Академический Документы
Профессиональный Документы
Культура Документы
Bachelor of Engineering
2013
Abstract
Comment [B3]: Leave only a line of 12point blank space between consecutive
paragraphs. Ok
electronics has created an array of new and difficult problems and demands for the field of
Wafer dicing. During wafer dicing saw, broken silicon wafer may have a possibility to go out
of the process without any interruption. Because of this, it drives the researcher to come up
with the engineering long term solution to improve the wafer dicing saw process by introducing
a blade breakage detector for semi-automatic dicing saw machine to prevent possibilities of a
broken silicon wafer to come out during wafer dicing saw process.
Designing, development and construction of blade breakage detector prevents the potential
wafer dicing saw quality issues such as broken silicon wafers and chuck damage. It also helps
to minimise approximately US$96,000 per annual to the company from corrective maintenance
and resource management budget.
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Disclaimer
I hereby declare that this thesis is my own work and contains no material which has been
accepted for the award of any degree or diploma from any tertiary institution. To the best of
my knowledge and belief, this thesis contains no material previously written or published by
another person, except where due reference is made in the text.
Signed:
Akash Anil
22 July 2013
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Acknowledgements
I would like to express my gratitude to my principal supervisor Professor Kazem Abhary for
his overall guidance throughout my project. His encouragement and willingness to share his
wisdom have been essential during each stage of the research and writing of this thesis. I
would also like to thank my industry supervisor Mark Anthony Siazon for his unselfishness
to provide his insightful comments and suggestions during the whole project process. There is
no doubt this work could not have completed without the observations, comments and
discussions contributed by my two supervisors.
I also sincerely acknowledge the assistance provided by the following individuals:
Mr Mizan Jefree, our multimedia personnel, for his help in providing some of the
valuable photos on the company and the connector itself. His expertise has helped me
in providing a clearer picture to the reader in this whole project thesis.
My Brother, Ashish Anil, for his comments on the presentation of the project thesis.
This had helped me in providing a clearer and more consistent project presentation.
I would like to thank the whole design team members for contributing their valuable
suggestions and comments on the blade breakage detector design
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Table of Contents
Title page
Abstract
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Disclaimer
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Acknowledgments
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Table of Contents
List of Figures
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List of Tables
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Appendices
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List of Figures
Chapter 1 - Project Background and Significance
Figure 1.1 Portion of a Diced Wafer after Cleaning
Figure 1.2 Typical Wafer Dicing Saw Blade Holder Assembly
Figure 1.3 Damage Chuck Table
Figure 1.4 Excessive Cut
Figure 1.5 Damaged Wafer
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List of Table
Chapter 1 - Project Background and Significance
Chapter 2 - Literature Review and Project Methodology
Table 2.1 ANSI Recommended Allowances and Tolerances
Table 2.2 Table of Preferred Sizes
Table 2.3 Gantt chart
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Appendices
Appendix 1
List of Abbreviations
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1.1 Introduction
This chapter will give a high level detail of the project "The Design and Development of
a Blade Breakage Detector for Semi-Automatic Dicing Saw Machine". It discusses why
the system capability is needed and its importance to the proponent. It shows the
background of the study, outlining the scenarios, aims and scope.
1.2 Company Background
GLOBALFOUNDRIES (Singapore) is the worlds first full-service semiconductor
foundry with a truly global manufacturing and technology footprint. Launched in March
2009 through a partnership between Advanced Micro Devices (AMD) [NYSE: AMD]
and the Advanced Technology Investment Company (ATIC), GLOBALFOUNDRIES
provides a unique combination of advanced technology, manufacturing excellence and
global operations. With the integration of Chartered Semiconductor in January 2010,
GLOBALFOUNDRIES significantly expanded its capacity and ability to provide bestin-class foundry services from mainstream to the leading edge.
GLOBALFONDRIES manufacturing operations are based in Singapore, Germany and
it is headquartered in Silicon Valley. A leading-edge fabrication is currently under
construction in Saratoga County, New York. These sites are supported by a global
network of R&D, design enablement, and customer support in Singapore, China,
Taiwan, Japan, the United States, Germany, and the United Kingdom.
The proponent of this thesis is currently employed in GLOBALFOUNDRIES Singapore
as a Senior Associate Engineer. Reporting under the Equipment Engineering Team, the
proponents major job function is providing sustained equipment health throughout the
shift. The proponent also provides engineering support, such as machine qualifications
and solutions to issues affecting the production floor within the confines of the process.
Wafer fabrication is a meticulous procedure composed of many sequential processes
which involves engineers metallurgists, chemists and physicists to produce a complete
electrical or photonic circuit. The term wafer fabrication generally refers to the process
of fabricating integrated electrical circuits/components on silicon wafers. Prior to the
fabrication of wafer, pure silicon ingots are used to produce raw silicon wafers, which
then sliced and shaped into thin wafers through a process wafering.
The crucial step in wafer fabrication is the designing of the electrical circuits by
defining its function, specifying the input-output signals and voltages. These circuit
speculations are entered into electrical circuit design software, such as simulation
program with integrated circuit emphasis (SPICE), and then imported into circuit layout
programs. SPICE is a powerful program used in integrated circuit and board level
design to check the integrity of the circuit design and to predict the behavior of the
circuit. For wafer mask production it is an essential layer to be defined. The circuits
resolution increases rapidly with the step in design, as the scale of the circuits at the
start of the design process is already being measured in fractions of micrometers. Each
step thus increases circuit density for a given area.
The silicon wafers start out blank and pure. The circuits are built in layers in clean
rooms. First, photo sensitive resistance patterns are photo masked in micrometer detail
onto the wafers surface. The wafers then exposed to short wave ultraviolet light and the
unexposed areas thus etched away and cleaned. Hot chemical vapors are deposited on to
the desired zones and baked in high heat, which permeate the vapors into the desired
zones. In some cases, ions, such as O2+ or O+, are implanted in precise patterns and at a
specific depth by using radio frequency driven ion sources. These steps are often
repeated many hundreds of times, depending on the complexity of the desired circuit
and its connections.
