address] HexadecimalPDUaddress.
[index]
Decimalregisternumber.
FortheModBusprotocolevery2bytesareaddressedseparately.Checkchapter3.4,ModbusRS485
operationformoredetails.

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3.8.2

Basic Parameters

MeasuredValue(Measure)
Type
Unsignedint

Access
R

Range
04194
2

FlowDDE
8

FlowBus
1/0

ModBus
0x0020/33

Themeasuredvalueindicatestheamountofmassflowmeteredbytheinstrument.
Thesignalof0...100%willbepresentedinarangeof0...32000.Themaximumsignaltobeexpectedis
131.07%,whichis:41942.

Setpoint
Type
Unsignedint

Access
RW

Range
04194
2

FlowDDE
9

FlowBus
1/1

ModBus
0x0021/34

Setpointisusedtosetthewantedamountofmassflow.
Signalsareinthesamerangeasthemeasuredvalue,onlysetpointislimitedbetween0and100%.

ControlMode
Type

Access

Range

FlowDDE

FlowBu
s
1/4

ModBus

Unsignedint
RW
018
12
0x0024/37

TheControllermodeisusedtoselectdifferentfunctionsoftheinstrument.Thefollowingmodesare
available:

Value Mode
Instrumentaction
Setpointsource
0
DIGITAL_INPUT
Controlling
RS232/RS485
1
ANALOG_INPUT
Controlling
Analoginput
3
VALVE_CLOSE
Valveclosed

4
CONTROLLER_IDLE
Idle
5
TEST_MODE
Testmodeenabled

7
SETPOINT_100
Controlling@100%
Fixed100%
8
VALVE_OPEN
Valvefullopened

9
CALIBRATION_MODE Calibrationmodeenabled

12
SETPOINT_0
Controlling@0%
Fixed0%
18
RS232_INPUT
Controlling
RS232FlowBus

AfterpowerupthecontrolmodewillalwaysbesettoDIGITAL_INPUTorANALOG_INPUT,dependingon
customersrequirement.Checkchapter4.1.6,ChangingDefaultControlMode,tochangethestartup
mode.

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AdvancedOperation
4.1 Reading and Changing Instrument Parameters
4.1.1

Introduction

Allparametersdescribedinthischapterhaveinfluenceonthebehaviourofthemassflowmeter.
Pleasebeawarethatwrongsettingscandisordertheoutputandcontrolresponse.
Toavoiduncarelesschangesoftheseparameters,theseparametersarelocked.Tounlockthese
parametersusesetparameterInitResettoUNLOCKED

InitReset
Type
Unsignedchar

Access
RW

Range
82/64

FlowDDE
7

FlowBus
0/10

ModBus
0x000A/11

TheInitResetparameterisusedtoUnLockadvancedparametersforwriting.Thisparameterknows
thefollowingvalues:

Value Mode
Instrumentaction
82
LOCKED
Advancedparametersare
readonly
64
UN_LOCKED
Advancedparametersare
writeenreadable.

ThisparameterisalwayssettoLOCKEDatpowerup.

4.1.2

Identification

Serialnumber
Type
Access
Range FlowDDE FlowBus ModBus
Unsignedchar[20] R

92
113/3
0xF118..0xF11F/61721..61728
Thisparameterconsistsofamaximum20bytestringwithinstrumentserialnumberforidentification.
Example:M0202123A

BHTModelnumber
Type
Access
Range
FlowDDE
FlowBus
Unsignedchar[14] R

91
113/2
Bronkhorstinstrumentmodelnumberinformationstring.

ModBusPDU
0xF111..0xF117/61713..61719

Firmwareversion
Type
Access
Range
Unsignedchar[5]
R

Revisionnumberoffirmware.Eg.V1.12

FlowDDE
105

FlowBus
113/5

ModBusPDU
0xF128..0XF12A/61737..61739

Usertag
Type
Access
Range FlowDDE FlowBus ModBusPDU
Unsignedchar[13] RW

115
113/6
0xF130..0xF136/61745..61751
Userdefinablealiasstring.Maximum13charactersallowtheusertogivetheinstrumenthisowntag
name.

