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{krish}@ee.duke.edu
I. I NTRODUCTION
Three-dimensional integrated circuits (3D ICs) promise to overcome interconnect bottlenecks in CMOS scaling [1]. By utilizing
vertical connections between stacked dies (i.e., through-silicon-vias
(TSVs) [2], [3]), 3D ICs can provide abundant interconnect bandwidth with improved performance and less communication-energy
consumption [4]. However, concerns about reliability constitute one
of the key obstacles in the widespread adoption of TSV-based
3D IC technology in industry [5], [6]. One of the concerns is
electromigration (EM) occurrence on TSV (referred to TSV EM in
this paper) [7], [8].
EM refers to the transport of material due to the movement of
electrons. This phenomenon can be attributed to various factors,
such as geometrical shapes, current density, temperature distribution,
mechanical stress and material properties [9]. EM on a wire leads
to the accumulation of more atoms at the end of the wire towards
the source pin creating hillocks, while voids appear at the other
end of the wire. Eventually, these defects lead to open- and/or shortcircuit failures.
In 3D ICs, TSV EM becomes even more critical due to the
following reasons. First, compared to their 2D counterparts, current
densities of 3D ICs are much higher as integration densities increase.
Hence TSVs carry a large amount of current. Second, temperature
variations, especially inter-die variation, can be signicant due to
the inefcient heat dissipation of 3D stacked dies. Third, the large
difference in coefcients of thermal expansion (CTE) of TSV lling
material (e.g., copper) and the surrounding silicon results in thermomechanical stress in the TSV. For these reasons, TSV EM-related
reliability issue in 3D ICs is more critical, and it is imperative to
mitigate and repair EM-induced defects in TSVs.
A number of EM mitigation techniques for 2D interconnects have
been proposed in the literature [10], [11], [12], [13]. However,
due to the different characteristics and fabrication mechanisms of
2D interconnect compared to TSVs, these techniques cannot be
applied directly for TSV EM [14]. On the other hand, most of
the existing works for TSV EM mainly focus on EM modeling,
except [14] and [15]. In [14], a technique was proposed to mitigate
TSV EM by balancing the direction of current ow within it. In [15],
a recongurable in-eld repair solution was proposed to tolerate
latent EM-induced TSV defects. However, both of these solutions
ignored the impact of temperature on EM reliability, which results in
inaccurate MTTF evaluation and ineffective repair. According to [16],
as the temperature increases from 300K and 400K, the MTTF of a
single TSV reduces by a factor of 103 . Therefore, the impact of
c
978-3-9815370-7-9/DATE16/ 2016
EDAA
1291
>
d^s
d^s
d^s
d^s
>
Dhy
(1/M T T Ffi )
d^s
d^s
d^s
>
III. P RELIMINARIES
M T T Fnetwork =
>
d^s
>
Dhy
>
>
(3)
where M T T Ffi is the MTTF value of the ith f-TSV in the network.
At time zero, all the f-TSVs are EM-fault-free. However, during
eld operation, f-TSVs with lower MTTF may fail due to EM
vulnerability. Therefore, such EM-vulnerable f-TSVs will limit the
MTTF of the f-TSV network. To solve this problem, a promising
method is to assign spares for them, as shown in Figure 1. By
inserting MUX and DEMUX, an EM-vulnerable f-TSV can be
replaced by the spare(s) once it becomes faulty due to EM-induced
defects. Assuming that we assign a spare sj to the f-TSV fi , then
the MTTF of fi becomes:
M T T FfEnhnc
= M T T F fi + M T T F sj
i
(4)
M T T FfEnhnc
i
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2016 Design, Automation & Test in Europe Conference & Exhibition (DATE)
d^sDdd&
Zd>'^//
Zd>'
^
/
>
'
d
M T T Fnetwork =
2
M T T Fnetwork
+ M T T Ffi M T T Fnetwork
(5)
M T T Ff2i /M T T Fsj
d
W
W
Ddd&
d^sDdd&
In this work, we assume that all the spares are already placed
before TSV repair. Therefore, it is necessary to guarantee that there
are sufcient spares to satisfy M T T Ftarget . This can be realized by
estimating an upper bound on the required spare number at earlier
stages of the design cycle, such as the register-transfer and behaviour
levels. To this end, we need to consider the worst-case scenario: all
f-TSVs have the lowest possible MTTF, which can be calculated
using the highest temperature Tmax across all the die and the highest
switching activity pmax among the outputs of all the macro blocks.
In [28], an efcient method was proposed to estimate switching
activity and power consumption at the register-transfer level (RTL).
With this technique, the power consumption and output switching
activity of each RTL block can be extracted. After partitioning a
2016 Design, Automation & Test in Europe Conference & Exhibition (DATE)
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IL
'/LM
VM
Figure 4: Assignment of spares to EM-vulnerable f-TSVs to minimize rerouting additional wire length.