As the worlds largest chip manufacturer, GLOBALFOUNDRIES strives to make every
facet or semiconductor manufacturing state of the art from semiconductor process
development and manufacturing, through yield improvement to final test and
optimization, and lastly packaging. Employees in the technology and manufacturing
group are part of a worldwide network of manufacturing, assembly and test facilities
that is committed to its goal of producing world class microchips that is unsurpassed in
quality and performance and the companys capability to deliver the market needs for
high quality microchips.
With the volume demand increasing in microchips particularly in Asia, this brings a
challenge to the company to have a continuous capacity to produce high quality and
3
design that will ensure that the possibility of having a broken silicon wafer is prevented
during wafer dicing saw process due to broken blade. The study will utilize system design
and analysis in developing the proposed design.
Comment [B17]: Scope should be
written as headings 1.5. Ok
To study the application and robustness of various sensor types for detecting the
broken blade
ensure that production will not be disrupted to run resulting in higher output, better
yield, and reliable product ship-out and as well as improved performance.
The Proponent - This study will help the proponent to gain more knowledge,
additional skills and information that would help him in his future career. It would be
an honour on the part of the proponent when the system design is fully implemented
eventually.
For Other Researchers - This study will help the other researchers to gain more
knowledge, additional skills and information that would help them to improve their
manufacturing processes.
This chapter mentioned that the main purpose of this project, "The Design and
Development of a Blade Breakage Detector for Semi-Automatic Dicing Saw Machine".
Thus, it will include analysis, design, development and evaluation of the mentioned
capability in an effort to improve wafer dicing saw process to the benefit of
GLOBALFOUNDRIES and its customers.
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2.1 Introduction
This portion of the research will present literatures and studies related to the concept of
the project being proposed. The purpose of such is to be able to give the reader a wider
view and better understanding of the topic being discussed and provide a background on
how it affected "The Design and Development of a Blade Breakage Detector for SemiAutomatic Dicing Saw Machine.
2.2 Source of Literature
Different data gathering tools and instruments are used by the proponent to gather
information about the existing system. These tools are needed in creation of the
proposed system of the study.
Library Research - Reference material and books available in the library were
consulted to provide more backbone into the programming structure and add
robustness into the new system.
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2.3.1 Automation
Automation article was derived from encyclopedia.com where it discussed the
importance of automation. The author cited out key principles of the use of
automation, suitable for a wide range of scenarios.
Automation (www.encyclopedia.com, 2006) is the use of automatic machinery and
systems, particularly those manufacturing or data-processing systems which require
little or no human intervention in their normal operation. Automation began during
the early 19th century when machines such as looms and lathes became selfregulating. Transfer machines were evolved during the same time in which a series of
machine tools, each of them completed one operation automatically became
continuous production line by pneumatic or hydraulic devices. Further to this,
efficiency and productivity if the workers and machines were enhanced by the
scientific management which was developed by the early time and motion studies of
Frederick Winslow Tailor in Philadelphia, USA in the 1880s. In the early 20th
century, basic industries such as oil-refining, chemicals and food processing were
increasingly automated with the development of electrical devices and time switches.
Sophisticated automation in iron and steel industries began with the use of computers
after World War II. Among them were the highly automated system used on the
assembly plant for automobiles or other complex products. Over the last few decades
automation has evolved from the comparatively straightforward mechanization of
tasks traditionally carried out by hand, through the introduction of complex automatic
control systems, to the widespread automation of information collection and
processing.
Today, automation is a vital component of global economy and human life. Credit of
deriving basic automation systems to todays huge range of applications and human
activities associates with engineers. They contrive to integrate devices of associated
applications to form an improved system of reduced cost but higher productivity.
Objective of automation applications has also been shifted from basic needs
mentioned earlier to broader issues such as increasing quality and flexibility in the
manufacturing process. However, it is also necessary to provide a skilled workforce
who can make repairs and manage machinery. Moreover, the initial costs of
12
automation were high and often could not be recovered by the time an entirely new
technology process replaces the old ones. It was also stressed and pointed out by John
A. Schey (2000), the word automatic is derived from the Greek and means self
moving or self-thinking. The word automation was coined to indicate aspects of
manufacturing in which production, movement, and inspection are performed or
controlled by self-operating machines without human intervention.
In general, there are several levels of automation. This will imply closed-loop control
and in its advanced form, adaptive control. Automation utilizes programmable
devices, the flexibility of which can be quite different:
1. Hard Automation refers to methods of control that require considerable effort to
reprogram for different parts or operations.
2. Soft or Flexible Automation implies ease of reprogramming, usually simply by
changing the software.
2.3.2
Design Drawings
One of the vital components for communicating the design is engineering drawings.
Although engineering graduates might be proficient with engineering drawings,
education of an engineer provides scant exposure to the subject. It can be argued
that time devoted for engineering drawings in present education system is not
commensurate with the practical importance of the subject. Hence, engineers who
work with drawings should be well grounded on the elements of orthographic
projection and also able to read the drawings fluently. Furthermore, they should be
proficient to produce acceptable sketch that can be converted by a draftsman into an
engineering drawing. Although formal instruction helps, it should be possible to
obtain this ability from self-study (T. French, C. Svensen, J. Helsel and B.
Urbanick, 1974).
Engineering drawing can be treated as an encoded version to transmit abundant
information. Apart from the primary shape of an object, a detailed drawing provides
information such as materials to be used together with the tolerances and
dimensions. Engineering drawings also often contain instruction on the surface
roughness or surface treatment of the part, the required heat treatment and the
13
. This
system is being replaced by the unilateral tolerance, in which the deviation in one
direction from the basic dimension is given. For example,
or
In the case of bilateral tolerance, the dimension of the part would be permitted to
vary between 1.996 and 2.004 in for a total tolerance of 0.008 inch. If unilateral
tolerance is specified, the dimension could vary between 2.000 and 2.008, and again
the total
they are easier to check on drawings and that a tolerance can be changed with the
minimal disturbance to other dimensions. The American National Standards
Institute (ANSI) has established eight classes of fit that specify the amount of
allowance and the tolerance on the hole and a mating shaft, see Table 2.1.