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Customermodel
Type
Access
Range FlowDDE FlowBus ModBusPDU
Unsignedchar[16] RW

93
113/4
0xF120..0xF127/61729..61736
Digitalinstrumentmanufacturingconfigurationinformationstring.
ThisstringcanbeusedbyBronkhorsttoaddextrainformationtothemodelnumberinformation.

4.1.3

Fluid Information

Nextparametersgiveinformationaboutthefluidrangeoftheinstrument.

Fluidname
Type
Access
Range
FlowDDE
FlowBus
ModBusPDU
Unsignedchar[10] RW

25
1/17
0x8188..0x818C/33161..33165
Fluidnameconsistsofthenameofthefluid.Upto10charactersareavailableforstorageofthisname.

Fluidunit
Type
Access
Range FlowDDE FlowBus ModBusPDU
Unsignedchar[7]
R

129
1/31
0x81F8..0x81FB/33273..33276
TheFluidunitcanbereadbyparametercapacityunit.Thisparametercontainstheunitinmaximal7
characters.

FluidCapacity(@100%)
Type Access
Range
FlowDDE FlowBus
ModBusPDU
Float R
1E101E+10
21
1/13
0x8168..0x8169/33129..33130
Capacityisthemaximumvalue(span)at100%fordirectreadinginsensorbaseunits.

FluidCapacity(@0%)
Type Access
Range
FlowDDE
FlowBus
ModBusPDU
Float R
1E101E+10 183
33/22
0xA1B0..0xA1B1/41393..41394
Thisisthecapacityzeropoint(offset)fordirectreadinginsensorbaseunits.

4.1.4

Auto Zeroing

Tostarttheautozeroproceduretwoparametersshouldbewritten:

ControlMode
Type

Access

FlowBu ModBus
s
Unsignedint
RW
018
12
1/4
0x0024/37
Checkchapter3.8.2,BasicParameters,foravailablecontrolmodes.

CalibrationMode

Range

FlowDDE

Type

Access

Range

FlowDDE

Unsignedint

RW

58

FlowBu
s
115/1

ModBus
0x0E61/3682

Value
0
9
255

Mode
IDLE
AUTO_ZERO
ERROR

Instrumentaction
Idle
Autozeroing
Idle

Procedure:
Step1: SetControlModetoCALIBRATION_MODE(9)
Step2: SetCalibrationModetoAUTO_ZERO(9)
Step3: CheckCalibrationMode,
IDLE
Autozeroingsucceeded
AUTO_ZERO Autozeroingactive
ERROR
Autozeroingfailed
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4.1.5

Controller Response Adjustment

ThecontrollersettlingtimeofELFLOWBaseinstrumentsisfactoryadjustedtoapproximately1second
atcustomerprocessconditions.
Whenrealprocessconditionsdifferfromsupplieddata,orwhenafasterorslowercontrollerresponse
isneeded,areadjustmentcanbeperformed.

Settlingtimeisdefinedasthetimetoreachthesetpoint(andstay)within2%oftheinitialsetpoint

ThepicturebelowshowsthebasiccontrollerdiagramoftheELFLOWBase.ItconsistsofastandardPID
controllerwithanumberofaddons.

Kopen
P

Kspeed

Kp

Knormal
Kstable

Setpoint

d
dt

Curve
Corr

S
Flow
ControlValve

Sensor

Basically,whenafasterorslowercontrollerresponseisneeded,onlythecontrollergainKspeedorKp
hastobechanged.

Kp(PIDKp)
Type
Float

Access
RW

Range
01E+1
0
ProportionalactionofthePIDcontroller.

FlowDDE
167

FlowBus
114/21

ModBusPDU
0xF2A8..0xF2A9/62121..6212
2

FlowDDE
254

FlowBus
114/1

ModBusPDU
0xF2F0..0xF2F1/62193..62194

Range
FlowDDE
01E+1
168
0
IntegrationactioninsecondsofthePIDcontroller.
Thevalueshouldnotbechanged.

FlowBus
114/22

ModBusPDU
0xF2B0..0xF2B1/62129..6213
0

FlowBus
114/23

ModBusPDU
0xF2B8..0xF2B9/62137..6213
8

Kspeed
Type
Float

Access
RW

Range
01E+1
0

Ti(PIDTi)
Type
Float

Access
RW

Td(PIDTd)
Type
Float

Access
RW

Range
01E+1
0

FlowDDE
169

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DifferentiationactioninsecondsofthePIDcontroller.
DefaultValue:0.0
Thisvalueshouldnotbechanged.

