5 pe a Ould 8-0-8: 8.00) ep te jot I————— Cogepxanne ———— — Ilpequcnopue Ko Bropomy usgaHMo. . . - 2... 6 Tipequcnosue x meppomy usqanmio . . - +. ee 7 Tuapa 1, [peamer muxposnexrpoumxu . . . . . . . . 10 1.1. Buegenue . . . re aS eee 1.2. Hurerpanbusie xen. feet eae 1,3. Oco6exHocTm nuTerpanbunx exeM wax HOBOTO THA auexTpowsix mpu60por Reece eee 1.4, Kparkuii neropmuecknit o6s0p. . 1... 2s es 20 1.5, Saxmowenne . . es BB Kourpossume ponpocst. 1. ee ed Taasa 2. onymposognmem ©. 2. ee ee 8 2.1, Bregenne . . 25 212. Crpyxrypa nonynpononmuxos | | 1) sl ll tt BB { 2.8. Hocurems sapaga . . sees) 2.4, Oueprermueckue yponiiu % aout... +. 88 215. Pacnpeneneuue wooureneli » sonax mposoaumocta | | | 36 ~ 2.6. Spherr noms. So AB + 217, PexomOunanna xocureneit | |. te 5B 2.8, Saxous qzuxenus woouTenelt B HonynponomuuKax | |. 63 Kontpossabie nonpocst. . . . ) ee ee TO Taasa 3. Hoaynposoguukossie nepexoasl M KOHTaKTSI . . 73 3.1. Brenenne . . ee eee reece 3.2. Daexrpouuo-auipouume nepexoat | |... ss ss TB 3.8. Kouraxrst noaynponoqume-Merant. 2... 1... 89 “4 84. Thana nonynposommnaiozenrpme. ©... + 95 Kourpompusie sonpoct. se OT Tyasa 4. Yuunoaspuste tpanouetopsr . . . 2... . 99 4.1, Brenenue . gee eres est geese sec ec te 09) 4.2. MUI-rpanaucropa 100 4.3, Tlonessie tpausmeropst. 2... . ee ee Kowrpossusie nompocst, . . 2.) 2. te 18d Taga 5. @uswyeckue npnumume paGorst Gunoaspxoro : ‘vpansucropa M tHpucropa. . . . . . . . . 125 Ibi -Beenemne ieee ce eet acre eesti eee aS Ib 2) Tippmenaumen eens ce ciate eet acete ee tee ceeiagg _ 5.3. Pacnpeneneuna mocurenei. . 1 1. 1 2. 1. 2 130 5.4, Koxxbunuentst yeunonna Toxa. | 2... . . 2. 1874 Ocuosss mutpooaerenpormin 5.5. Crarmueckue xapaxrepucraKy 5.6. Manocurnamsibie okBuBAaTeHTHBIC CXeMbI M1 + napamerpur 5.7. Tlepexonupie « acTorHsIe xapaxTepucTHKH 5.8. Tupucrop. ete ees eeeseeteece Kontpospuste sonpocsi. Tapa 6. Texnomornueckve OcHOBBI MMKpo3JleKTPOHMKH . Bregenne . s a Togrorosuremmanie onepanwa . Onuraxcua . . | Tepaarseckoe oxnenenne : . Jleruponanwe 6 .Tpapesue se . TexHmka MacoxK | Haxecenue sorkux naeox . Meramansanin . . 6.10. C6opouxste onepann « 6.11. Texxonorua ToxKonaenounsix ruGpuaMx IC 6.12. Texxosorua Toncronenowanx ru6puansix IC. Kontponsxnte pompocst. PORSSAOOS Chabon See [napa 7. Snementat wHTerpanbHsix cxem . » Baegenne . . Vsonauna o1ementos Tpansuerops n-p-n : i Pasnosuasoeru n-p-n-rpaxsuctopos . ‘Tpaxoucropm p-n-p . Unrerpansxsre yuonet Toaesoit rpanaucrop. MIXIL-rpansuctopst |. TlonynposogumKozne pesueropst 7.10, Hoaynposogumxosue xonmencaropsr. Shah Sans aaas Sena op wie 7.11. Onemexrst HC ua noaynposoguuxax rpynus Al 7.12. Snemexret naewounnx HC Kourponbubre pompoces. Taasa 8. Ocuoset umdposolt cxemorexumxn . 8.1. Buegenne . 8.2. Craruuecxuit pemu “apocreimero " Sunonapyoro xmoua. a xumoue . . Kaioy ¢ Gapsepom Morrest . Tepexmovaress T0xa : . M{\I1-rpausneropusie Kou. » Tlomexoycroituupocrs xmouek . Bucradimane avelixm m Tpurrepst . Tparrep Uaurra . fourpomsusie wompOCE. Bw mge og 9G earane e Tlepexogume npoueccst 2 npocreitures: Grnoaspxom 145 152 155 163 167 169 169 169 171 173 176 184 187 193 200 203 205 211 214 216 216 218 227 235, 241 244 247 248 258 264 271 214 280 282 282 284 293 303 305 310 322 326 330 334Conepwanne 5 Taaza 9, Ocnopst ananorosoit cxemorexuuKH 336 9.1. Buenenue. . . . ius ae ae ae aera ECE 336 9.2. Cocrasmwe mpausueropst | | 337 9.3. Craruuecxuit pexum mpocreiimero youmurenst 339 9.4. Tlepexogusre mpoyeccet B npocreiimmem yexuTene 347 9.5. Tipocreiiuime younureau ua MU\II-rpanaucropax . 352 9.6. [nbpepexumarsusie yeunutemn. eee 357 9.7. Qumrrepuele noBTopurem. . 2 2. 373 Ca are Bree ierierpeeten een etaeeeenstety 385 9.9. Buxonseie Kackanat . : 386 9.10. Crabumusarops uanpaxenun | 394 9.11. CraSwmcaropsr Toxa 400 Kowrpospusie Bonpocst. + 409 [mapa 10. Mnrerpannunte cxemat . 411 10.1. Brenexue 411 10.2. Jlormueckne omemenrer a » Samoa Tpausweropax . 412 10.8, Jlormuecxue anewentw Ha MJ[[L-rpaxoneropax . 426 10.4. Jloruuecxue snemexTat Ha coBMeMleHHEIX ounonapuerx « MOTI-rpasouetopax (BuKKMOTI) . 434 10.5, Jloruueckue onemeurst Ha omeDstx Tpastoncropax © ynpasamomumt mepexoqom merasia—nloaynposogunx (METI) 435 10.6. Hapamerpst soruueckHx amemesros . 436 10.7, Murerpansusie tparrepsr. 440 10.8. Sanommxaiomme yerpolicrsa. 446 10.9. Borpmme v crepxoompume murerpansase Gxbarm iat seodenee 453 10.10. Onepaguoussie yousunesn . 460 10.11. Hagesnocts unrerpansHsrx cxem 473 10.12. 3axmovenue . aa 479 Kourposbunre nompocsr. 480 Baxmouenne. Ilepcnextuser passuTaa MUKposNeKTpoHUKH. . . . . 483 JImrepatypa 488YOK 621.3. Go.77 BBK-32.252— cy Crenaxesko H. II. Ocxosst muxposaerrpoankn: Yue6. nocobue asia By- aon. — 2-e van, mepepas. 