Table 2.1 ANSI Recommended Allowances and Tolerances
The ANSI system considers that the hole size d is the basic dimension, because most
holes are produced by using standard-size drills and reamers. Therefore, the shaft
can be more easily produced to a non-standard dimension. Consider a basic hole size
of 2.000 inch and a class 3 (medium) fit (Englewood Cliff, 1978).
Allowance: 0.0009 22 = 0.0014 inch
Tolerance: 0.0008 2 = 0.0010 inch
15
Hole:
Maximum dimension 2.001 inch
Minimum dimension 2.000 inch
Shaft:
Maximum dimension 2.000 - .00014 = 1.9986 inch
Minimum dimension 1.9986 - 0.001 = 1.9976 inch
Therefore, the maximum clearance between shaft and hole is
2.0010 - 1.9976 = 0.0034 inch
And the minimum clearance between shaft hole is
2.00 - 1.9986 = 0.0014 inch
2.3.2.2 Dimensions
The engineering drawing provides the manufacturing department with the
information necessary for producing the part. Therefore, it is important that the
dimensions of the part be clear and complete. The dimensions given should be
sufficient in number to
choice.
Another
difficult
dimensioned.
tolerance to
However, if
all dimensions start at a datum line, all parts made to within tolerance will
assemble properly and the difficulty with interference is eliminated.
2.3.2.2 Preferred Sizes
Standard components such as bolts, bearings and electric motors need to be
made according to a rational scheme by which the size (or weight, speed,
power etc.) covers
arithmetic progression of size is most logical. Each size is larger than the
16
will be more items than at the large size end. From an economic standpoint, the
number of standardized sizes should be kept to the smallest number
that
will
17
the rms value, but currently the center line average (CLA) value is
18
visualize the complete path through to the final solution at the time you first
tackle a problem, you must have self-confidence; you must believe that a
solution will develop before you are finished. Of course, confidence comes with
success, so start small and build your confidence up with small successes.
2. Unlock your imagination. You must rekindle the vivid imagination you had as a
child. One way to do so is to begin to question again. Ask why and what if,
even at the risk of displaying a bit of navet. Scholars of the creative process
have developed thought games that are designed to provide practice in unlocking
your imagination and sharpening your power of observation (E. Raudsepp,
1982).
3. Be persistent. We already have dispelled the myth that creativity occurs with a
lightning strike. On the contrary, it often requires hard work. Most problems will
not succumb to the first attack. They must be pursued with persistence. After all,
Edison tested over 6000 materials before he discovered the species of bamboo
that acted as a successful filament for the incandescent light bulb. It was also
Edison who made the famous comment, Invention is 95 percent perspiration
and 5 percent inspiration.
4. Develop an open mind. Having an open mind means being receptive to ideas
from any and all sources. The solutions to problems are not the property of a
particular discipline, nor is there any rule that solutions can come only from
persons with college degrees. Ideally, problem solutions should not be
concerned with company politics. Because of the NIH factor (not invented here)
many creative ideas are not picked up and followed through.
5. Suspend your judgment. We have seen that creative ideas slowly, but nothing
inhibits the creative process more than critical judgment of an emerging idea.
Engineers by nature, tend toward critical attitudes, so special forbearance is
required to avoid judgment at an early age.
6. Set problem boundaries. We place great emphasis on proper problem definition
as a step toward problem solution. Establishing the boundaries of the problem is
an essential part of problem definition. Experience shows that this does not limit
creativity, but rather focuses it.
A creative experience often occurs when the individual is not expecting it and after
period when they have been thinking about something else. The secret to creativity
21
is to fill the mind and imagination with the context of the problem and then relax
and think of something else. As you read or play a game there is a release of mental
energy which your preconscious can use to work on the problem. Frequently there
will be a creative Ah-ha experience in which the preconscious will hand up into
your conscious mind a picture of what the solution might be. Since the preconscious
has no vocabulary the communication between the conscious and preconscious will
be by pictures or symbols. This is why it is important for engineers to be able to
communicate effectively through three-dimensional sketches.
2.3.4 Invention
An invention is something novel and useful. As such, we generally can consider it to
be the result to creative thought. A study of a large number of inventions (G.
Kivenson,
1977) showed that inventions can be classified into seven categories:
1. The simple or multiple combinations. The most elementary form of invention is
a simple combination of two existing inventions to produce a new or improved
result.
2. Labour-saving concept. This is a higher level of invention sophistication in
which an existing process or mechanism is changed in order to save effort,
produce more with the same effort, or dispense with a human operator.
3. Direct solution to a problem. This category of invention is more typical of what
we can consider to be engineering problem solving. The inventor is confronted
with a need and sets out deliberately to design a system that will satisfy the
need.
4. Adaptation of an old principle to an old problem to achieve a new result. This is
a variation of category 3. The problem (need) has been in existence for some
time, and the principle of science or engineering that is key to its solution also
has been known. The creative step consists in bringing the proper scientific
principle to bear on the particular problem so as to achieve the useful result.
5. Application of a new principle to an old problem. A problem is rarely solved for
all time; instead, its solution is based on the then current limitations of
knowledge. As knowledge (new principles) becomes available, its application to
old problems may achieve startling results. As an example, the miniaturization
22
measured, called the measurand, and affects the sensor in a way that causes a response
represented in the output. The output of many modern sensors is an electrical signal,
but alternatively, could be a motion, pressure, flow, or other usable type of output.
Some examples of sensors include a thermocouple pair, which converts a temperature
difference into an electrical output; a pressure sensing diaphragm, which converts a
fluid pressure into a force or position change and a linear variable differential
transformer (LVDT), which converts a position into an electrical output.
