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Original Russian Text N.I. Polzikova, G.D. Mansfeld, S.G. Alekseev, A.O. Raevski, 2009, published in Akusticheski Zhurnal, 2009, Vol. 55, No. 1, pp. 121128.
PHYSICAL FOUNDATIONS
OF ENGINEERING ACOUSTICS
AbstractThe problem of acoustic energy trapping in a microwave resonator structure operating on the basis
of acoustic waves and containing a relatively thick nanoceramic plate, which has a piezoelectric film with electrodes on its surface, is solved. For a composite resonator structure made on the basis of isotropic substrates and
nanoceramics, formulas are derived that allow one to choose the thicknesses of its layers to obtain a high Q
factor at a desired frequency.
PACS numbers: 43.20.Ks
DOI: 10.1134/S1063771009010163
INTRODUCTION
The urgency of this work is stipulated by the high
interest in microwave resonator structures [1]. To create
resonator structures with a high Q factor, not only single crystals with low acoustic loss can be used, but also
high-quality ceramic materials, for instance, YAG
nanoceramics, which have recently been developed and
are also characterized by low losses [2].
The Q factor of a resonator structure based on single
crystals is determined by well-established mechanisms:
viscoelastic loss associated with the propagation of
acoustic waves in the structure layers, diffraction loss,
and loss due to the scattering of acoustic wave energy
at reflections from the surface roughness of reflecting
faces [3]. In ceramics, additional specific mechanisms
of energy loss due to wave scattering by the grains and
pores of the structure are possible [4]. Specific conditions of acoustic wave propagation in ceramics also
require modification of the theory describing the frequency-periodic additional attenuation component
associated with the excitation of Lamb modes, which
carry energy away from the resonance region of a composite resonator [3, 4]. Information on the magnitude of
this loss is very important for both understanding the
nature of acoustic loss in thin layers of ceramics and
designing practical devices. For the case where the
acoustic wavelength is much greater than the spatial
inhomogeneities in the propagation medium, which is
often true for nanoceramics, the problem is reduced to
analysis of energy trapping in an isotropic medium with
averaged acoustic characteristics. The problem on
energy trapping in acoustic resonators made on the
basis of ceramics has not yet been solved.
136
x3
4
3
2
d
u3
u1
1
i
u1
u3
x1
Fig. 1. Schematic diagram of a composite resonator structure: (1) an isotropic plate made of a material with low
acoustic loss, (2, 4) metallic film electrodes, and (3) a piezoelectric film.
GV + G R
-,
G = ------------------2
(2)
(3)
c 44 = G.
(4)
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No. 1
wave is smaller than the corresponding velocities in crystallographic directions of a single crystal. For other
materials with A < 1, the relation between the velocities
should be opposite. Using the numerical values c '11 =
' = 11.50 1010 N/m2, and c 12
' =
33.32 1010 N/m2, c 44
11.07 1010 N/m2 (A = 1.03) for an YAG single crystal, we obtain the following average moduli for the
ceramics: c11 = 34.495 1010 N/m2, c44 = 11.348 1010
N/m2, and c12 = c11 2c44 = 11.798 1010 N/m2.
Coupled equations for the components of the
mechanical displacement vector ui (i = 1, 3) in the isotropic material can be written as
u
u
u3
u1
- = c 11 ---------2-1 + ( c 11 c 44 ) ---------------- + c 44 ---------2-1 ,
--------2
x 1 x 3
t
x 1
x 3
2
2009
u
u
u3
u1
- = c 44 ---------2-3 + ( c 11 c 44 ) ---------------- + c 11 ---------2-3 ,
--------2
x
x
1
3
t
x 1
x 3
2
(5)
(1)
137
(6)
As in [5], the solution to Eqs. (5) and (6) for the waves
propagating along the x3 axis with the amplitude varying along the x1 axis is sought in the form
u i = ( A i cos x 3 + B i sin x 3 ) exp ( x 1 ) exp ( it ). (7)
The result of solving the problem is the determination of wave numbers and describing the character
of propagation for the modes excited in the structure
and carrying away the energy in the transverse direction
with respect to the resonator axis. In our notation, the
imaginary corresponds to the propagation of these
waves. The real corresponds to the wave attenuation
in the transverse direction with respect to the resonator
axis.
From Eq. (1) it is possible to find the expressions for
in the form
1, 2 = 01, 02 + ,
2
(8)
where
01 =
--------- and
c 11
2
02 =
---------.
c 44
2
138
POLZIKOVA et al.