1 Aor. — M.: Jla6oparopua Basosnix Sxannii, 2001. — 488 c.: na. J1O uti PaceworpeHe ocoBmwe acHeKTE MuKpOSMeKTpOMMIGs: GusHYeCKMe, TeXHOTOTUYeCKHC w exenovexmimieckue. Haetea mpeacTanicune 06 YDosHe COBPeMCHHOM MUKDOMEKTPOMUKH, ©& Me- ‘ToRax, opercruax, upoGemax # mepeneKtumax. OGcyANAIOTCH AIIM HHTERPALThILIX CXEM H OxE- Morexsiika mudbponerx 4 anasioronsx FIC. Bo 2-m HageiDNM oTpaxetus Kopiie yMaNeuTaALIe AOctsKeHUA B OGnacTH MuKPOOAeKTPOIKU, HeTOMbayeMBle B HActoammlee BpeMa Ha MDAKTIKE. Tipegmasmavactca ana ctyfeuT0s paguorexElYeckix H PaAKopHIUYeCKNx Cue HAMHOCTEH nysop. Moker 611th Hosleatia IIKpOKOMY KPYTY CHENMANHCTOR, CRasailiEx ¢ COBAHMEN H axct ayaranueit pagoatextpomiolt anmaparyps: sa HC, Bropoe uaganne gaxuoro yse6Hore TocoGus nogroroputH: A.B, Wanbuos (ra.1, 2, 8), B. C. Hepmexxos (ra. 4, 5), SI. H. Tatpuxees (ra. 6, 7, saKmouerne), B. B. Benaxos (rx. 8, 9, 10) Tlo sonpocax npuoGperemta oGpamareca: B Mockne sJlaGoparopun Basossx 3uanuiiy (095) 955-03-98, e-mail: Ibz@aha.ru 3 Canxr-Herep6ypre «Tuanexrs (812) 247-98-01, e-mail: dialect@sndlet.ioffe.rssi.ru © Crenanenxo H.11., 2001 ISBN 5-93208-045-0 © Jlaboparopua Basossrx Sxannii, 2001 Vuebuoe maqaune Hi. II. Crenaxeuxo Ocsonsr mapoonexrporuntt Xynoutinn H. Josunckas. Texawvectmit penaxrop H. Hypaeneea. Korsmmiotepaaa seperxa B. Hoceno Tlognucano p nevate 25.11.00. Popmar 60x90'/,,. Tapsurypa Ikoxsuaa. Bymara ofeeruan. Nevarh odcersas. Yor. newt. 30,5, ‘Tupax 3000 9x3. Baxaa 3423 Visqareanctso MPOm1o HOUT ABAAUATE ner, 3a rH romtt tpya Mropa Masaosuva Crenanexko, ckonuasilerocs B 1982 v., oxasan AOOPY!O NOMOM HECKOABKUM NOKOCHHAM BEINYCKHUKOR PYCCKOASMIVHEIX BYSOB H CTYMeHTAM, OCRAMRABIIMM OCHOBEI MUKPoomeKT- PORBKH Ha auramlicKom 1 HenaHCKoM soRIKAX. K comareHisio, B HacToa- nyee spema Kura Hi. TI. Crenanenxo crana 6uGanorpadmueckoit peako- erbio. WIL. Crenanexko cnpazeysueo cuuran, uo wiKeHepy-cusuKy, cre- QMAAKSMpyIONeMycH TO MUKPOsIeKTPOHTKE, HEOOXOAUMO CHOSOAHO OpH- eHTMPOBATECA B TPeX ee GasORBIX COCTARUSIOMIUX: (HSHECKUX, TeXHO.10- THYCCKHX H CxeMOTEXHHYECK MX OCHORAX MUKPODTEKTPOHHBIX MPHOOPOR 1 erpyxtyp. Merononorus wanoxeuna m caxtHuecknit marepiast «OcHop MuKpo- SMeKTPOHRKH GeperkHO COKPAHEHEI B HOBOM ManaHUN, NOOTOMY MBI CHTA- ew Hi. Il. Crenaxemxo ocuorusm antopom xuuru. Hacrosujee usaasue nogrotosneHo yueHuKamH % copaTHuxanur H. IL. Crenanenxo, cosgaputero B 1965 r. » MH@Mi nepayw 2 CCCP xadeapy muxposuextpoxuxn. Ecrecr- BeHHO, ¥TO 7aHHOe MafaHMe — He mpoctoe nopTopeiue MaTepuasa T1po- uiisx ner. B yseOxoe MocoOue BKMOUeHDI HOBEIE yH_AMeHTATEHEIe JO- cTumenna 8 OGs1acTH MHKpODTeKTPOHMKH, NcTOAbayeMbre Celiac Ha MpAK- rHKe, B wacroamem vaqaHnu apropa Crapanuics yuecTs HOBBIe BeAHUA B Op- Tausanyy yae6Horo Mpoyecca, B uacTHOCTH, CHOGoAHOe TOCeMeHHe CTY Rextamy sexuuii. Tak, » Kouye Ka%kqOrO pagiea npMBeeHBI KOHTPOMD- Hele BOMpOCKI Wk caMOcTosTeMBHOl mpopaborKH. Boa pa6ora no nogroroake Honoro maqaHus REMOTNeHA CoTpymHKAMH xaenps! MuKpoorextpouuEn MMOH nog pyxososersom npodeccopa A.B, [ansuona. B. B. Bessxop, JI. H. [arpuxees, B. C. Mepmenxon, A. B. WansHosMipeaucnosue - ——— - K nepspomy v3AaHulo Muxposaexrpoxuxa Kak ueropuyeckuit oan pasbamna ssexTpoHMKs XapakrepHa OpranvuecKum eqUHCTBOM (buSHYeCKEX, TexHOWOrHYECKHX (rouxee, KOHCTpyKTHBHO-TexHONOTMNeCKUX) M CXEMOTEXHUYECKHX acrlex- tos. Tlosromy nomHoyenuas, THOPYeCKAR PaspAGOTKA KHTETPATbELIX CKOM. HEBOSMOMHA HH CHJRMH SKARCCHIECKUX? DUIHKOB-TeXHOsOFOB, CHOCO6- HBIX paspa0aTbIBATh OTAEAUBe MOAYNPOBORHMKOBEIE IPHOOPE, HO He SHA- KOMEIX HIM C1a60 SHAKOMBIX CO CKEMOTeXHHKOM, HM CumaMM *+KaaccH4e- CKUX> CXeMOTEXHMKOB, CHocobHBIX paspabaTHIBATh dbyHKIMoHATEHATE YSibi Ha omeMeHTapHBIX panuopeTatelt, Ho cna6o aHAKoMEX ¢ UORKOH x Tem 6onee TexHonorveli NonynposoquMKosnix npudopos. Cueyvasucr, pa- Soraiomnit B O6aacTM MMKposneKTPORMKH, JOIMKeH B PaBHol creneHM Bya- FeTS ce bususeckumm, TexHosOrHYeCKUMH H CXeMOTEXHMYECKANM OCHORA- MM, ToCse WerO, & SABMCHMOCTH OT KOHKPeTHBIX yonOBIsit, OH MOET MOMLY- MATH AONOABWTENbHYI MOgTOTORKY B TOM HUT MHOM HAmpAs.leHHM. B mactoaujee spema paspa6orauxu MHTerpamBHBIX cxeM BBITyCKAOTCA B paMKax HecKouBKHx WDKeHEpHO-pusMUECKHX cHeyKanaHOCTelt (0604, 0629 u gp.)', cbopmuposasmmxcs sagoaro 40 CraHOBeHMA MUKPODMeKT- pounku. Tostomy & yueGune nail 9THX CHeUManbHoCTelt B pagHoe Bpe- Ma OuuIH BueKeHL! TAKMe JoNOAHUTeRDHBIe AMCHUNAMHE, KAK «Muxpo- anextpouMKas, «Auaius H pacteT HETerpAIbHLIX cxem», «Pacuer m KOH- eTpyMpowaHue MUKpOoeMeHTOD HM MMKPOcKeMy M AD. Mpmonansne YcoBepiieneTBOBATb MPOhwAb chelManHcTos, MpuBeCTH ero B cooTReTCT- Bue ¢ saqayaMM, PemiaeMnmmn 8 OOsIACTH MUKpooseKTpOHHKH. ONHAKO, KAK HOKAIETBACT ONLIT, HM OHA 3 OTHX AUCUMIANH He ObecnedHBaer noMHO- TeHHOTO OBNAeHNA CXeMOTeXHUYeCKUMM OCHORAMM MiKpOSNeEKTPOHMKM, a SHAUNT eAMHCTEO ee TPex OCHOROMOMArAIOMIX acHeXTOR OcTaeTeH Hepe- menkok npobemoi. Apyrum xoswoxmim nytem wis BhinycKa paspaSoTuMKoB uuTerpamb- MBIX CXem ABAMeTCA youseHMe )USHKO-TeXHOsOrMYECKOH TOATOTOBKK HH- skehepos paguoTexHueckoro npodusta. C o7oik yembI0, HanpuMep, 3 yues- uniit nia chenmansyoctu 0705 suenen xype «Pusmreckwe OcHoRst KOHCT- PYEponaHMA uM TexHOOrHA POA», a Kypc «OmeKTpoNMEIe mpuopare mpeobpasonax & «neKTpoHHHe MPUOOPH! H NONYMPOBOREMKOREIE HETerpA- HbHBIe CXeMBI> . ORHAKO 9TH KYDCbI He BKJUOUAIOT B CeO cXEMOTeXHHIECKHE 1B gasvom mpequcnosuu womepa cneuuansuocteli ykasamsl no AaKHKM Ha 1980 p.— rog purxoga 8 cher nepsoro usqauua Kuure (pum. ped.).TIpequcsonne x mepromy waqaHui0 ACTIeKTI MHKPOSMeKTPOHMKM, A B KAACCHYECKUX KYPCAX, HOCBALLEHHEIX PagmosnexTpoHHsIM cxeMaM, CHENMDHKA 9THX ACTeKTOB He YURTHIBAeTCH. Ba mocueaHue yecaTs ner ANx CryeHTOB, cHeIMANHoMpyloUINXcs B 06- ZactH MHKPOINeXTPOHMKE, BLMYWWeHO HecKOnbKO yueOHHx mocooMit. He Malan Hx qocTOHHCTE H TeM Gonee mpMopurera, caeayeT Bce xe OTME- THT, TO OHM TOCBRIKeHEI AGO TOABKO (UsKYecKHM, 160 husHKO-Tex- HONOTHYecKHM 1 KOHCTPYKTHBHHIM acTeKtam MuxpoamextponuEN. B ro- paago Menbinedi cTereHM OHM KACaIOTCH gMeMeHTOS MHTErPAJbELIX CXEM, & TAaBHOe, ONT Ke coBCeM He garparnpawr cXeMOTeXHUKY. B qanuom yue6om noco6un qenaerea nombITKa Gomce HAM MeHee Ho;- HO OXapaKrepusowaTe Be COCTaBHBIe YacTK MHKpos.1eKTpoHMKH. Ocoboe BHUMAHMe yAeneHO TeM PAgneAM, KOTOpHe He NOAYYHAN AOMKHOTO OTpa- 2KHMA B yNOMAHYTO! yue6Hol auTeparype: (puanxe