Kopen(RespOpen0)
Type
Unsignedchar

Access
RW

Range
0255

FlowDDE
165

FlowBus
114/18

ModBusPDU
0x0E52/3667

Controllerresponsewhenstartingupfrom0%(whenvalveopens).
Value128isdefaultandmeans:nocorrection.
Otherwisecontrollerspeedwillbeadjustedasfollows:

(128RespOpen0)
Newresponse=oldresponse*1.05

Knormal(ContrResp)
Type
Unsignedchar

Access
RW

Range
0255

FlowDDE
72

FlowBus
114/5

ModBusPDU
0x0E45/3654

Controllerresponseduringnormalcontrol(atsetpointstep)
Value128isdefaultandmeans:nocorrection.
Otherwisecontrollerspeedwillbeadjustedasfollows:

response _ new response _ old

(128 contresp)

1.05

Kstable(RespStable)
Type
Unsignedchar

Access
RW

Range
0255

FlowDDE
141

FlowBus
114/17

ModBusPDU
0x0E51/3666

Controllerresponsewhencontrollerisstable(withinbandof2%ofsetpoint)
Value128isdefaultandmeans:nocorrection.
Otherwisecontrollerspeedwillbeadjustedasfollows:

response _ new response _ old

4.1.6

(128 respstable)

1.05

Changing Default Control Mode

Instrumentsaredeliveredwitheitheranalogordigitalsignalasdefaultsetpoint,dependingon
customersrequirement.
Afterevery(poweron)resettheinstrumentwillreturntoitsdefaultcontrolmode.

Thedefaultcontrolmodecanbechangedwiththefollowingparameter:

IOStatus
Type
Unsignedchar

Access
RW

Range
0255

FlowDDE
86

FlowBus
114/11

ModBusPDU
0xF258/62041

Bit6[7..0]representstheformeranalogjumper.
1=defaultcontrolmodeisanalog
0=defaultcontrolmodeisdigital

Procedureforchangingdefaultdigitaloperationtodefaultanalogoperation:
ReadIOStatus
Add64tothereadvalue (OR[0 x 40])
WriteIOstatus
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Procedureforchangingdefaultanalogoperationtodefaultdigitaloperation:
ReadIOStatus
Subtract64fromthereadvalue (AND[0 x 40])
WriteIOstatus

4.1.7

Display Filter

TheoutputsignalofanELFLOWBaseinstrument(measuredvalue)isfiltered.Thefilterhasdynamic
behaviour:whenachangeinsensorsignalisdetected,themeasuredvaluewillbelessfilteredthan
whenthesensorsignalisconstantandstable.
Therearetwofilterconstants:StaticDisplayFactorandDynamicDisplayFactor.
Thesetwofactorscanbetransformedintotimeconstantsusingthefollowingformula:

cycletime

1 factor

factor

Themeasuredvalueisfilteredwithafirstorderlowpassfilterwithafiltertimeconstantbetweenthese
twovalues.

DynamicDisplayFactor
Type
Float

Access
RW

Range
01.0

FlowDDE
56

FlowBus
117/1

ModBusPDU
0xF508..0xF509/62729..6273
0

Range
01.0

FlowDDE
57

FlowBus
117/2

ModBusPDU
0xF511..0xF512/62737..6273
8

StaticDisplayFactor
Type
Float

Access
RW

CycleTime
Type
Access
Range
FlowDDE
FlowBus
ModBusPDU
Unsignedchar
R
0255 52
114/12
0x0E4C/3661
Note:TheunitofparameterCycleTimeis10ms.Example:value0.2means2ms

4.1.8

Disabling Micro Switch

ItispossibletodisabletheMicroSwitchontopoftheinstrument.Thiscanpreventundesireduseofthis
button.