Obviously, according to these definitions, a transducer can sometimes be a sensor, and
vice versa. For example, a microphone fits the description of both a transducer and a
sensor. This can be confusing and many specialized terms are used in particular areas
of measurement. Although the general term transducer refers to both input and output
devices.
Input transducer produces an electrical output, which is representative of the input
measurand. Its output is conditioned and ready for use by the receiving electronics.
The receiving electronics can be an indicator, controller, computer, programmable
logic controller or others. The terms input transducer and transducer can be used
interchangeably.
Sensor is an input device that provides a usable output in response to the input
measurand. The sensing part of a transducer can also be called the sensing element,
primary transducer or primary detector. A sensor is often one of the components of a
transducer. Sometimes, common usage will have to override the theoretical definition
in order to result in clear communication among engineers in a specific industry. The
author has found, for instance, that automotive engineers refer to any measuring
device providing information to the onboard controller, as a sensor. In the case of a
position measurement, this includes the combination of sensing element, conditioning
electronics, power supply, and so on. That is, the term sensor is used to name exactly
what the definition strives to call a transducer. In automotive terminology, the word
sender is also commonly used to name a sensor or transducer (David S. Nyce, 2004).
2.3.6 Parameters to be considered in choosing a sensor
1. Span or range: The smallest and largest values of stimuli the sensor will
reasonably encounter.
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2. Full scale output: The maximum excursion of the output electrical signal.
3. Accuracy: How much does the measured value - the output from the sensor deviate from the true value of the measurand?
4. Resolution: What is the smallest increment if input stimulus can be sensed?
5. Linearity: What is the form of the transfer function relationship between
measurand input and sensor output?
6. Threshold: What are the minimum and maximum input detection levels beyond
which the sensor produces no usable output?
7. Hysteresis: Does the sensor response depend on previous input?
8. Noise: Includes everything outside the realm of specificity.
9. Precision: How repeatable are the measurements from the sensor?
10. Sensitivity: What is the conversion efficiency of the sensor?
11. Specificity: Does the sensor offer a highly selective conversion of the desired
measurand, which is the relatively immune to others.
12. Stability: Is the long term behaviour of the sensor adequate for the application?
13. Survivability: This is a statement of ruggedness environmental suitability, etc.
(Kim R. Fowler and John L. Schmalzel, 2004)
2.3.7 Fiber Optic Proximity Sensors
Fiber optic proximity sensors are used to detect the proximity of target objects. Light
is supplied and returned via glass fiber optic cables. Fiber optic cables can fit in small
spaces, are not susceptible to electrical noise, and exhibit no danger of sparking or
shorting. Light is supplied and returned via glass fiber optic cables. Glass fiber
exhibits very good optical qualities and typically carries high temperature ratings.
Plastic fiber can be cut to length in the field and can be flexible enough to
accommodate various routing configurations.
Important parameters to consider when specifying fiber optic proximity sensors
include detecting range, position measurement window, minimum detectable object,
and response time. The detecting range is the range of sensor detection. For presence
sensors, this goes up to the maximum distance for which the signal is stable. For
position measurement sensors, this is the distance range over which the position
versus output response is linear and stable. The position measurement window is the
width of linear region for the sensor. For example, if the sensor could measure
25
26
loudspeakers used in public address (PA) systems to make the human voice louder or
play recorded music. Amplifiers may be classified according to the input (source) they
are designed to amplify (such as a guitar amplifier, to perform with an electric guitar),
the device they are intended to drive (such as a headphone amplifier), the frequency
range of the signals (audio, intermediate frequency, radio frequency, and very high
frequency amplifiers, for example), whether they invert the signal (inverting
amplifiers and non-inverting amplifiers), or the type of device used in the
amplification like valve or tube amplifiers, field effect transistors amplifiers, etc.
(www.wikipedia.org, 2004).
2.3.9.1 Operational Amplifiers
Operational amplifiers (op amps) are linear integrated circuits that can be used to
amplify signal frequencies that extend from 0 hertz (direct current) to well above 1
mega hertz. Operational amplifiers have two input terminals and one output
terminal. One of the most important qualities of an operational amplifier is that it
amplifies only the difference between its two input signals, while rejecting or
severely attenuating
operational
28
1. Amplifiers: Operational amplifiers are used to amplify signals that range from
direct current (DC) through the higher radio frequencies (RF). The amplifier
can be made to be frequency selective (i.e., act as a filter). It may be used to
maintain a constant output in spite of changing input levels. The output can
produce a compressed version of the input to reduce the range needed to
represent a certain signal. The amplifier may respond to microvolt signals
originating in a transducer, which is used to measure temperature, pressure,
density, acceleration, and so on. The gain of the amplifier can be controlled by
a digital computer, thus extending the power of the computer into the analog
world.
2. Oscillators: The basic operational amplifier can be connected to operate as an
oscillator. The output of the oscillator may be sinusoidal, square, triangular,
rectangular, saw tooth, exponential, or other shape. The frequency of
oscillation may be stabilized by a crystal or controlled by a voltage or current
from another circuit.
3. Regulators: Operational amplifiers can be used to improve the regulation in
power supplies. The actual output voltage is compared to a reference voltage
and the difference is amplified by an operational amplifier and used to correct
the power supply output voltage. Operational amplifiers can also be connected
to regulate and/or limit the current in a power supply.
4. Rectification: Suppose you want to build a half-wave rectifier with a peak
input signal of 150 mill volts. This is not enough to forward bias standard
silicon diode. On the other hand, an operational amplifier can be configured to
provide the characteristics of an ideal diode with 0 forward voltage drops.
Thus it can rectify very small signals.
5. Computer Interfaces: The operational amplifier is an integral part of many
circuits used to convert analog signals representing real-world quantities (such
as temperature, revolutions per minute, pressure, and so forth) into
corresponding digital signals that can be manipulated by a computer.