TpaxsMcTopos, TpaH- auCTOpHOH cXeMoTeXHUKe, a TaKKe OOuleli XApakTepucTuKe uMTerpaty- HBIX oxen. AxyeHT Ha 9TH PaseNs B ycaOBMAX OrpaHMueHHoro OGnEMA KHMTN He TosBoTUs CTOMS Ke MOAPOGHO HNOAET KOHCTPYKTHBHO-TexHO- Horuveckwe acneKTsl, BOMPOcH MeTPHKH M HeKoTOpsle Ap. OmHAKo ator HesOcTaTOK UpeACTABIAETCH He CTOs cylecTBEHHEIM, HOCKOABKY foros- HUTeABHBIC CBEACHHA MOPKHO TiovephinyTs us yHOMaHyTol muTepatypy. Virax, 8 ocHosy naHHoro y4eSxoro mocobHa No samsteny mosoxKeH cxC- TeMHbIi TOAXOR K MBNOKeHMIO MaTepHAA: OTAMBHAIe pasqers BsaKMmo- Caasanbt, padoraior ypyr Ha APyra MB KoMnAeKce cosaaior TOT oGuyNit cbyHaaMenT, Ha Oase KoToporo BOsMOmKHAa JalbHelMaa cleynanveaua ctygenta 3 o6tactu MuxpoonexpoHuKH, Yr0 KacaeTeR MHIKeHEPOB, KOTO- Pele To pogy paborb! JOWKHEI NpeososeTs «og_HOCTOpOHHOCTS» cBoelt nperxsei MOALOTOBKH, TO OHM MOLYT COCpeMOTOUNTS BHUMALKe cooTBeTcT- BeHHO Ha (PMGUKO-TeXHONOTMYECKHX HAM CXeMOTEXHMYECKHX Pasqenax. Pyxonogersyach CHcTeMHBIM NOgXo70M, aBTOp sxT0uHsI B yYeOHOe 10- coOue nce HeoSxoquMBIe pasqens! MUKPOONeKTPOHUKK, HesABHCuMO oT Toro, 470 HeKOTOPLIE V3 BUX ABAMOTCA NPeAMETAMH CHeMMAIDEBIX KYPCOR (wanpumep, «Dusuxa noaymposoquuKons, +TMonynposomumKozste npubo- pa», «Munyspcusie cxempi>, «Yeururenue ut. .), Taxyio T0uxy apenna PagAeAMOT, Kak HAM KAKETCH, H ABTOPAI Y2Ke BLINYMLEHHLIX HOcoGuii. O- HaKO ABTOp CUMTAN HeNPABHADHBIM MeXAHMWeCKH BKMOGATE B OCHOBbE MUKPOOMeKTPOHUKH BeCh MATePHaM YOMAHYTEIX KYPCOB fa2Ke B COKpA- ueHHom suge. Tlovtomy ator Marepuan Oni He TO.SKO TUNATesIBHO O7TO- pax, Ho u nepepaSoran B cooTHeTCTBUM C KOHKpeTHBIMM sagavaMy MUK- POSMIeKTPOHHKH, a TAK2Ke c YUeTOM BHYTPeHHel BoanMOCUASH pasAenoB, Hanpumep, 8 ra.2 He Bxs10veHDI TakHe caMH TO ceGe BAXKHEIe BOMPOCET, Kak 9eMeHTH KBAHTOBOMeXaHWuecKOi TeopHm TReEPAOTO Tea, apex rH Tanta 1 Uxosedcoua, pasmepuste adbexrs B TOHKHX nuleHKAx y ap. Via ‘aneaa TpaHsucTopos B ra. 4 u 5 PAccCMOTpeHbI To.teKO MaLOMOMHEIe TPas- SucTOpH, COCTABIOM\Me OCHOBY COBpeMeHHBIX MHTerpanBHAX cxem. YTO XacaeTcR TpaHaucTOpHBIx CXeM, TO HX HOMeHKJIaTypa PesKo COKpauleHa H Mpusefena 8 cooTBeTcTBHe c peaAbHbIMM KOHQurypauMaMn, UcHoNbaye-peauenose x nepsomy maqau0 9 MBIMM 8 MHKPooTeKTpoHMKe, HaMexena TaIWKE TPARHUMONHEH nOcKesOBA- TeMbHOCTh NPM MayeHMM ABYX OCHOBHBIX KTACCOR cXem: cHAuAA (r21. 8) paccmarpanaiores xioveRsIe cxeMEs, a gaTeM (r”1. 9) — yonmuTesTETe. He mevtee cnomnas saqaua scrana npx orGope MaTepnasa W BEIpAGOTXe MOTORMKH eo HatoxeHna orm. 10, nocasmexHoit peamsMaim wHTerpann- Heim exeMam. 3qech, Bo NOSeKAHMe MeOMpaRAALUBIX cmo%KHOCTeML, MPH MLAOCK BO MHOPHX CHYYAAX OTKAGATKCA OF PACCMOTPEHMA NOHRIX MPMHTyT- TMAMBHBIX CXEM it CocpenOTOUNTs BHUMALMe Ha CTPYKTYPHBIX cxeMax. Ta- Koi MoaXog coorsercrayer merogam npoexTupoBaxna coppemenibix BUC v Tem Gomee anmapatypst Ha ux ocHoue. «Ocnoset MukpoarexTpoHHKi” — nepBoe #3 Tpex yYeSHeIx nocoGuit, npesias- HANCHHSIX JIM BCECTOPOHHelt OAPOTORKH MEDKeHepOs-paspaSOTHAKOR HHTerpare- HbIx CXeM, T. &, CHUAMHCTOB, XOPOWIO 3HAKOMBIX CO BCEMH TpeMa aCrIeKTAMH MIK- posiexrponmKit’, Asrop wageercn, 470 ero samsicem, peanwoonannuiit B qanuoit KHHre, Gyner onoOpe crygeHTam, oaMHTepecoRAHHBIMH KadeapaMM, a TAKMe cHelMasINCTAMH, KOTOPHe BocHOMbayIOTCA C10 ANI caMonOALOTODEM. Bonee TOTO, OM MayeeTes, UTO co apemeHem yueOuEIt Kype «OcHoaBI MMKPoosEXT- POHMKH+, noctpoemmeit a cooTseTeTeNK co eTPYKTYPOH nANHOH xHMIH, craner TaKHM 2ke TpARHINOHHEIM, KAx Kypes «IlosmyMpoBoRHMKoBKIe NPN Gopbir uu «TeopeTuueckHe OCHOBEI INeKTPOTEXHUKHY. OTO, HECOMHEHHO, chocoGersonamo O51 KAK eMHHOOOpAsHIO NOATOTORKH cHenMANHeTOR ORHOTO 4 TOTO 2Ke NOH, TAK H ROAMMONONUMAHMO CHENMANHCTOR CMeOKHLIX mpoduaedk («onemeHTURHXOR> Hf eanMapaTypuInKoBs), HeHaSerHo BeTyTA- 1OUMAX B KONTAKT MPM paspaboTKe CHOMKHBIX MHKDODEKTPOHAX cHcTeM. Tipentaraemoe yueSxoe nocowe paccunrano Mpexse BCero HA cTyReHTOD, CHeLMATHSMpyIONIMXCA To MUKpooeKTpOHMKe B pAaMKax clequanbHocrelt 0604, 0629, 0648, 0701, 0705 x ap., a TakKe Ha HiDKeHepos, OKOMBINAX syoMI To oF cheyHaasHoctaM Goxee 7-10 ser xasaq. Oxo, BepoaTHO, 6yneT TosesHO cheyMEAHeTAM 110 PAAMOTEXHMKe, BBTUTCANTETbHOM TeXHUKe, xH- GepHerike, aBToMaTHKe, NOMepHTeNbHOH TexHAKe M APYTUM OSnACTAM Hay- KY VW TeXHMKM, CRAGAHHBIM ¢ MpUMeHeHHeM MHTerpaTEHRIX cxeM, Asrop Buparktaer HeKpeHitioio GnarogapHocTs po. C. H. Wany, npod. B. H. Jlymuy u fou. 10. E, HayMony sa noseamsie samevaxua 1 co- BeTLI, a TaKKe KomAeKTHBY Kadenps MUKpooreKTpoHUKM MM@H ga n0- Month B paGore % otpopmseHMH PykonMeH. Mi. I, Crenanenxo 2 VueGuue nocobua: Bepesun A. C., Movaaxuna O. P. «Texnonoria 1 xonerpypona- me MNTerpeABEBIX MUKDOCKEM?, Hog. «PaqUo K CBagbs, 1983 7. H AnexceH KoA. L., Haeypun H. H. «Muxpocxemorexumxas, wax, «Panuo ut cage», 1990 r. Ups. ped.)