Disablingthemicroswitchcanbeperformedwiththefollowingparameter:

IOStatus
Type
Unsignedchar

Access
RW

Range
0255

FlowDDE
86

FlowBus
114/11

ModBusPDU
0xF258/62041

Bit3[7..0]isusedtodisablethemicroswitch.
0=microswitchdisabled
1=microswitchenabled

Proceduretoenablethemicroswitch:
ReadIOStatus
Add8tothereadvalue
WriteIOstatus

Proceduretodisablethemicroswitch:
ReadIOStatus
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Subtract8fromthereadvalue
WriteIOstatus

4.2 Using other gasses than specified

Eachinstrumenthasbeencalibratedandadjustedforcustomerprocessconditions.
Controllersorvalvesmaynotoperatecorrectly,ifprocessconditionsvarytoomuch,becauseofthe
restrictionoftheorificeinthevalve.
Forflowmetersperformanceandaccuracymaybeaffectedtremendouslyifphysicalfluidproperties
suchasheatcapacityandviscositychangeduetochangingprocessconditions.
Checkchapter1.7,OperatingPrinciples,fordetailedinformationaboutthesensorprinciple.

4.2.1

Software for conversion factor calculation

Bronkhorstgatheredthephysicalpropertiesofover600fluidsinadatabasecalledFLUIDAT.
Applicationsoftware,suchasFLOWCALCULATIONS,enablestheusertocalculateaccurateconversion
factors,notonlyat20C/1atmbutatanytemperature/pressurecombination,bothforgasesandfor
liquids.
Applytoyourdistributorformoredetailsofthissoftware.

CheckFLUIDATonhttp://www.fluidat.com
FLUIDATisacollectionofroutinestocalculatephysicalpropertiesofgasesandliquids.Theseroutines
aremadeavailableattheFLUIDATontheNetwebsite.

4.2.2

Maximum pressure drop

For(pilot)solenoidoperatedcontrolvalveswithsmallorificesthemaximumallowablepressuredropfor
gasesisaccordingtothetable.

Diameter[mm] Kv
Normallyclosed Normallyopened
pmax.[bard]
pmax.[bard]
4,33x105 40
30
0,05
20
0,07
8,48x105 30
20
0,10
1,73x104 30
20
0,14
3,39x104 30
4
20
0,20
6,93x10 30
3
20
0,30
1,56x10 30
20
0,37
2,37x103 30
20
0,50
4,33x103 30
15
0,70
8,48x103 24
8
1,00
1,73x102 12
5
1,30
2,93x102 8
n.a.
1,50
3,90x102 6
n.a.
1,70
5,00x102 5
n.a
2,00
6,63x102 3,6
n.a..
4,50
3,50x101 5

Forpilotoperatedvalvesthemaximumpressuredropislimitedto20bard.Ifthepressuredropduring
startupishigher,itispreferredtoinstallabypassvalve.Duringstartupthisvalveshouldbeopened.
Alsotheminimumpressuredropislimited.Forexactfiguresconsultfactoryorproceedaccordingtothe
technicaldataand/oradditionalinstructionsgivenbythesalesofficeordepartment.

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Troubleshooting
5.1 General
Foracorrectanalysisoftheproperoperationofaflow/pressuremeterorcontrolleritisrecommended
toremovetheunitfromtheprocesslineandcheckitwithoutapplyingfluidsupplypressure.Incasethe
unitisdirty,thiscanbeascertainedimmediatelybylooseningthecompressiontypecouplingsand,if
applicabletheflangeontheinletside.

Energizingordeenergizingoftheinstrumentoftheinstrumentindicateswhetherthereisanelectronic
failure.
Afterthat,fluidpressureistobeappliedinordertocheckbehaviour.
Ifthereshouldbesuspicionofleakageincaseofagasunit,donotcheckforbubbleswithaleak
detectionliquidunderthecoverasthismayleadtoashortcircuitinthesensororp.c.board.

5.2 LED indications

ThetwoLEDsontheinstrumentgiveinformationaboutthestatusoftheinstrument.Checkchapter3.7,
LEDindicationsfordetailedinfo.

5.3 Troubleshooting summary general

Symptom

Possiblecause

Action

Nooutputsignal

Nopowersupply

Outputstageblownupduetolonglasting
shortageand/orhighvoltagepeaks
Supplypressuretoohigh,ordifferential
pressureacrossmetertoohigh
Valveblocked/contaminated

1a)checkpowersupply
1b)checkcableconnection
1c)returntofactory

Maximumoutputsignal
Outputsignalmuchlowerthan
setpointsignalordesiredflow

Screenininletfittingblocked
Sensor/capillaryfailure
Outputstageblownup
Sensor/capillaryfailure
Screenblocked/contaminated
LFDblocked/contaminatedand/orliquidin
meter
Valveblocked/contaminated
Valveinternaldamage(swollenseatin
plunger)
Incorrecttypeofgasisusedand/or
pressure/diff.pressure

Flowisgraduallydecreasing

Condensation,occurswith NH 3 ,
hydrocarbonssuchas C 3 H 8 , C 4 H 10 etc.