Similarly, the operational amplifier is frequently used to convert the digital
output of a computer into an equivalent analog form for use by industrial
devices (such as motors, lights, and solenoids).
6. Fields of Application: Operational amplifiers find use in such diverse fields as
medical electronics, industrial electronics, agriculture, test equipment,
29
digital converter is to convert the incoming analog signal into its digital
counterpart.
30
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small cutting edge. Three basic types of dicing blades are available
commercially:
1. Sintered Diamond Blade, in which diamond particles are fused into a soft
metal such as brass or copper, or incorporated by means of a powdered
metallurgical process.
32
2. Plated Diamond Blade, in which diamond particles are held in a nickel bond
produced by an electroplating process.
3. Resinoid Diamond Blade, in which diamond particles are held in a resin bond
to create a homogeneous matrix.
Silicon wafer dicing is dominated by the plated diamond blade, which has proved
most successful for this application.
2.4 Project Methodology
This unit will guide the reader on how the study was designed and will explain the
procedures used in executing the research. It will also cover the setting which tools used
on how the research was conceived and completed.
Comment [B27]: Line-up throughout
the report.
Ask users of the machine of possible risks involved on the current process.
33
Conceptualize an idea that can resolve the problem which poses possible risks of
safety injury brought about by a scattered laser and prevent it.
2. System Design:
Studying related topics about barriers and automation to come up with a design
that will prevent a laser from going out.
3. Machine Pilot:
Gather information about the materials to be used for the automated device.
Do researches, consult manuals and or catalogue for the materials and parts to be
used, and take note of each component that is deemed applicable for the device.
4. System Installation:
5. Functionality Testing:
Confirm validity and effectiveness by doing survey with the tool users.
performance of the existing and new design. The questions are answerable by
numbers ranging from 1 to 5 (1 being the lowest and 5 being the highest). And after
which, collected data will be averaged to get the mean to gain a measurable data.
Likert Scale will be used to get the percentage of respondents overall score to
determine the usability of the design system.
To compute the measurable data, each respondents score will be added together and
will be divided to the total number of respondents to get the mean or the average.
Formula in getting the mean:
Mean = Total score of all respondents
Item Activity
1 BackgroundResearch
2 ProjectProposalandObjective
3 DataGathering
4 Analysis
5 ConceptualDesignDevelopment
6 ReviewandSelection
7 DetailedElectricalSystemModelling
8 DetailedElectronicsSystemModelling
9 DetailedMechanicalSystemModelling
10 DesignCompilationandSoftwareIntegration
11 DesignReviewEvaluation
12 DesignEnhancement
13 PrototypeDesign
14 TestingandImprovement
15 ProjectRelease
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3.1 Introduction
This chapter aims to present the analysis of the current system and operation of the SemiAutomatic Dicing Saw Machine.
3.2 Type of Materials
3.2.1 Semiconductor Wafer
Silicon and GaAs are the two most common materials used for semiconductor
wafers. Wafers are typically available in sizes up to 12" in diameter, with 6" and 8"
most popular. Typical thicknesses are between 100 to 650 microns.
composed of one piece of metal and the tape just adheres to the inferior side of the
frame.
Low strength adhesive tapes are not recommended for cutting small dies, as well as
large production applications. For these applications most users use medium and
high strength adhesive tapes. Determining which tape to use for your application,
sometimes may involve some trial and error. For example the length of time the
material or wafer will stay in contact with the mounting tape before and after dicing
will determine whether to use medium or high strength tapes.
Wafer or material thickness is another consideration when selecting the right
mounting adhesive. Very thin dies work well with waxes and medium strength
tapes. Whereas, thicker wafers work better with medium to high strength tapes.
Cutting too deep into the mounting media will cause the blade to load. Minimize the
depth in which the blade touches the mounting media. It is recommended to cut no
more than twenty five microns into the media. Cutting too deep into the media will
cause premature blade failure. The blade can also agglomerate with the cutting
media, resulting in chipping.
3.3.4 Wax or Glue Mounting to Media
Waxing or gluing material to solid media is usually most reliable and preferred form
of mounting. Wax mounting is typically used for mounting very thin and brittle
materials. There is a large variety of waxes that can be used for this purpose. These
are typically available in lumps, moulded bricks, flakes, chips and powders. Wax
provides best adhesion of material to supporting substrate. Allowing deep cutting
into substrate. This frequently eliminates the lip effect and cracks at the bottom of
material. Also, wax expands as it fills in the gaps of a non-flat substrate. Providing
best adhesion of material or dies, equates in superior cut quality and consistency.
Some disadvantages of wax mounting is that is a relatively messy process. Specially
taking off the material and cleaning dies afterwards. Waxes have various
characteristics that make the best suited for specific applications than others. This
depends on their melting point, flash point, specific gravity, structure, hardness,
brittleness, flexible and elastic characteristics.
Wax or glue mounting offers the following advantages:
No lip effect capability to cut much deeper into the base material. This
typically results in better cut quality, specially on back side of material.
Substrates not perfectly flat can be mounted. The wax or glue compensates by
filling in the gaps
Different hardness base media can be used to control blade wear and
simultaneously dress the blade. Common base media used is glass or ceramic.
Whether it is a ring or a film frame that is used to process a wafer, the mounting is
absolutely crucial. It is paramount that there are no air bubbles in between the tape
and the wafer because this will cause many problems during the dicing process.
These problems could amount to blade or material breakage and some pieces of the
material falling off the tape. Since a vacuum is used during dicing one can see how
the material can break once it is activated if there is a lump between the tape and the
wafer. If the blade passes through the part with the air bubble and the piece comes
off, it could break the blade or it could scratch the rest of the wafer. In order to
avoid air bubbles and to ensure a proper mounting, the technique requires that the
tape is placed close to the wafer without being in contact with it at first. Using the
digital pulp of the finger the tape is then carefully pressed onto the wafer making
contact and adhering to it. Starting at one extreme of the wafer and slowly working
across it until the mounting is complete. Now that the wafer is mounted as shown in
Figure 3.9, be it on a ring or a film frame while using the right tape, it is ready to be
diced.
operation, broken silicon wafer may have the possibility to go out of the process without
any interruption.
wafers. While most common dicing systems are adequate for streets 70 to
100 m and wider, the narrower street widths commonly encountered during wafer
dicing requires the capability to place each cut within several m of the street center.