--~ Freee Y — Npeamert mukposnekTpoHukn 1.1. Bsegenne Pons MuKposmexTpoHuKu B COBpeMeHHOH HayKe u TexHMKe ‘TpymHo nepeonenuTs. Ona cnpazeqIMBO cuHTaeTCA KaTanHsaTOpoM Hay4Ho-rexuuueckoro mporpecca. CnekTp ee NpUMeHeHMA npocTH- paerca OT yHAAMeHTANBHMIX UCcHeAOBAHMIt AO NPUKAagHOrO uC- nomssosaHus. MukpoorekTponuka Bruner Ha Bce Hapoquoe xoastit- TBO, HO He HemlocpeACTBeHHO, a wepes nensiit pan cHenubuueckux orpacneit, TakMX Kak BLIUMCMHTeREHAR TexHMKa, MHhopMamnoH- HO-WSMepuTeMbELIe CUCTeMsI, po6oToTeXHuKa, MUKPOMponeccopst. Muxpossexrponuka, ovepequoit ucropwuecku obycnopaennrit 2Tan PasBUTHA BIEKTPORMKM M OHO U3 ee UCHOBHSIX Hallpanye- Hult, o6ecneymBaer IpHHUMNMaNbHo HOBLIe nyTH pelleuuA Haspes- mmx 3aqaq. Onexmponuxa — ato o6nacTS HaYKU, TeXHHKM U NPOMsBOACTBA, OXBaTSIBAIOUad HccmeAOBAHHe u PaspaboTKy aneKTpoHAEIx npubo- POB M IPHHWMNOB ux HCTONDsOBaHHA. Muxposnexmponuxa — st paayex anexrponuku, oxparsrBato- iit uecneqoBauus u paspaborky KauecTseHHo HoBOrO TuMIA onexT- poHHbix npuopos — unterpamsHerx MMKpocxem — u npHHyHNOB MX NIDHMeHeHua. Humezpaavnan muxpocxema (unm npocro wurerpanbuan cxema) eCTb COBOKYNHOCTB, Kak Mpabysto, SoAbitoro KoAMUeCTBAa BSAMMO- cBnsanmnix KommonenTos (rpansucropos, ”MOnOB, KoHAeHCATOpOB, pesMcTOpoB M 1T.0.), H3FOTOBeHHAad B eAMHOM TexHOMOTMTeCKOM murkne (Te. oMHOBpeMeHHO), Ha OAHOIt U TOI xe Hecymelt KouCr- PyKuMH — nodaoacKe — ¥ BEINONHAOMIAN ONpegeNeHHyIO byHK- mumio TMpeoSpasonauua wdopmanun. Tepmun suuterpanbHaa cxema> (MC)! orpasaer hax o6nequ- Henna (unrerpaltuu) orgembHEIx feTaneit — KOMMOHeHTOB — B KOHCTPYKTHBHO eqHHEIit MpHOop, a TakxKe akT yCNOKHeHUA BEI- 1 Integrated Cireuit (IC)LA, Baeze: it NONHAeMEIX 9THM MpuGopom hyHKUMit 10 cpasHeAMi c byRKUMA- MM OTENBHLIX KOMMOHeHTOB. Komnouextst, koroppie sxoqaT 8 coctas UC m Tem camsIM He Mo- TYT LITE BEIMETeHEI H3 Hee B KaueCTee CaMOcTOATeMbHLIX HageRHit, HaSbIBAIOTCA 9nemenmamu UC nim unmecparbnvimu snemenmamu, Ouu o6nayaior HeKOTOpEIMH OCOGeHHOCTAMM nO cpaBHeHUiO C TpaH- SHCTOPAMM H T.f., KOTOpLIe HAPOTABIMBAIOTCA B BHe KOHCTpyKTHB- HO OBocobNeHHBIX eAMHHY M CoeAMHAIOTCA B CxeMy yTeM naiiku. B ocose pasBuTua anekTpOHHKE exRHT HeNpepELBHOe ycmONHe- nue byHnuui, ssinomaemsix smexrpouHoit annaparypoii. Ha onpe- ACNCHHDIX 9TANAX CTAHOBMTCA HEBOIMOKHBIM pemlaTs HOBBIe saad crappIMM cpeycrsaMM WIM, Kak TOBOpsT, Ha OcHOBe CTapoii a2emen- muot 6a3vl, HapUMep C TOMOUTB10 a1eKTPOHHBIX NAMI WIM AMCK- peTHbIx TpaHsucTopos. OcHoBHEIMH bak TOpaMH, J1e%kalllMMH B OCHO- Be CMeHLI oleMeHTHOMt GasEt, ABMAIOTOA: HagexHOcTs, ra6apuTs Ww Macca, CTOMMOCTS mM MOLHOCTS. OcoSennocThIo H3qenMit MHKpoomeKTPOHMKM ABMIAeTCA BLICOKAR CTeleHb CIO%KHOCTH BbINOTHACMBIX MyHKuMii, WIA yero cosqaroTcA CXOMBE, B KOTOPLIX KOUUTICCTBO KOMMOHCHTOB UCIHCAACTeH MHLHO- Hamm. Orcioma ACHO, ¥TO obecneyNTS HanexXHOCTS (byHKIMOHMpoBa- HMA IPH COCRHHEHHM KOMILOHEHTOB BPYUHY!O — sayaya HeBBITIOHH- Mas. Equuctsenuum cnoco6om ee peltienua ssnaerca mpumenenwe KaueCTBeHHO HOBbIX BbICOKMX TeXHOJOrHil, [as usrorosneuun unrerpatsHnix cxem wcromssyeTen rpynmo- oit MeTo, MpoMsBOqCTBA u TMaHapHaAd TexHonOrAsA. Tpynnoeot memod mpoussogcrsa saxmouaeron 8 TOM, 4TO, Bo-nepBEIX, Ha OfHOi MMacTuHe NOnynpOBOAHMKOBOTO MaTepHana omHospemeHHo MsrorasaMBaerce GonbII0e KOMMUECTBO UHTerpamb- HBIX CX€M; BO-BTOPEIX, ECJIM NOSBOAET TeXHOOrH4eCKHA porecc, To ofHOBpeMeHHO O6paGarsiBaioTca AecATKM TaKUX NaacruE. Io- cae gazepitenus unKna usroToBlenua MC nmacruua paspesaerca B MBYX BIAUMHO-TepheHAMKYAAPHBIX HANpaBMeHUAX Ha OTAeMDHBIE Kpuctaanu, Kaxkauii “9 KoTOpux mpemcrasnaer coGoit HC. TInxanapuan mexnonceus — ato Taka opraxusanma TexHos0- ruueckoro Mponecca, Konya Bce eleMeHTHI M HX COCTaBAMOUHe co- aqaioTes B MHTerpamHolt cxeme nyTem ux @opMuUpoBaHMA vepes mnocKocTs®. 1 Ho-aurawienn chip (xm). 2 To-azrmuiiexu mockoers — plane.1.2, Murerpassune cxemnt 13 ranaos X wa M1acTHHe MoxkHO ROCTHis AByMa NYTAMM: yBenuueHH- eM pagmepa L1acTHHEI H yMexbiilenwem PaaMepos oTAeADHBIX 9s1e- MeHTOB. Oru o6a HanpaBreHMa uCnomsyioTcA paspaboTanKaMu. B sakmouenne sameTHM, ¥TO Be KonCTaNTsI, BxoAIIMe B dop- MYyay, He ABAMOTCA HM TOCTOAHHBIMH, HM 3asHcumeIMM mpyr oT apyra, MooTOMY aHaJIHS Ha MHHYMYyM CTOMMOCTH Ha caMOM Jeme 9B- AACTCH CLOMRHBIM H MHorobaxTopHBiM. 1.2. Hurerpanpunie cxempi B nponecce passurua mukpossextpouuxu (M9) Homeuxaarypa MC uenpepsiaxo usmenanace. Pnapuntii run MC 2 xacroamee spe- Ma — rloaynposoguuKossie HC. Mm u 6yyer nocBamexo ocHosuoe copepxanue sroro mocobus. Kaacenbuxauun HC. Knaccubuxagua HC moxer npoussonu- TEcs HO PAgAMLIM IPHSHAKAM, OFpaLUNMes afecs MALTS OLN. Ilo cnoco6y usrorosnenua 1 nomy4aemoit npH TOM crpyKType pas- SMYAIOT ABA NPHMANANMAT.HO pAgHEIX TuNa UBTerpanBHBIX CxeM: ToaynpoxoqMUKOBLIe HM naeHouHHIe. Tloaynposodnuxocas HC — 970 Muxpocxema, oxementst KoT0- poit Bprmoanensr B MpunosepxHocTHOM coe NomynpoBoyHUKOBOI nogmorkxn (puc. 1.2). tu HC cocrasamor ocuosy cospemenuoii MHKpoameK TpoHUKH. S10, al 4 et ts P ALT eT YI P Bl lard) be RA VZEZZZZIT, al” ieon 50 mew Pesnewop x Tpanauerop z = a “pean Puc, 1.2. Crpyktypa oaewenton moxynponogsEKosoit HC Haenounaa HC — oro muxpocxema, onemearbt KoTopoit BBITON- HeHbI B Bue PASHOFO Poa IVeHOK, HAHECeHHSIX HA TOBePXHOCTS suamexTpHiecKok nogmoxkKn (pHc. 1.3). B sapncimocrn oT caco- 6a HaHeceHMA IeHOK 1 cBasaHHOlt ¢ 9TUM HX TOMMMHO!t pABIHTA- 10T moukonzenounvie MC (rormgma meuoK 70 1-2 MKM) H mox cmonaenovnoe WC (rommuua nienok ot 10-20 MxM u Bolte).12 Taasa 1, Upeamer muxpoouerrpommu Oana am HeckonBKo TexHomOrMueckHX onepanuit npn usroros- enw MC saxmouaerca 8 coeqMHeHMH OTHEMBHEIX S/eEMeHTOR B CxXe- MY H NIPHCOeqUHeHMH Mx K CeNMaNBADIM KOHTAaXTHSIM TuIOMIaAKaM, Tlostomy Heo6xoqumo, uToObr BIBOABI BCeX BeMeHTOB M KOHTAKT- HBIe NOMARKM HAXOAWAMCH B OAHOM MOcKOcTH. Taky! BOsMOxX- HocTs oSecneumpaer riaHapHan Texnonorua. unanbuas onepayua — xopnycupoeanue — 910 nomemexue MIC B kopmyc ¢ mpucoeqMHeHHeM KOHTAKTHEIX MMOWaqOK K HOMK- kam MC (puc. 1.1). He HC 7 a ae TH RT| He jk T . 