(9)
k ( 01 d ) ( k )
2
-,
1 = -----2- -----------------------------------k + 2 1
d
(15)
m ( 02 d ) ( m )
2
--------------------------------------.
2 = ------2
m + 2 2
d
(16)
+ 2M ( 1 cos 1 d cos 2 d ) = 0.
4 1 2
M = ---------------------.
2
2
( 2 + )
2
01
-.
M -----------3
02
2
(11)
(12)
(1)
m 2
(1) 2
2
( 2 ) = ------- 02 . (13)
d
(1)
(10)
sin 1 d = 0,
m c 44
m = ------- -----,
d
(14)
Exact expressions for the displacements can be written as u = (U1(x3), 0, U3(x3))exp(x1)exp(it), where
U 1 ( x 3 ) = u 0 ( sin ( 1 d ) + M sin ( 2 d ) ) cos ( 2 x 3 )
-----------------------+ ----- cos ( 1 x 3 )
1
M
U 3 ( x 3 ) = u 0 cos ( 1 x 3 ) ----- ----- cos ( 2 x 3 )
2
1, 2 d =
(1)
1, 2 d
(11, )2
- 1, 2 ,
+ -------(1)
1, 2
(17)
+ ( sin ( 1 d ) + M sin ( 2 d ) )
2
= 2 1 / ( 2 + ).
2
which are the resonance frequencies for purely longitudinal and purely transverse waves in the plate.
(1)
where
c 44 3/2 ( 1 ) cos ( k c 11 /c 44 )
- ----------------------------------------------------------- ,
1 = 2 ---- c 11
sin ( k c /c )
k
11
c 44
2 = 2 ---- c 11
1/2
44
( 1 ) cos ( m c 44 /c 11 )
-------------------------------------------------------------- ,
sin ( m c 44 /c 11 )
m
2
U 3 ( x 3 ) = u 0 cos ( 1 x 3 ) + O -----2 ,
(18)
U 1 ( x 3 ) ----- U 3 ( x 3 ) ,
1
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2009
2
U 1 ( x 3 ) = u 0 cos ( 2 x 3 ) + O -----2 ,
1.165
L134
(19)
U 3 ( x 3 ) ----- U 1 ( x 3 )
2
ACOUSTICAL PHYSICS
139
No. 1
2009
S233
L133
1.160
S232
1.155
S231
L132
1.150
1.0
0.5
Im 103, cm1
0.5
1.0
Re 103, cm1
tan ( i t a ) = -----s- ,
i t
cot ( i t a ) = -----s- ,
i t
(21)
140
POLZIKOVA et al.
x3
(a)
x3
(b)
a
a
Fig. 3. Conventional distribution of oscillation amplitude in the structure: (a) the case without energy trapping and (b) the case with
energy trapping: the upper curve is for the case where one half-wavelength fits within the transducer aperture; the lower curve is for
the case where three half-wavelengths fit within the transducer aperture.
Equation (21) has solutions only in the above-mentioned frequency band (20); i.e., only when s is real
and t is imaginary. However, Eqs. (21) do not take into
account the mixed character of displacements in the
wave and the contribution of the whole set of modes to
the boundary conditions.
Let us rigorously consider the spectrum of oscillations in a composite resonator in the frequency band
satisfying inequality (20) and far from the regions of
hybridization of longitudinal and transverse oscillations. We assume that, according to Fig. 1, the plate
region below the transducer |x1| < a has an effective
thickness of d' = d + , where 0 < /d 1. If the inequality (/1, 2)2 1 is satisfied, then, according to
Eqs. (18), (19), it is possible to neglect the mixed character of mechanical displacements, i.e., the contribution of transverse components to longitudinal ones and
vice versa. Omitting the time multiplier, we represent
the solutions for the components of displacement U in
the form
(23)
Us
nx
n=0
+
coefficients A n and F n in terms of the amplitudes F i
x 1 > a;
Ut =
U s
, 0 x 3 d,
---------= x 1 x1 = a
0, d x 3 d'.
T s x1 = a
m=0
mx
+
cos -------------3 [ B m exp ( + tm x 1 )
d'
+ B m exp ( + tm x 1 ) ],
K m Fm +
+
mi F m + i
= 0.
(24)
i0
(22)
0
Here, Km = K m + K m ,
x 1 < a.