This necessitates high indexing axis accuracy, high optical magnification and
advanced alignment algorithms.
10
A common recommendation when dicing wafers with narrow streets is to select the
thinnest blade possible. Very thin blades (20 m or less) are significantly weaker
and more susceptible to premature breakage and wear. As a result, their life
expectancy and process stability are inferior to thicker blades. The recommended
blade thickness for 50 to 76 m streets is 20 to 30 m. Cutting depth is typically
determined by material thickness. Cut quality is affected not only by material
thickness, but the mounting media as well.
3.6.2 Cleanliness
After dicing, silicon dust residue can be found on the terminal pads. This dust may
reduce the strength and reliability of wire bonds to these pads. Silicon dust that
settles on the pad during dicing may be hard to remove in the subsequent highpressure cleaning operation. Proper blade cooling and coolant nozzle adjustment can
prevent this problem.
3.6.3 Chipping
Chipping can occur on the front (top) or back (bottom) surface of the wafer. Front
side chipping becomes a yield concern when chips approach the active area of the
die. Front side chipping is predominantly dependent on blade grit, coolant flow and
feed rate.
Back side chipping occurs on the bottom surface of the wafer, as micro-cracks
propagate away from the bottom of the cut and join together into chip out. The
interaction of the blade with the substrate creates a network of micro-cracks in the
substrate. When these micro-cracks join, they cause particles of the substrate to
loosen and be removed.
Back side becomes a yield issue when micro-cracks exceed a certain length, which
may increase the sensitivity of the devices to thermal cycling and lower their
reliability. Dice intended for flip chip packages are even more sensitive. When
packaging these dice, the back side of the die is exposed to the molding material. If
the back side edges of the die are cracked and chipped, the molding may be
imperfect, including air bubbles near the chipping. During the packaging process,
these bubbles may cause mold cracking, which can reduce yield.
11
Coolant
Machine
Work Piece
Rotation speed
Vibrations
Wear
Flow
Adjustment
Feed rate
Spindle, rpm
Wafer thickness
Surface condition
It has been shown that all process parameters correlate with blade torque as shown in
Table 3.1. The appearance of chipping, especially back side chipping, also correlates
with blade torque. For each set of process parameters, there is a torque value limit.
Dicing quality deteriorates and back side chipping appears above the limit. By
measuring the torque online, the other process parameters can be set in such a way that
the torque limit will not be exceeded and maximum feed rate will be obtained without
chip formation.
Many experimental variables have to be considered during process optimization.
Testing each variable separately is tedious and consumes many wafers. The Design of
Experiment method is used to reduce the number of tests needed and to provide the
combined effect of several parameters. The Design of Experiment is a statistical method
12
13
14
4.1 Introduction
This chapter will discuss the evaluation and consideration of alternative solution for the
Semi-Automatic Dicing Saw Machine.
4.2 Variables in Selecting Dicing Blade
The following variables shown in Figure 4.1, should be considered in selecting the right
dicing blade for the application:
15
When observing dicing blade consistency, considering the dicing blades yield. Average
blade that can be measured. Such as number of packages or wafers cut, linear feet or
meters cut. If a particular vendors dicing blade can cut up to twenty five thousand cuts,
however at eighteen thousand cuts inconsistency surfaces, the yields deviate. Yield
deviation negatively affects production and quality control. At the same time as dicing
blades become more inconsistent, dicing saw operators must monitor the process more
closely and make necessary parameter changes. These parameter changes may extend
dicing blade life back to twenty five thousand cuts. However, the extra time spend
adjusting could have been better utilized monitoring other machines or operations.
Choosing the right blade for any particular application is crucial. These essential
precision tools come in a variety of sizes, types, as well as in different abrasive or grit
sizes. They also come in hubbed and hubless forms. The different types of blades are:
resin bond for dicing glass, quartz, sapphire and such materials. Nickel bond for dicing
silicon, gallium arsenide, germanium and indium phosphate. Metal sintered blades are
good for dicing plastics, QFN packages, PCB and FR4 type materials. They all utilize
diamond as an abrasive and the diamond (in most cases synthetic diamond) is what does
the actual cutting. The key is in choosing the right size diamonds for the particular
application at hand. When dealing with hubbed blades the exposure is to be considered
to ensure that there is enough blade to cover the material and sufficient room for wear.
When dealing with hubless blades the flange needs to be taken into account. The flange
is a metal hub that holds the blade in place and sets it in the spindle. In choosing the
right hubless blade one needs to keep in mind the inside diameter and outside diameter
of the flange to determine the right size blade that is needed. The essential specifications
for a blade are size (Inside Diameter and Outside Diameter), type (nickel, resin,
sintered, hubbed or hubless), thickness, grit size, and exposure. Some manufacturers use
different diamond concentrations and that is to be acknowledged as well.
16
bond matrix that is too hard will result in much slower cutting speeds and require
constant dressing to expose the next diamond layer. As rule of thumb, harder
materials such as sapphire and alumina generally require a softer bond. Whereas
softer and more brittle materials require a harder bond.
4.2.2 Diamond Grit Size (Mesh Size)
Diamond grit size (mesh size) plays a major role in determining the surface finish
quality, smoothness, level of chipping and material microstructure damage wish to
obtain. Finer mesh size diamonds such as 20 microns are much smaller in size than
coarser diamond particles. And will give a very smooth surface finish with minimal
amount of chipping on edges. These mesh sizes are usually used for fine cutting of a
full range of materials such as: LiNbO3, YVO4, GaAs and optical materials.