6) ° Pue. 1.1. Vanoctpauxa wsrorosmenus mpocreiamelt unrerpanenoit cxemer: @ — xpemumesay naactuHa c ¢KOMNAeKTAME> 43 ABYx TPAHSKcTOpOB, AHORA 4M pesucTopa; 6 — MexcoemMBenIIT oxeMeHTOR BAYTPH +KOMIVIeKTA® (aaaxapuas texxozorua); 6 — rotosaa MC 3 Kopnyce Croumocrs D oguoit MC (oquoro xpucranna) ynpomexnno moxH0 BBIYMCAUTD CreqyionuM o6pasom: ~f[4e4 +e, xXY Zz Tae A — saTpaTs! Ha Hay¥HO-MCCAeAOBRATeEALCKHe M OMbITHO-KOHCT- PyKTopexue paorsr 10 cossanmi0 HC; B— sarparsr xa rexuonorn- ueckoe o6opyqoBanue, Nomemjenue u p.; C — TeKyn{Me pacxogbi Ha MaTepwamst, sneKrposHeprmo, sapaGoTHyI0 TMaTy, 8 MepecueTe Ha oany umacrany; Z — KomMuecrBo T1aCTHH, MsroroBNAeMsIx 70 AMOPTH3AI[HM OCHOBHEIX MPOMSBOACTBeHHEIX coupes; X — Komnue- crso Kpucrasios Ha nactune; Y — ornomenue romsx HC x Ko- AuueCTBY, SaNYINeHHOMY B MPOHsBOACTBO B Ha¥ase ero. Kpome ovesigisrx KOMMeHTapMes OTHOCHTeTBHO saTpaT, HY:KHO orMeruTs caemyiouyee. Vsenuuenue Y nocruracrea cosqanuem pee Gonee coppeMenHoit TexHonorun, no-xanyit, nauOomee croKHOH H uncroit cpeaM MHorux Hogelimmmx mponspogcrs. Pocta unera KpHc-4 HunyKruBHOCTH Pue. 1.3. Crpyrypa sxemenros mexounoit HC: 1— pepxusa oOknagke; 2 — umKuRA oGknanxa; 3 — aNoNeRTpEK; 4 = coequmutemsuan weTanaieckas moNOcKa Tockonsky go cux lop HuKakad KOMOuNaNMa HamenmDx TeHOK He MOsROMAeT NOAYUNTh aKTHBHBIE oeMeNTSI TNA TpaHoH- ctopos, mtenounmre MC copepxat romsKo maccHBusIe onemenTHE (pesucropsr, KoufencaTopst a T.1.). Hostomy byakuum, Bermoma- emnie uncTo nnexousimn MC, xpaitue orpanwuenst. UroGsr mpeo- Rovers oTM orpanuuenua, nnexounyio WC yononusior axrusHsiMn KOMTOHeHTAMH (OTAeNBHLIMH Tparancropamu aH WIC), pacnona- TAA ux Ha Tol Ke MOAMORKKe H COeAHHAA C MleHOUDIME aneMeHTa- wa, Torga nomyaeres MC, xoTopyio uasnimaior ru6puanoit. Pubpudnaa HC (ana TMC) — sto muxpocxema, xoropas mpen- crasaster coGoit KoMOMHANMO TLIeHOUMLIX HACCHBHBIX 91eMeHTOB 1 AKTHBHBIX KOMMOHEHTOB, pacnonoxkenux Ha OOmelt aMoneKTpH- ueckoi nogtoxke. Jjuckperubie KOMMOHeHTSI, BXOZmINe B COCTAR ruOpuqnoi MC, nasser nasecnwmu, noYepKuBAR 9TuM Hx 060- coGteHHOCTS OT OcHOBHOTO TexHONOrMuecKOrO NMKIa HOAyYeHHA TeHOUNOH “ACTH cXeMEI. Eye ommH TH «cmeurauasrxs HC, Koroperx coueraiores 10+ AYNPOBORHHKOBLIC H MNeHOUHBIe HHTeTpANBHBIe QeMeHTSI, HaaBI- BaioT CoBMemieHHEIMH. Cosmewennaa HC — oro mukpocxema, y Koropoit axrupusie SAeMCHTEI BINOMHEHEI B MPHIOBePXHOCTHOM coe HonynpoBOHH- KOMOrO KpucTasa (Kak y HONynpoBOANUKOEOM MC), a naccuBHEIe HaMeCeHLI B BHA MleHOK Ha MpeBApHTeMbHO MsOAMpoRAHy!O T10- BEPXHOCTS Toro 2Ke KpHcTanma (Kak y MHeHOUHOH HC). Cosmemennsre HC seirogust Torga, Korga HeoOXOqMMB BEICO- HMe HOMMHAMbI K BBICOKad cTaGusbHOCTS COMpoTHBIeHHI uM eMKO-1.2, Hurerpassmsre cxemst __ creii; aTH TpeGosaHua nerue oSecneuMTL c MoMONIbIO NNeHOUHEIX aeMeHTOB, UeM ¢ NOMOMHIO NOAYNPOBOAHMKOBEIX. Bo scex tunax MC mexcoeqmuenna onemeHTos ocyitecramaror- CA C MOMOMbIO TOHKMX MeTAaJIMYeCKMX NOM0COK, HalblweHHLIXx HAM HaHeCeHHBIX Ha TOBEPXHOCTS NOAMORKM MB BY2KHBIX MeCTAX KORTAKTHpyloMux ¢ COenMHSeMBIMH onemeHTamu. IIponecc Hane- C@HHA STHX COCAMHMTEMbHEIX NOMOCOK HasbIBAWT MEMaLUZayUeL, acaM ¢pHCyHoK» MexcoequHeHMit — memanaurectoit pas6odKot. Tlonynposogumkossie HC. B xacroamiee spema pasmmumor eneny- youyqe nonynposogumcossie MC: Gunorapsre, MOI (merann-oxn- cex-noaynposogunk) 1 BHMOII. Tlocnequme npegcrapnsiot coboit coueraHHe HepBbIX ABYX, M B HUX KOMOMHMpyi0Tca HoMOMHTeRDHBIE WX Kayecrsa. Texnonorm nonynposoquuxossrx MC ocHopana wa seruposa- HMM ToAynpoBoguMKosoit (kpemHMesoit) MmacTHHEl MOOvepemHO 70- HOPHBIMH M AKYeNTOPHEIMM MpHMecAMM, B pesyxETaTe “ero TOA HOBepxHOCTHIO O6pasyi0TCA TOHKMe COM C pasHBIM TuTIOM MposO- AMMOCTH M P—N-nepexogsl Ha rpanuyax ciloes. Orpenbubie COM Hc- HOMBSYIOTCA B KaYeCTBe PesHCTOpos, a p—n-Nepexopbr — B AHON- HBIX Hl TpaHsMcropHBix CTpyKTypax. Jlerupopanme lacTHHbI NpPMXO_MTCA OCyMeCTBAATS OKAMIEHO, T.€. Ha OTJENBHBIX YUACTKAX, PasfeMeHHEIX AOCTATOUHO ConbUIMMH paccrosuuamu. JloKansHoe merupopanue ocynecrBasertca ¢ m0MO- TYbIO CIeMAJIBHBIX MACOK ¢ OTBepCTMAMM, Yepes KOTOPEIe aTOMEI puMecw MponMKaror B TmacrMny Ha HYKHEIX yuacrKax. IIpu n3r0- TOBeHHM NomynposoquMKopnrx MC poan macku o6sruno urpaer Tileuka ZByOKUCH KpemHUA SiO,, MOKpLiBalONjad MoBepxHOCTS KpeM- Huepoli nilacTuusl. B stoi mienke cnenvanbHbIMH MeTOAaMM TpaBu- Pyeres HeoOxoguMan cosoKynHocrs orsepermit pasmuuoit opm 4M, Kak roBopaT, HeoOxoqumbiit pucynox (puc. 1.4). Orsepcrua B MACKax, B YaCTHOCTH B OKMCHOM Menke, HasbIBaIOT OXHaMU. Oxua, Macka Pue. 1.4. Okuewas macka c oxHaMM A”la NOKanbHoro nerupoRanust16 Tapa 1. [peamer mukpoonerrpommn Teneps xpatko oxapaxrepuayem cocrasnure wactm (omemerss) noaynposogHukoserx MC. Ocuosasm anemextom SunonapHsix HC ABAAeTCA N—P—N-TpaHsncrop: Ha eTO MSroTOBseHHe OpHeHTUpyeTcaA BeCh TexHONoruueckuit WuKA. Boe Apyrue 31eMeHTSI JOMKHEI U3TO- TABIMBATECA, NO BOSMOXAKHOCTH, OAHOBPeMeHHO C 9THM TpAaNsHCTO- pom, Ges AononuuresHBIX TexHONOTH¥ecKMX omepanuii. Ocuosusim oxementom MII HC asaserea MUIII-rpansucrop. Vsrorosnenve Apyrux omlemenTos Tak:xe MoAcTpamsaerca Noy 6a- S0BbIit TpaHsHcTop, Omements! GrmonapHoit MC neo6xoqumo Tem uM WHIM CIIOCO- Gom H301mpoBaTE Apyr OT Apyra C TeM, uTOOBI OH He B3auMORelicT- Bopanu Yepes KpycTasn. Onements1 MOII MC ue ny2xkgaiorca B chenmanpHoli nsonaquH ApYT oT Apyra, TAK Kak BsaMMoyelicraMe Mex~Y CMe2KHSIM_ MOII-rpansucropamu ue uMeer mecta. B rom — ogno 13 rnaBnsrx mpemmyiyecrs MOII MC no cpasxenvio c Gunonapueimu. Xapaxrepuaa ocobennocrs nozynposogumKosux MC cocrour B TOM, ¥TO CpeqM HX 9TeMeHTOB OTCyTCTBYIOT KATYIUKM MHAYKTUBHO- rH u, Tem Gonee, rpauchopmaropsi. 