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2016 Design, Automation & Test in Europe Conference & Exhibition (DATE)
1.8
of des perf
Die
Die0
Die1
Die0
Die1
Die2
Die3
2-die
4-die
Tmax (C)
42.12
39.11
57.88
55.16
50.36
43.90
Tmin (C)
41.91
38.99
57.76
55.02
50.23
43.97
Tavg (C)
42.01
39.04
57.82
55.09
50.29
43.84
40
30
20
10
0
1.5
2.5
3.5
4.5
1.6
1.5
1.4
1.3
1.2
1.1
1
10
20
30
40
#Spare TSVs
Figure 6: The comparison of satised target MTTF with the same assigned
spares between EM-vulnerable assignment and random assignment.
60
50
EM-vulnerable assignment
Random assignment
1.7
Implementation
Normalized (M T T F )
Figure 5: The distribution of TSV MTTF for two implementations of
benchmark des perf : 2-die and 4-die.
2016 Design, Automation & Test in Europe Conference & Exhibition (DATE)
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Implementation
#f-TSV
2-die
4-die
2-die
4-die
2-die
4-die
2-die
4-die
369
1220
582
1451
1569
2100
1938
3320
Thermal-aware
42
216
52
240
164
282
197
451
#Spare
Thermal-unaware [15]
40
201
48
213
156
257
171
374
E. Runtime analysis
To evaluate the CPU runtime for the proposed technique, the
experiments were performed on all the four benchmarks with a 2-die
implementation. This measure consists of two parts: the runtime for
EM-vulnerable f-TSV identication (identication for short) and the
runtime for spare assignment (assignment for short). As illustrated in
Table III, both of these steps can be nished within tens of seconds,
even for the largest design.
Table III: The runtime of the proposed methodology for all benchmarks.
Benchmark
des perf
cf rca 16
cf fft 256 8
des cf fft
Identication (s)
1.01
3.79
8.31
10.07
Assignment (s)
18.93
24.77
37.85
57.61
Total (s)
19.94
28.56
46.16
67.68
VI. C ONCLUSION
Three-dimensional chip stacking with TSVs has gained traction in
recent years as a promising means to continue Moores law. However,
electromigration (EM)-induced reliability degradation is one of the
key obstacles for industry adoption of TSV-based 3D ICs. To handle
this challenge, we have presented a fault-tolerance technique to
increase the MTTF of the functional TSV network through assigning
spare TSV to EM-vulnerable functional TSVs. By considering the
impact of temperature variation, we have presented the trade-off
analysis between the target MTTF, the number of assigned spare
TSVs, and the re-routing delay overhead. The simulation results
demonstrated that, in contrast to previous methods, the proposed
technique can generated robust repair solution under a more realistic
scenario.
R EFERENCES
[1] International Technology Roadmap for Semiconductors (ITRS13) [Online]. Available: http://www.itrs.net/.
[2] R. S. Patti. Three-dimensional integrated circuits and the future of
system-on-chip designs. Proc. of the IEEE, 94(6):12141224, 2006.
[3] M. Motoyoshi. Through-silicon via (TSV). Proc. of the IEEE, 97(1):43
48, 2009.
[4] S. Sukegawa et al. A 1/4-inch 8mpixel back-illuminated stacked CMOS
image sensor. in Proc. IEEE Int. Solid-State Circuits Conf., Feb. 2013,
pp. 484-485.
[5] I. Loi et al. A low-overhead fault tolerance scheme for TSV-based 3D
network on chip links. in Proc. Int. Conf. Comput.-Aided Des., Nov.
2008, pp. 598-602.
[6] B. Swinnen et al. 3D integration by Cu-Cu thermo-compression bonding
of extremely thinned bulk-Si die containing 10 m pitch through-Si vias.
in Proc. IEEE IEDM, Dec. 2006, pp. 1-4.
[7] Y. Tan et al. Electromigration performance of through silicon via (TSV)
a modeling approach. Microelectron. Reliab., 50(9):13361340, 2010.
[8] J. Pak et al. Modeling of electromigration in through-silicon-via based
3D IC. In Proc. IEEE ECTC, May. 2011, pp. 1420-1427.
[9] Y. Liu et al. 3D modeling of electromigration combined with thermal
mechanical effect for IC device and package. Microelectron. Reliab.,
48(6):811824, 2008.
[10] J. Lienig et al. Electromigration avoidance in analog circuits: two
methodologies for current-driven routing. In Proc. IEEE Asia South
Pacic Des. Autom. Conf., Jan. 2002, pp. 372-378.
[11] J.-T. Yan et al. Electromigration-aware rectilinear steiner tree construction for analog circuits. In Proc. IEEE Asia South Pacic Circuits Syst.,
Nov. 2008, pp. 1692-1695.
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Lavg (m)
Thermal-aware Thermal-unaware [15]
149.31
145.66
113.57
101.12
179.03
171.44
158.93
146.75
198.10
187.29
169.38
152.39
217.41
191.80
183.55
165.92
ErrMTTF
4.76%
6.94%
7.69%
10.78%
4.88%
7.89%
9.17%
14.04%
2016 Design, Automation & Test in Europe Conference & Exhibition (DATE)