Courser diamond particles are much larger in diameter and are frequently used fast
cutting or material removal on more harder materials such as silicon carbide,
zirconia, Al2O3 and other advanced ceramics and high metallic content materials
which do not require a very fine surface finish.
The diamond grit size (mesh size) in a dicing blade also directly relates to the
number of crystals per carat and the free cutting capability of the dicing blade. The
smaller the mesh size, the larger the diamond crystals, while larger mesh size means
smaller diamond. A 30/40 mesh blocky diamond has about 660 crystals per carat,
while a 40/50 mesh diamond will have 1,700 crystals per carat. Specifying the
proper mesh size is the job of the dicing blade manufacturer. Producing the right
number of cutting points can maximize dicing blade life and minimize the machine
power requirements.
4.2.3 Diamond Concentration
The proportion and distribution of diamond abrasive particles, also known as
concentration, has an effect on overall cutting performance and price of precision
diamond blades. Diamond concentration, commonly referred to as CON, is a
measure of the amount of diamond contained in a diamond section of drill based
upon volume. Diamond concentration is usually defined as: Concentration 100 = 4.4
ct/cm layer volume (mesh size + bond). Based on this definition a concentration of
100 means that the diamond proportion is 25% by volume of diamond layer,
18
spacing between diamond particles and can accept more fine powder debris
generated from dicing. This typically creaser faster, more freer cutting blades
and better surface finish quality. Lower diamond concentration dicing blades
will however wear out faster than their high concentration counterparts.
Fewer vibration on the blade during cutting, due to increase blade stiffness.
Many operators note the cut or kerfs is cleaner and there is less chipping.
Hubbed type dicing blades are pre-dressed, hence requiring very simple and
shore dressing procedure.
20
All the operators will utilize and experiment with different flange types best
suited for their application
High cooling flange are available, allowing water directly onto the blade. This
provides better blade and substrate cooling, resulting in better cut quality and
longer blade life.
21
Low cost
Disadvantages:
Edge geometry is lost faster than with other types of dicing blades
Some disadvantages of resin bond dicing blades is resin bond must remain very
fragile in order to expose new diamonds. Resin bond is the softest of the all the
dicing bond matrixes. For this reason, strong and high quality diamonds cannot be
used in a resin bond. High quality diamonds are harder than a resin bond matrix and
would soon disintegrate the bond that keeps them in place. This brings about the
need for frequent blade dressing, causing the cut to lose its roundness or form.
Another disadvantage of resin bond is its high wear rate, lack of stiffness and
23
thickness limitation. Resin bond can cut hard and brittle materials fast, but will
provide much shorter life.
4.4.3 Electroplated (Nickel Bond) Dicing Blade
Electroplated (nickel bond) dicing blades shown in Figure 4.5, have a high
diamond concentration and give a freer, faster cutting action with minimum
heat generation. Diamonds have higher protrusion ratio, staying on the surface of
the cut allowing for fast material removal. Electroplated (nickel bond) dicing blades
last less than metal bond, resin bond, hybrid bond blades and are the least expensive
diamond blades available. Silicon wafer dicing is usually done with the plated
diamond blade (hubbed or hub less) which has proven most effective for this
application. The kerfs are typically in the 1 to 3 mils range using a nominal spindle
speed of 30,000 RPM with feed rates as high as 8 inch per seconds.
Advantages:
Disadvantages:
Nickel Bond
(microns)
--3-6
--------3-6
3-6
1-6
----17 - 30
3 - 10
3-6
--30 - 50
30 - 50
17 - 30
3-6
17 - 30
Metal Bond
(microns)
--2-6
--17
--------------10 - 17
------30 - 50
30 - 50
--9
---
Resin Bond
(microns)
53
9
45
45
53
30
------45 - 63
53
53
----88 - 105
----45
-----
It is important for the diamonds to be well protruded and exposed in order to easily
penetrate into the material being cut. Dicing blades that are poorly dressing will tend to
push the material, creating high loads, high cutting temperature or heat and poor cut
quality. This can also cause blade breakage.
Resin bond dicing blades have a soft binder and in most cases will require minimum
dressing, if any at all. Resin bond dicing blade are typically dressed in the material
being cut. This is why they are frequently called 'self dressing blades'.
Nickel bond and metal bond blades have much harder binder and much more aggressive
dressing is needed in order to achieve the above mentioned goals. Nickel bond dicing
blades require dressing. Hubbed nickel bond dicing blades are partly pre-dressed when
they are manufactured. And typically do not require any dressing. Dressing will remove
nickel built up or diamond protruding from the blade surface are sheared off.
Since nickel bond dicing blades are typically used on silicon. It is recommended to
conduct the dressing cycle also in silicon. Dressing programs usually involve various
steps of table speeds, starting slow and increasing until production speed is about to be
reached. Great care has to be taken that the dressing depth is deeper than the required
production cutting depth. This will insure that only dressed blade sections are used for
production cutting.
To ensure high quality process results, new blades have to be dressed before starting
production. This step is required to expose the cutting diamonds in the blade surface and
condition the blade for continuous work without dramatic changes in cut quality.
Dressing consists of cutting a certain length of material, starting at low feed rate and
increasing the rate until the target is reached.
The duration of the dressing process is usually based on post dicing inspection results.
Because the mechanism of this process is not fully understood, it tends to be a lengthy
procedure that affects productivity. Chipping may result if dressing time is too short. In
many cases, extra dressing time is used to maintain a margin of safety.
26
Depth
Table Speed
5 - 10 cuts
50 microns
50 mm/s
5 - 10 cuts
PD + 100 microns
10 mm/s
5 - 10 cuts
PD + 100 microns
20 mm/s
5 - 10 cuts
PD + 100 microns
30 mm/s
Where:
PD = production cutting depth
27
When cutting silicon most nickel bond hubbed dicing blades do not require dressing.