9ro OOnacHAeTCA TeM, YTO 40 CHX NOP He yAal0cb MCHIONb30BaTb B TEEpAOM Tele Kakoe-1uG60 bu- SHUeCKOe ABIEHHE, IKBUBAMCHTHOE WEKTPOMATHHTHON HHAYKOMH. Tlosromy npu paspaGorxe MC crapaiorca peanusosarh Heobxoqu- Mylo @yHKIUNO Ges MCNOMSsoRANMA MHAYKTHBHOCTe;l, UTO B GOMb- umucrse cnyuaes ygaeres. Ecnu 2ke KaTylIKa MHAYKTUBHOCTH HH Tpanchopmarop mpuynuMMassHo HeOOxXoqUMeL, UX NPHxO_MTCH HC HOAb8OBATb B BUC HABECHEIX KOMIOHeHTOB. Pasmepsi KpucrasioB y cospeMeHHBIX MoAyNpOBORHMKOBBIX MIC Hocruraor 20 x 20 mm, Yem Connme nnomays KpHcTania, Tem 60- nee cxoxxuy10, Gonee muorosmemexTHyl0 MC moxkHO Ha HeM pasmec- Tare. Ip ognoit w Toit axe nnomaaM KpHcTanna MooKHO yBenMUNTD KONMYeCTBO 9/eMeHTOB, yMeHbUIAA MX PasMepbI H paccTosHHH M@KAY HUMH. ®ynkunouansuyi cnoxuocrs HC npuuaro xapaxrepusozaTe cmenenbio unmeepayuu, T.e. KONMYeCTBOM aneMeHTOB (walle BCeTo YpaHsucropos) Ha xpycranne, MakcuMaibuan crenex» HETerpa- 1am coctasnaer 10° snementos Ha Kpuctanae. Ilossimexue crene- HH HHTerpanun (a BMecTe c Helo H CIO-KHOCTH PYHKNUH, BEIMOTHA- emsrx HC) — onua us rnapxerx Tenqennuit 8 MUKPOSMeKTpoHUKe.1.2. Hurrerpastsunse cxemst eae a7 Tix Konmuectsensoii oueHxu crenenm uwxTerpayum ucnomeyior yerosHait xoxp@unuent k = 1gN. B sazmcumocru or ero sHauveHna unrer- PANLUBIe CXEMSI HASbIRAWTCH N0-pasHoM: k<2(N < 100) — unrerpansuan cxema (MC); 25(N > 10°) — ceepxoommasx muverpamuas cxeua (CBHC). Huxe npypegenst aurmuticnue o6osnayenua a Mx pacummbpon- KM: IC — Integrated Circuit; MSI — Medium Scale Integration; LSI — Large Scale Integration; VLSI — Very Large Scale Integration. Kpome crenenm unrerparuu, ucnonpayir ene raxoi noxasa- Tens, Kak n.nomnocme ynaxoexu — KoMuecTBO atemenTos (ame BCeTO TpaH3HcTOpos) Ha enMHMIY NAOMaqM Kpucranna. Dror noKa- gareny, Koropsiit xapakrepuayer riaBAbim O6pasoM ypoBeHs Tex- HONOTHM, B HacToAMee Bpema cocrasraer jo 500-1000 anemen- Ton/mM?. TuOpugusie HC. Inenounnie, a snaurr, u ru6pugusie HC B sa- BMCHMOCTH OT TeXHONOrMM MSTOTOBNeHMA feNATCH Ha TONCTO- & TOHKOMNeHOWHEIe. Toncronuenounsie TMC (o6osHaumm ux Tcl AMC) usrorasnupaior- ca BecbMa mpocro. Ha qusTeKTpHYecKy10 MNacTHHKY-No@ioKky Ha- HocaT nacmbt pasuoro cocraza. [Iposogamme macrst o6ecneyBaior Me7KCOeAMHCHHA 9JleMeHTOB, OGKaAKH KOHACHCATOPOB M BLIBOJEI K UITSIpbKaM KOpilyca; pesvcTuBHEIe — noyyenue pesucropos; 4Ma- JekTpHueckne — H30NAHIO MeKAy OOKTa_KAMH KOHAeHCATOPOB 1 o6uly10 samuTy noBepxHocTu rorosoH TMC. Kaxkpnrit cro jomKen MMeT CBOIO KOHUrYpaNMO, cBoit pucyHox. Hosromy mpy usroTos- HMM K@KAOTO chon Nacry HaHOCAT yepes CBOIO Macky — mpaga- pem — c oKHaMM B Tex MecTaX, Kya JONKHA NoMacTs Nacta qaHHO- ro cnoa. Ilocne sroro mpuxmeusaior HabecHsIe KOMNOHEHTBI H Coe- AMHAIOT UX BBIBOABI C KOHMAKMHvIMU nLoOWadKamu. Touxonnenowxsre PMC (o6osnauum ux TRPHC) nsrorasnnsaror- cA mo Gonee cnoxHol TexHonorum, uem TeTMC. Kaaccuyeckan TOHKOMMeHOuHaA TeXHONOTMA XApaKTepHa TEM, ¥TO TINeHKM OCAXK- AawTCH Ha NOAMOKKy M3 Tas0BOi dasbl. Berpacrus ouepequy1o MNeHKY, MeHAIOT XHMMVeCKuit COCTaB rasa M TeM CaMBIM 91eKTpO- usmueckue cpoilicrsa cnexyiomeit nnenxu. Takum o6pasom nooue-18 Tana 1, Tpeqmer mexpoonexrpommrn PeaHO HOAyYaOT NpORORAMIMe, PesMCTHBHDIE H AMONeKTPHUECKME cxon. Kouurypanua (pHcy#ok) Kaxkjoro com onpenenaerca 1160 Tpabapetom, Kak B cny4ae TeTMC, smGo macxoit, nogobuo oxue- voit Macke #8 noaympoBoqumonnx HC (cM. puc. 1.4). Hasecubie onementst 8 TTC, ax us TePHC, npwxneusaor Ha MOBePAHOCTS ToTOROH MAeHOMHOH YACTU CXeMBI HM coeAMUMOT C COOTBeTCTBYIOMUMH KOHTAKTHLIMH TOMagKaMM amemexToB. Crenens uuterpanun TMC ne moxer omenmpatsca tax 2e, Kak B cayyae noaynposoqHuKoBsx HC. Tem He meuee cyuecrayer rep- mun donwan THC (unm BEC), koropstit osuauaer, uo x coctas THC 8 Kavecrse wapecustx KOMMOueHTOR BXOgAT He OrgenbHste ‘Tpausucropst, a uesble nomynposoguuKonsie IC. 1.3, OcoG6ennocrn nuTerpanbHEIx cxem Kak HOBOrO THNA 31eKTPOHHBIX MpH6opoB Mockonsxy HC, nogo6u0 Tpaxsucropy, mpepcrasaser co6oii KoH- CTpyKTHBHOe emMHOe MeNOe, BLINOMHAer ONpeReNeHHY!O YHKINMIO H AOWKNA yROBNETBOpATL oNperenenmM TpeGonanHaM Mp nersrTa- HMAX, NOcTaBKax u 9KCTLyaTANWM, OHA OTHOCHTCH K Paspspy aeKT- POHHEIX NPHGopos. OpHako To cpaBHeHUIO ¢ RHOMOM, TpaksHCTOPOM ut.n. AC spaserca KavecrseHHo HOBBIM THOM mpHGopa. Tepéan — znasnax ocoGennocm» HC Kak anexrpounoro npy60o- Pa COCTOHT B TOM, YTO OHA CAMOCTOATeILHO BEINOMHAET sakoHueH- Hyl0, ¥ACTO BeceMa CNOMRHYI0 YHKIWHO, Tora Kak o1eMeHTapHBIe aNeKTpOHHbie NpHOopsl BLINOTHAIOT aHanorMunyo (PyHKEMIO TONb- Ko B aucamOxe c ApyruMM KomMoHeHTamH. Hanpumep, oTzemsHstit TpaxoucTop He momkeT ObecneuuTS yoHneHMe curHana utH sanomn- danue muopmanuu. [lia ororo ny2kHO u3 HeCKOTHKUX TpaHsucTO- POB, PesHcTOpon H APYTHX KOMTOHEHTOB CobpaTs (ciasTs) cooTBeT- ereyiomyio cxemy. B MuxpooexTponMke 2Ke ykasaHHBie byHKUMM BEINOAUAOTCA OAHUM TIpHOOpoM — uHTerpanbHoit cxemoil: ona mo- Ke? OLIT YCMINTeTeM, JANOMMHAIOINMM YCTPOHCTEOM Mm T.I. Bmopoit eaxcnoii ocosennocmoio HC asnaerca 70, ¥r0 noBstme- une byHkIMOHaTeHOI cnomHNOCTH sTOrO MpHGopa No cpaBHeHMHO c ateMeHTapHLIMM He CONPoBOKjaeTeA YXyALIeEHHeM KaKOrO-nuGO H3 OCHOBHBIX NokasaTevieli (HageKHOCTS, CrouMOCTS H T.1.). Bonee ‘Toro, Bce STH MOKasaTenu yayaulawrcs. Tlockompxy ra6apursr “ Macca mpocreix m cpeaxux HC 61usKn & raGapuTaM H MaCCe AHCKPeTHBIX TPAHOMeTOpOB, MONO cuHTATD,1.3, OcoSeamocru mnterpasmmnix exe 19 UTO B MepBOM NpHGNWKeHNH BHIMTPHII To ITHM NOKasATenAM mpa mepexoye OT AMCKpeTHEIX cxeM K HHTerpasbubIM onmpemenserca cTeneHbio MHTerpayMu M MoxeT AOcTHraTs CoTeH M THICHY past. Tlockomsky ajexkHocth paGorst nonynpoxoA”HUKoBOTO npAGopa B alluapatype Onpewelaerca Upexje BCeTO KOAMYECTBOM IAAHEIX H (8 Mensmeit crenenu) caapasrx coequnenuit, To UC, y Koropsrx MeKCOCAMHEHMA STeMeHTOB OCyINecTBIMOTCA MyTeM MeTammHsa- uuu (T.e. Ges naiikm HM cBapKM), O6naqaoT 3aBeqOMO NOBEIMeHHOI Ham@KHOCTHIO Mo CpaBHeHMO C AMCKpeTHSIMM CX¢MAMM, BEINOTHA- HOIHMH Ty 2Ke cbynKnmo. Ilo Mepe yBenmuenna crenenm uHTerpa- WHM 3TOT BBIMTpBIL BOspacTaer. Tlocxonsky sce snemeutst MC usrorapausaiorca B eqMHOM Tex- HONOrHuecKOM HME, TO KoAMUECTBO TexHONOrMYecKUX omepannit HO MX MSProTOBNeHMIO He HaMHOTO MpesbiiiiaeT KOAMYeCTBO OTepa- mui n0 waroropnenmo oTgen»Horo Tpaxsucropa. Tosromy cron- mocts HC mp npounx pasasix yonosuax 6.143Ka K CTOMMOCTH O7- HOTO TpaH3McTopa. 