C mm
0
K m = ----------- i ( t )m sin ( 2i ( t )m )
i ( t )m
+ 2C mm cos ( 2i ( t )m ),
1
Km =
p0
C m, m + p
----------------- sin ( 2i ( t )m + p a ),
i ( t )m + p
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(25)
2009
C m, m + p C m + p, m + k
sin ( 2i
----------------------------------------i
( t )m + p
p0
C m, k
2m
2 2
C mm --------------- ( + m ),
d
( t )m + p a ),
md kd
4mk sin ----------- sin --------d'
d'
= -----------------------------------------------2
( dd' )
(s) p
-.
-------------------------------------------------------------------- m p k p
2
D m, 1 D m, 1
K m = ------------ + ------------- .
Km + 1 Km 1
(26)
K m = 0,
(27)
( s )m + p
---------------------------------------------- ,
p 2 2
2
2
p 0 d d' 1 + ----
(28)
lim m = 1.
(29)
2m
= --------------- p ( 1 + p/2m ).
d
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No. 1
(30)
From Eqs. (29) and (30), it is seen that the harmonics with
p > 0 correspond to solutions decaying away from the
transducer; their number is infinite, and their contribution
1
can be estimated as 1 =
------------------------------------ <
p>0
p 3/2
p 1 + -----
2m
(3/2). The harmonics with p < 0 correspond to solutions propagating from the transducer; their number is
finite (1 p m), and their contribution can be esti3/2
2
mated as 2 = mp = 1 ------------------------------------- < 23/2(3/2).
p ( 1 + m p )
Here, (z) is the Riemann zeta function. The quantity 2
determines the wave attenuation associated with the
escape of energy from the transducer region.
2009
Two important conclusions following from the consideration of interaction between harmonics with different numbers should be pointed out. First, the attenuation of oscillations in the transducer region takes place
even in the frequency band in which the condition of
energy trapping (Eq. (20)) is satisfied, when no interaction occurs between harmonics with different numbers.
Second, the consideration for the interaction between
harmonics with different numbers is important for
determining the exact resonance frequencies of the
structure and for optimizing the size of the aperture and
the transducer thickness. The condition under which
this interaction can be neglected follows from Eq. (30)
and has the form
md
2dd' sin ----------d'
- ,
m = -----------------------------2
2
m ( d d' )
1
------------------------------------ = 1 i 2 .
p 3/2
p 0 p 1 + -------
2m
---- -- d' d
---- -- d' d
141
3/2
1
------2 .
m
(31)
142
POLZIKOVA et al.
CONCLUSIONS
f, GHz
0.916
fr
0.914
0.912
0.6
0.4
0.2
Imt 103, cm1
0.2
0.4
0.6
Res 103, cm1
Fig. 4. Illustration of the graphical determination of the resonance frequency for the longitudinal mode with k = 105.
The solid lines are the frequency dependences Res( f ) and
Imt ( f ); the dot-and-dash lines represent the function
(Imt ) tan ( Im t a ) . The dashed line parallel to the abscissa
axis indicates the values of the resonance frequency fr and
of Imt ( fr).
Figure 4 shows the calculated dispersion curves corresponding to an even distribution of the displacement
relative to the structure axis for a transducer aperture of
2a = 200 m.
The calculated value of the resonance frequency of
the structure is fr = 914.3 MHz. It corresponds to the
point of intersection of Res( f ) with the solution to
Eq. (21) and, according to Eq. (20), lies between the
cut-off frequencies of the plate and of the whole structure. The resonance frequency obtained corresponds to
nonzero value of Imt ( fr). According to Eq. (13), this
means that, for the region below the transducer, a wave
solution exists for the transverse direction with respect
to the structure axis, while outside the transducer, a
damped solution is present. At the resonance frequency
determined above, energy trapping takes place. Less
than a half-wavelength fits within the transducer aperture (see Fig. 3b, upper curve). In the example under
consideration, this solution is unique. Note that, with
variation of the thickness and aperture of the transducer, a case is possible where several intersections of
Res( f ) with the solution to Eq. (13) occur (see Fig. 3b,
lower curve).
In a wide frequency range, because of the phase
incursion in the transducer layers, the sequence of cutoff frequencies s and t may change, which leads to a
periodicity of alternation of the energy trapping and
nontrapping regions. Such a periodicity was observed
experimentally in [5].
Translated by A. Svechnikov
ACOUSTICAL PHYSICS
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No. 1
2009