However on gallium wafers, dressing will be beneficial and increase blade life and
improve cut quality. It is specially recommended to dress blades used on gallium
wafers.
Sometimes a blade that requires dressing is mistaken for a defective blade (blade that
cannot be used). This is not necessarily the case. The most frequent cause of this affect
is a diamond particle or few diamond particles excessively protrudes from the nickel
bond matrix, causing excessive chipping. By dressing the blade, this problem will be
eliminated.
4.7 Cutting Speed
The RPM of your dicing saw should be variable, ranging from 10,000 to 40,000 RPM.
When using standard dicing blades such as 2", 3" and 4" diameter for example, blade
the best spindle speed is usually determined by the hardness of your material and the
depth of the cut. Diamond may break (fracture) at very high speeds and fall out at very
slow speeds. An optimum surface speed or RPM's must be selected to balance out the
two disadvantages. Diamond blade life will usually increase at slower cutting speeds.
However, the increase in labour costs, utilities costs, depreciation of equipment and
other overhead expenses. Will usually offset the saving of diamond blade life and other
consumables. Cutting speed and surface finish quality is often the most important
consideration when selecting the right diamond blade for the application. Diamond has
a higher impact strength than the material being machined. During the dicing operation,
the diamond ruptures the material by impact. Each diamond is able to transfer the
electrical power from your cutting machine, into momentum that breaks the material on
nano or micro level.
By increasing power on the dicing saw machine, the diamond blade RPM's and surface
speed will increase as well. Hence, each diamond will chip off a smaller amount of
material, reducing its impact force on material being machined and reducing cutting
resistance. In theory, by increasing surface speed or RPM's, each diamond should
receive a smaller impact force. However, because impact is supported by a smaller
volume, the impact force with this low volume is actually increased. There is a higher
probability that the diamond particles will break or shatter. Hence, cutting materials at
28
very low surface speeds, creates a large impact force between diamond and material
being machined. Although the diamond may not break, the risk that the diamond will be
pulled out of diamond blade and causing premature failure of the blade increases.
The RPMs of the machine spindle should be noted when selecting the right dicing
blade specification:
Blade thickness
Blade bond type such as resin bond, nickel bond or metal bond
Blade Type
Silicon
Hard Alumna
Green Ceramic (Wet)
Nickel Bond
Resin Bond
Nickel Bond
Nickel Bond
Carbide Blades
Resin Bond
Resin Bond
Nickel Bond
Resin Bond
Resin Bond
4.8 Coolant
The amount of coolant and its supply is of little importance when cutting silicon with
nickel bonded dicing. Most dicing saw used deionised water for this application. If the
wafers are sensitive to electrostatic charges, the required conductivity is set using CO2.
For this application single nozzle may be sufficient. However, when cutting ultra hard
and brittle materials, the coolant flow direction and position will play a major role in
determining blade life and performance.
Dual nozzle configuration is best suited to supply adequate amount of coolant at point
of contact between blade and material. Coolant should be pointed at blade point of
29
contact and leading edge of blade. The dual nozzle system provides two separate
streams of coolant into cutting zone at angle of cutting edge of the blade. Each stream
will cool one side of the blade. The nozzles should be as close as possible to the point
where the blade enters the substrate. Coolant flow should blast with high velocity into
the kerf to improve removing debris. Wide kerfs premature blade water is a result of
improper coolant amount or flow applied at cutting zone. By correctly position the
coolant stream in front of the blade, the coolant will flow on top of the material. In
addition, coolant will be drawn into the kerf.
When cutting silicon, the direction of cutting is not an ultimate importance. Often most
wafers are cut by moving the table back and forth. However, when cutting hard and
brittle materials this quiet different. The blade should enter into the material cutting
down. As the blade penetrates the surface of the material, chips removed by diamond
particles become smaller the deeper the blade penetrates. This cutting direction is most
optimal to provide best cut quality. When cutting in the opposite direction the blade
enters the substrate almost tangential. The chips removed are being small and start but
their size increases to maximize where the blade exits the face of the substrate. Much
chipping at the surface is the result. Cutting in the up direction creates more edge
chipping than cutting down. The spindle torque is noticed to be the large cutting up than
when cutting down.
4.9 Process Stability
Steady blade torque values indicate a stable process. Once the torque values for a
specific process have been established, the other setup parameters should be adjusted to
keep these values consistent. Inconsistency of torque values is an indication of deviation
in the process because of blade vibration. Blade vibration ends in blade breakage or
chipping and cracking damage to the wafer.
System operation at steady torque requires stabilization of the feed rate, spindle speed
and coolant flow. The coolant applies drag force on the blade, which makes a
significant contribution to the torque. To keep the coolant torque effect steady, the
coolant flow is controlled, ensuring steady flow of coolant and no changes in drag force.
When the dicing machines have steady coolant flow and all other parameters are under
control, a steady torque is maintained. Any deviations from steady torque, if recorded,
30
are due to uncontrolled factors. These include changes in coolant flow because of
nozzle clogging, changes in nozzle adjustment, blade-to-blade variation, blade condition
and operator errors.
Table 4.4 Matching Basic Material Properties to Blade Properties
Hard
Fine
Low
Soft
Soft
Coarse
High
Hard
High
Fine
Low
Soft
Low
Coarse
High
Hard
High
Coarse
High
Hard
Low
Fine
Low
Soft
Machine
Operating Speed
Feed Rate
Horsepower
Coolant Volume
Cutting Depth
Blade Action
Life
Cutting Rate
Old
Softer
Shorter
Faster
New
Harder
Longer
Slower
High
Harder
Longer
Slower
Low
Softer
Shorter
Faster
Fast
Softer
Shorter
Faster
Slow
Harder
Longer
Slower
High
Softer
Shorter
Faster
Low
Harder
Longer
Slower
High
Harder
Longer
Slower
Low
Softer
Shorter
Faster
Shallow
Softer
Shorter
Faster
Deep
Harder
Longer
Slower
31
32
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