3HauMT, B 3aBMCHMMOCTH OT cTelleHM MHTerpa- WMH (MIM, TOUHee, OT MMOTHOCTH ynaKosKu), crouMOcTD o_HOTO anementa MC m0 cpasneum co crouMocTsi0 avamor“unoro mUCK- PeTHOrO KOMMOHeHTAa MO2XKeT OLITL B COTHM pa3 MeHbUTe. Takoe xe cooTHouieHue HMeeT MecTO MexK ty cTouMocTs0 HC uw cronmoctTsi0 aHanorMunod CXeMbI, BINOMHCHHOM Ha AMCKPETHEIX KOMMOHEHTAX. Tpemva ocobennocm» HC coctout 8 npenourmTensHocrH aKTuB- HbIX oeMeCHTOB Teped NaccHBHSIMH — MpPHHUMI, AMaMerpambHo TMPOTHBONONO-KHEIN TOMY, KoTOpsIit cBOliCTBeH AUCKpeTHOH TpaLsH- cTopHoit rexuuxe. B nocnegHeit akTMBHbIe KOMMOHEHTEI, OcobeHHO TpausHeropsi, HavGonee noporue, H MOTOMy ONTHMHSanusa cxeMBr Tp Npounx paBHbIX YCMOBMAX COCTOMT B YMeHbINeHUM KONMUeCTEA aKTHBHBIX KoMMOHeHTOB. B MC geno o6crour uxaue: y Hux saqana CTOMMOCTS He ayleMeHTa, a KpUCTanna; NosToMy Wemecoo6pasHo pas- MemlaTs Ha Kpycrasmme Kak MO2XKHO GONbIIe aeMeHTOB C MMHUMANE- Holt Tuonyamsio. Manimmanbuyro Tiomapy HMeIoT aKTMBHETe amemeH- ‘TbI — TpaHSMCTOpsI H AMOAL, A MakCHMAN»HY:0 — naccHBHEre. Cne- Aoparenbuo, onTumansHan MC — oto UC, y xoropoit caeqenst MHHMMYMY KOMMYeCTBO M HOMMHAsEI PesHCTOpoS H, OCOGeHHO, KOH- Aexcatopos. 1 Towser puurpeun B raGapuTax m Macce TpyAKO oleHuTS TeopeTuecKHM pacce- tom, Tax xax HC uametor apyrue TuMOpasMepsr KOPAYCOR I GOMLINCE 4IECTO BELBO- op, Hem oneMenTapHLie KOMMOHeHTSI.Yemsepman ocobennocm» HC cassava c Tem, “70 cMerkubIe o1e- MeHTsI PacnomoxKeHs APY OT NPyra Ha PACCTOAHUM, HSMepsxeMOM B MKM WIM onax MKM. Ha TakKMX MamsIxX paccToaHuax pasimune anexrpousmueckax cpolicrs MarepHana matoBepoATHO, a cueqoBa- TeNbHO, ManoneponteH m sHAuNTeAbuBIit pasdpoc napamerpos y cMe*xHBIX 9memeHTOB. Mave rosops, LapaMeTpbI CMexKHBIX a1emMeH- TOB BIAHMOCBAAHEI — KoppemHpoBaus. Ira Koppessnua coxpanta- eTCH 1 TIpM HaMeHeHWM TeMMepaTyPsI: Y CMe>KHEIX oeMeHTOR TeM- mepatypusie kosbuuvenrst mapamerpos mpakruyecku onuHaKoBLt. Koppetanua meskay mapaMerpaMn cme:kHEIX sneMeHTop ucTOmBoy- etc Mp mpoextuporanim HexoTopHx HC ¢ Hemsio cumsHTh Brns- wie pas6poca mapamerpos u usMeHeHuit Temmeparypst. Tu6puausie MC roxe mpegcrapanior coSoit Tam snexrponasix mpnopos. Oguako HamMMMe HaBeCHLIX KOMTONeHTOB wexAeT Ux Me- nee crenmbwunnimu, vem rlonynponoauuxonsie MC, Ocraerca 6 cue byHmanentamuaa vepra zcaKoli HC — dbymxuvonansuan caoxHOCTS HpnOopa, 4TO, KAK H IPH uCHOADsoBAaHMM ToMyNpoBOA- wuxopsix MC, KavectBeHHo MeHaeT crpyXTypy onexTpoHHOit anna- parypst. Crenuunoit PHC xax npnGopa moryr Ob1Ts 1x60 BuIcoKHe HOMMHNANEI pesricropos U KONAeHCATOpOS, HeROCTMUMEIE B NOny- nponoguMkousix MC, 160 npennanonxocrs pesucropos, .60, Ha- KoueH, HORbIEMHAN dyHKMHOKAMEHAN cxoxKUOCTE. TC — sro rx6- kui, emenstii, oneparnpuo npoextupyemuiit Tan MC, xopomo mpu- cnocoStenmerik x pelwenmo crenMaTbuBIX, YaCTHBIx saftey. 1.4, Kparxnit ucropwuecknit 0630p Heropus mmxpoonexrpouuxn — uacrs ucTopax Texuuyeckoro mporpecca nocaequmx ser. Yaaernuxn ee — 5 nepayi0 ovepens TEopueckne paGoTHHK — yueHsie, usobpeTarenu m mH>KeHEpsI. Pesyaratet paspuris MuKPooMeKTPOHMKM B oHAtTeRBHOIK cTere- Hi YBeMWUMAH BOSMOAKHOCTH HaYKU M TeXHUKH, yCKOPHNH More Tpoueccel, caasadubIe ¢ HAyUHMIMM UCCHe_OBaHMAMM ¥ paspaboT- Koit HOBBIX BBICOKUX TexHONOrHit, cyMlecTBEHHO NoBLICHAM HpOHS- RO_UTeMbHOCTS TpyAa HO MHOMX OTpacnAX nMPoMBIMUIeHHOCTH, dbanracruuecku pacumpusin 2osMoxHOCTH MHtpopMaNHOHHEIX cHe- Tem H OKaga.1H cepbesHoc BAMAHMe Ha nporpece pasBUTHA TeNORe- uectsa B lenom. Huorga ucnompsyerea are HOBOe HASBAHMe co- BpeMeHHoro mepwoga HicTopuu YearoBeueCTBA — BeK uHibopMaTusa- MMH, HB 9TOM TO2Ke OFPOMHBIT BKsAL MHKpOSTeXxTPOHMKH.1.4, Kparsmit ucropiriecxmit 0630p 2a Tepavin craprosnim W1aroM K MHKPOssIeKTPOHHKe, HecoMHeHHo, 6bIm TMepexog OT MeKTPOHHBIX RAKYYMHHIX JaMM, B KOTOPEIX pu- MeHAJICA IPHHIMT YHpaBNeHMH BMeKTPOHHBIMM NOTOKAMH B BaKyy- Me, K TBep_OTeEABHLIM NpHGopam, THe HCMONBsoBANOCE ynpaBreHHe ABWKEHMEM NOABWKHEIX HocuTeTeH B HoMyNPoBOAKMKe. Dror war 6p1n caenax B na6opatopuu Bell Telephone Laboratories B 1948 r. M BaKmOUAtcH B us06peTeHuM TpaHsucropa. Konkypenuua mexpy BakyyMHbIMM aJIeKTPOHHSIMM aMnamy ¥ ‘Tpansucropamu conposoxpastacs GypHEIMM jeOaramM Cpenn crenn- AJMCTOR M, B MepBy!O ovepesb, CBASAHA C GONBUIMM KOIMUeCTBOM yeuleumo xeiicrBywomelt s1exrpounoli annapatypst, raBHBim ame- MeHTOM KoTopoit Orta oxeKrpounan samma. I[poussoqcrsenuurit WMKI Takoit anmapaTypsi O10 Xopoulo oTaxken M OHA IpuHOCHa Gonbmtyi0 npubsim NpousBoguTesam. Emre qBe OCHOBHEIe NPMYMHEI cnoco6craozanu ostomy. T'aasuaa saKmouanach B HecoBepmreHcrBe TeXHOMOPUM USPOTOBAeHHA TpaHsHcTopos, IpuBopsileit K HecTabu- AbHOCTH XapakTepueTHK NpM6opa, HegocTaTouHO't ero HaAexKNOCTH uf BxICOKOit crouMocTa. [[pyraa cBugaHa ¢ HeIlpHaATHeM HOBOTO NpH- Sopa GonsmuHcTsOM ChenMatucToR, BOCIUTAHHEIX Ha NpUMeHeHHH B oneKTponMKe BakyyMHEIx tam. HenocrarkH nepsirx o6pasros TpaH3HCTOPOB YKpemAMH yBepeuHOCTS PAaqMOuHKeHepos B Ipasy- WeHOCTH Mx COMHeHMit OTHOCHTeTEHO