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measurIT technologies

Flow Measurement during the Production of Microprocessors

Non-invasive measurement, i.e. there is no risk of contaminating the high-purity fluids. Insensitive to
aggressive acids.

Measuring task Method Medium

Ultrapure water, various

? Flow measurement Ultrasound
acids

Features Measuring task………………………………………...

Media: ultrapure water, Microprocessors are produced in a large semiconductor factory. To
various acids, apply the micro-electronic circuits to the ultrapure silicon-crystal
special chemicals wafers, the wafers are successively treated with various fluids –
ultrapure water, various acids and special chemicals. These are
Pipes: DN 20 to DN 60
stored in tanks, which are connected to the various production
(0.8 in to 2.4 in)
departments by means of pipes. The tanks are in the cellar of the
Material: PFA and PVDF company building. Hitherto the consumption was calculated purely
based on the fill levels.
The measured media may under
no circumstances be contaminated To optimise the process control and protect the environment, direct
with the slightest percentage of consumption measurement now has to be integrated. It is important
metal. that there is absolutely no risk whatsoever of the fluids becoming
contaminated – in particular by metal ions.

Solution…………………………………………………
Non-invasive ultrasonic flow measurement is the optimal solution.
The ultrasonic transducers are simply clamped onto the pipes, and
therefore do not come into contact with the media flowing through
the pipes. Therefore there is no risk whatsoever of contamination.
Simultaneously the acids used to etch the wafer do not influence the
functionality or service life of the measuring device.
The transmitters are installed on an intermediate floor, where they
can be easily accessed without meeting cleanroom requirements.
Their measuring values are transmitted to a central process control
Q5 transducer, sealed with epoxy resin, in block room.
mount

Advantages…………………………………………….
No risk of contaminating the high-purity fluids, thanks to non-
invasive clamp-on measurement
No pipe work required to install the measuring systems
Non-invasive measurement is insensitive to chemically aggressive
acids or solid particles
Process optimisation thanks to exact balancing of consumption
values
Environmental protection
FLUXUS? ADM 5207 transmitter

MeasurIT Technologies Ltd.

Craan, Craanford, email: info@measurIT.com Phone: +353 (0) 53 942 8962
Gorey, Co. Wexford, Ireland www.measurIT.com Fax: +353 (0) 53 942 8963