Oscillation

Valveadjustmenthaschanged
Supplypressure/diff.pressuretoohigh
Pipelinetooshortbetweenpressure
regulatorandMFC
Pressureregulatorisoscillating
Valvesleeveorinternalsdamaged
Controlleradjustmentwrong

9.17.061

1d)lowersupplypressure
1e)connect0..15Vdctovalveand
slowlyincreasevoltagewhilesupply
pressureison.Thevalveshouldopenat
7V3V;ifnotopen,thencleaningparts
andadjustvalve(qualifiedpersonnel
only)
1f)cleanscreen
1g)returntofactory
2a)returntofactory
2b)returntofactory
3a)cleanscreen
3b)removeLFDandclean;drymeter
withairor N 2
3c)cleanvalve
3d)replaceplungerassemblyandadjust
valveorreturn
3e)tryinstrumentonconditionsfor
whichitwasdesigned
4a)decreasesupplypressureand/orheat
gastobemeasured
4b)see1e
5a)lowerpressure
5b)increaselengthordiameterofpiping
upstream
5c)replacepressureregulatorortry5b
5d)replacedamagedpartsandadjust
valve,see1eorreturntofactory
5e)adjustcontroller

ELFLOWBaseSeriesMassFlowControllers

Page33

BRONKHORST

Symptom

Possiblecause

Action

Smallflowatzerosetpoint

Valveleaksduetodamagedplungerordirtin
orifice
Pressuretoohighormuchtoolow
Damageddiaphragm(onlyapplicableto
valveswithmembrane)

6a)cleanorificeand/or,whenreplacing
plungerassembly,see1e
6b)applycorrectpressure
7a)replacemembraneseal

Highflowatzerosetpoint

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RemovalandReturnInstructions
Instrumenthandlings:
Purgegaslines
Removeinstrumentfromline
Inserttheinstrumentintoaplasticbagandsealthebag
Placethebaginaappropriateshippingcontainer

Adddocumentation:
Reasonofreturn
Failuresymptoms
Contaminatedcondition
DeclarationonContaminationform:9.17.032

Whenreturningmaterial,alwaysdescribetheproblemandifpossibletheworktobedone,ina
coveringletter.

Itisabsolutelyrequiredtonotifythefactoryiftoxicordangerousfluidshavebeenmeteredwiththe
instrument!
Thistoenablethefactorytotakesufficientprecautionarymeasurestosafeguardthestaffintheirrepair
department.Takepropercareofpacking,ifpossibleusetheoriginalpackingbox;sealinstrumentin
plastic
etc.

Contaminatedinstrumentsmustbedispatchedwithacompletelyfilledin'declarationon
contaminationform'.Contaminatedinstrumentswithoutthisdeclarationwillnotbeaccepted.

Note:
Iftheinstrumentshavebeenusedwithtoxicordangerousfluidsthecustomershouldprecleanthe
instrument.

Important:
Clearlynote,ontopofthepackage,thecustomerclearancenumberofBronkhorstHighTechB.V.,
namely:
NL801989978B01

Ifapplicable,otherwisecontactyourdistributorforlocalarrangements.

ThedeclarationoncontaminationformisavailableattheBronkhorstdownloadsite:
http://www.bronkhorst.com/en/downloads/

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Service
ForcurrentinformationonBronkhorstandserviceaddressespleasevisitourwebsite:

http://www.bronkhorst.com

Doyouhaveanyquestionsaboutourproducts?OurSalesDepartmentwillgladlyassistyouselecting
therightproductforyourapplication.Contactsalesbyemail:

sales@bronkhorst.com

Foraftersalesquestions,ourCustomerServiceDepartmentisavailablewithhelpandguidance.To
contactCSDbyemail:

support@bronkhorst.com

Nomatterthetimezone,ourexpertswithintheSupportGroupareavailabletoansweryourrequest
immediatelyorensureappropriatefurtheraction.Ourexpertscanbereachedat:

+31859021866

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