TpaRsuCTOpOB. Tepuble rpansuctopet 6biim ToueIHbIMHM HM, B RONOAHeHMe K yKa- SAHHBIM BbIIe HeAOCTATKaM, OGmagaNM BEICOKUM YPOBHeM IIYMOB. Marepuasom 18 ux MaroToBeHua GLI, B MepBy10 o¥epeNs, TepMa- nuit. lepexog or ToueunbIx TpaH3HCTOpos K MIOCKOCTHEIM 110 Bpe- MeHH Cosmas C MepexozoM OT repMaHHA K KpeMHHIO Ht GpIT ocynyecT- Baew 8 1953 r. Ha bape Texas Instrument Incorporation. Kpem- HHMeBbIii TpaHSMCTOp C BbIpAKeHHLIMM P—N-NepexoyaMM TOsBOAHT yseNMUnNTh MOMHOCTS TpaHsucTopa. IlosqHee mpomecc usrorosne- HUA TPaHsHCTOpa, OCHOBAHHBIT Ha AM bysuu, NosBoNMA HanaquTS Tpynnosoe NpoMsBoACTBO TpaHsuCTOpOB, UTO HeMen/eHHO cKasanoce Ha YMeHbINeHHH CTOMMOCTH 9THX MpHOopoB. B 1956 r. rpem amepu- KaHCKuM yuersm, [oxau, Bapguny u Bparreiiuy, 6sina mpucy:x- neva Ho6enesckan npemva lo dbusnke 3a uccneqosanua Torynpo- BOAHMKOB H OTKPKITHe TpansHcropHoro sdpexra. K sTomy Bpemenw yoKe craslo ACHO, ¥TO BO MHOrHx OTpacaAx NPUMeHeHMe TpaHsucTo- POB CHAbHO NOTECHMT WIM faxKe SAaMeHUT dAeKTPOHHYW sammy. Bmopoi — pemaronqwit war — noagnenue unterpasbHbIx CxeM. Tlepsaa wuterpamsuaa (6unosapnaa) cxema Getta vsroToRAeHa BTaana 1, Mpeamer muxpooaerrponunit 1961 r. ua bupme Fairchild Semiconductor u npeacrasanna co6oit ‘vpurrep, cocronuunit us yersrpex GHNOnApHEIX TPAHSHCTOpoR 1 ABYK pesucropos. Yoxe B 1963 r. bupmoi RCA Oxia Bemynjena neppat MOI unverpansHaa noruyeckaa cxema, B KOTOpoi Osmo 16 MOI-rpaxsucropos. Burcrpomy pacnpoctpadeHwio MHTerpasbHBIXx xem cnoco6crsoBaxa xopoo orpaSoraHHaa TexHosormueckad Gaga pH rpynMoBoM MpousBoqcTBe TpaxsucTopos. Takum o6pasom, ¢ MoMexta uo6perenva Tpaaucropa yo usTo- TOBNCHHA NepBLIX HHTerpaNEHRIX CXeM, NOCTYNMBIIMX Ha PHIHOK, mpouto uyTs Gonee 10 xer w yanee nocmegoBano oueHS GEICTpoe pasBuTHe MHKPooTeKTPOWHKH. B navane csoero nyt TpaisucTopst UpMMeHasMcE, rmaBHEIM O6- pasom, WA BOCHHEIX LeNell, TaK 2Ke KAK, BNPOYeM, HM MpemuecTsO- BABIIMe HM 9NeXTPOHHBe AaMMBI, M NocHeAyiomMe 3a HHMH HuTer- panbunre cxemsi. Kpome Toro, om cHoco6crsoBasiM pasBHTHIO Tex- NHK papMonemanna uM TenesnyjeHMa, a BnocnexcTBHH 1 KOMMBOTepHO! TexHUKM yoKe jIA Gonee WiMpoKOTO NpMMeHeHHS. Bwu10 G31, OmHaKo, coBepLIeHHO HeNPaByABHIM OTNAaTS TIOHO- CTHI0 NpHOpHTer TexHOOTHM B MHKPOSeKTPOHMKe, XOTA, HeCOMHeH- HO, MM@HHO B TeXHOJOTHH GbLIO 3aHATO HaMGonbIee KONMUECTEO CO- TPYAKMKOB H BNOKeHBI HaHOONUMe KanwTasto1. Ha camom geste 10- HuManMe @usyecKUx Mpomeccos B aleKTpouUKe HauMHam0ch c dyuamenransusrx paor mpouuioro Bea, BEITIOMNeNHEIX TAKUM MSBeCTHBIMM yueHpIMM Kak Dapageit m Makcpenn B oOmacTm akcne- PHMeHTAa H TeOpHH aeKTpHyecTBa 1 MarHeTHoMa; [lonos x MapKonu no nepeqaue curHanos vepes scbup; PreMuar, nonyunsmuit B Hayane Hamlero Beka NaTeHT Ha 9/leKTPOHHYI0 JaMuy, H HOcTexyIomero mH- POKoro passuTHA cBASH, paqHOBeMaHuA u TenesuyenuA. Bee oTH pa- Gors! noyrorosmmM NoABAeHe HOBLIX OTpacaelt NpOMBIIeHHOCTH H PHIHKOB C6BITAa ANA MpomyKTOB ee MponsBorCTBA. 71s NonmManua M pasBuTHa paboT B o6acTH husMKu TBepzorO Tena McKMOUNTeEMHYIO Poms cuIrpanu uccTenosanua Maxca TLran- ka, onyOauKosasmero B 1906 r, KBaHTOBy10 runoTesy, ObbACHAB- Iy!0 MoBexenHe amex Tponos B rBepyOM Tene. [Ina KoMMecrBeHHOTO oBbacHeHHA TOTO 2Ke ABMeHMA NocayKUNO KBAHTORO-MexaMWMue- ckoe ypasHenue 9. [pequurepa, koropoe 6n110 uM ony6.1MKOBaHO B 1926 r. Takum o6pasom, Teopermueckoe NOHUMAHMe aneKTpHuecKHX ABIeHMI HM MPOUeccos B MONYNpoROAUMKAX MpeNuecTBOBANO KONK- PeTHOMY IPUMeHeHMIO THX MPoNeccos, BONTOMeHEBIX B IpUGOPEI B Bre HHTerpanbHeix cxem.23 1.5. 3axmoyenne Tlepsnie sransi pasBuTHa MMKposteKTpoHMKA OBLIM XapaKTep- HBI TaBHyIM O6pasom Mporpeccom B o6sacTH TexHomormu MC. Ha DTHX oTAMAX COBEPIIEHCTBOBAMMCh MeTOAL HSONANLUH aNeMeHTOB, MeTOAbI NOBBIMCHHA CTelleHH MHTerpaguH, cnocobsl MOHTaKa Ha- BECHLIX KOMMOHEHTOE ut T.nu. Uro Kacaerca cxemorexHHKH (T.e. Kouurypalmu cxem, nosexanux udTerpayuu), TO Ha MepBbIX nopax OHa savMCTBOBanacy 3 apceana aucKperHol TpaHsucTop- noi omexTponuxu. Oguako Bckope CTato aCHO, UTO KAYeCTBEHHO HOBOii TeXHOMOTH- ueckoit peanusanuu, cBoltcrsenuoit MC, aonxus coorsercrsozaTs ajeKBaTHbie Cxemuble pemenua. JlameKo He Bce CXeMBI, CUMTABIIH- eCH THIMUHBIMH B AMCKPeTHOM TpaHsHCTOpHO! ameKTpOHMKe, OKa- BAIMCE IpHEMIeMBIMH B MUKpoo.TeKTpOHUKe. HI HaoSopoT, MHOTHE cXeMBI, KOTOpHIe B AUCKPeTHOM TpAHBHCTOpHOH omeKTpoHUKe CU TAIMCh «3KSOTH¥eCKMMM> MU He UMesIM WHpoKoro pacnpocrpave- HUA, B MHKPO9eKTPOHHKe OkasATHCh MpHeMAeMBIMH H yaKe OT Tumanbubimn. Iostomy cxemorexuuxa MC ormioqs ne cosiagaer c o6srunot Tpaxsucropuoit cxemorexEHMKoit. B npouecce passurua mMKpoanekTpOHMKu MoaByIOCch HeMaz0 cnenupuyeckux ozementos MC, Koropste He HMeror ananoros B TpaHsucTOpHOH CXeMOTeXHMKe M He BbINycKaiTca B KaueCTBE Au- CKperHsix NoryMpoBoyHMKOBEIX MpHOopon (Hanpumep, MHOrooMNT- Tepuuiit TpansucTop, npuGopt c sapanoBoil CBasBiO u Ap.). Hurer- PauLHLIe CXeMEI, B KOTOPEIX HCMoALsyioTer TaKMe crenmbuYecKue aaeMeHTSI, He MOTYT GIT AaxKe NPoMOMeNMpOBaHEI Ha WHCKpeT- HBIX KOMIOHeHTaxX. Bee cKasauHoe rosopuT 0 TOM, ¥TO MUKPoameKTpOHHKa KaK o6- AaCTh HAYKH H TEXHUKM HM B KOeM cuydae He CBOAMTCA K TexHONO- rua HC. Oua uuterpupyer 8 ceOe rpu pasnosnaunsix acrekTa: @u- suveckuil, mexnonozuyeckull u cremomexnuyecKud. 3HaHMe 9THX Tpex actlekToOB MUKposneKTpOHHKM TosBoAMeT paspaborunKy HC Tpesso ONeHMBATE Kak HOBEIe BAapHaHTH! smeMeHTHO OashI HIE cxemunix pemennit (c TouKM speHua Hx TexHomOrMuecKoit peannsa- IMM), Tak H HOBBIC BApMaHTBI TexHONOTMYeCKMX Mporeccos (c TOU- KM SPeHHA HX MPHTOAHOCTH ATA peanMsalMH AAHHBIX oeMeHTOB H HawHeIx cxem).